integramplus integramplus integrated mnt platforms and services europractice service project...
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INTEGRAMINTEGRAMplusplus
Integrated MNT Platforms and Services
Europractice Service Project providing Development Platforms for Integrated Micro-Nano Technologies and Products
Carmen Moldovan, Bogdan Firtat
IMT-Bucharest
1st MEMSCON Event07/10/10, Bucharest IMT Bucharest
Carmen Moldovan – Head of Laboratory for Environmental and Biomedical Applications –15 years of experience in MEMS technologies
Associate professor Coordinator and partners of more of 25 national projects and 10
EU projects Former NEXUS Steering Committee member ISTAG group member within DG - INFSO, EC
Bogdan Firtat – Scientific Researcher, 10 years experience in MEMS technologies: design, simulation and modelling for mechanical, chemical and biological microsensors and FEM microfluidic modelling.
Laboratory of Microsystems for Environmental and Biomedical Applications
Carmen Moldovan, IMT Bucharest
INTEGRAMplus - FP6 Integrated Project
Europractice Service Project providing Development Platforms for Integrated Micro-Nano Technologies and Products
Aim: Highly integrated microsystems combining smart Si functionality with polymer platforms in a multi-domain environment
Address and stimulate future market needs via higher levels of integration in stable, manufacturable MNT processes enabling nano via micro
Emerging markets: biomedical & healthcare; pollution & security; comms (RF & optical) Multi-domain integration: bio-optical-fluidics, MEMS and/or electronics; mixed process technologies
(silicon-polymer) Stimulate take up of smart (integrated) MNT products Reduce barriers to MNT access
training and standardisation provide development platforms and standard modules
Provide low cost MNT prototyping services enable virtual manufacturing based on Design for Manufacture principles Silicon MEMS and polymer prototyping
Provide seamless service across the MNT supply chain from concept to production 10 partners from 7 countries + extended supply chain network
INTEGRAMplus - Integrated MNT Platforms and Services
PARTNERS
QinetiQ Ltd., Malvern, UK
CSEM, Alpnach, Switzerland
Epigem Ltd., Redcar, UK
Institut für Mikrotechnik, Mainz, Germany
Silex, Sweden Yole Dévelopment, Lyon, France
Coventor sarl, Paris, France
Lancaster University, UK
National Institute for R&D in Microtechnologies, Bucharest, Romania
Institute of Electron Technologies, Warsaw, Poland
INTEGRAMplus Organisation
QinetiQ(silicon)
Coventor(Multi-domain software & Design for Manufacture)
Silex Microsystems(Silicon / glass manufacture)
VOLUME MANUFACTURE
U. Lanc.(PATENT)
DESIGN SERVICES, PROTOTYPING & LOW VOLUME MANUFACTURE
CSEM (polymer, silicon)
CAD TOOLS & VIRTUAL MANUFACTURE
ITE(Electronics &
microfluidic design)
IMM(polymer)
EPIGEM (polymer manufacture)
IMT(Biointegration &
microfluidic design)
CUSTOMER SUPPORT
Yole Developpement(Strategic Marketing)
X-Fab (CMOS manufacture)
C-MAC(volume assembly)
DELTA (packaging)
MCE (packaging)
Hymite (packaging)
Micronit(glass manufacture)
AMIS (CMOS manufacture)
AML (bonding)
Expert Consultants(PATENT-DfMM
members)
SUPPLY CHAIN PARTNERS
The INTEGRAMplus Partners’ Technology Portfolio
Design & simulation
PrototypingLow and high
volume productionMacrosystem
integration
DEVICES AND COMPONENTS
CAPABILITIES FOR WHOLE PRODUCT LIFE CYCLE
Silicon
FLEXIBLE INTEGRATION
Testing
Micromachining
Bio-Integration Polymer & electrodesCombined integrationPolymer & Silicon
MillingMoulding
Packaging
CMOS integration
MicrofluidicsPhysical sensors
Power sources
ElectronicsMicro-Optics
Bio-devices Memory DSP/µC Comms
Metal deposition
Polymer BondingSurface
FunctionalisationGlass
Embossing
MATERIALS AND FABRICATION TECHNIQUES
European partners in micro and nanotechnologies with complementary expertise in: Silicon, polymer, glass, hybrid solutions Multi-domains (optics, fluidics, MEMS, bio, chemical, electronics) Multi-level integration (material, electronics, functions and system) Development and production along the supply chain
INTEGRAMplus offer
Consultancy
DesignServices
FabricationServices
Productisation
PrototypingServices
Design &Simulation
Devices &Components
FunctionalModules
Prototypes
Products / Production
Customers
Customers
Customers
Customers
Courtesy Epigem
Courtesy IMM
Courtesy Epigem
Processing
Service Offerings
Currently 3 Prototyping Platforms:
1. QinetiQ Silicon MEMS Prototyping Service
2. Epigem Modular Microfluidic Prototyping Service
3. IMM Rapid Prototyping Service for Lab-on-a-chip
Fabrication of chips with electrodes
Fabrication of polymer parts with electrical leads (injection molding, lithography, …
Fabrication of microstructured gaskets (casting, laser cutting, punching, …)
Fabrication of polymer parts (micromachining, casting, embossing, injection molding, …)
Electric contacts between chip and leads (flip-chip, solder bumps, wire bonding, …)
Hybrid bonding technologies (surface activation, thermal bonding, …)
Hollow waveguides (fabrication, sealing, integration)
Adhesive bonding technologies (glues, double sided sticky tapes, …)
