introduction to microelectronics fabrication processes lecture 3
TRANSCRIPT
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Introduction To Microelectronics Fabrication Processes
LECTURE 3
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• Foundry (TSMC, UMC, Silterra, 1st Silicon)
– only manufacture
• Design House (Alterra, MyMS)- only design
• Integrated Design Manufacturing (Intel, Motorola, IBM, Mimos)
- design and manufacture
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Semiconductor Manufacturing Processes
• Design- Mask info to MASK-SHOP + GDSII
file• Mask making• Generate runcard• Wafer Preparation• Front-end Processes (individual
transistor)- Deposition- Oxidation- Diffusion- Photolithography- Etch (wet and dry)- Implantation
• Backend ProcessDeposition (oxide, nitride etc)MetalizationRapid Thermal ProcessLithography & Etch
• Test (Parametric and Functional)
• Packaging
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Pattern PreparationReticle
Chrome Pattern
Quartz Substrate
Pellicle
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Wafer Preparation
• Silicon Refining• Crystal Pulling• Wafer Slicing & Polishing• Epitaxial Silicon Deposition
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Silicon Refining
Chemical Reactions Silicon Refining: SiO2 + 2 C Si + 2 CO Silicon Purification: Si + 3 HCl HSiCl3 + H2
Silicon Deposition: HSiCl3 + H2 Si + 3 HCl
Reactants H2 Silicon Intermediates H2SiCl2
HSiCl3
Silicon nugget inside crucible
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Crystal Pulling
Czochralski Method• Silicon quartzite are melted in quartz crucible• Crucible is placed in high-temperature furnace• Crystal seed is brought into contact with moltensilicon• The puller is slowly pull-up.• Deposited silicon melt condenses and large rounded single crystal is formed
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Single Crystal GrowthSingle Crystal Growth
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3/15/98 PRAX01C.PPT Rev. 1.0
Wafer Slicing & Polishing
The silicon ingot is grown and individual wafers are sliced.
The silicon ingot is sliced into individual wafers, polished, and cleaned.
silicon wafer
p+ silicon substrate
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Wafer PolishedWafer Polished
•Grinding
•Edge Polished
•Slicing
•Lapping
•Polished
•Process Control
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Epitaxial Silicon Deposition
GasInput Lamp
Module
QuartzLamps
Wafers
Susceptor
Exhaust
* High proportion of the total product use
Chemical Reactions Silicon Deposition: HSiCl3 + H2 Si + 3 HClProcess Conditions Flow Rates: 5 to 50 liters/min Temperature: 900 to 1,100 degrees C. Pressure: 100 Torr to Atmospheric
silicon wafer
p- silicon epi layer
p+ silicon substrate
Dopants AsH3
B2H6
PH3
Etchant HClCarriers Ar H2 * N2
Silicon Sources SiH4
H2SiCl2
HSiCl3 * SiCl4 *
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Front-End/Back-end Processes
FOX FOX
N-Well N-Well
Arsenic ImplantLDD
As+ S/D ImplantP-Well
NMOSPMOSCapacitor
FOX FOX
BF2 S/D Implant
BPSG
AlSiCu
Planarisation
Metal 2Passivation
P+ Substrate
Test InsertandScribe-line
Front-end• Fabrication steps up to the formation of individual transistors which electrically isolated
Back-end• Fabrication steps to connect every single transistors until completed
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Front-end Process
• OXIDATION
• DIFFUSION
• DEPOSITION
• LITHOGRAPHY
• ION IMPLANTATION
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OXIDATION
PURPOSE: TO GROW SILICON OXIDE FILM
WHAT IS OXIDATION?
A PROCESS OF ‘GROWING’ SILICON OXIDE ON A WAFER, EITHER ON BARE SILICON OR EXISTING SILICON OXIDE LAYER
PROCESS EQUATIONS
Si + O2 SiO2 (dry oxidation)Si +2H2O SiO2 + 2H2 (wet oxidation)
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O2/H2O DIFFUSE TO SILICON WAFER/OXIDE LAYER AND REACT WITH Si
WHEN REACTION ON SURFACE IS DONE, THICKER FILM WILL REQUIRE THE REACTANT SPECIES TO DIFFUSE DEEPER INTO SILICON (Deal-Groove Linear - Parabolic Model)
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GENERALLY AT HIGH TEMPERATURE OF 600 - 1200 ºC.
GASES USED ARE BASICALLY O2, OR H2 AND O2.
