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Istvan Novak Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring Milliohms and PicoHenrys in Power Distribution Networks Istvan Novak SUN Microsystems, Inc. One Network Drive Burlington, MA 01803 [email protected]

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Page 1: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 1

DesignCon, Feb. 2000

Measuring Milliohms and

PicoHenrys in Power Distribution

Networks

Istvan Novak

SUN Microsystems, Inc.

One Network Drive

Burlington, MA 01803

[email protected]

Page 2: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 2

DesignCon, Feb. 2000

Outline

• Introduction

• Two-port VNA impedance measurements

• Low-frequency limitations

• Enhancement with transformer or amplifier

• High-frequency limitations

• Enhancement with ferrite-covered cable

• Measured power-distribution networks

• Resources

• References

Page 3: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 3

DesignCon, Feb. 2000

Requirements in Power Distribution

0.1

1

10

100

1000

1992 1994 1996 1998 2000

Vdd [V]

Power [W]

Current [A]

Frequency[MHz]Ztarget [mohm]

Ltarget [nH]

Page 4: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 4

DesignCon, Feb. 2000

What is a VNA• Tuned sinewave generator

• Directional couplers

• Tracking receiver(s)

Source

Receiver

DUT

Directional coupler

b1 a1

b2

Port1

Port2

01

221

01

111

2

2

|

|

=

=

=

=

a

a

ab

S

ab

S

Page 5: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 5

DesignCon, Feb. 2000

Two-Port Self-Impedance Measurement

Cable and Port2 of VNA: 50 ohmZDUT

Cable and Port1 of VNA: 50 ohm

VS

• S21 instead of S11 is measured

• S21 uncertainty is less

• Zp is in series to 50 ohms instead of ZDUT

Page 6: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 6

DesignCon, Feb. 2000

Two-Port Self-Impedance Reading

First-order calculation:

Assume that

• Lp ~ 0

• ZDUT << Z0

ZDUT

Port1 and Port 2 of VNA: 25 ohm

VS

ZDUT = Z11 = S21* 25 [ohm]

Page 7: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 7

DesignCon, Feb. 2000

Transfer Impedance Measurement

Cable and Port2 of VNA: 50 ohm

DUT

Cable and Port1 of VNA: 50 ohm

VS V1 V2

Page 8: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 8

DesignCon, Feb. 2000

Transfer Impedance Reading

First-order calculation:

Assume that

• Lp ~ 0

• Z11 << Z0

• Z22 << Z0

• Z21 << Z0

Z21 = Z12 = S21* 25 [ohm]

Page 9: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 9

DesignCon, Feb. 2000

S21 Uncertainty• |S21| uncertainty of HP8720D:

<1dB in the |S21| > -60dB range

<3dB in the |S21| > -70dB range

• Impedance uncertainty:

1dB (10%) for ZDUT >

25milliohms

3dB (40%) for ZDUT > 8milliohms

Page 10: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 10

DesignCon, Feb. 2000

Equivalent Circuit of Probes Connection

Lp1 Lp2

Cable and Port2 of VNA: 50 ohmDUT

Cable and Port1 of VNA: 50 ohm

VS V1 V2

Lp1 Lp2

Coax and Port2 of VNA: 50 ohmZ11=ZDUT

Coax and Port1 of VNA: 50 ohm

VS

Self impedance:

Transfer impedance:

Page 11: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 11

DesignCon, Feb. 2000

S21 Conversion to Self Impedance

2121

2

2121

121 1

125

21

12 S

jS

ZZZ

S

ZSZ p

ii −+

∗∗≈+−

=ωτ

Where Z1 = 50+jωLp1

Z2 = 50+jωLp2

τp = Lp/50

Page 12: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 12

DesignCon, Feb. 2000

S21 Conversion to Transfer Impedance

+

+∗

∗+

+∗∗

≈+

+

+

=

2

22

1

112

21

21

2

12121

2

22

1

11

121

11

2501

125

21

11

2

ZZ

ZZ

S

jS

ZZZSZZ

ZZ

ZSZ

p

ji

ωτ

Where Z1 = 50+jωLp1

Z2 = 50+jωLp2

τp = Lp/50

Page 13: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 13

DesignCon, Feb. 2000

Low-Frequency Ground Loop

VNA Port2:50 ohm

ZDUT=0

VNA Port1:50 ohm

VS

Lb1 Lb2Rb1 Rb2

Lc1 Rc1 Rc2 Lc2

Imp. magnitude [ohm]

