marl field-emission scanning electron microscope (fe-sem) current jeol sem is over 20 years old and...

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MARL Field-Emission Scanning Electron Microscope (FE-SEM) • Current JEOL SEM is over 20 years old and has a rated resolution of 4.0 nm • New FEI SEM uses a field-emission gun which provides a rated resolution of 1.2 nm. • The current SEM is routinely pushed to its limit (~50kx), but nanotechnology research demands better characterization tools • The new SEM would enable images to be taken at 150,000x and higher magnifications • It will also afford low voltage and high pressure (up to 20 Torr) modes of operation

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Page 1: MARL Field-Emission Scanning Electron Microscope (FE-SEM) Current JEOL SEM is over 20 years old and has a rated resolution of 4.0 nm New FEI SEM uses a

MARL Field-Emission Scanning Electron Microscope (FE-SEM)

• Current JEOL SEM is over 20 years oldand has a rated resolution of 4.0 nm

• New FEI SEM uses a field-emission gun which provides a rated resolution of 1.2 nm.

• The current SEM is routinely pushed to its limit (~50kx), but nanotechnology research demands better characterization tools

• The new SEM would enable images to be taken at 150,000x and higher magnifications

• It will also afford low voltage and high pressure (up to 20 Torr) modes of operation

Page 2: MARL Field-Emission Scanning Electron Microscope (FE-SEM) Current JEOL SEM is over 20 years old and has a rated resolution of 4.0 nm New FEI SEM uses a

50kxJEOL FEI

Comparison of images from JEOL and FEI SEMs at 50kx

Page 3: MARL Field-Emission Scanning Electron Microscope (FE-SEM) Current JEOL SEM is over 20 years old and has a rated resolution of 4.0 nm New FEI SEM uses a

150kx image from FEI FE-SEM

Page 4: MARL Field-Emission Scanning Electron Microscope (FE-SEM) Current JEOL SEM is over 20 years old and has a rated resolution of 4.0 nm New FEI SEM uses a

50kxJEOL FEI

Comparison of images from JEOL and FEI SEMs at 50kx

Page 5: MARL Field-Emission Scanning Electron Microscope (FE-SEM) Current JEOL SEM is over 20 years old and has a rated resolution of 4.0 nm New FEI SEM uses a

150kx image from new FE-SEM

Page 6: MARL Field-Emission Scanning Electron Microscope (FE-SEM) Current JEOL SEM is over 20 years old and has a rated resolution of 4.0 nm New FEI SEM uses a

Low voltage capability of new FE-SEM

Note the absence of artifacts from gold coating

High voltage with gold coating Low voltage without coating

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