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Operation Manual

Addendum

for Matrox and Gigabit Ethernet Camera System

____________________

Loomis LSD-155 For Laser Cleaving

Proof Document

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LII Controls Configuration

October 27, 2011

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1. Table of Contents

1. Table of Contents .......................................................................................... 3 2. Disclaimers .................................................................................................... 4

2.1 Policies and Procedures ...................................................................................... 5 2.2 Product Liability ................................................................................................. 7 2.3 Contacting Loomis Industries, Inc. ..................................................................... 9

2.4 Product Safety ................................................................................................... 10 2.5 Warnings ........................................................................................................... 19 2.6 SCOPE .............................................................................................................. 19 2.7 OBJECTIVES ................................................................................................... 19 2.8 RESPONSIBILITY........................................................................................... 20

2.9 APPLICABLE DOCUMENTATION .............................................................. 20

2.10 REQUIREMENTS ............................................................................................ 20

2.11 SAFETY ........................................................................................................... 20 2.12 Preventative Maintenance ................................................................................. 21

2.13 Decommissioning ............................................................................................. 22 2.14 Necessary Tools ................................................................................................ 27

2.15 Machine Specifications and Service Requirements .......................................... 28 2.16 Consumables List .............................................................................................. 29

3. Overview ...................................................................................................... 30 3.1 Parts of the Vision System ................................................................................ 30

4. Procedures .................................................................................................. 30 5. Set Up Vision Alignment .............................................................................. 31 6. Pattern Training ........................................................................................... 37

6.1 Cleaved Edge Patterns ...................................................................................... 51

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2. Disclaimers

Trained Personnel Only personnel trained in the safe operation or maintenance of the Loomis scribe and break system should be allowed access to the system. Personnel should have a thorough understanding of the various hazards inherent to the system. When performing any maintenance procedure where the potential for electrical shock exists, a second person should be standing by. This second person should be knowledgeable in safety procedures in the event of an emergency.

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2.1 Policies and Procedures

Loomis Industries Policies and Procedures

This section describes the policies Loomis Industries, Inc. has implemented regarding warranty, after-sales service; maintenance, operation and decommissioning of Loomis scribe and break equipment. Legal: The terms of the purchase order shall be governed by California law notwithstanding applicable conflict of laws statutes. Any action arising under the Purchase Order shall be determined in the California Superior Court of Napa County or the United States District Court of Northern California. In the event any action is brought for the enforcement of the purchase order or interpretation with respect thereto, the prevailing party shall be entitled to recovery its reasonable attorneys fees and costs in addition to all other relief granted. Warranty and After-Sale Support:

LIMITED WARRANTY: Loomis Industries warrants parts and workmanship of all equipment and tools for a period of 365 days from the date of shipment. Warranty may be exercised only by original buyer of equipment and tools, and may not be transferred to any other party. Loomis Industries reserves the right to elect to repair or replace, as appropriate. Buyer, at its cost, must ship equipment to Loomis Industries factory for warranty claim. NO OTHER WARRANTIES, EITHER EXPRESSED OR IMPLIED, INCLUDING IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE. LOOMIS INDUSTRIES IS NOT RESPONSIBLE FOR CONSEQUENTIAL DAMAGES ARISING FROM BREACH OF WARRANTY OR PURCHASE ORDER TERMS.

Seller will not support equipment with warranty coverage, parts, or consumables to any owner of the equipment other than the original buyer under purchase order. The new owner may request training, machine inspection, and technology transfer from Loomis Industries, Inc. at the owner’s expense.

Third Party Equipment and Consumables: Loomis Industries, Inc. does not support the use of third-party components or consumables.

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Product Support: Product support is available by contacting Loomis Industries, Inc. or calling one of our field service representatives directly. Onsite repairs, telephone and email solutions may not be possible. Extensive repairs must be performed at the Loomis Industries facility. Please view our website at www.loomisinc.com for a current list of telephone numbers and email addresses for Loomis Industries, Inc. and Loomis representatives. Loomis Industries, Inc. home office can be contacted through the following information: Loomis Industries, Inc. 1204 Church Street St. Helena, CA 94574 USA Telephone 707-963-4111 Fax 707-963-3753 Email info@loomisinc.com Loomis Industries normal business hours are: Monday through Friday, 7:00 a.m. to 3:30 p.m., Pacific Time

