magnetic rotary motion feedthrough units - · pdf filemagnetic rotary motion tel: ... this is...
TRANSCRIPT
Magnetic fluid sealing for vacuum and other environments
Magnetic Rotary Motion
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
Feedthrough Units
Magnetic fluid sealing for vacuum and other environments
MAGNETIC ROTARY MOTION FEEDTHROUGH UNITS
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
INTRODUCTION
Welcome to the Rigaku Vacuum Products Catalog
Rigaku has been a world leader in the manufacturing of Magnetic Fluid Rotary
Motion Feedthroughs since 1985. For nearly a quarter of a century Rigaku
products have consistently shown to be of extremely high quality at competitive
prices. All of our highly skilled people are committed to producing the
foremost Rotary Motion Feedthrough in the world.
Rigaku’s patented designs have consistently proven to have a longer life in
demanding applications as compared to our competitors. Rigaku’s SuperseaL
series not only performs to our exceptionally high standards but has a very
manageable price tag. We also specialize in Custom Products and our highly
skilled and experienced engineering team works closely with you to design for
your application needs.
We also offer a complete rebuild service on any product we sell. We are so
confident in our rebuilds that we offer same as new warranty. We also rebuild
any competitor’s feedthrough.
Thank you for your interest in Rigaku and we look forward to a lasting
relationship.
David Mahoney
President and CEO
Magnetic fluid sealing for vacuum and other environments
MAGNETIC ROTARY MOTION FEEDTHROUGH UNITS
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
PAGE 1........................................CATALOG TIPS
PAGE 2........................................MAGNETIC FLUID
PAGE 3........................................MAGNETIC-FIELD RESISTANCE
PAGE 4........................................APPLICATIONS EXAMPLES
PAGE 5....................................... CLEAN VACUUM
PAGE 6........................................SUPER SEAL CONCEPT
PAGE 7........................................SOLID SHAFT- BASE PLATE (LOW COST)
PAGE 8........................................SOLID SHAFT- BASE PLATE (LSR SERIES)
PAGE 9........................................SOLID SHAFT- BASE PLATE (METRIC)
PAGE 10.....................................SOLID SHAFT- BASE PLATE & NOSE MOUNT (METRIC)
PAGE 11.....................................SOLID SHAFT - NOSE MOUNT (LOW COST)
PAGE 12.....................................SOLID SHAFT - NOSE MOUNT (BS SERIES)
PAGE 13.....................................SOLID SHAFT - KLAMP FLANGE (LOW COST)
PAGE 14.....................................SOLID SHAFT - KLAMP FLANGE (METRIC LOW COST))
PAGE 15.....................................SOLID SHAFT- CF & CFM FLANGE (LOW COST)
PAGE 16.....................................SOLID SHAFT- CF FLANGE (METRIC LOW COST))
PAGE 17.....................................SOLID SHAFT- CF FLANGE
PAGE 18.....................................SOLID SHAFT- FLANGE MOUNT
PAGE 19.....................................SOLID SHAFT - FLANGE MOUNT (METRIC)
PAGE 20.....................................SOLID SHAFT - FLANGE & NOSE MOUNT (WATER COOLED
PAGE 21.....................................HOLLOW SHAFT- CARTRIDGE MOUNT
PAGE 22.....................................HOLLOW SHAFT- CARTRIDGE MOUNT (METRIC)
PAGE 23.....................................HOLLOW SHAFT- FLANGE MOUNT
PAGE 24.....................................HOLLOW SHAFT- FLANGE MOUNT (METRIC)
PAGE 25.................................... HOLLOW SHAFT- FLANGE MOUNT WATER COOLED (METRIC)
**************CUSTOM PRODUCTS****************
PAGE 26 ....................................SOLID SHAFT- CANTILEVERED TYPE
PAGE 27.....................................ROTARY SEAL FOR ROBOT
PAGE 28.....................................DIRECT DRIVE - MOTOR EQUIPPED
PAGE 29.....................................DIRECT DRIVE- MOTORIZED
PAGE 30.....................................FUNCTION ENHANCED PRODUCTS
PAGE 31.....................................ULTRA-HIGH VACUUM
PAGE 32.....................................EXPERT FEEDTHROUGH REPAIR
Page 33......................................FEEDTHROUGH INFORMATION
Page 34......................................PRODUCT CROSS REFERENCE
INDEX OF CONTENTS
Magnetic fluid sealing for vacuum and other environments
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
Rigaku Magnetic SealHandling Precautions
1. When you operate the Magnetic seal unit for the first time, or when it has not been turned for two
weeks or more, we suggest that it should be conditioned by rotating the shaft 20 or more turns
before exposure to vacuum. As the way of drive, you don't mind either the hand-operating or the
motor drive. This is because of reducing the pressure rise with spike-shaped when it starts, as
there is a possibility that it will happen after stop and leaving for the long time.
2. Do not use any solvents around the Magnetic seal unit! Solvents such as alcohol, acetone, paint
thinner, etc., can attack the fluid sealing element in the Magnetic seal unit, causing it to leak. If
cleaning of the seal housing or shaft is necessary, use a small amount of alcohol moistening a
cloth, taking care to prevent any excess solvent from entering the Magnetic seal unit.
3. Do not use solvents or soap solution for leak testing! Using solvent or soap solution leak testing
methods will destroy the fluid sealing element in the Magnetic seal unit, causing it to leak! Always
leak test with a Helium Mass Spectrometer leak tester for best results.
4. Do not apply a pressure in excess of the Magnetic seal pressure rating! Unless otherwise
specified, the maximum pressure difference across the Magnetic seal unit is 1 kg/cm2, or 2.5
atmospheres, or 36.75 PSI.
5. A pressure rise (or 'pressure spike' or 'burp') might occur when first starting shaft rotation after
evacuation. To minimize this condition, rotate the shaft prior to evacuation as per 1 above, and
continue to rotate it during evacuation at about 5-10 RPM for at least 5 minutes.
6. Install the Magnetic seal unit in the correct direction! Note which side is intended for vacuum, and
which side is intended for atmosphere during installation. Do not reverse them, or the unit could be
damaged.
7. Do not lubricate the bearings! They are sealed and lubricated for the life of the unit. Lubricating oil
or grease could damage the fluid seal element, causing it to leak.
8. Protect the Magnetic seal from particles! If the unit is to be used where particles of sand, silicon,
heavy vacuum evaporation processes, install a shield to prevent the particles from entering and
damaging the Magnetic seal unit.
9. When the Magnetic seal unit requires overhaul or repairs, please return it to Rigaku. Your Magnetic
seal is a precision vacuum sealing spindle. Disassembling it will damage precision surfaces and
components, possibly rendering it un-repairable.
10. The vacuum sealing surfaces of your Magnetic seal require careful attention. Please do not
scratch any surface where an O-ring must seal. If you can feel a scratch with your fingernail, it will
leak! Do not hammer on or drop the unit. Do not pry unit from your machine with pry bars. Do not
hammer or drop anything on the shaft end, as this will damage the bearings.
Catalog Tips
Features
How to use this catalog
Solid shaft styles Hollow shaft styles
The unique Magnaseal design eliminates the grooved shafts found in competing products.
The stronger, stiffer shafts provide high torque ratings per shaft size and reduced gas bursting
during rotation, especially if side loading is applied. Many models employ larger bearings as
well. Most flanged models embody flanges and housings machined as a single piece for
optimum vacuum integrity and alignment.
These products are manufactured in the USA under Rigaku's US Patent 4,605,233 and other
patents. The balanced multi-magnet design covered by this patent means external magnetic
fields are substantially reduced.
All products are suitable for use at pressures as low as 10-8 torr. Operation at lower pressures
may be feasible (contact Rigaku for application information). Pressure differentials of 2
atmospheres (in either direction) are allowable. Operating temperature must never exceed
100 C; continuous operation above 85 is not recommended. Higher temperatures are
possible with water cooling or special fluid.
FD-Series products provide direct replacements for FFC (Ferrofluidics /Ferrotec Corp.)
products.
To select a feedthrough for a new application, locate the table for the appropriate shaft type
(solid or hollow) and mounting style (through-hole, flanged, or bore mount). Dimensional and
performance information is tabulated and keyed to an outline drawing. For application
engineering assistance or information beyond the scope of the tabulated data, please contact
Rigaku Vacuum Products, Phone: 603-890-6001, Fax: 603-890-6016.
To identify the Magnaseal direct replacement for a Ferrofluidics/Ferrotec Corp. product, locate
the FFC Part Number/Model Number at the bottom of each column of tabulated data or refer
to the Product Cross Reference chart. For FFC products not listed, please contact Rigaku
Vacuum Products.
LSR
BS
CF
F1
Low-profile through-hole mount
Threaded neck nose mount
Conflat flange mount
O-ring seal outside chamber
HS-C
F1-HS-C
-W suffix
Cartridge mount with shaft clamp
Flange mount with shaft clamp
Water-cooled versions
.....
.......
........
........
..........
....
