internet of things: driving technology...
TRANSCRIPT
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INTERNET OF THINGS: DRIVING TECHNOLOGY TRENDS ON SYSTEM SCALING ANDSEMICONDUCTOR MANUFACTURING EFFECTIVENESS
LODE LAUWERS
VICE PRESIDENT, PHD
BUSINESS DEVELOPMENT & SALES
MAY 2015
THE CONFAB 2015: Exploring the Edges of IoT and Mobile
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Drones
Smart TextilesSmart Cars
Smart Homes Source: http://blogs.jabil.com/2014/08/13/internet-of-things-infographic/
Smart Watch
Smart Phones
Laptop
THE IOT PREMISE: EveryThing connected, managed, securedBillions of wirelessly interconnected devices will communicate intelligently
Smart Glasses
Source: Market Realist
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#CONNECTED DEVICES: A MATTER OF MATH
Source: Bosch; IDC
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Source: Bosch; IDC
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KEY DRIVERS IN IOT ECOSYSTEM
Source: Bosch
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IOT CHALLENGES: READINESS CHECKLIST
Source: TI
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TECHNOLOGY CHALLENGES
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IOT SYSTEM INNOVATION
NEW SYSTEMARCHITECTURE
NOVEL MEMORYTECHNOLOGY
SPECIALTYDEVICE
NEW APPLICATIONULP DRIVEN
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System applications requirements
Power
Performance1Top/s100Gop/s10 Gop/s10Mop/s
500 Watt
(mains level)
1Watt
(battery level)
100mWatt
(battery level)
100mW
(ambient level)
1Pop/s
100 Watt
I/O bandwidth100Gbp/s1Gbp/s10 Mbp/s1Mbp/s 1Tbp/s
Core
Off Chip
Memory
Performance: Operations per second (Ops)
Memory: # Bits
I/O bandwidth: Bits per second (bp/s)
Stationary
Mobile
Ambient
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System applications requirements
Power
Performance1Top/s100Gop/s10 Gop/s10Mop/s
500 Watt
(mains level)
1Watt
(battery level)
100mWatt
(battery level)
100mW
(ambient level)
1Pop/s
100 Watt
I/O bandwidth100Gbp/s1Gbp/s10 Mbp/s1Mbp/s 1Tbp/s
Core
Off Chip
Memory
Performance: Operations per second (Ops)
Memory: # Bits
I/O bandwidth: Bits per second (bp/s)
Stationary
Mobile
Ambient
Increased Performance @ constant power density
Wired, heat dissipation constrained
Increased Performance @ constant leakage
Cost trade-off
Wireless, battery constrained
Ultra low power, cost trade-off
Wireless, energy scavengers
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System applications requirements
Power
Performance1Top/s100Gop/s10 Gop/s10Mop/s
500 Watt
(mains level)
1Watt
(battery level)
100mWatt
(battery level)
100mW
(ambient level)
1Pop/s
100 Watt
I/O bandwidth100Gbp/s1Gbp/s10 Mbp/s1Mbp/s 1Tbp/s
Core
Off Chip
Memory
Performance: Operations per second (Ops)