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2.2 Product Liability

Product Liability Loomis Industries, Inc. does not have a policy in place to announce product upgrades or retrofits. If Loomis Industries, Inc. discontinues production of LSD-100, LSD-110, LSD-150, or LSD-155; we will continue to support this equipment with parts and service for a period of 7 years. If a product has been discontinued, Loomis Industries, Inc. will not offer software upgrades/updates past the last-current version of the software. This includes updates to make older software work with any new operating system (OS) that may be introduced in the computer industry. Loomis Industries, Inc. does not support the use of materials, consumables, scribe tools, etc. supplied by third-party vendors. Any damage to the Loomis scriber, to the customer’s products, or expenses incurred by the use of third-party products is strictly the responsibility of the user/owner of the equipment. Should a Loomis scriber need to be transported to Loomis Industries, Inc. for repairs, special shipping containers MUST be acquired from Loomis Industries, Inc., AND a Loomis certified technician must pack the equipment. Failure to properly package a Loomis scriber will result in significant damage to the scriber. Any repairs necessary as a result of improper packing of the scriber will be at the owner’s expense. The equipment user must disclose to Loomis Industries, Inc. the types of materials processed on the scriber, and inform Loomis Industries, Inc. of any possible chemical contamination that may be present on the scriber, prior to Loomis Industries, Inc. dispatching a repair technician to repair or pack the scriber. Failure to disclose a hazard, or provide safety equipment to the Loomis technician, may result in the refusal by the Loomis employee to provide the repair or packing service due to health and safety concerns. Loomis Industries, Inc. may refuse service if the equipment has been exposed to hazardous materials (documented), or contains or is coated with an unknown substance, and the decontamination of the equipment cannot be verified. Loomis Industries, Inc. cannot be held liable for any injuries or downtime due to any customer modifications, or the failure of modified or added equipment to the scribe and break machine. It is the responsibility of any “new owner” (whether purchasing the Loomis scriber from auction or from any other source) to obtain training and technology transfer, and have the equipment inspected and certified, at the owner’s expense, prior to

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using the Loomis scribe and break equipment. Failure to do so could result in injury or loss of product from misuse, or from defective equipment. Any repairs made to a Loomis scribe and break machine by persons other than Loomis Industries, Inc. employees, are performed at the risk of the user; even if the repair parts are purchased through Loomis Industries, Inc. Improperly performed repairs could result in personal injury or loss of product.

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2.3 Contacting Loomis Industries, Inc.

In Case of Emergency In the case of an emergency or machine failure, please contact Loomis Industries, Inc. Our contact information is supplied here.

Loomis Industries, Inc.

1204 Church Street

St. Helena, CA 94574

USA

Telephone 707-963-4111

Fax 707-963-3753

Info@loomisinc.com

U.S.- West Technical Assistance Jesus Pareja jesusp@loomisinc.com General Manager Quotations and Sales Diana Bustamante dianab@loomisinc.com Technical Assistance Jim Cook jimc@loomisinc.com Europe and United Kingdom Technical Assistance Ken Springall kensprin@sky.com

China Technical Assistance James Li jamlch@yahoo.com China, Taiwan, U.S. West Technical Assistance Steve Zwetsloot stevez@loomisinc.com Billing and Accounts Patty Gonzalez pattyg@loomisinc.com

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2.4 Product Safety

SAFETY & MAINTENANCE

This section identifies safety features and procedures that must be followed in order to prevent injury to personnel or damage to equipment. Definitions Warning labels are used to help prevent injury to personnel or damage to equipment. Potential mishaps are identified so that they can be prevented. Observe all warning labels on the system and in the manual. The types of warnings and their meaning are listed below.

DANGER is used to indicate an imminently hazardous situation, which, if not avoided, will result in death or severe injury. This signal word is limited to the most extreme situations.

WARNING is used to indicate a potentially hazardous situation, which, if not avoided, could result in death or severe injury.

CAUTION is used to indicate a potentially hazardous situation, which, if not avoided, could result in moderate or minor injury.

CAUTION without the hazard alert symbol is used to indicate a potentially hazardous situation, which, if not avoided, could result in property damage.

Emergency Off

If for any reason it becomes necessary to immediately cut power to the system, press the red EMO button located on the remote switch box (LSD-100 and LSD-110), located on the theta cover on LSD-150/155. This activates a fail-safe EMO circuit dropping power to much of the system, and activating other system safety features.

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EMO Description

The EMO circuit used on the Loomis scribing system is a fail-safe circuit that shuts off all electrical power to the servo motors and puts all valves into safe positions when the EMO button on the system is activated. The EMO button is connected to the Main Control Board via the X-axis board. In order to restart the system, the EMO switch must be manually reset, the system hardware must be power cycled, and the software must be restarted.

Loomis Scribing System Hazards

Operations and maintenance personnel should be aware of potential hazards associated with the Loomis system so that they can take proper precautions to avoid injury to personnel and damage to equipment. This section identifies the inherent hazards associated with the Loomis scribing systems. Personnel using the Loomis scriber should familiarize themselves with the content of this section. System drawings are included illustrating the location of hazards, safety interlocks, and EMO button. Study these drawings carefully to educate yourself regarding the safety hazards and features of the Loomis system. Personal Safety Equipment Eye protection should be worn at all times when operating or servicing this equipment. Ergonomics (Seated station) Height of keyboard, trackball, or mouse Minimum 710 mm (28 in.) Maximum 760 mm (30 in.) Vertical leg clearance Minimum 673 mm (26.5 in.) Horizontal leg clearance; depth at knee level Minimum 508 mm (20 in.) Horizontal leg clearance; depth at foot level Minimum 660 mm (26 in.) depth x 254 mm (10 in.) vertical foot clearance Horizontal leg clearance; width Minimum 610 mm (24 in.) Thickness of work surface Maximum 51 mm (2 in.) Work surface edge radius Minimum 6 mm (0.25 in.) radius

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EMO

The EMO, or Emergency Stop Button, is located on the LSD-150/155 Theta cover.

