instruction manual (b) - indiana university...

MT-39E-101-A

Model name Voltage STP-603/1003 series 200 - 240 Va.c. 100 -120 Va.c.

STP Series Turbomolecular Pumps STP-603/1003 Series

Pump Specific Information

Instruction Manual (B)

STP pump consists of the three-volumed Instruction Manuals. Instruction Manual (A): STP pump generic Instruction Manual

Supplied with STP pump Instruction Manual (B): (This Instruction Manual)

STP pump specific information Supplied with STP pump

Instruction Manual (C): STP control unit Instruction Manual Supplied with STP control unit

Copyright 2008 Edwards Japan Limited. All rights reserved. Printed in Japan.

This page intentionally blank

The description of this product consists of the three-volumed Instruction Manuals. Read through each Instruction Manual before operation. The separate volume contents of each description are as follows:

Instruction Manual (A)

STP pump generic Instruction Manual:

• Introduction

• Installation of the STP pump

• Installation of the STP control unit

• Operation

• Safety functions

• Maintenance and inspection

• Storage and disposal

• Service, Spares and accessories

Instruction Manual (B)

STP Pump specific information:

• Technical data

• How to Secure the STP pump

• Temperature Management System （TMS）

Instruction Manual (C)

STP control unit Instruction Manual:

• Introduction

• Technical data

• Installation

• Operation

• Serial communication protocol

• STP-Link (except for SCU-750)

• Maintenance

• Storage, transportation and disposal

• Service, spares, and accessories

Keep the manuals in an easily accessible location.

STP-603/1003 Series Turbomolecular Pump

July 08 i Issue 1-a

PAGEi CONTENTS

Section Title Page

1 TECHNICAL DATA 1

1.1 Applicable pump specifications 1 1.1.1 STP pump specifications 2 1.1.2 Condition for the water-cooling unit 3 1.2 External appearance of the STP pump 3 1.3 Label affixing positions 9 1.4 Accessories 10

2 HOW TO SECURE THE STP PUMP 11

2.1 When securing the inlet port with bolts 12 2.2 When securing the inlet port flange with claw clamps 14 2.3 When installing the damper in the inlet port flange 15


July 08 ii Issue 1-a

PAGE ii ILLUSTRATIONS

Figure Title Page

1 STP-603 series: ICF203/VG150 4 2 STP-603 series: ISO160/ISO160F 5 3 STP-1003 series: ICF253/VG200 6 4 STP-1003 series: ISO200/ISO200F 7 5 STP-1003 series: ISO250/ISO250F 8 6 Label affixing positions for the STP pump 9 7 Example of securing the STP pump

(when securing the inlet port with bolts) 13 8 Example of securing the STP pump

(when securing the inlet port flange with claw clamps) 14 9 Example of securing the STP pump

(when installing the damper in the inlet port flange) 15

TABLES Table Title Page

1 Tightening torque of bolt 11 2 Maximum torque predicted and recommended securing bolt

for inlet port flange 12 3 Number of claw clamps for flange size 14


July 08 1 Issue 1-a

TECH

NIC

AL D

ATA

11 TECHNICAL DATA 1.1 Applicable pump specifications

Model Name Specification Applicable Control unit

STP-603/1003 series Ultra high-vacuum type SCU-750/SCU-800 Naming convention:

• "C" following a pump model name indicates a corrosion resistant*1 type (e.g. STP-603C). *1 Corrosion resistant: STP pump with anti-corrosive treatment.


July 08 2 Issue 1-a

TECH

NIC

AL D

ATA

PAGE 2

1

1.1.1 STP pump specifications

The values shown below are typical. They are not guaranteed.