Surface functionalization (biochemistry, nanopatterning, …)
Connections to macro world (fluid ports & reservoirs, electrical contacts, light contacts)
Fabrication of silicon/SOI parts (DRIE, anisotropic wet etch, chemical vapour etch, …
(Si) chip fabrication
Microchannel fabrication
Optical components
Channel sealing
Microfluidic interfacing
Optical interfacing
Electrical interfacing
Integration of silicon into polymer
Surface functionalization
Competencies needed
Issues being addressed
Substrate Chip
Fluid
Underfill
Multi-domain Integration - Technological issues
Si chip scale package with polymer microfluidic chip and
electrical connections
Epigem microfluidics chip with integrated electrodes and pcb headers mounted
Innovative silicon-polymer integration technology for chips onto substrates with fluid access opening using flip-chip bonding
Hollow waveguide Advanced optical circuit
modules Combined fluidic and
optical modules
INTEGRAMplus multi-domain multi-technology platforms
INTEGRAMplus Summary
Provides industry with a world-leading facility to stimulate take-up and accelerate time-to-market of smart mixed-technology components and solutions. A consortium offering tried and tested micro and nano technology expertise
from10 partners operating across 7 European countries. A design and prototyping service with route to volume manufacture for highly
integrated microsystems. High degree of flexibility to address the need for increased complexity in
microsystems without sacrificing the requirement for manufacturable processes.
A flexible customer interactive approach ensures access to INTEGRAMplus at any stage in the product lifecycle.
Web-sites: www.integramplus.com www.QinetiQ.com/mems
Email: [email protected]
Tel: +44(0)1684896262
Mission and main activities
The Laboratory of Microsystems for Biomedical Applications is doing research, focused on development of microsensors and sensors integration such as: - chemosensors (O2, pH, NO2, NOx, CO, CO2, humidity etc.); - biosensors (enzymatic, immunosensors, biomicrosensors array); - nanowire based ISFET - microprobes for recording of electrical activity of cells and tissues, - microfluidic platforms, - signal processing and data acquisition for microsensors array, technologies for sensor integration, data processing, transmission and acquisition.
The Lab is running services for industry in design, simulation, technology, testing and data acquisition, processing and transmission and education in the field of mixed technologies.
The Laboratory was involved in several FP6 projects in the area of technologies for sensors integration, microfluidics and software and hardware development for data acquisition. IMT’s tasks in the project are: simulation and modelling of fluidics and temperature distribution inside the microsystem channels, and computational modelling of the integrated multi-sensing system. Also IMT will be developing the auxiliary sensors for monitoring the cell culture’s environment and will work on microfluidic microsystem integration.
Resources: The Laboratory has 11 permanent researchers and 2 part time co-workers from a total of 170 employees (researchers and administration).
Sensors technology
-2
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0 5 10 15 20 25
Time [min]
C [
nF
], G
[uS
]
C[nF]
G[uS]
Silicon biochip in the microfluidic module, with pumps and reservoir
Gold electrodes pesticide sensor
Conductance and capacitance:A – substrate injection, B – inhibitor injection
Fluid
Nanowire chip
Enlarged view of the reaction area
LabView interface
NW ISFET sensor
Computer interface
Reaction area
* Cl. Moldovan, A. Dinescu, E. Manea, R. Iosub, C. Brasoveanu, B. Firtat, C. Moldovan, M. Ion, TECHNOLOGY OF A NANOWIRE BIOFET DEVICE FOR BIOMOLECULES DETECTION , CAS 2009 Proceedings; ISBN: 978-1-4244-4413-7, Vol.2, pag.549-552
Sensors on glass and platform
Cfr. different buffers - 46 hours dynamic test - external reference electrode
0.1
0.15
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0.25
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0.35
0.4
5:1
3:4
8 P
M
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3:0
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time
vo
ltag
e (
V)
pH+ - ref - pH4 buffer pH- - ref - pH4 buffer pH+ - ref - pH5 buffer
pH- - ref - pH5 buffer pH+ - ref - pH7 buffer pH- - ref - pH7 buffer
y = 10.938x - 735.56
35
35.5
36
36.5
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39.5
40
70.45 70.5 70.55 70.6 70.65 70.7 70.75 70.8 70.85 70.9 70.95
Resistance(Ohm)
Tem
pe
ratu
re(C
)
Series1
Linear (Series1)
Platform
Microfluidic module with the reference electrode
Temperature sensorpH sensor
Auxiliary sensor - pH sensor nanofiber polyaniline based
The pH sensor is a solid state sensor based on conductive polymers, miniaturized, developed on silicon substrate
The sensor measurement is a voltage measurement at zero current. The voltage is measured between two electrodes: the active electrode and the reference electrode (Ag/AgCl,
KCl 3M). The gold electrode was deposited with a layer of
polyaniline conductive emeraldine base form as seen in the SEM.