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Pinch Points

The Pinch Point labels are located in various places on the scriber, including on the wafer holding, or theta assembly, x-axis cover, and on the y-axis ram assembly.

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The risk of being pinched is minimal; but most likely to occur during the initialization phase of the machine startup. The x-axis stage translates from its load position to its home position during initialization. It is important to keep hands and fingers away from the scriber during the initialization phase.

Lockout/Tagout labels

The Lockout/Tagout label is located on the back panel of the LSD-150/155.

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This tag indicates the necessity to disconnect the electrical power, and pneumatic supply to the scriber prior to performing most maintenance. These maintenance items include, but are not limited to the following:

Fuse changing

Microscope lamp replacement

Motor module replacement

Leadscrew maintenance

Maintenance or repairs inside of the machine covers Some repairs or maintenance items require the machinery to be in the operational state for completion and testing. Please exercise caution when running the machine during maintenance procedures. Maintenance should only be performed by trained and qualified personnel. Personal injury or equipment damage may occur if the machine is operated with the covers removed.

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Chemical Hazards

The Loomis scribe and break systems use NO chemicals that are corrosive or toxic. However, some of the semiconductor products processed on the Loomis scribe and break system, including Gallium Arsenide (GaAs), are known to be carcinogenic, and are considered to be hazardous materials. Eye protection, and particle masks must be worn at all times while operating this equipment. The dicing films (tapes used to hold wafers during the scribe and break operation) may contain fragments of these semiconductor compounds after processing the wafers. The used film should be considered hazardous material, and needs to be disposed of according to local and regional regulations. Local and regional regulations governing disposal of hazardous materials vary. The customer is responsible for knowing and following applicable local, state or provincial and national regulations regarding disposal.

Electrical Hazard

The Loomis scriber requires 115 or 240 VAC to operate, and thus contains hazardous electrical energy. No one but a skilled electrical technician, trained on the Loomis scriber, should work on the electrical circuits. High Pressure Hazards

Air Pressure The Loomis LSD-150/155 scriber requires 70 to 85 psig (4.8 to 5.9 BAR) of Clean Dry Air (CDA) or Nitrogen gas. This is high-pressure gas, and is dangerous. If a fitting disconnects, the airline could swing about, which could cause severe personnel harm. If a fitting disconnects or there is a loud noise, the EMO should be activated and operators should clear away from the machine until a skilled maintenance engineer can correct the situation. Manually shutting off the CDA or Nitrogen source is advised before further action. A manual lockable valve should be installed at the CDA (or Nitrogen) source. It is the end-user’s responsibility to furnish this device.

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Lockout/Tagout System Procedures

Purpose

This procedure establishes the minimum requirements for the lockout or tagout of energy isolating devices. It shall be used to ensure that the machine or equipment are isolated from all potentially hazardous energy, and locked out or tagged out before maintenance personnel perform any servicing or maintenance activities where the unexpected energizing, start-up or release of stored energy could cause injury. Responsibility All maintenance personnel shall be instructed in the safety significance of the lockout (or tagout) procedure. Each new or transferred affected employee and other employees whose work operations are or may be in the area shall be instructed in the purpose and use of the lockout or tagout procedure.

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Sequence of Lockout/Tagout System Procedure 1. Notify all affected employees that a lockout or tagout system is going to be utilized and the reason therefore. Maintenance personnel shall know the type and magnitude of energy that the machine or equipment utilizes and shall understand the hazards thereof. 2. If the machine or equipment is operating, shut it down by the normal stopping procedure (Exit the software, turn OFF the main power switch.) 3. Operate the circuit breaker, valve, or other energy isolating device(s) so that the equipment is isolated from its energy source(s). Stored energy (such as air, gas, steam, or water pressure, etc.) must be dissipated or restrained by methods such as repositioning, blocking, bleeding down, etc. 4. Lockout and tagout the energy isolating devices with assigned individual lock(s) and tag(s). 5. After ensuring that no personnel are exposed, and as a check on having disconnected the energy sources, operate the push button or other normal operating controls to make certain the equipment will not operate.

CAUTION: Return operating control(s) to “neutral” or “off” position after the test.

6. The equipment is now locked out or tagged out. Restoring Machines or Equipment to Normal Production Operations

1. After the servicing and/or maintenance is complete and equipment is ready for normal production operations, check the area around the machines or equipment to ensure that no one is exposed.

2. After all tools have been removed from the machine or equipment, guards have been reinstalled and employees are in the clear, remove all lockout devices. Operate the energy isolating devices to restore energy to the machine or equipment.

Procedure Involving More Than One Person In the preceding steps, if more than one individual is required to lockout or tagout equipment, each shall place his/her own personal lockout device or tagout device on the energy isolating device(s). When an energy isolating device cannot accept multiple locks or tags, a multiple lockout or tagout device (hasp) may be used. Basic Rules for Using Lockout/Tagout System Procedure

All equipment shall be locked out to protect against accidental or inadvertent operation when such operation could cause injury to personnel. Do not attempt to operate any switch, valve, or other energy isolating device that is locked out.