Memory: # Bits
I/O bandwidth: Bits per second (bp/s)
More performance per Watt:
1. Technology: transistor improvement
2. Circuit: e.g. Near Threshold Computing (NTC)
3. Architecture: e.g. Multi-Core, Neuromorphic
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13imec confidential
Imec Logic Device RoadmapDevice Technology Features
Early
production
2013 - 2014 2015 - 2016 2017 - 2018 2019 - …
16 -14nm 10nm 7nm 5nm
Vdd (V) 0.8 0.8-0.7 0.7-0.5 0.7-0.5
Device FinFET (Bulk, SOI), FDSOI FinFET (Bulk, SOI) FinFET (GAA, QW, SOI) GAA lateral NW; (Vert. NW)
FinFet width (nm)
FinFET pitch (nm)
7-8nm
42-48nm
5-7nm
30-32nm
5nm
21-24nm
5nm
14-16nm
Gate Stack HKMG HKMG HKMG HKMG
CPP (nm) 64-80nm 50-64nm 32-42nm 22-32nm
Channel n/p Si / SiGe Si / SiGe (Ge>80%) Si / SiGe (Ge) Si / SiGe (IIIV / Ge)
S/D Strain N S/D Si:P
P S/D eSiGe (55%)
Low-k spacer
N S/D Si:P:C
P S/D eSiGe (>60%)
Low-k spacer
N S/D Si:P:C
P S/D eSiGe (>60%)
Low-k spacer
TBD
Lgate (nm) 20-25nm 15-20nm 10-15nm 10nm
Planar SOI Bulk FinFET SOI FinFET SiGe/Ge channel IIIV channel Lateral Nanowire Vertical Nanowire
Improve Electrostatics
Improve Performance
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15 20 25 3010
Gate length (nm)
60
70
80
90
100
110
120
Su
bth
resh
old
Sw
ing (
mV
/de
c)
Tapered Fin
FinW=7-10nm
Straight Fin
FinW=7-8nmUltra-Thin Fin
FinW=5nm
Gate-All-Around Nanowire
Nanowire = 7nm
N22N14N10N7N5
FinFETs
(Vdd ~ 0.7-0.8V)
0.1 0.2 0.350
100
150
200Closed symbols: D
2 anneal
SiGe25% FinFET
SiGe25% GAA
SS
SA
T m
edia
n (m
V/d
ec)
Gate length (mm)
SiGe25%
Improve Device ElectrostaticsFrom finfets to lateral nanowires
Introduction of Gate-All-Around Nanowires to improve device electrostatics beyond N10
N14 FinFET
Gate-All-Around NW
45nm
10nm
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Si1-xGex (x>0.7)
sGe
Si(100)HAADF STEM
Improve PerformanceHETEROGENEOUS CHANNELS: INTEGRATING GE AND IIIV ON SI
Si
InP
Si
InP
Defect Trapping
InGaAs
Si
Ge
Extr
insi
c g
m,s
at(m
s/m
m)
Ssat (mV/dec)
sGe QW FinFET
(STI last)
(300mm Fab 2013)
(0.5V)
State-of-the-art Si
FinFETs (0.8V)
TSMC Ge Bulk
FinFET (0.5V)
(IEDM 2013)
PFET
Ssat (mV/dec)
Ko,
Nature2010
InAs-O-I
Lee, VLSI 2013
InAs channelIntel 2009
InGaAs planar
Egard
IEDM
2011
InGaA
s
planar
InAs planar
(Chang,,TSMC)
IEDM 2013 (0.5V)
Sematech
IEDM
2013
InGaAs
IMEC-Lab InGaAs planar
(0.5V)
IMEC-300mm
InGaAs FinFET
(0.5V)
State of Art Si
FinFETs (0.8V)
IMEC-300mm InGaAs
GAA (0.5V)
Extr
insi
c g
m,s
at(m
s/m
m)
NFET
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16imec confidential
Imec logic BEOL roadmapImprove RC parasitics and electro-migration
Early
production
2013 - 2014 2015 - 2016 2017 - 2018 2019 - …
16 -14nm 10nm 7nm 5nm
Contact Self-aligned, adv. Contact
beyond Ni
Self-aligned, adv. Contact
beyond Ni
