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Page 1: K Deposition Materials
Page 2: K Deposition Materials

K Deposition Materials

DDeeppoossiittiioonn MMaatteerriiaallss

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Page 3: K Deposition Materials

K Deposition Materials

CCOONNTTEENNTTSS

Sputter Targets | Circular

Page

K1 Aluminium Al Aluminium Copper AlCu Aluminium Nitride AlN

K2 Aluminium Oxide Al2O3

Antimony Sb Barium Ba Barium Titanate BaTiO3

Barium Fluoride BaF K3 Barium Oxide BaO

Barium Strontium Titanate BaSrTiO3

Bismuth Bi Bismuth Oxide Bi2O3

K4 Bismuth Selenide Bi2Se3

Bismuth Titanate Bi4Ti3O12

Boron B Boron Nitride BN Boron Carbide B4C

K5 Cadmium Cd Cadmium Selenide CdSe Cadmium Sulfide CdS Cadmium Telluride CdTe Carbon (Graphite) C

K6 Cerium Ce Cerium Fluoride CeF3

Cerium Oxide CeO2 Chromium Cr

K7 Chromium Oxide Cr2O3

Cobalt Co Cobalt Oxide CoO Copper Cu

K8 Copper Oxide CuO Dysprosium Dy Erbium Er Europium Eu Gadolinium Gd

K9 Germanium Ge Gold Au Hafnium Hf Hafnium Carbide HfC

K10 Hafnium Nitride HfN Hafnium Oxide HfO2

Holmium Ho Indium In

K11 Indium Oxide In2O3 Indium Tin Oxide (ITO) In2O3/SnO2

Iridium Ir Iron Fe

K12 Iron Oxide Fe2O3 Lanthanum La Lanthanum Aluminate LaAlO3 Lanthanum Oxide La2O3 Lead Pb

Page

K13 Lead Telluride PbTe Lead Titanate PbTiO3 Lead Zirconate PbZrO3

Lead Zirconate Titanate (PZT) ` PbZr1-xTixO3 Magnesium Mg

K14 Magnesium Fluoride MgF2 Magnesium Oxide MgO Manganese Mn Manganese Oxide MnO Molybdenum Mo

K15 Molybdenum Carbide MoC2 Molybdenum Oxide MoO3 Molybdenum Disulfide MoS2 Neodymium Nd

K16 Nickel Ni Nickel Chromium NiCr

K17 Nickel Iron NiFe Nickel Oxide NiO Nickel Vanadium NiV Niobium Nb

K18 Niobium Carbide NbC Niobium Nitride NbN Niobium Oxide Nb2O5 Palladium Pd Permalloy Ni/Fe/Mo/Mn

K19 Platinum Pt Platinum Cobalt PtCo Platinum Gadolinium PtGd Platinum Lanthanum PtLa Platinum Scandium PtSc Platinum Yttrium PtY

K20 Praseodymium Pr Rhenium Re Rhodium Rh Ruthenium Ru Samarium Sm

K21 Selenium Se Silicon Si Undoped Silicon Si N-type Silicon Si P-type Samarium Sm

K22 Silicon Dioxide SiO2 Silicon Monoxide SiO Silicon Nitride Si3N4 Silver Ag Silver Titanium AgTi

K23 Strontium Sr Strontium Titanate SrTiO3 Tantalum Ta Tantalum Carbide TaC Tantalum Nitride TaN

Page

K24 Tantalum Oxide Ta2O5 Tantalum Silicide TaSi2 Tellerium Te Terbium Tb Tin Sn

K25 Tin Oxide SnO2 Titanium Ti Titanium Boride TiB2 Titanium Carbide TiC

K26 Titanium Monoxide TiO Titanium Disilicide TiSi2 Titanium Dioxide TiO2 Titanium Nitrie TiN

K27 Tungsten W Tungsten Carbide WC Tungsten Oxide WO3 Tungsten Disilicide WSi2 Tungsten Disulfide WS2

K28 Tungsten Titanium WTi Vanadium V Vanadium Carbide VC Vanadium Oxide V2O5 Ytterbium Yb

K29 Ytterbium Oxide Yb2O3 Yttrium Y Yttrium Oxide Y2O3 Zinc Zn

K30 Zinc Oxide ZnO Zinc Selenide ZnSe Zinc Sulfide ZnS Zinc Telluride ZnTe

K31 Zirconium Zr Zirconium Carbide ZrC Zirconium Nitride ZrN Zirconium Oxide ZrO2

Backing Plates & Bonding K32

Circular Backing Plates Linear Backing Plates

K33 Indium Bonding

K34 Elastomer Bonding

K35 Nanofoil Bonding

Materials Reclaim Service

K36 Precious Metal Reclaim

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Page 4: K Deposition Materials

K1 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Aluminium Al

1.00” (25.4) 3 99.99

MT-AL25X3-4N 1.00” (25.4) 6 99.99 MT-AL25X6-4N 1.00” (25.4) 3 99.999 MT-AL25X3-5N 1.00” (25.4) 6 99.999 MT-AL25X6-5N 1.00” (25.4) 3 99.9999 MT-AL25X3-6N 1.00” (25.4) 6 99.9999 MT-AL25X6-6N 2.00” (50.8) 3 99.99 MT-AL51X3-4N 2.00” (50.8) 6 99.99 MT-AL51X6-4N 2.00” (50.8) 3 99.999 MT-AL51X3-5N 2.00” (50.8) 6 99.999 MT-AL51X6-5N 2.00” (50.8) 3 99.9999 MT-AL51X3-6N 2.00” (50.8) 6 99.9999 MT-AL51X6-6N 3.00” (76.2) 3 99.99 MT-AL76X3-4N 3.00” (76.2) 6 99.99 MT-AL76X6-4N 3.00” (76.2) 3 99.999 MT-AL76X3-5N 3.00” (76.2) 6 99.999 MT-AL76X6-5N 3.00” (76.2) 3 99.9999 MT-AL76X3-6N 3.00” (76.2) 6 99.9999 MT-AL76X6-6N 4”, 6” & 8” available

Aluminium Copper AlCu

1.00” (25.4) 3 99.999

99-Al/1-Cu, wt%

MT-ALCU25X3-5N 1.00” (25.4) 6 99.999 MT-ALCU25X6-5N 2.00” (50.8) 3 99.999 MT-ALCU51X3-5N 2.00” (50.8) 6 99.999 MT-ALCU51X6-5N 3.00” (76.2) 3 99.999 MT-ALCU76X3-5N 3.00” (76.2) 6 99.999 MT-ALCU76X6-5N 4”, 6” & 8” available

Aluminium Nitride AlN

1.00” (25.4) 3 99.8

Bonding Advised

MT-ALN25X3-2N8 1.00” (25.4) 6 99.8 MT-ALN25X6-2N8 2.00” (50.8) 3 99.8 MT-ALN51X3-2N8 2.00” (50.8) 6 99.8 MT-ALN51X6-2N8 3.00” (76.2) 3 99.8 MT-ALN76X3-2N8 3.00” (76.2) 6 99.8 MT-ALN76X6-2N8 4” available

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Page 5: K Deposition Materials

K2 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Aluminium Oxide Al2O3

1.00” (25.4) 3 99.99

Bonding Advised

MT-AL2O325X3-4N 1.00” (25.4) 6 99.99 MT-AL2O325X6-4N 2.00” (50.8) 3 99.99 MT-AL2O351X3-4N 2.00” (50.8) 6 99.99 MT-AL2O351X6-4N 3.00” (76.2) 3 99.99 MT-AL2O376X3-4N 3.00” (76.2) 6 99.99 MT-AL2O376X6-4N 4”, 6” & 8” available

Antimony Sb

1.00” (25.4) 3 99.999

Some Porosity

MT-SB25X3-5N 1.00” (25.4) 6 99.999 MT-SB25X6-5N 2.00” (50.8) 3 99.999 MT-SB51X3-5N 2.00” (50.8) 6 99.999 MT-SB51X6-5N 3.00” (76.2) 3 99.999 MT-SB76X3-5N 3.00” (76.2) 6 99.999 MT-SB76X6-5N 4” available

Barium Ba

1.00” (25.4) 3 99.5

Oil Packed

MT-BA25X3-2N5 1.00” (25.4) 6 99.5 MT-BA25X6-2N5 2.00” (50.8) 3 99.5 MT-BA51X3-2N5 2.00” (50.8) 6 99.5 MT-BA51X6-2N5 3.00” (76.2) 3 99.5 MT-BA76X3-2N5 3.00” (76.2) 6 99.5 MT-BA76X6-2N5 4” and 6” available

Barium Titanate BaTiO3

1.00” (25.4) 3 99.9

Bonding Advised

MT-BATIO325X3-3N 1.00” (25.4) 6 99.9 MT-BATIO325X6-3N 2.00” (50.8) 3 99.9 MT-BATIO351X3-3N 2.00” (50.8) 6 99.9 MT-BATIO351X6-3N 3.00” (76.2) 3 99.9 MT-BATIO376X3-3N 3.00” (76.2) 6 99.9 MT-BATIO376X6-3N 4” available

Barium Fluoride BaF

1.00” (25.4) 3 99.9

Bonding Advised

MT-BAF25X3-3N 1.00” (25.4) 6 99.9 MT-BAF25X6-3N 2.00” (50.8) 3 99.9 MT-BAF51X3-3N 2.00” (50.8) 6 99.9 MT-BAF51X6-3N 3.00” (76.2) 3 99.9 MT-BAF76X3-3N 3.00” (76.2) 6 99.9 MT-BAF76X6-3N 4” available

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Page 6: K Deposition Materials

K3 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Barium Oxide BaO

1.00” (25.4) 3 99.9

Bonding Advised

MT-BAO25X3-3N 1.00” (25.4) 6 99.9 MT-BAO25X6-3N 2.00” (50.8) 3 99.9 MT-BAO51X3-3N 2.00” (50.8) 6 99.9 MT-BAO51X6-3N 3.00” (76.2) 3 99.9 MT-BAO76X3-3N 3.00” (76.2) 6 99.9 MT-BAO76X6-3N 4”, 6” & 8” available

Barium Strontium Titanate BaSrTiO3

1.00” (25.4) 3 99.9

Ba0.5/Sr0.5

Bonding Advised

MT-BASRTIO325X3-3N 1.00” (25.4) 6 99.9 MT-BASRTIO325X6-3N 2.00” (50.8) 3 99.9 MT-BASRTIO351X3-3N 2.00” (50.8) 6 99.9 MT-BASRTIO351X6-3N 3.00” (76.2) 3 99.9 MT-BASRTIO376X3-3N 3.00” (76.2) 6 99.9 MT-BASRTIO376X6-3N 4” available

Bismuth Bi

1.00” (25.4) 3 99.9

Some Porosity

Bonding Advised for 3” and above

MT-BI25X3-3N 1.00” (25.4) 6 99.9 MT-BI25X6-3N 1.00” (25.4) 3 99.99 MT-BI25X3-4N 1.00” (25.4) 6 99.99 MT-BI25X6-4N 1.00” (25.4) 3 99.999 MT-BI25X3-5N 1.00” (25.4) 6 99.999 MT-BI25X6-5N 2.00” (50.8) 3 99.9 MT-BI51X3-3N 2.00” (50.8) 6 99.9 MT-BI51X6-3N 2.00” (50.8) 3 99.99 MT-BI51X3-4N 2.00” (50.8) 6 99.99 MT-BI51X6-4N 2.00” (50.8) 3 99.999 MT-BI51X3-5N 2.00” (50.8) 6 99.999 MT-BI51X6-5N 3.00” (76.2) 3 99.9 MT-BI76X3-3N 3.00” (76.2) 6 99.9 MT-BI76X6-3N 3.00” (76.2) 3 99.99 MT-BI76X3-4N 3.00” (76.2) 6 99.99 MT-BI76X6-4N 3.00” (76.2) 3 99.999 MT-BI76X3-5N 3.00” (76.2) 6 99.999 MT-BI76X6-5N 4” available