Item 603 series 1003 series

Inlet port flange ICF203/VG150/ ISO160/ISO160F

ICF253/VG200/ISO200/ ISO200F/ISO250/ISO250F

Flange size

Outlet port flange KF40 KF40

N2 L/s 650 1000 Pumping speed

H2 L/s 550 800

N2 >108 Compression ratio

H2 105

Ultimate pressure Non-corrosion resistant type Pa (Torr) 10-8 (10-10) order: ICF flange

10-7 (10-9) order: VG/ISO flange

Corrosion resistant type Pa (Torr) 10-7 (10-9) order: ICF flange

6.5×10-6 (5×10-8) or less: VG/ISO flange

Maximum working pressure*1 Pa (Torr) 1.3×10-2 (1×10-4): Natural air-cooling

Allowable backing pressure*1 Pa (Torr) 13 (0.1): Natural air-cooling

Flow rate of purge gas <N2> Pa·m3/s (SCCM) 1.7×10-2 (10): Corrosion resistant type only

Rated speed rpm 35,000

Backup rotational speed*2 rpm Approximately 8,500

Starting time min 6

Stopping time min 6

Noise dB <50 (at 35,000 rpm)

Temperature Management System (TMS) N/A

Baking temperature °C <120

Lubricating oil Not necessary

Installation position Free

Cooling method Natural air cooling (Water cooling, Air cooling: At baking and gas pumping)

Recommended backing-pump L/min >1,300

Mass*3 kg 31

Ambient temperature range °C 0 to 40

Storage temperature range °C -25 to 55

Applicable Control unit SCU-750/SCU-800


July 08 3 Issue 1-a

TECH

NIC

AL D

ATA

1

*1 The pressure is applicable under conditions that N2 or other similar gas is vacuumed and the backing-pump (pumping

speed: 1,300 L/min) is used. When the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be

exhausted. Consult Edwards about conditions. *2 A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure. *3 Mass is a value of state that the only standard accessory was installed (except the optional accessory).

1.1.2 Condition for the water-cooling unit

The water-cooling unit is an optional accessory.

Item Specification

Port type Rc 1/4 (Female) *1

Flow rate L/min 2

Water temperature °C 5 to 25

Water pressure MPa (kgf/cm2) 0.3 (3) *1 Standard type

1.2 External appearance of the STP pump

See the next page.


July 08 4 Issue 1-a

TECH

NIC

AL D

ATA

PAGE 4

1

φ208φ245

(4)≧ 323

(93

)22

4

A

367

1535

147.

5

210

(7)

(10)

20ﾟ

45ﾟ

160

137.5

(5)

(2)(1)

(3)

291

317

330 (3)

291

φ130

φ170φ162

2622

34.

514

8-φ12

φ210

22.5ﾟ

45ﾟ20-φ8.4

φ181

18ﾟ 9ﾟ

(8)

(6)φ203

φ235

(9)

141

.5

Figure 1 - STP-603 series: ICF203/VG150

No. Item Description

1 Inlet port flange ICF*1203

2 Inlet port flange VG*2150

3 Height of the purge port (only for corrosion resistant type)

4 Bending dimension of the STP connection cable

5 Screw hole of legs M10*2 depth 20

6 Outlet port flange KF*240

7 STP connector

8 Screw hole for legs 8-M10*2 depth 24

9 Purge port KF*210 (only for corrosion resistant type)

10 Viewed from arrow A

*1 JVIS *2 JIS


July 08 5 Issue 1-a

TECH

NIC

AL D

ATA

1

φ208φ245

(4)≧ 323

(93

)22

4

A

(11)

φ175

512

367

1535

147.

5

210

(7)

(10)

20ﾟ

45ﾟ

160

137.5

(5)

141

.5

2

R2.5

(9)

(2)(1)

(3)

291

317

330 (3)

291

φ165

8-φ11

22.5ﾟφ200

45ﾟ

12 16

φ175

φ180φ225

φ130

32.5

3610

φ153

(6)

(8)

Figure 2 - STP-603 series: ISO160/ISO160F


1 Inlet port flange ISO*2160

2 Inlet port flange ISO*2160F





7 STP connector




11 Magnified view of the inlet port flange

ISO160

*1 JIS *2 ISO


July 08 6 Issue 1-a

TECH

NIC

AL D

ATA

PAGE 6

1

φ208φ245

(4)≧ 323

(93

)20

4

A

347

1535

147.

