Jupiter XR Atomic Force MicroscopeLarge-Sample AFM with Superior Resolution, Speed, Ease of Use, and Flexibility

AFMAsylum Research

ASYLUM RESEARCH

2 Jupiter XR AFM

Jupiter XR Eclipses Every Other Large-Sample AFM

Jupiter™ Offers Superior Resolution, Speed, Ease of Use, and Flexibility

DISCOVER

The Asylum Research Jupiter XR Atomic Force Microscope from Oxford Instruments is the first and only large-sample AFM to offer both high-speed imaging and extended range in a single scanner. Jupiter provides complete 200 mm sample access and delivers higher resolution, faster results, a simpler user experience, and the versatility to excel in both academic research and industrial R&D laboratories.

Highest Performance

• Higher resolution than any other large-sample AFM

• Extended-range scanner is 5-20× faster than most AFMs and features large 100 µm X-Y & 12 µm Z range

• Exclusive blueDrive™ Tapping Mode gives more reproducible results and simplifies operation

Simpler User Experience

• Fully-motorized laser and detector setup eliminates manual adjustment of knobs

• Fully-addressable, high-speed stage rapidly reaches any point on 200 mm samples

• Sharp top-view optics help you easily locate your precise region of interest

• Go from atoms to large 100-µm scans and use any imaging mode, all with the single XR scanner

Versatility for Diverse Research Needs

• Support for a full range of imaging modes

• Modular design makes it fast and simple to add accessories and future upgrades

• Flexible software makes routine measurements easy while enabling advanced research

HF-etched mica, 2 μm scan imaged in 26 sThe atomic layers in mica are a useful scan speed challenge sample—to track the steps accurately, a higher imaging bandwidth is necessary. This image was acquired with 512 lines in 26 s at 20 Hz line rate.

Optical standard, 100 μm scanThe large scan range on Jupiter XR allows it to scan from atomic-level to microscale features, all with a single scanner. This image was acquired with 512 lines in ~4.5 min at 2 Hz line rate.

Jupiter XR AFM 3

A New Performance Standard for Large-Sample AFM

Higher Resolution and Higher Speed, Powered by blueDrive Tapping Mode

Lamellae in polyethyleneCrystalline regions consist of tightly packed polymer chains with 0.89 nm periodic spacing. The larger features on the sides are disordered regions.

• Resolve smaller features and more accurately measure ultra-flat samples

• Jupiter has the lowest noise floor (<25 pm) of any large-sample AFM

Cetyl palmitate layer on HOPGThis waxy ester compound forms self-assembled structures on HOPG with periodic spacing of 4.3 nm and height of ~100 pm.

• Routinely capture images in <1 minute, at least 5× faster than most other AFMs

• Many samples can be imaged at ≥20 Hz line rate for typical scan sizes of <10 µm

• Asylum exclusive blueDrive makes tapping mode simpler and more stable

• Improved stability results in longer tip lifetimes, even with fast scanning

• Every Jupiter includes blueDrive for maximum performance and productivity

OUTPERFORMS

263 s per image(~2 Hz line rate)

Battery separator membraneThis polypropylene film has been widely used for AFM imaging speed comparisons because it features challenging topography and is relatively delicate. Here, there are no obvious differences in scan quality going from 2 Hz to 20 Hz scan rate and only very subtle changes at 40 Hz.

Higher Resolution

Faster Imaging

blueDrive Tapping Mode

26 s per image(~20 Hz line rate)

13 s per image(~40 Hz line rate)

50 nm

600 nm

10 nm

4 Jupiter XR AFM

Jupiter XR Makes It Easier to Get Your Job Done

From Setup to Results, Jupiter Makes Using AFM a Better Experience

DELIGHTS

Fast and Simple Setup

• Probes are easily exchanged on the removable Z scanner

• Samples can be held magnetically or by vacuum to the 210 mm chuck

• SpotOn™ feature enables point-and-click alignment of the laser and detector

Quickly Find Your Region of Interest

• Fully-addressable stage reaches any point on 200-mm samples without repositioning the sample

• High-speed stage allows navigation across the entire stage in just five seconds and precise micron-scale positioning via software or joystick

• Top-view optics are fully adjustable in software for the sharpest, highest-resolution (<1.5 µm) view of your samples

Jupiter XR Can Do It All

• Extended-range 100 µm X-Y and 12 µm Z scanners deliver great performance, from ultra-high resolution imaging all the way up to the biggest scans

• The Jupiter XR scanners are compatible with all modes and optional accessories

• Modular design allows Jupiter to readily accept future upgrades to any of its components

All the Capabilities of a Top-Quality Research AFM

ADAPTSFlexibility to Excel at Both Routine Measurements and Advanced Research

Jupiter XR AFM 5

Carbon black-filled polymer filmKPFM surface potential imaging was used to show carbon-rich regions of this static dissipative packaging film, 12 μm scan.

