mega sb100 model 100 slurry blending system...

March 2014 322-00173-000REV001

Mega SB100 Model 100Slurry Blending System

Operations & Maintenance Manual

ii March 2014

EQUIPMENT REFERENCE NUMBERInformation contained in this manual relates to the equipment listed below. Any questions or comments directed to Mega Fluid Systems, Inc. regarding equipment should reference the model and serial numbers.

Mega SB100 Model 100 Slurry Blending SystemPart Number 202-305-ACBE REV001

This manual contains unpublished confidential and proprietary information of Mega Fluid Systems, Inc. No part of this publication may be reproduced, stored in a retrieval system, or transmitted in any form or by any means electronic or mechanical, including photocopying and recording for any purpose other than the purchaser’s use without the written permission of Mega Fluid Systems, Inc.

Mega SB100 Model 100 Slurry Blending System Operations & Maintenance Manual Part Number 322-00173-000REV001

REVISION HISTORYt

TRADEMARKS & WARRANTYThe following terms, used throughout this publication, are registered or unregistered trademarks of Mega Fluid Systems, Inc.: MegaPure™, MegaBlend™, MegaSafe™, MegaFlow™, MegAdapt™, MegAlert™, MegaView™, MegaLink™, and MegaTrend™

OTHER TRADEMARKSThe following are trademarks or registered trademarks of their respective companies or organizations:

CompactLogix™, SLC 505™, PanelView™, PanelView 550™, PanelView 600™, and PanelView 1000™, ™ are trademarks of Allen-Bradley Company, Inc.

Microsoft Windows® is a registered trademark of the Microsoft Corporation. Adobe® Reader® is a registered trademark of Adobe Systems, Incorporated

WARRANTY AND WARRANTY PERIODSeller warrants that all products provided hereunder will be free from defects in material and workmanship under normal use and service. This warranty does not extend to any equipment which is misused, abused, improperly or inadequately maintained, or altered or modified without Seller’s express consent. This warranty does not extend to any defect which arises as a result of causes external to the product (such as power or air conditioning failure) which are not covered by warranty or which arise out of the installation or use of parts not authorized by Seller. Except as otherwise agreed by Seller in writing, this warranty does not extend to any custom products which have been produced to Buyer’s specification. The foregoing warranty shall extend for the following period:

Equipment — One (1) year parts & labor beginning at acceptance. Spare Parts/Repairs — Ninety (90) days from date of shipment. Consumable Products — Consumable products (filter elements, O-rings, etc.), are not covered under

warranty by Seller.

Note: An important part of the warranty provision is that the Customer completes a reasonable amount of preventive maintenance (PM). Mega Fluid Systems, Inc. provides a PM schedule within thisOperations & Maintenance Manual.

Revision History Date

322-00173-000REV001 Original publication. March 2014

March 2014 iii

DISCLAIMERExcept as provided in Section 13.1 of the Terms and Conditions of Sale, seller makes no warranties, expressed or implied, with respect to the products sold hereunder and specifically disclaims the implied warranties of merchantability and fitness for particular purpose.

REMEDYIn the event any product fails to comply with the warranty set forth in Section 13.1 of the Terms and Conditions of Sale, Seller’s sole obligation and Buyer’s sole remedy, shall be for Seller, at its option, to repair or replace the defective product, exclusive of all shipping costs. Any such repair or replacement shall be at no charge to Buyer.

EXCLUSION OF CONSEQUENTIAL DAMAGESNotwithstanding anything to the contrary contained herein, seller shall not, under any circumstances, be liable to buyer for consequential, incidental, special or indirect damages arising out of or related to this agreement or the transactions contemplated hereunder, even if seller is apprised of the likelihood of such damages.

LIMITATION OF LIABILITYIn no event shall seller’s liability, whether based on an action or claim in contract tort (including, without limitation, negligence and, to the extent permitted by law, strict liability) or otherwise, to buyer arising out of or related to this agreement exceed the aggregate price of the products purchased by buyer hereunder as of the date such action or claim was filed.

Mega Fluid Systems, Inc.9398 SW Tualatin-Sherwood Rd.Tualatin, Oregon 97062 USA

Copyright ©2014 Mega Fluid Systems, Inc. All Rights Reserved

iv March 2014

March 2014 v

Contents

1. INTRODUCTION ............................................................................................................................... 1-1

About This Manual ...........................................................................................................................................................1-2.

Overview of Contents ............................................................................................................................................1-2.

Printing a Hard Copy from Acrobat ...................................................................................................................1-3

System Overview..............................................................................................................................................................1-4.

Feature Overview ....................................................................................................................................................1-4.

Components ......................................................................................................................................................................1-5.

Operator Interface...................................................................................................................................................1-5.

System Cabinet .........................................................................................................................................................1-5.

Tanks ...........................................................................................................................................................................1-5.

Pumps..........................................................................................................................................................................1-5.

Piping ...........................................................................................................................................................................1-5.

Pump-Assisted Drain ...............................................................................................................................................1-6.

2. SAFETY ................................................................................................................................................ 2-1

Messages & Symbols.........................................................................................................................................................2-2.

Safety Messages.........................................................................................................................................................2-2.

Safety Hazard Symbols ............................................................................................................................................2-3.

General Safety Information ............................................................................................................................................2-4.

Electrical Work Guidelines ............................................................................................................................................2-5.

Emergency Machine Off (EMO) Procedure................................................................................................................2-6.

EMO Circuitry Description ..................................................................................................................................2-7

Removing All Power........................................................................................................................................2-7

Resetting an EMO Button ..............................................................................................................................2-7

Lockout/Tagout.................................................................................................................................................................2-8.

Implementing Lockout/Tagout ..............................................................................................................................2-8.

Removing Lockout/Tagout .....................................................................................................................................2-8.

Material Safety Data Sheets (MSDS) ............................................................................................................................2-9.

Key Failure Points...........................................................................................................................................................2-10.

Chemical Exposure ................................................................................................................................................2-10.

Electrical Exposure ...............................................................................................................................................2-11

Spill Mitigation .................................................................................................................................................................2-12.

Safety Interlocks..............................................................................................................................................................2-13.

Manual Mode Warning ..................................................................................................................................................2-14.

Safety Components........................................................................................................................................................2-15.

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Table of Contents Mega SB100 Model 100

3. INSTALLATION.................................................................................................................................. 3-1

Facility Requirements.......................................................................................................................................................3-2.

Installation Procedure......................................................................................................................................................3-3.

System Location and Site Inspection ...................................................................................................................3-3.

System Inspection.....................................................................................................................................................3-3.

Mechanical Inspection .....................................................................................................................................3-3

Electrical Inspection.........................................................................................................................................3-4

System Placement.....................................................................................................................................................3-4.

System Commissioning ...........................................................................................................................................3-5.

Mechanical Connections.................................................................................................................................3-5

Electrical Connections ....................................................................................................................................3-6

Pre-Startup Testing ..................................................................................................................................................3-6.

System Configuration ..............................................................................................................................................3-7.

DI Water Startup and Leak Testing.....................................................................................................................3-8.

System Testing ..........................................................................................................................................................3-8.

Alarm Test ........................................................................................................................................................3-9

Communications Test .....................................................................................................................................3-9

Chemical Startup and Testing................................................................................................................................3-9.

Automatic and Solenoid Valves...................................................................................................................................3-11.

Device Reference List....................................................................................................................................................3-13.

4. SEQUENCE OF OPERATION........................................................................................................... 4-1

Sequence of Operations Overview..............................................................................................................................4-2.

Chemical Addition ...................................................................................................................................................4-2.

Batch Circulation and Dispense............................................................................................................................4-2.

Process Flush and Purge .........................................................................................................................................4-3.

Carboy Flush .............................................................................................................................................................4-3.

Sampling......................................................................................................................................................................4-3.

5. SYSTEM OPERATION ....................................................................................................................... 5-1

Startup/Shutdown.............................................................................................................................................................5-2.

Starting the System ..................................................................................................................................................5-2.

Shutting the System Down.....................................................................................................................................5-3.

System Login......................................................................................................................................................................5-4.

Password Permissions .............................................................................................................................................5-4.

Logging Into the System..........................................................................................................................................5-4.

System Setup .....................................................................................................................................................................5-6.

Setting Timers ...........................................................................................................................................................5-6.

Setting System Setpoints.........................................................................................................................................5-7.

Alarm Setup ...............................................................................................................................................................5-9.

Recipe Setup ...........................................................................................................................................................5-11

Mega SB100 Model 100 Table of Contents

March 2014 vii

Selecting a Recipe...........................................................................................................................................5-11

Editing a Recipe .............................................................................................................................................5-12

System Operation...........................................................................................................................................................5-14.

Responding to Alarms...........................................................................................................................................5-14.

Restarting After an EMO Shutdown or Unexpected Loss of Power.........................................................5-15.

Setting the System into Automatic Mode .......................................................................................................5-16

Setting the System in to Semi-Automatic Mode .............................................................................................5-16.

Setting the System into Manual Mode ...............................................................................................................5-17.

Changing a State Mode ........................................................................................................................................5-19

Taking a Sample ......................................................................................................................................................5-20.

6. USER INTERFACE .............................................................................................................................. 6-1

About Screen.....................................................................................................................................................................6-2.

Alarm History Screen......................................................................................................................................................6-3.

Alarm Popup......................................................................................................................................................................6-4.

Alarm Setup Screen .........................................................................................................................................................6-5.

Constituent Overview Screen(s) ..................................................................................................................................6-6.

Main Menu..........................................................................................................................................................................6-8.

Maintenance Screen .......................................................................................................................................................6-10.

Manual Valves Screen(s)................................................................................................................................................6-12.

Mode Select Popup ........................................................................................................................................................6-14.

Recipe Editor Screen .....................................................................................................................................................6-15.

Recipe Viewer Screen ...................................................................................................................................................6-17.

Sample Popup(s) .............................................................................................................................................................6-19.

Setpoints Screen .............................................................................................................................................................6-22.

State Mode Functions Screen ......................................................................................................................................6-23.

System Overview Screen..............................................................................................................................................6-24.

Tank Overview Screen..................................................................................................................................................6-26.

Timers Screen .................................................................................................................................................................6-28.

7. ALARMS AND WARNINGS.............................................................................................................. 7-1

Software Interlocks ..........................................................................................................................................................7-2.

Critical Interlocks.....................................................................................................................................................7-2.

Process Interlocks....................................................................................................................................................7-2.

Warnings ....................................................................................................................................................................7-2.

Interlock Alarms ......................................................................................................................................................7-3

8. MAINTENANCE.................................................................................................................................. 8-1

Safety Precautions ............................................................................................................................................................8-3.

General System Maintenance.........................................................................................................................................8-4.

Removing and Isolating Components ..................................................................................................................8-4.

Removing and Isolating Electrical Components ................................................................................................8-5.

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Compact Flash Card ...............................................................................................................................................8-7

Flowmeters ................................................................................................................................................................8-7.

Pressure Reducing Gas Regulators .....................................................................................................................8-8

Pressure Switches ....................................................................................................................................................8-8.

Gas Digital Pressure Switches.......................................................................................................................8-8

Preventive Maintenance ................................................................................................................................................8-11.

Maintenance Schedule ...........................................................................................................................................8-11.

Preparation ......................................................................................................................................................8-11

Equipment ........................................................................................................................................................8-11

Weekly Preventive Maintenance Procedures ..........................................................................................................8-12.

Visual System Inspection.......................................................................................................................................8-12.

Verifying the Device Settings ...............................................................................................................................8-13.

Adjusting the Humidifier Settings .......................................................................................................................8-14.

Monthly Preventive Maintenance Procedures .........................................................................................................8-16.

Checking Pump Operation...................................................................................................................................8-16.

Checking Leak Detectors.....................................................................................................................................8-17.

Tank Scale Verification .........................................................................................................................................8-19

Liquid and Level Sensor Maintenance ..............................................................................................................8-20

Adjusting Sensitivity of Line Liquid Sensors .............................................................................................8-21

Calibrating the Blend Tank Level Proximity Sensors.............................................................................8-22

Quarterly Preventive Maintenance Procedures ......................................................................................................8-25.

Testing Alarms ........................................................................................................................................................8-25.

Valves and Pressure Gauges ...............................................................................................................................8-26

Electrical Solenoid Valves (EV)....................................................................................................................8-26

Automatic Valves (AV)..................................................................................................................................8-27

Check Valves (CV).........................................................................................................................................8-27

Manual Valve (MV) ........................................................................................................................................8-28

Pressure Relief Valve .....................................................................................................................................8-28

Gas Line Maintenance ...................................................................................................................................8-29

Semi-Annual Preventive Maintenance Procedures .................................................................................................8-32.

Fittings.......................................................................................................................................................................8-32.

Checking the Fittings .....................................................................................................................................8-32

Replacing Fittings ............................................................................................................................................8-33

Rebuilding Pumps ...................................................................................................................................................8-34.

Isolating and Removing Pumps....................................................................................................................8-34

Annual Preventive Maintenance Procedures............................................................................................................8-36.

Lithium Battery .......................................................................................................................................................8-36.

