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Isolation charge pump fabricated in silicon on sapphire CMOS technology E. Culurciello, P.O. Pouliquen and A.G. Andreou The design, fabrication and testing of a four-stage charge-pump fabricated in a 0.5 mm silicon-on-sapphire CMOS technology is reported. The charge pump can generate a 2.68 V output with a 3.3 V input power supply, consuming 2.5 mA. The performance of the architecture is optimised by judiciously employing MOS transis- tors with different threshold (0, 0.3 and 0.7 V) in the different parts of the circuit. The charge pump input and output power supplies are galvanically isolated to over 800 V by means of the dielectric proper- ties of the coupling capacitors and the insulating sapphire substrate. Introduction: Charge pump circuits are routinely employed as part of system on a chip (SOC) designs to meet the multiple supply require- ments of different circuits, all of which must be derived from a single power supply. The output voltage can be higher, lower or have a different polarity than the original power supply. Charge pumps are widely used in low-voltage circuits, dynamic random access memories, switched-capacitor and EEPROM circuits [1, 2]. Recently, it has been argued that CMOS silicon on insulator (SOI) offers system integration and architectural advantages when designing charge pumps for smart card applications [3]. In this Letter we report on a galvanically isolated charge pump fabricated in 0.5 mm silicon on sapphire (SOS) CMOS technology. By taking advantage of the process insulating substrate and by using thick- dielectric coupling capacitors, the input and output power supply rails are galvanically isolated to over 800 V The circuit architecture is optimised by employing MOS transistors of different thresholds in the circuits. Charge pump design: Fig. 1 shows the architecture of an N stage Dickson [4] charge pump. The circuit uses two square-wave pumping clocks f (Phi), and f ¯ (PhiBar) to pump charge through coupling capacitors C. The output voltage V out of the Dickson charge pump is given by: Fig. 1 Charge pump circuit schematic V out ¼ V in þ N C C þ C S V f V D I out ðC þ C S Þf f ! V D ð1Þ C S is the ground parasitic capacitance of each capacitor C (not shown in the Figure). V f is the voltage amplitude of the clock f and f f is the clock frequency. With ideal diodes and capacitors, each stage incre- ments the voltage V out by a step equal to V f The diode is employed in each stage to constrain the charge flow in one direction allowing capacitors C to charge, but not to discharge. The built-in diode voltage drop reduces the pumping voltage, subtracting V D from the voltage pumped at each stage. When designing charge pump circuits using discrete components, Schottky or germanium diodes are often employed as they have lower built-in voltage than silicon PN junctions. The open circuit output voltage of the charge pump is reduced by the load current I out (last term in parenthesis of (1)). Isolation charge pump architecture: We have designed and fabricated the four-stage isolation charge pump shown in Fig. 1. An isolation charge pump architecture has the same functional blocks as a conventional charge pump but with the power supply rails of the oscillator galvanically isolated from the output supply rails. The charge pump was designed to provide an isolated power supply identical to the input supply to a galvanic isolation buffer. An 11- stage ring oscillator produces a 350 MHz square-wave clock signal to drive the pump. The output of the oscillator is buffered to drive the pumping capacitances C. Each capacitance has a value of 450 fF and forms an isolation barrier between the two regions of the circuit. These capacitors are designed using a parallel plate configuration of metal-1 and metal-3 (plate separation of 2 mm SiO 2 dielectric). To optimise the design of the Dickson charge pump circuit, we employ MOS transistors with different threshold voltages that are available in the Peregrine SOS CMOS process [5, 6]. The following naming convention is employed to identify the device: regular Rx threshold (V TH 0.7 V), low xL threshold transistors (V TH 0.3 V, and intrinsic Ix, zero threshold transistors (V TH 0 V). The type of transistor is denoted by substituting x for either N or P. Diodes D1 are diode connected regular threshold transistors that are employed by the technology vendor as ESD protection diodes. Diode connected NL MOS transistors are used as the rectifiers (D3) in each pump stage. The use of a low threshold MOS transistor in this part of the circuit minimises the forward bias diode drop V D to 0.3V, and reduces the undesirable voltage drops on the rectifiers. A 9pF capacitor at the output (C out ) together with a series of five diodes (D1) are used as the charge pump filter and constrain the maximum voltage within the maximum supply range of the process (3.3 V). Transistors T1, T2 and a diode chain of four diodes D2 form an active voltage regulator at the output of the charge pump to produce the regulated voltage VddB (Fig. 1). The series regulator transistor T2 is a zero threshold IN device biased by a string of four regular threshold (RN) diode connected MOS transistors (D2) and a current source. Transistor T1 is a self-biased current source implemented using an IP MOS transistor. Transistor T2 acts as an ideal voltage follower without a built-in voltage. The device type and sizes are given in Table 1. Table 1: Device type and size of MOS transistors used in charge pump design Device Type Size [mm] D1 RN 27.4=1.6 D2 RN 2=2 D3 NL 15=0.5 T1 IP 10=2 T2 IN 6=4 The absence of substrate parasitics in the SOS CMOS process eliminates all the stray capacitance to ground C S that further degrades the voltage gain of each stage (see (1)). The stray capacitance in a 0.5 mm bulk-process can have a value of up to 10% of the nominal value (from extracted parameters [7]). In this case a capacitance of C ¼ 450 fF can have a parasitic C S ¼ 45 fF. The capacitance C obtained with the SOS process has virtually zero parasitic capacitance, thus the ratio C=(C þ C S ) is 1 in SOS CMOS and 0.9 in a bulk CMOS. For a design with no parasitic capacitances, such as the one presented in this Letter, (1) simplifies to: V out ¼ V in þ N V f 0:3 I out Cf f ! 0:3 ð2Þ Solving (2) results in a value of the unloaded V out of 11.7V, with a supply of 3.3V, V in ¼ 0, V D ¼ 0.3 V, N ¼ 4, I out ¼ 0. The equivalent result in a bulk process of (1) is V out of 8.3 V with a V D ¼ 0.7 V. Test results: The measured unloaded charge pump voltage output VddB was 2.68V. The output voltage is limited to this value by the chain of protection diodes D1 in Fig. 1. Fig. 2 plots the measured charge pump output voltage (VddB) against input power supply (VddA) and the load. The charge pump was tested with three loading conditions: unloaded, loaded with 5 and 22 kO resistors. Using an input power supply VddA of 2 V the charge pump can supply 100 mA at 2 V for a 22 kO load or 0.6 V for a 5.3 kO load. The output of the charge pump falls rapidly when the current drawn is high or the input voltage is too low to counterbalance the losses in the charge pump diodes. ELECTRONICS LETTERS 12th May 2005 Vol. 41 No. 10