Self-aligned, adv. Contact
beyond Ni
Self-aligned, adv. Contact
beyond Ni
Contact pitch (nm) 64-80nm 50-64nm 32-42nm 22-32nm
Low k 2.5 – 2.4 2.5 – 2.3 (air gaps 1.3x) 2.4 – 2.1 (air gaps 1.3x) 2.4 – 1.9 (air gaps 1.3x)
Metallization PVD TaN/Ta
PVD RF CuMn
ECD Cu
PVD TaN
CVD Co or Ru
PVD Cu + ECD Cu
CVD Mn(N)
CVD Ru or Co
ECD seed + ECD Cu ELD/CVD Cu; (Cu alternative)
Metal pitch (nm) 56-64nm 40-45nm 28-32nm 20-22nm
e-Memory (um2) SRAM 0.08-0.07 SRAM 0.06-0.05 SRAM < 0.05 SRAM < 0.05; (STT-RAM)
Lower Resistance
Lower Capacitance
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Advanced Cu / low k engineering
Contact
• Significantly improved contact
resistivity with Ti direct or MIS
contact on Si-high P with laser anneal
Low k
k=2.2
C
u
• Demonstrated k=2.2 integrated;
improved yield with UV treatment post
deposition
Metallization
D02 D03 D04 D05 POR50
100
150
200
250
300
( /u
m)
W = 23nm
• Liner/barrier optimization, able to
fill 22nm half pitch trench with good
contact resistance
N10 metallization schemes benchmark
N10 via chains metallized
Local Interconnect +
Trench Contact
Fin S/D Epi
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PATTERNING CHALLENGESEUV
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193i Multi patterning EUV lithography DSA
N7 Fin
SAQP 11nm
L / S
Cut litho
Core 2 etch
Spacer 2 + Core 2
removal
Core 1 + spacer 1
Spacer 2 transfer
Fin Etch
Advanced patterning readiness
▸ N10 BEOl LE^3 process (P=45nm)
▸ N7 SAQP Process (FP=22nm))
▸ M1 design flow for N7 (M1H+M1V)
▸ Various alternative resist materials
under evaluation
▸ N10 BEOl SE EUV NXE3300 process
(P=45nm)
▸ EUV pellicle development: membrane
materials, primary mounting options,
lifetime testing of integrated pellicle
solutions
~24 defects /cm2
2.5 hr anneal
(Oct “14)
▸ Defect reducton from >200 to 24/cm2
Post-trim 45nm hp Post-DSA 15nm hp
▸ 9x pattern frequency multiplication for
holes resulting in post-DSA 15nm hp
▸ Surface conditioning leading to better
placement accuracy
Reso
lution
Resi
stM
ask
Pro
cess
Defe
ctiv
ity
Imple
menta
tion
Pro
cess
Pro
cess
Desi
gn
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InAs Nano wire
on <111> Si
LOGIC BEYOND 10nm FINFETVERTICAL NANOWIRES, 2DMATERIALS.... THE NEXT SWITCH?
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FINDING THE NEXT SWITCH
Graphene Logic
Ultimate
Logic
NAND2 Benchmark: Praveen Raghavan
(Imec)
After Nikonov & Young (Intel 2012)
InAs TFET
All Spin Logic
MTJ Logic
Spin Wave
CMOSFET continues to be
more efficient with scaling
Spin wave devices: no transport of
electric charge, low energy and power,
potentially slow (low wave velocity)
10-1 100 101 102 103 104
101
100
10-1
10-2
10-3
En
erg
y, fJ
Delay, ps
Tunnel FET allows for Ultra Low Power (at cost of performance?)