Replacing the Lithium Battery .....................................................................................................................8-36

Disposing the Lithium Battery.....................................................................................................................8-37

Mega SB100 Model 100 Table of Contents

March 2014 ix

EMO Testing ..........................................................................................................................................................8-38

Completing Preventive Maintenance Procedures ...................................................................................................8-39.

Cabinet Cleaning ....................................................................................................................................................8-39.

Maintenance Forms........................................................................................................................................................8-40.

Work Order Form ...............................................................................................................................................8-41

Preventive Maintenance Form ...........................................................................................................................8-42

Device Settings Record Sheet ............................................................................................................................8-44

9. SCHEMATICS...................................................................................................................................... 9-1

Legend.........................................................................................................................................................................9-3.

P&ID Schematic ........................................................................................................................................................9-5.

Electrical Schematic .................................................................................................................................................9-7.

Facility Schematic....................................................................................................................................................9-20.

10. PARTS LIST ....................................................................................................................................... 10-1

GLOSSARY .......................................................................................................................GLOSSARY-1

INDEX ....................................................................................................................................... INDEX-1

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March 2014 1-1

Chapter 1: Introduction

This chapter contains the following information:

About This Manual ........................................................................................1-2Overview of Contents .............................................................................1-2Printing a Hard Copy from Acrobat .........................................................1-3

System Overview..........................................................................................1-4Feature Overview ...................................................................................1-4

Components .................................................................................................1-5Operator Interface ..................................................................................1-5System Cabinet ......................................................................................1-5Tanks......................................................................................................1-5Pumps ....................................................................................................1-5Piping .....................................................................................................1-5Pump-Assisted Drain ..............................................................................1-6

1-2 March 2014

Introduction Mega SB100 Model 100

About This Manual

This manual presents installation, operation, and maintenance information for the Mega SB100 Slurry Blending System, Model 100. For information not contained in this manual, contact Mega Fluid Systems, Inc., Customer Service.

Overview of Contents

Chapter DescriptionIntroduction Describes the manual’s content and conventions. Contains

helpful hints for using this manual. Provides a brief overview of the Mega SB100 Model 100’s function.

Safety Contains important safety precautions and warnings. Explains conventions for usage of notice, caution, warning, and danger messages employed throughout the manual.

Installation Provides information necessary for installing the Mega SB100 Model 100.

Sequence of Operations Describes the functional operations of the system.System Operation Includes step-by-step procedures for operating the Mega

SB100 Model 100.User Interface Provides alphabetical listing and description of each

PanelView operator interface screen.Alarms and Warnings Contains a list and description of all hardware and software

alarms and warnings incorporated into the design of the Mega SB100 Model 100. Provides a list of possible causes for each alarm and suggests corrective actions.

Maintenance Outlines Mega Fluid Systems, Inc. recommended preventive and corrective maintenance program for the Mega SB100 Model 100. Contains troubleshooting, calibration, and adjustment procedures.

Schematics Provides Mega SB100 Model 100 facility requirements, fluid flow, electrical, and mechanical schematics.

Parts List Contains recommended spare parts and consumables lists.Glossary Provides definitions for terms, abbreviations, and acronyms

which might be unfamiliar.

Mega SB100 Model 100 Introduction

March 2014 1-3

Printing a Hard Copy from Acrobat

Mega Fluid Systems, Inc. manuals print to 8.5” x 11”, however, 11” x 17” schematics are also included. To print a hard copy of the manual with all pages printing to the correct size, perform the following steps.

1. In Acrobat, select File > Print. The Print dialog opens.

Figure 1-1. Print Dialog

2. Select the Choose Paper Source by PDF page size check box.

3. Click the OK button to print a hard copy of the manual.

Note: If your printer does not print to 11” x 17” size paper, your manual will print to 8.5” x 11” only.

1-4 March 2014


System Overview

The Mega SB100 Model 100 system is an automated chemical blend unit which draws up to four chemicals from carboys and DI water from a house supply line to construct batches of a specific chemical composition. These batches are periodically discharged to a pre-existing dispense cart distribution tank.

Feature Overview

The Mega SB100 Slurry Blending System, Model 100 includes the following features:

• Enclosure made of white Polypropylene w/clear blue PVC accents

• 100l blend tanks

• High purity diaphragm pumps for transferring from carboys to blend tank

• High purity diaphragm pumps for delivery and tank recirculation

• Low flow delivery pump for oxidizer addition (peristaltic pump)

• Pressurized drain and cabinet drain diaphragm pump

• 18”x18” 660 lb (max) scale for measuring the addition of DI and abrasives

• 12”x12” 66 lb (max) scale for measuring the addition of high accuracy constituents

• Blend tank recirculation

• Storage for up to four 20 liter carboys

• 110 VAC cord for power connection to standard plug-in socket allowing mobility

• Humidified N2 blend tank supply

• Recirculation of raw constituent carboys

• Sample port

• Standard door interlocks and leak detects

• 6” flange exhaust port

• Flexible dispense hose with delivery cart tank level detection with automated shut-off

Mega SB100 Model 100 Introduction

March 2014 1-5

Components

Operator Interface

The A-B PanelView Plus 600 allows the operator to monitor the Mega SB100 Model 100 through monochrome displays and touch screens.

System Cabinet

The cabinet is made of a polypropylene wrapped steel frame with polypropylene panels. The doors are transparent to provide visual access to the instrumentation readouts and equipment behind the doors. The panels and doors provide easy access to critical areas and the plumbing design allows defective parts to be easily removed and replaced. The cabinet floor slopes to the drain to improve leak detection and promote drainage. Secondary containment protects against unwanted chemical release.

Tanks

Tank size is defined by system requirements and constructed of material compatible with the chemicals being used. Tanks are mounted on a scale to provide accurate tank level measurements and to control chemical addition during batch mixing. Slurry system drums and tanks are equipped with a humidifier. The humidifier mixes Nitrogen (N2) and DI water to form a blanket of humid N2 in the drums and tanks in order to equalize tank pressure and minimize slurry hardening.

Pumps

A variety of pumps are used in the Mega SB100 Model 100. Pumps equipped in each chemical carboy supply line draw chemical from the carboy and dispense directly into a blend tank. Two of the chemical carboy supply circuits have been provided with double diaphragm, positive displacement pumps, and the two remaining chemical carboy circuits are equipped with fine granularity peristaltic pumps. A double diaphragm pump is used to pump a blended batch to the distribution tank.

Piping

A variety of pipes are used in the Mega SB100 Model 100 system. Nitrogen (N2) and clean dry air (CDA) are sent through stainless steel pipes until they arrive at the cabinet’s chemical section where they are routed through Teflon PFA™. Chemicals flow through 1/4”, 3/8”, and 1/2” Teflon™ tubing or piping. PVC double-containment is used on all chemical lines exterior to the cabinet in order to minimize the possibility of leaks.

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Pump-Assisted Drain

A small diaphragm device that provides the lift and force to remove liquid that accumulates in the drain ports of the cabinets and pumps them to the waste collection system. A pump-assisted drain is included when the system is mounted in a position that does not enable gravity drain connections, or if gravity drains are not available due to construction in the sub-fab.

March 2014 2-1

Chapter 2: Safety


Messages & Symbols ...................................................................................2-2Safety Messages ....................................................................................2-2Safety Hazard Symbols ..........................................................................2-3

General Safety Information ...........................................................................2-4Electrical Work Guidelines ............................................................................2-5Emergency Machine Off (EMO) Procedure ...................................................2-6

EMO Circuitry Description.......................................................................2-7Removing All Power .........................................................................2-7Resetting an EMO Button .................................................................2-7

Lockout/Tagout .............................................................................................2-8Implementing Lockout/Tagout.................................................................2-8Removing Lockout/Tagout ......................................................................2-8

Material Safety Data Sheets (MSDS) ............................................................2-9Key Failure Points.......................................................................................2-10

Chemical Exposure...............................................................................2-10Electrical Exposure ...............................................................................2-11

Spill Mitigation ............................................................................................2-12Safety Interlocks .........................................................................................2-13Manual Mode Warning ................................................................................2-14Safety Components ....................................................................................2-15

2-2 March 2014

Safety Mega SB100 Model 100

Messages & Symbols

Safety hazards are those situations that might harm or severely injure a person or equipment through the normal operation of the Mega SB100 Slurry Blending System, Model 100. These safety hazards are present due to the electrical, mechanical, or chemical operating characteristics of the system.

Safety Messages

Some operations in this manual may be dangerous to the operator and/or the facilities. This manual contains DANGER, WARNING, CAUTION, or NOTICE messages. Compliance with these hazard messages prevents unnecessary risks while working. The following is an example of the four hazard level messages used in the manual.

DANGERDANGER MESSAGE!

Indicates an imminently hazardous situation which, if not avoided, WILL result in death or serious injury.

WARNINGWARNING MESSAGE!

Indicates a potentially hazardous situation which, if not avoided, COULD result in death or serious injury.

CAUTIONCAUTION MESSAGE!

Indicates a potentially hazardous situation which, if not avoided, may result in minor or moderate injuries, such as minor cuts, abrasions, slipping, tripping, noise, and vibrations. CAUTION

may also be used to alert against unsafe practices.

NOTICENOTICE MESSAGE!

Indicates a statement of company policy directly or indirectly related to the safety of personnel or protection of property. NOTICE often highlights specific actions or steps that must be followed to avoid damage to the equipment or

its ability to function.

Mega SB100 Model 100 Safety

March 2014 2-3

Safety Hazard Symbols

The hazard symbols used in this manual, their descriptions, and proper precautions are listed in Table 2-1.

Table 2-1. Safety Hazard Symbol Descriptions

Symbol DescriptionChemical hazard A skull and cross bones graphic within a triangle

indicates chemical hazards (e.g., chemicals dispensing from the system).

Wear the proper Personal Protective Equipment (PPE) to avoid injury. Refer to site MSDS for chemical specific information.

Electrical hazard — Type 3 A downward lightning arrow graphic within a triangle indicates electrical hazards.

Electrical hazards may require using the lockout/tagout procedure (refer to Implementing Lockout/Tagout (page 2-8).

Noise hazard A headphone graphic within a triangle indicates sound and noise hazards.

Hearing protection is required. Wear the proper PPE to avoid personal injury.

Mechanical hazard A hand pinched between two circles within a triangle indicates mechanical hazards (e.g., equipment that could pinch or entangle hands and fingers).

Mechanical hazards may require using the lockout/tagout procedure.

Protective equipment required A human form within a triangle indicates personal protective equipment is required (e.g., when working with chemicals).

Wear the appropriate PPE to avoid personal injury.

Heavy Object Hazard A human form lifting an object indicates heavy object hazards (e.g., equipment may tip over or requires mechanical assistance to lift or move).

Use appropriate mechanical aids.

2-4 March 2014


General Safety Information

A user must have proper system and safety training before operating any Mega Fluid Systems, Inc. equipment. The following list describes several precautions required to safely operate the system.

• Maintain compliance with all local, state, and federal regulations, ordinances, laws, etc., that require handling all processing solutions, chemicals, and acids, as well as all wastes produced by this system.

• All personnel must have proper training in related safety procedures.

• Do not allow unauthorized or untrained personnel in the area of the system.

• Personal Protective Equipment (PPE) is required. Wear the appropriate PPE to avoid personal injury. Follow requirements listed in the MSDS for the appropriate chemical. Follow all site specific rules for PPE.

• Treat all chemical exposures as potentially serious. Neutralize and irrigate the exposed area and seek first aid immediately as outlined in the MSDS.

• Treat all chemical spills or leaks as hazardous and clean up immediately.

• Use extreme caution when working with electrical equipment. Always assume high voltage exists; use lockout and tagout procedures during maintenance.


March 2014 2-5

Electrical Work Guidelines

Electrical work on Mega Fluid Systems, Inc. equipment is classified by type as defined in the SEMI S2-0200 Safety Guidelines for Semiconductor Manufacturing Equipment. All electrical hazard tasks of Type 3 or higher are identified in this manual. A brief description of each electrical hazard type is provided below for reference.

Type 1 — Equipment is fully de-energized. Lockout and tagout procedures should be used.

Type 2 — Equipment is energized. Energized circuits are covered or insulated.

Type 3 — Equipment is energized. Energized circuits are exposed and inadvertent contact with uninsulated energized parts is possible. Potential exposures are no greater than 30 volts RMS, 42.2 volts peak, 60 volts dc, or 240 volt-amps in dry locations.

Type 4 — Equipment is energized. Energized circuits are exposed and inadvertent contact with uninsulated energized parts is possible. Potential exposures are greater than 30 volts RMS, 42.2 volts peak, 60 volts DC, or 240 volt-amps in dry locations. Potential exposures to radio frequency (rf) currents, whether induced or via contact, exceed the limits set in S2-0200 Safety Guidelines for Semiconductor Manufacturing Equipment, Appendix 5, Table A5-1.

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Emergency Machine Off (EMO) Procedure

The Emergency Machine Off (EMO) button (as shown in Figure 2-1) is a mechanism used for immediately shutting down the system. Pressing the EMO button interrupts system power and stops all functions of the system.