......
F2 O-ring seal inside chamber.......
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
Page 1
ferromagnetic particle
base liquid
surfactant
Vapor pressure - temperature characteristics Viscosity - temperature characteristics
For general vacuum
For general v
acuum
For high-te
mperature active gas (Conventional product) For high-temperature active gas
(Newly developed product)
For active gas
For activ
e gas
Magnetic FluidMagnetic fluid is an unusual fluid in that it is attracted to a magnet. In the 1960s, NASA developed the
magnetic fluid as part of its space programs. Magnetic fluid has three ingredients: ferromagnetic
particles such as magnetite and composite ferrite, surfactant, and a base liquid such as water or oil.
The surfactant coats the 10 nm-dia ferromagnetic particles to avoid coagulation and keep them stably
dispersed in the base liquid, forming a ferromagnetic fluid. Its dispersibility also remains stable in high
magnetic fields.
This photo shows a phenomenon called 'spiking' that occurs when magnetic fluid is placed in a container and a magnet is brought under the container. Magnetic force acting on the surface of the magnetic fluid produces 'spikes', that look like large nails sticking out of the surface.
Spiking phenomenon
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
Page 2
Fig. 1: Conceptual drawing of
magnetic flux distribution
Fig. 2: Test results on magnetic-field resistance
of magnetic rotary seal unit
Magnetic field leakage
Distance (mm)
Occurrence of leakage
External magnetic field (T)
Pre
ssure
(P
a)
Magnetic field
leakage to
the VAC side
(T)
Other manufacturers
other manufacturers
Excellent Magnetic-field Resistance
Rigaku offers a magnetic rotary seal unit featuring high resistance to external
magnetic fields. This feature comes from a magnetic circuit unique to Rigaku
as well as high-energy rare earth magnets.
Magnets are arranged in opposition to each other (SN-NS) to produce the magnetic field distribution
shown in Fig.1. The magnetic flux distribution changes abruptly at the edge of the pole pieces
between S-S and N-N, and magnetic fluid converges towards the center of the magnetic flux (from
both sides). If a magnetic circuit has only one magnet, an ideal convergence cannot be obtained
because the magnetic flux will be dispersed. The magnets have excellent characteristics, such as a
strong resistance to external magnetic field, and a large maximum energy product (BH) in
comparison with conventional ferrite and alnico magnets.
There is very little leakage of magnetic field,
owing to Rigaku's unique magnetic circuitry.
The seal can be used in equipment that is
susceptible to magnetic field leakage, such as
that from an electron beam.
Magnetic field leakage
Page 3
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
Application examples
Vacuum transport robot
Epitaxial systems
Stirrer
Rotating anode
X-ray generator
Vacuum chuck
mechanism
Gas induction
mechanism
Arc discharger for CNT
Etching systemsVacuum furnace
pressurized furnace
Single crystal growth
Ion implanter
Sputtering systems
CVD
Organic EL Display
Processing Equipment
Organic EL Display
Processing Equipment
Semiconductor
Processing Equipment
Semiconductor
Processing Equipment
LCD Processing EquipmentLCD Processing Equipment
etc.etc.
Page 4
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
Rigaku helps to provide a clean vacuum
Magnetic rotary seal unit, developed with Rigaku's own technologies, is the optimum tool
for the introduction of rotary motion into vacuum or differential pressure environments.
magnetic
fluid
Magnetic fluxBearing
Permanent magnetPole piece
www.rigaku.com
Unlike the conventional rubber seal or mechanical seal, the
Rigaku magnetic rotary seal unit employs a magnetic fluid
which fills the gap between the moving shaft and its
stationary housing to act as sealer. Sealing is effected
without friction by the action of a powerful high-energy
magnet. This results in a long, wear-free service life.
Moreover, because of the unique Rigaku magnetic circuit,
very high reliability is attained, allowing a pressure
differential of 202 kPa(30 PSIG). Another benefit of this
unique seal design is near zero leakage: less than
1.3X10-12 Pa.m3/sec (1.3X10-11 std. cc/sec) (Helium). Its
high reliability has already been confirmed in applications
such as Rigaku high-power X-ray generators. The Rigaku
magnetic rotary seal unit serves a broad spectrum of
applications including the latest production equipment for
semiconductors, liquid crystal/plasma FPDs and organic
EL, and sealing of single axis and multi-axial rotary sections
of clean robots.
These magnets are arranged in opposition to each other (NS-SN-NS) to produce powerful magnetic flux patterns in opposing directions. The inner periphery of the pole piece has two knife edges at which the repulsive magnetic flux is concentrated. Consequently, an ideal magnetic circuit is formed to concentrate the magnetic fluid in the seal areas, maintaining the pressure differential across each stage.
This design allows a large gap between the pole piece and the rotary shaft, thereby allowing high-speed shaft rotation, large shaft diameters and a long service life.
Magnetic circuit configuration unique to Rigaku
Clean high vacuum
Wide range of rotation speeds, from low to
high
High reliability with leak-free operation
Long service life resulting from
non-contact sealing
Usable in pressurized, active gas
atmospheres
Concentric or eccentric multi-axial sealing
units available
High transmitted torque, zero backlash
Custom designs are also available to suit
your application
Page 5Tel: 603-890-6001
Page 6
A300S
Materials
Ferrofluid type
Common specification
:
:
:
:
:
:
Max. opr. press. differential
Proof press.
Tested to (PSIG@2000rpm)
Helium leak
Tested to (std. cc/sec)
Bearing lubricant
Vapor press. (Torr)
Bearing lubricant type
Vacuum
37 (PSIG) / 2.5 (ATM)
38
5.00E-9
1.00E-13
Fomblin/Krytox Blend
Either End
:
:
:
:
:
:
:
:
Hydrocarbon
1.00E-10
80
1.00E-8
F-310
:
:
Base oil
Vapor pressure (torr)
Max. opr. temp.
Feedthrough suitable
for operating to (Torr)
Perfluorinated polyether
1.00E-12
100
1.00E-9
Housing
Shaft
17-4 PH SS
17-4 PH SS
SuperseaL Styled Concept
Two opposed-polarity magnets are placed within the rotating shaft and the housing (made of ferromagnetic
material) is an integral part of the magnetic circuit. A number of carefully formed grooves on the surface of the
shaft determine the location of the fluid sealing rings. Because the shaft diameter is larger than the bearing
journals in the region containing the magnets and grooves, there is no loss of strength as a result of using a
grooved shaft.
The magnets are embedded in a matrix of ferromagnetic shaft materials, which acts as a magnetic shunt. The
casual observer may think this would weaken the magnetic field in the fluid seal region, leading to a very weak
seal. In reality, by proper selection of materials and careful design, Riaku SuperseaL feedthroughs are
enginered to have high pressure capacity.
Fewer parts means lower cost and
higher reliability
Only two machined parts: shaft and housing
Economical alternative to o-ring mechanical
feedthrough
Provides better alignment between seal
components
Permits extremely low external magnetic field
because housing is magnetic
Uses no internal static seal (o-ring), thereby
eliminating a potential source of leakage
Benefits of the SUPERSEAL design
The SUPERSEAL design is protected by United States
and international patents.
Base oil
Vapor pressure (torr)
Max. opr. temp. ( )
Feedthrough suitable
for Operating to (Torr)
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
Low Cost
(C )
Housing
Bearing
Shaft
Ring magnetsopposed polarity
Base Plate (Through Hole)
Solid Shaft
Standard Form
Standard Form
Long Form
Long Form
Product No.
Discription
Max. RPM
Torque(lb-in)
A(inch)
B(inch)
C(inch)
D(inch)
E(inch,
2 places)
F(inch)
G(thread)
H(O-ring)
J(end detail)
(2 places)
K(inch)
FFC Part No.
FFC Model No.
10C-8909-B
FD-LSR-
0250-D
15000
50
0.75
0.25
1.68
3.44
0.2500
/0.2495
1.63
0.75-16
2-026
0.03x0.40
flat
50A103236
SB-250-
GN-085
10C-8908-A
FD-LSR-
0250-A
15000
50
0.75
0.25
1.68
3.44
0.2500
/0.2495
1.63
1.00-14
2-026
0.03x0.40
flat
50A103237
SB-250-
AN-086
10C-8909-A
FD-LSR-
0250-C
15000
50
0.75
0.25
2.10
3.85
0.2500
/0.2495
2.25
1.50-12
2-132
0.03x0.40
flat
50A103979
SB-250-
CN-011
10C-8912-A
FD-LSR-
0375-C
10000
160
0.88
0.35
1.30
3.39
0.3750
/0.3745
1.63
1.00-14
2-026
0.04x0.88
flat
50A108664
SB-375-
AN-176
10C-8911-B
FD-LSR-
0375-B
10000
160
0.75
0.25
2.22
3.97
0.3750
/0.3745
2.12
1.50-12
2-132
0.03x0.40
flat
50A103991
SB-375-
CN-103
10C-8908-B
FD-LSR-
0250-B
15000
50
0.75
0.81
2.33
4.64
0.2500
/0.2495
1.62
1.00-14
2-026
0.03x0.40
flat
1.50
50A104445
SB-253-
AN-010
10C-8911-A
FD-LSR-
0375-D
10000
160
0.74
0.81
2.33
4.63
0.3750
/0.3745
1.62
1.00-14
2-026
0.03x0.40
flat
1.62
50A103990
SB-375-
AN-087
0.75" Body 1.00" Body 1.50" Body 1.00" Body 1.50" Body 1.00" Body 1.00" Body
0.250" ShaftModel
0.250" Shaft0.375" Shaft 0.375" Shaft
Nut and Washer Supplied
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
Page 8
D
CB
F
E
A
H
ATMVAC
G
J
A B C
D
E
F
K
H
G
J
ATMVAC
Page 8
Base Plate (through hole)
6.0005.987
2X 10.2
8.1
1.78X29.87
Bearing
Solid MetricShaft
RMS-LSR-06-LC and RMS-LSR-06-LC-F*
RMS-LSR-08-LC and RMS-LSR-08-LC-F*
Product No.
