intellisuite v8.6
TRANSCRIPT
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Design Flow in IntelliSuite v8.6
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Design flow
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MEMS design is highly interdisciplinary
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Mechanics
Electrostatics
ElectrostaticLevitation
Squeezefilm damping
Couettedamping
Anchor Losses
(TED, Acoustic)
ContactPhysics
VIBROMOTOR DRIVE
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Colliding domains
Mechanics
Electrostatics
Magnetostatics
Fluidics
Optics
Electromagnetics
Biochemistry
Electrokinetics
Acoustics
Physics
Piezoelectrics
Ferromagnetics
Piezoresistive
Magnetorestrictive
Proteomics
Genomics
Materials
Process design
Process simulation
Yield optimization
DfM
Packaging
Manufacturing
Electronics
Control theory
Systems
Biology
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Hierarchy of MEMS modeling
StructuralBehavioral
Physical
Device level
System
Algorithmic
Ab Initio
Component level
Process
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Seamless integration of design flow…
1
2
4
3
StructuralBehavioral
Physical Process level
Schematic capture
ComponentLibrary
LayoutProcess
Modeling
PhysicalExtraction
Ab Initio&
Process modeling
Synthesis &
Optimization
System ModelExtraction
3D Multiphysics engineBehavioral Multiphysics engine
Layout engineVerification engine
DRC engine
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Process
Flow
ProcessDatabase
MaterialDatabase
ElementDatabase
Structural
Description
Netlist
iterative calculations
Design of experiments
Sensitivity Analysis
Monte Carlo Methods
Synthesis techniques
Top down flow: schematic based…
Fast but less accurate…
Synthesized Mask Layout
Design for Manufacture
Meshed model for 3D Verification
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Bottom up design flow: 3D based
Accurate but slower…
Process
Description
Process
Flow
Process
Database
Material
Database
3D Model Simulation
Results
Mask
Set
3D Multiphysics
Multiphysics“Black box”
System Model
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Bottom UpTop Down
IntelliSuite: Best of both worlds
Requirements
Microsystem
Physical VerificationSchematic vs 3D Macromodel
SchematicCapture
Sche
mat
ic b
ased
Anal
ysis/
Opt
imiz
atio
nMask & Mesh
Synthesis
Process flowMask Set
Mul
tiphy
sics
Anal
ysis
Extraction
Accurate + Fast
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IntelliSuite Tool Chain
BlueprintPhysical designLayout/DRCTape Out
Clean RoomProcess flow designProcess debugProcess visualization
Fast FieldMultiphysics solversCoupled field analysisSystem model extraction
SynpleSchematic captureComponent basedDesign explorationMask and 3D synthesis
EDA LinkerLink to EDA toolsCadence, Mentor,Synopsys, Ansoft,Mathworks etc…
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Behavioral modeling
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Synple capabilities (Behavioral)
Yield EngineeringDfMProcess Corner studiesYield prediction
Multiphysics computationMechanicsElectrostaticsDamping/DissipationPiezoMixed SignalControl Systems1000X faster than FEA
SynthesisSchematic to maskSchematic to 3DSchematic to mesh
Schematic captureDesign ExplorationOptimizationDesign for manufacture
Link to other toolsAutomatic meshingDerive process flow
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Hierarchical multi-domain design
Atomic elements
Compound elements
Device elements
Transistor RLC Plate Anchor Beam Gap
-
+
Op-AmpShuttle mass Folded flexure spring Comb drive
-
+
Interface circuit Resonator
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Wide Range of Building Blocks
Structural
MechanicsThermal MEMS
Macro-
model
Electrical Digital Electronics Controls
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Schematic based design exploration
Compute time: 4 hr (Full 3D) vs 30s (compact)
Band pass filter
Monte Carlo basedprocess variation analysis
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Visualize schematic results in 3D
Mode 1: In Phase
Mode 2: Anti Phase
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Schematic to mask
Attention to detail
Stress relief curves Dimples Comb bumpers Etch compensationfeatures
Automated layout synthesis
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Schematic to process flow
Process flow for fabricating the device is automatically derivedfrom the schematic and technology file information
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Schematic to 3D model
Attention to detailAutomatic placement of dimples, anchors and other secondary features
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Schematic to mesh
Automated Hexahedral Meshing of the Structure
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BenefitsSchematic driven designEntry point for parametric design and design exploration
Hierarchical modelingModel your device at system or circuit level
Save time100-1000X faster than FEA models.
