high and low refractive index coatings for optics

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OPTICS FOR ALL-WEBINAR (APRIL 14, 2021) HIGH AND LOW REFRACTIVE INDEX COATINGS FOR OPTICS Jukka Perento, Inkron Oy CONFIDENTIAL

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Page 1: HIGH AND LOW REFRACTIVE INDEX COATINGS FOR OPTICS

OPTICS FOR ALL-WEBINAR (APRIL 14, 2021)

HIGH AND LOW REFRACTIVE INDEX COATINGS FOR OPTICS

Jukka Perento, Inkron Oy

CONFIDENTIAL

Page 2: HIGH AND LOW REFRACTIVE INDEX COATINGS FOR OPTICS

TOPICS

Introduction

Portfolio for Optics

Nano-imprint lithography

Application and device level examples

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Page 3: HIGH AND LOW REFRACTIVE INDEX COATINGS FOR OPTICS

INKRON, SPECIALIST IN SILOXANE CHEMISTRY

INKRON – A NAGASE GROUP COMPANY

• R&D and manufacturing in Espoo, Finland. Opto-packaging team in Taiwan.

NAGASE AND NAGASE CHEMTEX

• Headquartered in Tokyo Japan. Related business manufacturing in Harima, Japan; Wuxi, China; and Ohio, USA.

• 7,200+ employees, global operations and annual turnover ca. US$8bn.

Japan

Taiwan

Finland

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Page 4: HIGH AND LOW REFRACTIVE INDEX COATINGS FOR OPTICS

LED PACKAGING

CONFIDENTIAL 4

• Die attach adhesives

• LED encapsulants

OPTICAL DEVICES

• Light management coatings

• Nano-imprint lithography, DOE

• High and low refractive index

TYPICAL MARKETS

PRINTED ELECTRONICS

• Printable inks

• Screen print, inkjet

• Structural adhesives

Page 5: HIGH AND LOW REFRACTIVE INDEX COATINGS FOR OPTICS

MATERIALS FOR OPTICS

CONFIDENTIAL 5

Page 6: HIGH AND LOW REFRACTIVE INDEX COATINGS FOR OPTICS

HIGH RI NIL COATINGS

CONFIDENTIAL 6

• RI range 1.55-1.9x

• Optically clear

• NIL processable

• Matching adhesion promoter

EDGE BLACKENING

• High RI (range 1.55-1.9x)

• High Optical density (OD)

• RI matched with the substrate

• Even 96 % reduction of backscatter (compared with “standard” black)

ESSENTIAL SOLUTIONS FOR AR, DOE AND OPTICS

LOW RI COATINGS

• Low RI, range 1.1-1.4

• Antireflection VIS/IR

• Gap filling, cladding layer

• Optically clear

Page 7: HIGH AND LOW REFRACTIVE INDEX COATINGS FOR OPTICS

IN SEARCH OF RIGHT REFRACTIVE INDEX COATING

n = 1.5 – 1.9x

Optical Coatings and NIL

n = 1.4 - 1.7

Optical Bonding

n = 1.1 - 1.4

Optical Coatings and Gap Fill

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Page 8: HIGH AND LOW REFRACTIVE INDEX COATINGS FOR OPTICS

HIGH RI NIL COATINGS’ OPTICAL PERFORMANCE

IOC n = 1.7 on glass*

IOC n = 1.8 on glass*

IOC n = 1.9 on glass*

IOC n = 1.8 on subst. corrected film transmission

IOC n = 1.9; Abbe = 17

IOC n = 1.8; Abbe = 19

IOC n = 1.7; Abbe = 36

*) Each measurement done with n matching Schott

RealView glass substrate

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Page 9: HIGH AND LOW REFRACTIVE INDEX COATINGS FOR OPTICS

CONFIDENTIAL 9

INKRON’S NIL FACILITY

Page 10: HIGH AND LOW REFRACTIVE INDEX COATINGS FOR OPTICS

NIL COATINGS’ IMPRINT PERFORMANCE

*Slanted grating master manufactured and provided by NIL Technology AsP.

• IOC with n = 1.7 – 1.92 shows great pattern fidelity in various stamp shapes and aspect ratios • Line/space gratings with linewidths down to 75nm with aspect ratio >3.5; Bi-directional 30° slanted

gratings with 400nm vertical height; Various pillar patterns (also non-spherical).

~ 50 nm residual layer

IOC 172 (n = 1.7) IOC 132 (n = 1.8) IOC 133 (n = 1.9)

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Page 11: HIGH AND LOW REFRACTIVE INDEX COATINGS FOR OPTICS

OPTICAL BLACK MATERIAL

1. Minimize the reflection at the edge of the glass by refractive index matching between the glass and optical black material.

2. Minimize light re-entering from the optical black coating to the high RI glass by having high absorbance black optical coating (high optical density, OD).

3. Minimized re-entering due to the scattering.

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Page 12: HIGH AND LOW REFRACTIVE INDEX COATINGS FOR OPTICS

OPTICAL BLACK AT LENS EDGE

96% decrease in reflectance when RI of the IOB coating is matched with the

glass wafer (n=1.9)

• Edge reflectance (%) drops from 10% to 1% with optical black coating • … and 96% (from 1% to 0.04%) with black coating n-value optimization• OD up to 5 with 25 um film thickness

Light reflectance on (n = 1.9) glass lens edge without and compared with different Inkron’s index of refraction optically black

coatings

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Page 13: HIGH AND LOW REFRACTIVE INDEX COATINGS FOR OPTICS

• Lens wafer to cover-lens stacking

LENS & HIGH/LOW-N STACKING

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Glass

GlassIAP-110 primer

IOC-133 RI 1.9

IBA-210 RI 1.4

Δn = 0.5 @589nm

Alternating:IOC n=2.05; 30nmIOC n=1.25; 130nm

• High – low refractive index layer stacking

Δn = 0.8 @589nm

GAP FILLING

Page 14: HIGH AND LOW REFRACTIVE INDEX COATINGS FOR OPTICS

APPLICATION EXAMPLES OF LOW RI COATINGS

CONFIDENTIAL 14

ANTIREFLECTION COATINGS

CLADDING LAYERS

• Particle free low RI, No haze or scatter

• Antireflection in VIS/IR

• Light guide optimization REFLECTED

PASSED

CLADDING

LIGHT- GUIDE

NO CLADDING

AR coating in visible area

AR coating in IR area

Page 15: HIGH AND LOW REFRACTIVE INDEX COATINGS FOR OPTICS

DEVICE LEVEL EXAMPLES

CONFIDENTIAL 15

Page 16: HIGH AND LOW REFRACTIVE INDEX COATINGS FOR OPTICS

3D SENSOR: TIME-OF-FLIGHT SENSOR

APPLICATION EXAMPLES

CONFIDENTIAL 16

• Sends a photon to the object, measures the return time of reflected light -> 3D depth map of the object

3D SENSOR: STRUCTURED LIGHT SENSOR

• Illuminates a known pattern on an object

• Pattern deformation used to calculate distance

AR GLASSES

• Waveguide (diffractive optics) for AR/XR glasses

DISPELIX AR GLASS DEMO

3D SENSORS

OTHER APPLICATIONS OF (DIFFRACTIVE) OPTICS

Page 17: HIGH AND LOW REFRACTIVE INDEX COATINGS FOR OPTICS

WWW.INKRON.COM

THANK YOU

[email protected]

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