Spin Wave Computing adds functionality to or could replace existing CMOS technologies
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CMOS circuit
25 transistors
> 100 interconnect vias
Waveguide
Transducer
CI O
I1
CO
I2
I = Input
O = Output
CI/CO = Carry
in/out
Wave computing circuit
5 transducers, 4 wave-guides
and 5 vias
Process integration : 3D stacking on CMOS
M1
M2
CMOS level
Example: 1-bit full adder in CMOS and wave computing technology
Power / Performance comparison
• Circuit simplification leads to smaller circuits despite larger CD
• Simplified process integration
• IMEC benchmarking indicates about 100× lower power for large arithmetic circuits
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Power
Performance1Top/s100Gop/s10 Gop/s10Mop/s
500 Watt
(mains level)
1Watt
(battery level)
100mWatt
(battery level)
100mW
(ambient level)
1Pop/s
100 Watt
40nm imec SOC chip reduced Vdd, T. Gemmeke, DATE 2015
Actual scaling due
to variability
Ideal scaling ≈ VDD2
1 MHz
Scaling down to FinFET:
Improved electrostatics allows better
low Vdd operation
The potential gain of Near Threshold Operation
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System applications requirements
Power
Performance1Top/s100Gop/s10 Gop/s10Mop/s
500 Watt
(mains level)
1Watt
(battery level)
100mWatt
(battery level)
100mW
(ambient level)
1Pop/s
100 Watt
I/O bandwidth100Gbp/s1Gbp/s10 Mbp/s1Mbp/s 1Tbp/s
Core
Off Chip
Memory
Performance: Operations per second (Ops)
Memory: # Bits
I/O bandwidth: Bits per second (bp/s)
More data per Watt:
1. Technology: memory improvement
2. System: e.g. more on chip memory (reduce off-chip BW)
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SRAM
DRAM
FLASH
Speed
Cost
/bit
Capacity
6T
1T1C
1T
Cache
On Chip
Working memory
Mass storage
Need for new memory technologiesExisting technologies challenged beyond 18nm
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MEMORY: BEYOND 20nm
STT MRAM
DRAM replacement beyond 20nm
Non-volatile memory for
both embedded and stand-alone
applications
<20 nm
STT RAM
Re RAM
Flash replacement beyond 10nm
Non-volatile memory
High speed, low energy, superior scalability, CMOS
compatible
3D SONOS
Flash replacement to 10nm
Non-volatile memory
Memory cells implemented in vertical
plugs consisting of 8,16,32 ... stacks
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SRAM DRAM HDD
NANDNOR
STT
RAM
FeRAM
PCRAM
RRAM
Emerging Memory Benchmarking
STT-MRAM has the best combination of speed/endurance for SRAM/DRAM replacement.
RRAM has potential for e-NVM and IOT devices in cost tradeoff
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Likely industry memory roadmap
Cache
2014 2015 20172012 2019 2021
RRAM, STT, PCM?
Planar FG
4Gb 8Gb 16Gb
DRAM DRAM: MIMCAP scaling with high-k optimization
STT-MRAM
NOR
Planar FG
64Gb 128Gb 256Gb 512Gb 1Tb
FLASHConventional wrap Floating Gate
Planar Floating Gate
3D NAND
STORAGE
CLASS
MEMORY
RRAM/CBRAM / PCM
STT-MRAM
2013
eNVM
SRAMeSTT-RAM
eDRAM
3D NAND
Samsung
FG
20nm FG
Micron
16Gb CBRAM
ISSCC 2014
Increasing need for non-
volatile embedded
low-voltage
memories
(reduces off-chip
BW).
Path to ultra-low
standby power
systems.
E-NVM:
2B$ by 2018
Automotive, smart cards,
New apps,
IOT device...
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3D & OPTICAL IO
Optical IO: extension of 3D stacking
Further performance boosting, extreme high-bandwidth
Optical interconnects using silicon photonics instead of electrical interconnects
Fabrication of optical components by using CMOS processing techniques and equipment
Need for best-in-class optical components
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3D STACKINGMEMORY / LOGIC / 3D ENABLED SCALABLE I/O
Multi-die Memory stack
- Combined with logic I/O circuit
DRAM Logic DRAM Logic I/O
High performance devices: 3D integration using a Si Interposer
Wide I/O memory on SOC logic
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3D-SIC 3D-SOC 3D-IC
Wiring level Global Semi-global Intermediate Local FEOL
2-tier
stack
Multi-tier FEOL
TSV Pitch 10 7 5 µm 10 7 5 µm “ TSV” after stack “TSV” after stack No TSV
Contact Pitch:
Rel. density:µbump pitch:
4020105µm
1 41664
Cu TSV –Cu pad:
10 7 5
µm
16 33 64
5 1 µm
64 1600
2 µm 0.5 µm
800 6400
200 100 nm
4 104 1.6 105
< 100 nm
> 1.6 105
Stacking
Method
D2D, D2W
(W2W)
Stacked die
B2F / F2F
W2W (D2W)
Contact at bond
interface
F2F
W2W
Contact after stacking
F2F
W2W
Si layer-to-wafer
stacking
2nd Tier Device fab.