1.E-04

1.E-03

1.E-02

1.E-01

1.E+02 1.E+03 1.E+04 1.E+05 1.E+06

Frequency [Hz]

Page 14: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 14

DesignCon, Feb. 2000

Ground-Loop DC Error

VNA Port2:50 ohm

ZDUT=0

VNA Port1:50 ohm

VS

Rb1 Rb2

Rc1 Rc2

21_ || bberrorDC RRR =

Page 15: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

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DesignCon, Feb. 2000

Eliminating Ground Loop

Transformer

Differential amplifier

VNA Port2:50 ohm

ZDUT

VNA Port1:50 ohm

VS

Lb1 Lb2Rb1 Rb2

Lc1 Rc1 Rc2 Lc2

1:1

Page 16: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 16

DesignCon, Feb. 2000

Transformer

Phillips core: TX51/32/19-3F3

• Diameter: 52mm

• 2x50 turns

• AWG 20

• bifilar

• SMA female

Page 17: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 17

DesignCon, Feb. 2000

Transformer ImpedanceImpedance magnitude [dBohm]

5.0E+01

7.0E+01

9.0E+01

1.1E+02

1.E+04 1.E+05 1.E+06

Frequency [Hz]

• HP4395B

• HP87512A

• Open secondary

• Lmain=9.5mH

Page 18: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 18

DesignCon, Feb. 2000

Transformer Response (1)Through response [dB]

-1.4E+01

-1.2E+01

-1.0E+01

-8.0E+00

-6.0E+00

-4.0E+00

-2.0E+00

0.0E+00

1.E+02 1.E+03 1.E+04 1.E+05 1.E+06

Frequency [Hz]

• 1:1 transformer

• HP4395B

• 50 ohms terminations

Page 19: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

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DesignCon, Feb. 2000

Transformer Response (2)

S21 [dB]

-4.87E+01

-4.86E+01

-4.85E+01

-4.84E+01

-4.83E+01

1.E+02 1.E+03 1.E+04 1.E+05 1.E+06

Frequency [Hz]

• 1:1 transformer

• HP4395B

• Calibrated with 50 ohms terminations

• 0.1 ohms shunt

Page 20: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 20

DesignCon, Feb. 2000

Calibration Setup

VNA Port2:50 ohm

Calibration withZDUT=0.1-ohm reference

VNA Port1:50 ohm

VS 1:1

Isolationtransformer

50-ohm coax 50-ohm coax

Page 21: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 21

DesignCon, Feb. 2000

Isolation Amplifier

250

4725

25

250

_

+

AD815

+7V

-7V

IN-

IN+

Out

Page 22: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 22

DesignCon, Feb. 2000

Reduced Error Floor by Increased P

S21 [dB]

1.98E+01

1.99E+01

2.00E+01

2.01E+01

2.02E+01

1.E+02 1.E+03 1.E+04 1.E+05 1.E+06 1.E+07 1.E+08

Frequency [Hz]

• Calibration at –5dBm

• HP4395B

• Power changed to +15dBm

Page 23: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 23

DesignCon, Feb. 2000

Residual NoiseImpedance [ohm]

1.E-06

1.E-05

1.E-04

1.E-03

1.E+04 1.E+05 1.E+06

Frequency [Hz]

Page 24: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 24

DesignCon, Feb. 2000

Reading of Shorts

Imp. magnitude [ohm], wire-short, sheet-short

1.E-05

1.E-04

1.E-03

1.E-02

1.E-01

1.E+00

1.E+01

1.E+03 1.E+04 1.E+05 1.E+06

Frequency [Hz]

• Isolation transformer

• HP4395B

Page 25: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 25

DesignCon, Feb. 2000

Measuring Low ESRImpedance magnitude [ohm]