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Page 1: Isolation charge pump fabricated in silicon on ... - e-Lab pumps are widely used in low-voltage circuits, dynamic random access memories, switched-capacitor and EEPROM circuits[1,

Isolation charge pump fabricated in siliconon sapphire CMOS technology

E. Culurciello, P.O. Pouliquen and A.G. Andreou

The design, fabrication and testing of a four-stage charge-pump

fabricated in a 0.5 mm silicon-on-sapphire CMOS technology is

reported. The charge pump can generate a 2.68 V output with a

3.3 V input power supply, consuming 2.5 mA. The performance of

the architecture is optimised by judiciously employing MOS transis-

tors with different threshold (0, 0.3 and 0.7 V) in the different parts of

the circuit. The charge pump input and output power supplies are

galvanically isolated to over 800 V by means of the dielectric proper-

ties of the coupling capacitors and the insulating sapphire substrate.

Introduction: Charge pump circuits are routinely employed as part of

system on a chip (SOC) designs to meet the multiple supply require-

ments of different circuits, all of which must be derived from a single

power supply. The output voltage can be higher, lower or have a

different polarity than the original power supply. Charge pumps are

widely used in low-voltage circuits, dynamic random access

memories, switched-capacitor and EEPROM circuits [1, 2]. Recently,

it has been argued that CMOS silicon on insulator (SOI) offers system

integration and architectural advantages when designing charge

pumps for smart card applications [3].

In this Letter we report on a galvanically isolated charge pump

fabricated in 0.5 mm silicon on sapphire (SOS) CMOS technology. By

taking advantage of the process insulating substrate and by using thick-

dielectric coupling capacitors, the input and output power supply rails

are galvanically isolated to over 800 V The circuit architecture is

optimised by employing MOS transistors of different thresholds in

the circuits.