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2.5 Warnings

Warning Labels Hazards related to maintenance exist beyond those during normal operating procedure. Carefully follow all instructions for any maintenance activity. When called for in the instructions be sure to follow lockout/tagout procedures to isolate the system from all potential hazardous energy during maintenance. Lockout/tagout instructions immediately follow the hazard warnings below.

The supplied PC and Monitor are powered independently from the Loomis scriber.

If you power down the Loomis scriber, EMO or Turn Off, this will leave power on to the PC.

If you power down the PC, this will leave power to the Loomis scriber.

THE ELECTRICAL POWER TO THE LOOMIS SCRIBER IS TO BE TURNED OFF AND LOCKED OUT WHEN WORKING ON THE MAIN ELECTRONICS BOARD OR SWITCHING POWER SUPPLIES.

2.6 SCOPE

This specification applies to the Loomis LSD-150/155 scribe and break system.

2.7 OBJECTIVES

This document was designed to aid qualified technicians while performing Loomis scriber preventative maintenance. A moderate level of training and experience is required in order to properly utilize and implement the procedures contained in this document.

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2.8 RESPONSIBILITY

It is the customer's responsibility to perform the preventative maintenance procedures as outlined within this document in order to maintain the Loomis Industries, Inc. product warranty.

2.9 APPLICABLE DOCUMENTATION

A. Loomis LSD-150/155/155 Complete Operations Manual. B. Loomis Technical Manual LSD-150/155/155.

2.10 REQUIREMENTS

7.1 The technician/engineer must be familiar with basic Loomis scriber set-up and operation procedures. 7.2 Provide and keep preventative maintenance records in a log.

2.11 SAFETY

The Loomis scriber uses HAZARDOUS VOLTAGE (115/240 VAC) to supply power to switching power supplies. All other circuitry is LOW VOLTAGE (24 VDC). Power should be DISCONNECTED and locked out when any of the protective covers or interlocks have been removed for preventative maintenance or service.

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2.12 Preventative Maintenance

Series Preventative Maintenance Schedule

FREQUENCY

DESCRIPTION

EST. TIME

REQUIRED DAILY

Check tool angle

5 minutes

Check tool mileage report, service scribe tool if necessary

5 minutes

WEEKLY

Check Gases supply (CDA or nitrogen, vacuum)

2 minutes

Wipe Down Entire Machine including Covers, Mechanism

Area, etc.

10 minutes

Wipe Down Y-axis air slide.

10 minutes

MONTHLY

Check Y and X-axis leadscrews for signs of wear and need

for Replacement. Clean and lubricate as needed with

Rheolube 362HF.

1.5 hours

Disposal of Solid Waste

As a result of operation, maintenance and servicing of the Loomis scriber, some items become solid waste. Disposal of these items might be regulated; therefore these items need to be disposed of properly. These items include:

Contaminated wafer holding film

Swabs used for cleaning

Lithium batteries from the PC

Wipe cloths used for maintenance

Computer monitors containing lead or mercury

Local and regional regulations governing disposal of hazardous materials vary. The customer knows what chemistries are used in the system and is therefore responsible for knowing and following applicable local, state or provincial and national regulations regarding disposal.

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2.13 Decommissioning

Decontamination and Decommissioning

Purpose This chapter defines the requirements for handling used equipment or components that have been exposed to hazardous materials. The purpose of these procedures is to minimize or eliminate:

Potential exposure to hazardous materials by personnel who are required to handle, modify, retrofit, refurbish, or recondition used equipment and parts,

Potential environmental liability when authorizing receipt of hazardous materials on site,

The unintentional release of hazardous waste. Terminology

Decontamination is the removal of risks or hazards to human health or the environment that result from the presence of hazardous materials in or on equipment.

Equipment refers to process tools, chemical (liquid or gas) controls and delivery systems, ancillary support systems, structures, piping, ductwork, parts, and subassemblies (e.g., vacuum pumps, pump packages, effluent/exhaust treatment systems), purchased from SVG.

Free liquids are those that can be poured or drained from equipment when the equipment is held in any orientation. Loomis equipment uses NO liquids.

Hazardous material is any chemical, substance, or compound that is defined or interpreted as posing risks or hazards to human health or the environment according to international, federal, state, or local laws or regulations.

Health hazard is defined as a chemical for which there is statistically significant evidence based on at least one study, conducted in accordance with established scientific principles, that acute or chronic health effects may occur in exposed persons. Health hazards include chemicals that are carcinogens, toxic materials, reproductive toxins, irritants, corrosives, sensitizers, hepatotoxins, neurotoxins, agents that act on the hematopoietic system, and agents that damage the lungs, skin eyes or mucous membranes.

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Physical hazard is defined as a chemical for which there is scientifically valid evidence that it is a combustible liquid, compressed gas, cryogenic, explosive, flammable gas, flammable liquid, flammable solid, organic peroxide, oxidizer, pyrophoric, unstable (reactive), or water-reactive material.