Bismuth Oxide Bi2O3

1.00” (25.4) 3 99.99

Bonding Advised

MT-BI2O325X3-4N 1.00” (25.4) 6 99.99 MT-BI2O325X6-4N 2.00” (50.8) 3 99.99 MT-BI2O351X3-4N 2.00” (50.8) 6 99.99 MT-BI2O351X6-4N 3.00” (76.2) 3 99.99 MT-BI2O376X3-4N 3.00” (76.2) 6 99.99 MT-BI2O376X6-4N 4” and 6” available

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Page 7: K Deposition Materials

K4 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Bismuth Selenide Bi2Se3

1.00” (25.4) 3 99.999

Bonding Advised

MT-BI2SE325X3-5N 1.00” (25.4) 6 99.999 MT-BI2SE325X6-5N 2.00” (50.8) 3 99.999 MT-BI2SE351X3-5N 2.00” (50.8) 6 99.999 MT-BI2SE351X6-5N 3.00” (76.2) 3 99.999 MT-BI2SE376X3-5N 3.00” (76.2) 6 99.999 MT-BI2SE376X6-5N 4” available

Bismuth Titanate Bi4Ti3O12

1.00” (25.4) 3 99.9

Bonding Advised

MT-BITIO25X3-3N 1.00” (25.4) 6 99.9 MT-BITIO25X6-3N 2.00” (50.8) 3 99.9 MT-BITIO51X3-3N 2.00” (50.8) 6 99.9 MT-BITIO51X6-3N 3.00” (76.2) 3 99.9 MT-BITIO76X3-3N 3.00” (76.2) 6 99.9 MT-BITIO76X6-3N 4” available

Boron B

1.00” (25.4) 3 99.9

Bonding Advised

MT-B25X3-3N 1.00” (25.4) 6 99.9 MT-B25X6-3N 2.00” (50.8) 3 99.9 MT-B51X3-3N 2.00” (50.8) 6 99.9 MT-B51X6-3N 3.00” (76.2) 3 99.9 MT-B76X3-3N 3.00” (76.2) 6 99.9 MT-B76X6-3N 4”, 6” and 8” available

Boron Nitride BN

1.00” (25.4) 3 99.99

Bonding Advised

MT-BN25X3-4N 1.00” (25.4) 6 99.99 MT-BN25X6-4N 2.00” (50.8) 3 99.99 MT-BN51X3-4N 2.00” (50.8) 6 99.99 MT-BN51X6-4N 3.00” (76.2) 3 99.99 MT-BN76X3-4N 3.00” (76.2) 6 99.99 MT-BN76X6-4N 4”, 6” and 8” available

Boron Carbide B4C

1.00” (25.4) 3 99.5+

Bonding Advised

MT-B4C25X3-2N5 1.00” (25.4) 6 99.5+ MT-B4C25X6-2N5 2.00” (50.8) 3 99.5+ MT-B4C51X3-2N5 2.00” (50.8) 6 99.5+ MT-B4C51X6-2N5 3.00” (76.2) 3 99.5+ MT-B4C76X3-2N5 3.00” (76.2) 6 99.5+ MT-B4C76X6-2N5 4”, 6” and 8” available

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Page 8: K Deposition Materials

K5 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Cadmium Cd

1.00” (25.4) 3 99.999

Some Porosity

MT-CD25X3-5N 1.00” (25.4) 6 99.999 MT-CD25X6-5N 2.00” (50.8) 3 99.999 MT-CD51X3-5N 2.00” (50.8) 6 99.999 MT-CD51X6-5N 3.00” (76.2) 3 99.999 MT-CD76X3-5N 3.00” (76.2) 6 99.999 MT-CD76X6-5N 4” and 6” available

Cadmium Selenide CdSe

1.00” (25.4) 3 99.99

Bonding Advised

MT-CDSE25X3-4N 1.00” (25.4) 6 99.99 MT-CDSE25X6-4N 2.00” (50.8) 3 99.99 MT-CDSE51X3-4N 2.00” (50.8) 6 99.99 MT-CDSE51X6-4N 3.00” (76.2) 3 99.99 MT-CDSE76X3-4N 3.00” (76.2) 6 99.99 MT-CDSE76X6-4N 4” available

Cadmium Sulfide CdS

1.00” (25.4) 3 99.99

Bonding Advised

MT-CDS25X3-4N 1.00” (25.4) 6 99.99 MT-CDS25X6-4N 2.00” (50.8) 3 99.99 MT-CDS51X3-4N 2.00” (50.8) 6 99.99 MT-CDS51X6-4N 3.00” (76.2) 3 99.99 MT-CDS76X3-4N 3.00” (76.2) 6 99.99 MT-CDS76X6-4N 4” available

Cadmium Telluride CdTe

1.00” (25.4) 3 99.999

Bonding Advised

MT-CDTE25X3-5N 1.00” (25.4) 6 99.999 MT-CDTE25X6-5N 2.00” (50.8) 3 99.999 MT-CDTE51X3-5N 2.00” (50.8) 6 99.999 MT-CDTE51X6-5N 3.00” (76.2) 3 99.999 MT-CDTE76X3-5N 3.00” (76.2) 6 99.999 MT-CDTE76X6-5N 4” available

Carbon C

1.00” (25.4) 3 99.999

(Graphite)

Bonding Advised

MT-C25X3-5N 1.00” (25.4) 6 99.999 MT-C25X6-5N 2.00” (50.8) 3 99.999 MT-C51X3-5N 2.00” (50.8) 6 99.999 MT-C51X6-5N 3.00” (76.2) 3 99.999 MT-C76X3-5N 3.00” (76.2) 6 99.999 MT-C76X6-5N 4”, 6” and 8” available

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Page 9: K Deposition Materials

K6 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Cerium Ce

1.00” (25.4) 3 99.9 TREM

Oil Packed

MT-CE25X3-3N 1.00” (25.4) 6 99.9 TREM MT-CE25X6-3N 2.00” (50.8) 3 99.9 TREM MT-CE51X3-3N 2.00” (50.8) 6 99.9 TREM MT-CE51X6-3N 3.00” (76.2) 3 99.9 TREM MT-CE76X3-3N 3.00” (76.2) 6 99.9 TREM MT-CE76X6-3N 4” available

Cerium Fluoride CeF3

1.00” (25.4) 3 99.99

Bonding Advised

MT-CEF325X3-4N 1.00” (25.4) 6 99.99 MT-CEF325X6-4N 2.00” (50.8) 3 99.99 MT-CEF351X3-4N 2.00” (50.8) 6 99.99 MT-CEF351X6-4N 3.00” (76.2) 3 99.99 MT-CEF376X3-4N 3.00” (76.2) 6 99.99 MT-CEF376X6-4N 4”, 6” and 8” available

Cerium Oxide CeO2

1.00” (25.4) 3 99.99

Bonding Advised

MT-CEO225X3-4N 1.00” (25.4) 6 99.99 MT-CEO225X6-4N 2.00” (50.8) 3 99.99 MT-CEO251X3-4N 2.00” (50.8) 6 99.99 MT-CEO251X6-4N 3.00” (76.2) 3 99.99 MT-CEO276X3-4N 3.00” (76.2) 6 99.99 MT-CEO276X6-4N 4” available

Chromium Cr

1.00” (25.4) 0.5 99.99

Magnetic

MT-CR25X05-4N 1.00” (25.4) 1 99.99 MT-CR25X1-4N 1.00” (25.4) 2 99.99 MT-CR25X2-4N 1.00” (25.4) 3 99.99 MT-CR25X3-4N 2.00” (50.8) 0.5 99.99 MT-CR51X05-4N 2.00” (50.8) 1 99.99 MT-CR51X1-4N 2.00” (50.8) 2 99.99 MT-CR51X2-4N 2.00” (50.8) 3 99.99 MT-CR51X3-4N 3.00” (76.2) 0.5 99.99 MT-CR76X05-4N 3.00” (76.2) 1 99.99 MT-CR76X1-4N 3.00” (76.2) 2 99.99 MT-CR76X2-4N 3.00” (76.2) 3 99.99 MT-CR76X3-4N 4”, 6” and 8” available

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Page 10: K Deposition Materials

K7 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Chromium Oxide Cr2O3

1.00” (25.4) 3 99.9

Bonding Advised

MT-CR2O325X3-3N 1.00” (25.4) 6 99.9 MT-CR2O325X6-3N 2.00” (50.8) 3 99.9 MT-CR2O351X3-3N 2.00” (50.8) 6 99.9 MT-CR2O351X6-3N 3.00” (76.2) 3 99.9 MT-CR2O376X3-3N 3.00” (76.2) 6 99.9 MT-CR2O376X6-3N 4” available

Cobalt Co

1.00” (25.4) 0.5 99.95

Magnetic

MT-CO25X05-3N5 1.00” (25.4) 1 99.95 MT-CO25X1-3N5 1.00” (25.4) 2 99.95 MT-CO25X2-3N5 1.00” (25.4) 3 99.95 MT-CO25X3-3N5 2.00” (50.8) 0.5 99.95 MT-CO51X05-3N5 2.00” (50.8) 1 99.95 MT-CO51X1-3N5 2.00” (50.8) 2 99.95 MT-CO51X2-3N5 2.00” (50.8) 3 99.95 MT-CO51X3-3N5 3.00” (76.2) 0.5 99.95 MT-CO76X05-3N5 3.00” (76.2) 1 99.95 MT-CO76X1-3N5 3.00” (76.2) 2 99.95 MT-CO76X2-3N5 3.00” (76.2) 3 99.95 MT-CO76X3-3N5 4”, 6” and 8” available

Cobalt Oxide CoO

1.00” (25.4) 3 99.9

Bonding Advised

MT-CEO225X3-3N 1.00” (25.4) 6 99.9 MT-CEO225X6-3N 2.00” (50.8) 3 99.9 MT-CEO251X3-3N 2.00” (50.8) 6 99.9 MT-CEO251X6-3N 3.00” (76.2) 3 99.9 MT-CEO276X3-3N 3.00” (76.2) 6 99.9 MT-CEO276X6-3N 4” available

Copper Cu

1.00” (25.4) 3 99.99

MT-CU25X3-4N 1.00” (25.4) 6 99.99 MT-CU25X6-4N 1.00” (25.4) 3 99.999 MT-CU25X3-5N 1.00” (25.4) 6 99.999 MT-CU25X6-5N 2.00” (50.8) 3 99.99 MT-CU51X3-4N 2.00” (50.8) 6 99.99 MT-CU51X6-4N 2.00” (50.8) 3 99.999 MT-CU51X3-5N 2.00” (50.8) 6 99.999 MT-CU51X6-5N 3.00” (76.2) 3 99.99 MT-CU76X3-4N 3.00” (76.2) 6 99.99 MT-CU76X6-4N 3.00” (76.2) 3 99.999 MT-CU76X3-5N 3.00” (76.2) 6 99.999 MT-CU76X6-5N 4”, 6” and 8” available

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Page 11: K Deposition Materials