after stacking
Monolithic
Device-level stacking
3D Technology Landscape
2nd FEOL
after stacking
(Overlay 2nd tier defined by litho scanner
alignment)
(Overlay 2nd tier defined by W2W
alignment/bonding)
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• Via middle: successful integration
3x50um via middle TSV using WN
barrier / ELD NiB seed and ECD Cu
fill, resulting in champion reliability
data
• Via last on carrier: successful 5x50
&10x50um integration
• Via last on bonded Si wafers: 2x20um
TSV demonstrated
3D Advanced process integration
TSV Scaling
10×
50µm
5×
50µm
2×
20µm
3×
50µm
Via middle Via last
Micro-bump and stacking
• ubump scalability towards 10um pitch
using ELD coating
• Cu-Cu bonding using ELD Au to
enable Sn wetting
AuSi
Si
Au
C
u
C
u
• Oxide-oxide bonding with bond
strength >1.5mJ/m2, W2W overlay
<1um
Thermo-mechanical impact
• Electrical: Estimation impact TSV and
ubump stacking on N7 devices.
• Micro-bump mechanical strain impact
on high mobility channel devices
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Optical I/O: system scaling projection
Package I
/O
Req
uir
em
en
ts
CMOS tech node 20-28nm 14nm 10nm 7nm 5nm
I/O Bandwidth 2.5Tbps 5Tbps 10Tbps 25Tbps 50Tbps
I/O Energy 10pJ/bit 5pJ/bit 1-2pJ/bit 0.1-1pJ/bit 50-500fJ/bit
Channel Rate up to 35Gb/s up to 50Gb/s up to 70Gb/s up to 100Gb/s up to 140Gb/s
Cost Target $$$$/Tbps $$$/Tbps $$$/Tbps $$/Tbps $/Tbps
Optical I/O Distance
& Appl.
5m to 2km
Network
1m to 2km
Backplane
5cm to 2km
Board
5mm to 2km
Interposer
1mm to 2km
Chip
Datacenter NetworkRack-to-rack:5m-500m+
Datacenter switch/router interconnect
Source: LightCounting Backplane/BoardPackage-to-package: 5cm-5m
Logic-to-DRAM, logic-to-logic, ...
Source: Intel
Chip/Interposer1mm-5cm, interposer interconnects
Logic-to-logic, logic-to-memory, ...
Source: nVidia
Increasing system requirements for I/O drive
Optical interconnects to ever shorter link distances
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Optical I/O: Technology Roadmap
Package I
/O
Req
uir
em
en
ts
CMOS tech node 20-28nm 14nm 10nm 7nm 5nm
I/O Bandwidth 2.5Tbps 5Tbps 10Tbps 25Tbps 50Tbps
I/O Energy 10pJ/bit 5pJ/bit 1-2pJ/bit 0.1-1pJ/bit 50-500fJ/bit
Channel Rate up to 35Gb/s up to 50Gb/s up to 70Gb/s up to 100Gb/s up to 140Gb/s
Cost Target $$$$/Tbps $$$/Tbps $$$/Tbps $$/Tbps $/Tbps
Optical I/O Distance
& Appl.