Transferor is the party with physical custody of the equipment and responsibility for transfer.

Transferee is the party who will receive physical custody of the equipment.

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Decommissioning If the need to decommission arises, disassemble all parts and dispose of them as scrap or recyclable materials, according to on-site procedures. The largest percentage of material in the system is metal (aluminum). The wiring can be scrapped and the PCBs can be stripped of the copper. The PC and monitor, if unusable, can be recycled. Check local listings for electronics recycling facilities. Scope and Responsibility These procedures describe minimum requirements for documentation of decontamination, and notification of residual hazards associated with decontamination. Their intent is to make certain that decontamination is completed to the utmost extent prior to transport or disposal of the equipment. They further address decontamination steps required to prepare equipment for end-of-life disposal. It is the responsibility of those transferring the equipment to ensure removal or minimization of all hazardous materials prior to transfer, relocation, or disposal. Hazards may exist that are not addressed in the procedures. In some cases, complete chemical decontamination cannot be achieved without destruction of the equipment. The person or persons transferring the equipment should make sure that any remaining potential hazards are clearly identified. It is the responsibility of those transferring the equipment residues, waste materials, and scrap parts generated as part of the decontamination process or end-of-life disposal to do so according to local, state, federal, and international regulations. If you are uncertain about equipment, contact the on-site EHS officer. Applicable Documents

SEMI S12-0298, Guidelines for Equipment Decontamination Procedures Personnel Safety Only properly trained and equipped personnel should perform assessment and decontamination procedures.

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To ensure compliance with applicable law, all specific procedures utilized to follow these guidelines should be pre-approved by the site Environmental, Health and Safety organization prior to decontamination activities. Use of appropriate personal protective equipment (PPE) should be addressed for each decontamination activity. Equipment Assessment Prior to Decontamination Assessment of equipment should initially consider history of the equipment and visual inspection. If initial assessment shows a potential for equipment to have contacted hazardous materials during the life of the equipment, further assessment needs to be performed. Decontamination analysis should be performed on all areas of equipment that had potentially contacted hazardous materials during the life of the equipment, unless the areas are determined to be non-hazardous by the criteria set forth in this section. These areas include external surfaces, internal areas that are accessible without disassembly, and areas accessible during normal operations. Normally inaccessible areas should be addressed on a case-by-case basis by the site Environmental, Health and Safety organization. Removable parts may also require cleaning. A visible residue on equipment surfaces, including liquids, powders, flakes, or films, may indicate the presence of hazardous materials. All residues should be assumed to be hazardous unless otherwise determined and documented by appropriate test, analysis, or evaluation. Wipe sampling and chemical testing verifying the absence of physical and health hazards is recommended for all equipment that has been exposed to hazardous materials (regardless of the presence of visible residues). Refer to SEMI S12 or consult the on-site EHS person for wipe sampling procedures. If assessment results indicate that the equipment should be decontaminated prior to transfer, see Requirements for Decontamination. If assessment indicates that the equipment requires decontamination but will not or cannot be decontaminated prior to transfer, see Requirements for Equipment Transfers without Complete Decontamination. Requirements for Decontamination Prior to decontamination, the equipment should be evaluated for abnormalities or non-functionality that may affect the evaluation and decontamination efforts.

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Equipment should be decontaminated before movement. If movement of the equipment is required prior to decontamination, precautions should be taken to remove all potential sources of leakage, spillage, off-gassing or hazardous material emissions through draining, purging and then use appropriate barriers, covers or containment devices. All applicable lockout/tagout procedures must be followed. Equipment parts that are routinely removed from the equipment for cleaning, should be cleaned prior to equipment transfer. Parts that are removed but not replaced should be disposed of per local regulations. All gas lines on the equipment should be appropriately purged, and secured with blanking plugs, caps or similar devices designed to remain in the equipment during handling and transport. Thorough decontamination may not be achieved within component systems or equipment due to inaccessibility (i.e. "dead zone") or to physical characteristics of materials. Equipment with such zones require additional cycle purges and/or disassembly for access and proper cleaning. If complete decontamination cannot be achieved, follow Requirements for Equipment Transfers without Complete Decontamination. Requirements for Equipment Transfers without Complete Decontamination In some cases complete decontamination cannot or will not be desired or achieved for various reasons (e.g. pumps). This section establishes guidelines for the transfer of equipment intended for further productive use, which cannot or will not be completely decontaminated prior to transfer.

If the contaminated equipment is a sub-component or subassembly of a larger piece of equipment which will not be otherwise decontaminated, the contaminated sub-assembly or component should be removed and transferred separately as specified above.

Prior to transfer, the transferor must ensure that any remaining potential hazards are clearly identified to persons handling, transporting, and receiving the equipment.

Obtain prior approval from intended transferee before shipping the equipment.

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Transportation and transfer of contaminated equipment is the same as transportation of hazardous materials and the process must meet all applicable local, state, national, and international regulations and organization policies.