DILUTED PROCESS WHERE SMALL AMOUNT OF O2 WITH N2 AS DILUTER TO GET LOWER GROWTH RATE(FOR BETTER CONTROL OF VERY THIN OXIDE)
O2 ALONE IS CALLED DRY OXIDATION
H2 AND O2 IS CALLED WET OXIDATION
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FURNACE SYSTEM FOR OXIDATION
VERTICAL FURNACE
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FURNACE SYSTEM FOR OXIDATION
HORIZONTAL FURNACE
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GAS
SOURCE
QUARTZ DOOR
PADDLE
BOAT
DUMMY WAFERS
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DIFFUSION
PURPOSE: TO DRIVE IN DOPANT INTO CERTAIN DEPTH IN SEMICONDUCTOR SUBSTRATE AFTER ION IMPLANTATION PROCESS OR SPIN ON DOPANT TECHNIQUE
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DEPOSITION
PURPOSE: TO DEPOSIT MATERIALS SUCH AS NITRIDE, OXIDE, POLYSI ETC
METHODSPECVDLPCVDSACVDPVDEVAPORATION
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* High proportion of the total product use
Polysilicon H2
N2
SiH4 * AsH3 B2H6 PH3
Exhaust ViaVacuum Pumpsand Scrubber
3 ZoneTemperatureControl
Gas Inlet
Vertical LPCVD Furnace
Quartz TubeChemical Reactions Nitride Deposition: 3 SiH4 + 4 NH3 Si3N4 + 12 H2
Polysilicon Deposition: SiH4 Si + 2 H2
Process Conditions (Silicon Nitride LPCVD) Flow Rates: 10 - 300 sccm Temperature: 600 degrees C. Pressure: 100 mTorr
Nitride NH3 * H2SiCl2 * N2
SiH4 * SiCl4
Poly or nitride
p- silicon epi layer
p+ silicon substrate
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PHOTOLITHOGRAPHY
• A process for producing highly accurate, microscopic, two dimensional patterns in a photosensitive material.
• These patterns are replicas of master pattern on a durable photomask, typically made of a thin patterned layer of chromium on a transparent glass plate.
• The process is repeated many times to build an integrated circuit
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SEM
Photolithography Process Flow
Nine basic microlithographic process steps
PRIME
Chill Plate to cool wafer
APPLY RESIST
SOFT BAKE
IMAGING
PEB
DEVELOP
Hard bake
Implant or EtchSEM
Cluster lithocell
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Photoresist Patterning
After development
Exposure
silicon
resist
Oxide / nitride
silicon
resist
Photomask
After etch
silicon
resist
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Photolithography room
• Photolithography area is yellow-lighted to prevent exposure of photoresist coated wafers to the light.
• It is a class-10 clean room and is the highest level of cleanliness in the clean room suite.
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Photoresist Coating Processes
p- epi
p+ substrate
field oxidephotoresist
Photoresists Negative Photoresist * Positive Photoresist *Other Ancillary Materials (Liquids) Edge Bead Removers * Anti-Reflective Coatings * Adhesion Promoters/Primers (HMDS) * Rinsers/Thinners/Corrosion Inhibitors * Contrast Enhancement Materials *Developers TMAH * Specialty Developers *Inert Gases Ar N2
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Exposure Processes
p- epi
p+ substrate
field oxidephotoresist
Expose Kr + F2 (gas) *
Inert Gases N2
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Ion Implantation
• Well Implants• Channel Implants (Vt adjust)• Source/Drain Implants
To introduce impurities into substrate by bombardments of ions
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Ion Implantation
180 kV
ResolvingAperture
Ion Source
Equipment Ground
Acceleration Tube
90° Analyzing Magnet
Terminal Ground
20 kV
Focus Neutral beam and beam path gated
Beam trap andgate plate
Wafer in waferprocess chamber
X - axisscanner
Y - axisscanner
Neutral beam trap and beam gate
Gases Ar AsH3
B11F3 * He N2
PH3
SiH4
SiF4
GeH4
Solids Ga In SbLiquids Al(CH3)3
* High proportion of the total product use
junction depth
p- epi
p+ substrate
field oxide
photoresist mask
n-w ellp-channel transistor
phosphorus (-) ions
Process Conditions Flow Rate: 5 sccm Pressure: 10-5 Torr Accelerating Voltage: 5 to 200 keV