5m to 2km
Network
1m to 2km
Backplane
5cm to 2km
Board
5mm to 2km
Interposer
1mm to 2km
Chip
Optica
l I/O
Tech
nolo
gy O
ptions
Packaging &
Assembly
Optical Module
on Board
Optical Module
on Package
Optical Module
on Interposer
Optical Interposer Wafer-bonded
Optical Layer
Lasers Flip-chip III-V die Flip-chip III-V die Flip-chip III-V die Flip-chip III-V die
Monolithic Ge or III-V
Flip-chip III-V die
Monolithic Ge or III-V
Modulators Si Mach-Zehnder Si Mach-Zehnder
Ge EAM
Si SL-MZ or Ring
Ge EAM
Si SL-MZ or Ring
Ge or III-V EAM
Ge or III-V EAM
Graphene/BTO
Detectors Ge p-i-n PD Ge p-i-n PD Ge APD Ge APD or III-V
(A)PD
Graphene PD
Ge APD or III-V
(A)PD
WDM Multiplexing CWDM-4 CWDM-4
DWDM-8
CWDM-4
DWDM-16
CWDM-4
DWDM-32
CWDM-4
DWDM-64
Optical Channel SingleMode Fiber SingleMode Fiber SingleMode Fiber
MultiCore Fiber
Optical PCB
SingleMode Fiber
MultiCore Fiber
Optical PCB
SingleMode Fiber
MultiCore Fiber
Optical PCB
Optical
moduleLogic die
PCB
Optical
interposer
Optical PCB
Logic die
Optical PCB
Optical
layerLogic layer
Optical
moduleLogic die
Optical PCB
Optical
moduleLogic die
PCB
Stringent requirements for optical I/O (BW density, ernergy, cost) drives:
• Optical module integration closer to the host IC
• Development of a low-power, high density Silicon Photonics Technology
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EMERGENCY & SECURITY SMART LIVING RETAIL & SHOPPING INTERACTIVE GAMING
ENVIRONMENTAL MONITORING AUTOMOTIVE SPORTS UTILITIES
AGRICULTURE CONSUMER ELECTRONICS HEALTHCARE CONSTRUCTION
SMART APPLICATIONS
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SENSORMODULES
WIRELESSCONNECTIVITY
FLEX TECHNOLOGIES
imec develops solutions for the
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MULTI GAS SENSOR AIR QUALITY MONITORING
2"mm
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ION SENSOR PLATFORM FOR FLUIDIC ANALYSISWATER QUALITY MONITORING
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HYPERSPECTRAL IMAGINGUNIQUE SPECTRAL FINGERPRINT
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HYPERSPECTRAL IMAGER LOW-POWER - PORTABLE - AFFORDABLE
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AGRICULTURECAMERAS ON DRONES INSPECT FOOD ON THE FIELD
Image courtesy of Volt Robotics
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RGB HYPERSPECTRAL
AGRICULTURECAMERAS ON DRONES INSPECT FOOD ON THE FIELD
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automotivesmart mobility
FOOD
FOOD QUALITYINSPECTION
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MEDICAL GRADE CONSUMER DEVICESKIN CARE MONITORING
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low-power radio for personal area networks
RECORD LOW POWER 5mW: 2X BETTER THAN OFF THE SHELFSTATE-OF-THE-ART PERFORMANCE: -95dBm SENSITIVITYMULTI-STANDARD
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low-power radio for smart infrastructure
RECORD LOW POWER 4mW RX: 10X BETTER THAN OFF THE SHELFBEST IN CLASS PERFORMANCE: -120dBm SENSITIVITYMULTI-STANDARDHIGH LEVEL OF INTEGRATION
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wifi for sensors smart buildings
LOWEST POWER: ACTIVE & DEEP SLEEP> 1KM DISTANCEPRE-STANDARD COMPLIANT SYSTEM: IEEE 802.11ah
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SHORT DISTANCE - HIGH DATA RATEmm-WAVE : 60GHz PHASED ARRAY RADIO
© Panasonic
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AUTONOMOUS DRIVING & ACTIVE SAFETY79GHz RADIOS
© VOLVO
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THIN-FILM ELECTRONICSRFIDS - NFC TAGS - MEMORIES - ANTENNAS - DISPLAYS - SENSORS
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SMART RFID TAGSBRAND AUTHENTICITY - ADVICE
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SMART RFID TAGSAUTHENTICITY - CORRECT USE
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HIGH-RESOLUTION FLEXIBLE DISPLAYSVERY THIN <25 MICRON - VERY FLEXIBLE - LOW COST
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improved (chronic/acute) disease management
Bron foto: http://www.clemson.edu/glimpse/?p=1179
© CLEMSON UNIVERSITY
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MEDICAL QUALITY DATA & SOLUTIONSIN EVERYONE’S REACH
