1. A Flexure-based MicroOptoElectromechanical SystemLLNL-PRES-644130This work was performed under the auspices of theU.S. Department of Energy by Lawrence LivermoreNational Laboratory under contract DE-AC52-07NA27344.Lawrence Livermore National Security, LLCRobert Panas and Jonathan Hopkins

2. Lawrence Livermore National Laboratory LLNL-PRES-6441301mm Intent Light-field control Capabilities Closed loop Tip/Tilt/PistonDegrees of Freedom Independent mirrors 99% fill factor Array-able Up to 80 optical Up 100khz fine motion BW1mm21mm500m 3. Fabrication Phase Hexapod flexures + mirror Actuator paddles Base plate Near completion (end of 2013) Assembly Phase BeginningHexapod Base plate500 m Array demonstration 1-2 yrsLawrence Livermore National Laboratory LLNL-PRES-64413031 mm 100 m1 mm100 mActuation paddles500 m 4. Requirements Control Analog/Discrete Degrees of Freedom 1,2,3 Array 0D,1D,2D Fill Factor >75%Lawrence Livermore National Laboratory LLNL-PRES-6441304 5. Unique Features Stabilizing flexures Rotary Comb geometry Hexapod flexures Constrained Design Via layout Faster more accuratemotion and larger range Larger array Integrated light sourceMirrorHexapodFlexuresActuatorPaddleCombsBase PlateViaSolder-ballsPCBLawrence Livermore National Laboratory LLNL-PRES-644130 5 6. Lawrence Livermore National Laboratory LLNL-PRES-644130Confocal Microscopywikipedia.com Video rate confocal microscopy High-speed, focusable LIDAR 3D Image Projection Image stabilization High-energy beam direction6LIDARwikipedia.com3D ImagesUS 2012/0194508 A1 7. Charity Follettfollett2@llnl.govLawrence Livermore National Laboratory LLNL-PRES-644130 7