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Etch
Thin Films
Photo-lithography
Cleaning
Front-EndProcesses
EtchIonImplantation
Planarization
Test &Assembly
DesignWaferPreparation
• Conductor Etch
- Poly Etch and Silicon Trench Etch
- Metal Etch
• Dielectric Etch
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Conductor Etch
* High proportion of the total product use
EtchChambers
Cluster ToolConfiguration
TransferChamber
Loadlock
Wafers
RIE Chamber
TransferChamber
Gas Inlet
Exhaust
RF Power
Wafer
p+ substrate
p-w elln-channel transistor
n-w ellp-channel transistor
source-drain areas
gate linew idth
gate oxide
Polysilicon Etches HBr * C2F6 SF6 * NF3 * O2
Aluminum Etches BCl3 * Cl2
Diluents Ar He N2
Chemical Reactions Silicon Etch: Si + 4 HBr SiBr4 + 2 H2 Aluminum Etch: Al + 2 Cl2 AlCl4
Process Conditions Flow Rates: 100 to 300 sccm Pressure: 10 to 500 mTorr RF Power: 50 to 100 Watts
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Dielectric Etch
* High proportion of the total product use
EtchChambers
Cluster ToolConfiguration
TransferChamber
Loadlock
Wafers
RIE Chamber
TransferChamber
Gas Inlet
Exhaust
RF Power
Wafer
Contact locations
n-w ellp-channel transistor
p-w elln-channel transistor
p+ substrate
Chemical Reactions Oxide Etch: SiO2 + C2F6 SiF4 + CO2 + CF4 + 2 COProcess Conditions Flow Rates: 10 to 300 sccm Pressure: 5 to 10 mTorr RF Power: 100 to 200 Watts
Plasma Dielectric Etches CHF3 * CF4
C2F6
C3F8
CO *
Diluents Ar He N2
CO2
O2
SF6
SiF4
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Cleaning
Thin Films
Photo-lithography
Cleaning
Front-EndProcesses
EtchIonImplantation
Planarization
Test &Assembly
DesignWaferPreparation
• Critical Cleaning
• Photoresist Strips
• Pre-Deposition Cleans
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Critical Cleaning
11 22 33 44 55
1 O r g a n i c s 2 O x i d e s 3 P a r t i c l e s 4 M e t a l s 5 D r yH 2 S O 4 + H F + N H 4 O H + H C l + H 2 O o r I P A +H 2 O 2 H 2 O H 2 O 2 + H 2 O H 2 O 2 + H 2 O N 2
H 2 O R i n s e H 2 O R i n s e H 2 O R i n s e H 2 O R i n s e
Contact locations
n-w ellp-channel transistor
p-w elln-channel transistor
p+ substrate
RCA Clean SC1 Clean (H2O + NH4OH + H2O2) * * SC2 Clean (H2O + HCl + H2O2) *
Piranha Strip * H2SO4 + H2O2 *
Nitride Strip H3PO4 *
Oxide Strip HF + H2O *
Solvent Cleans NMP Proprietary Amines (liquid)Dry Cleans HF O2 Plasma Alcohol + O3
Dry Strip N2O O2
CF4 + O2
O3
Process Conditions Temperature: Piranha Strip is 180 degrees C.
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Back-end Process
• CVD Dielectrics• CVD Tungsten• PVD Metal• Planarization
• local (deposit-etch)• global (CMP)
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Thin Films
Thin Films
Photo-lithography
Cleaning
Front-EndProcesses
EtchIonImplantation
Planarization
Test &Assembly
DesignWaferPreparation• Chemical Vapor Deposition
(CVD) Dielectric
• CVD Tungsten
• Physical Vapor Deposition (PVD)
• Chamber Cleaning
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Chemical Vapor Deposition (CVD) Dielectric
* High proportion of the total product use
CVD Dielectric O2
O3
TEOS * TMP *
TEOSSource
LPCVDChamber
TransferChamber
Gas Inlet
Exhaust
RF Power
Wafer
MeteringPump
Inert MixingGas
Process Gas
Vaporizer
DirectLiquid
Injection
n-w ellp-channel transistor
p-w elln-channel transistor
p+ substrate
Metal 1insulator layer 2
Chemical Reactions Si(OC2H5)4 + 9 O3 SiO2 + 5 CO + 3 CO2 + 10 H2OProcess Conditions (ILD) Flow Rate: 100 to 300 sccm Pressure: 50 Torr to Atmospheric
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Chemical Vapor Deposition (CVD) Tungsten
* High proportion of the total product use
CVD Dielectric WF6 * Ar H2
N2
OutputCassette
InputCassette
WaferHander
Wafers
Water-cooledShowerheads
Multistation SequentialDeposition Chamber
ResistivelyHeated Pedestal
n-w ellp-channel transistor
p-w elln-channel transistor
p+ substrate
titanium tungsten
Chemical Reactions WF6 + 3 H2 W + 6 HFProcess Conditions Flow Rate: 100 to 300 sccm Pressure: 100 mTorr Temperature: 400 degrees C.
