institute of physics ascr, prague strip sensors r&d for sct and itk marcela mikeštíková
TRANSCRIPT
Institute of Physics ASCR, Prague Strip Sensors R&D for SCT and ITk
Marcela Mikeštíková
2
Institute of Physics for ATLAS SCT: sensors
1. Participation in R&D of strip sensors p-on-n for SCT2. Study of radiation hardness of first prototypes 3. Qualification tests of strip sensors for SCT
• 2500 sensors tested in total (16% of whole production of discs sensors) in SCT lab of IP ASCR Prague
Automatic probe-station in SCT lab of IP ASCR, Prague
Prague SCT Lab
Detail of disc sensor
3
1. Evaluation of large area n-on-p silicon strip sensors
• 2009: Study of electrical characteristics of design ATLAS07 large area (10x10cm) sensors at Prague SCT lab
J. Bohm, M. Mikestikova, A. Affolder, P.P. Allport, … Z. Dolezal, P.Kodyš, et al.NIM A636 (2011) S104-S110
0.6
0.8
1
1.2
1.4
1.6
1.8
2
2.2
0 200 400 600 800 1000 1200
Strip Number
Inte
rstr
ip c
ap
ac
ita
nc
e [
pF
]
W37-Seg1
W37-Seg2
W37-Seg3
W37-Seg4
0.5
1.0
1.5
2.0
2.5
3.0
0 100 200 300 400 500 600
Bias voltage [-V]
Inte
rstr
ip c
apac
itan
ce [
pF
]
W33-Seg1
W33-Seg2
W33-Seg3
W33-Seg4
W35-Seg1
W35-Seg2
W35-Seg3
W35-Seg4
W37-Seg1
W37-Seg2
W37-Seg3
W37-Seg4
W38-Seg1
W38-Seg2
W38-Seg3
W38-Seg4
W39-Seg1
W39-Seg2
W39-Seg3
W39-Seg4
W32-Seg1
W32-Seg2
W32-Seg3
W32-Seg4
W37-Seg1
3 probe method at 100kHz
5 probe method at 100kHz and 1MHz
Interstrip Capacitance -bias voltage scan
Interstrip capacitance – strip scan
Institute of Physics for ATLAS Upgrade ITk – strip sensors
Bias Voltage scans (IV, CV, Cint, Rint) Full strip scans (automatic probe station)
Interstrip Capacitance and Resistance AC Coupling Capacitance Polysilicon Bias Resistance Leakage Current to a strip
ATLAS07
4
2. Study of radiation damage of ATLAS07 and ATLAS12 strip sensors
Samples: miniature (1x1cm) sensors n-strip in p-type material (FZ) Barrel and Endcap mini sensors : different layouts, pitches, types of stray strip ganging and types of PTP structures
Irradiation: protons (up to 2E15 neq/cm2 ): CERN, Birminham, Karlsruhe, CYRIC neutrons : from reactors in Řež (Prague), Ljubljana gamma (up to dose 10MRad): BNL
Studies IV (Current, Break down voltage), CV (Full depletion voltage) Surface radiation damage:
Interstrip Resistance and Capacitance Punch Trough Protection Structure (Beam loss protection) AC Coupling Capacitance Polysilicon Bias Resistance Measurements condition:
probe station with cooled chuck (up to -30°C) with Nitrogen flow, rel. humidity <5%
Institute of Physics for ATLAS Upgrade ITk
5
Laboratory Equipment of Silicon Lab in IP ASCR PragueFor Quality Assurance - Sensors tests
Silicon Lab (24 m2) - with temperature and humidity control, vertical air flow, - electrically conductive flooring
6
Laboratory Equipment of Silicon Lab in IP ASCR PragueFor Quality Assurance - Sensors tests
Manual probe station with cooled chuck (-30°C)Nitrogen flow in probe station, humidity < 5%Automatic probe station KarlSuss PA200
equipped with probe heads with vacuum and magnetic support, microscope , video camera and monitor
- for strip integrity tests and for visual inspection Measuring devices:
LCR meter HP4284A SMU Keithley 237 HP34401A multimeter Picoammeter Keithley 487Electometer K6517AHV Supply K248 up to 3000VSwitching system 4x5 Matrix Switch
Clean storage cabinet with Nitrogen purge for ~200 sensors
7
• clean room (6m2) level 10 000 - temperature and humidity control, overpressure
Laboratory Equipment in IP ASCR Prague
BINDER: Environmental simulation chamber
for cyclical temperature (-40°+180°C)
Flowbox with HEPA filters
Backup
9
Step No Name & Deception Equipment Needed QA Specs
1 Arrival• Unpacking? • Storage of
components
Storage Cabinets (if not packaged)
Humidity <5%
2 Visual Inspection• Check for
scratches, broken edges, dust etc.
• Check edge chip spec: no chips or cracks
Optical Microscope with automated inspection software
‘Nice and Clean sensor’
3 Metrology Survey• XY geometry• Z profile
Optical (non contact) CMM Total Bow <200mm
4a I-V • Probe Station with N2/humidity control/chiller
• Sensor held on jig using clamps (not vac) in dry conditions (N2)
• 0-800V in 10v steps with 10s interval
• I < 200mA (as spec)• No onset of micro-
disharge• T = Normalised to 20oC
4b C-V As Above 0-800V in 10v steps with 5s intervalT = Normalised to 20oC
1 - Sensors (Bart + Kristin)
ITK Week - Feb 2015Andy Blue
Quality assurance - Lab requirements
10
Step No
Name & Deception Equipment Needed QA Specs
5a Full Strip Test • Probe Station• Multichannel probe card
• Starts at 5-10%• Reduce to 1-2%
5b Additional Tests• PTP, CINT, RINT
Probe Station Same sensors as 5a
7 Database• Sensor is
registered• Data uploaded
PC / Laptop
8 Decision• Grading of Sensor
is made
Good, Pass, Hold or Fail
1 - Sensors (Bart + Kristin)
Andy Blue ITK Week - Feb 2015
Quality assurance - Lab requirements