To shut down the system:

1. Locate the Emergency Machine Off (EMO) button on the system.

2. Press this button to immediately interrupt system power.

Figure 2-1. Emergency Machine Off (EMO) Button

CAUTIONEMO BUTTON MUST BE ACCESSIBLE!

Never disable or cover an EMO button. This can prevent the system from being stopped in the event of an emergency.

- OR -


March 2014 2-7

EMO Circuitry Description

If the EMO button is pressed, all electrical power DOWNSTREAM from the EMO switch is shut off. Refer to the Schematics (page 9-1) for power routing details.

Removing All Power

To remove all power, toggle the AC Disconnect Switches to the Off position.

Figure 2-2. AC Disconnect Switch Location

Resetting an EMO Button

To reset an EMO button, pull it out until it pops back to its original position. For instructions on restoring power to the system after an EMO shutdown, see Restarting After an EMO Shutdown or Unexpected Loss of Power (page 5-13).

CAUTIONELECTRICAL HAZARD!

Pressing the EMO button is not a safe alternative to the prescribed lockout/tagout procedure.

AC Disconnect

Front Right

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Lockout/Tagout

The lockout/tagout procedure is required to prevent the unexpected energization of the system.

Implementing Lockout/Tagout

1. Bleed off the pressure or flush all lines carrying hazardous chemicals before locking the valve in the required position and/or blanking the line.

2. Turn off or return all operating controls to the neutral mode.

3. Relieve, disconnect, restrain, or otherwise render safe residual or stored energy such as capacitors, gas, steam, water pressure, air, and hydraulic.

4. Place the AC Disconnect switch in the Off position.

5. Place and lock a padlock on the disconnect switch.

6. Attach a lockout tag to the switch which indicates the system is locked out for service purposes and identifies those employees authorized to remove the lock and tag.

7. Test the valve or switch to ensure the control cannot be moved to the activated position.

8. Ensure all energy sources have been de-energized on dual or multi-energy source operations prior to beginning work.

9. Retest the controls of the individual machine or equipment to verify the operation is positively off.

Removing Lockout/Tagout

1. Inspect the machine or equipment to ensure all components, including safeguards, are in place and personnel are in the clear before reactivation.

2. Remove the padlock and notify the affected employee(s) when work is complete and the machine or equipment is ready to be reactivated.

WARNINGLOCK OUT/TAG OUT SYSTEM!

To ensure the safety of personnel, the system should be locked and tagged out before maintenance procedures are performed.


March 2014 2-9

Material Safety Data Sheets (MSDS)

Material Safety Data Sheets (MSDS) contain important information about the toxicity, corrosiveness, and flammability of hazardous materials.Therefore, it is highly recommended that data sheets specific to the chemicals used in the system be acquired from the chemical manufacturer and placed in a visible location in the vicinity of the system.

2-10 March 2014


Key Failure Points

Chemical Exposure

The following procedures (but not limited to) may place the operator at risk of chemical exposure:

• Changing out an empty supply drum or tote.

• Sampling system chemistry.

• Flushing the system.

• Checking for leaks.

• Performing a particle count.

• Transporting chemicals to the system.

• Filling the pipes with air.

• Clean flushing the drums/totes and pipes.

• Changing pumps, valves, filters, pressure switches, etc.

• Handling PPE after use.

CAUTIONCHEMICAL HAZARD!

Performing maintenance on the key failure points may expose the operator to hazardous chemicals. Wear proper PPE. Refer

to MSDS for site-specific chemical information.


March 2014 2-11

Electrical Exposure

The following procedures (but not limited to) may place the operator at risk of electrical exposure:

• Testing system communications.

• Testing the interlock systems (if present).

• Testing the chemical demand signal.

WARNINGELECTRICAL HAZARD — TYPE 3!

Performing maintenance on the key failure points may expose the operator to electrical hazards. Use caution when performing procedures that may involve contact with electrical components.

Use lockout/tagout procedures when appropriate.

2-12 March 2014


Spill Mitigation

The Mega SB100 Slurry Blending System, Model 100 is designed to minimize the possibility of an unwanted chemical release. The cabinet is designed to contain 110% of the total piping volume plus the total contents of the largest reservoir. If the cabinet is breached, there is a possibility of a chemical spill. In the event of an unwanted chemical release, use the following steps as a guideline.

1. Treat all chemical spills as hazardous.

2. Notify the proper site authority.

3. Follow all site specific rules for chemical spills.

4. Follow all information contained in the MSDS.

5. If possible, contain the spill with absorbent barriers.

6. If possible, neutralize the spill according to MSDS information.

DANGERCHEMICAL HAZARD!

Treat all chemical spills as extremely hazardous. Notify the proper site authority of any chemical spill. Refer to the

applicable MSDS for special protection information and spill procedures/disposal requirements.


March 2014 2-13

Safety Interlocks

Safety interlocks are incorporated into the design of the system to ensure user safety.

Alarms can be bypassed, if required, from the Maintenance Screen (page 6-10). If the system is in bypass mode, no alarms will be generated by the system. It is recommended that alarms be bypassed only on an “as needed” basis. Return the system to normal operating mode as soon as possible.

WARNINGCHEMICAL AND ELECTRICAL HAZARDS!

Placing the system in bypass mode enables the user to access enclosed portions of the system while the system is running.

This increases the chance of personnel coming into contact with hazardous electricity and chemicals.

Use extreme caution when running the system in bypass mode. Return the system to normal operating mode as soon as

possible.

CAUTIONLOUD NOISE HAZARD!

Hearing protection may be required when pumps are on and any pump access panel is open.

WARNINGCHEMICAL AND ELECTRICAL HAZARDS!

When maintenance procedures are complete, replace the bolts and secure the door to prevent the door from being uninten-

tionally or accidentally opened. Opening the doors may expose the operator to chemical or electrical hazards.

2-14 March 2014


Manual Mode Warning

In Manual mode, the user assumes control of the system. It is possible to open a combination of valves that could create an unsafe condition or cause damage to the system. Only technicians and service personnel familiar with the equipment should attempt to operate the system in Manual mode.

CAUTIONUSE CAUTION IN MANUAL MODE!

Placing the system in Manual mode allows combinations of valves to be opened or closed that may be outside the scope of the equipment design. The user assumes all responsibility for

running the system in Manual mode.


March 2014 2-15

Safety Components

The Mega SB100 Slurry Blending System, Model 100 includes several components that help ensure safe operation.

• The flow and pressure equipment have regulators and pressure switches that activate an alarm if the flow and pressure do not meet preset requirements. These regulators and alarms protect the equipment and users from unsafe pressure or flow levels.

• Sensors detect fill liquid or air in the tubing, faulty pumps, and low to high pressure levels. When a problem is detected by these sensors, an alarm or warning is activated and the system is shut down if the problem is critical.

• Pressure switches monitor low and high pressure settings. An alarm is activated if readings fall below the low setpoint or exceed the high setpoint.

• Each station has hand sprayers used to clean out the cabinet or components with DI water.

• Differential Pressure Switch sensors monitor cabinet pressure (exhaust).

2-16 March 2014


March 2014 3-1

Chapter 3: Installation


Facility Requirements ...................................................................................3-2Installation Procedure ...................................................................................3-3

System Location and Site Inspection ......................................................3-3System Inspection ..................................................................................3-3

Mechanical Inspection ......................................................................3-3Electrical Inspection .........................................................................3-4

System Placement..................................................................................3-4System Commissioning ..........................................................................3-5

Mechanical Connections...................................................................3-5Electrical Connections ......................................................................3-6

Pre-Startup Testing.................................................................................3-6System Configuration .............................................................................3-7DI Water Startup and Leak Testing.........................................................3-8System Testing.......................................................................................3-8

Alarm Test ........................................................................................3-9Communications Test .......................................................................3-9

Chemical Startup and Testing.................................................................3-9Automatic and Solenoid Valves ..................................................................3-11Device Reference List.................................................................................3-13

3-2 March 2014

Installation Mega SB100 Model 100

Facility Requirements

All air, gas, electrical, and fluid connections must be established before the system is initially started. Facility connections requirements are listed in the schematics and summarized in the following table.

Service Average Capacity Maximum Capacity NotesDI Water Supply 241.3 kPa, 0 LPM 241.3 kPa, 37.8 LPM 1" PFA Flaretek BulkheadDI Water Return 241.3 kPa, 37.8 LPM 241.3 kPa, 0 LPM 3/8” PFA Flaretek

BulkheadNitrogen Supply 620.5 kPa, 15 SLPM 620.5 kPa, 52.5 SLPM 3/8” SS Swagelok

BulkheadCDA Supply 620.5 kPa, 242.2 SLPM 620.5 kPa, 383.8 SLPM 3/8” SS Swagelok

BulkheadProcess Drain 241.3 kPa, 0 LPM 482.6 kPa, 36.8 LPM 1" PP FNPT Full CouplingGravity Drain Gravity Fed Gravity Fed 2" PP FNPT Half CouplingExhaust -0.0249 kPa, 7345.5 LPM -0.0249 kPa, 11016.7 LPM 3" Flange ConnectorPower 120VAC, Single Phase,

50-60 HZ, 2.66A120VAC, Single Phase, 50-60 HZ, 6.3A

3/4” FNPT

Mega SB100 Model 100 Installation

March 2014 3-3

Installation Procedure

The following installation procedure is provided in order to ensure the safe and proper installation and commissioning of Mega Fluid Systems, Inc. systems.

System Location and Site Inspection

The following items must be verified in order to ensure the work area is safe and clean prior to any work being done by the field installation crew.

• Work area is clean and free of any chemical spills or contamination.

• Work area is clear of all obstacles, equipment, or hazardous conditions which might prevent safe access to the system.

• Work area has power outlets and can accommodate the systems required for instal-lation.

System Inspection

The following items must be verified in order to ensure that no gross damage occurred to the system during shipment to the work site and that the system is sound and ready for use in a production environment.

Mechanical Inspection

Verify the following mechanical functions of the system before use:

• Cabinet is clean, including the top.

• No scratches or cracks are present in cabinet.

• No broken welds on frame, internal or external.

• No unprotected frame or metal exposed. Check under cabinet.

• Panels, doors, hinges, and hood are not broken or damaged.

• Back panels are attached and no bolts are broken.

• Welds on standouts, mounting blocks, and pump stands are not broken or damaged.

• Feet are properly aligned and able to adjust height.

• Plenum louver is easy to move.

• Flare fittings are tight.

• Swagelok fittings are tight and checked with No Go gap gauge.

• Piping is labeled with correct label and flow direction.

• Valves are correctly tagged.

3-4 March 2014


• Regulators are correctly tagged.

• Gauges are correctly tagged.

• Interlock, chemical warning, and caution stickers are on all doors.

Electrical Inspection

Verify the following electrical functions of the system before use:

• DIN rails are mounted squarely and securely.

• EV blocks on back panel are mounted securely.

• Terminal blocks are mounted securely.

• Wire troughs are mounted squarely and securely.

• Wire terminals are tight.

• Connectors are labeled and secured with heat shrink tubing.

• Sensors are mounted and secured.

• All groups of cables/wires leaving wire trough are wrapped with spiral wrap.

System Placement

The typical system placement procedure ensures equipment is properly set up for normal operation.

1. Set system in place according to site layout.

2. Adjust leveling legs so that cabinet base is approximately six inches (but no more than eight inches) from the floor. Adjust leveling legs, as necessary, to level the cabinet.

3. If required, install seismic mounts on legs of cabinet. Refer to the local building codes for seismic mount requirements.

4. Repeat the placement procedure for each system component.

CAUTIONHEAVY OBJECT HAZARD!

Installing or removing the system requires mechanical assistance. Use proper equipment in order to minimize the risk

of personnel injury.


March 2014 3-5

System Commissioning

The typical system commissioning procedure includes verifying that proper mechanical and electrical connections are made to the system, and no cracks, misalignment, or stress is placed on the interconnecting plumbing.

Mechanical Connections

1. Connect cabinet and process drain to facilities drain. See Facility Requirements (page 3-2) for the connection type.

2. Connect CDA and N2 supplies to the correct inlet valves. See Facility Requirements (page 3-2) for the connection type.

3. Connect DI water supply and return lines to the correct bulkheads. See Facility Requirements (page 3-2) for the connection type.

4. Route double-containment to the correct bulkheads.

5. Connect slurry lines to the correct internal plumbing. See Facility Requirements (page 3-2) for the connection type.

6. Ensure the exhaust duct is composed of flame retardant polypropylene or better rated chemical-resistant material, if necessary.

7. Connect exhaust, or ensure facility installation is correct. Ensure exhaust is handled and treated according to applicable safety and pollution regulations according the MSDS.

8. Verify exhaust flow using the differential pressure switch on the front of the system.

9. Connect ¼” stainless steel (SS) lines from the exhaust manifold to the differential pressure switch.

WARNINGCHEMICAL HAZARD!

The exhaust effluent may contain chemical (vapor or liquid). It should be handled and treated accordingly for compliance to

safety and pollution control regulations.