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Physical Vapor Deposition (PVD)
Barrier Metals SiH4
Ar N2
N2
Ti PVD Targets *
PhysicalVaporDepositionChambers
Cluster ToolConfiguration
TransferChamber
Loadlock
Wafers
PVD Chamber
TransferChamber
Cryo Pump
Wafer
N S N
+
e -
BacksideHe Cooling
Argon &Nitrogen
ReactiveGases
DC PowerSupply (+)
* High proportion of the total product use
n-w ellp-channel transistor
p-w elln-channel transistor
p+ substrate
Process Conditions Pressure: < 5 mTorr Temperature: 200 degrees C. RF Power:
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Chamber Cleaning
* High proportion of the total product use
Chamber Cleaning C2F6 * NF3
ClF3
Water-cooledShowerheads
Multistation SequentialDeposition Chamber
ResistivelyHeated Pedestal
Chemical Reactions Oxide Etch: SiO2 + C2F6 SiF4 + CO2 + CF4 + 2 COProcess Conditions Flow Rates: 10 to 300 sccm Pressure: 10 to 100 mTorr RF Power: 100 to 200 Watts
Aluminum
Surface Coating
Process Material Residue
Chamber Wall Cross-Section
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Planarization
Thin Films
Photo-lithography
Cleaning
Front-EndProcesses
EtchIonImplantation
Planarization
Test &Assembly
DesignWaferPreparation
• Oxide Planarization
• Metal Planarization
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Chemical Mechanical Planarization (CMP)
* High proportion of the total product use.
Platen
PolishingHead
PadConditioner
Carousel
HeadSweep Slide
Load/UnloadStation
Wafer HandlingRobot & I/O
Polishing PadSlurryDelivery
Platen
WaferCarrier
Wafer
n-w ellp-channel transistor
p-w elln-channel transistor
p+ substrate
Backing (Carrier) Film PolyurethanePad PolyurethanePad Conditioner Abrasive
CMP (Oxide) Silica Slurry KOH * NH4OH H2O
CMP (Metal) Alumina * FeNO3
Process Conditions (Oxide) Flow: 250 to 1000 ml/min Particle Size: 100 to 250 nm Concentration: 10 to 15%, 10.5 to 11.3 pHProcess Conditions (Metal) Flow: 50 to 100 ml/min Particle Size: 180 to 280 nm Concentration: 3 to 7%, 4.1 - 4.4 pH
*
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Test and Assembly
Thin Films
Photo-lithography
Cleaning
Front-EndProcesses
EtchIonImplantation
Planarization
Test &Assembly
DesignWaferPreparation
• Electrical Test Probe
• Die Cut and Assembly
• Die Attach and Wire Bonding
• Final Test
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Electrical Test Probe
Defective IC
Individual integrated circuits are tested to distinguish good
die from bad ones.
n-wellp-channel transistor
p-welln-channel transistor
p+ substrate
bonding padnitride
Metal 2
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Die Cut and Assembly
Good chips are attached to a lead frame package.
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Die Attach and Wire Bonding
lead frame gold wire
bonding pad
connecting pin
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Final Test
Chips are electrically tested under varying environmental conditions.
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References
1. CMOS Process Flow in Wafer Fab, Semiconductor Manufacturing Technology, DRAFT, Austin Community College, January 2, 1997.
2. Semiconductor Processing with MKS Instruments, Inc.
3. Worthington, Eric. “New CMP architecture addresses key process issues,” Solid State Technology, January 1996.
4. Leskonic, Sharon. “Overview of CMP Processing,” SEMATECH Presentation, 1996.
5. Gwozdz, Peter. “Semiconductor Processing Technology” SEMI, 1997.
6. CVD Tungsten, Novellus Sales Brochure, 7/96.
7. Fullman Company website. “Fullman Company - The Semiconductor Manufacturing Process,” http://www.fullman.com/semiconductors/index.html, 1997.
8. Barrett, Craig R. “From Sand to Silicon: Manufacturing an Integrated Circuit,” Scientific American Special Issue: The Solid State Century, January 22, 1998.