2.14 Necessary Tools

Necessary Tools Normal Operation

The tools necessary to operate the Loomis LSD-150/155 include the following:

Part Number Description

2900-0002, -0005, -0008, -0014 Scribe tool Angle Templates

7050-00?? (by application) Scribe tools

5400-0008 Hex-wrench set, Standard American

Plastic Shim Stock

2500-0661-xxx Break Wheel

2500-0776-x° (short), -0919-x° (short) Support Mandrel

Optional tools that may be necessary for non-normal maintenance include: Digital Multimeter Air pressure gauge Hex-wrench set, Standard American Hex-wrench set, Metric Screw drivers, Standard and Philips Small adjustable wrench Dial indicator Indicator stand Lab-grade granite surface plate Vernier calipers Swabs Cleaning cloth Loomis Industries, Inc. does not supply these tools.

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2.15 Machine Specifications and Service Requirements

LSD-150/155 Specifications and Service Requirements

LSD

Dimensions (h,w,d) (28.0, 39.0, 27.0) in (71.1, 99.0, 68.6) cm

Weight 147.0 lbs 68.2 kg

Controller (specifications may vary) Included With System

Dimensions (h,w,d) (16.5, 7.5, 17.0) in (41.9, 19.1, 43.2,) cm

Weight 30.1 lbs 13.7 kg

Monitor (specifications may vary) Included With System

Dimensions (h,w,d) (17.5, 15.2, 3.5) in (44.5, 38.6, 8.9) cm

Weight 8.5 lbs 3.9 kg

Ergonomics

Seated station Height of keyboard, trackball, or mouse Minimum 710 mm (28 in.) Maximum 760 mm (30 in.) Vertical leg clearance Minimum 673 mm (26.5 in.) Horizontal leg clearance; depth at knee level Minimum 508 mm (20 in.) Horizontal leg clearance; depth at foot level Minimum 660 mm (26 in.) depth x 254 mm (10 in.) vertical foot clearance Horizontal leg clearance; width Minimum 610 mm (24 in.)

Thickness of work surface Maximum 51 mm (2 in.) Work surface edge radius Minimum 6 mm (0.25 in.) radius

Electrical Specifications

Power Requirements 100-240 V, 50/60 Hz

Power Consumption AIC Breaker Requirement

0.67 Amp 10,000 Amp

Pneumatic Specifications

Pressure Requirements 70 to 85 psi 483 to 586 kPa

Vacuum Requirements N/A for normal configuration 25 in Hg (for vacuum plate option)

-84 kPa

Ratings: Inputs and Outputs

Operating Temperature Range Altitude to 2000m, 5 - 40°C

Max and Min humidity at temp. 80% to 31°C, decreasing to 50% at 40°C

Input voltage variance +/- 10% of nominal

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2.16 Consumables List

Consumables List for Loomis Scribe Equipment

The following tables contain lists of consumables that are frequently used on Loomis scribe and break equipment. These lists change over time, and may no longer be complete. Also, prices change without notice. Therefore, there are no prices listed with the parts in the tables.

7050-00xx Scribe Tools, by application, please call or email for assistance

Dicing film, customers generally order direct from manufacturer

2500-0722 GRIP RINGS GRP2620-4 YELLOW & GREEN

2500-0827 GRIP RINGS GRP2620-5 BLACK AND WHITE

2500-1006 GRIP RINGS GRP2620-6 BLACK AND WHITE

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3. Overview

This manual provides information for understanding, using, and maintaining the Matrox MIL vision system, the Matrox Gigabit Ethernet card, and the Sentech Gigabit Camera system.

3.1 Parts of the Vision System

The machine is designed to optimize the scribing and breaking operations. The scribe arm holds the diamond tip at an adjustable angle and moves it at a preordained speed to make a line on the wafer that is straight to a few microns. It aligns the wafer channel with the scribe line so that the scribe is properly centered, and it pushes the break wheel with the correct pressure and speed in order to propagate a break along the scribe line.

4. Procedures

This section describes the various procedures that are involved with operating, setting up, and maintaining the LSD-155 so that it will scribe and break optimally.

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5. Set Up Vision Alignment

Click the Vision Tab to proceed to the pattern training section of the recipe setup.

Access Vision Alignment from Pass Data Screen, or from the Main GUI screen

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The Vision Alignment page will be displayed. The vision alignment page’s options include reticle position adjustments, pattern training for the process passes, on-screen measurement, illumination controls, x and y translation and indexing, and image size control (digital zoom level).

Vision Alignment Page The page shown is for a single pass recipe. If you are training patterns for a multi-pass recipe you will see buttons to “Orient Pass #” the wafer to the proper rotational position for pattern training for that pass. To program a vision pattern for a pass, click the appropriate button: Orient Pass 1, 2, 3, or in some cases 4. The current pass orientation is NOT displayed as a button. As shown in the example above, the Orient Pass 1 button is missing.

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Depending on the pass, the wafer may be rotated to place the wafer in the proper orientation for the picture to be acquired. After the wafer has been rotated to the proper orientation for pattern acquisition, the following page will be displayed.