Ternary rubber blendPolymer blend containing polystyrene, polypropylene, and polyethylene imaged with AM-FM Viscoelastic Mapping Mode. Image shows topography overlaid with modulus, 15 µm scan.

Sol-gel piezoelectric thin filmPFM phase data is overlaid on topography, highlighting regions where the piezoelectric response is differently oriented, 2 μm scan.

Jupiter XR makes even routine measurements better with higher resolution, speed, and ease of use. For advanced research, users will find that Jupiter also offers a complete set of imaging modes and accessories. This makes Jupiter ideal for multiuser facilities or any lab with a diverse range of needs.

Quantitative Nanomechanical Measurements

• Asylum offers several techniques for quantitative mapping of storage and loss moduli

Highest Sensitivity Nanoelectrical Measurements

• Evaluate properties including current, surface charge, and potential. Additional nanoelectrical characterization techniques are coming soon.

PSPE

PP

PS

PPPE

Multilayer polymer filmAM-FM modulus image shows the components of a food packaging film.

5 µm

Carbon nanotubes in polyimideEFM phase data is overlaid on topography, revealing the locations of carbon nanotubes in the polyimide matrix, 20 μm scan.

6 Jupiter XR AFM

Jupiter—the Ultimate AFM for Industrial Metrology

Faster, Simpler, More Accurate, and More Repeatable Measurements

MEASURES

Faster at Every Step for Higher Throughput

• Setup time is minimized with easy probe loading and one-click laser and detector alignment

• Reach any point on your sample with the fully-addressable 210 mm vacuum chuck

• Move site-to-site quickly with a motorized stage that is >5× faster than any other AFM

• High-speed scanning comes standard—typical scans take 1 minute or less

Automated Multi-Site Imaging and Analysis Simplifies Your Work

• MacroBuilder enables full automation of both realtime measurements and offline analysis

• Highly flexible interface can handle both simple automation and more complex workflows

• Typical automated measurements can be completed in about 1 minute per site

Automated inspection of epitaxial silicon grain structureNon-uniform grain size can often be observed in epitaxial silicon layers, especially near the wafer edge where there can be greater variations in processing conditions. Here, an automated routine was used to inspect a series of points at different offsets from the wafer edge. The Jupiter software offers flexibility in defining these locations at any point on the 210 mm sample chuck. Roughness (Rq) of each image is only 80-85 pm.

250 nm

0.5 mm from edge

1.0 mm from edge

2.0 mm from edge

50 mm from edge

30 mm from edge

10 mm from edge

Jupiter XR AFM 7

High Throughput Combined with High Performance

CONFIRMSMeasure More Sites in Less Time with Complete Confidence in the Results

Image #1

Insulated-gate bipolar transistor Single-pass KPFM reveals dopant variations in the emitter regions between trench gates.

blueDrive Tapping Mode Improves Measurement Repeatability

• On less stable AFMs, tip wear over time causes roughness measurement values to change

• blueDrive keeps imaging exceptionally stable, so tip wear is reduced to negligible levels

• Measured roughness values are highly repeatable, even after 1000 images

High-Accuracy Metrology Results You Can Trust

• Unique LVDT position sensors are inherently linear and never require recalibration

• Low-noise X-Y sensors (<150 pm noise) enable distortion-free closed-loop imaging

• Ultra-low-noise Z sensor (<35 pm noise) makes measurements more accurate and repeatable

Image #1000

Asylum AFMs Are Used Across Diverse Industries

• Asylum Research has been the AFM technology leader for almost 20 years

• Asylum AFM performance and capabilities allow most any sample type to be investigated

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Average Roughness 0.305 nm Standard Deviation 0.003 nm (1%)

2 µm

Tire rubber blend Bimodal imaging reveals the distribution of rubber compounds and carbon black.

1 µm

Coated photo paperAFM is a useful tool to investigate materials and processes for paper coatings and adhesives.

5 µm

dC/dz phase

500 pm steps on SiC waferSilicon carbide is an important substrate for high-power microelectronic devices.