Charge pump design: Fig. 1 shows the architecture of an N stage

Dickson [4] charge pump. The circuit uses two square-wave pumping

clocks f (Phi), and f̄ (PhiBar) to pump charge through coupling

capacitors C. The output voltage Vout of the Dickson charge pump is

given by:

Fig. 1 Charge pump circuit schematic

Vout ¼ Vin þ NC

C þ CS

Vf � VD �Iout

ðC þ CSÞff

!� VD ð1Þ

CS is the ground parasitic capacitance of each capacitor C (not shown in

the Figure). Vf is the voltage amplitude of the clock f and ff is the

clock frequency. With ideal diodes and capacitors, each stage incre-

ments the voltage Vout by a step equal to Vf The diode is employed in

each stage to constrain the charge flow in one direction allowing

capacitors C to charge, but not to discharge. The built-in diode voltage

drop reduces the pumping voltage, subtracting VD from the voltage

pumped at each stage. When designing charge pump circuits using

discrete components, Schottky or germanium diodes are often

employed as they have lower built-in voltage than silicon PN junctions.

The open circuit output voltage of the charge pump is reduced by the

load current Iout (last term in parenthesis of (1)).

Isolation charge pump architecture: We have designed and fabricated

the four-stage isolation charge pump shown in Fig. 1. An isolation

charge pump architecture has the same functional blocks as a

conventional charge pump but with the power supply rails of the

oscillator galvanically isolated from the output supply rails. The

charge pump was designed to provide an isolated power supply

identical to the input supply to a galvanic isolation buffer. An 11-

stage ring oscillator produces a 350 MHz square-wave clock signal to

drive the pump. The output of the oscillator is buffered to drive the

pumping capacitances C. Each capacitance has a value of 450 fF and

forms an isolation barrier between the two regions of the circuit.

These capacitors are designed using a parallel plate configuration of

metal-1 and metal-3 (plate separation of 2 mm SiO2 dielectric).

To optimise the design of the Dickson charge pump circuit, we

employ MOS transistors with different threshold voltages that are

available in the Peregrine SOS CMOS process [5, 6]. The following

naming convention is employed to identify the device: regular Rx

threshold (VTH ’ 0.7 V), low xL threshold transistors (VTH ’ 0.3 V,

and intrinsic Ix, zero threshold transistors (VTH ’ 0 V). The type of

transistor is denoted by substituting x for either N or P. Diodes D1 are

diode connected regular threshold transistors that are employed by the

technology vendor as ESD protection diodes.

Diode connected NL MOS transistors are used as the rectifiers (D3)

in each pump stage. The use of a low threshold MOS transistor in this

part of the circuit minimises the forward bias diode drop VD to 0.3 V,

and reduces the undesirable voltage drops on the rectifiers. A 9pF

capacitor at the output (Cout) together with a series of five diodes (D1)

are used as the charge pump filter and constrain the maximum voltage

within the maximum supply range of the process (3.3 V). Transistors

T1, T2 and a diode chain of four diodes D2 form an active voltage

regulator at the output of the charge pump to produce the regulated

voltage VddB (Fig. 1). The series regulator transistor T2 is a zero

threshold IN device biased by a string of four regular threshold (RN)

diode connected MOS transistors (D2) and a current source. Transistor

T1 is a self-biased current source implemented using an IP MOS

transistor. Transistor T2 acts as an ideal voltage follower without a

built-in voltage. The device type and sizes are given in Table 1.

Table 1: Device type and size of MOS transistors used in chargepump design

Device Type Size [mm]

D1 RN 27.4=1.6

D2 RN 2=2

D3 NL 15=0.5

T1 IP 10=2

T2 IN 6=4

The absence of substrate parasitics in the SOS CMOS process

eliminates all the stray capacitance to ground CS that further degrades

the voltage gain of each stage (see (1)). The stray capacitance in a

0.5 mm bulk-process can have a value of up to 10% of the nominal

value (from extracted parameters [7]). In this case a capacitance of

C¼ 450 fF can have a parasitic CS¼ 45 fF. The capacitance C obtained

with the SOS process has virtually zero parasitic capacitance, thus the

ratio C=(CþCS) is 1 in SOS CMOS and 0.9 in a bulk CMOS. For a

design with no parasitic capacitances, such as the one presented in this

Letter, (1) simplifies to:

Vout ¼ Vin þ N Vf � 0:3�Iout

Cff

!� 0:3 ð2Þ

Solving (2) results in a value of the unloaded Vout of 11.7 V, with a

supply of 3.3 V, Vin¼ 0, VD¼ 0.3 V, N¼ 4, Iout¼ 0. The equivalent

result in a bulk process of (1) is Vout of 8.3 V with a VD¼ 0.7 V.