3-6 March 2014


Electrical Connections

1. Connect the facility electrical supply to the AC disconnect. See Electrical Schematic (page 9-7) for reference.

2. Ensure all communications wiring is in place and connections have been terminated.

3. Ensure signal interconnects and communication wires have been pulled to all external equipment associated with the system.

Pre-Startup Testing

The typical safety testing is done before DI water is introduced to the system. This procedure requires the system to be powered up.

1. Start the system.

2. Test all EMO switches.

3. Test other equipment safety features.

4. Ensure the correct PLC input LED on the system illuminates when the sensor is tested. See Electrical Schematic (page 9-7) for reference.

5. Check screens for correct display changes.

6. Ensure drains work properly by testing with DI water.

7. Test all leak detectors and liquid sensors. Calibrate liquid sensors, if necessary.

CAUTIONENSURE POWER IS OFF BEFORE WORK!

Turn facilities power off before connecting electrical lines to the system. Use Lockout/Tagout Procedures.

CAUTIONELECTRICAL HAZARD — TYPE 3!

Live circuits may be exposed and accidental contact is possible. Use extreme caution in order to avoid electrical shock.


March 2014 3-7

System Configuration

The typical system configuration procedure verifies the functionality of system components. This procedure requires the system to be powered up.

1. Check all manual valves, needle valves, and ball valves for ease of operation.

2. Set all manual valves, needle valves, and ball valves to proper alignment (open or closed). See Device Reference List (page 3-13).

3. Ensure all check valves are correctly aligned.

4. Close all cabinet doors while configuring gas line components.

5. Set regulators, relief valves, and flow regulators to correct settings. Record all device settings. See Device Reference List (page 3-13).

6. Ensure the system is On.

7. Place the unit in manual mode and access the Manual Valves Screen(s) (page 6-12).

8. Toggle each valve in the order displayed on the P&ID Schematic (page 9-5). For each valve, ensure:

• The correct valve opens, indicated by the pop-out indicator.

• The correct solenoid is activated, indicated by the light on the solenoid. The solenoid is identified on the Electrical Schematic (page 9-7).

• The proper output is activated. See the P&ID Schematic (page 9-5) or ensure pressure switches are at correct settings.

• Ensure the correct PLC input LED illuminates when the sensor is tested. Refer to the Electrical Schematic (page 9-7).

• Record all device settings.

• Check PanelView screens for correct display changes.

9. Record all pump and filter specifications.


Live circuits may be exposed and accidental contact is possible. Use extreme caution to avoid electrical shock.

DANGERPRESSURE HAZARD!

Open the door to the gas compartment only. Leave all other cabinet doors closed to protect yourself from potential hazards.

3-8 March 2014


DI Water Startup and Leak Testing

The typical DI water startup and leak testing is performed before the chemical startup. This procedure requires the system to be powered up.

1. Provide clean DI water in source containers (totes/drums).

2. Ensure the system is On.

3. In manual mode, fill system with DI water.

4. Check the entire system for leaks. Fix any leaks that may occur.

5. Set and record all timers, runtime setpoints, and alarm setpoints.

6. Set the system recipe(s).

7. Calibrate the flowmeters. Record the K-factor for each flowmeter.

8. Calibrate the analytical devices. Record the settings.

9. Run the system in automatic mode, simulating a POU consumption.

10. Return the system to normal automatic operation and observe the system for a period that represents a complete cycle of functions.

System Testing

The typical system testing is performed before the chemical startup. This procedure requires the system to be powered up.






March 2014 3-9

Alarm Test

1. Ensure alarm activation displays on the Alarm History Screen (page 6-3) screen. Silence Alarms button in the Alarm History Screen (page 6-3) screen must be pressed to silence the audible annunciator.

2. Test all critical alarms. With the system running, trigger the alarms and ensure the system stops pumping chemical.

3. Test all process alarms. When the system is running, trigger the alarms and verify the portion of the system associated with the alarm stops. Some alarms may require a brief setup to simulate certain portions of a process.

4. Test all warnings. When the system is running, trigger the alarms and ensure the alarm sounds but does not shut down any part of the system.

Communications Test

1. Ensure no communication or other system alarms may interfere with the communi-cation test.

2. Initiate a chemical demand or other communication parameter and ensure the systems interact in accordance with the signal being sent. The system receiving the signal should respond by performing a function or returning a status signal to the host system.

3. Return systems to normal automatic operation and observe the communications for a period that represents a complete cycle of functions.

4. Perform this test for each component connected to the Mega SB100 Model 100.

Chemical Startup and Testing

The typical chemical startup and testing is performed to complete the installation procedure. This procedure requires the system to be powered up.



3-10 March 2014


1. Drain the DI water from the system. Purge the system with N2, as required.

2. Connect the source chemical(s).

3. Run the system in automatic mode with chemical(s). Monitor the system closely for leaks.

4. Flush the chemical(s) to the drain. Continue flushing and particle count testing until system specifications are met.

5. Qualify the system through system readings or qualified laboratory analysis. Record all results, including blend ratio, volumes, and analytical specifications.

6. Perform a final system checkout and qualification.

CAUTIONUSE PROPER PPE WHEN HANDLING CHEMICAL!

Potentially hazardous chemicals may be present in the system during the Chemical Startup and Testing. Wear proper PPE to

avoid injury.


March 2014 3-11

Automatic and Solenoid Valves

The following is a complete list of automatic valves (AVs) and their associated solenoid valves (EVs) for the Mega SB100 Model 100.

Table 3-1. Mega SB100 Model 100 Automatic and Solenoid Valves

P&ID Location

AV Designation

EV Designation

Description Comments

Pg. 2 AVB01-X SV-1 Pump B01-X Inlet Isolation Valve NCPg. 2 AVB02-X SV-2 Local Recirculation Isolation Valve NCPg. 2 AVB03-X SV-3 Blend Dispense Isolation Valve NCPg. 2 AVC01A-X SV-4 Constituent A Dispense Isolation Valve NCPg. 2 AVC01B-X SV-5 Constituent B Dispense Isolation Valve NCPg. 2 AVC01C-X SV-6 Constituent C Dispense Isolation Valve NCPg. 2 AVC01D-X SV-7 Constituent D Dispense Isolation Valve NCPg. 2 AVC02A-X SV-8 Constituent A Circulation Isolation Valve NCPg. 2 AVC02B-X SV-9 Constituent B Circulation Isolation Valve NCPg. 2 AVC02C-X SV-10 Constituent C Circulation Isolation Valve NCPg. 2 AVC02D-X SV-11 Constituent D Circulation Isolation Valve NCPg. 2 AVD01-X SV-12 Blend Pumped Drain Isolation Valve NCPg. 2 AVD02A-X SV-13 Constituent A Drain Valve NC/NOPg. 2 AVD02B-X SV-14 Constituent B Drain Valve NC/NOPg. 2 AVD02C-X SV-15 Constituent C Drain Valve NC/NOPg. 2 AVD02D-X SV-16 Constituent D Drain Valve NC/NOPg. 2 AVE01-X SV-17 Pump B01-X Upstream Flush / Purge Valve NCPg. 2 AVE02-X SV-18 Pump B01-X Downstream Flush / Purge

ValveNC

Pg. 2 AVG01-X SV-19 Pump B01-X Pneumatic Supply Isolation Valve

NC/NO

Pg. 2 AVG02B-X SV-20 Pump C02B-X Pneumatic Supply Isolation Valve

NC/NO

Pg. 2 AVG02D-X SV-21 Pump C02D-X Pneumatic Supply Isolation Valve

NC/NO

Pg. 2 AVG03-X SV-22 Pump D01-X Pneumatic Supply Isolation Valve

NC/NO

Pg. 2 AVN01-X SV-23 System Purge Supply Isolation Valve NCPg. 2 AVQ01-X SV-24 Blend Sample Isolation Valve NCPg. 2 AVW01E-X SV-25 DI Water Constituent Addition Isolation Valve NCPg. 2 AVW02-X SV-26 DI Water System Flush Isolation Valve NCPg. 2 SPARE SV-27 Spare

3-12 March 2014


Pg. 2 SPARE SV-28 SparePg. 2 SPARE SV-29 SparePg. 2 SPARE SV-30 SparePg. 2 SPARE SV-31 SparePg. 2 SPARE SV-32 Spare

Table 3-1. Mega SB100 Model 100 Automatic and Solenoid Valves (continued)

P&ID Location

AV Designation

EV Designation

Description Comments


March 2014 3-13

Device Reference List

The following is a complete device reference list for the Mega SB100 Model 100.

Table 3-2. Device Reference List

P&ID Location

Type Number State Description Comment

1/B7 AV B01-X NC Valve, Pneumatic, 2-way, Pump B01-X Inlet Isolation

1/D6 AV B02-X NC Valve, Pneumatic, 2-way, Local Recircu-lation Isolation

1/F5 AV B03-X NC Valve, Pneumatic, 2-way, Blend Dispense Isolation

1/E9 AV C01A-X NC Valve, Pneumatic, 2-way, Constituent A Dispense Isolation

1/E11 AV C01B-X NC Valve, Pneumatic, 2-way, Constituent B Dispense Isolation

1/E13 AV C01C-X NC Valve, Pneumatic, 2-way, Constituent C Dispense Isolation

1/E15 AV C01D-X NC Valve, Pneumatic, 2-way, Constituent D Dispense Isolation

1/E10 AV C02A-X NC Valve, Pneumatic, 2-way, Constituent A Circulation Isolation

1/E12 AV C02B-X NC Valve, Pneumatic, 2-way, Constituent B Circulation Isolation

1/E14 AV C02C-X NC Valve, Pneumatic, 2-way, Constituent C Circulation Isolation

1/E15 AV C02D-X NC Valve, Pneumatic, 2-way, Constituent D Circulation Isolation

1/E5 AV D01-X NC Valve, Pneumatic, 2-way, Blend Pumped Drain Isolation

1/E9 AV D02A-X NC/NO Valve, Pneumatic, 3-way, Constituent A Drain

Normally Closed to

Drain1/F11 AV D02B-X NC/NO Valve, Pneumatic, 3-way, Constituent B

Drain Normally Closed to

Drain1/F13 AV D02C-X NC/NO Valve, Pneumatic, 3-way, Constituent C


Drain1/F15 AV D02D-X NC/NO Valve, Pneumatic, 3-way, Constituent D


Drain

3-14 March 2014


1/B6 AV E01-X NC Valve, Pneumatic, 2-way, Pump B01-X Upstream Flush / Purge

1/C6 AV E02-X NC Valve, Pneumatic, 2-way, Pump B01-X Downstream Flush / Purge

2/G13 AV G01-X NC/NO Valve, Pneumatic, 3-way, Pump B01-X Pneumatic Supply Isolation

Normally Closed to

CDA Source

2/E13 AV G02B-X NC/NO Valve, Pneumatic, 3-way, Pump C02B-X Pneumatic Supply Isolation

Normally Closed to

CDA Source

2/F13 AV G02D-X NC/NO Valve, Pneumatic, 3-way, Pump C02D-X Pneumatic Supply Isolation

Normally Closed to

CDA Source

2/E13 AV G03-X NC/NO Valve, Pneumatic, 3-way, Pump D01-X Pneumatic Supply Isolation

Normally Closed to

CDA Source

2/G12 AV G04-X NC/NO Valve, Pneumatic, 5-port, Pump B01-X Shuttle

2/G7 AV N01-X NC Valve, Pneumatic, 2-way, System Purge Supply Isolation

1/C5 AV Q01-X NC Valve, Pneumatic, 2-way, Blend Sample Isolation

1/F8 AV W01E-X NC Valve, Pneumatic, 2-way, DI Water Constituent Addition Isolation

1/F13 AV W02-X NC Valve, Pneumatic, 2-way, DI Water System Flush Isolation

1/E4 CV D01-X ----- Check Valve, Blend Dispense Drain Back-flow Protection

1/B10 CV D02-X ----- Check Valve, Carboy Flush Drain Back-flow Protection

2/G6 CV N02-X ----- Check Valve, System Purge Back-flow Protection

1/F13 CV W01-X ----- Check Valve, System Flush Back-flow Protection

1/C9 CV W03A-X ----- Check Valve, Carboy A DI Flush Supply1/C11 CV W03B-X ----- Check Valve, Carboy B DI Flush Supply1/C12 CV W03C-X ----- Check Valve, Carboy C DI Flush Supply1/C14 CV W03D-X ----- Check Valve, Carboy D DI Flush Supply

Table 3-2. Device Reference List (continued)

P&ID Location



March 2014 3-15

1/F9 FICV W01E-X Field Set Flow Controller, Manual, Liquid, DI Water Constituent Addition

1/E8 LSHH B01-X NC Sensor, Level, Blend Tank High / High1/G4 LSHH B02-X NC Sensor, Level, External Distribution Tank

High / High1/G5 MV B01-X Closed Valve, Manual, 2-way, Blend Dispense

Isolation1/C8 MV D01-X Closed Valve, Manual, 2-way, Blend Tank Drain

Isolation2/H16 MV G01-X Closed Valve, Ball, Manual, 2-way, CDA Supply

Isolation2/B15 MV G02-X Closed Valve, Manual, 2-way, Solenoid Bank

Isolation2/H10 MV N01-X Closed Valve, Ball, Manual, 2-way, N2 Supply

Isolation1/C4 MV Q01-X Closed Valve, Needle, 2-way, Blend Sample

Attenuation / Isolation1/F15 MV Q02-X Closed Valve, Needle, 2-way, DI Water Sample