The electrochemical deposited polyaniline has an intrinsic nanowires structure of 100nm diameter
Carmen Moldovan, Rodica Iosub, Radu Cornel, Eric Moore, Anna Paschero, Walter Messina, Danilo Demarchi, Cecilia Codreanu, Daniel Necula, Adrian Dinescu, Bogdan Firtat, Sensor system for on-line monitoring of cell cultures, CAS’09 (International Conference on Semiconductors), IEEE catalog Number CFP09CAS-PRT, ISBN: 978-1-424-4412-7; pp 263-267
SEM picture of electrochemical deposited polyaniline conductive layer in the form of nanofibers
Integration
Automatic measuring set-upLabview interface
Connections, signal processing, data acquisition, GUI
The graphic user interface designed with the LabView. By the program we can control: Acquisition time, Number of loops, Time between the loops, Flow rate in the channels
Integration
Visual results of the continuous flow simulation (section through the z plane) – detail
The velocity of the fluid into the channel simulation has been performed***
***B. Firtat, C. Moldovan, G. Boldeiu, FEM Microfluidic simulations for microchannels – continuous and droplet-like flow; The 4M/ICOMM Conference, 23-25 Sept. 2009, Karlsruhe, Germany; Proceedings, pp 205
Microfluidics
Microfluidic set-up
Sin <100> B++
Si3N4
2000 Å
Si3N4
2000Å
SiO2
5000 Å
Polysilicon 4000 ÅMetal
Electrodes
CVD - SiO2
Lift-off mask
Scheme of the sensor chip
High dose boron is implanted and diffused followed by a boron doping from solid source + diffusion (1050C, 4 hours). the p-n junction, 12 m depth, for anisotropical stop etch
A CVD oxide is deposed such as dielectric layer and the contacts on polysilicon layer are open
Cr-Au deposition and configuration follow.
CO2 GAS SENSORS
Membrane suporting sensor
0
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0 1 2 3 4 5
Time (s)
Tem
p (
°C )
21,5°C
500,0°C
100
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SP01
The power-on curve for the released heater element.
The heat distribution from the released heating element using FLIR 40
The heat distribution of a non- released heater element as
seen in figure Non-released heater element
The input power was 1,1 W and this should be compared with the non-released heater element that requires 2,4 W input power of to reach 490 C
Ceramic gas sensor – integrated heater
New developments
Flexible substrate – gas sensors, batteries
Ink Jet Technology – sensors on paper for gases detection
Integration: signal processing, GUI
New developments
Modelling and simulation activities
Design for Manufacture (etch simulations)
Calibration of a new software application (Etch3D – developed by Coventor, Inc.), designed for anisotropic silicon etching simulations.
test structures were used, with different sizes and shapes; the real test structures (etched in both KOH and TMAH,
with different temperatures, concentrations and etch times) were compared to the simulation results;
the program’s internal parameters were adjusted, in order to fit the lab results.
Design for Manufacture (etch simulations)
SEM picture of the etched test structure (TMAH, 25%, 80º C, 5 min.)
Simulation using default values of the program parameters (for TMAH, 25%, 80º C, 5 min.)
Tuned values of the program parameters (TMAH, 25%, 80º C, 5 min.).
Experimental and simulation results for the 4-crosses test structure (using TMAH)
Microfluidic simulations were performed, in order to analyse one fluid velocity through a specific microchannel design. The simulations were used to observe the flow speed and direction of the liquid passing through, and also dead spots in the flow (zones with much slower velocity), for different fluid flow rates.
Microfluidic modelling
Dead volume and cross contamination Model compatibility issues solved for different platforms
Several simulations performed: Continuous flow analysis (velocity, pressure, etc.);
Slug-flow analysis (fluid bubbles through channels);
Identification of fluids cross-contamination and dead-volumes.
Microfluidic modelling
Multi-domain modelling
Modelling of a thin membrane silicon pressure sensor
Micro-mechanical simulation (membrane deflection, stress induced);
Electrical and piezoresistive simulation (for determining the current change due to the mechanical stress induced by the applied pressure).
Conclusions
Continuing technology development New technologies for platforms develop Offering services: sensors and platform
prototyping, simulation, training Interest: New projects partnership Industry attracting, bringing inventions to
innovations Start-up development