idaho microfabrication laboratory revision d 8/11/11 1 iml safety training et105, et107, et108a...

Idaho Microfabrication Laboratory

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IML SAFETY TRAININGET105, ET107, ET108A & ET106A

Peter MirandaDirector, Idaho Microfabrication Laboratory


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Topics

Lab EtiquetteGeneral Equipment InformationGeneral Lab Safety RulesGowning ProceduresHazardous ChemicalsHazardous GasesAccidental Chemical Spill ContainmentCleanroom AccessIML WebsiteEmergency Contacts


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ET107 (cleanroom) & ET105 Layout Class 1000 clean room

- < 1000 particles greater than 0.5µm in size for a given cubic foot of air.

in/out fromET105

105ET Process Lab

107

Cleanroom

106

Metrology Lab

108

SEM Lab

107

ETA -

Equipm

entRoom

CMP

PVD

Ion Mill

DDDD

wetbench

furnace

desk

desk

PVD

PVD

desk

spincoat

Etch

desk

SurfaceProfiler

OpticalProfiler

FESEM

SEM -EBSD

/EDS/EBL

desk

RTP

contactaligner

desk

desk

desk


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Cleanroom Equipment Capabilities Materials Science Research

Scanning Electron Microscopes (SEM) & (FESEM)

• Electron Backscatter Defraction (EBSD)

• Energy Dispersive Spectroscopy (EDS)

Integrated Circuit Fabrication Oxide/Diffusion Furnace Photolithography

• Spin coater• Contact aligner• Thermal Ovens

Wet bench processing Thin Film Deposition

Thermal Evaporator Magnetron Sputtering

Thin Film metrology Ellipsometer Nanospec Four point probe Optical profilometry

Dry Etch DRIE etcher Asher Ion Mill

CMP Wire Bonder Rapid Thermal Processor Various high powered

microscopes


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Cleanroom Gowning Procedures Cleanroom bunnysuits are intended to keep the cleanroom clean, not the wearer

safe. They do provide an extra layer of protection that may protect against minor spills and splashes, however, when using dangerous materials, a plastic or rubber apron should be used.

Do not enter gowning room with dirty shoes ie. mud, sand, etc. (use shoe covers located outside of cleanroom if needed.

Put on hood (all facial hair must be covered with hood, mask, etc.) Put on bunny suit Put on shoe covers Put on gloves, safety glasses

• Blue (Nitrile) gloves are used ONLY for non-chemical operationso Typical uses include working on vacuum systems, protecting substrates from contamination, operating

microscopes, operating equipment. o Because these gloves don't get contaminated with chemicals, you are permitted to operated door

handles and lab equipment with these gloves. • Yellow (Latex) gloves are to be used for all chemical operations.

o Latex gloves do NOT protect against all chemicals so additional gloves might need to be worn over the latex gloves for protection.

o Typical chemical operations are mixing acid solutions (except HF), using KOH, using etchants, using organic solvents or chemicals, etc.

o NEVER operate door handles or equipment while wearing yellow gloves. Residual chemicals on the gloves can contaminate surfaces and cause serious injury to future users.

Sign-in to cleanroom logbook Place single-use gowning gear in hamper, if you are a frequent user of the IML,

you can hang up your gear for the next time. A storage rack is located in the clean gowning are to enable limited (10 uses, or until shoe covers show particles) re-use for economic reasons.


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General Cleanroom Etiquette Rules and Guidelines for Personal Lab Behavior

Drinking, eating and gum-chewing are not allowed in any part of the lab. Full cleanroom attire must always be worn while in the cleanroom. Be discrete in coughing, sneezing, or blowing your nose. At the very least, turn away

from the processing area and change your gloves before commencing processing. Minimize the amount of materials stored in the lab. All personal items must be labeled

with your full name, and contact phone number. Acceptable Materials in the Cleanroom

Cleanroom notebooks and cleanroom paper Wafers and tweezers (put away when not in use). Pens (preferably ball-point). Materials with smooth, hard surfaces which can be cleaned with alcohol wipes.

The following materials are not considered cleanroom-compatible: Wood pulp-based paper products, which includes regular paper, tissues, cardboard,

books, and magazines. Styrofoam products. Any powders. Erasers, pencils, felt-tipped pens (other than Sharpie markers). Anything that can easily shred or aerosolizes; i.e., anything that may serve as a source of

particles.