Attenuation / Isolation1/G12 MV W01-X Closed Valve, Manual, 2-way, DI Water Supply

Inlet Isolation1/G11 MV W02-X ----- Hand sprayer, DI Water1/G10 MV W03-X Closed Valve, Needle, 2-way, DI Water Return

Attenuation / Isolation1/C9 MV W05A-X Closed Valve, Needle, Carboy A Flush Isolation1/C11 MV W05B-X Closed Valve, Needle, Carboy B Flush Isolation1/C12 MV W05C-X Closed Valve, Needle, Carboy C Flush Isolation1/C14 MV W05D-X Closed Valve, Needle, Carboy D Flush Isolation1/B10 MV W06-X Closed Valve, Manual, 2-way, General Carboy

Flush Isolation2/G15 PCV G01-X 60 PSIG Regulator, Gas, CDA Supply to Pump

B01-X2/F15 PCV G02-X 60 PSIG Regulator, Gas, CDA Supply to Pump

S02D-X2/E15 PCV G04-X 60 PSIG Regulator, Gas, CDA Supply to Pump

C02B-X2/E15 PCV G05-X 60 PSIG Regulator, Gas, CDA Supply to Pump

D01-X2/D15 PCV G06-X 80 PSIG Regulator, Gas, CDA Supply to Solenoids


P&ID Location


3-16 March 2014


2/G9 PCV N01-X 2 PSIG Regulator, Gas, N2 Supply to Tank Blanket

2/G9 PCV N02-X 60 PSIG Regulator, Gas, N2 Supply to System Purge

2/G14 PDIS E01-X 0.1" H2O Vacuum

Switch, Differential Pressure, Insufficient Exhaust

2/G15 PI G01-X 70 / 30 PSIG

Switch, Pressure, Gas, CDA Supply to Pump B01-X High / Low

2/G15 PI G02-X 70 / 30 PSIG

Switch, Pressure, Gas, CDA Supply to Pump C02D-X High / Low

2/E15 PI G04-X 70 / 30 PSIG

Switch, Pressure, Gas, CDA Supply to Pump C02B-X CDA High / Low

2/E15 PI G05-X 70 / 30 PSIG

Switch, Pressure, Gas, CDA Supply to Pump D01-X High / Low

2/C15 PI G06-X 65 PSIG Switch, Pressure, Gas, CDA Supply to Solenoid Low

2/G9 PI N01-X 3 / 1 PSIG Switch, Pressure, Gas, Nitrogen Supply to Tank Blanket High / Low

2/G9 PI N02-X 30 PSIG Switch, Pressure, Gas, Nitrogen Supply to System Purge Low

2/G14 PSV G01-X 75 PSIG Relief Valve, CDA Supply to Pump B01-X2/G14 PSV G02-X 75 PSIG Relief Valve, CDA Supply to Pump C02D-

X2/E14 PSV G04-X 75 PSIG Relief Valve, CDA Supply to Pump C02B-

X2/E14 PSV G05-X 75 PSIG Relief Valve, CDA Supply to Pump D01-X2/G8 PSV N01-X 5 PSIG Relief Valve, N2 Supply to Tank Blanket2/G8 PSV N02-X 75 PSIG Relief Valve, N2 Supply to System Purge1/C5 Pump B01-X ----- Pump, Diaphragm, Blend Dispense Circuit1/D10 Pump C02A-X ----- Pump, Peristaltic, Constituent A Supply

Circuit1/D11 Pump C02B-X ----- Pump, Diaphragm, Constituent B Supply

Circuit1/D13 Pump C02C-X ----- Pump, Peristaltic, Constituent C Supply

Circuit1/D15 Pump C02D-X ----- Pump, Diaphragm, Constituent D Supply

Circuit1/B12 Pump D01-X ----- Pump, Diaphragm, Drain1/D8 Tank 01-X ----- Tank, Blend, 100L1/C7 WE B01-X Field Set Scale, Blend Tank


P&ID Location



March 2014 3-17

1/C10 WE C01A-X Field Set Scale, Constituent A Carboy1/C14 WE C01C-X Field Set Scale, Constituent C Carboy1/C7 YS B01-X NO Sensor, Empty, Blend Tank1/D9 YS C01A-X NO Sensor, Empty, Constituent A Carboy1/D11 YS C01B-X NO Sensor, Empty, Constituent B Carboy1/D13 YS C01C-X NO Sensor, Empty, Constituent C Carboy1/D15 YS C01D-X NO Sensor, Empty, Constituent D Carboy1/B14 YSS X01-X NC Detector, Leak, Cabinet1/G4 YSS X02-X NO HC Switch, Cabinet Door1/F5 YSS X03-X NO HC Switch, Carboy Compartment Door1/F5 YSS X04-X NO HC Switch, Sample Door1/E5 YSS X05-X NO HC Switch, Hose Compartment Door


P&ID Location


3-18 March 2014


March 2014 4-1

Chapter 4: Sequence of Operation


Sequence of Operations Overview................................................................4-2Chemical Addition...................................................................................4-2Batch Circulation and Dispense ..............................................................4-2Process Flush and Purge........................................................................4-3Carboy Flush ..........................................................................................4-3Sampling ................................................................................................4-3

4-2 March 2014

Sequence of Operation Mega SB100 Model 100

Sequence of Operations Overview

The Mega SB100 Model 100 system is an automated chemical blend unit which draws up to four chemicals from carboys and DI water from a house supply line to construct batches of a specific chemical composition. These batches are periodically discharged to a pre-existing dispense cart distribution tank. The basic operation of the system is divided into five basic functions: chemical addition, batch circulation and dispense, process flush & purge, carboy flush, and sampling.

Chemical Addition

The chemical addition function is defined by recipe. The operator can create up to 10 different recipes and store them for recall.

Pumps equipped in each chemical carboy supply line draw chemical from the carboy and dispense directly into a blend tank. Two of the chemical carboy supply circuits have been provided with double diaphragm, positive displacement pumps, and the two remaining chemical carboy circuits are equipped with fine granularity peristaltic pumps.

DI water can be added to the blend tank via a manual flow controller. A bulk scale on the blend tank will be used to meter the quantities of the two bulk chemical carboy feeds and the DI water house supply.

The two bulk chemical and the DI water addition events must occur in series; the order set in the recipe by the customer. The two fine chemical supply circuits must be added in series to the others, but can add material to the tank simultaneously to each other as high granularity scales located beneath these carboys will measure the quantity dispensed from each circuit regardless of the bulk tank mass reading.

Batch Circulation and Dispense

Once the chemicals have been added in the appropriate proportion, the blend tank contents can be circulated locally for a given period and added to an external distribution system tank. The operator will be able to select the exact duration of the qualifying mix period via a set point screen available on the HMI.

A tethered distribution tank high sensor will be placed on the customer's pre-existing distri-bution system tank. Once the blend circulation period is complete, the operator has accepted the batch, and the external distribution system tank level has not reached the high sensor set point, the blend system will fill the distribution tank.

The distribution tank fill operation will cease when the external distribution tank high sensor has tripped. If the operator has not accepted the batch, the system will pause and allow the operator to choose between adding other constituents to correct the batch concentration or directly aborting the batch. The former will be employed by creating and initiating a correction recipe to augment the batch. The latter will begin by an automatic

Mega SB100 Model 100 Sequence of Operation

March 2014 4-3

pumping of the tank contents to drain, and terminate with a flush and purge of the blend tank and local circulation circuit.

Process Flush and Purge

The flush and purge function has functional elements which allow complete removal of residual chemical upstream and downstream of the circulation pump. The flush process begins by filling the blend tank. The system will then circulate the DI water throughout the local circuit for a user-specified period of time and then the material will be pumped to drain. The operator will next be prompted to open the main tank drain valve to allow any residual flush material to be removed. The operator will then be prompted to initiate the upstream and downstream flushes of the circulation loop and confirm the manual tank drain valve is open.

When a user-defined period of time has elapsed, the flush valves will close, and the operator will be prompted to confirm the manual tank drain valve is open and initiate a purge of the system upstream and downstream of the circulation pump for a period specified by a timer within the set points screen. In this operation, the nitrogen purge valves leading to the system local circulation circuit will be activated. This flush and purge routine will be repeated for the number of iterations prescribed in the set points screen of the HMI.

Carboy Flush

Each of the carboy circuits can also be flushed. The operator can initiate the carboy flush procedure directly from the HMI. The operator will first be prompted to ensure none of the carboys contain chemical when the flush is initiated. Upon confirmation, the operator will be allowed to open the valve filling the carboys. The operator will remain at the tool, watch the carboy level, and when the carboys are full, shut off the carboy flush valve in the HMI screen. Next, the operator will be prompted to circulate the flush material through the local carboy circulation piping for a period designated by a set point chosen in the HMI screens. When this period has elapsed, the system will begin pumping material from the carboy to drain. The carboy drain process will continue until the carboy empty sensor fails to detect the presence of liquid for a prescribed period. The entire carboy flush process can be repeated as many times as desired by the operator.

Sampling

During the batch making process, the operator will have the opportunity to sample the batch and confirm the blend is according to specification before the system proceeds to dispense to the external distribution tank. The operator is prompted to take a sample after batch circulation is complete, and must accept, augment, or abort the batch before the distribution process will begin. The sample procedure will activate the circulation pump and close the circulation lines at the outlet of the pump. The operator will then open the sample valve from the HMI screen for the required time to fill the sample bottle to the desired level. When the sample bottle fill is complete, the operator will be prompted to confirm the sample has been drawn and can later confirm batch status in the HMI screen.

4-4 March 2014

Sequence of Operation Mega SB100 Model 100

March 2014 5-1

Chapter 5: System Operation


Startup/Shutdown .........................................................................................5-2Starting the System ................................................................................5-2Shutting the System Down......................................................................5-3

System Setup ...............................................................................................5-4Setting Timers ........................................................................................5-4Setting System Setpoints........................................................................5-5Alarm Setup............................................................................................5-7Recipe Setup ..........................................................................................5-9

Selecting a Recipe............................................................................5-9Editing a Recipe .............................................................................5-10

System Operation .......................................................................................5-12Responding to Alarms ..........................................................................5-12Restarting After an EMO Shutdown or Unexpected Loss of Power .......5-13Setting the System into Automatic Mode ..............................................5-14Setting the System in to Semi-Automatic Mode ....................................5-14Setting the System into Manual Mode...................................................5-15Changing a State Mode ........................................................................5-17Taking a Sample...................................................................................5-18

5-2 March 2014

System Operation Mega SB100 Model 100

Startup/Shutdown

The information in this section describes the steps for starting up and shutting down the Mega SB100 Model 100. If the system is already on, skip to System Setup (page 5-6) or System Operation (page 5-14).

Starting the System

Generally, the system is initially set up and powered on by an operator or engineer with an administrative password level. A restart is required after a power outage. Refer to the Restarting After an EMO Shutdown or Unexpected Loss of Power (page 5-15) section before restarting the system.

1. Ensure the drain pump is connected.

2. Toggle the AC disconnect switch to the On position.

3. Ensure that the EMO button is disengaged (pulled out).

4. Press the green Start button.

The system begins the startup procedure. The programmable logic controller (PLC) initializes and begin its first scan. When the setup is complete, the Main Menu (page 6-8) is displayed on the touch screen.

Figure 5-1. Main Menu

If the system fails to start, check the following items:

• AC disconnect is in the On position.

• EMO button is disengaged (pulled out).

• Power is supplied to the system (the green Start button has been pressed).

Mega SB100 Model 100 System Operation

March 2014 5-3

Shutting the System Down

After the initial start up, the system should remain continually powered on. Shutdown immediately halts any chemical and slurry dispensing in the related system. All valves and systems are returned to a fail safe mode.

Perform the following steps to shut down the system.

1. From the System Overview Screen (page 6-24), press the Mode Select button.

2. On the Mode Select popup, press the Off button. All operation of the system will stop except for the drain pump.

Figure 5-2. Mode Select - Off Button

3. Toggle the AC disconnect switch on the front of the system to the Off position.

5-4 March 2014


System Login

Password Permissions

The user password authorizes the user to view and/or edit various controls in the system. The interface is set up with the following levels of permissions:

• Level 0 - Default - allows minimal operator functions.

• Level 1 - Basic Operator - allows basic operator functions such as Automatic mode, Semi-automatic mode, State mode, applying recipes, and zeroing scales.

• Level 2 - Maintenance - allows maintenance level functions such as operating in Manual mode, and door alarm bypass.

• Level 3 - Customer Administrator - allows high-level functions such as editing recipes.

• Level 4 - Mega Fluids Access Only - used for diagnosing HMI transactions.

Password-protecting screens restrict changing system functions to personnel who are trained to understand and operate the system in a safe manner. Contact Mega Fluid Systems Customer Service for system passwords.

Logging Into the System

Each screen is password protected under the various levels of permission. If a screen contains password protection, the button to access the screen or function will indicate a login password is required.

