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Page 1: Macro etching
Page 2: Macro etching
Page 3: Macro etching
Page 4: Macro etching
Page 5: Macro etching

1.Introduction to etching. 2.Wet chemical etching: isotropic. 3.Anisotropic etching of crystalline Si. 4.Dry etching overview. 5.Plasma etching mechanism

Etching Etch Definitions Isotropic Etching: same in all

Etching Etching Definitions Isotropic Etching: same in all

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