K8 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Copper Oxide CuO

1.00” (25.4) 3 99.9

Bonding Advised

MT-CUO25X3-3N 1.00” (25.4) 6 99.9 MT-CUO25X6-3N 2.00” (50.8) 3 99.9 MT-CUO51X3-3N 2.00” (50.8) 6 99.9 MT-CUO51X6-3N 3.00” (76.2) 3 99.9 MT-CUO76X3-3N 3.00” (76.2) 6 99.9 MT-CUO76X6-3N 4” available

Dysprosium Dy

1.00” (25.4) 3 99.9 TREM

Oil Packed

MT-DY25X2-3N 1.00” (25.4) 6 99.9 TREM MT-DY25X3-3N 2.00” (50.8) 3 99.9 TREM MT-DY51X2-3N 2.00” (50.8) 6 99.9 TREM MT-DY51X3-3N 3.00” (76.2) 3 99.9 TREM MT-DY76X2-3N 3.00” (76.2) 6 99.9 TREM MT-DY76X3-3N 4” available

Erbium Er

1.00” (25.4) 3 99.9 TREM

Oil Packed

MT-ER25X3-3N 1.00” (25.4) 6 99.9 TREM MT-ER25X6-3N 2.00” (50.8) 3 99.9 TREM MT-ER51X3-3N 2.00” (50.8) 6 99.9 TREM MT-ER51X6-3N 3.00” (76.2) 3 99.9 TREM MT-ER76X3-3N 3.00” (76.2) 6 99.9 TREM MT-ER76X6-3N 4” available

Europium Eu

1.00” (25.4) 3 99.9 TREM

Oil Packed

MT-EU25X3-3N 1.00” (25.4) 6 99.9 TREM MT-EU25X6-3N 2.00” (50.8) 3 99.9 TREM MT-EU51X3-3N 2.00” (50.8) 6 99.9 TREM MT-EU51X6-3N 3.00” (76.2) 3 99.9 TREM MT-EU76X3-3N 3.00” (76.2) 6 99.9 TREM MT-EU76X6-3N 4”, 6” and 8” available

Gadolinium Gd

1.00” (25.4) 3 99.9 TREM

Magnetic

Oil Packed

MT-GD25X3-3N 1.00” (25.4) 6 99.9 TREM MT-GD25X6-3N 2.00” (50.8) 3 99.9 TREM MT-GD51X3-3N 2.00” (50.8) 6 99.9 TREM MT-GD51X6-3N 3.00” (76.2) 3 99.9 TREM MT-GD76X3-3N 3.00” (76.2) 6 99.9 TREM MT-GD76X6-3N 4”, 6” and 8” available

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Page 12: K Deposition Materials

K9 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Germanium Ge

1.00” (25.4) 3 99.999

Bonding Advised

MT-GE25X3-5N 1.00” (25.4) 6 99.999 MT-GE25X6-5N 2.00” (50.8) 3 99.999 MT-GE51X3-5N 2.00” (50.8) 6 99.999 MT-GE51X6-5N 3.00” (76.2) 3 99.999 MT-GE76X3-5N 3.00” (76.2) 6 99.999 MT-GE76X6-5N 4” available

Gold Au

1.00” (25.4) 0.5 99.99

Bonding of larger/thinner targets advised

Reclaim Service

MT-AU25X05-4N 1.00” (25.4) 1 99.99 MT-AU25X1-4N 1.00” (25.4) 2 99.99 MT-AU25X2-4N 1.00” (25.4) 3 99.99 MT-AU25X3-4N 1.00” (25.4) 6 99.99 MT-AU25X6-4N 2.00” (50.8) 0.5 99.99 MT-AU51X05-4N 2.00” (50.8) 1 99.99 MT-AU51X1-4N 2.00” (50.8) 2 99.99 MT-AU51X2-4N 2.00” (50.8) 3 99.99 MT-AU51X3-4N 2.00” (50.8) 6 99.99 MT-AU51X6-4N 3.00” (76.2) 0.5 99.99 MT-AU76X05-4N 3.00” (76.2) 1 99.99 MT-AU76X1-4N 3.00” (76.2) 2 99.99 MT-AU76X2-4N 3.00” (76.2) 3 99.99 MT-AU76X3-4N 3.00” (76.2) 6 99.99 MT-AU76X6-4N 4”, 6” and 8” available

Hafnium Hf

1.00” (25.4) 3 99.9

MT-HF25X3-3N 1.00” (25.4) 6 99.9 MT-HF25X6-3N 2.00” (50.8) 3 99.9 MT-HF51X3-3N 2.00” (50.8) 6 99.9 MT-HF51X6-3N 3.00” (76.2) 3 99.9 MT-HF76X3-3N 3.00” (76.2) 6 99.9 MT-HF76X6-3N 4”, 6” and 8” available

Hafnium Carbide HfC

1.00” (25.4) 3 99.5

Bonding Advised

MT-HFC25X3-2N5 1.00” (25.4) 6 99.5 MT-HFC25X6-2N5 2.00” (50.8) 3 99.5 MT-HFC51X3-2N5 2.00” (50.8) 6 99.5 MT-HFC51X6-2N5 3.00” (76.2) 3 99.5 MT-HFC76X3-2N5 3.00” (76.2) 6 99.5 MT-HFC76X6-2N5 4”, 6” and 8” available

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Page 13: K Deposition Materials

K10 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Hafnium Nitride HfN

1.00” (25.4) 3 99.5

Bonding Advised

MT-HFN25X3-2N5 1.00” (25.4) 6 99.5 MT-HFN25X6-2N5 2.00” (50.8) 3 99.5 MT-HFN51X3-2N5 2.00” (50.8) 6 99.5 MT-HFN51X6-2N5 3.00” (76.2) 3 99.5 MT-HFN76X3-2N5 3.00” (76.2) 6 99.5 MT-HFN76X6-2N5 4”, 6” and 8” available

Hafnium Oxide HfO2

1.00” (25.4) 3 99.95

Bonding Advised

MT-HFO225X3-3N5 1.00” (25.4) 6 99.95 MT-HFO225X6-3N5 2.00” (50.8) 3 99.95 MT-HFO251X3-3N5 2.00” (50.8) 6 99.95 MT-HFO251X6-3N5 3.00” (76.2) 3 99.95 MT-HFO276X3-3N5 3.00” (76.2) 6 99.95 MT-HFO276X6-3N5 4”, 6” and 8” available

Holmium Ho

1.00” (25.4) 3 99.9 TREM

Oil Packed

MT-HO25X3-3N 1.00” (25.4) 6 99.9 TREM MT-HO25X6-3N 2.00” (50.8) 3 99.9 TREM MT-HO51X3-3N 2.00” (50.8) 6 99.9 TREM MT-HO51X6-3N 3.00” (76.2) 3 99.9 TREM MT-HO76X3-3N 3.00” (76.2) 6 99.9 TREM MT-HO76X6-3N 4” available

Indium In

1.00” (25.4) 3 99.99

Reclaim Service

MT-IN25X3-4N 1.00” (25.4) 6 99.99 MT-IN25X6-4N 1.00” (25.4) 3 99.999 MT-IN25X3-5N 1.00” (25.4) 6 99.999 MT-IN25X6-5N 2.00” (50.8) 3 99.99 MT-IN51X3-4N 2.00” (50.8) 6 99.99 MT-IN51X6-4N 2.00” (50.8) 3 99.999 MT-IN51X3-5N 2.00” (50.8) 6 99.999 MT-IN51X6-5N 3.00” (76.2) 3 99.99 MT-IN76X3-4N 3.00” (76.2) 6 99.99 MT-IN76X6-4N 3.00” (76.2) 3 99.999 MT-IN76X3-5N 3.00” (76.2) 6 99.999 MT-IN76X6-5N 4”, 6” and 8” available

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Page 14: K Deposition Materials

K11 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Indium Oxide In2O3

1.00” (25.4) 3 99.99

Bonding Advised

MT-IN2O325X3-4N 1.00” (25.4) 6 99.99 MT-IN2O325X6-4N 2.00” (50.8) 3 99.99 MT-IN2O351X3-4N 2.00” (50.8) 6 99.99 MT-IN2O351X6-4N 3.00” (76.2) 3 99.99 MT-IN2O376X3-4N 3.00” (76.2) 6 99.99 MT-IN2O376X6-4N 4”, 6” and 8” available

Indium Tin Oxide ITO

1.00” (25.4) 3 99.99

In2O3/SnO2, 90/10 wt%

Bonding Advised

MT-ITO25X3-4N 1.00” (25.4) 6 99.99 MT-ITO25X6-4N 2.00” (50.8) 3 99.99 MT-ITO51X3-4N 2.00” (50.8) 6 99.99 MT-ITO51X6-4N 3.00” (76.2) 3 99.99 MT-ITO76X3-4N 3.00” (76.2) 6 99.99 MT-ITO76X6-4N 4”, 6” and 8” available

Iridium Ir

1.00” (25.4) 3 99.9

Some Porosity

Reclaim Service

MT-IR25X3-3N 1.00” (25.4) 6 99.9 MT-IR25X6-3N 2.00” (50.8) 3 99.9 MT-IR51X3-3N 2.00” (50.8) 6 99.9 MT-IR51X6-3N 3.00” (76.2) 3 99.9 MT-IR76X3-3N 3.00” (76.2) 6 99.9 MT-IR76X6-3N 4” available

Iron Fe

1.00” (25.4) 0.5 99.99

Magnetic

MT-FE25X05-4N 1.00” (25.4) 1 99.99 MT-FE25X1-4N 1.00” (25.4) 2 99.99 MT-FE25X1-4N 1.00” (25.4) 3 99.99 MT-FE25X1-4N 2.00” (50.8) 0.5 99.99 MT-FE51X05-4N 2.00” (50.8) 1 99.99 MT-FE51X1-4N 2.00” (50.8) 2 99.99 MT-FE51X1-4N 2.00” (50.8) 3 99.99 MT-FE51X3-4N 3.00” (76.2) 0.5 99.99 MT-FE76X05-4N 3.00” (76.2) 1 99.99 MT-FE76X1-4N 3.00” (76.2) 2 99.99 MT-FE76X2-4N 3.00” (76.2) 3 99.99 MT-FE76X3-4N 4” and 6” available

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Page 15: K Deposition Materials

K12 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Iron Oxide Fe2O3

1.00” (25.4) 3 99.99

Bonding Advised

MT-FE2O325X3-4N 1.00” (25.4) 6 99.99 MT-FE2O325X6-4N 2.00” (50.8) 3 99.99 MT-FE2O351X3-4N 2.00” (50.8) 6 99.99 MT-FE2O351X6-4N 3.00” (76.2) 3 99.99 MT-FE2O376X3-4N 3.00” (76.2) 6 99.99 MT-FE2O376X6-4N 4” available

Lanthanum La

1.00” (25.4) 3 99.9 TREM

Oil Packed

MT-LA25X3-3N 1.00” (25.4) 6 99.9 TREM MT-LA25X6-3N 2.00” (50.8) 3 99.9 TREM MT-LA51X3-3N 2.00” (50.8) 6 99.9 TREM MT-LA51X6-3N 3.00” (76.2) 3 99.9 TREM MT-LA76X3-3N 3.00” (76.2) 6 99.9 TREM MT-LA76X6-3N 4” available

Lanthanum Aluminate LaAlO3

1.00” (25.4) 3 99.9

Bonding Advised

MT-LAALO325X3-3N 1.00” (25.4) 6 99.9 MT-LAALO325X6-3N 2.00” (50.8) 3 99.9 MT-LAALO351X3-3N 2.00” (50.8) 6 99.9 MT-LAALO351X6-3N 3.00” (76.2) 3 99.9 MT-LAALO376X3-3N 3.00” (76.2) 6 99.9 MT-LAALO376X6-3N 4” available