5

210

(7)

(10)

20ﾟ

45ﾟ

160

137.5

(5)

(2)(1)

(3)

271

297

310 (3)

271

φ130

24-φ8.4

φ231.8

7.5ﾟ

15ﾟ 22.5ﾟ

45ﾟ

φ270

8-φ15

(8)

(6)

φ253

φ300

25 18

(9)

141

.5

Figure 3 - STP-1003 series: ICF253/VG200


1 Inlet port flange ICF*1253

2 Inlet port flange VG*2200





7 STP connector




*1 JVIS *2 JIS


July 08 7 Issue 1-a

TECH

NIC

AL D

ATA

1

φ208

φ245

(4)≧ 323

12

(93

)20

4

297

A

260

12-φ11

(11)

φ235

φ235

512

φ240φ285

16

(3)

271

347

1535

147.

5

φ210

(7)

(10)

20ﾟ

45ﾟ

137.5

(5)

141

.5

2

R2.5

(9)

(2)(1)

15ﾟ

(3)

271

5

φ213

(8)

(6)

φ1603

10

φ130









7 STP connector




11 Magnified view of the inlet port flange

ISO200

*1 JIS *2 ISO


July 08 8 Issue 1-a

TECH

NIC

AL D

ATA

PAGE 8

1

φ208φ245

(4)≧ 323

(93

)20

4

297

A

16(3)

271

347

1535

147.

5

φ210

(7)

(10)

20ﾟ

45ﾟ

φ160

137.5

(5)

141

.5

(9)

(1)

(3)

271

15ﾟ30ﾟ

φ310

12-φ11

φ335

(8)

(6)

310

φ130

φ290(2)

15

φ285

φ261

5

15

2

φ275

5

(11)

R2.5





3 Position of the purge port (only for corrosion resistant type)




7 STP connector




*1 JIS *2 ISO


July 08 9 Issue 1-a

TECH

NIC

AL D

ATA

1

1.3 Label affixing positions

Refer to the Instruction Manual (A) for the details of the labels 1 to 7.

Figure 6 - Label affixing positions for the STP pump

1 STP pump installation warning label3 Heavy product caution label 4 Connector caution label 5 STP pump/control unit caution label7 Rotational direction instruction label8 Name plate 9 Company logo

3 1

8

9

4 5

7


July 08 10 Issue 1-a

TECH

NIC

AL D

ATA

PAGE 10

1

1.4 Accessories

Item Q’ty Remarks

Inlet port cover 1

Outlet port cover 1

STP connector cover 1

Blank flange for purge port 1 KF10 (only for corrosion resistant type)

Clamping ring for purge port 1 KF10 (only for corrosion resistant type)

O-ring washer for purge port 1 KF10 (only for corrosion resistant type)

Leg 8 4 legs are attached to the STP pump

Rubber foot for leg 4

Instruction Manual (B) 1 This manual



HO

W TO

SECU

RE TH

E STP PUM

P

22 HOW TO SECURE THE STP PUMP

WARNING

The STP pump is provided with a high-speed rotor. Any internal abnormality/error may result in a jump in rotational torque leading to personal injury or peripheral

equipment damage. The STP pump is provided with a high-speed rotor. The worst-case failure may result in a jump in rotational torque leading to personal injury or peripheral equipment damage.

The method of securing the STP pump will depend on the installation requirements. Secure the STP pump to the vacuum equipment as follows:

Design and secure the mounting for the STP pump so that it can withstand the maximum rotational torque. Refer to Table 2 for torque in pump abnormality.

In some cases, the damper and the claw clamper securing cannot be used.

This will depend on the type of STP pump. Refer to Table 1 for torque tightening the bolts used.

Bolt size Tightening torque (Nm)

M8 12

M10 24

M12 42

Table 1 - Tightening torque of bolt

When making the legs to secure the base, make them shorter than the ones attached to the STP pump. Use a material that has a tensile strength of 600N/mm2 or more.

When securing the base, use stainless steel securing bolts with a tensile strength class of 70 or more.

Note: When using any securing method other than that specified in this manual, contact Edwards.

Damper

Yes

No

With bolts

With claw clamps

Secure the inlet port

Refer to Section 2.1





HO

W TO

SECU

RE TH

E STP PUM

P

2

2.1 When securing the inlet port with bolts

Refer to Table 2 for maximum predicted torque in any pump abnormality and for the recommended type of securing bolt for inlet port flange.

