INESC Microsystems and Nanotechnologies

INESC MN

Microsistemas & Nanotecnologias

www.inesc-mn.pt

Our environment

INESCHoldingPrivate,nonprofit

transfer oftechnology

TecnicoLisboa

engineering school

INLA

INESC-MNPrivate, nonprofitresearch institute

Universidadede Lisboa

INESC-MN - People

photo taken September 2012

Senior PIs: 5 Master’s students: 17Junior PIs (Ciência): 2 Research Interns: 4Post-Docs: 7 Cleanroom engineers: 3PhD students: 11 Administrative Assist. 1.5

INESC Microssistemas e Nanotecnologias – INESC-MN the infrastructure

• Class 100/10 cleanroom (~100 m2) constructed in 1992/1993

• Micro and nanofabrication for feature sizes down to 1.2 µm (optical) and 20 nm (e-beam)

• Chemical wetbench for biological processing in Class 100 cleanroom

• Class 10,000 area for support equipment and film deposition laboratory (~150 m2 )

• Laboratories for film and device characterization (electronic, optical, micromechanical and biological)

• Laboratory for soft-lithography

www.inesc-mn.pt

INESC MN

Microsistemas & Nanotecnologias

Spintronics: (Paulo Freitas, Susana Cardoso)• Sensors• Spin Electronics

Thin Film electronics and MEMS: (João Pedro Conde and Virginia Chu)• Thin film amorphous and nanocrystalline silicon MEMS and polymer MEMS• Large Area Electronics on glass and polymer substrates

Biological Applications*: (P. Freitas, J.P. Conde, V. Chu)• DNA, Protein and Cell Manipulation, Arraying• Magnetic Biodetection (Spintronic sensors)• Electronic, Optical and Micromechanical Biodetection• Microfluidics and Lab-on-Chip• Microelectrodes for neuroelectronics*collaboration IBB/BERG, IMM

Materials Simulations: (José Luís Martins)• Simulations of semiconductors • Development of methods and codes

Ciência researchers: • Carbon nanotubes (Sara Vieira)• Organic nanoelectronics (Helena Alves)

INESC-MN - main research areas

INESC MN

Microsistemas & Nanotecnologias

Role in DEMOTOX

• Transfer technology developed in OTASENSE to the production of the prototype in DEMOTOX

• Design and fabrication of thin film photosensor integrated to microfludics for DEMOTOX-BIO

• Training and support in detection, fluid handling and immunoassay