High resolution in situ imagingin vacuum chambers

• Optical Microscopy• Hyperspectral Imaging• Microspot Spectroscopy• Surface Processing• Patterning• Process Monitoring• AFM/STM tip approach

Multiple configurations, offering:• working distances up to 500mm• imaging through vacuum viewport• resolution down to 1µm• DUV – NIR wavelengths• large field-of-view• mounts on standard CF flanges• customizable

Long working distance imaging and microscopy through vacuum viewportsDedicated designs compensate for optical aberrations of the viewport window.

Easy-to-use, stable mounting Using integrated adapters to standard CF flanges

Motorised focusing and alignmentConvenient control software, external interfaces

Range of camerasUse your own camera or choose from a range of testet high performance cameras

Customized solutions for your in situ imaging tasks!

Technologie Manufaktur GmbH&Co. KGinfo@technologie-manufaktur.de+49 (0) 551 20019260

Microspot Spectroscopy & MappingUtilizing photo- or electroluminescence, fluorescence, Raman, spectral reflection, scattering, hyperspectral imaging…

Diffraction limited resolutionDown to 1µm, wide field-of-view

DUV-NIR transmission Spectroscopy enabled systems featuring achromatic, optical designs for broadband operation from 200-2200 nm

Multiple illumination optionsTransmission, reflection, dark field imaging, polarization;Tunable DUV-NIR light source, LED, LASER coupling

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Spectral reflectivityHyperspectral Imaging

type working distance

opticalresolution

view-port

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LD-Mic 10x/0.25

110mm 1.0µm(@450nm)

DN63 DUV-NIR

ULD-Mic-1 200mm 3.3µm DN40 VIS

ULD-Mic-2 350mm 5.8µm DN40 VIS

ULD-Mic-3 450mm 7.5µm DN40 VIS

Standard lens types