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General Cleanroom Safety Rules No open toed shoes in ET105 or

ET107. No shorts or skirts allowed in

cleanroom. No loose long hair (hair must be

pulled back in a pony tail) Know your safety exits. Know where the eye wash

stations are. Know where the fire

extinguishers are located. Report any safety concerns to the

IML director.

wetbench

sputtertool

kensington

scope

storage

shelves

storageshelves

ellipsometercomputer/ nanos

peccontact aligner

EBSD

computer

SEM

SEM

computer

EDS

system

storage shelves

spin coater

diffusion/oxidationfurnaces

oven

shelves

chemicalstorage

chemical

storage

chemical

storage

chemical

storage

chemicalfrig

storagecabinet

storage shelves

single

wafer

cleaner

bransonasher

GOWNINGROOM

solventcabinet

Exits

CMP

CMPmonitorstation

desk

desk

desk

opticalmicroscope

CMP workbench

AFPPmicroscopes

worktable

RIE

etch

er

2LN

Etcherworkstation

cryopmp

thermalevap

worktable

roughpmp

vacpmp

CMPwaste

storage

cabinets

storagecabinets

storagecabinets

storageshelves

ionmill

i.m.

cabinet

smcabinet

Sputter Tool

PANEL

Elec.

wirebonder

h20

SEM

Column

FESEM

Computer

vacpmp

pwrsply

chiller2


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General Cleanroom Safety Rules Never work alone in cleanroom when working with hazardous chemicals. Use the

“buddy” system. Unlabeled chemicals are significant environmental and health hazards. When you

make up a solution, remember to label it. When labeling a solution, you should include the following: Name of the material contained Primary hazard of the material Person responsible for the material Date of filling or preparation

If your name, the substance, and a date are not present on any chemicals left out on the counters (specifically those in glassware), the chemicals will be disposed of. If any chemicals need to be left out on the counters for longer than 48 hours, the label should include the date prepared and the date the solution will be cleaned up. Be courteous and clean up you own chemicals in reasonable time frames.

Leaving the lab Clean up after yourself. Leave stations neat and ready for the next person to use. Remove

personal items from general-use areas after you are done processing. Label your work. Any materials you plan on taking out of the lab with you should be bagged to prevent

contamination. In the gowning room: remove your bunnysuit from the bottom up:

• Booties - Put booties in the appropriate bin. • Suit - Keep the sleeves, main body, and as much of the suit as possible off the floor.


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GENERAL EQUIPMENT SAFETY


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General Equipment Safety Dangerous Light Sources: Plasma, Ultraviolet lamps

UV Source on Mask Aligners, Pattern Generators Light from an Ar plasma in sputter deposition and ion etch tools

Thermal Evaporator Smocks, gloves, face mask, eyewear. Wipe down all working surfaces when your done working on tool.

Wet Bench Processing – Hazardous chemicals! Clean up area when you are done. Never leave unlabeled chemicals laying around. Wear chemical apron, face shield, gloves in addition to bunnysuit.

SEM Moving parts - pinch points

Dry Etch Cryo-tank, RF power

CMP Smock, gloves, eyewear Moving parts – pinch points


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CLEANROOM CHEMISTRY 101


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General Cleanroom Chemical Safety

Always review the MSDS sheets prior to using chemicals. Always wear PPE when working with chemicals. Always have a “buddy” present with working with hazardous

chemicals. Never have more than one chemical out at a time on the wet

bench. Never remove chemicals from the cleanroom. Never leave chemicals or chemistries out on the wet bench for

extended periods of time. Always clean up your area when you are done using

chemicals.


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Personal Protective Equipment (PPE)

Personal Protective Equipment Personal Protective Equipment (PPE) is not required just because it makes you look GOOFY. It is there to give you added protection against any accidents that may occur while working in the lab.

PPE is to be worn in addition to your bunny suit if you are working with chemicals.

There are several different types of PPE but you should always wear what is appropriate for your task. Safety Glasses or Chemical Goggles Lab Coat or chemical apron Gloves

Safety Glasses and Chemical Goggles Safety glasses and chemical goggles are not the same thing! Safety glasses protect your eyes from any type of flying debris. Chemical goggles can protect your eyes from flying debris. They also keep vapors, dust,

and splashed chemicals from getting into your eyes.