Model
Price
Transmission torque(N-M)
Drag torque(N-M),
Break-away
Drag torque(N-M)
@100rpm / 1000rpm
Fit base plates
Max. no-load RPM
Ferrofluid type
Bearing type
Bearing static load, max (N)
Bearing dynamic load (N)
10C-26101200
RMS-LSR-06-LC
$445
5.65
0.78
.042 / .064
19 to 25mm
5000
A300S
R6
1357
2558
10C-26101202
RMS-LSR-06-LC-F
$495
5.65
.141
.155 / .198
19 to 25mm
2500
F-310
R6
1357
2558
10C-26101000
RMS-LSR-08-LC
$445
18.08
0.78
.042 / .064
19 to 25mm
5000
A300S
R6
1357
2558
10C-26101002
RMS-LSR-08-LC-F
$495
.141
.155 / .198
19 to 25mm
2500
F-310
R6
1357
2558
SuperseaLSuperseaL
Feedthrough usable on thinner baseplates by ordering additional washers: Product No.10C-91081741
mm.xxx=± 0.127.xx=±0.25
mm.xxx=± 0.127.xx=± 0.25
* F Denotes higher temperature fluid
86.1
M26.0 X 1.5
Nut and washer supplied
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
Page 9
18.08
φ
φ
(2 Places)
26.0
5.52 Places
22.421.7
33.0
M26.0 X1.5(Threads)
8.9
3.0
5.4 23.4 VitonO-Ring
41.0Across flats
38.1
φ
φ8.0007.9882 Places
26.07.0
2 Places
22.421.733.0
8.1(Threads)
8.9
3.0 5.4 23.4
O-Ring Viton1.78 X 29.87
41.0
36.0
86.1of mounting nut
Mounting Washer
Across FlatsOf Mounting Nut
Bearing
12,000 7,000 15,000 15,000 12,000 10,000
RMS-BS style RMS-LS styleBoth the BS and LS series are
designed to be compact sealing
systems for easy installation.
washernut
X Y
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
Page 10
Max speed (RPM)
RMS-BS styleModel RMS-LS style
BS (Nose mount) - LS (Base plate through hole)
Product No.
Transmission torque
A (mm)
B (mm)
C (mm)
D (mm)
E (mm)
F (mm)
G
H (mm)
I (mm)
J (mm)
P (mm)
Q (mm)
X (mm)
Y (mm)
O-ring (fluororubber)
Bearing type
Nut U / R (mm)
Washer T / S (mm)
Shaft end shape
a (mm)
b (mm)
c (mm)
BS-5
10C-9020
-G010
1 N-M
5
32
6
12.5
15
16
M8 x 1
-
1.5
-
10
2.1
23.5
22.2
S10
695
15 / 3
16 / 1
K
-
-
-
BS-20
10C-9020
-G040
60 N-m
20
60
34
36
36
54
M40 x 1.5
-
3
-
42
2.7
83
37
S42
6004
54 / 12
54 / 3
M
32
3.5
6
BS-10
10C-9020
-G030
8 N-m
10
52
30
23
23
38
M25 x 1.5
-
3
-
30
2.7
61.5
35
S30
6200
34 / 6
38 / 2
M
20
1.8
3
-0.010-0.022
-0.010-0.022
-0.010-0.022
0-0.2
0-0.2
-0.020-0.041
-0.016-0.034
BS-6
10C-9020
-G020
1.6 N-m
6
42
10
15
15
28
M12 x 1.75
-
2
-
18
2.1
32.5
28
S18
636
22 / 5
28 / 2
L
10
0.5
-
LS-5
10C-9020
-M010
1 N-m
5
26
6
15
15
28
M18 x 1.5
4
1
18
20
2.1
19.3
22.6
S20
695
28 / 5
28 / 2
K
-
-
-
LS-6
10C-9020
-M020
1.6 N-m
6
40
8
15
15
42
M28 x 2
6
3
28
32
2.7
25.5
29
S32
636
42 / 5
42 / 2
L
10
0.5
-
LS-10
10C-9020
-M030
8 N-m
10
44
8
23
23
48
M36 x 1.5
6
3
36
40
2.7
31.5
35
S40
6200
46 / 8
52 / 3
M
20
1.8
3 +0.025 0
+0.025 0
+0.030 0
+0.030 0
-0.013-0.028
-0.013-0.028
LS-12
10C-9020
-M040
13 N-m
12
54
10
30
30
58
M45 x 1.5
6
3
45
50
2.7
42
43
S50
6201
58 / 10
58 / 2
M
20
2.5
4
For the shaft end shape, see Page 33
ATM VACVAC
ATMVAC
ATM
0-0.2
0-0.2
-0.010-0.022
Bearing location
Solid Shaft
15,000 15,000
Nose Mount
SuperseaLSuperseaLSuperseaLSolid Shaft
FD-BS-0250-LC and FD-BS-0250-LC-F*
10C-99011200
FD-BS-0250-LC
$395
50
4.5 / 6.5
7500
A300S
R4B
150
362
10C-99011202
FD-BS-0250-LC-F
$445
50
16 / 20
3000
F-310
R4B
150
362
Product No.
Model
Price
Transmission torque(lbs-in)
Drag torque(oz-in),
Break-away
Drag torque(oz-in)
@100rpm / 1000rpm
Max. no-load RPM
Ferrofluid type
Bearing type
Bearing static load, max(lbs)
Bearing dynamic load(lbs)
*F denotes Fomblin Fluid for higher temperature usage
8 14.5
(Flat, 2 Places)
(2 Places)
(2 Places)
3.451
0.760 19.30
1.14
0.220.054 1.37
0.25
006.35
0
87.66
2-015Viton O-Ring
7/16-20
0.380[9.65]
1.560[39.62]0.105[2.67]
0.400[10.16] 0.400[10.16]
φ0.87
5[φ22
.23]
φφ
φ0.81
0[φ20
.50]
0.22
0[5.58
]
φ0.71
[φ18
.0]
φ0.54
[φ13
.7]
in [mm].xxx=±.005".xx=±.01"
Thread
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
Page 11
Nose Mount
ATMVAC
G
D
A
φ E
J
CB
φ F
H ATMVAC
MLK
Solid Shaft
Nose mount Nose mount water cooled
Style
Product no.
Model
Max. RPM
Torque(lb-in)
A(inch)
B(inch)
C(inch)
D(inch)
E(inch,
2 places)
F(inch)
G(thread)
H(o-ring)
J(Shaft end)
(2 places)
K(inch)
L(inch)
M(4 places)
FFC part no.
FFC model no.
0.188"Shaft
0.31" Neck
10C-8917-A
FD-BS-0188
15000
7
0.50
0.28
1.30
2.56
0.1875
/0.1870
0.63
5/16-24
2-012
0.03x0.37
flat
50A103971
MB-188-
LN-090
0.250"Shaft
0.44" Neck
10C-8917-B
FD-BS-0250
15000
50
0.75
0.38
1.56
3.44
0.2500
/0.2495
0.75
7/16-20
2-015
0.03x0.40
flat
50A103978
MB-250-
KN-089
0.500"Shaft
10C-8913-B
FD-BS-0500
10000
380
2.49
1.51
3.56
8.81
0.5000
/0.4995
2.87
1-14
2-128
0.125/.070/1.00
KEYWAY(w/d/l)
50A103191
SB-500-
AN-069
0.750"Shaft
10C-8916-A
FD-BS-0750
7000
1400
2.49
1.51
3.56
8.81
0.7500
/0.7495
2.87
1-14
2-128
0.187/.107/1.00
KEYWAY(w/d/l)
50A103193
SB-750-
AN-077
0.500"Shaft
10C-8914-A
FD-BS-0500-W
10000
380
2.49
1.51
3.56
8.81
0.5000
/0.4995
2.87
1-14
2-128
0.125/.070/1.00
KEYWAY(w/d/l)
0.88
1.74
FITTINGS FOR
0.25" OD TUBE
50A103204
SB-500-
AW-072
0.750"Shaft
10C-8916-B
FD-BS-0750-W
7000
1400
2.49
1.51
3.56
8.81
0.7500
/0.7495
2.87
1-14
2-128
0.187/.107/1.00
KEYWAY(w/d/l)
0.89
1.74
FITTINGS FOR
0.25" OD TUBE
50A103206
SB-750-
AW-080
FD-BS style FD-BS-W style
1.00" Neck 1.00" Neck
Nut and washer not supplied
Page 12
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
Solid Shaft
10C-99011400
FD-CF
-0250-LC
$495
50
11
6 / 9
2.75" CF
[email protected] DIA.