Lanthanum Oxide La2O3

1.00” (25.4) 3 99.99

Bonding Advised*

MT-LA2O325X3-4N 1.00” (25.4) 6 99.99 MT-LA2O325X6-4N 2.00” (50.8) 3 99.99 MT-LA2O351X3-4N 2.00” (50.8) 6 99.99 MT-LA2O351X6-4N 3.00” (76.2) 3 99.99 MT-LA2O376X3-4N 3.00” (76.2) 6 99.99 MT-LA2O376X6-4N 4” available

*not guaranteed subject to fabrication constraints 1.0

Lead Pb

1.00” (25.4) 3 99.99+

Some Porosity

MT-PB25X3-4N+ 1.00” (25.4) 6 99.99+ MT-PB25X6-4N+ 2.00” (50.8) 3 99.99+ MT-PB51X3-4N+ 2.00” (50.8) 6 99.99+ MT-PB51X6-4N+ 3.00” (76.2) 3 99.99+ MT-PB76X3-4N+ 3.00” (76.2) 6 99.99+ MT-PB76X6-4N+ 4” available

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Page 16: K Deposition Materials

K13 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Lead Telluride PbTe

1.00” (25.4) 3 99.99

Bonding Advised

MT-PBTE25X3-4N 1.00” (25.4) 6 99.99 MT-PBTE25X6-4N 2.00” (50.8) 3 99.99 MT-PBTE51X3-4N 2.00” (50.8) 6 99.99 MT-PBTE51X6-4N 3.00” (76.2) 3 99.99 MT-PBTE76X3-4N 3.00” (76.2) 6 99.99 MT-PBTE76X6-4N 4”, 6” and 8” available

Lead Titanate PbTiO3

1.00” (25.4) 3 99.9

Bonding Advised

MT-PBTIO325X3-3N 1.00” (25.4) 6 99.9 MT-PBTIO325X6-3N 2.00” (50.8) 3 99.9 MT-PBTIO351X3-3N 2.00” (50.8) 6 99.9 MT-PBTIO351X6-3N 3.00” (76.2) 3 99.9 MT-PBTIO376X3-3N 3.00” (76.2) 6 99.9 MT-PBTIO376X6-3N 4” available

Lead Zirconate PbZrO3

1.00” (25.4) 3 99.5+

Bonding Advised

MT-PBZRO325X3-2N5+ 1.00” (25.4) 6 99.5+ MT-PBZRO325X6-2N5+ 2.00” (50.8) 3 99.5+ MT-PBZRO351X3-2N5+ 2.00” (50.8) 6 99.5+ MT-PBZRO351X6-2N5+ 3.00” (76.2) 3 99.5+ MT-PBZRO376X3-2N5+ 3.00” (76.2) 6 99.5+ MT-PBZRO376X6-2N5+ 4” available

Lead Zirconate Titanate PZT

1.00” (25.4) 3 99.99

PbZr1-xTixO3

Bonding Advised

MT-PZT25X3-3N 1.00” (25.4) 6 99.99 MT-PZT25X6-3N 2.00” (50.8) 3 99.99 MT-PZT51X3-3N 2.00” (50.8) 6 99.99 MT-PZT51X6-3N 3.00” (76.2) 3 99.99 MT-PZT76X3-3N 3.00” (76.2) 6 99.99 MT-PZT76X6-3N 4” available

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Magnesium Mg

1.00” (25.4) 3 99.95

MT-MG25X1-3N5 1.00” (25.4) 6 99.95 MT-MG25X1-3N5 2.00” (50.8) 3 99.95 MT-MG51X1-3N5 2.00” (50.8) 6 99.95 MT-MG51X3-3N5 3.00” (76.2) 3 99.95 MT-MG76X2-3N5 3.00” (76.2) 6 99.95 MT-MG76X3-3N5 4”, 6” and 8” available

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Page 17: K Deposition Materials

K14 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Magnesium Fluoride MgF2

1.00” (25.4) 3 99.9

Bonding Advised

MT-MGF225X3-3N 1.00” (25.4) 6 99.9 MT-MGF225X6-3N 2.00” (50.8) 3 99.9 MT-MGF251X3-3N 2.00” (50.8) 6 99.9 MT-MGF251X6-3N 3.00” (76.2) 3 99.9 MT-MGF276X3-3N 3.00” (76.2) 6 99.9 MT-MGF276X6-3N 4”, 6” and 8” available

Magnesium Oxide MgO

1.00” (25.4) 3 99.5

Bonding Advised

MT-MGO25X3-2N5 1.00” (25.4) 6 99.5 MT-MGO25X6-2N5 2.00” (50.8) 3 99.5 MT-MGO51X3-2N5 2.00” (50.8) 6 99.5 MT-MGO51X6-2N5 3.00” (76.2) 3 99.5 MT-MGO76X3-2N5 3.00” (76.2) 6 99.5 MT-MGO76X6-2N5 4”, 6” and 8” available

Manganese Mn

1.00” (25.4) 3 99.95

Bonding Advised

MT-MN25X3-3N5 1.00” (25.4) 6 99.95 MT-MN25X6-3N5 2.00” (50.8) 3 99.95 MT-MN51X3-3N5 2.00” (50.8) 6 99.95 MT-MN51X6-3N5 3.00” (76.2) 3 99.95 MT-MN76X3-3N5 3.00” (76.2) 6 99.95 MT-MN76X6-3N5 4”, 6” and 8” available

Manganese Oxide MnO

1.00” (25.4) 3 99.99

Bonding Advised

MT-MNO25X3-3N 1.00” (25.4) 6 99.99 MT-MNO25X6-3N 2.00” (50.8) 3 99.99 MT-MNO51X3-3N 2.00” (50.8) 6 99.99 MT-MNO51X6-3N 3.00” (76.2) 3 99.99 MT-MNO76X3-3N 3.00” (76.2) 6 99.99 MT-MNO76X6-3N 4”, 6” and 8” available

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Molybdenum Mo

1.00” (25.4) 3 99.95

MT-MO25X1-3N5 1.00” (25.4) 6 99.95 MT-MO25X1-3N5 2.00” (50.8) 3 99.95 MT-MO51X1-3N5 2.00” (50.8) 6 99.95 MT-MO51X3-3N5 3.00” (76.2) 3 99.95 MT-MO76X2-3N5 3.00” (76.2) 6 99.95 MT-MO76X3-3N5 4”, 6” and 8” available

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Page 18: K Deposition Materials

K15 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Molybdenum Carbide MoC2

1.00” (25.4) 3 99.5

Bonding Advised

MT-MOC225X3-2N5 1.00” (25.4) 6 99.5 MT-MOC225X6-2N5 2.00” (50.8) 3 99.5 MT-MOC251X3-2N5 2.00” (50.8) 6 99.5 MT-MOC251X6-2N5 3.00” (76.2) 3 99.5 MT-MOC276X3-2N5 3.00” (76.2) 6 99.5 MT-MOC276X6-2N5 4” available

Molybdenum Oxide MoO3

1.00” (25.4) 3 99.9

Bonding Advised

MT-MOO325X3-3N 1.00” (25.4) 6 99.9 MT-MOO325X6-3N 2.00” (50.8) 3 99.9 MT-MOO351X3-3N 2.00” (50.8) 6 99.9 MT-MOO351X6-3N 3.00” (76.2) 3 99.9 MT-MOO376X3-3N 3.00” (76.2) 6 99.9 MT-MOO376X6-3N 4”, 6” and 8” available

Molybdenum Disulfide MoS2

1.00” (25.4) 3 99.9

Bonding Advised

MT-MOS225X3-3N 1.00” (25.4) 6 99.9 MT-MOS225X6-3N 2.00” (50.8) 3 99.9 MT-MOS251X3-3N 2.00” (50.8) 6 99.9 MT-MOS251X6-3N 3.00” (76.2) 3 99.9 MT-MOS276X3-3N 3.00” (76.2) 6 99.9 MT-MOS276X6-3N 4” available

Neodymium Nd

1.00” (25.4) 3 99.9

Oil Packed

MT-ND25X3-3N 1.00” (25.4) 6 99.9 MT-ND25X6-3N 2.00” (50.8) 3 99.9 MT-ND51X3-3N 2.00” (50.8) 6 99.9 MT-ND51X6-3N 3.00” (76.2) 3 99.9 MT-ND76X3-3N 3.00” (76.2) 6 99.9 MT-ND76X6-3N 4” available

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Page 19: K Deposition Materials

K16 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Nickel Ni

1.00” (25.4) 0.5 99.9

Magnetic

MT-NI25X05-3N 1.00” (25.4) 1 99.9 MT-NI25X1-3N 1.00” (25.4) 2 99.9 MT-NI25X2-3N 1.00” (25.4) 3 99.9 MT-NI25X3-3N 1.00” (25.4) 0.5 99.99 MT-NI25X05-4N 1.00” (25.4) 1 99.99 MT-NI25X1-4N 1.00” (25.4) 2 99.99 MT-NI25X2-4N 1.00” (25.4) 3 99.99 MT-NI25X3-4N 2.00” (50.8) 0.5 99.9 MT-NI51X05-3N 2.00” (50.8) 1 99.9 MT-NI51X1-3N 2.00” (50.8) 2 99.9 MT-NI51X2-3N 2.00” (50.8) 3 99.9 MT-NI51X3-3N 2.00” (50.8) 0.5 99.99 MT-NI51X05-4N 2.00” (50.8) 1 99.99 MT-NI51X1-4N 2.00” (50.8) 2 99.99 MT-NI51X2-4N 2.00” (50.8) 3 99.99 MT-NI51X3-4N 3.00” (76.2) 0.5 99.9 MT-NI76X05-3N 3.00” (76.2) 1 99.9 MT-NI76X1-3N 3.00” (76.2) 2 99.9 MT-NI76X2-3N 3.00” (76.2) 3 99.9 MT-NI76X3-3N 3.00” (76.2) 0.5 99.99 MT-NI76X05-4N 3.00” (76.2) 1 99.99 MT-NI76X1-4N 3.00” (76.2) 2 99.99 MT-NI76X2-4N 3.00” (76.2) 3 99.99 MT-NI76X3-4N 4”, 6” and 8” available

Nickel Chromium NiCr

1.00” (25.4) 0.5 99.9

Ni80/Cr20 wt%

Magnetic

MT-NICR25X05-3N 1.00” (25.4) 1 99.9 MT-NICR25X1-3N 1.00” (25.4) 2 99.9 MT-NICR25X2-3N 1.00” (25.4) 3 99.9 MT-NICR25X3-3N 2.00” (50.8) 0.5 99.9 MT-NICR51X05-3N 2.00” (50.8) 1 99.9 MT-NICR51X1-3N 2.00” (50.8) 2 99.9 MT-NICR51X2-3N 2.00” (50.8) 3 99.9 MT-NICR51X3-3N 3.00” (76.2) 0.5 99.9 MT-NICR76X05-3N 3.00” (76.2) 1 99.9 MT-NICR76X1-3N 3.00” (76.2) 2 99.9 MT-NICR76X2-3N 3.00” (76.2) 3 99.9 MT-NICR76X3-3N 4” available

1.00”

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Page 20: K Deposition Materials

K17 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Nickel Iron NiFe

1.00” (25.4) 0.5 99.95

Ni81/Fe19 wt%

Magnetic

MT-NIFE25X05-3N5 1.00” (25.4) 1 99.95 MT-NIFE25X1-3N5 1.00” (25.4) 2 99.95 MT-NIFE25X2-3N5 1.00” (25.4) 3 99.95 MT-NIFE25X3-3N5 2.00” (50.8) 0.5 99.95 MT-NIFE51X05-3N5 2.00” (50.8) 1 99.95 MT-NIFE51X1-3N5 2.00” (50.8) 2 99.95 MT-NIFE51X2-3N5 2.00” (50.8) 3 99.95 MT-NIFE51X3-3N5 3.00” (76.2) 0.5 99.95 MT-NIFE76X05-3N5 3.00” (76.2) 1 99.95 MT-NIFE76X1-3N5 3.00” (76.2) 2 99.95 MT-NIFE76X2-3N5 3.00” (76.2) 3 99.95 MT-NIFE76X3-3N5 4” available

Nickel Oxide NiO

1.00” (25.4) 3 99.99

Bonding Advised

MT-NIO25X3-4N 1.00” (25.4) 6 99.99 MT-NIO25X6-4N 2.00” (50.8) 3 99.99 MT-NIO51X3-4N 2.00” (50.8) 6 99.99 MT-NIO51X6-4N 3.00” (76.2) 3 99.99 MT-NIO76X3-4N 3.00” (76.2) 6 99.99 MT-NIO76X6-4N 4” available

Nickel Vanadium NiV

1.00” (25.4) 3 99.95

Ni93/V7 wt%

MT-NIV25X3-3N5 1.00” (25.4) 6 99.95 MT-NIV25X6-3N5 2.00” (50.8) 3 99.95 MT-NIV51X3-3N5 2.00” (50.8) 6 99.95 MT-NIV51X6-3N5 3.00” (76.2) 3 99.95 MT-NIV76X3-3N5 3.00” (76.2) 6 99.95 MT-NIV76X6-3N5 4”, 6” and 8” available

Niobium Nb

1.00” (25.4) 3 99.95

MT-NB25X3-3N5 1.00” (25.4) 6 99.95 MT-NB25X6-3N5 2.00” (50.8) 3 99.95 MT-NB51X3-3N5 2.00” (50.8) 6 99.95 MT-NB51X6-3N5 3.00” (76.2) 3 99.95 MT-NB76X3-3N5 3.00” (76.2) 6 99.95 MT-NB76X6-3N5 4”, 6” and 8” available

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Page 21: K Deposition Materials

K18 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Niobium Carbide NbC

1.00” (25.4) 3 99.5

Bonding Advised

MT-NBC25X3-2N5 1.00” (25.4) 6 99.5 MT-NBC25X6-2N5 2.00” (50.8) 3 99.5 MT-NBC51X3-2N5 2.00” (50.8) 6 99.5 MT-NBC51X6-2N5 3.00” (76.2) 3 99.5 MT-NBC76X3-2N5 3.00” (76.2) 6 99.5 MT-NBC76X6-2N5 4” available

Niobium Nitride NbN

1.00” (25.4) 3 99.5

Bonding Advised

MT-NBN25X3-2N5 1.00” (25.4) 6 99.5 MT-NBN25X6-2N5 2.00” (50.8) 3 99.5 MT-NBN51X3-2N5 2.00” (50.8) 6 99.5 MT-NBN51X6-2N5 3.00” (76.2) 3 99.5 MT-NBN76X3-2N5 3.00” (76.2) 6 99.5 MT-NBN76X6-2N5 4” available

Niobium Oxide Nb2O5

1.00” (25.4) 3 99.995

Bonding Advised

MT-NB2O525X3-4N5 1.00” (25.4) 6 99.995 MT-NB2O525X6-4N5 2.00” (50.8) 3 99.995 MT-NB2O551X3-4N5 2.00” (50.8) 6 99.995 MT-NB2O551X6-4N5 3.00” (76.2) 3 99.995 MT-NB2O576X3-4N5 3.00” (76.2) 6 99.995 MT-NB2O576X6-4N5 4” available

Palladium Pd

1.00” (25.4) 3 99.99

Reclaim Avaliable

MT-PD25X3-4N 1.00” (25.4) 6 99.99 MT-PD25X6-4N 2.00” (50.8) 3 99.99 MT-PD51X3-4N 2.00” (50.8) 6 99.99 MT-PD51X6-4N 3.00” (76.2) 3 99.99 MT-PD76X3-4N 3.00” (76.2) 6 99.99 MT-PD76X6-4N 4”, 6” and 8” available

1.0

Permalloy Ni/Fe/Mo/Mn

1.00” (25.4) 1 -

Ni79/Fe16.7/Mo4/Mn0.3 wt%

Magnetic

MT-PERM25X1-X 1.00” (25.4) 2 - MT-PERM25X2-X 1.00” (25.4) 3 - MT-PERM25X3-X 2.00” (50.8) 1 - MT-PERM51X1-X 2.00” (50.8) 2 - MT-PERM51X2-X 2.00” (50.8) 3 - MT-PERM51X3-X 3.00” (76.2) 1 - MT-PERM76X1-X 3.00” (76.2) 2 - MT-PERM76X2-X 3.00” (76.2) 3 - MT-PERM76X3-X 4” available

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Page 22: K Deposition Materials

K19 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Platinum Pt

1.00” (25.4) 1 99.99

Reclaim Available

MT-PT25X1-4N 1.00” (25.4) 2 99.99 MT-PT25X2-4N 1.00” (25.4) 3 99.99 MT-PT25X3-4N 1.00” (25.4) 6 99.99 MT-PT25X6-4N 2.00” (50.8) 1 99.99 MT-PT51X1-4N 2.00” (50.8) 2 99.99 MT-PT51X2-4N 2.00” (50.8) 3 99.99 MT-PT51X3-4N 2.00” (50.8) 6 99.99 MT-PT51X6-4N 3.00” (76.2) 1 99.99 MT-PT76X1-4N 3.00” (76.2) 2 99.99 MT-PT76X2-4N 3.00” (76.2) 3 99.99 MT-PT76X3-4N 3.00” (76.2) 6 99.99 MT-PT76X6-4N 4”, 6” and 8” available

Platinum Cobalt PtCo

1.00” (25.4) 3 99.95 Pt50/Co50 at%

Reclaim Available

MT-PTCO25X3-3N5 2.00” (50.8) 3 99.95 MT-PTCO51X3-3N5 3.00” (76.2) 3 99.95 MT-PTCO76X3-3N5 4” available

Platinum Gadolinium PtGd

1.00” (25.4) 3 99.9 Pt83/Gd17 at%

Bonding Advised Reclaim Available

MT-PTGD51X3-3N 2.00” (50.8) 3 99.9 MT-PTGD51X3-3N 3.00” (76.2) 3 99.9 MT-PTGD76X3-3N 4” available

Platinum Lanthanum PtLa 1.00” (25.4) 3 99.9

Pt83/La17 at% Bonding Advised Reclaim Avaliable

MT-PTLA25X3-3N 2.00” (50.8) 3 99.9 MT-PTLA51X3-3N 3.00” (76.2) 3 99.9 MT-PTLA76X3-3N 4” available

1.0

Platinum Scandium PtSc

1.00” (25.4) 3 99.9 Pt83/Sc17 at%

Bonding Advised Reclaim Avaliable

MT-PTSC25X1-3N 2.00” (50.8) 3 99.9 MT-PTSC51X1-3N 3.00” (76.2) 3 99.9 MT-PTSC76X1-3N 4” available

Platinum Yttrium PtY

1.00” (25.4) 1 99.9 Pt75/Y25 at%

Bonding Advised Reclaim Avaliable

MT-PTY25X1-3N 2.00” (50.8) 1 99.9 MT-PTY51X1-3N 3.00” (76.2) 1 99.9 MT-PTY76X1-3N 4” available

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Page 23: K Deposition Materials

K20 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Praseodymium Pr

1.00” (25.4) 3 99.9 TREM

Oil Packed

MT-PR25X3-3N 1.00” (25.4) 6 99.9 TREM MT-PR25X6-3N 2.00” (50.8) 3 99.9 TREM MT-PR51X3-3N 2.00” (50.8) 6 99.9 TREM MT-PR51X6-3N 3.00” (76.2) 3 99.9 TREM MT-PR76X3-3N 3.00” (76.2) 6 99.9 TREM MT-PR76X6-3N 4”, 6” and 8” available

Rhenium Re

1.00” (25.4) 3 99.99

Reclaim Available

MT-RE25X3-4N 1.00” (25.4) 6 99.99 MT-RE25X6-4N 2.00” (50.8) 3 99.99 MT-RE51X3-4N 2.00” (50.8) 6 99.99 MT-RE51X6-4N 3.00” (76.2) 3 99.99 MT-RE76X3-4N 3.00” (76.2) 6 99.99 MT-RE76X6-4N 4” available

Rhodium Rh

1.00” (25.4) 2 99.8+

Reclaim Available

MT-RH25X2-2N8+ 1.00” (25.4) 3 99.8+ MT-RH25X3-2N8+ 1.00” (25.4) 6 99.8+ MT-RH25X6-2N8+ 2.00” (50.8) 2 99.8+ MT-RH51X2-2N8+ 2.00” (50.8) 3 99.8+ MT-RH51X3-2N8+ 2.00” (50.8) 6 99.8+ MT-RH51X6-2N8+ 3.00” (76.2) 2 99.8+ MT-RH76X2-2N8+ 3.00” (76.2) 3 99.8+ MT-RH76X3-2N8+ 3.00” (76.2) 6 99.8+ MT-RH76X6-2N8+ 4” available

Ruthenium Ru

1.00” (25.4) 3 99.95

Reclaim Avaliable

MT-RU25X3-2N5 1.00” (25.4) 6 99.95 MT-RU25X6-3N5 2.00” (50.8) 3 99.95 MT-RU51X3-3N5 2.00” (50.8 6 99.95 MT-RU51X6-3N5 3.00” (76.2) 3 99.95 MT-RU76X3-3N5 3.00” (76.2) 6 99.95 MT-RU76X6-3N5 4” available

1

Samarium Sm

1.00” (25.4) 3 99.9 TREM

Oil Packed

MT-SM25X3-3N 1.00” (25.4) 6 99.9 TREM MT-SM25X6-3N 2.00” (50.8) 3 99.9 TREM MT-SM51X3-3N 2.00” (50.8) 6 99.9 TREM MT-SM51X6-3N 3.00” (76.2) 3 99.9 TREM MT-SM76X3-3N 3.00” (76.2) 6 99.9 TREM MT-SM76X6-3N 4” available

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Page 24: K Deposition Materials

K21 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Selenium Se

1.00” (25.4) 3 99.999

Some Porisity

Bonding Advised

MT-SE25X3-5N 1.00” (25.4) 6 99.999 MT-SE25X6-5N 2.00” (50.8) 3 99.999 MT-SE51X3-5N 2.00” (50.8) 6 99.999 MT-SE51X6-5N 3.00” (76.2) 3 99.999 MT-SE76X3-5N 3.00” (76.2) 6 99.999 MT-SE76X6-5N 4” available

Silicon Si Undoped

1.00” (25.4) 3 99.999

MT-SI25X3-5N 1.00” (25.4) 6 99.999 MT-SI25X6-5N 2.00” (50.8) 3 99.999 MT-SI51X3-5N 2.00” (50.8) 6 99.999 MT-SI51X6-5N 3.00” (76.2) 3 99.999 MT-SI76X3-5N 3.00” (76.2) 6 99.999 MT-SI76X6-5N 4”, 6” and 8” available

