1. A new generation in EDS performanceThe new Slim-line XFlash 6 seriesQUANTAX EDS with Slim-line Technology for SEM and TEMSam Scheller, Global Product Manager EDS/SEM, Bruker Nano GmbHInnovation with Integrity

2. Overview Brief introduction to the new XFlash 6 family for SEM and TEM XFlash 6 Series the Ideal Detector for Every Application Detector Sizes from 10 mm to 100 mm for SEM and TEM Highest Throughput for Fastest Results Best Energy Resolution for Challenging Tasks Slim-line, Compact and Flexible ESPRIT the Ideal Analytical Software Suite for SEM and TEM07.06.2012 2 3. IntroductionXFlash 6 family for SEM and TEMExcellence in X-Ray Analysis for the Electron Microscope Save time New slim line technology detectors and high performance pulseprocessing get the job done faster Save effort motorized detector movement and light weight design make detectorhandling easier Gain more precision large area SDDs and high energy resolution provide thehighest quality spectra for reliable and precise analysis Gain more reliability the world most comprehensive atomic database ensures mostdependable low energy peak identification Gain more accuracy the most sophisticated algorithms for quantification and theunique combinability of standardless and standard based methods provide highestaccuracy results07.06.20123 4. XFlash 6 SeriesThe Ideal Detector for Every Application Wide range of detector sizes 10, 30, 60 and 100 mm area detectors for ideal measurement conditions from micro- and nanoanalysis Best throughput for fastest measurements Over 1,5 Mcps input Over 600 kcps output New SVE 6 pulse processor with advanced processing features Best energy resolution for low energy analysis 121eV limited edition 123eV ultimate class 126eV premium class 129eV standard class Slim-line detector technology for more counts Shortest detector-sample distance for best solid angle Best take-off angle in TEM for lowest background and better LOD More compact design and low weight less than 3.75kg High precision motorized fully integrated slider New heat sink body geometry with more cooling capacity07.06.20124 5. XFlash 6 SeriesDetector Sizes from 10 to 100 mm XFlash 6 for SEM XFlash 6T for TEM The XFlash 6 detector series for SEM, FIB- The XFlash 6T detectors for TEM and SEM and -probes, provides maximumSTEM are designed for minimum flexibility for all analytical conditions mechanical and electromagnetic interference. The design provides optimum take-off angle and avoid the necessity for sample tilt.Area 10 mm30 mm 60 mm100 mmSEMXFlash 6|10 XFlash 6|30 XFlash 6|60XFlash 6|100TEMXFlash 6T|30 XFlash 6T|6007.06.20125 6. XFlash 6 Series for SEMs and -ProbesThe XFlash 6|10 The ultimate resolution SDD in the Market Best energy resolution on the market Best light element/low energy performance Guaranteed resolutions 129 eV Standard(B-Am) 126 eV Premium (Be-Am) 123 eV Ultimate(Be-Am) 121 eV Limited (Be-Am)XFlash 6|10 121 eVArea: 10mmMax Input: 1,500 kcpsTypical Resolution Mn K: 120eVF K: 47 eVC K: 38 eV07.06.20126 7. XFlash 6 Series for SEMsThe XFlash 6|30The versatile medium sized SDD For micro- and nanoanalysis For high count rate spectral imaging Ideal partner for fast EBSD analysisGuaranteed resolutions129 eV Standard(B-Am)126 eV Premium (Be-Am)123 eV Ultimate(Be-Am) XFlash 6|30 123 eV Area: 30mm Max Input: 1,500 kcps Resolution Mn K < 123 eV F K: 53 eV C K: 45 eV07.06.2012 7 8. XFlash 6 Series for SEMsThe XFlash 6|60Large solid angle SDD for nanoanalysis 60 mm for low beam energies Ideal for nanoparticles and biologicalsamples Ideal partner for high resolution EBSDGuaranteed resolutions129 eV Standard (B-Am)126 eV Premium(Be-Am) XFlash 6|60 126 eV Area: 60mm Max Input: 1,500 kcps Typical Resolution Mn K: