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Costas P. Grigoropoulos
Laser Thermal Laboratory Department of Mechanical Engineering
University of California, Berkeley
Laser-Enabled Directed
Nanomanufacturing
U.S.-Korea Nanotechnology Forum October 15, 2013
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Topics • Laser nano/micromanufacturing
– Laser Chemical Vapor Deposition – Directed growth of nanomaterials
• Laser-assisted electronic materials processing and device fabrication
– Flexible electronics • Laser interactions with biological materials
– Surface patterning for cell growth – Fibrous material scaffolding
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14 nm
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11 nm
Nanomachined patterns by femtosecond laser coupled to apertureless near field scanning
optical microscope (NSOM)
Chimmalgi et al., Appl. Phys. Lett., (2003)
J. Appl. Phys., (2005)
Hwang et al., Appl. Phys. A, (2009)
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Nano-crystallization by apertureless NSOM
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Chimmalgi, Nano Lett. (2005)
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In-situ TEM Imaging and NSOM Processing
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NSOM Probe
a-Si pillar
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Transformation of an a-Si dot to a single Si nanocrystal on a
non-participating substrate
Superposed laser beams CW + pulsed
Xiang et al., Nano Lett. (2012)
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(a) (b) (c) (d)
(e) (f) (g) (h)
amorphous Poly-crystal Poly-crystal
single-
crystal
Poly-crystal Poly-crystal single-crystal
single-crystal
Alternating Crystal Structure
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Laser In-situ TEM Diagnostics & Processing
Libra TEM
Raman spectroscope
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Raman probe assy. Laser exciter & sample assy.
Libra TEM sample holder
Libra TEM column
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Fiber coupled signal delivery
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VLS (Vapor-Liquid-Solid) Si nanowire growth
metal nanoparticle catalyzed silicon nanowire growth under VLS mechanism
Laser-based Selective Nanowire growth
Laser Illumination
Localized heating of catalysts & NW growth within laser spot
Laser-assisted localized Si nanowire growth setup
SiH4 gas
100nm
Au Catalyst
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Temperature and time dependent growth of GeNWs This image cannot currently be displayed.
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On-demand Vertical GeNW Integration on Si(111) On-demand Vertical GeNW Integration on Si(111)
Location/shape controlled GeNW on a single Si(111) in vertical integration architecture
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D0 = 65 nm (fixed)
D (varied)
Plane wave
Ryu et al., ACS Nano (2013)
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Defect Free Epitaxial Growth of GeNWs on Si (111) Defect Free Epitaxial Growth of GeNWs on Si (111)
Cross sectional HRTEM images of the vertically oriented GeNW on Si (111)
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Laser hydrothermal Growth of ZnO nanowires
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In et al., Small (2013)
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Growth visualization and control
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Graphene patterning and transferring This image cannot currently be displayed.
Yoo et al, Small (2013)
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Graphene devices This image cannot currently be displayed.
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Vertically Aligned Carbon Nanotube Transfer on Flexible Substrates
Si
Glass Glass PC PC
Pressure Laser
Si
VACNTs
Si Si
Separation
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PC CNT
200 µm
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In et al., ACS Nano (2012)
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Beyond graphene Laser annealed MoS2 transistors on plastic
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Choi, Kwon et al. IMID (2013)
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5nm
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Nanopaticle processing for flexible electronics
Flexible Electronics
Low Temperature
Direct patterning Laser Tech
Nano Tech Nanomaterial synthesis & characterization
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This image cannot currently be displayed.- Low melting temperature - Solution processible
- Direct patterning (lithography free, maskless) - No vacuum deposition, no etching, low T - Single step process - Solution processible, additive process
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Nanoimprinting This image cannot currently be displayed.
Inkjet Printing
LIFT This image cannot currently be displayed.
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- Resolution enhancement
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Digital Direct Metal Patterning (DDMP) Process on a Flexible Substrate
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Yeo et al., PLOS ONE, (2012)
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Laser Sintering Examples 532nm wavelength, 70mW, CW laser, 4” wafer size, 2 m/s scanning speed
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16,000 OFETs on a PI substrate, 3 layered structures (PI substrate/ gate electrode / PVP / source & drain
electrodes) ( total processing time: ~ 10 mins)
High resolution metal features ( total processing time: ~ 7 mins)
(down to several microns)
Room temperature, ambient pressure, Non-vacuum process, maskless process
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Laser Enabled Wafer scale ZnO Nanoimprinting on Flexible Substrates
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Master mold PDMS stamp
ZnO mesh
ZnO on polycarbonate
Low N.A. objective High N.A. objective
Fiber scaffold fabrication via 2PP (two-photon polymerization)
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Fiber scaffold fabrication
Jeon et al., Biomed. Microdev. (2011)
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Jeon et al., 2011, submitted Jeon et al., JACS 133 (2011)
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2D pitch gradient pattern
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2D pitch gradient pattern
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3D 2PP nanofabrication examples
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25 layer photonic crystal – periodicity of 400nm
Multi-scale biomimetic structure
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Acknowledgment LTL Sanghoon Ahn Anant Chimmalgi Taeyul Choi Hirofumi Hidai Kuniaki Hiromatsu Nico Hotz David J. Hwang Jung Bin In Hojeong Jeon Eunpa Kim Moosung Kim Jaden Kwon Seung-Hwan Ko Daeho Lee Ming-Tsang Lee Julian Marschewski Nipun Misra Heng Pan Jongbok Park Patrick Rohner Matt Rogers Ioanna Sakellari Bin Xiang Jae-Hyuck Yoo
Funding DARPA/MTO, DOE, USAF, NSF, NIH,
KAUST, industry Collaborators Oscar D. Dubon, Andrew M. Minor, Kevin E. Healy, Junqiao Wu (UCB) Dimos Poulikakos (ETH) Seung-Hwan Ko (KAIST) Maria Farsari (IESL/FORTH, Greece) Sunkook Kim (Kyung Hee U.) Woong Choi (Kookmin U.) Dieter Bäuerle (JKU, Austria)