From the Main Menu, press the Login button and enter the appropriate login password.

Figure 5-3. Main Menu - Login Level = 0


March 2014 5-5

In this instance (Figure 5-3), the user is currently logged in under the Level 0 - Default login. Should the user want to access the Maintenance screen, the user would press the Login button and enter the Level 2 - Maintenance password and the Maintenance button would display. Notice the Login button indicates the current login level.


Similarly, while in the System Overview screen, operation of the system cannot start unless logged in appropriately. The following screen is an example of the Mode Select popup when logged in under the 0 - Default login.


In this instance, press the Login button and enter login credentials higher than the default login, and the appropriate buttons will display.

5-6 March 2014


System Setup

This section describes the steps for setting up the system prior to operation. If the system is already on and set up, skip to System Operation (page 5-14).

Setting Timers

Many of the system activities are set to run for a specific amount of time. System timers are set from the Timers Screen (page 6-28). Timer values should only be changed with permission.

1. From the Main Menu, press Login to log in with the appropriate Maintenance credentials (if not logged in already).

2. Press the Maintenance button to access the Maintenance Screen (page 6-10).

Figure 5-6. Maintenance Screen

3. Press the Maint. Function selection box, and then press the Up/Down buttons to scroll to the Timers selection.

4. Press the Enter button to access the Timers screen.

NOTICEOBTAIN PERMISSION BEFORE CHANGING TIMERS!

Timer values should not be altered without proper permission. Erroneous values may have detrimental effects on the system.


March 2014 5-7

Figure 5-7. Timers Screen

5. Press the Timers selection box, and then press the Up/Down buttons to scroll to the appropriate timer.

6. Press the Enter button to access the timer values for the selected timer.

7. Press the Enter New Timer Preset field and enter a new timer setpoint value on the popup keypad (if necessary), and press the Enter key. A new timer value will display in the Selected Timer Preset field.

Setting System Setpoints

The system setpoints are defined on Setpoints Screen (page 6-22). Setpoint values should only be changed with the proper permission.



3. Press the Maint. Function selection box, and then press the Up/Down buttons to scroll to the Setpoints selection.

NOTICEOBTAIN PERMISSION BEFORE CHANGING SETPOINTS!

Setpoints should not be altered without proper permission. Erroneous values may have detrimental effects on the system.

5-8 March 2014



4. Press the Enter button to access the Setpoints screen.

Figure 5-9. Setpoints Screen

5. Press the Setpoints selection box, and then press the Up/Down buttons to scroll to the appropriate setpoint.

6. Press the Enter button to access the values for the selected setpoint.

7. Press the Enter New Setpoint Preset field and enter a new setpoint value on the popup keypad (if necessary), and press the Enter key. A new setpoint value will display in the Selected Setpoint Preset field.


March 2014 5-9

Alarm Setup

The alarm setpoints are defined on Alarm Setup Screen (page 6-5). Setpoint values should only be changed with the proper permission.



3. Press the Maint. Function selection box, and then press the Up/Down buttons to scroll to the Alarm Setup selection.


4. Press the Enter button to access the Alarm Setup screen.

NOTICEOBTAIN PERMISSION BEFORE CHANGING SETPOINTS!

Setpoints should not be altered without proper permission. Erroneous values may have detrimental effects on the system.

5-10 March 2014


Figure 5-11. Alarm Setup Screen

5. Press the Alarm Setpoints 1-32 selection box, and then press the Up/Down buttons to scroll to the appropriate setpoint. If the alarm setpoint is not in the 1-32 list, press the Right button to access Alarm Setup 33-64.

6. Press the Enter button to access the values for the selected alarm.

7. Press the Select Severity selection box, and then press the Up/Down buttons to scroll to the appropriate alarm severity selection.

8. Press the Enter button to select the severity, and then press the Apply button to apply the change.


March 2014 5-11

Recipe Setup

A recipe can be selected on the Recipe Viewer Screen (page 6-17) and edited on the Recipe Editor Screen (page 6-15). A total of ten (10) separate recipes can be loaded to the memory. Each recipe can contain up to ten (10) steps.

Selecting a Recipe

1. From the Main Menu, press Login to log in with the appropriate credentials (if not logged in already).

2. Press the Recipe button to access the Recipe Viewer Screen (page 6-17).

3. Press the Select Recipe selection box, and then press the Up/Down buttons to scroll to the Recipe selection.

Figure 5-12. Recipe Viewer Screen

4. Press the Enter button to access the values for the selected recipe. To view additional recipe steps, press the Right arrow button.

5. Press the Apply button to load the selected recipe into the system.

NOTICEOBTAIN PERMISSION BEFORE CHANGING RECIPES!

Recipes should not be altered or changed without proper permission. Erroneous values may have detrimental effects on the system.

5-12 March 2014


Editing a Recipe

1. From the Main Menu, press Login to log in with the appropriate credentials (if not logged in already).

2. Press the Recipe button to access the Recipe Viewer Screen (page 6-17).


Figure 5-13. Recipe Viewer Screen

4. Press the Enter button to access the values for the selected recipe. To view additional recipe steps, press the Right arrow button.

5. Press the Recipe Editor button to access the Recipe Editor Screen (page 6-15).

NOTICEOBTAIN PERMISSION BEFORE CHANGING RECIPES!

Recipes should not be altered or changed without proper permission. Erroneous values may have detrimental effects on the system.


March 2014 5-13

Figure 5-14. Recipe Editor Screen


7. Press the Enter button to select the highlighted recipe selection.

8. Press the Select Step selection box, and then press the Up/Down buttons to scroll to the Step selection.

9. Press the Enter button to select the highlighted recipe step to change.

10. Press the Select Type selection box, and then press the Up/Down buttons to scroll to the Step Type selection.

11. Press the Enter button to select the highlighted recipe step type to change.

12. Press the Value field and enter a new value for that recipe’s step type.

13. Press the Enter key to save the new value to the recipe step.

14. Repeat Step 6 through Step 13 until all step values have been entered. The last step in a recipe must be End Recipe.

15. Press the Apply button to save the entire recipe to the system.

5-14 March 2014


System Operation

This section describes the steps for operating the Mega SB100 Slurry Blending System, Model 100.

Responding to Alarms

Alarms are activated when a system interlock is tripped. Also see the Alarms and Warnings (page 7-1) chapter. There are three levels of alarms:

• Critical alarms are activated by urgent situations that require immediate attention and threaten the performance of the system. A critical alarm sounds the audible annunciator and shuts down the system.

• Process alarms are activated by situations that require immediate attention, but do not threaten the performance of the system. An audible annunciator is sounded and the sequence of actions are paused.

• Warning alarms are activated by situations that do not threaten the performance of the system. These situations do not require immediate attention, but must be fixed before the situation escalates into a situation that could threaten the performance of the system. A warning alarm sounds the audible annunciator.

Perform the following steps if an alarm is activated.

1. Read the alarm message and correct the problem. If the problem still exists, the alarm remains active.

2. To silence the alarm, press the Silence and/or the Ack (Acknowledge) button on the alarm popup.

3. Press the Close button to close the popup.


March 2014 5-15

Restarting After an EMO Shutdown or Unexpected Loss of Power

If the system shuts down while running an operation, it does not continue where it left off after the restart.

Perform the following steps to restart the system after an unexpected shutdown.

1. If the system is shut down due to the EMO switch, pull the EMO button out. Otherwise, skip to Step 2.

2. Press the green Start button. After the system fully initializes, a flush/purge sequence is performed (automatically) before a new batch can be created.

Note: To view all alarms, from the Main Menu, press the Alarms button to access the Alarm History Screen (page 6-3).

Figure 5-15. Alarm History Screen

Active alarms are displayed with a preceding asterisk (*). Once the alarm condition has been addressed, the asterisk disappears. Press the Up/Down buttons to scroll through the Alarm History.

5-16 March 2014


Setting the System into Automatic Mode

The following procedure places the system into Automatic operation.

1. From the Main Menu, press the System Overview button to access the System Overview screen.

2. Press Login to log in with the appropriate credentials (if not logged in already).

3. If the system is already in Automatic mode, the Start button will be present (skip to Step 5). If not, press the Mode Select button to access the Mode Select popup, and then press the Auto button.

Figure 5-16. System Overview - Mode Select Popup

4. Press the Close button to close the Mode Select popup.

5. Press the Start button to initiate operation in Automatic mode.

Setting the System in to Semi-Automatic Mode

The following procedure places the system into Semi-automatic operation, stopping at each step until prompted for the next step.



3. Press the Mode Select button to access the Mode Select popup, and then press the Semi Auto button.


March 2014 5-17


4. Press the Close button to close the Mode Select popup.

5. Press the Next button until all steps of the process have been completed, or until the mode selection has changed.

Setting the System into Manual Mode

Placing the system in Manual mode de-energizes all solenoid valves. This sets all valves in their normal (safe) state when Manual mode is activated. During Manual mode, you can manually toggle the valves open or closed by pressing the valve graphic on the System Overview screen.

Follow the P&ID Schematic (page 9-5) to determine which valves require activating to run the desired function(s). To reduce the possibility of pressure building up in the system piping:

In Manual mode, combinations of valves can accidentally be opened or closed that are outside the scope of the equipment design. The operator assumes all responsibility for running the system in Manual mode.

If... start...opening valves downstream and move in the upstream

direction.closing valves upstream and move downstream.

5-18 March 2014




3. Press the Mode Select button to access the Mode Select popup, and then press the Manual button.


4. Press the Close button to close the Mode Select popup. The system is now in Manual mode.

CAUTIONMONITOR SYSTEM IN MANUAL MODE!

Some alarms may not function in Manual mode. Potential hazards may be created. Use caution.

NOTICEMANUAL MODE PLACES VALVES IN FAIL SAFE POSITION!

Setting the system to Manual mode, places all valves in the fail safe position.


March 2014 5-19

Changing a State Mode

The State Mode Functions screen is used to apply system functions to individual system states.



3. Press the States button, or press the Mode Select button to access the Mode Select popup, and then press the State button.


The State Mode Functions screen opens.

Figure 5-20. State Mode Functions Screen

5-20 March 2014


4. Press the system state in which you wish to change function.

5. Press the Up/Down buttons to scroll through the list of available functions, and then press the Enter button to activate that function.

For example: Select Bottle A, scroll down and select Recirc Bottle A.

6. Press the Overview button to return to the System Overview screen.

Taking a Sample

System chemistry can be sampled through the sample port. Sampling chemical exposes the operator to chemical hazards. Be sure to check the MSDS for safety information and use the proper PPE. Use a sealable container approved for use with the chemicals.


Sampling system chemistry exposes the operator to chemical hazards. Read the site MSDS for safety

information and PPE requirements. Use an approved container to hold the sample.

Equipment Required • MSDS for all system chemistry.• PPE required by site and recommended on MSDS,

including, but not limited to: protective clothing, eye shields, gloves, and hearing protection.

• Sealable container approved for use with the chemical or slurry.


March 2014 5-21

The Sample popups occur automatically at the prescribed time, or can be accessed by pressing the Sample button from the Maintenance Screen (page 6-10) but only after liquid addition.

1. Wear the proper PPE. Refer to the MSDS and site regulations.

Figure 5-21. Take a Sample Prompt

2. When the Sample prompt displays:

3. Open the sample door, and place the sample container approved for use with the chemical or slurry, and then close the door.

4. Press the Accept button to start the sample dispense.

The Remove the Sample popup displays.

If... then...bypassing the sample step, press the Cancel button to bypass and proceed with

the process.taking a sample, press the sample dispense quantity field and enter the

sample amount in millimeters.

Note: The Sample Dispense Timer should be adequately set to dispense the sample quantity requested in this field. Refer to the Timers Screen (page 6-28) for setting Sample Dispense timers.

5-22 March 2014


Figure 5-22. Remove the Sample Popup

5. Open the door, remove the container, and then close the door.

6. Press the Accept button to indicate the sample door has been closed.

The Batch Qualification popup displays.

Figure 5-23. Batch Qualification Popup

7. Perform the site specific qualification tests on the sample.


March 2014 5-23

8. Based on the sample qualification results:

9. Remove PPE and dispose according to site regulations and MSDS requirement.

If the sample qualification... then...passes, press the Accept button to dispense to the

External tank.does not pass, press the Cancel button to abort and pump the

batch contents to drain.

5-24 March 2014


March 2014 6-1

Chapter 6: User Interface

This chapter describes the PanelView screens for the Mega SB100 Slurry Blending System, Model 100:

About Screen ................................................................................................6-2Alarm History Screen ....................................................................................6-3Alarm Popup .................................................................................................6-4Alarm Setup Screen......................................................................................6-5Constituent Overview Screen(s) ...................................................................6-6Main Menu....................................................................................................6-8Maintenance Screen ...................................................................................6-10Manual Valves Screen(s) ............................................................................6-12Mode Select Popup.....................................................................................6-14Recipe Editor Screen ..................................................................................6-15Recipe Viewer Screen ................................................................................6-17Sample Popup(s) ........................................................................................6-19Setpoints Screen ........................................................................................6-22State Mode Functions Screen.....................................................................6-23System Overview Screen............................................................................6-24Tank Overview Screen................................................................................6-26Timers Screen ............................................................................................6-28

6-2 March 2014

User Interface Mega SB100 Model 100

About Screen

Use the About screen to view the system information.