2.3120 DIA.
5000
A300S
R6
305
575
FD-CF-0250-LC and FD-CF-0250-LC-F*
FD-CFM-0250-LC and FD-CFM-0250-LC-F*
FD-CF-0375-LC and FD-CF-0375-LC-F*
10C-99011402
FD-CF
-0250-LC-F
$545
50
20
22 / 28
2.75" CF
[email protected] DIA.
2.3120 DIA.
2500
F-310
R6
305
575
10C-99011500
FD-CF
-0375-LC
$495
160
11
6 / 9
2.75" CF
[email protected] DIA.
2.3120 DIA.
5000
A300S
R6
305
575
10C-99011502
FD-CF
-0375-LC-F
$545
160
20
22 / 28
2.75" CF
[email protected] DIA.
2.3120 DIA.
2500
F-310
R6
305
575
SuperseaLSuperseaL
Product No.
Model
Price
Transmission torque(lbs-in)
Drag torque(oz-in),
Break-away
Drag torque(oz-in)
@100rpm / 1000rpm
Flange
Bolt hole dia.
Bolt circle dia.
Max. no-load RPM
Ferrofluid type
Bearing type
Bearing static load, max(lbs)
Bearing dynamic load(lbs)
10C-99011300
FD-CFM
-0250-LC
$445
50
8
4.5 / 6.5
1.33" CF
[email protected] DIA.
1.0620 DIA.
7500
A300S
R4B
150
362
10C-99011302
FD-CFM
-0250-LC-F
$495
50
14.5
4.5 / 6.5
1.33" CF
[email protected] DIA.
1.0620 DIA
3000
A300S
R4B
150
362
* F Denotes higher temperature fluid
2.75’’ CF and 1.33’’ (CFM) Flanges
0.40 [10.2]
0.220 [5.59]
1.33’’ CF Flange
.25
Page 15
±±
φφ
φφ
φ φ
φφ
φφ
φ φ
φ φ
φφ
in [mm].xxx=±.005".xx=±.01"
in [mm].xxx=±.005".xx=±.01"
φ2.73 [69.3]0.87
[22.1]
0.25[6.5]
3.39 [86.1]
0.50 [12.7]
1.39 [35.4]
1.151.11
29.328.2
0.3750
0.3745 9.525
9.512
0.2500
0.2495
6.350
6.337
1.49951.4975
38.08738.037Φ Φ
(Flat,2 Places)
(2 Places)
φ φ
φ φ
[23.4]
0.335 [8.51]
1.39 [35.4]
1.49951.4975
38.08738.037
1.151.11
29.328.2
0.3750
0.3745 9.525
9.512
φφ
Φ Φ
(Flat,2 Places)
0.220 [5.58]
(2 Places)
1.58[40.1]
0.20[5.1]
1.13[28.8]
3.44[87.4]0.28[7.1]
0.40[10.2]
0.2500
6.350
φφ
0.7500
19.05
φφ
φ1.33
[φ33.8]
1.1051.080
28.0728.44
(2 Places)
(2 Places)
Bearing 0.92 [23.4]Bearing
0.50 [12.7]
0.92Bearing
3.39 [86.1]
0.86 [21.8]
2.73 [69.3]
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
CFM CFM
Solid Metric Shaft
10C-26101400
RMS-CF
-06-LC
$555
5.65
0.078
0.042 /0.064
2.75" CF
[email protected] DIA.
58.72 DIA.
5000
A300S
R6
1357
2558
RMS-CF-06-LC and RMS-CF-06-LC-F* RMS-CF-08-LC and RMS-CF-08-LC-F*
10C-26101402
FD-CF
-06-LC-F
$605
5.65
0.141
0.155 / 0.198
2.75" CF
[email protected] DIA.
58.72 DIA.
2500
F-310
R6
1357
2558
10C-26100900
RMS-CF
-08-LC
$555
18.08
0.078
0.042 / 0.064
2.75" CF
[email protected] DIA.
58.72 DIA.
5000
A300S
R6
1357
2558
10C-26100902
RMS-CF
-08-LC-F
$605
18.08
0.141
0.155 / 0.198
2.75" CF
[email protected] DIA.
58.72 DIA.
2500
F-310
R6
1357
2558
SuperseaLSuperseaL
Product No.
Model
Price
Transmission torque(N-M)
Drag torque(N-M),
Break-away
Drag Torque(N-M)
@100rpm / 1000rpm
Flange
Bolt hole dia.
Bolt circle dia.
Max. no-load RPM
Ferrofluid type
Bearing type
Bearing static load, max(N)
Bearing dynamic load(N)
* F Denotes higher temperature fluid
2.75 Inch Conflat Flange
10.2
6.005.987
±±
φφ
φφ
φ φ
φφ
φφ
φ φ
φ φ
φφ
mm.xxx=±.0127.xx=± 0.25
mm.xxx=± 0.127.xx=± 0.25
φ69.3]22.3
6.5
86.1
12.7
1.39 [35.4]
29.228.1
9.525
9.512
6.000
5.987
38.08738.037Φ
(Flat,2 Places)
(2 Places)
φ φ
23.4
8.00
35.4
38.08738.037
29.228.1
. 9.525
9.512
φ
Φ
(Flat,2 Places)
Bearing 23.4Bearing
12.7
6.5Bearing
86.1
21.8
69.3
7.987Φ
φ
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
Coming soon
Metric CFM
Version
Page 16
Solid Shaft
FD-CF FD-CF-W (water cooled)
Product No.
Model
Max. RPM
Torque(lb-in)
A(inch)
B(inch)
C(inch)
D(inch)
E(inch, 2 places)
F(inch)
G(inch)
H(flange)
J(shaft end)
(2 places)
FFC part no.
FFC model no.
10C-8918-A
FD-CFM-0250
15000
50
0.75
0.28
1.75
3.25
0.2500/0.2495
1.33
0.75
1.33" CF
0.03x0.40
flat
50A103915
MB-250-BN-101
10C-8910-A
FD-CF-0250
15000
50
0.75
0.50
2.56
4.06
0.2500/0.2495
2.75
1.50
2.75" CF
0.03x0.40
flat
50A103532
SB-253-BN-026
10C-8912-B
FD-CF-0375
10000
160
0.75
0.50
2.56
4.06
0.3750/0.3745
2.75
1.50
2.75" CF
0.03x0.40
flat
50A103154
SB-375-BN-147
10C-8910-B
FD-CF-0250-W
15000
50
0.75
0.50
2.56
4.06
0.2500/0.2495
2.75
1.50
2.75" CF
0.03x0.40
flat
FITTINGS FOR
0.25"OD TUBE
50A103501
SB-253-BW-148
10C-8913-A
FD-CF-0375-W
10000
160
0.75
0.50
2.56
4.06
0.3750/0.3745
2.75
1.50
2.75" CF
0.03x0.40
flat
FITTINGS FOR
0.25"OD TUBE
50A103912
SB-375-BW-151
FD-CF style FD-CF-W style
1.33" CF 2.75" CF2.75" CF
0.250" ShaftStyle 0.250" Shaft0.375" Shaft 0.375" Shaft
CF Flange
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
Page 17
M(2 places)
ATMVAC
D
A
φ G
C
B
φ E
HM
J
ATMVAC
D
A
φ G
C
B
φ E
H
J
FF
Fittings supplied
Solid Shaft
Product No.
Model
Max. RPM
Torque(lb-in)
A(inch)
B(inch)
C(inch)
D(inch)
E(inch, 2 places)
F(inch)
hole pattern
G(inch)
H(o-ring)
J(end detail, 2 places)
M(2 places)
FFC part no.
FFC model no.
10C-8915-A
FD-F1-0500
10000
380
1.22
0.38
3.56
6.03
0.5000/0.4995
6.00
(4)x0.750 dia on 4.750 dia. BC
2.87
2-234
0.125/0.070/1.00, KEYWAY (w/d/l)
50A103244
SB-500-FN-049
10C-8915-B
FD-F1-0500-W
10000
380
1.22
0.38
3.56
6.03
0.5000/0.4995
6.00
(4)x0.750 dia on 4.750 dia. BC
2.87
2-234
0.125/0.070/1.00, KEYWAY (w/d/l)
FITTING FOR 0.25" OD TUBE
50A103182
SB-500-FW-057
FD-F1 style FD-F1-W style
6.00" o-ring flangeStyle
0.500" Shaft
Other shaft, flange sizes and configurations available. Heavy-duty versions available.