Design exploration and optimizationQuickly prototype and explore multiple designs
3D System modelingView your results in 3D
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Physical design & verification
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Blueprint capabilities (Physical)
Design Rule CheckTape Out DRC EditorPowerful hierarchical DRCAll angle supportEasy Error Navigator
Layout visualizationCross section drawing3D Visualization of layout
Design captureLayout optimized for MEMSAutoCAD™ like interfaceLarge design libraryHierarchy supportSmart LayersPathfindersScripting
HexpressoAutomated HEX mesher1 click Mask to Mesh
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Blueprintmems design editor
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hex meshing in a jiffy
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CS ViewerStep by step process visualization
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Cleanroom integration
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Tape OutPhysical verification
all angle support
intuitive error markings
Easy error navigation
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Tightly integrated with layout
Step by step process visualization
Process debug
Output cross sections to Powerpoint
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One click meshing
Mask to mesh
Process based meshing
Adaptive meshing
Quick and robust mesherhex meshing in a jiffy
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Process validation
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What is Clean Room?
Process simulation and visualizationState of the art 3D process modeling
RECIPERIE/ICP/Bosch etch simulation STS etch database
IntelliEtchAb initio based etch modeling wet and dry etch modeling
MEMaterialMaterial databases & process optimization
IntelliFABProcess traveller creation and visualization.
HexpressoAutomated hexahedral meshing engine for FEA/BEA model creation
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Clean Room capabilities (Process)
Material databasesProcess correlated databasesMaterial properties
Process simulationFABViewer: Flow visualizationAnisE - Anisotropic etchingIntelliEtch - ab initio etchingRECIPE - RIE/ICP etch simulator
Process captureDevelop process travellerDebug travellerCreate process databases
HexpressoAutomated HEX mesher1 click Mask to Mesh
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Setup complex process flows…
1Process Editor for MEMSIntelliFAB makes editingand organizing a processtable quick and easy. Setup your virtual process traveller exactly as you would for a real foundry.
2Group, section, organizeGrouping common sets of processes into process subsets makes the organizing a complex traveler easy. You can group your process flow in any which way you please: bymaterial, by process type or by process option.
3
Process PaneEnter process parameters,tolerances and visualization settings in a single consolidated pane
4
Filter with easeFiltering tools allow you to quickly focus on the processes that you want to explore
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Visualize Complex process flows
Courtesy, Prof Tim Dallas, Texas Tech
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Visualize Complex process flows
Courtesy, Prof Tim Dallas, Texas Tech
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Visualize Complex process flows
Courtesy, Prof Tim Dallas, Texas Tech
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Simulate composite MEMS processes
Composite processes, Shikida Mitsuhiro, J. Micromech. Microeng. 14
Combination of multi-step mask transfers, oxide and nitride layers, sacrificial layer deposition and wet etching and DRIE processes.