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empower people for disease prevention & healthier lifestyle
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IMEC WEARABLE HEALTH AND LIFESTYLE MULTI-SENSOR PLATFORM
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ULTRA-LOW POWER MULTI-SENSOR PLATFORMMEDICAL QUALITY DATA
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ECG PATCH
ULTRA-LOW POWEREMBEDDED ARTEFACT REDUCTIONACTIVITY TRACKING & ENERGY EXPENDITURE
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SAMSUNG DIGITAL HEALTH PLATFORMEMPOWERED BY IMEC MULTI-SENSOR PLATFORM
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imec generic EEG development platform
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BASED ON IMEC TECHNOLOGY
FROM PLATFORM TO PRODUCT FOR CLINICAL RESEARCH
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nanoelectronics enable disruptive innovation in healthcare
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CELL SORTING CHIPMILLIONS OF CELLS/MINUTE
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SINGLE CELL ANALYSISPOWERFUL INSTRUMENTATION - LOW COST
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DNA ANALYSISSPECIFIC MARKERS
RESPONSE TO DRUGSALLERGIESFOOD SENSITIVITYRISK TO DEVELOP CERTAIN DISEASE
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TESTS TO GIVE BEST COMBINATION OF DRUGSCHEAP - FAST - POINT OF CARE
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TOWARDS PERSONALIZED DRUGSAUTOMATED TESTING OF THOUSANDS OF CANDIDATE DRUGS ON CULTURED TISSUES
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NEED FOR ENERGY EVERYWHERESAFETY - FAST CHARGING - LOW VOLUME & WEIGHT - RELIABLE
© TEXAS INSTRUMENTS
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ENERGY STORAGE3D SOLID-STATE BATTERIES: HIGH POWER & HIGH SPEED & ENERGY DENSITY
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imec global collaboration platform
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75
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LamRESEARCH
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IMEC CORE CMOS PROGRAM:
BUILDING A ‘LAYERED ECOSYSTEM’...
.... OF WORLDWIDE PARTNERSHIPS
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.... OF WORLDWIDE PARTNERSHIPS
IMEC CORE CMOS PROGRAM:
BUILDING A ‘LAYERED ECOSYSTEM’...
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SUPPLIER HUBNEUTRAL PLATFORM FOR EARLY AND STRONG INVOLVEMENT OF EQUIPMENT AND MATERIAL SUPPLIERS IN PROCESS DEVELOPMENT
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Patterning center motivation
Increasing R&D challengesIncreasing R&D cost
Consolidating industry
Cost sharingRisk mitigation
Maximum leveraging of full eco-system
Increased supplier involvement & commitment
= Patterning Center
Increased critical mass on unit process developmentMost advanced equipment at affordable conditions
SUPPLIERS HUB
Increased supplier involvement & commitment
Increased critical mass on unit process development
Most advanced equipment at affordable conditions
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MAXIMISED VALUE CHAIN LEVERAGING
Core partner fees are minimized through maximized leveraging of other key players in value chain:Imec has successfully attracted increased participation of leading edge fabless companiesImec is successfully engaging increased participation and commitment of leading edge equipment and material suppliers
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FABexpansion
300mm
R&D
Pilot
Line
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Fab3 project
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SEPTEMBER 2015
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NOVEMBER 2015
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MARCH 2015
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MAY 2015
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SUMMARY
• The IoT information universe demands an increase for data / bandwidth / low power.
• Innovation is needed at device technology, circuit and architecture level to find solutions to
serve this wide spectrum of applications.
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LOGIC BEYOND 5nm2D MATERIALS