meeting the challenge for offline smps through improved...

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Meeting the challenge for offline SMPS through improved semiconductor current density Meeting the challenge for offline SMPS Meeting the challenge for offline SMPS through improved semiconductor current through improved semiconductor current density density Jon Mark Hancock Jon Mark Hancock Infineon Technologies NA, Inc. Infineon Technologies NA, Inc. 1730 North First Street 1730 North First Street San Jose, CA. 95112 San Jose, CA. 95112

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Meeting the challenge for offline SMPS through improved semiconductor current

density

Meeting the challenge for offline SMPS Meeting the challenge for offline SMPS through improved semiconductor current through improved semiconductor current

densitydensity

Jon Mark HancockJon Mark HancockInfineon Technologies NA, Inc.Infineon Technologies NA, Inc.

1730 North First Street1730 North First StreetSan Jose, CA. 95112San Jose, CA. 95112

Page 2

IBM Power & Cooling

Symposium 2005

Agenda

The semiconductor challenge for offline SMPSThe semiconductor challenge for offline SMPS

Application example- Interleaved Two Transistor Forward Application example- Interleaved Two Transistor Forward

Structure and development of HV DMOS transistorsStructure and development of HV DMOS transistors

Characteristics of super-junction transistorsCharacteristics of super-junction transistors

Improving HV diodes- merged PN/Schottky SiCImproving HV diodes- merged PN/Schottky SiC

Questions & AnswersQuestions & Answers

Application example- Bridgeless PFC converterApplication example- Bridgeless PFC converter

Page 3

IBM Power & Cooling

Symposium 2005

Requirements for MOSFET’s and Diodes show continuous evolution in expectations

Is the good enough?(considering FOM based on

Ron X Ciss or Coss)

Is the good enough?(considering FOM based on

Ron X Ciss or Coss)

What’s most important?(switching loss improvement, or

surge current at low line?)

What’s most important?(switching loss improvement, or

surge current at low line?)

Page 4

IBM Power & Cooling

Symposium 2005

Near zero power losses

low static power losses• Low on state resistance

• Attractive thermal coefficients

• Low thermal impedance

low dynamic power losses• fast switching speed – ease of drive

• Low energy stored in output capacitance (small area)

• Freedom from charge recombination losses

Lowest possible “Area Specific on state resistance” benefits both major loss mechanisms -

Lower Ron- Smaller chip area –

But it there a downside?

High voltage power switches What should the ideal power switch look like?

Page 5

IBM Power & Cooling

Symposium 2005

Choice of Topologies in often dictated by available power devices and voltage ratings versus Vf

Current FedPush-Pull

com

plex

ity

Phase Shifted Full Bridge

Full Bridge

Half Bridge

Two Transistor Forward

Single Transistor Forward

Resonant Reset Forward

Flyback

Topologies

1 10 100 1000 10000output power, watts

Half Bridge

Dual Interleaved Forward Converter

Server

Page 6

IBM Power & Cooling

Symposium 2005

Characteristics of major SMPS Topologies

HighGood – tap or CD req’dPin/2Vin600 to 5kWZVS Bridge

High2 X F<1Excellent – flexible output configurations

Pin/ Pin/2

Vin X 2, Vin150 to 1kW 600 to 5kW+

CF PP/CF Bridge

High2 X F<1Good – tap or CD req’dPin/2Vin500 to 2kWFull Bridge

Moderate2 X F<1Good- sec tap req’dPin/2Vin50 to 500WHalf Bridge

Moderate2 X F<1Moderate taps req’dPin/22 X Vin+50 to 500WPush-Pull

ModerateF<1N/A (not isolated)PinVin/(1-D) 10 to 100WCuk

High2 X F<0.5Fair-good- no tapsPin/2Vin500 to 2kW+ITTF

ModerateF<0.5Fair-good- no tapsPinVin100 to 800W2T Forward

LowF<0.7ExcellentNo taps required

PinCan be > 2-3X Vin10 to 250WHV 500W+

Resonant Reset Forward

LowF<0.5Fair-goodno taps required

Pin2 X Vin10 to 250W1T Forward

Low-moderateF<0.5Poor/specialized designPinVin+(Np/Ns)*Vout5 to 150WFlyback

Relative Total Cost

Out Ripple Frequency

Duty Cycle

Transformer UtilizationSwitch power

Switch voltage Useful power level

Topology

Page 7

IBM Power & Cooling

Symposium 2005

Where is the main part of RDS[on] in HV MOSFETs? Why is this a problem?