To access, press About from the Main Menu (page 6-8).

Figure 6-1. About Screen

Table 6-1. Field/Button Descriptions

Field/Button DefinitionFunction ButtonsShutdown Press this button to shut down the software. Only those

with approval should shut down software.Diag Press this button to view system diagnostics.Main Press this button to return to the Main Menu (page 6-8).

Mega SB100 Model 100 User Interface

March 2014 6-3

Alarm History Screen

Use the Alarm History screen to view past and present alarms.

To access, press Alarms from the Main Menu (page 6-8).

Figure 6-2. Alarm History Screen


Field/Button DefinitionAlarm Time This field indicates the date and time of an alarm. Active

alarms are indicated by an asterisk.Message This field is a description of the alarm.Function ButtonsClose Press the Close button to close the Alarm History

screen and return to the Main Menu (page 6-8).Up/Down Press the Up/Down buttons to scroll up and down

through the alarm list.Silence Press the Silence button to silence an audible alarm.Ack Press the Ack button to acknowledge an alarm. An

alarm must be addressed or the alarm condition will continue.

6-4 March 2014


Alarm Popup

Alarm popups are displayed when an alarm condition occurs. Alarms must be addressed or the alarm condition will continue.

Figure 6-3. Alarm Popup


Field/Button DefinitionAlarm Description Describes the time, date, and active alarm condition.Function ButtonsClose Press this button to close the alarm popup.Silence Press the Silence button to silence an audible alarm.Ack Press the Ack button to acknowledge an alarm. An

alarm must be addressed or the alarm condition will continue.


March 2014 6-5

Alarm Setup Screen

Use the Alarm Setup screen to set up alarms with severity levels (warning, process, or critical).

To access, from the Maintenance Screen (page 6-10), scroll through the Maintenance Function selections, highlight Alarm Setup, and press the Enter key on the screen.

Figure 6-4. Alarm Setup Screen


Field/Button DefinitionAlarm selection The alarm selection field is used to select alarms for

setup.Severity selection The severity selection field is used to select and apply a

severity level to the alarm chosen in the alarm selection field.

Function ButtonsUp/Down Press the Up/Down buttons to scroll through the

selection options of a chosen selection field.Enter Press the Enter button to accept the chosen item in a

selection field.Apply Press the Apply button to apply the selection chosen

from the severity selection field.Maint Menu Press the Maint Menu button to return to the

Maintenance Screen (page 6-10).Alarms Press the Alarms button to access the About Screen

(page 6-2).

6-6 March 2014


Constituent Overview Screen(s)

Use the Constituent Overview screens to view and control the operation of a single bottle feed station.

To access, press Bottle A, Bottle B, Bottle C, or Bottle D respectively from the Main Menu (page 6-8). Alternately, to access the Constituent Overview screens, press the appropriate bottle graphic on the System Overview Screen (page 6-24).

Figure 6-5. Constituent Overview Screen


Field/Button DefinitionThis graphic represents a running pump. The valve which controls air flow to the pump is open.

This graphic represents an idle pump. The valve which controls air flow to the pump is closed.

This graphic represents a valve whose control solenoid is energized. This valve is in its actuated state (i.e., a normally closed valve will be open; a normally open valve will be closed).This graphic represents a valve whose control solenoid is de-energized. This valve is in its normal state (i.e., a normally closed valve will be closed; a normally open valve will be open).

These graphics represent three-way valves. The darkened ports indicate which ports are open. Activation depends on the configuration of the valve.


March 2014 6-7

This graphic represents a liquid sensor that currently senses air.This graphic represents a liquid sensor that currently senses liquid.

WE-S01C / WE-C01A This field indicates the weight of the slurry or chemical in the bottle.

Tare field This field indicates the bottle tare weight.Function ButtonsZero Scale Press the Zero Scale button to zero the scale (visible

only on Constituent A and Constituent C screens).

Zeroing is done when the scale is empty or with an empty bottle on it. This will affect the warning alarms that warn about low bottle mass. The low mass setting only affects the system by warning the operator (if the alarm is set as a warning – its default setting). The process will proceed until the bottle is sensed empty.

Overview Press the Overview button to access the System Overview Screen (page 6-24) screen.

Alarms Press the Alarms button to access the Alarm History Screen (page 6-3).

Table 6-5. Field/Button Descriptions (continued)

Field/Button Definition

6-8 March 2014


Main Menu

Use the Main Menu to access various screens in the system.

Figure 6-6. Main Menu


Field/Button DefinitionFunction ButtonsSystem Overview Press this button to access the System Overview

Screen (page 6-24).Bottle A Press this button to access the Constituent A screen

Refer to Constituent Overview Screen(s) (page 6-6).Bottle B Press this button to access the Constituent B screen

Refer to Constituent Overview Screen(s) (page 6-6).Bottle C Press this button to access the Constituent C screen

Refer to Constituent Overview Screen(s) (page 6-6).Bottle D Press this button to access the Constituent D screen

Refer to Constituent Overview Screen(s) (page 6-6).Recipe Press this button to access the Recipe Viewer Screen

(page 6-17).About Press this button to access the About Screen (page 6-

2).


March 2014 6-9

Maintenance Press this button to access the Maintenance Screen (page 6-10).

Alarms Press this button to access the Alarm History Screen (page 6-3).

Login Press this button to access the Login screen. Not available at this time.



6-10 March 2014


Maintenance Screen

Use the Maintenance screen to view and edit maintenance functions such as timers, setpoints, and alarms. This screen requires the appropriate login Maintenance credentials.

To access, press Maintenance from the Main Menu (page 6-8).



Field/Button DefinitionMaintenance Functions Press this selection field to access various maintenance

function screens, such as the Timers Screen (page 6-28), Manual Valves Screen(s) (page 6-12), Alarm Setup Screen (page 6-5), and Setpoints Screen (page 6-22).



selection field.Bottle A/B/C/D On/Off Press the toggle switches to turn on or off a selected

bottle.


March 2014 6-11

Main Press the Main button to access the Main Menu (page 6-8).

Take Sample Press the Take Sample button to access the Sample Popup(s) (page 6-19) to take a sample (only after the liquid addition sequence).




6-12 March 2014


Manual Valves Screen(s)

The Manual Valves screens are used to control the manual valves in the system while in Manual mode.

To access, from the Maintenance Screen (page 6-10), scroll through the Maintenance Function selections, highlight Manual I/O, and press the Enter key on the screen.

Figure 6-8. Manual Valves Screen

Note: Manual valves can also be controlled on the various Overview screens while in Manual mode.


Field/Button DefinitionThis graphic represents a running pump. The valve which controls air flow to the pump is open. Press this graphic to toggle the air flow valve to the pump closed.This graphic represents an idle pump. The valve which controls air flow to the pump is closed. Press this graphic to toggle the air flow valve to the pump open.This graphic represents a valve whose control solenoid is energized. This valve is in its actuated state (i.e., a normally closed valve will be open; a normally open valve will be closed). Press this graphic to toggle the valve between open and closed.


March 2014 6-13

This graphic represents a valve whose control solenoid is de-energized. This valve is in its normal state (i.e., a normally closed valve will be closed; a normally open valve will be open). Press this graphic to toggle the valve between open and closed.

These graphics represent three-way valves. The darkened ports indicate which ports are open. Activation depends on the configuration of the valve. Press this graphic to toggle the valve states between open and closed.

Function ButtonsMaint Menu Press the Maint Menu button to access the

Maintenance Screen (page 6-10).Previous Screen Press the Previous button to access the previous

Manual I/O screen.Next Screen Press the Next button to access the next Manual I/O

screen.



6-14 March 2014


Mode Select Popup

The Mode Select popup is used to select the current operating mode. This popup requires the appropriate login credentials to view buttons for accessing certain screens.

To access, press Mode Select from the System Overview Screen (page 6-24).

Figure 6-9. Mode Select Popup


Field/Button DefinitionFunction ButtonsAuto Press the Auto button and then the Close button to set

the system in automatic mode by way of the Start button.

Semi Auto Press the Semi Auto button and then the Close button to set the system in semi-automatic mode. Semi-automatic mode steps the user through the recipe steps by way of a Next button.

Manual Press the Manual button and then the Close button to set the system in manual mode.

State Press the State button to access the State Mode Functions Screen (page 6-23) where individual functions can be applied to individual system states.

Off Press the Off button to set the system in the off mode.Close Press the Close button to close the popup.


March 2014 6-15

Recipe Editor Screen

Use the Recipe Editor screen to edit recipe steps in a given recipe. This screen requires the appropriate login Customer Administrator credentials.

To access, press Recipe from the Main Menu (page 6-8).

Figure 6-10. Recipe Edit Screen


Field/Button DefinitionSelect Recipe Press this selection field to select a recipe to edit.Select Step Press this selection field to select the step to edit from

the previously selected recipe.Select Type Press this selection field to select the step type from the

previously selected recipe step.Recipe Value Enter the new recipe value for the step type chosen.Function ButtonsUp/Down Press the Up/Down buttons to scroll through the


selection field.Apply Press the Apply button to apply the recipe value

entered.

6-16 March 2014



Recipe Viewer Press the Recipe Viewer button to access the Recipe Viewer Screen (page 6-17).





March 2014 6-17

Recipe Viewer Screen

Use the Recipe Viewer screen to view steps in a selected recipe, and to download and activate the selected recipe. Customer Administrator login credentials are required to access the Recipe Editor and the Apply button on this screen.

To access, press Recipe Viewer from the Recipe Editor Screen (page 6-15).

Figure 6-11. Recipe View Screen


Field/Button DefinitionSelect Recipe Press this selection field to select a recipe to view.Step This field indicates the steps from the selected recipe.Step Type This field indicates the step types from the selected

recipe.Step Value This field indicates the recipe value for the steps of a

selected recipe.Function ButtonsUp/Down Press the Up/Down buttons to scroll through the


selection field.Left Arrow Press the Left Arrow button to view the next steps of

the selected recipe.Apply Press the Apply button to download the selected recipe

as the active recipe.

6-18 March 2014



Recipe Editor Press the Recipe Editor button to access the Recipe Editor Screen (page 6-15).





March 2014 6-19

Sample Popup(s)

The Sample popups indicate the steps for taking a sample. Samples are initiated after the liquid addition to confirm the batch quality.

The Sample popups occur automatically at the prescribed time, or can be accessed by pressing the Sample button from the Maintenance Screen (page 6-10) but only after liquid addition.

Figure 6-12. Sample Popup - Take a Sample


Field/Button DefinitionSample Dispense Quantity The field used to enter the sample quantity, in milliliters.

Note: The Sample Dispense Timer should be adequately set to dispense the sample quantity requested in this field. Refer to the Timers Screen (page 6-28) for setting Sample Dispense timers.

Setting the timer excessively high will not protect from a spill if the flow rate has been adjusted high (via the manual valve), the dispense amount is selected high, and/or the system is left unattended.

6-20 March 2014


Figure 6-13. Sample Popup - Remove Sample

Function ButtonsCancel Press the Cancel button to cancel the sampling

process and proceed with the process.Accept Press the Accept button to accept the sample quantity

and continue to the Remove the Sample popup.


Field/Button DefinitionFunction ButtonsAccept Press the Accept button after the sample has been

removed and the door has been closed.




March 2014 6-21

Figure 6-14. Sample Popup - Batch Qualification


Field/Button DefinitionFunction ButtonsCancel Press the Cancel button to abort and pump to the drain.Accept Press the Accept button to start the dispense to the

external tank.

6-22 March 2014


Setpoints Screen

The Setpoints screen is used to select and enter system preset values. This screen requires the appropriate login Maintenance credentials.

To access, from the Maintenance Screen (page 6-10), scroll through the Maintenance Function selections, highlight Setpoints, and press the Enter key on the screen.

Figure 6-15. Setpoints Screen


Field/Button DefinitionSetpoint Selection Press this selection field to select a setpoint to change.Selected Setpoint Preset This field indicates the value of the selected setpoint.Enter New Setpoint Preset Press this field to enter the new setpoint value for the

selected setpoint. A keypad displays. Select a value on the keypad, and press the Enter key to accept.



selection field.Maint Menu Press the Maint Menu button to access the

Maintenance Screen (page 6-10).Alarms Press the Alarms button to access the Alarm History

Screen (page 6-3).


March 2014 6-23

State Mode Functions Screen

The State Mode Functions screen is used to apply system functions to individual system states. This screen requires the appropriate operator login credentials.

To access, from the System Overview Screen (page 6-24), press the Mode Select button, and then press State Mode from the Mode Select Popup (page 6-14).

Figure 6-16. State Mode Screen


Field/Button DefinitionBottle A/B/C/DDI Water FeedTank

Select the appropriate state and press the Up/Down buttons to scroll through and choose an individual function.