FD-F1-W (water cooled)FD-F1
Flange Mount
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
Page 18
ATMVAC
D
A
φ G
CB
φ E
HM
J
ATMVAC
D
A
φ G
CB
φ E
H
J
F F
Max. speed (RPM) 15,000 12,000 10,000 7,000 6,000 4,000
RMS-F2-Flange styleRMS-F1-Flange styleThe F series is a flange type featuring
high rigidity for heavy load capability.
X Y
X Y
Bearing location
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
Page 19
Model RMS-F1 . RMS-F2 style
Flange Mount
Product No.
Transmission torque
A (mm)
B (mm)
C (mm)
D (mm)
E (mm)
F (mm)
G (mm)
P (mm)
Q (mm)
X (mm)
Y (mm)
O-ring (fluororubber)
Bearing type
Shaft end shape
a (mm)
b (mm)
c (mm)
F1(F2)-5
10C-9020-
J010(K010)
1 N-m
5
26
6
15
15
36
16 (16 )
6- 4.3
PD28
18(18)
2.1
20(20)
22.7(22.7)
S18
695
K
-
-
-
F1(F2)-6
10C-9020-
J020(K020)
1.6 N-m
6
40
8
15
15
52
28(28 )
6- 4.5
PD40(43)
24(30)
2.7
28.5(28.5)
28(28)
S24(S30)
636
L
10
0.5
-
F1(F2)-10
10C-9020-
J030(K030)
8 N-m
10
44
8
23
23
70
36(36 )
6- 6.7
PD58.7
42(42)
2.7
51.5(31.5)
35(35)
S42
6200
M
20
1.8
3
F1(F2)-12
10C-9020-
J040(K040)
13 N-m
12
54
10
40
30
80
40(40 )
6- 7.0
PD65.0
45(45)
2.7
52(42)
43(43)
S45
6201
M
25
2.5
4
F1(F2)-20
10C-9020-
J050(K050)
60 N-m
20
52
10
36
36
114
60(60 )
8- 8.5
PD92.2
70(70)
2.7
51(51)
37(37)
S70
6004
M
32
3.5
6
F1(F2)-30
10C-9020-
J060(K060)
210 N-m
30
68
12
50
50
114
68(68 )
8- 8.5
PD92.2
70(70)
2.7
65.5(65.5)
54(54)
S70
6006
M
35
4
8
F1(F2)-40
10C-9020-
J070(K070)
500 N-m
40
75
15
60
60
140
84(84 )
8- 11
PD115
90(90)
2.7
76(76)
63(63)
S90
6908
M
40
5
12
-0.010-0.022
-0.010-0.022
-0.016-0.034
-0.020-0.041
-0.020-0.041
+0.025 0
+0.030 0
+0.036 0
+0.030 0
+0.043 0
-0.013-0.028
-0.025-0.050
For the shaft end shape, see P33
ATM ATMVAC
ATMVAC
ATM
F1
F2
VAC
VAC
-0.1-0.2
-0.1-0.2
-0.1-0.2
-0.1-0.2
-0.1-0.2
-0.1-0.2
-0.1-0.2
15,000
H
Metric Solid Shaft
Bearing location
RMS-BS-W styleRMS-F1-W styleThis series is designed for safe
operation in high temperature
environments. It also minimizes heat
generation from bearings during
long-term shaft rotation at high
speeds, resulting in extended service
life.
X Y
washernut
Flange mount Nose mount
Max. speed (RPM) 15,000 12,000 10,000 7,000 10,000 7,000
RMS-BS-W styleModel RMS-F1-W style
Flanged and Nose Mount Water Cooled
Product No.
Transmission torque
A (mm)
B (mm)
C (mm)
D (mm)
E (mm)
F (mm)
G (mm)
H
I (mm)
J
P (mm)
Q (mm)
X (mm)
Y (mm)
Shaft End Shape
a (mm)
b (mm)
c (mm)
O-ring (fluororubber)
Bearing type
Nut U / R (mm)
Washer T / S (mm)
F1-6-W
10C-9020
-L020
1.6 N-m
6
48
6
30
20
60
36
4- 5.4 PD50
15
2-Rc1/8
30
2.7
37.5
40
L
10
0.5
-
S30
636
-
-
F1-10-W
10C-9020
-L030
8.0 N-m
10
62
8
50
50
70
46
6- 6.7 PD58.7
18
2-Rc1/8
40
5.0
59
52.5
M
20
1.8
3
V40
6200
-
-
F1-12-W
10C-9020
-L040
13 N-m
12
82
8
71
37
88
60
4- 6.5 PD74
21
2-Rc1/8
40
5.0
83.5
67.5
M
30
2.5
4
V40
6301
-
-
F1-20-W
10C-9020
-L050
60 N-m
20
78
10
59
36
114
62
8- 8.5 PD92.2
24
2-Rc1/8
70
5.0
74
63
M
32
3.5
6
V70
6004
-
-
BS-12-W
10C-9020
-H010
13 N-m
12
90
38
33
38
-
60
M25 x 1.5
29
2-Rc1/8
40
5.0
83.5
67.5
M
30
2.5
4
V40
6301
60 / 6
60 / 2
BS-20-W
10C-9020
-H020
60 N-m
20
90
38
36
36
-
62
M40 x 1.5
32
2-Rc1/8
50
4.1
85
69
M
32
3.5
6
G50
6004
54 / 12
54 / 3
-0.016-0.034
-0.010-0.022
-0.020-0.041
-0.016-0.034
-0.020-0.041
+0.030 0
+0.030 0
+0.030 0
+0.030 0
+0.030 0
-0.013-0.028
For the shaft end shape, see Page 33Fittings for connecting cooling water pipe are provided
ATM ATMVAC
ATMVAC
VAC
1 l/min
300 kPa
:
:
Flow rate
Water pressure
Cooling water
Metric Solid Shaft
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.comPage 20
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
Page 21
Hollow Shaft
Nominal
Recommended
Product No.
Model
Max. RPM
A(inch)
B(inch)
C(inch)
D(inch)
E(inch)
F(o-ring)
G(o-ring)
FFC part no.
FFC model no.
0.5
0.501 / 0.498
10C-8925-A
FD-HS-0500-C
6000
0.502 / 0.503
1.998 / 1.997
2.750
3.209
0.03
2-032
2-014
50A103318
SC-500-C
1.0
1.001 / 0.998
10C-8925-B
FD-HS-1000-C
4500
1.002 / 1.003
2.623 / 2.622
2.750
3.339
0.03
2-037
2-022
50A103319
SC-1000-C
1.5
1.501 / 1.498
10C-8925-C
FD-HS-1500-C
3000
1.502 / 1.503
3.248 / 3.247
3.000
3.65
0.03
2-041
2-029
50A103320
SC-1500-C
2.0
2.001 / 1.998
10C-8925-D
FD-HS-2000-C
2500
2.002 / 2.003
3.748 / 3.747
3.250
3.966
0.03
2-153
2-033
50A103321
SC-2000-C
3.0
3.001 / 2.998
10C-8925-E
FD-HS-3000-C
1800
3.002 / 3.003
5.248 / 5.247
3.625
4.464
0.03
2-159
2-151
50A103322
SC-3000-C
For use with shaft sizes indicated
Cartridge mount w/clamp
Cartridge Mount
D
E C
F
φ B
GG
F
φ A
CLAMP
ATMVAC
RMS-HS-C (clamp) cartridge RMS-HS cartridgeThe hollow shaft type is suited for
applications that require the use of a
nonmagnetic shaft or a shaft having a
special shape. In this case, a magnetic
sleeve is provided on the outside of the
shaft to compose the sealing section.
Versions with clamp are also available.
This compact sealing system allows
the customer to configure his shaft for
a wide range of application.
4,500 3,600 3,000 3,000 2,500 1,800
Product no.
ModelRMS-HS style
Cartridge Mount
Product No.
A (mm)
B (mm)
C (mm)
D (mm)
E (mm)
J (mm)
K (mm)
L (mm)
P (mm)
Q (mm)
X (mm)
Y (mm)
Bearing type
HS-10
10C-9020
-A010
10
40
50
7.5
2.7
17
7.5
2.1
24
2.7
10
31
S24
S10
S36
16003
10C-9020
-B010
36
12
HS-12
10C-9020
-A020
12
40
50
7.5
2.7
17
7.5
2.1
24
2.7
10
31
S24
S12
S36
16003
10C-9020
-B020
38
12
HS-20
10C-9020
-A030
20
60
64
9
2.7
28
10
2.1
44
2.7
11
42
S44
S20
S56
60 / 28
10C-9020
-B030
48
15
HS-24
10C-9020
-A040
24
63
64
9
2.7
30
9
2.7
46
2.7
12.5
41
S46
S24
S60
6006
10C-9020
-B040
52
15
HS-32
10C-9020
-A050
32
73
64
9
2.7
40
9
2.7
50
2.7
13
40
S50
S32
S70
6908
10C-9020
-B050
58
15
HS-38
10C-9020
-A060
38
83
64
9
2.7
50
9
2.7
60
2.7
13
40
S60
S38
S80
6910
10C-9020
-B060
66
15
HS-40
10C-9020
-A070
40
90
64
9
2.7
50
9
2.7
60
2.7
13
40
S60
S40
S85
6910
10C-9020
-B070
68
15
HS-50
10C-9020
-A080
50
95
82
10
2.7
60
10
2.7
80
2.7
15.5
56
S80
S50
S90
6912
10C-9020
-B080
86
18
HS-75
10C-9020
-A090
75
126
92
10
2.7
90
10
2.7
100
2.7
16.5
64.5
S100
S75
S120
6818
10C-9020
-B090
118
21
-0.009-0.025
-0.009-0.025
-0.010-0.029
-0.010-0.029
-0.010-0.029
-0.012-0.034
-0.012-0.034
-0.012-0.034
-0.014-0.039
+0.015 0
+0.018 0
+0.021 0
+0.021 0
+0.025 0
+0.025 0
+0.025 0
+0.025 0
+0.030 0
If shaft clamping is required, add "-C" at the end of the model no.
ATM ATMVAC
ATMVAC
VAC
X Y
Flange
Inner (2 pcs)
Outer (2 pcs)
a (mm)
b (mm)
O-ring
C series
Metric Hollow Shaft
Bearing location
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
Page 22
Max. speed (RPM) 6,000 6,000 4,500
Hollow Shaft
FD-F1-HS-W (water cooled)FD-F1-HS
Nominal
Recommended
Product No.
Model
Max. RPM
A(inch)
B(inch)
hole pattern
C(inch)
D(inch)
E(inch)
F(inch)
G(inch)
H(O-ring)
J(O-ring)
FFC part no.
FFC model no.
0.5
0.501 / 0.498
10C-8926-A
FD-F1-HS-0500-C
6000
0.502 / 0.503
6.00
(4)x0.75 dia
on 4.750 B.C.
2.75
3.215
0.03
0.38
2.75
2-238
2-014
50A103358
SC-500-FC
10C-8927-A
FD-F1-HS-
0500-W-C
See above
FITTING FOR
0.25" OD TUBE
50A105395
SC-500-FWC
1.0
1.001 / 0.998
10C-8926-B
FD-F1-HS-1000-C
4500
1.002 / 1.0003
7.00
(4)x0.75 dia
on 5.500 B.C.
2.75
3.339
0.03
0.38
3.00
2-244
2-022
50A103359
SC-1000-FC
10C-8927-B
FD-F1-HS-
1000-W-C
See above
FITTING FOR
0.25" OD TUBE
50A105396
SC-1000-FWC
1.5
1.501 / 1.498
10C-8926-C
FD-F1-HS-1500-C
3000
1.502 / 1.503
7.00
(4)x0.75 dia
on 5.500 B.C.
3.00
3.65
0.03
0.38
3.75
2-244
2-029
50A103360
SC-1500-FC
2.0
2.001 / 1.998
10C-8926-D
FD-F1-HS-2000-C
2500
2.002 / 2.003
7.00
(4)x0.75 dia
on 5.500 B.C.
3.25
3.966
0.03
0.38
4.18
2-244
2-033
50A103361
SC-2000-FC
3.0
3.001 / 2.998
10C-8926-E
FD-F1-HS-3000-C
1800
3.002 / 3.003
10.00
(8)x0.75 dia
on 8.500 B.C.
3.87
4.717
0.03
0.62
5.87
2-262
2-151
50A103362
SC-3000-FC
10C-8927-C
FD-F1-HS-
1500-W-C
See above
FITTING FOR
0.25" OD TUBE
50A105354
SC-1500-FWC
10C-8927-D
FD-F1-HS-
2000-W-C
See above
FITTED FOR
0.25" OD TUBE
50A103921
SC-2000-FWC
10C-8927-E
FD-F1-HS-
3000-W-C
See above
FITTING FOR
0.25" OD TUBE
50A105397
SC-3000-FWC
For use with shaft sizes indicated
Flange Mount
Tel: 603-890-6001 Page 23 www.rigaku.com
ATMVAC
D
φ G
C
φ B
FE
H
J J
φ A
CLAMP
M
ATMVAC
D
φ G
C
φ B
FE
H
J J
φ A
CLAMP
Model
M(2 places)
A....J
FFC part no.
FFC model no.
A flange is provided for the RMS-HS
series to facilitate application
mounting.
RMS-F1-HS w/pilot mount RMS-F1-HS
RMS-F1-HS-C (Clamp)
RMS-F1-HS style
Flange Mount
If shaft clamping is required, add "-C" at the end of the model no.
ATM ATMVAC
ATMVAC
VAC
ATMVAC
F1-HS-12
10C-9020
-C020
12
-
50
-
8
70
42
6- 6.7
PD 59.8
17
7.5
2.1
42
2.7
10
31
S42
S12
16003
10C-9020
-D020
38
15
Model
Flange
Inner (2 pcs)
a (mm)
b (mm)
O-ring
C series
Product No.
A (mm)
B (mm)
C (mm)
D (mm)
E (mm)
F (mm)
G (mm)
H
J (mm)
K (mm)
L (mm)
P (mm)
Q (mm)
X (mm)
Y (mm)
Bearing type
Product no.
-0.010-0.029
-0.010-0.029
F1-HS-20
10C-9020
-C030
20
62
64
10
10
106
62
6- 7
PD 90
28
10
2.1
70
2.7
11
42
S70
S20
60 / 28
10C-9020
-D030
48
15
F1-HS-24
10C-9020
-C040
24
63
64
10
10
106
63
6- 7
PD 90
30
9
2.7
70
2.7
12.5
41
S70
S24
6006
10C-9020
-D040
52
15
F1-HS-26
10C-9020
-C050
26
70
64
10
10
120
70
6- 9
PD 100
32
9
2.7
75
4.1
13.5
39
G75
S26
60 / 32
10C-9020
-D050
52
15
F1-HS-32
10C-9020
-C060
32
73
64
10
10
130
73
6- 9
PD 110
40
9
2.7
85
4.1
13
40
G85
S32
6908
10C-9020
-D060
58
15
F1-HS-75
10C-9020
-C100
75
126
92
10
15
180
126
6- 11
PD 160
90
10
2.7
135
2.7
16.5
64
S135
S75
6818
10C-9020
-D100
118
21
F1-HS-38
10C-9020
-C070
38
83
64
10
10
136
83
6- 9
PD 114
50
9
2.7
90
2.7
13
40
S90
S38
6910
10C-9020
-D070
66
15
F1-HS-40
10C-9020
-C080
40
83
64
10
10
136
83
6- 9
PD 114
50
9
2.7
90
2.7
13
40
S90
S40
6910
10C-9020
-D080
68
15
F1-HS-50
10C-9020
-C090
50
95
82
10
10
140
95
6- 9
PD 124
60
10
2.7
100
2.7
15.5
56
S100
S50
6912
10C-9020
-D090
86
18
X Y
+0.018 0
+0.018 0
+0.021 0
-0.010-0.029
-0.012-0.034
-0.014-0.039
-0.010-0.029
+0.021 0
-0.036-0.071
-0.036-0.071
+0.025 0
+0.025 0
+0.025 0
+0.025 0
+0.030 0
+0.025 0
+0.021 0
F1-HS-10
10C-9020
-C010
10
-
50
-
8
70
42
6- 6.7
PD 59.8
17
7.5
2.1
42
2.7
10
31
S42
S10
16003
10C-9020
-D010
38
12
Bearing location
Metric Hollow Shaft
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
Page 24
Bearing Location
Water-cooled type is available even
for the hollow shaft types.
1L/min
300 kPa
:
:
Flow rate
Water pressure
Cooling water
Metric Hollow Shaft
RMS-F1-HS-W w/pilot mount RMS-F1-HS-W
RMS-F1-HS-W-C (clamp)
RMS-F1-HS-W style
Flange Mount Water Cooled
If shaft clamping is required, add "-C" at the end of the model no.Fittings for connecting cooling water are provided.