Silicon Si N-type

1.00” (25.4) 3 99.999

<0.1 Ohm/cm resistivity

MT-SI(n)25X3-5N 1.00” (25.4) 6 99.999 MT-SI(n)25X6-5N 2.00” (50.8) 3 99.999 MT-SI(n)51X3-5N 2.00” (50.8) 6 99.999 MT-SI(n)51X6-5N 3.00” (76.2) 3 99.999 MT-SI(n)76X3-5N 3.00” (76.2) 6 99.999 MT-SI(n)76X6-5N 4”, 6” and 8” available

Silicon Si P-type

1.00” (25.4) 3 99.999

<0.005-0.020 Ohm/cm resistivity

MT-SI(p)25X3-5N 1.00” (25.4) 6 99.999 MT-SI(p)25X6-5N 2.00” (50.8) 3 99.999 MT-SI(p)51X3-5N 2.00” (50.8 6 99.999 MT-SI(p)51X6-5N 3.00” (76.2) 3 99.999 MT-SI(p)76X3-5N 3.00” (76.2) 6 99.999 MT-SI(p)76X6-5N 4” available

1

Samarium Sm

1.00” (25.4) 3 99.9 TREM

Oil Packed

MT-SM25X3-3N 1.00” (25.4) 6 99.9 TREM MT-SM25X6-3N 2.00” (50.8) 3 99.9 TREM MT-SM51X3-3N 2.00” (50.8) 6 99.9 TREM MT-SM51X6-3N 3.00” (76.2) 3 99.9 TREM MT-SM76X3-3N 3.00” (76.2) 6 99.9 TREM MT-SM76X6-3N 4” available

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Page 25: K Deposition Materials

K22 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Silicon Dioxide SiO2

1.00” (25.4) 3 99.995

Bonding Advised

MT-SIO225X3-2N5 1.00” (25.4) 6 99.995 MT-SIO225X6-2N5 2.00” (50.8) 3 99.995 MT-SIO251X3-2N5 2.00” (50.8) 6 99.995 MT-SIO251X6-2N5 3.00” (76.2) 3 99.995 MT-SIO276X3-2N5 3.00” (76.2) 6 99.995 MT-SIO276X6-2N5 4”, 6” and 8” available

Silicon Monoxide SiO

1.00” (25.4) 3 99.9

Bonding Advised

MT-SIO25X3-3N 1.00” (25.4) 6 99.9 MT-SIO25X6-3N 2.00” (50.8) 3 99.9 MT-SIO51X3-3N 2.00” (50.8) 6 99.9 MT-SIO51X6-3N 3.00” (76.2) 3 99.9 MT-SIO76X3-3N 3.00” (76.2) 6 99.9 MT-SIO76X6-3N 4”, 6” and 8” available

Silicon Nitride Si3N4

1.00” (25.4) 3 99.9

Bonding Advised

MT-SI3N425X3-3N 1.00” (25.4) 6 99.9 MT-SI3N425X6-3N 2.00” (50.8) 3 99.9 MT-SI3N451X3-3N 2.00” (50.8) 6 99.9 MT-SI3N451X6-3N 3.00” (76.2) 3 99.9 MT-SI3N476X3-3N 3.00” (76.2) 6 99.9 MT-SI3N476X6-3N 4”, 6” and 8” available

Silver Ag

1.00” (25.4) 3 99.99

Reclaim Available

MT-AG25X3-4N 1.00” (25.4) 6 99.99 MT-AG25X6-4N 2.00” (50.8) 3 99.99 MT-AG51X3-4N 2.00” (50.8 6 99.99 MT-AG51X6-4N 3.00” (76.2) 3 99.99 MT-AG76X3-4N 3.00” (76.2) 6 99.99 MT-AG76X6-4N 4” available

1

Silver Titanium AgTi

1.00” (25.4) 3 99.99 Ag80/Ti20 at%

Reclaim Available

MT-AGTI25X3-4N 1.00” (25.4) 6 99.99 MT-AGTI25X6-4N 2.00” (50.8) 3 99.99 MT-AGTI51X3-4N 2.00” (50.8) 6 99.99 MT-AGTI51X6-4N 3.00” (76.2) 3 99.99 MT-AGTI76X3-4N 3.00” (76.2) 6 99.99 MT-AGTI76X6-4N 4” available

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Page 26: K Deposition Materials

K23 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Strontium Sr

1.00” (25.4) 3 98.0

Oil Packed

MT-SR25X3-1N8 1.00” (25.4) 6 98.0 MT-SR25X6-1N8 2.00” (50.8) 3 98.0 MT-SR51X3-1N8 2.00” (50.8) 6 98.0 MT-SR51X6-1N8 3.00” (76.2) 3 98.0 MT-SR76X3-1N8 3.00” (76.2) 6 98.0 MT-SR76X6-1N8 4” available

Strontium Titanate SrTiO3

1.00” (25.4) 3 99.9

Bonding Advised

MT-SRTIO325X3-3N 1.00” (25.4) 6 99.9 MT-SRTIO325X6-3N 2.00” (50.8) 3 99.9 MT-SRTIO351X3-3N 2.00” (50.8) 6 99.9 MT-SRTIO351X6-3N 3.00” (76.2) 3 99.9 MT-SRTIO376X3-3N 3.00” (76.2) 6 99.9 MT-SRTIO376X6-3N 4” available

Tantalum Ta

1.00” (25.4) 3 99.99

Reclaim Available

MT-TA25X3-4N 1.00” (25.4) 6 99.99 MT-TA25X6-4N 2.00” (50.8) 3 99.99 MT-TA51X3-4N 2.00” (50.8) 6 99.99 MT-TA51X6-4N 3.00” (76.2) 3 99.99 MT-TA76X3-4N 3.00” (76.2) 6 99.99 MT-TA76X6-4N 4”, 6” and 8” available

Tantalum Carbide TaC

1.00” (25.4) 3 99.5

Bonding Advised

MT-TAC25X3-2N5 1.00” (25.4) 6 99.5 MT-TAC25X6-2N5 2.00” (50.8) 3 99.5 MT-TAC51X3-2N5 2.00” (50.8 6 99.5 MT-TAC51X6-2N5 3.00” (76.2) 3 99.5 MT-TAC76X3-2N5 3.00” (76.2) 6 99.5 MT-TAC76X6-2N5 4”, 6: and 8” available

1

Tantalum Nitride TaN

1.00” (25.4) 3 99.5

Bonding Advised

MT-TAN25X3-2N5 1.00” (25.4) 6 99.5 MT-TAN25X6-2N5 2.00” (50.8) 3 99.5 MT-TAN51X3-2N5 2.00” (50.8) 6 99.5 MT-TAN51X6-2N5 3.00” (76.2) 3 99.5 MT-TAN76X3-2N5 3.00” (76.2) 6 99.5 MT-TAN76X6-2N5 4” available

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Page 27: K Deposition Materials

K24 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Tantalum Oxide Ta2O5

1.00” (25.4) 3 99.99

Bonding Advised

MT-TA2O525X3-4N 1.00” (25.4) 6 99.99 MT-TA2O525X6-4N 2.00” (50.8) 3 99.99 MT-TA2O551X3-4N 2.00” (50.8) 6 99.99 MT-TA2O551X6-4N 3.00” (76.2) 3 99.99 MT-TA2O576X3-4N 3.00” (76.2) 6 99.99 MT-TA2O576X6-4N 4” available

Tantalum Silicide TaSi2

1.00” (25.4) 3 99.5

Bonding Advised

MT-TASI225X3-2N5 1.00” (25.4) 6 99.5 MT-TASI225X6-2N5 2.00” (50.8) 3 99.5 MT-TASI251X3-2N5 2.00” (50.8) 6 99.5 MT-TASI251X6-2N5 3.00” (76.2) 3 99.5 MT-TASI276X3-2N5 3.00” (76.2) 6 99.5 MT-TASI276X6-2N5 4” available

Tellurium Te

1.00” (25.4) 3 99.999

Some Porosity

MT-TE25X3-5N 1.00” (25.4) 6 99.999 MT-TE25X6-5N 2.00” (50.8) 3 99.999 MT-TE51X3-5N 2.00” (50.8) 6 99.999 MT-TE51X6-5N 3.00” (76.2) 3 99.999 MT-TE76X3-5N 3.00” (76.2) 6 99.999 MT-TE76X6-5N 4” available

Terbium Tb

1.00” (25.4) 3 99.9 TREM

Oil Packed

MT-TB25X3-3N 1.00” (25.4) 6 99.9 TREM MT-TB25X6-3N 2.00” (50.8) 3 99.9 TREM MT-TB51X3-3N 2.00” (50.8 6 99.9 TREM MT-TB51X6-3N 3.00” (76.2) 3 99.9 TREM MT-TB76X3-3N 3.00” (76.2) 6 99.9 TREM MT-TB76X6-3N 4” available

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Tin Sn

1.00” (25.4) 3 99.999

MT-TAN25X3-5N 1.00” (25.4) 6 99.999 MT-TAN25X6-5N 2.00” (50.8) 3 99.999 MT-TAN51X3-5N 2.00” (50.8) 6 99.999 MT-TAN51X6-5N 3.00” (76.2) 3 99.999 MT-TAN76X3-5N 3.00” (76.2) 6 99.999 MT-TAN76X6-5N 4”, 6” and 8” available

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Page 28: K Deposition Materials

K25 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Tin Oxide SnO2

1.00” (25.4) 3 99.99

Bonding Advised

MT-SNO225X3-4N 1.00” (25.4) 6 99.99 MT-SNO225X6-4N 2.00” (50.8) 3 99.99 MT-SNO251X3-4N 2.00” (50.8) 6 99.99 MT-SNO251X6-4N 3.00” (76.2) 3 99.99 MT-SNO276X3-4N 3.00” (76.2) 6 99.99 MT-SNO276X6-4N 4” available

Titanium Ti

1.00” (25.4) 3 99.99

MT-TI25X3-4N 1.00” (25.4) 6 99.99 MT-TI25X6-4N 1.00” (25.4) 3 99.995 MT-TI25X3-4N5 1.00” (25.4) 6 99.995 MT-TI25X6-4N5 2.00” (50.8) 3 99.99 MT-TI51X3-4N 2.00” (50.8) 6 99.99 MT-TI51X6-4N 2.00” (50.8) 3 99.995 MT-TI51X3-4N5 2.00” (50.8) 6 99.995 MT-TI51X6-4N5 3.00” (76.2) 3 99.99 MT-TI76X3-4N 3.00” (76.2) 6 99.99 MT-TI76X6-4N 3.00” (76.2) 3 99.995 MT-TI76X3-4N5 3.00” (76.2) 6 99.995 MT-TI76X6-4N5 4”, 6” and 8” available

Titanium Boride TiB2

1.00” (25.4) 3 99.5

Bonding Advised

MT-TIB225X3-5N 1.00” (25.4) 6 99.5 MT-TIB225X6-5N 2.00” (50.8) 3 99.5 MT-TIB251X3-5N 2.00” (50.8) 6 99.5 MT-TIB251X6-5N 3.00” (76.2) 3 99.5 MT-TIB276X3-5N 3.00” (76.2) 6 99.5 MT-TIB276X6-5N 4” available

Titanium Carbide TiC

1.00” (25.4) 3 99.5

Bonding Advised

MT-TIC25X3-2N5 1.00” (25.4) 6 99.5 MT-TIC25X6-2N5 2.00” (50.8) 3 99.5 MT-TIC51X3-2N5 2.00” (50.8 6 99.5 MT-TIC51X6-2N5 3.00” (76.2) 3 99.5 MT-TIC76X3-2N5 3.00” (76.2) 6 99.5 MT-TIC76X6-2N5 4” available