Pattern Training Screen This page allows motion control for the x-axis, and y-axis, by way of traverse buttons, click-and-drag or index buttons. Fine position adjustments are made using the micro-index buttons at the center of the x and y traverse controls. Control of the theta axis is available via the Theta Control buttons. It is necessary to theta align the wafer to the scribe reticle prior to programming the vision pattern models. Hint: Right-click and drag along a flat pattern or wafer edge on the video screen. When the mouse button is released, a dialogue box will be displayed allowing you to click OK or Cancel. Ok will align theta quickly, based on the angle measured on the screen. This adjustment is good enough for programming a pattern; but not good enough to process the wafer.

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The other controls are listed in table 3, below. Table 3 (Vision Alignment)

Name Function Behavior

Orient Pass 1, 2, etc. When more than 1 pass is available, these buttons allow you to configure vision for other passes without leaving this page.

When other Config For Pass # button is clicked, the wafer will rotate to the appropriate orientation for vision training.

Train Pattern Puts a pattern box on the video screen. This will be followed by a search area box.

Drag and size this box around the pattern to be used for centering. Remember, the reticle must be aligned exactly where you want the scribe mark to be before training the pattern.

Find Pattern Test This button triggers the pattern search. The system will look for the pattern on the screen and outline it for you. This is to verify the “visibility” of the pattern.

Test Alignment Test Drag the wafer around a little bit on the screen, then push this button. The PR system should find the pattern, then adjust x and y to put the pattern in exactly the right spot relative to the reticle. This should align the wafer to the scribe position.

Measure See previous entry for measure

Export Image Save image to file Exports image to .jpg file for saving to disk.

Adjust Reticle Right >> Moves reticle for alignment to mandrel peak or offset.

Bumps reticle right one pixel per click.

<< Adjust Reticle Left Moves reticle for alignment to mandrel peak or offset.

Bumps reticle right one pixel per click.

Reticle Gap + Increase reticle gap to match feature.

Each click expands the reticle gap one pixel both

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left and right.

Reticle Gap - Decrease reticle gap to match feature.

Each click decreases the reticle gap one pixel both left and right.

Master Reference Shows camera center point Shows the center of the camera image. Use for center point calibration, and offset calculations

Show Regions Displays zoom and focus areas inside the entire sensor image

Reticle Up Moves the horizontal reticle up

Reticle Down Moves the horizontal reticle down

Theta CCW Manual Theta Adjust CCW Click-hold, starts slow and accelerates to fast. Right-click rotates 90 degrees

Theta CW Manual Theta Adjust CW Click-hold, starts slow and accelerates to fast. Right-click rotates 90 degrees

Illumination Slider, and RGB Sliders (If applicable).

Adjusts lamp voltage up or down

Click-hold-slide the arrow, or click on the line for gross adjustment.

RGB sliders Adjust the color mix of the LED (if RGB LED installed)

Click-hold-slide the arrow, or click on the line for gross adjustment.

Skip___ Channels Between Alignments (Current Pass)

Tells the recipe to only check vision alignment every ___ channels.

Skips vision cycles, therefore speeds up process.

Use Pattern Recognition Enables PR

Define __ Patterns Numeric Allows the use of multiple (up to 10) patterns in the same pass

Use OTF Vision (This feature is not yet implemented)

Switch Uses OTF vision system during scribe functions. This is the same as LSD-150

Save Settings Saves changes to recipe files

This option is disabled in operator mode. Again, the operator can access the vision tab, and make temporary changes, but cannot save.

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Back Takes you back to the Main Screen, with or without saving changes.

Main Viewer Wide, Normal, Close Zoom levels for the video display. Wide is the entire image; what the scriber sees at all times. The other zoom levels are only for the operator’s ease of use.

Marker Colors Opens selector page Allows customization of the colors for the reticles, drag lines, selection boxes for patterns, etc.

Drag Reticle Mouse option Allows fast positioning of the horizontal and vertical reticles, by clicking on the video screen, holding the mouse button down, and moving the cursor. Once released, the operator is prompted to verify the position.

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6. Pattern Training

There are now two types of patterns available to use on the LSD-155:

1. Standard Patterns, where features (patterns) on the wafer are used for theta alignment, and for street alignment. This is used in most cases.

2. Cleaved Edge Assisted Patterns, where a pattern is used for x-axis positioning, and a wafer edge (a straight line) is used for y-axis positioning.

The standard pattern system works much like it always has: the patterns can be used for theta alignment and positioning for x and (or) y. The cleaved edge assisted pattern system is used when theta alignment to a crystal’s edge is more important, placing the desired cleave line parallel to the system’s break mandrel; for example, when dicing laser bars where the lithography is not perfectly accurate. Each recipe can now use up to 10 patterns. As more patterns are used, the computer must work harder to process and compare images. Use only as many patterns as are necessary for the process. The cleaved edge assisted pattern system is even more “process hungry” than standard pattern recognition.

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The first step in programming the pattern is to ensure that the scribe street is visually parallel to the scribe street. Please note: perfect theta alignment is not necessary for pattern training when training a single pattern. Precise theta alignment before pattern programming becomes more important as more patterns are used. Use the theta clockwise and counterclockwise controls to get the street visually parallel to the reticle.