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General Cleanroom Chemical Safety(Glassware)

Prevent damage to glassware during handling and storage. Inspect glassware before and after each use. Discard any

cracked, broken, or damaged glassware. Thoroughly clean and decontaminate glassware after each use. NEVER put HF acid into glassware (use plastic beakers!) Guidelines for disposing of broken glass:

Do not pick up broken glass with bare or unprotected hands. Use a brush and dust pan to clean up broken glass. Remove broken glass in sinks by using tongs for large pieces and cotton held

by tongs for small pieces and slivers. Place all the recovered broken glass into the “sharps” container.


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HAZARDOUS CHEMICALS


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Cleanroom Hazardous ChemicalsAcids

pH <7Are typically soluble in water. Are corrosive. Form salts when mixed with bases. Turn litmus paper red. Litmus paper located above

wet bench and inside toolbox. Burn organic tissues and/or inorganic materials.


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Cleanroom Hazardous ChemicalsAcids

Acetic - CH3COOH Liquid and vapors cause severe burns to skin. Reacts vigorously with oxidizing agents and other

acids (particularly nitric). Odor similar to that of strong vinegar. Incompatible with most other acids. Store alone!

Chromic - H2CRO4 Liquid and vapors cause severe burns to skin. Corrosive to nasal passages. Contains a suspected

carcinogen. Hydrochloric - HCL

Highly corrosive to skin and mucous membranes. Repeated exposure causes erosion of teeth. Hydrofluoric - HF

Liquid and vapors cause burns that may not be immediately painful or visible. HF attacks glass. HF looks like water and can kill in small amounts. Found in Buffered Oxide Etch (BOE). Use only in plastic containers.

Nitric - HNO3 Highly corrosive to skin, mucous membranes and teeth. Highly reactive with acetic acid. Reacts

explosively with combustible organic or other oxidizers. Use only in glass containers. Phosphoric - H3PO4

Liquid is highly irritating to skin. Vapors are highly toxic. Contact with most metals causes formation of flammable and explosive hydrogen gas.

Sulfuric - H2SO4 Liquid and vapors are extremely corrosive to skin and mucous membranes. Generates heat upon

contact with water. Reacts with acetic acid. Keep away from water. Citric - C6H8O7

Skin and eye irritation


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Special Precaution on HF Hydrofluoric Acid

Hydrofluoric acid (HF) is EXTREMELY dangerous. Be extra attentive when working with HF. HF is colorless and odorless; it looks and smells like water. HF is an ingredient in many oxide etches which are used to etch glass. Because of the danger, only trained personnel should pour HF. According to DuPont’s MSDS.

HF will:• Penetrate skin.• Attack (decalcify) bones. • React with your body’s chemicals to make poisonous salts.

HF may:• Kill if more than 5% of the body is exposed. • Kill if ingested or inhaled. • Depending on concentration, not cause pain for up to 24 hours after contact.

Some of the symptoms of HF exposure are: • Itching. • Red or white discoloration of the skin. • Pain within 24 hours after contact. • Discoloration under fingernails or toenails.

Treatment with Calcium Gluconate Gel Calcium gluconate gel is a topical antidote for HF skin exposure. Calcium gluconate works by

combining with HF to form insoluble calcium fluoride, thus preventing the extraction of calcium from tissues and bones. Keep calcium gluconate gel nearby whenever you’re working with HF. Calcium gluconate can be ordered through Life Safety Associates www.lifesafety.com. Calcium gluconate has a limited shelf life and should be stored in a refrigerator if possible and replaced with a fresh supply after its expiration date has passed. Use disposable gloves to apply calcium gluconate gel. Even after applying calcium gluconate, it is essential that a medical evaluation be made.


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Cleanroom Hazardous ChemicalsAcid chemistry – Waste Disposal

Acid chemistry (including piranha), must be aspirated from their containers. An aspirator has a Teflon® tube through which it sucks a liquid from a container. Our Microfab wet sink has an aspirator. The fresh water plenum flush is automatically activated when an aspirator is turned on. The plenum flush adds water to aspirated waste, further diluting it. NEVER POUR ACIDS, BASES directly down a drain: Always use the aspirator. Never mix solvents with acids when aspirating – This is a potentially explosive combination! And remember AAA-Always Add Acid to water!


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Cleanroom Hazardous ChemicalsBases

pH > 7Are typically water soluble. Are slippery. Form salts when mixed with acids. Turn litmus paper blue. Are corrosive. Burn organic tissues.


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Cleanroom Hazardous ChemicalsBases

Ammonium Hydroxide - NH4OH Irritating to skin and mucous membranes. Emits highly

toxic vapors when heated.