Test results: The measured unloaded charge pump voltage output

VddB was 2.68 V. The output voltage is limited to this value by the

chain of protection diodes D1 in Fig. 1. Fig. 2 plots the measured

charge pump output voltage (VddB) against input power supply

(VddA) and the load. The charge pump was tested with three loading

conditions: unloaded, loaded with 5 and 22 kO resistors. Using an

input power supply VddA of 2 V the charge pump can supply 100 mA

at 2 V for a 22 kO load or 0.6 V for a 5.3 kO load. The output of the

charge pump falls rapidly when the current drawn is high or the input

voltage is too low to counterbalance the losses in the charge pump

diodes.

ELECTRONICS LETTERS 12th May 2005 Vol. 41 No. 10

Page 2: Isolation charge pump fabricated in silicon on ... - e-Lab pumps are widely used in low-voltage circuits, dynamic random access memories, switched-capacitor and EEPROM circuits[1,

Fig. 2 Received voltage output of charge pump against load

Fig. 3 shows the scaling properties for the charge pump output

current against capacitors (pumping stages). The charge pump output is

shown for an unloaded and unprotected pump. The charge pump output

current can be increased to hundreds of mA by sacrificing the isolation

properties of metal-1 metal-3 capacitors and by using native MIM

capacitors with 0.1 mm plate distance (SiO2 dielectric).

Fig. 3 Scaling properties of proposed charge pump

The power consumption of the unloaded charge pump circuit is

2.5 mA at 3.3 V supply. The current consumption is due to the

oscillator circuit and the buffers to drive the pumping capacitors. The

charge pump provides continuous isolation between the power supplies

in excess of 800 V.

The unregulated power efficiency Z of the charge pump can be

calculated using:

Z ¼IVddAVddA

IVddBVddBð3Þ

Using a IVddB of 315 mA, a IVddA of 2.5 mA and a VddA of 3.3 V, the

efficiency in the ideal case (no diode drop) is 32%, while it is 23% for

the SOS CMOS implementation using a multi-threshold technology

(VD¼ 0.3 V) and it is 9% in case of a bulk CMOS implementation

(VD¼ 0.7 V). Note that these efficiencies are computed without output

voltage regulator circuits. The measured power efficiency of the fab-

ricated charge pump with voltage regulator is 4%. The current paths

through the shunt regulated diodes (D1 stack) and regulator bias (D2

stack) drain most of the charge pump charge to yield the low efficiency

in the fabricated pump. The efficiency of the pump can be improved

by sizing the current source transistor T1 to a lower branch voltage

and by eliminating the shunt regulator (D1 stack), which is only

included here for overvoltage protection.

Acknowledgments: Fabrication was provided by MOSIS. Supported

by the Johns Hopkins Applied Physics Laboratory, MD, NASA Mars

Advanced Technology Development grant 1243213, point of contact

S. Jaskulek. This project was also partly supported by grants NSF-

ECS-0225489 and NSF-ECS-GOALI-0010026.

# IEE 2005 24 January 2005

Electronics Letters online no: 20050312

doi: 10.1049/el:20050312

E. Culurciello (Department of Electrical Engineering, Yale Univer-

sity, New Haven, CT 06520, USA)

E-mail: [email protected]

P.O. Pouliquen and A.G. Andreou (Department of Electrical and

Computer Engineering, Johns Hopkins University, 3400 N. Charles

Street, Baltimore, MD 21218, USA)

References

1 Wu, J., and Chang, K.: ‘Low supply voltage CMOS charge pumps’. IEEESymp. on VLSI Circuits, June 1997, pp. 81–82

2 Cheng, K., Chang, C., and Wei, C.: ‘A CMOS charge pump for sub-2.0 Voperation’. IEEE Int. Symp. on Circuits and Systems, May 2003, Vol. 5,pp. V-89–V-92

3 Neve, A., Flandre, D., and Quisquater, J.: ‘SOI technology for futurehigh-performance smart cards’, IEEE Micro, 2003, 23, (3), pp. 58–67

4 Dickson, J.: ‘On-chip high-voltage generation in NMOS integratedcircuits using an improved voltage multiplier technique’, IEEE J. Solid-State Circuits, 1976, 11, (6), pp. 374–378

5 Peregrine, 0.5 mm FC Design Manual, 52nd edn., PeregrineSemiconductor Inc., San Diego, CA, March 2003, http://www.peregrine-semi.com/

6 Andreou, A.G., et al.: ‘Silicon on sapphire CMOS for optoelectronicmicrosystems’, IEEE, Circuits Syst. Mag., 2001, 1, (3), pp. 22–30

7 MOSIS Electrical Parameters, Marina del Rey, CA 90292-6695.[Online]. Available: http://www.mosis.org/test

ELECTRONICS LETTERS 12th May 2005 Vol. 41 No. 10