Click and hold the theta control button. This rotates the wafer until the button is released. Depending upon where on the film the microscope is looking; the theta rotation can be subtle (if viewing near the center of rotation), or very abrupt, with a lot of wafer movement if viewing material far from the center of rotation. Again, use the right-click-drag feature for fast theta alignment. Note that right-clicking the theta button will give a 90 degree rotation!

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Once the theta rotation is done, and the street looks visually parallel to the reticle, you can continue with pattern training. Click and drag, or use the x-axis motion control buttons, to align the middle of the scribe street to the red (scribe) reticle.

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When the pattern is trained it is important to have the scribe reticle exactly where the scribe mark is meant to be, in this case in the middle of the visible street. If needed, you can zoom to a higher magnification to verify the reticle position over the street.

It is also important to have the proper view of the wafer, ie, viewing the part of the wafer where the scribe, peck, or notch will go. In this case, the pattern will be programmed to center on the street and keep the upper edge of the laser bar at the position shown in the screen above.

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When everything is aligned, click the Train Pattern button to begin the process of acquiring the vision pattern for this pass.

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Click the appropriate pattern number button. In this case, there is only one.

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A green box will appear on the video screen. Click the desired check boxes:

Use Cleave Edge Assist

Allow Instant Theta Assist (During theta search, if the pattern found has this option on, the system will measure the angular offset of the pattern and make a gross adjustment before starting the rest of the theta routine)

Adjust the Acceptance Score, Certainty Score, Cleave Edge Threshold and Cleave Edge Smoothing, if needed. Starting values: Acceptance Score 60 As low as 40 is generally reliable Certainty Score 65 Cleave Edge Threshold 7 (as low as 4 if the edge is obscured by coatings) Cleave Edge Smoothing 10 Click the Apply button.

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Click and drag the box to the area that will be defined as the pattern. The box can be sized by dragging on the corners of the box.

Once the box is in the correct position, and sized properly, click the Set button.

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Next, you will be directed to place a box (blue in this example) defining the search range for the pattern. Move and resize this box in the same way as the pattern box. The search range must be taller and wider than the pattern box. The width should be set such that only one copy of the pattern is seen in the search area when the wafer is aligned. It should be as tall and wide as practical, especially for Bar Array mode, when the system must search in a zig-zag pattern for the bars on the tape.

Pattern Search Area Box When the search range box is positioned and sized, click the Set button.

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Once you set the search area, you will be prompted to Confirm Model. You should see the pattern in a broken green rectangle, and broken blue box representing the search area. If this is true, click Confirm Model.

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Assign Angular Rotation Attribute Immediately after model confirmation, you will be given the option to allow this pattern to be used for “Angular Rotation”; meaning simply, can the system use this model for the theta adjustment routine? In most cases the answer is Yes. In some cases the pattern being trained is only visible on one end of the rectangle or bar. In this case, the answer would be No, since theta must be performed with patterns that repeat.

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To test the pattern, click the Find Pattern button. You can also move the wafer slightly and click Find Pattern.

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You are given a choice of which pattern to find, or click All.

Pattern 1 clicked, pattern found.

The pattern score, x, y, and angular measurements are displayed.

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You can further test the pattern by moving the street away from the reticle (using the click and drag method), and clicking Test Alignment.

Again, the correction and score values are displayed, and the x and y axis are moved to place the pattern in the correct position under the reticles. If the test results are satisfactory, more patterns can be trained for the same pass, or other passes.

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6.1 Cleaved Edge Patterns

Cleaved Edge Assisted pattern training is performed in much the same way as standard patterns. Make sure the edge need for alignment is in view. Set the attribute check boxes, score values, and values for Threshold and Smoothing.

Draw the pattern box and Set. Note: in this case, the pattern has no y-axis reference, no horizontal lines for the system to use for y-axis placement of the pattern. In standard pattern recognition mode this would not be a good pattern if placing Pecks, Stitches, or Notches.

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An alternative pattern could have been as shown here. It has y-axis correction information in the horizontal lines; but this information will not be used in this process. Also, since this pattern is so close to the edge, it may be contaminated by coating overspray, and may not be as reliable.

Place the search area around the pattern, as in normal pattern recognition.

Set.

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Place the purple cleave search box over the edge of the wafer or bar, as shown above. In this example, the purple box should be made taller, up to the top of the screen, and as low as the bottom of the green pattern box.

Set the angular rotation option.

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You are now prompted to Confirm Model. Look for a blue + in the center of the green broken box, and green + on the wafer edge. If these are both in place, click Confirm Model.

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Go to the Pass tab of the recipe, and set Alignment Method to Horizontal.

Save Settings. Theta will be performed using the Cleaved Edge, using the “pattern” part of the setup for x-axis reference only. Centering will be done using the pattern and edge, the pattern for x placement, edge for y placement.

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During the centering operation, when running the wafer, the typical box showing the outline of the pattern will not be shown. Instead, only the two + marks will be displayed, as shown below.