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Validate processes in design
110 um100 min
166 um150 min
225 um200 min
56 um50 min
166.40 um139.62 min
110.93 um95.27 min
226.13 um190.44 min
56.89 um51.27 min
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Higher order plane etching
D. Saya, Sensors & Actuators A95 (2002)
Simulation results
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Surface morphology prediction
Pyramid like morphology on 100 Sisubject to wet anisotropic etching
Simulation results predict pyramid formation
Arbitrary Cut Planes <533>to understand the physics
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Surface morphology prediction
1 Micromasking of apex2 Floor moves down fast3 Edges are stable4 Facets are very stable
Hillock formation prediction
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DRIE Etch characterization experiments (1)
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DRIE Etch characterization experiments (2)
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Output to FEA
Interface with analysis tools: Direct export to IntelliSuite and other industry formats
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process to model
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Fastfield solvers
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Fastfield capabilities (Structural)
Specialized enginesBioMEMS High frequency EMag
Fully coupledThermalElectrostaticsMechanicalFluidicsContact physicsPiezoMagnetostatics
Fastfield MultiphysicsUnique FEM-BEM formulation64 bit multi-processor enabled5-10X than pure FEM based
ExtractionMultiphysics captureEfficient for verificationLagrangian models1000X more efficient that FEA
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What is Fastfield Multiphysics?
Coupled solver formulationANSYS, Algor, Comsol, etc are all pure Finite Element tools
Best solver for each physics domainBoundary Element Method (BEM): Electrostatics, Electromagnetics
Finite Element Method (FEM): Thermal, Mechanical and Electromagnetics
Volume of Flow (VoF) and Finite Volume (FV): Fluidics, Electrokinetics, Chemical Reactions
Advanced pre-correction and solver techniquesPre-corrected FFT (pFFT++), GMRES, Arnoldi, OpenMP based multi-processor solvers
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Why Fastfield Multiphysics?
Speed and efficiency2-10X Faster than pure FEA formulation (Algor, Ansys, Comsol, etc)
Handle large real world problems
Surface meshing vs volume meshesInternal volumes, air gaps, etc do not need to be meshedEase of meshing, no costly re-meshing during deformation
Ease of convergenceQuickly run your analysis without convergence issuesDeal with large deformations, contact and post-contact without convergence issues
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52
Rotary ring gyro Rate/Coriolis analysis
Draper vibratory gyroElectrostatic drive
Lockheed inertial deviceSqueeze film analysis
Raytheon/TI RF switchNon-linear contact analysis
HitachiRF Tunable Filter
NASAAdaptive optics
Corning3D Optical cross connect
NASARadiation detectors
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Micro-mixing in a valveConcentration gradient evolution
Flow mixing Y combiner
Fluid Structure InteractionInlet flow - membrane interaction
Inlet
Membrane
Flow separation device
Free surface flowSlide coater
Electrokinetics Multiplex focusing
Electro-osmotic driven flow Electrohydrodynamics for cooling
Electrophoresis/DielectrophoresisHigh Frequency Waste separation
Microfluidics• Electrokinetics • Transport stochiometry • Heat transfer • Electro-Wetting on Dielectric (EWOD) • Digital droplet microfluidics • Free Surface Flow • Fluid Structure Interaction • Electrochemistry • Micro-mixing • Electrophoresis • Dielectrophoresis • Capillary flow and electro-
separation • Electro-osmosis • Electro-hydrodynamics • Micro-pumps
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Flow evolution in a piezoelectric membrane micro pump
Example: Valveless piezoelectrically actuated micropump
Outlet
Inlet
PZT actuated membrane
Flow chamber
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Piezo-acoustic wave generation
Multi-processor enabled BAW/SAW simulationFast impedance and phase ripple calculations
1 2
Phase ripple ina BAW device
Fast ImpedanceExtraction
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Enhanced Chemical ReactionMicrofluidics with enhanced transport kinetics1 2
Two reactants meeting at the junction and reacting to form a new analyte. Support for multivalent reactions is new in v 8.5
Enhanced ion drag calculations allows you to optimize elbow turns to minimize concentration skews
Enhanced transport behaviorMultivalent Ion drag calculations in electrokinetic transport
Concentration skewing Minimized concentration skewing
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Electrowetting on dielectric (EWOD)3D Electrowetting calculations
3
Droplet moving around a pre-set track (top view) Droplet fission (top view)
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IntelliSuite is the only tool on the market that allows you to perform coupled Thermo-Electro-Mechanical & Full Wave ElectroMagnetic analyses— this is particularly useful in designing deformable RF-MEMS such as switches, tunable capacitors and varactors.
