HMX- 2000 Silicon micromachined piezoresistive humidity sensing chip based on shear stress hygrometry for direct measurement of relative vapor pressure. A dab of polymer flexes a modified strain gauge in reponse to humidity changes. HMX2000 die begins at $15.00 each for quantities up to 1,000 units. Reported to be radiation hard. Testing Warm/Cold response near RH~0 against a Honeywell HIH-3610 humidity sensor before and after radiation. Detection of FC72 Leak ??

Humidity Sensors Tests for F-PixelL. Cremaldi 3-25-04

N2

in

out

HMX T HIH

GAS BOX

HMX2000 DIE

hmx

-0.015

-0.010

-0.005

0.000

0.005

0 1000 2000 3000 4000 5000

Time (sec)

hih

0.00.51.01.52.02.5

0 1000 2000 3000 4000 5000

Time (sec)

temp

0510152025

0 1000 2000 3000 4000 5000

Time (sec)

COOL

DOWN

FC72

LEAK

H2O

LEAK

HMX

0.001

0.010 200 400 600 800 1000 1200 1400 1600

TIME(S)

VOLTS

Series1

POSSIBLE FC72 RESPONSE?

SUMMARY • HMX Sensor responding as advertised.• Tracking well with HIH sensor T>oC. • Possible sensitivity to FC72. • Test board and Radiation Tests Envisioned.• DCU Readout or Direct??