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Page 29: K Deposition Materials

K26 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Titanium Monoxide TiO

1.00” (25.4) 3 99.9

Bonding Advised

MT-TIO25X3-3N 1.00” (25.4) 6 99.9 MT-TIO25X6-3N 2.00” (50.8) 3 99.9 MT-TIO51X3-3N 2.00” (50.8) 6 99.9 MT-TIO51X6-3N 3.00” (76.2) 3 99.9 MT-TIO76X3-3N 3.00” (76.2) 6 99.9 MT-TIO76X6-3N 4”, 6” and 8” available

Titanium Disilicide TiSi2

1.00” (25.4) 3 99.5

Bonding Advised

MT-TI25X3-2N5 1.00” (25.4) 6 99.5 MT-TI25X6-2N5 2.00” (50.8) 3 99.5 MT-TI51X3-2N5 2.00” (50.8) 6 99.5 MT-TI51X6-2N5 3.00” (76.2) 3 99.5 MT-TI76X3-2N5 3.00” (76.2) 6 99.5 MT-TI76X6-2N5 4”, 6” and 8” available

Titanium Dioxide TiO2

1.00” (25.4) 3 99.9

Bonding Advised

MT-TIO225X3-3N 1.00” (25.4) 6 99.9 MT-TIO225X6-3N 1.00” (25.4) 3 99.99 MT-TIO225X3-4N 1.00” (25.4) 6 99.99 MT-TIO225X6-4N 2.00” (50.8) 3 99.9 MT-TIO251X3-3N 2.00” (50.8) 6 99.9 MT-TIO251X6-3N 2.00” (50.8) 3 99.99 MT-TIO251X3-4N 2.00” (50.8) 6 99.99 MT-TIO251X6-4N 3.00” (76.2) 3 99.9 MT-TIO276X3-3N 3.00” (76.2) 6 99.9 MT-TIO276X6-3N 3.00” (76.2) 3 99.99 MT-TIO276X3-4N 3.00” (76.2) 6 99.99 MT-TIO276X6-4N 4” and 6” available

Titanium Nitride TiN

1.00” (25.4) 3 99.5

Bonding Advised

MT-TIN25X3-2N5 1.00” (25.4) 6 99.5 MT-TIN25X6-2N5 2.00” (50.8) 3 99.5 MT-TIN51X3-2N5 2.00” (50.8 6 99.5 MT-TIN51X6-2N5 3.00” (76.2) 3 99.5 MT-TIN76X3-2N5 3.00” (76.2) 6 99.5 MT-TIN76X6-2N5 4” available

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Page 30: K Deposition Materials

K27 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Tungsten W

1.00” (25.4) 3 99.95

MT-W25X3-3N5 1.00” (25.4) 6 99.95 MT-W25X6-3N5 2.00” (50.8) 3 99.95 MT-W51X3-3N5 2.00” (50.8) 6 99.95 MT-W51X6-3N5 3.00” (76.2) 3 99.95 MT-W76X3-3N5 3.00” (76.2) 6 99.95 MT-W76X6-3N5 4”, 6” and 8” available

Tungsten Carbide WC

1.00” (25.4) 3 99.5

Bonding Advised

MT-WC25X3-2N5 1.00” (25.4) 6 99.5 MT-WC25X6-2N5 2.00” (50.8) 3 99.5 MT-WC51X3-2N5 2.00” (50.8) 6 99.5 MT-WC51X6-2N5 3.00” (76.2) 3 99.5 MT-WC76X3-2N5 3.00” (76.2) 6 99.5 MT-WC76X6-2N5 4” available

Tungsten Oxide WO3

1.00” (25.4) 3 99.9

Bonding Advised

MT-WO325X3-3N 1.00” (25.4) 6 99.9 MT-WO325X6-3N 2.00” (50.8) 3 99.9 MT-WO351X3-3N 2.00” (50.8) 6 99.9 MT-WO351X6-3N 3.00” (76.2) 3 99.9 MT-WO376X3-3N 3.00” (76.2) 6 99.9 MT-WO376X6-3N 4” available

Tungsten Disilicide WSi2

1.00” (25.4) 3 99.95

Bonding Advised

MT-WSI225X3-3N5 1.00” (25.4) 6 99.95 MT-WSI225X6-3N5 2.00” (50.8) 3 99.95 MT-WSI251X3-3N5 2.00” (50.8 6 99.95 MT-WSI251X6-3N5 3.00” (76.2) 3 99.95 MT-WSI276X3-3N5 3.00” (76.2) 6 99.95 MT-WSI276X6-3N5 4”, 6” and 8” available

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Tungsten Disulfide WS2

1.00” (25.4) 3 99.8

Bonding Advised

MT-WS225X3-2N8 1.00” (25.4) 6 99.8 MT-WS225X6-2N8 2.00” (50.8) 3 99.8 MT-WS251X3-2N8 2.00” (50.8 6 99.8 MT-WS251X6-2N8 3.00” (76.2) 3 99.8 MT-WS276X3-2N8 3.00” (76.2) 6 99.8 MT-WS276X6-2N8 4” available

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Page 31: K Deposition Materials

K28 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Tungsten Titanium WTi

1.00” (25.4) 3 99.99

W90/Ti10 wt%

MT-W25X3-4N 1.00” (25.4) 6 99.99 MT-W25X6-4N 2.00” (50.8) 3 99.99 MT-W51X3-4N 2.00” (50.8) 6 99.99 MT-W51X6-4N 3.00” (76.2) 3 99.99 MT-W76X3-4N 3.00” (76.2) 6 99.99 MT-W76X6-4N 4”, 6” and 8” available

Vanadium V

1.00” (25.4) 3 99.5

MT-V25X3-2N5 1.00” (25.4) 6 99.5 MT-V25X6-2N5 2.00” (50.8) 3 99.5 MT-V51X3-2N5 2.00” (50.8) 6 99.5 MT-V51X6-2N5 3.00” (76.2) 3 99.5 MT-V76X3-2N5 3.00” (76.2) 6 99.5 MT-V76X6-2N5 4” available

Vanadium Carbide VC

1.00” (25.4) 3 99.5

Bonding Advised

MT-VC25X3-2N5 1.00” (25.4) 6 99.5 MT-VC25X6-2N5 2.00” (50.8) 3 99.5 MT-VC51X3-2N5 2.00” (50.8) 6 99.5 MT-VC51X6-2N5 3.00” (76.2) 3 99.5 MT-VC76X3-2N5 3.00” (76.2) 6 99.5 MT-VC76X6-2N5 4” available

Vanadium Oxide V2O5

1.00” (25.4) 3 99.5

Bonding Advised

MT-V2O525X3-2N5 1.00” (25.4) 6 99.5 MT-V2O525X6-2N5 2.00” (50.8) 3 99.5 MT-V2O551X3-2N5 2.00” (50.8 6 99.5 MT-V2O551X6-2N5 3.00” (76.2) 3 99.5 MT-V2O576X3-2N5 3.00” (76.2) 6 99.5 MT-V2O576X6-2N5 4”, 6” and 8” available

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Ytterbium Yb

1.00” (25.4) 3 99.9 TREM

Oil Packed

MT-YB25X3-3N 1.00” (25.4) 6 99.9 TREM MT-YB25X6-3N 2.00” (50.8) 3 99.9 TREM MT-YB51X3-3N 2.00” (50.8 6 99.9 TREM MT-YB51X6-3N 3.00” (76.2) 3 99.9 TREM MT-YB76X3-3N 3.00” (76.2) 6 99.9 TREM MT-YB76X6-3N 4” available

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Page 32: K Deposition Materials

K29 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Ytterbium Oxide Yb2O3

1.00” (25.4) 3 99.9

Bonding Advised

MT-YB2O325X3-3N 1.00” (25.4) 6 99.9 MT-YB2O325X6-3N 2.00” (50.8) 3 99.9 MT-YB2O351X3-3N 2.00” (50.8) 6 99.9 MT-YB2O351X6-3N 3.00” (76.2) 3 99.9 MT-YB2O376X3-3N 3.00” (76.2) 6 99.9 MT-YB2O376X6-3N 4” available

Yttrium Y

1.00” (25.4) 3 99.9 TREM

Oil Packed

MT-Y25X3-3N 1.00” (25.4) 6 99.9 TREM MT-Y25X6-3N 2.00” (50.8) 3 99.9 TREM MT-Y51X3-3N 2.00” (50.8) 6 99.9 TREM MT-Y51X6-3N 3.00” (76.2) 3 99.9 TREM MT-Y76X3-3N 3.00” (76.2) 6 99.9 TREM MT-Y76X6-3N 4” available

Yttrium Oxide Y2O3

1.00” (25.4) 3 99.99

Bonding Advised

MT-Y2O325X3-4N 1.00” (25.4) 6 99.99 MT-Y2O325X6-4N 2.00” (50.8) 3 99.99 MT-Y2O351X3-4N 2.00” (50.8) 6 99.99 MT-Y2O351X6-4N 3.00” (76.2) 3 99.99 MT-Y2O376X3-4N 3.00” (76.2) 6 99.99 MT-Y2O376X6-4N 4” available

Zinc Zn

1.00” (25.4) 3 99.99

MT-ZN25X3-4N 1.00” (25.4) 6 99.99 MT-ZN25X6-4N 1.00” (25.4) 3 99.995 MT-ZN25X3-4N5 1.00” (25.4) 6 99.995 MT-ZN25X6-4N5 2.00” (50.8) 3 99.99 MT-ZN51X3-4N 2.00” (50.8 6 99.99 MT-ZN51X6-4N 2.00” (50.8 3 99.995 MT-ZN51X3-4N5 2.00” (50.8 6 99.995 MT-ZN51X6-4N5 3.00” (76.2) 3 99.99 MT-ZN76X3-4N 3.00” (76.2) 6 99.99 MT-ZN76X6-4N 3.00” (76.2) 3 99.995 MT-ZN76X3-4N5 3.00” (76.2) 6 99.995 MT-ZN76X6-4N5 4”, 6” and 8” available

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Page 33: K Deposition Materials

K30 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Zinc Oxide ZnO

1.00” (25.4) 3 99.99

Bonding Advised

MT-ZNO25X3-4N 1.00” (25.4) 6 99.99 MT-ZNO25X6-4N 1.00” (25.4) 3 99.999 MT-ZNO25X3-5N 1.00” (25.4) 6 99.999 MT-ZNO25X6-5N 2.00” (50.8) 3 99.99 MT-ZNO51X3-4N 2.00” (50.8) 6 99.99 MT-ZNO51X6-4N 2.00” (50.8) 3 99.999 MT-ZNO51X3-5N 2.00” (50.8) 6 99.999 MT-ZNO51X6-5N 3.00” (76.2) 3 99.99 MT-ZNO76X3-4N 3.00” (76.2) 6 99.99 MT-ZNO76X6-4N 3.00” (76.2) 3 99.999 MT-ZNO76X3-5N 3.00” (76.2) 6 99.999 MT-ZNO76X6-5N 4”, 6” and 8” available

Zinc Selenide ZnSe

1.00” (25.4) 3 99.995

Bonding Advised

MT-ZNSE25X3-4N5 1.00” (25.4) 6 99.995 MT-ZNSE25X6-4N5 2.00” (50.8) 3 99.995 MT-ZNSE51X3-4N5 2.00” (50.8) 6 99.995 MT-ZNSE51X6-4N5 3.00” (76.2) 3 99.995 MT-ZNSE76X3-4N5 3.00” (76.2) 6 99.995 MT-ZNSE76X6-4N5 4” available