1 µm

SPECIFICATIONS

The foregoing brochure is copyrighted by Oxford Instruments Asylum Research, Inc.  Oxford Instruments Asylum Research, Inc. does not intend the brochure or any part thereof to form part of any order or contract or regarded as a representation relating to the products or service concerned, but it may, with acknowledgement to Oxford Instruments Asylum Research, Inc., be used, applied or reproduced for any purpose.  Oxford Instruments Asylum Research, Inc. reserves the right to alter, without notice the specification, design or conditions of supply of any product or service. 2/2019

6310 Hollister AvenueSanta Barbara, CA 93117Phone +1-805-696-6466 AFM.oxinst.comafm.info@oxinst.com

Jupiter XR ScannerX-Y range 100 µm (typical, closed-loop), 90 µm guaranteed

X-Y sensor noise <150 pm

Scan speed depends on samples and scan conditions, but many samples can be imaged at line rates ≥20 Hz for scan sizes of ≤10 µm with little or no degradation of image quality. Larger scans and rougher samples may require lower scan rates. In typical use, line rates between 5-20 Hz are routine.

Z range 12 µm

Z sensor noise <35 pm

(The X-Y and Z scanners and chucks are fully modular and easily exchanged for future upgrades and accessory options.)

Cantilever Deflection SensingOptical detection light source Superluminescent diode (SLD) source. Spot size of ~10 µm is compatible with small levers such as the Asylum FS-1500, Nanoworld Arrow UHF, and Olympus AC55 in addition to all conventional probes.

Wavelength 670 nm (nominal)

DC detector noise <10 pm

AC detector noise <30 fm⋅Hz -½ above 100 kHz

Detector bandwidth DC to 7 MHz

Point-and-click spot positioning and detector adjustment are fully motorized and software controlled.

blueDrive Tapping ModeAsylum exclusive blueDrive Tapping Mode uses photothermal excitation at 640 nm to excite the cantilever resonance in all AC-based modes. It is included on all Jupiter XR systems. Point-and-click spot positioning and power adjustments are fully motorized and software controlled.

Imaging PerformanceDC height noise <25 pm

AC height noise <25 pm

Top-view Bright-Field OpticsResolution Diffraction limited (<1.5 µm), NA=0.30

Field of view 930×1240 µm

Illumination Intensity, aperture diaphragm, and field diaphragm adjustable from software.

Sample Chuck and Motorized StageSample chuck accommodates samples up to 210 mm in diameter and up to 35 mm tall. Wafer locating pins and vacuum rings are provided for 2 in, 4 in, 5 in, 150 mm, and 200 mm wafers. Eight magnetic mounting points are provided for samples prepared on standard 10-15 mm diameter discs.

Motor Stage allows positioning of any point on a 200 mm wafer under the AFM probe (i.e. fully addressable). Maximum stage velocity is 40 mm/s.

Instrument IsolationAcoustic Included enclosure provides ~20 dB of isolation.

Vibration Active vibration isolators offer superior performance in a wide range of laboratory environments (sold separately).

Included Operating ModesBasic Modes Contact mode; Force curves; Frequency modulation; Lateral force mode (LFM); Nanolithography and nanomanipulation; Phase imaging; Tapping mode (AC mode); Tapping mode with digital Q control

Nanomechanical Modes AM-FM Viscoelastic Mapping Mode; Bimodal Dual AC; Contact Resonance Viscoelastic Mapping Mode; Force mapping mode (force volume); Force modulation; Loss tangent imaging

Nanoelectrical, Functional & Electromechanical Modes Electric force microscopy (EFM); Kelvin probe force microscopy (KPFM); Magnetic force microscopy (MFM); Dual AC Resonance Tracking (DART) piezoresponse force microscopy (PFM); Switching spectroscopy PFM; Vector PFM

Optional Operating ModesConductive AFM (CAFM) with ORCA™ and Eclipse™ Mode; Current mapping with Fast Force Mapping; Fast Force Mapping Mode. Other modes will be supported in future releases. Please inquire if needed.

Optional AccessoriesHigh temperature sample heater; Liquid cell

(A full range of accessories similar to those available on the Asylum MFP-3D AFM family is planned. Please inquire if you have specific requirements.)

WarrantyStandard warranty One-year comprehensive warranty covering all parts and labor.

Extended warranty Asylum offers affordable extended warranties. Inquire for details.

(All noise measurements are quoted as the average deviation measured with a 1 kHz bandwidth over a full 10 seconds at the center of the scanner range. Specifications assume required vibration and acoustic isolation in an appropriate laboratory environment.)