ATM ATMVAC
ATMVAC
VAC
ATMVAC
F1-HS-10-W
10C-9020
-E010
10
-
70
-
8
84
52
6- 6.5
PD 70
17
7 / 2.1
19 / -
50
2.7
2-Rc1/8
9 / 51.5
S50
S10
16003
10C-9020
-F010
36
12
F1-HS-12-W
10C-9020
-E020
12
-
70
-
8
84
52
6- 6.5
PD 70
17
7 / 2.1
19 / -
50
2.7
2-Rc1/8
9 / 51.5
S50
S12
16003
10C-9020
-F020
38
12
F1-HS-20-W
10C-9020
-E030
20
64
105
10
10
116
64
4- 9
PD 96
28
11 / 2.1
18 / -
70
4.1
2-Rc1/8
13 / 79
G70
S20
60 / 28
10C-9020
-F030
48
15
F1-HS-24-W
10C-9020
-E040
24
70
105
10
10
120
76
4- 9
PD 96
30
10 / 2.7
16 / 38
75
4.1
4-Rc1/8
10.5 / 84
G75
S24
6006
10C-9020
-F040
52
15
F1-HS-26-W
10C-9020
-E050
26
70
116
10
10
130
76
4- 9
PD 110
32
10 / 2.7
20 / 40
85
4.1
4-Rc1/8
14.5 / 90
G85
S26
60 / 32
10C-9020
-F050
52
15
F1-HS-32-W
10C-9020
-E060
32
73
116
10
10
130
80
6- 9
PD 110
40
10 / 2.7
20 / 38
85
4.1
4-Rc1/8
12 / 92
G85
S32
6908
10C-9020
-F060
58
15
F1-HS-38-W
10C-9020
-E070
38
-
102
-
10
135
90
6- 8.5
PD 114
50
10 / 2.7
23 / 37
80
4.1
4-Rc1/8
13 / 77
G80
S38
6910
10C-9020
-F070
66
15
F1-HS-40-W
10C-9020
-E080
40
-
102
-
10
135
90
6- 8.5
PD 114
50
10 / 2.7
23 / 3
80
4.1
4-Rc1/8
13 / 77
G80
S40
6910
10C-9020
-F080
68
18
F1-HS-50-W
10C-9020
-E090
50
105
110
10
10
155
105
6- 9
PD 135
60
14 / 2.7
18 / 38
110
4.1
4-Rc1/8
15.5 / 83
G110
S50
6912
10C-9020
-F090
86
18
F1-HS-75-W
10C-9020
-E100
75
130
110
10
12
178
130
6- 9
PD 160
90
10 / 2.7
17 / 36
135
4.1
4-Rc1/8
15.5 / 83
G135
S75
6818
10C-9020
-F100
118
21
Model
Flange
Innner (2pcs)
a (mm)
b (mm)
O-ring
C series
Product no.
A (mm)
B (mm)
C (mm)
D (mm)
E (mm)
F (mm)
G (mm)
H
J (mm)
K / L (mm)
M / N (mm)
P (mm)
Q (mm)
V
X / Y (mm)
Bearing type
-0.010-0.029
-0.010-0.029
X Y
+0.015 0
+0.018 0
+0.021 0
-0.010-0.029
-0.010-0.029
+0.021 0
-0.012-0.034
+0.025 0
+0.025 0
+0.025 0
-0.014-0.039
+0.030 0
+0.025 0
+0.021 0
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
Page 25
Max. Speed (RPM) 6,000 6,000 6,000 4,000 4,000 3,600 3,000 3,000 2,500 1,800
Product no.
Solid Shaft Cantilevered* Type
Specifications:
Vacuum integrity
Atmosphere
Bearing mechanism
10-6 Pa
(pressure differential 250 kPa)
For vacuum, inert gas, active gas
Atmosphere side
(cantilever bearing system)
Prevention of dust generated from the
bearing at vacuum side
High speed rotation
Long service life
The cantilever type has the above features
and is available with either solid or hollow
shafts.
Example of F1-20-W (20 mm-dia shaft)
(with labyrinth)
Consult us on diameter, rpm, and installation
method (flange method).
VAC
VAC
ATM
ATM
Various functions may be achieved based on the standard items. Shafts, locating bosses, and bellows can be added to customize the Rigaku sealing system to your application.
Flange Mount
*The cantilevered design isolates both bearings from the process
Bearing location
Bearing location
Custom-designed
Products
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
Page 26
Clean/VacuumMagnetic Rotary Seal for Robot
Multiaxial seals
With bellows
Dustproof seals (exclusion seals)
Application:
Specification:
For carriage
Vacuum 10-6 Pa
Application:
Specification:
Application:
For rectilinear stroke and rotation
Stroke of 10 mm or more
For protection from airborne dust
VAC ATM
VAC ATM
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.comPage 27
Large-diameter hollow shaft type
Motor Equipped Models
Model No.
Seal section
Power supply
Motor
Rated torque (N.m)
Maximum torque (N.m)
Rated revolutions (rpm)
Maximum revolutions (rpm)
Motor output (W)Vacuum integrity (Pa)
RMS-F1M-20-W
Cantilever type
Single-phase 100 V
AC servo
0.6
1.9
3000
5000
200
10-6
Model No.
RMS-F1-M4501-8-W
RMS-F1-M4503-8-W
RMS-F1-M4509-14-W
RMS-F1-M4514-19-W
Output
30W
100W
400W
800W
Output axial
diameter
8
8
14
19
Low vibration
Compactness
Long service life
Specifications
Atmosphere
Pressure range
Rotation speed
Rotation axis
Seal type
N2, O2 or Inert gas
From atmospheric pressure through 10-6 Pa
Up to 2000 rpm
Hollow shaft 75 or more
Twin seal
A hollow shaft direct center drive achieves
the following:
Contact Rigaku for special specifications
such as axial diameter.
Direct Drive
These models contribute to vibration reduction and make the equipment smaller.
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.comPage 28
Coupling packages
Feedthrough, adapter, and coupling
Nema Nema
Starting at $149.00
Adapter-only available for
17-34 NEMA-flanged motors
Packages available
starting at $639.00
Feedthrough adapter only shown
Feedthrough, adapter, and coupling shownFeedthrough, adapter, and coupling shown
Motorized Feedthroughs
Direct Drive
Plug & Run from $1,250.00
Plug and Run
5000 RPM Maximum Speed
NEMA-Flanged Motors
3-40 lbs-in net torque available
Adapter packages available
3/8” Feedthrough with servomotor option shown
NEMA-flanged motors
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.comPage 29
Function Enhanced Products
High pressure type
With a purge port
Gas induction type (vacuum chuck/union)
Application:
Specification:
Sealing of high pressure container, etc.
Pressure differential 350 kPa,
revolution speed 3000 rpm
Application:
Specification:
Prevention of contamination with gas or dust particles
10-4 Pa
Pressure side
VAC ATM
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.comPage 30
Ultra-High Vacuum
An example of an ultra-high vacuum system with the magnetic rotary seal RMS series
Pressure measurement result
Rigaku has developed a magnetic rotary seal unit
featuring a unique structural system (Japanese
patent no.3006780) as a rotary feedthrough
system for ultra-high vacuum.
The evacuation of an interstage port keeps oil mist
and microbubbles of magnetic fluid base liquid
from entering the vacuum side, preventing the
contamination of the vacuum. The chamber
remains in an ultra-high vacuum state as a result
of differential pumping through an orifice. High
torque can be transmitted with this unit.
Ultra-high vacuum (up to 10-8 Pa) is achieved by
an orifice effect and the adoption of differential
pumping that prevents base liquid mist from
entering the ultra-high vacuum side
Ultra High vacuum levels are attainable
High rpm is possible
Specifications
Ultimate pressure
Temperature range
Rotation speed
Evacuation system
up to 10-8 Pa
0 to 80
100 to 700 rpm
Differential pumping method
System diagram
VacuumChamber
Magnetic rotary seal unit
TMP
RP
Vacuum gauge on an ultra-high vacuum side
Vacuum gauge on a differential pumping side
The system has the following features:
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.comPage 31
Baking temp. :220Measured at 300 rpm
Pressure [Pa]
Time [hour]
o C
Omni-Lev Model OL-1 Specifications Operational Environment
Environment Parameter DescriptionVacuum Level <10E-9 Torr (10E-7 Pa)Leakage rate <10E-11 Std CC / Sec (T-L/Sec)
High vacuum
Zero-outgassing No ferrofluids, resins, or oils used in sealing or bearing.Electropolishing available.Metal sealed flanges (CF or metal sealing systems) available.
High pressure Pressure Max 74 PSIG (5 Bar)
Temperature Operating temperature Max 180 degrees C.
Low temperature Operation of actuator unaffected by low temperatures but heat from the actuator mayinterfere with cryogenic environments.
Liquid Any non-corrosive liquid.
Corrosive gas Dry Hcl, HNO3, etc. Suitable for any environment compatible with stainless steel.
Clean Zero-ParticleGeneration
No Mechanical contact; Electropolishing available.
Performance Specifications Torque vs. speed Parameter Design Value
Input voltage Line voltage: 110 AC 50/60 Hz# of control axes 5 axis electromagnetic bearingsRotation speed Max. 600 rpm (at no-load)Rotation Torque Max. 1N-m (10.2 kgf-cm)Axially load Max. 110 lbs (490N or 50 kgf)Axis runout 0.0002” max (5 microns max)Resolution 4.3°/pulse (0.72°/pulse Avail.)