Zinc Sulfide ZnS

1.00” (25.4) 3 99.9

Bonding Advised

MT-ZNS25X3-3N 1.00” (25.4) 6 99.9 MT-ZNS25X6-3N 1.00” (25.4) 3 99.99 MT-ZNS25X3-4N 1.00” (25.4) 6 99.99 MT-ZNS25X6-4N 2.00” (50.8) 3 99.9 MT-ZNS51X3-3N 2.00” (50.8) 6 99.9 MT-ZNS51X6-3N 2.00” (50.8) 3 99.99 MT-ZNS51X3-4N 2.00” (50.8) 6 99.99 MT-ZNS51X6-4N 3.00” (76.2) 3 99.9 MT-ZNS76X3-3N 3.00” (76.2) 6 99.9 MT-ZNS76X6-3N 3.00” (76.2) 3 99.99 MT-ZNS76X3-4N 3.00” (76.2) 6 99.99 MT-ZNS76X6-4N 4” available

Zinc Telluride ZnTe

1.00” (25.4) 3 99.99

Bonding Advised

MT-ZNTE25X3-4N 1.00” (25.4) 6 99.99 MT-ZNTE25X6-4N 2.00” (50.8 3 99.99 MT-ZNTE51X3-4N 2.00” (50.8 6 99.99 MT-ZNTE51X6-4N 3.00” (76.2) 3 99.99 MT-ZNTE76X3-4N 3.00” (76.2) 6 99.99 MT-ZNTE76X6-4N 4”, 6” and 8” available

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Page 34: K Deposition Materials

K31 Deposition Materials

Sputter Targets | Circular

Common standard specification targets from stock Comprehensive range of target sizes available Non standard dimensions and purities fabricated by request Custom compounds by weight or atomic percentage fabricated by request Target Bonding Service available Subject to size, thickness and material composition, and all oxides/nitrides - bonding is advised Material Reclaim Service available for Precious Metals

Standard specifications

Material Dia (mm) Thick (mm) Purity % Notes Part Code

Zirconium Zr

1.00” (25.4) 3 99.9

MT-ZR25X3-3N 1.00” (25.4) 6 99.9 MT-ZR25X6-3N 2.00” (50.8) 3 99.9 MT-ZR51X3-3N 2.00” (50.8) 6 99.9 MT-ZR51X6-3N 3.00” (76.2) 3 99.9 MT-ZR76X3-3N 3.00” (76.2) 6 99.9 MT-ZR76X6-3N 4”, 6” and 8” available

Zirconium Carbide ZrC

1.00” (25.4) 3 99.5

Bonding Advised

MT-ZRC25X3-2N5 1.00” (25.4) 6 99.5 MT-ZRC25X6-2N5 2.00” (50.8) 3 99.5 MT-ZRC51X3-2N5 2.00” (50.8) 6 99.5 MT-ZRC51X6-2N5 3.00” (76.2) 3 99.5 MT-ZRC76X3-2N5 3.00” (76.2) 6 99.5 MT-ZRC76X6-2N5 4” available

Zirconium Nitride ZrN

1.00” (25.4) 3 99.5

Bonding Advised

MT-ZNS25X3-2N5 1.00” (25.4) 6 99.5 MT-ZNS25X6-2N5 2.00” (50.8) 3 99.5 MT-ZNS51X3-2N5 2.00” (50.8) 6 99.5 MT-ZNS51X6-2N5 3.00” (76.2) 3 99.5 MT-ZNS76X3-2N5 3.00” (76.2) 6 99.5 MT-ZNS76X6-2N5 4” available

Zirconium Oxide ZrO2

1.00” (25.4) 3 99.95

Bonding Advised

MT-ZRO225X3-3N5 1.00” (25.4) 6 99.95 MT-ZRO225X6-3N5 2.00” (50.8 3 99.95 MT-ZRO251X3-3N5 2.00” (50.8 6 99.95 MT-ZRO251X6-3N5 3.00” (76.2) 3 99.95 MT-ZRO276X3-3N5 3.00” (76.2) 6 99.95 MT-ZRO276X6-3N5 4” available

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Page 35: K Deposition Materials

K32 Deposition Materials

Sputter Target Backing Plate & Bonding Service

Standard Circular and Linear Backing Plates, including Ob-round available OFHC Copper (Cu) and Molybdenum (Mo) Backing Plate Materials available Custom Backing Plates to suite all OEM Deposition Process Systems fabricated to order Indium and Elastomer Bonding methods Nanofoil Bonding available Bonding gives greater thermal conductivity and offers rigidity to thinner and fragile materials Precious Metals can be Reclaimed from Backing Plates

Circular Backing Plates

Material Target Size Thickness Notes Part Code

OFHC Copper (Cu) 1” (25.4mm) 1.0mm

For all standard circular magnetron sources

MT-CUBPLATE1-1 2.0mm MT-CUBPLATE1-2 3.0mm MT-CUBPLATE1-3

Other thicknesses available

OFHC Copper (Cu) 2” (50.8mm) 1.0mm

For all standard circular magnetron sources

MT-CUBPLATE2-1 2.0mm MT-CUBPLATE2-2 3.0mm MT-CUBPLATE2-3

Other thicknesses available

OFHC Copper (Cu) 3” (76.2mm) 1.0mm

For all standard circular magnetron sources

MT-CUBPLATE3-1 2.0mm MT-CUBPLATE3-2 3.0mm MT-CUBPLATE3-3

Other thicknesses available

OFHC Copper (Cu) 4” (101.6mm) 2.0mm

For all standard circular magnetron sources

MT-CUBPLATE4-2 3.0mm MT-CUBPLATE4-3 4.0mm MT-CUBPLATE4-4

Other thicknesses available

OFHC Copper (Cu) 6” (152.4mm) 3.0mm For all standard circular

magnetron sources MT-CUBPLATE6-3

6.0mm MT-CUBPLATE6-6 Other thicknesses available

OFHC Copper (Cu) 8” (203.2mm) 3.0mm For all standard circular

magnetron sources

MT-CUBPLATE8-3 6.0mm MT-CUBPLATE8-6

Other thicknesses available

Linear Backing Plates

Material Source/Series OEM Part Code

OFHC Copper (Cu) 600/900 Series MRC MLT-MRCCUBP900

Stainless Steel (SS) 8600 Series MRC MLT-MRCSSBP8600

OFHC Copper (Cu) 601 Series CVC MLT-CVCUBP601 inc. cooling track

OFHC Copper (Cu) 2400/4400 Series Perkin-Elmer MLT-PECUBPRF RF & DC options available MLT-PEFECUBPDC

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Page 36: K Deposition Materials

K33 Deposition Materials

Sputter Target Backing Plate & Bonding Service

Standard Circular and Linear Backing Plates, including Ob-round available OFHC Copper (Cu) and Molybdenum (Mo) Backing Plate Materials available Custom Backing Plates to suite all OEM Deposition Process Systems fabricated to order Indium and Elastomer Bonding methods Nanofoil Bonding available Bonding gives greater thermal conductivity and offers rigidity to thinner and fragile materials Precious Metals can be Reclaimed from Backing Plates

Indium Bonding for Circular Sputter Targets

Material Target Size Part Code

Indium 1” (25.4mm) MT-BONDIND1

Indium 2” (50.8mm) MT-BONDIND2

Indium 3” (76.2mm) MT-BONDIND3

Indium 4” (101.6mm) MT-BONDIND4

Indium 6” (152.4mm) MT-BONDIND6

Indium 8” (203.2mm) MT-BONDIND8

Indium Bonding for Linear Sputter Targets

Material Source/Series OEM Part Code

Indium 600/900 Series MRC MLT-MRCBONDIND1

Indium 8600 Series MRC MLT-MRCBONDIND2

Indium 601 Series CVC MLT-CVCBONDIND

Indium 2400/4400 Series Perkin-Elmer MLT-PEBONDIND

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K34 Deposition Materials

Sputter Target Backing Plate & Bonding Service

Standard Circular and Linear Backing Plates, including Ob-round available OFHC Copper (Cu) and Molybdenum (Mo) Backing Plate Materials available Custom Backing Plates to suite all OEM Deposition Process Systems fabricated to order Indium and Elastomer Bonding methods Nanofoil Bonding available Bonding gives greater thermal conductivity and offers rigidity to thinner and fragile materials Precious Metals can be Reclaimed from Backing Plates

Elastomer Bonding for Circular Sputter Targets

Material Target Size Part Code

Elastomer 1” (25.4mm) MT-BONDELAS1

Elastomer 2” (50.8mm) MT-BONDELAS2

Elastomer 3” (76.2mm) MT-BONDELAS3

Elastomer 4” (101.6mm) MT-BONDELAS4

Elastomer 6” (152.4mm) MT-BONDELAS6

Elastomer 8” (203.2mm) MT-BONDELAS8

Elastomer Bonding for Linear Sputter Targets

Material Source/Series OEM Part Code

Elastomer 600/900 Series MRC MLT-MRCBONDELS1

Elastomer 8600 Series MRC MLT-MRCBONDELS2

Elastomer 601 Series CVC MLT-CVCBONDELS

Elastomer 2400/4400 Series Perkin-Elmer MLT-PEBONDELS

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Page 38: K Deposition Materials

K35 Deposition Materials

Sputter Target Backing Plate & Bonding Service

Standard Circular and Linear Backing Plates, including Ob-round available OFHC Copper (Cu) and Molybdenum (Mo) Backing Plate Materials available Custom Backing Plates to suite all OEM Deposition Process Systems fabricated to order Indium and Elastomer Bonding methods Nanofoil Bonding available Bonding gives greater thermal conductivity and offers rigidity to thinner and fragile materials Precious Metals can be Reclaimed from Backing Plates

Nanofoil Bonding for Circular Sputter Targets

Material Target Size Part Code

Indium Nanofoil 1” (25.4mm) MT-BONDNANO1

Indium Nanofoil 2” (50.8mm) MT-BONDNANO2

Indium Nanofoil 3” (76.2mm) MT-BONDNANO3

Indium Nanofoil 4” (101.6mm) MT-BONDNANO4

Indium Nanofoil 6” (152.4mm) MT-BONDNANO6

Indium Nanofoil 8” (203.2mm) MT-BONDNANO8

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K36 Deposition Materials

Precious Metal Reclaim Service

Precious Metals Reclaimed from used Sputter Targets, Pellets/Pieces, Wire, Foil and Powder Materials Reclaim Service available for…

Material

Gold Au

Iridium Ir

Osmium Os

Palladium Pd

Platinum Pt

Rhenium Re

Rhodium Rh

Ruthenium Ru

Silver Ag

Tantalum Ta

85% of the material fix price on the day of goods received. Final price is based on 85% fix price after melt weight and assay results. An admin fee of £35 is chargeable per material unit sent for reclaiming.

Note: The remaining balance (value) can be either paid back as a monetary sum, or used against purchasing a new target or evaporation material, with any additional cost or credit owed invoiced/paid back accordingly. A new quotation based on the days metal fix price would be required for new targets.

An additional charge may result from us needing to remove any backing plates fixed to targets. These can be returned with a shipping cost applied.

A Returns Authorisation form will need to be completed and signed prior to goods being sent to us for reclaim, showing that the material has not been exposed to hazardous, toxic or radioactive materials and/or environment.

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K Deposition Materials

Contact us...

k-tech supplies ltd wild thyme udimore road broadland row broad oak rye east sussex tn31 6bx united kingdom

web : www.ktechsupplies.co.uk email : [email protected] tel : +44 (0)1424 400 235 fax : +44 (0)7006 044 223

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