Potassium Hydroxide - KOHSodium Hydroxide – NaOHPhotoresist developers


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Cleanroom Hazardous ChemicalsBases – Waste Disposal

Aspirate chemical waste same as acids.


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Cleanroom Hazardous ChemicalsSolvents

A solvent is a chemical substance which dissolves another substance. The most common solvent is water.

Solvents are used extensively in the electronics industry. Compounds such as Isopropyl Alcohol (IPA) and acetone are used to clean and dry wafers, glassware, equipment, and most working surfaces in the lab. In addition, solvents are the principle components of many process chemicals such as photoresist.

Organic solvents react chemically with acids, producing a violent reaction. As a by-product of the chemical reaction, gases are released, as well as a great amount of heat. Therefore, acids and solvents and their vapors should never come into contact with one another.

Organic solvents should never come in contact with oxidizers such as hydrogen peroxide and chromic etch. Oxidizers are a class of their own and will also react violently with organic solvents and acids.

Major solvents and their abbreviations used in the IML: Acetone - ACE Isopropyl Alcohol - IPA Propylene Glycol Monomethyl Ether Acetate - PGMEA


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Cleanroom Hazardous ChemicalsSolvents

Acetone-ACE Irritates eyes, nose and throat; headaches; skin dryness

Isopropyl Alcohol-IPADries skin; irritates eyes, nose and throat; drowsiness

MethanolEthyl Lactate-Positive Photo Resist

Combustible liquid; skin, eye, respiratory irritant; nervous system toxin


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Cleanroom Hazardous ChemicalsSolvents – Waste Disposal

Organic solvents such as chlorobenzene or TCA (trichloroethane) and photoresist, should never be aspirated or poured down the drain. Solvents must be poured into solvent disposal bottles. Never pour acid for disposal into a solvent waster bottle because a violent reaction may result. Make sure chemical disposal bottles are not overfilled. When a chemical disposal bottle is approximately 75% full:

Loosely cap the bottle. DO NOT TIGHTEN THE CAP. This prevents accidental pressure buildup from breaking the bottle.

Remove the label from the chemical disposal bottle. Enter the summary of contents to the peel-off label and place on the bottle.

Chemicals for disposal placed in the Waste Chemical Cabinet must be labeled with contents and the name of the lab member. Placing unlabeled chemicals for disposal in this cabinet is a violation of lab policy, which may result in suspension from the Microfab. You must fill out the Chemical Disposal Manifest Sheet located on top of the disposal cabinet. The bottles are picked up by the BSU Environment, Health and Safety Department. Notify the Microfab office if the storage area is full.

Use a safety carrier if the bottle is glass. Rinse bottles thoroughly 3 times under the fumehood. This will prevent exposure to volatile compounds while rinsing bottles. Wear a face shield and chemical resistant gloves while doing so. Once the bottle has been rinsed 3 times, black out the label with a marker. The scratched label indicates that the bottle has been properly rinsed.

Collected in containers for pick up by Environmental Safety Services. Small incidental quantities should be rinsed down the drain with copious amounts of water. For questions about waste solvents, contact the lab manager. Do not dump solvents down the drains.

It is very important to clean up solvent spills in order to minimize the fire hazard and the amount of vapors present in the lab. If you find a spill and can not identify it, contact the lab manager. The spilled chemical needs to be identified before it can be cleaned up.


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ACCIDENTAL SPILL CONTAINMENT


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Accidental Chemical Spill vs. Unknown Liquid Substance

Small quantity of unknown liquid substance on floor or wet bench Treat all unknown liquid substances as an acid or base. NEVER ASSUME IT IS DI WATER! Test pH level with litmus paper and cleanup accordingly.

Accidental Chemical Spill Small chemical spill (<4L)

• Clean up spill with chemical spill pillows or blankets.• Spill pillows & blankets are designed to be very absorbent and neutralize acid spills.• Dispose of waste in appropriate bin.

Large chemical spill (>4L but less than 5gal) • Notify lab manager at once!• Leave the lab.

For VERY large chemical spills (very large puddle of unknown liquid on floor• Leave lab space immediately.• Notify lab manager!• Call 911.

Use your best judgment; if the spill is going to put anyone else in the room and/or building in danger, act accordingly.


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Chemical Spill Clean-up(only for trained personnel)

Small chemical spill Test spill pH with litmus paper if chemical is unknown before

proceeding. Clean up spill with chemical spill pillows or blankets.