Source Gate

RS*

p+

n-

Drain

Poly-Gate

Repi

RSub

RchRn+Ra

n+

n+SiO2

AL metalization

Drain metalization

substrate

drift regionVDS ≈ 30V

RS* ≈ 7 %Rn+ ≈ 6 %Rch ≈ 28 %Ra ≈ 23 %Repi ≈ 29 %Rsub ≈ 7 %

RDS(on) Analysis

RS* = packaging

RS* ≈ 0.5%Rn+ ≈ 0.5 %Rch ≈ 1.5 %Ra ≈ 0.5 %Repi ≈ 96.5 %Rsub ≈ 0.5 %

VDS ≈ 600V

96.5% of RDS(on) for high voltage standard MOSFET determined by the epitaxial resistance

Conventional epi MOSFETRon /Area ~ V(BR)DSS

2,4...2,6

RDS[ON] is determined by the epitaxial layer-typically 8 mm for 60V MOSFETs,typically 60-70 mm for 600V MOSFETs

Page 8

IBM Power & Cooling

Symposium 2005

Key milestones in planar DMOS Power MOSFET switches development timeline

1st DMOS gen.Lidow, Kinzer

2nd DMOS gen.Chen & Hu, IEEE 1982

SOTA DMOS KobayashiISPSD 2001

Page 9

IBM Power & Cooling

Symposium 2005

Charge compensation principle developed from RESURF structure

RESURF principleAppels, IEDM 19791 p/n pair

Multi-RESURF Coe, US patent 1988> 2 p/n pairs

Compensation deviceDeboy 1998, di Saggio 2000> 100,000 p-columns

Page 10

IBM Power & Cooling

Symposium 2005

Super Junction MOSFETs use charge compensation principle:

Increasing drain voltage forms folded depletion region

When the transistor is turning off, the thin depletion region at low voltage follows the structure of the P=columns, resulting in high output capacitance at VDS < 35 V

Source Gate

Drain

Poly-Gate

Repi

RSub

Ra

n+

n+SiO2

AlSi metalization

Drain metalization

substrate

p+

current ID

n+

Gate spacer

RS*

n-

Rn+ Rch

Depletion region forms with merging of carriers from doping in n+ region and p+

Charge compensation column structure under p-wells in source

Page 11

IBM Power & Cooling

Symposium 2005

VDS = 0 VVDS = 1 VVDS = 5 VVDS = 10 VVDS = 50 VVDS = 100 VVDS = 250 VVDS = 650 V

Visualization of Voltage Potential gradients during turn-off state animationDevice concept

Page 12

IBM Power & Cooling

Symposium 2005

Loss balance example for hard switching- DMOS vssuperjunction MOSFET

Intrinsic switching losses at hard turn-on

dVVVfPV

swon ⋅⋅= ∫max

0dsCA )()(

There is an optimum chip sizeIn each transistor technology for minimum total power dissipation at a given clock frequency

)A()A( 2onrmsstat RIP ⋅=

Conduction losses

Page 13

IBM Power & Cooling

Symposium 2005

Six years later, Super-junction moves from 14 µm to 7.5 µm cell pitch to lower area specific Ron

Page 14

IBM Power & Cooling

Symposium 2005

Coss as a function of VDS for C3 and C5 generation CoolMOS™ with 380 mΩ on state resistance

