intake & access to nanolab
TRANSCRIPT
Combines nanotechnology, microsystems and materials science research at the University of Twente
• Staff
– 525 people, 44 research groups
• Yearly turnover
– 55 M€ with 60% from external sources
• Mission
– excelling in its research field &
exploring new research themes
− educating researchers and designers
− offering state of the art infrastructures
− commercializing research results
− initiating and participating in fruitful international collaboration
MESA+ Institute for Nanotechnology
Science
Advanced Materials,
Bionanotechnology,
Applied NanoPhotonics,
Nanoelectronics, Fluidics,
Polymer Science, etc…
Education
Twente Graduate School
Bsc + Msc + PhD programmes at
University of Twente
Infrastructure
NanoLab and specialized labs
Open-access
for Research, Business,
Education
Knowledge &Technology Transfer
>50 Spin-offs
Industry Collaboration
Vouchers
Production Facility and Equipment Fund
About NanoLabNL
• Providing an open-access infrastructure for research and innovation in nanotechnology
• NanoMaterials, NanoFabrication, NanoFluidics, NanoElectronics, BioNano, NanoMedicine, ….
• National consortium at 4 locations:
• Eindhoven
• Groningen
• Twente
• Delft
A1+2
• MESA+ NanoLab Twente facilities:
– 2500 m2 building
– 1250 m2 cleanroom
– 150 m2 materials analysis lab
– 150 m2 research group labs
– 800 m2 VC-G surface
– 150 m2 BioNano lab
• 400 users, ~80 new/ year
Vibration-
speed-
amplitude
VC-C 12,5 um/s 1 um details; optical microscope, epitaxy
VC-D 6,3 um/s 0,3 um details; foto lithography, cell implantation app.
VC-E 3,15 um/s 0,1 um details; scanning probe scanning beam, optical benches
VC-F 1,56 um/s 30 nm details; scanning probe,scanning beam
VC-G 0,78 um/s 10 nm details; Nanotechnology
VC-curves Frequency 1-100 Hz
NanoLab Laboratories
Offices
Facility/
Technics
area
Laboratories
Cleanroom
Laboratories
Cleanroom
Vibration free
Cleanroom ISO 7/ ISO 5• Number of particles with a
diameter of 0,1 µm per m3
Working
Walking
A human produces 10.000.000.000 particles = 1 m 2 per day (50 um thick)
100.000 500.000 1.000.000 2.500.000
5.000.000 10.000.000 15.000.000//30.000.000
MIS webpage
MIS website is your guide in the Cleanroom
• For selection of courses
• For safety information
• For status of equipment
• For cleanroom news
• For booking of equipment
• Who to contact of NL-Staff
http://www.utwente.nl/mesaplus/nanolab/cleanroom/
Janneke Hoedemaekers
Technical director
Gerard Roelofs
Head NanoLab
Sharron Koch
Secretary
Bert vd Akker
ICTAnita Kooij
Financial
HenkJan de Haan
Building
Rico Keim
EF TEM
Gerard Kip
XPS
Mark Smithers
HR SEM
Personal MESA+ NanoLab
Analyse & other support
Henk v Wolferen
Dual FIB
BioNanoLab
Eddy Ruiter
Metrology
Building
IteJan Hoolsema
LPCVD
Marion Nijhuis
Wetbenches
Furnaces
Hans Mertens
Sputtering,
Evaporating
Huib van Vossen
Lithography
Ton Jenneboer
Lithography
E-beam lith.
Peter Linders
Masks
PECVD
Rene Wolf
Plasma Etching
Personal MESA+ NanpLab
NL- Cleanroom Staff
Robert Wijn
Metrology
Ion implanting
Christiaan Bruinink
Quality Engineer
Meint de Boer
Technology advice
Roald Tiggelaar
Researcher
Micro/nanotechnology
Samantha Ooijman
Courses, wetbenches,
furnaces