ElectroMagnetics
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Extraction & verification
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What is extraction?
Simplifying a full 3D model into behavioral model
Convert FEA/BEA model (large DOFs) into computationally efficient model
Develop pre-computed energy based model that captures multiphysics
What is extracted ?
Mechanical Strain Energy of Modes of Interest (Including stress and stress gradient effects)
Capacitive energy
Thermal effects (deformation due to temperature change)
Fluidic Structure Interaction (due to compressive or non-compressive media)
Other dissipation sources (thermoelastic damping (v8.6.1) and anchor acoustic losses (v8.6.2))
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❶ Capture total energy of relevant mode(Mechanical, Electrostatic, Dissipation)
❷ Krylov/Arnoldi methods to generate Lagrangian formulation
❸ Create Compact model for system modeling
System Model Extraction (SME)
First mode
Second mode
Third mode
Capture strain energy associated with each mode
Capture electrostatic energyassociated with each mode
Capture fluid dampingcharacteristics
Arnoldi/Krylov sub-spacereduction
N-DOF behavioral modelbased on Lagrangian
formulation
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HDL formulation
CompactRepresentation
HardwareDescription
HDL
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System model extraction (SME) flow chart
/ SPICE OR OTHER EDA TOOL
Summary: Convert problem from Newtonian (inertia based) to more efficient Lagrangian domain (energy based)
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• Automated full multi-physics capture
• 1000 X faster than pure FEA
• Matches FEA to within 1% accuracy
• Fully capture harmonic responses
• 3D MEMS system simulation
• Device and package level extraction
• Automated VHDL/Verilog/ SPICE generation
SME advantages
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Create accurate N-DOF dynamic system model from MEMS FEA/BEA model
Output system model into SPICE, HDL, and Simulink formats
Compatible with EDA tools from Cadence, Mathworks, Mentor, Synopsys and Tanner
Integrated CMOS-MEMS (SoC/SiP) compatibility
EDA Linker capabilities (compatibility)
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Final MEMS Device design(Multiphysics)
Transistor level design(SPICE/SYNPLE or other EDA tools)
Gate levelPlace and route, DRC, LVS
(Cadence/Synopsys/Mentor/ViewLogic/Tanner etc)
Device/System Design ExplorationDesign of Experiments
(SYNPLE/IntelliSuite)
1
2
4
5
Final Layout(IntelliMask Pro/ L-Edit/ Virtuoso/other)
6
N-DOF LagrangianSystem Model Extraction
(IntelliSuite)3
MEMS-CMOS integrationdesign flow can be based on :
√ VHDL-AMS
√ Verilog-A
√ SPICE netlist
√ Matlab/Simulink .MEX
Integrated design flow for MEMS + IC
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What is verification?
Model verification (Schematic vs 3D)
Verify schematic model and 3D model match
Ensure MEMS model used in circuit development is accurate
Physical verification (‘Tape Out’)
Verify physical layout is consistent with Design Rules
Ensure design meets manufacturability criteria
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-1.800
-1.400
-1.000
-0.600
-0.200
0.200
0 2 4 6 8 10 12
Extracted 3D
Static model verification
Pull-in: Schematic results vs Full 3D results
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Damping model verification
Perforated condenser membrane
Full capture of fluidic damping and spring force
Full 3D (TEM) vs Macromodel comparison
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Dynamic model verification
Transient response of device: Schematic vs FEA (3D)
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Summary
• End to end design tools for MEMS
• Simulate MEMS at any level:Ab-initio, Component, Device, Algorithm and System
• Flexible design flow to achieve accurate and fast results
• Used by major customers in 30+ countries
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Dziękuję • Спасибо • Ευχαριστώ • Asante Sana • Dankie