• Spill pillows & blankets are designed to be very absorbent and neutralize acid spills.

Dispose of waste in appropriate bin. Large chemical spill

Notify lab manager at once! Use chemical spill containment kit if possible before leaving lab. Leave lab immediately. For VERY large chemical spills, pull emergency fire alarm on your

way out the door.

Use your best judgment; if the spill is going to put anyone else in the room and/or building in danger, act accordingly.


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HAZARDOUS GASES


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Cleanroom Hazardous GasesCryogens

Cylinders of both toxic and non-toxic compressed gases are in use throughout the lab. Only trained staff may handle any compressed gas cylinders. Gas cylinders must be chained and strapped down at all times.

All liquid nitrogen containers must be approved by the Microfab staff.

Precautions The large volume of gas produced from evaporation of a liquid can

displace sufficient oxygen in a closed room to be dangerous (nitrogen asphyxiation). Ensure you have adequate ventilation for any operation consuming or transferring liquid nitrogen or helium.

Do not spill on the floor. Repeated spills will cause accelerated mechanical damage to concrete, etc.


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Cleanroom Hazardous GasesCompressed Gases

Cylinders should be stored in appropriately ventilated closets or in an open storage area. Store gases according to chemical compatibility .

Do not place gas cylinders such that there is contact with electrical circuitry.

Never use cylinders that cannot be identified positively. Inspect cylinder valves for damage or corrosion prior to use.

If unsuitable for use, return to supplier Never lubricate or modify the cylinder valves. Do not put oil or grease on the high pressure side of any

oxygen, chlorine or other oxidizing agent cylinder valve. A fire or explosion can result.


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Cleanroom Hazardous GasesCompressed Gases

Use toxic, flammable, corrosive, or reactive gases in fume hoods only. Post signs in the laboratory area when using any of these type gases.

Never bleed cylinders completely empty. Leave a slightly positive pressure (30 psi) to keep contaminants out. (Never heat a compressed gas cylinder to "milk" out the last bit of gas. The base plug softens and it becomes a missile.)

Remove the regulator from an empty cylinder and replace the protective cap. Mark the cylinder "empty" and place it in the appropriate location for pickup. Notify Microfab Staff.

Never open a cylinder more than 1/2 to 3/4 of 1 turn. This way the cylinder can be turned off quickly in the event of an emergency.

Review the MSDS sheets for the gasses that you are using. Many of the gasses are toxic. All high pressure gasses, regardless of toxicity, should be treated with respect.

Before using any gas on any piece of equipment, verify that the gas that you think is connected is the one that actually is connected.

Always wear safety glasses when handling compressed gases. Make sure all cylinders are properly labeled. Regulators, gauges, and hoses should not be interchanged among gases. Do not place any item on top of a cylinder that could damage a safety device or interfere

with quick closing of a valve.


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CLEANROOM ACCESS


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Cleanroom Access

Proximity card access only. Limited access through double doors between

ET105 & ET107. Never leave doors propped open. Always report issues with the HVAC system (too

hot or too cold) to IML Manager.


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Cleanroom Information Tools IML Website

http://coen.boisestate.edu/IMFL/index.html designed to be used as a reference guide for cleanroom operations.

• Safety procedures

• Equipment operating procedures

• General semiconductor processes

• Chemical inventory

• Cleanroom chemical data sheets

IML Blackboard Website Available to all cleanroom users. Contains all safety documents including the cleanroom Standard

Operating Procedures (SOP)


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Emergency Response Contacts(in order of contact)

Pete Miranda, Lab Manager x65713 or 447-6636 Paul Robertson, COEN Lab Coordinator, x65932 or 761-6824 Dick Sevier, COEN Safety Officer, x61022 or 286-8175 Jim Stevenson, COEN Staff Engineer, x65757 or 794-5809 Rex Oxford, interim COEN Facilities Manager, x65744 or 850-4490 Cal Gillis, BSU Environmental Health Officer, x63999 All MAJOR spills must be reported to the Boise Department of Public

Works. Boise Department of Public Works Contact List

• Walt Baumgartner, Senior Environmental Specialist 343-3991• Mike Hunter, Pretreatment Program Director 384-3993


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Questions


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idaho microfabrication laboratory revision d 8/11/11 1 iml safety training et105, et107, et108a...

Documents

cleanroom cleanroom

cleanroom attire

general cleanroom safety

cleanroom paper wafers

yellow gloves

et105 slide

gloves dont

additional gloves