Page 15

IBM Power & Cooling

Symposium 2005

Improved area specific Ron leads to lower output capacitance and switching loss

P-column form large folded capacitor at low voltage

Smaller cell pitch needed to increase doping levels in current path and charge compensation structure

High capacitance at low voltage increases energy storage, but also acts as non-linear turn-off snubber

Capacitance falls to very low levels at high voltage (over 100V), contributing to low turn-on switching loss

Page 16

IBM Power & Cooling

Symposium 2005

Non-linear output capacitance acts as dynamicsnubber with low output Ceff reduces losses

Switching energy will be stored in the output capacitance and not dissipated in the channel during turn-off transient

Switching energy will be stored in the output capacitance and not dissipated in the channel during turn-off transient

10

100

1000

10000

0 50 100 150 200 300

Cap

acita

nce

[pF]

Cgd

Compensation MOSStandard-MOS

Vds [V]

600V / 190 mΩ

Cgs

Cds

Page 17

IBM Power & Cooling

Symposium 2005

New Merged Schottky-PN Structure –with Low Ohmic connection P Regions

SiC – wide bandgap material- typical room temp PN junction potential of 3 V

P regions not only reduce voltage gradient at Schottky barrier, but are terminated with low ohmic connection

Above junction potential, PN junctions provide PN diode operation

-10

-8

-6

-4

-2

0

2

4

6

8

10

0.07 0.1 0.13 0.16 0.19 0.22 0.25Time [µs]

I [A

]

thinQ! SiC Schottky diodeSi pn tandem diodeultrafast Si pn diode

T=150°C, VDC=400V

Page 18

IBM Power & Cooling

Symposium 2005

Forward characteristic with 400µs pulse time at temperatures from -55°C to 175°C

Bipolar behavior verified

100% testing of Vf at 6X rated current

Page 19

IBM Power & Cooling

Symposium 2005

Comparing Surge and i2t Capability with standard SiC diode

3X Greater IFSM

6X Greater i2t value

Page 20

IBM Power & Cooling

Symposium 2005

2nd Gen SiC Schottky diode - stable avalanche with positive temperature coefficient

Page 21

IBM Power & Cooling

Symposium 2005

Interleaved two transistor Forward Converter and primary switch waveforms, secondary current waveforms

Current ripple cancellation eases output capacitor

requirements

Page 22

IBM Power & Cooling

Symposium 2005

The ITTF has interesting characteristics for isolated supply stage

Basic characteristics

Simple, highly efficient topologyOutput stage and voltage ripple identical to ZVS with current doublerEasy current control schemeNo resonance inductorEspecially highly efficient at low load, good for redundant PSNo use of body diode, better potential MOSFET reliabilityTTF topology well known from lower power rangesSnubbing optimization and other “tweaks” indicate further gains are possibleLess complex system design = shorter time to market

Page 23

IBM Power & Cooling

Symposium 2005

Selection criteria based on Operating conditions – Forward PWM Isolation stage

Two Transistor Forward, ITTF Converter Characterisitc– Input voltage range 300V DC to 400VDC typical- typical 25 – 35% range of I2 x R– No body diode conduction– Selection based on FOM and balance of conduction losses (I2 x R) and switching

losses (Ceff X Fclk plus crossover losses)

Main selection criteria:– VDS[BR] rating– R[DS]on

– Couteffective Energy Related– Switching Crossover losses

Secondary selection criteria- Gate charge, R Gate, and ID ratingsSuggest FOM based on RDS[on] X Couteffective Energy relatedOptimum component selection based on balancing conduction losses and fixed switching losses over load range, light to full load; applications envelope doesn’t have wide worst case range

Page 24

IBM Power & Cooling

Symposium 2005

Application Evaluation:RDS[on], CO[effective], Gate Qg total

Page 25

IBM Power & Cooling

Symposium 2005

Example- 1 kW ITTF @ 130 kHz – 400V busWorst case Loss component estimation for IPP60R99CS

Same calculations for IPP60R199CP transistor:• Same crossover loss, • Coss related loss is cut in half to ~3/4 watt, • conduction loss only rises to ½ watt • total losses drop from 3.9 watts to 3.3 watt, • Costs are reduced with much smaller chip in the forward transistor. • Net gain is about 2.4 watts of less dissipation, notching the overall efficiency up about 0.24%.