External Dimensions Internal Dimensions Operational Schematic
1:Shaft 2:Electromagnet 3:Flange 4: Housing
Magnetic fluid sealing for vacuum and other environments
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
Expert Feedthrough Repairs
Rigaku Vacuum Product feedthroughs are manufactured to consistently provide reliable service in all applications where rotary motion access in a vacuum environment is needed. Rigaku pays great attention to detail during the engineering and
Even the best engineered and built products eventually wear out and require service. When this occurs, Rigaku Vacuum Products, exp erienced repair gr oup is standing by to ensure the repair/rebuilding process is performed, expertly, in a timely fashion. In most cases the parts needed are in our vast inventory. We pride ourselves in precision and timely turn around of all Rigaku andRigaku is determined to provide the ultimate service and offers the best warranty in the industry on all repairs/rebuilds.
We also repair higher level assemblies
Feedthrough before rebuild Feedthrough after complete rebuild
Page 32
Call (603-890-6001, fax (603)-890-6016, or email: [email protected] today
manufacturing of our feedthroughs.
Non-Rigaku product repairs.
Common specifications
Shaft end shape
Model
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
FEEDTHROUGH INFORMATION
Active gas/cantilevered design
Intregral motor
Coaxial
Flange styles
Page 33
K L
VAC
F1 style
RIGAKU metric sealFlange O-ring location Vac vs Atm
Hollow shaft
Shaft diameter: metric (mm), non-metric (inches)
Water cooling
Clamp
Vacuum, atmosphere in reverse
Special order item
F2 style F1-R style F3 style
VAC VAC VAC VACATM ATM ATM ATM
M
FomblinFluid (high temp)
Shaft diameter: metric (mm), non-metric (inches)
Special order item
Vacuum integrity
Pressure differential
Operating temp. range
Leak rate
Atmosphere
Standard accessories
The shaft is held with bearings at both ends of the housing. This series offers large transmission torque, no backlash, and high-precision rotation. The bearings on the vacuum side are treated with special grease suitable for use in an extremely high vacuum to assure a clean vacuum system.
10-6Pa
250kPa
0 to 100
<1.3X10-12Pa.m3/sec(He)
For vacuum, inert gas, active gas
O-rings, washers and nuts
(BS,LS series)
Case section : SUS303
Shaft : SUS 630
Pole piece : SUS 630
Bearing lubrication:
Magnetic fluid base oil
Vac side : High-vacuum grease
Atm side : Grease with anti-corrosive agent
Standard : Alkyl naphthalene
For active gas : perfluoro-polyether
For high heat resistance : perfluoro-polyether
:
:
:
:
:
:
Materials
RMS-F1-HS-20-W-F-A-M-CX-C-R-S
Water cooling
RMS-F1-HS-20-W-F-A-M-CX-C-R-S
Standard series
Product Cross Reference
Ferrofluidics/Ferrotec to Rigaku
Ferrofluidics/Ferrotec Corp.
Rigaku
Prod. No. Model
Ferrofluidics/Ferrotec Corp.
Rigaku
P/N
Note 1Model Prod. No. ModelModel
P/N
Note 1
= includes Delrin Shaft Sleeve for electrical isolation
Solid Shaft Models
Heavy-Duty Cantilevered Types, Solid Shaft
103971
103915
103978
103237
103982
103236
103979
104445
103532
103501
103990
108664
103154
103912
103991
103994
106063
103191
103204
103909
103244
103182
103193
103206
103904
104259
103328
MB-188-L-N-090
MB-250-B-N-089
MB-250-K-N-101
SB-250-A-N-086
SB-250-E-N-121(sloan)
SB-250-G-N-085
SB-252-C-N-011
SB-253-A-N-010
SB-253-B-N-026
SB-253-B-W-148
SB-375-A-N-087
SB-375-A-N-176
SB-375-B-N-147
SB-375-B-W-151
SB-375-C-N-103
SB-375-E-N-150(MRC)
SB-10MM-KF40(Balzers)
SB-500-A-N-069
SB-500-A-W-072
SB-500-B-N-012
SB-500-F-N-049
SB-500-F-W-057
SB-750-A-N-077
SB-750-A-W-080
HDSB-750-F-W-134
HDSB-1000-F-W-135
HDSB-1687-F-W-136
10C-8917-A
10C-8918-A
10C-8917-B
10C-8908-A
10C-8920-B
10C-8909-B
10C-8909-A
10C-8908-B
10C-8910-A
10C-8910-B
10C-8911-A
10C-8912-A
10C-8912-B
10C-8913-A
10C-8911-B
10C-8921-A
10C-8922-A
10C-8913-B
10C-8914-A
10C-8914-B
10C-8915-A
10C-8915-B
10C-8916-A
10C-8916-B
10C-8919-A
10C-8919-B
10C-8920-A
FD-BS-0188
FD-CFM-0250
FD-BS-0250
FD-LSR-0250-A
FD-LSR-0250-sloan
FD-LSR-0250-D
FD-LSR-0250-C
FD-LSR-0250-B
FD-CF-0250
FD-CF-0250-W
FD-LSR-0375-A
FD-LSR-0375-C
FD-CF-0375
FD-CF-0375-W
FD-CF-0375-B
FD-F1-0375-MRC
FD-KF-0394-Balzers
FD-BS-0500
FD-BS-0500-W
FD-CF-0500
FD-F1-0500
FD-F1-0500-W
FD-BS-0750
FD-BS-0750-W
FD-F1-0750-W
FD-F1-1000-W
FD-F1-1687-W
Hollow Shaft Models
Heavy-Duty Cantileverd Types, Hollow Shaft
Notes
103318
103358
105395
103319
103359
105396
103320
103360
103354
103321
103361
103921
103322
103362
105397
107426
107423
107427
107424
107428
107425
SC-500-C
SC-500-FC
SC-500-FWC
SC-1000-C
SC-1000-FC
SC-1000-FWC
SC-1500-C
SC-1500-FC
SC-1500-FWC
SC-2000-C
SC-2000-FC
SC-2000-FWC
SC-3000-C
SC-3000-FC
SC-3000-FWC
HS-750-F-W-S
HS-1000-F-W
HS-1250-F-W-S
HS-1500-F-W
HS-1500-F-W-S
HS-1750-F-W
10C-8925-A
10C-8926-A
10C-8927-A
10C-8925-B
10C-8926-B
10C-8927-B
10C-8925-C
10C-8926-C
10C-8927-C
10C-8925-D
10C-8926-D
10C-8927-D
10C-8925-E
10C-8926-E
10C-8927-E
10C-8928-D
10C-8928-A
10C-8928-E
10C-8928-B
10C-8928-F
10C-8928-C
FD-HS-0500-C
FD-F1-HS-0500-C
FD-F1-HS-0500-W-C
FD-HS-1000-C
FD-F1-HS-1000-C
FD-F1-HS-1000-W-C
FD-HS-1500-C
FD-F1-HS-1500-C
FD-F1-HS-1500-W-C
FD-HS-2000-C
FD-F1-HS-2000-C
FD-F1-HS-2000-W-C
FD-HS-3000-C
FD-F1-HS-3000-C
FD-F1-HS-3000-W-C
FD-F1-HS-A-0750-E
FD-F1-HS-A-1000
FD-F1-HS-A-1250-E
FD-F1-HS-A-1500
FD-F1-HS-A-1500-E
FD-F1-HS-A-1750
1. Part no. may be preceded with 50 - A, B, C, or D
For products not listed in these tables, please inquire
A wide range of other products and services are availale. If items listed in this catalog are not
suitable for your application, please contact Rigaku Vacuum Products.
*
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
Page 34
Gear transmission Pulley transmission Coupling connection
Vacuum Pressurization Dustproof
Please provide us with the following information when making an inquiry or placing an order.We will provide you with magnetic rotary seal units that are suitable for your application.
What is to be sealed and how high is the pressure?
What is to be sealed:
Temperature around seal section
Structural and mechanical parameters
Additional comments or drawing
Application Requirements for Magnetic Rotary Seal Unit
(1)
(1)
(2)
(1)
(2)
(3)
(4)
Maximum attainable vacuum : _______ Pa Normal working vacuum : _______ Pa
Types of gas : _______________________________________________________
Other seal conditions : ________________________________________________
Pressure difference with respect to the atmosphere side : _______ kPa
Operating temperature range : ______ ______
Normal temperature : ________
Water-cooled Non water-cooled
Diameter for sealing : _______ mm Diameter of shaft : _______ mm
Rotation speed : _______ rpm
Transmission torque : _______ N.m
Shaft connecting :
Load to be applied to the seal unit :
At the housing end in the radial direction _______ N At the axis in the axial direction ______ N
Specifications subject to change without notice.
The performance figures that appear in this catalogue are test results obtained by Rigaku Mechatronics, and we cannot guarantee that
you will always obtain similar results under other conditions.
All trademarks in this catalogue are the property of their respective owners.
Unauthorized usage of descriptions of this catalogue is prohibited.
When you export products featured in this catalogue, please comply with all applicable local laws and regulations pertaining to security
export control.
Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com
Fax: 603-890-6016 Email: [email protected]