Secure the inlet port flange with the correct size bolts as specified in the Inlet Port Flange Standard.

Secure the base with either the 8 screws for legs or the 8 attached legs. Ensure instructions with regard to legs and bolts for securing the base are adhered to page 11. Make sure that the recommended securing bolt is the correct one depending on the method of securing the base.

Pump mode STP-603 series

Flange type VG150 ISO160F*2 ICF203

Torque in pump abnormality [Nm] 1.5×104 1.5×104 1.5×104

Base (8 positions) securing No Yes No Yes No Yes

Shape Standard Standard Standard Standard Standard Standard

Material*1 Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel Stainless steelRecommended securing bolt

for flange Strength*1 70 or more 70 or more 70 or more 70 or more 70 or more 70 or more

Pump mode STP-1003 series

Type of flange VG200 ISO200F/ISO250F*2 ICF253

Torque in pump abnormality [Nm] 1.5×104 1.5×104 1.5×104

Base (8 positions) securing No Yes No Yes No Yes

Shape Standard Standard Standard Standard Standard Standard

Material*1 Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel Stainless steelRecommended securing bolt

for flange Strength*1 70 or more 70 or more 70 or more 70 or more 70 or more 70 or more

*1 Refer to ISO898-1 (JISB 1051), ISO3506 (JISB 1054) and AMS6419 (Aerospace Material Specification). *2 Maximum predicted torque of ISO flange type pump is the same as that of ISO_F flange type pump.

Table 2 - Maximum torque predicted and recommended securing bolt for inlet port flange



HO

W TO

SECU

RE TH

E STP PUM

P

2

(A) When the base is not secured (B) When the base is secured

1. Recommended fitting bolt for flange

2. Secure the base

Figure 7 - Example of securing the STP pump (when securing the inlet port with bolts)

1

2



HO

W TO

SECU

RE TH

E STP PUM

P

2

2.2 When securing the inlet port flange with claw clamps

Refer to Table 2 for rotational torque.

When securing the inlet port flange with only the claw clamp, the vacuum equipment cannot withstand the maximum rotational torque generated by the worst-case failure. To make the vacuum equipment withstand abnormal torque, secure the base with either the 8 screws for legs or the 8 attached legs. Ensure instructions with regard to legs and bolts for securing the base are adhered to page 11.

For the claw clamp-type, use the required number of claw clamps as specified in Table 3. Position the claw clamps evenly on the circumference.

Flange size Number of claw clamps

ISO 160 or less 4 or more

ISO 200 to 250 6 or more

ISO 320 or more 8 or more

Table 3 - Number of claw clamps for flange size

1. Vacuum equipment

2. Claw clamps

3. Secure the base

Figure 8 - Example of securing the STP pump (when securing the inlet port flange with claw clamps)

1

2

3



HO

W TO

SECU

RE TH

E STP PUM

P

2

2.3 When installing the damper in the inlet port flange

CAUTION

Use a damper only at the vertically upright position.

CAUTION

DO NOT remove the bolts and nuts attached to reinforce the damper. Refer to Table 2 for rotational torque.

When using a damper, secure the base with either the 8 screws for legs or the 8 attached legs. Ensure instructions with regard to legs and bolts for securing the base are adhered to page 11.

When the base cannot be secured because of the equipment design, install the pump with a torque restraint like the one shown in Figure 9 (B).

(A) When securing the base (B) When installing not to rotate

1. Damper

2. Secure the base

3. Hole to prevent from rotating

4. Leg

Figure 9 - Example of securing the STP pump (when installing the damper in the inlet port flange)

1

2 34



HO

W TO

SECU

RE TH

E STP PUM

P

2

This page intentionally blank.

Copyright 2008 Edwards Japan Limited. All rights reserved.

For more information, contact the nearest Service Office.

Manufacturer: Edwards Japan Limited

1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8822

International +81-47-458-8822 Facsimile: Domestic 047-458-8833 International +81-47-458-8833

instruction manual (b) - indiana university...

Documents