( )2

_ [ ] ( ) 0.252 WattConduction Peak Sw DS on JPd I R T= × =Estimated conduction losses at peak switching current

__

_ min max

3.672

Out MaxPEAK Sw

In

PI A

V D

= = × ×

Peak Switching Current under bulk bus low line (300V)

( )_ max_ 2.028 Watt

2In

Switching Peak Sw on off S

VPd I t t f

= × × + × =

Estimated Crossover Switching losses (tends to be over-estimated for CoolMOS)

2( ) _

1 1.526 Watt2Coss O ER In Max SPd C V f= × × × =Estimated switching loss from

COSS (using CO(ER) )

0.1 Wattgate G Gate SPd Q V f= × × =Estimated gate drive loss:

Page 26

IBM Power & Cooling

Symposium 2005

0,75

0,8

0,85

0,9

0,95

200 400 600 800 1000P in [W]

Effic

ienc

y

ZVS CoolMOS™ CS

ITTF CoolMOS™ CS

ITTF Competitor

The ITTF shows efficiency gain at light load … especially in the range common with redundant shared supplies

7 % points better efficiency at 1/3 load

1 % better over next best alternative at full load

Page 27

IBM Power & Cooling

Symposium 2005

High Efficiency PFC-Stage eliminates bridge rectifier

Concept In development

Mai

n co

nver

ter i

nclu

ding

with

isol

atio

n

AC

D1 D2

L1

L2

C1

Bulk

Q1 Q2D3 D4

ID2ID1

IQ1 IQ2

ID1ID2

PFC Choke

VACIN

Page 28

IBM Power & Cooling

Symposium 2005

First Prototype Power Stage Configuration

Page 29

IBM Power & Cooling

Symposium 2005

Control Implementation with ICE1PCS01

Page 30

IBM Power & Cooling

Symposium 2005

99% efficiency PFC stage demoboard

Semiconductors:

CoolMOSTM CS (99mOhm)

600V thinQ!TM 2nd Gen. SiC diode

ICE1PCS01 as Control IC

Output power: 1500WInput Voltage: 207…264 VOutput Voltage: 380 Vfsw= 130 kHz

Page 31

IBM Power & Cooling

Symposium 2005

Nearly 99% efficiency at 1500W output

96,5

97,0

97,5

98,0

98,5

99,0

99,5

100,0

0 300 600 900 1200 1500Pout [W]

Effic

ienc

y [%

]

Competitor, 4*500V/0.25Ohm

CoolMOS CS,2*IPP60R099CS

Efficiency: 98.9 % @ 230 V input @ full load

Page 32

IBM Power & Cooling

Symposium 2005

References

Brian Griffith, “High Density AC/DC Power Supplies”, Intel Technology Symposium, 2002

G. Deboy,M. März, J. Stengl, H. Strack, J. Tihanyi, H. Wever, “A new generation of high voltage MOSFETs breaks the limit of silicon”, pp. 26.2.1-26.2.3, Proc. IEDM 98, San Francisco, Dec. 1998.

M. Saggio, D. Fagone, S. Musumeci, “MDmesh™: innovative technology for high voltage power MOSFETs”, Proc. ISPSD 200, pp. 65-68, Toulouse May 2000.

B. Lu, W. Dong, Q. Zhao, F. Lee, "Performance Evaluation of CoolMOS and SiC Diode for Single-Phase Power Factor Correction Applications", APEC 2003 Conference proceedings.

L. Hriscu, G. Casaru, “Low Loss Snubbing in DC-DC Converters”, Proc. Electronica Power Electronics Conference April 2004, San Francisco.