1.E-03

1.E-02

1.E-01

1.E+00

1.E+02 1.E+03 1.E+04 1.E+05 1.E+06Frequency [Hz]

• 1:1 transformer

• HP4395B

• 0.1ohm calibration

• OSCON 1500uF 4V

Page 26: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 26

DesignCon, Feb. 2000

Voltage Regulator Module

• 1.5V VRM

• Output pins connected by copper planes

• SSMB connectors

Page 27: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 27

DesignCon, Feb. 2000

VRM Zout

Impedance magnitude [ohm] power off, power on

1.E-04

1.E-03

1.E-02

1.E-01

1.E+03 1.E+04 1.E+05 1.E+06Frequency [Hz]

• 1.5V VRM

• No external capacitor

Page 28: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 28

DesignCon, Feb. 2000

Limitations at High FrequenciesFinite braid surface transfer impedance

Braid resonancesResidual impedance [ohm]

1.E-06

1.E-05

1.E-04

1.E-03

1.E-02

1.E+05 1.E+06 1.E+07 1.E+08 1.E+09Frequency [Hz]

Plain coax

Coax, 2x4 ferrites

Solution:

Absorption ferrites

Page 29: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 29

DesignCon, Feb. 2000

Ferrite-Covered Cable

Page 30: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 30

DesignCon, Feb. 2000

Reference: Connection to Solid Plane

d=70 mil center-to-center spacing

a=15-mil radius drilled viast=0.6-mil (half ounce)

copper plane

Page 31: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 31

DesignCon, Feb. 2000

Probes and Vias

• Test board with via locations

• SMA-SSMB adaptors

• Probe: SSMB jack with two pins

Page 32: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 32

DesignCon, Feb. 2000

Reading Across Solid Plane

Impedance magnitude [ohm]

1.E-04

1.E-03

1.E-02

1.E-01

1.E+05 1.E+06 1.E+07 1.E+08 1.E+09Frequency [Hz]

• Half-ounce Cu

• 30-mil vias

• 70-mil via spacing

• 0.52 milliohms

• 5.5pH

Page 33: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 33

DesignCon, Feb. 2000

DC Resistance Across Solid Plane

t: thickness

d: separation

a: radii

A B

+

+

+

+

+≈

12

1

12

1ln1

12

2

ta

td

ta

aRAB πσ

Page 34: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 34

DesignCon, Feb. 2000

Combined Impedance of PDN

• VRM

• 2x3”x4” 2-mil planes

• Bulk capacitors

• 90 bypass capacitors

Impedance magnitude [ohm]

1.E-04

1.E-03

1.E-02

1.E-01

1.E+02 1.E+03 1.E+04 1.E+05 1.E+06 1.E+07 1.E+08

Frequency [Hz]

Page 35: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 35

DesignCon, Feb. 2000

Simulated PDN Impedance

Impedance of parallel capacitor banks

1.E-04

1.E-03

1.E-02

1.E-01

1.E-04 1.E-03 1.E-02 1.E-01 1.E+00 1.E+01 1.E+02

Frequency [MHz]

ZcSum

Z_corr

Page 36: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 36

DesignCon, Feb. 2000

Recommended Resources

Hewlett Packard Vector Network Analyzers:

• HP 4395 VNA 10Hz-500MHz

• HP 4396 VNA 100kHz-1.8GHz

• HP87512A DC-2GHz Transmission/Reflection Test Set

• HP 8720D VNA 50MHz-20GHz

Circuit simulator software:

• Avant! HSPICE

Page 37: Measuring Milliohms and PicoHenrys in Power Distribution ...electrical-integrity.com/.../DC00_MeasuringMiliohms... · Measuring milliohms and picohenrys 1 DesignCon, Feb. 2000 Measuring

Istvan NovakMeasuring milliohms and picohenrys 37

DesignCon, Feb. 2000

Conclusions

• Two-port measurements reduce effect of

discontinuities

• Limitation at low frequencies: cable-braid ground loop

• Ground-loop is eliminated by transformer or amplifier

• Limitation at high frequencies: braid leakage and

resonance

• Reliable reading and good correlation to simulations is

achieved in the sub-milliohm range