For example:Select Bottle A, scroll down and select Recirc Bottle A.



selection field.Overview Press the Overview button to access the System

Overview Screen (page 6-24).Alarms Press the Alarms button to access the Alarm History

Screen (page 6-3).

6-24 March 2014


System Overview Screen

The System Overview screen is used to view the system as it is operating.

To access, press System Overview from the Main Menu (page 6-8).

Figure 6-17. System Overview Screen


Field/Button DefinitionThis graphic represents a running pump. The valve which controls air flow to the pump is open. Press this graphic to toggle the air flow valve to the pump closed.This graphic represents an idle pump. The valve which controls air flow to the pump is closed. Press this graphic to toggle the air flow valve to the pump open.This graphic represents a valve whose control solenoid is energized. This valve is in its actuated state (i.e., a normally closed valve will be open; a normally open valve will be closed). Press this graphic to toggle the valve between open and closed.This graphic represents a valve whose control solenoid is de-energized. This valve is in its normal state (i.e., a normally closed valve will be closed; a normally open valve will be open). Press this graphic to toggle the valve between open and closed.


March 2014 6-25

These graphics represent three-way valves. The darkened ports indicate which ports are open. Activation depends on the configuration of the valve. Press this graphic to toggle the valve states between open and closed.This graphic represents a liquid sensor that currently senses air.This graphic represents a liquid sensor that currently senses liquid.

Function ButtonsMain Press the Main button to access the Main Menu

(page 6-8).Mode Select Press the Mode Select button to access the Mode

Select Popup (page 6-14).Alarms Press the Alarms button to access the Alarm History

Screen (page 6-3).



6-26 March 2014


Tank Overview Screen

Use the Tank Overview screen to view operations on the dispense side of the system.

To access, press the tank graphic on the System Overview Screen (page 6-24).

Figure 6-18. Tank Overview Screen


Field/Button DefinitionThis graphic represents a running pump. The valve which controls air flow to the pump is open. Press this graphic to toggle the air flow valve to the pump closed.This graphic represents an idle pump. The valve which controls air flow to the pump is closed. Press this graphic to toggle the air flow valve to the pump open.This graphic represents a valve whose control solenoid is energized. This valve is in its actuated state (i.e., a normally closed valve will be open; a normally open valve will be closed). Press this graphic to toggle the valve between open and closed.This graphic represents a valve whose control solenoid is de-energized. This valve is in its normal state (i.e., a normally closed valve will be closed; a normally open valve will be open). Press this graphic to toggle the valve between open and closed.


March 2014 6-27

These graphics represent three-way valves. The darkened ports indicate which ports are open. Activation depends on the configuration of the valve. Press this graphic to toggle the valve states between open and closed.This graphic represents a liquid sensor that currently senses air.This graphic represents a liquid sensor that currently senses liquid.

WE-B01 This field indicates the weight of the tank.Function ButtonsOverview Press the Overview button to access the System

Overview Screen (page 6-24).Alarms Press the Alarms button to access the Alarm History

Screen (page 6-3).



6-28 March 2014


Timers Screen

Use the Timers screen to select and edit the system timers. This screen requires the appropriate login Maintenance credentials.

To access, from the Maintenance Screen (page 6-10), scroll through the Maintenance Function selections, highlight Timers, and press the Enter key on the screen.

Figure 6-19. Timers Screen


Field/Button DefinitionTimers Press this selection field to select a timer to edit.Selected Timer Preset This field indicates the selected timer’s preset value.Selected Timer Accumulation This field indicates the selected timer’s accumulated

value.Enter New Timer Preset Press this field to enter a new timer preset value. A

keypad displays. Select a value on the keypad, and press the Enter key to accept.



selection field.Maint Menu Press the Maint Menu button to access the

Maintenance Screen (page 6-10).Alarms Press the Alarms button to access the Alarm History

Screen (page 6-3).

March 2014 7-1

Chapter 7: Alarms and Warnings


Software Interlocks .......................................................................................7-2Critical Interlocks ....................................................................................7-2Process Interlocks ..................................................................................7-2Warnings ................................................................................................7-2Interlock Alarms......................................................................................7-3

7-2 March 2014

Alarms and Warnings Mega SB100 Model 100

Software Interlocks

A software interlock is a computer-controlled lock/alarm under which a device may or may not be allowed to operate. Software interlocks are incorporated in order to ensure the safety of the operator and to protect the product being processed. The interlocks trigger an alarm condition. The alarms have three states, active, acknowledged, and reset.

An active alarm indicates the interlock is currently tripped, but has not been acknowledged. The audible annunciator, is sounded when active alarms exist. When an operator presses the acknowledge key, the audible annunciator is turned off, and the alarm is lowered to the acknowledged state. When the operator presses the reset key, the alarm is reset. If the condition which caused the interlock has not been corrected, the alarm is reactivated. The alarm, active time, and acknowledged time is stored viewed from the Alarm History Screen (page 6-3). The Mega SB100 Model 100 includes three types of alarms: critical, process, and warnings which are defined in this chapter.

Software interlocks can be configured to any type (critical, process, or warning). When an alarm is triggered, the type of alarm will be differentiated by color; critical is red, process is yellow, and warning is blue.

Critical Interlocks

Critical interlocks are activated by situations that require immediate attention and threaten the performance of the system. Critical interlocks signal a shutdown of the system and prevent a potentially dangerous situation to the operator and system. A critical alarm is a condition that prevents the system from continuing the blend and dispense operations. A critical alarm can place a single station or the entire Mega SB100 Model 100 system into a stopped state.

Process Interlocks

Process interlocks are activated by those situations that need immediate attention and could threaten the performance of the system. While process interlocks do not shut down the system, the problem could escalate into a potentially dangerous situation to the operator and system if not addressed promptly. Process interlocks activate the filter bypass, so that distribution will continue but without filtration.

Warnings

Warnings are activated by those situations that do not need immediate attention, but could escalate into a more serious problem if ignored.

Mega SB100 Model 100 Alarms and Warnings

March 2014 7-3

Interlock Alarms

The following table lists all critical interlocks, process interlocks, and warnings, and provides a list of possible causes with suggested actions to be taken in order to correct the condition. Alarms are listed in alphabetical order.

Table 7-1. Alarms List

Interlock Tag Possible Reason Required Action

Dist -- System In ManualSystem has been placed in manual mode.

Acknowledge that the operator viewed the information. Place the machine in Full-Auto mode and start the process if material is needed.

Dist -- Dist Pump Offline During DemandPump B01-X off line when LSHHB02-X detects air.

Not used in this machine that has a single distribution pump.

Dist -- Demand When Tank EmptyLSHHB02-X detects air when YSB01-X detects air.

Acknowledge that the operator viewed the information. Place the machine in Full-Auto mode and start the process if material is needed.

Dist -- Circ Pump Active When Tank EmptyPump B01-X circulating when YSB01-X detects air.

Inspect the machine for reasons the pump ran dry for too long. Ensure the Air Detection (Tank Empty) Debounce Timer (Sec) is set near 2 to 5 seconds.

Dist -- Excess Rate Of Tank Level DecreaseBlend tank level decreases at rate exceeding tank level decrease rate set point.

Inspect system for leaks.

Blend -- Excess Rate Of Tank Level IncreaseBlend tank level increases at rate exceeding tank level increase rate set point.

Inspect system for leaks.

7-4 March 2014


Blend / Dist -- Tank High Level ActivatedTank mass exceeds tank excess mass set point.

Inspect system for failures. Ensure the Tank Full Mass (kg) setting is an acceptable value.

Blend / Dist -- Tank High - High Level ActivatedLSHHB01-X detects liquid in tank at high / high level.

Inspect system for failures. Ensure the Tank Full Mass (kg) setting is an acceptable value.

Dist -- Tank Mass Low During DemandTank mass <= tank low mass set point when LSHHB02-X detects air.

Inspect for system failures. Ensure the current active recipe can keep up with demand.Ensure the Tank Empty Mass (kg) setting is acceptable.

Dist -- Tank Mass Low During Local CirculationTank mass <= tank low mass set point when LSHHB02-X detects air.

Inspect the system for leaks. Ensure the Tank Empty Mass (kg) setting for an acceptable value.

Blend -- Maximum Blend Time ExceededTime to create blend exceeds max.imum blend time set point.

Ensure the current active recipe is acceptable.

Ensure Maximum Blend Time (Min) is set acceptably.

Blend -- Maximum Constituent Addition Time ExceededTime to add constituent exceeds maximum constituent addition time set point.

Inspect the constituent addition system for proper operation. Ensure the Maximum Blend Time (Min) is set to an acceptable setting.

Blend -- Qualification Time ExceededTime for operator to provide qualification disposition exceeds qualification time exceeded set point.

Ensure the Maximum Qualifi-cation Time (Min) is set to an acceptable setting.

Table 7-1. Alarms List (continued)



March 2014 7-5

Blend -- Sample Time ExceededTime for operator to initiate sample extraction after blend completion exceeds maximum sample time set point.

Ensure the Sample Addition Maximum Time (Sec) is set to an acceptable setting.

Blend -- Constituent A Source EmptyYSC01A-X detects air during constituent A addition step.

Inspect the sensor for proper adjustment. Replenish the chemical supply bottle.

Blend -- Constituent B Source EmptyYSC01B-X detects air during constituent B addition step.


Blend -- Constituent C Source EmptyYSC01C-X detects air during constituent C addition step.


Blend -- Constituent D Source EmptyYSC01D-X detects air during constituent D addition step.


Blend -- Constituent A Source Mass LowWEC01A-X detects low source vessel mass.

Inspect the sensor for proper adjustment. Replenish the chemical supply bottle.Check Low Source Mass Setpoint (g) for acceptable setting.



7-6 March 2014


Blend -- Constituent C Source Mass LowWEC01C-X detects low source vessel mass.

Inspect the sensor for proper adjustment. Replenish the chemical supply bottle.Check Low Source Mass Setpoint (g) for acceptable setting.

Blend / Dist -- Pump B01-X Pneumatic Supply Pressure HighPIG01-X detects high pressure in pump B01-X pneumatic supply line.

Ensure the regulator adjustment and alarm setpoints are correct. Inspect system for path restrictions.Inspect the facility supply line for a flow rate that is capable of meeting the specifications of this machine.

Blend / Dist -- Pump B01-X Pneumatic Supply Pressure LowPIG01-X detects low pressure in pump B01-X pneumatic supply line.


Blend -- Pump C02D-X Pneumatic Supply Pressure HighPIG02-X detects high pressure in pump C02D-X pneumatic supply line.





March 2014 7-7

Blend -- Pump C02D-X Pneumatic Supply Pressure LowPIG02-X detects low pressure in pump C02D-X pneumatic supply line.


Blend -- Pump C02B-X Pneumatic Supply Pressure High PIG04-X detects high pressure in pump C02B-X pneumatic supply line.


Blend -- Pump C02B-X Pneumatic Supply Pressure LowPIG04-X detects low pressure in pump C02B-X pneumatic supply line.


Blend / Dist -- Pump D01-X Pneumatic Supply Pressure HighPIG05-X detects high pressure in pump D01-X pneumatic supply line.




7-8 March 2014


Blend / Dist -- Pump D01-X Pneumatic Supply Pressure LowPIG05-X detects low pressure in pump D01-X pneumatic supply line.


Blend / Dist -- Solenoid Pneumatic Supply Pressure LowPIG06-X detects low pressure in pneumatic supply to solenoids.


Blend / Dist -- Tank Blanket High Pneumatic Supply PressurePIN01-X detects high pressure in pneumatic supply to tank.


Blend / Dist -- Tank Blanket Low Pneumatic Supply PressurePIN01-X detects low pressure in pneumatic supply to tank.





March 2014 7-9

Blend / Dist -- Low System Purge PressurePIN02-X detects low pressure in purge line.


Blend / Dist -- Process Cabinet LeakYSSX01-X detects liquid on floor of process cabinet.

Ensure the drain pump is hooked up and operational. Check the buoyancy switch is free of obstruction and is providing a signal to the PLC when not liquid is present. Inspect the floor drain paths for obstructions.

Blend / Dist -- Process Cabinet Door OpenYSSX02-X detects process cabinet door open.

Close the cabinet door. Acknowledge the alarm and restart the system as required.

Blend -- Carboy Compartment Door OpenYSSX03-X detects carboy compartment door open.


Blend / Dist -- Sample Compartment Door OpenYSSX04-X detects sample compartment door open.




7-10 March 2014


Blend / Dist -- Hose Compartment Door OpenYSSX05-X detects hose compartment door open.

Close the cabinet door. Acknowledge the alarm and restart the system as required. If set up as a warning, then acknowledge the alarm and continue with the intended use of the system.

Blend / Dist -- Insufficient Exhaust VacuumPDISE01-X detects insufficient exhaust vacuum pressure.

Inspect the exhaust system for correct air flow through the system.

Blend -- Batch Pot Life ExceededBatch lifetime exceeds pot life timer.

Ensure the setting for Maximum Batch Pot Life Time (Min) is correct for the intended use of the system. If set up as a warning, then acknowledge the alarm and continue with the intended use of the system.



March 2014 8-1

Chapter 8: Maintenance

The procedures in this chapter are used during general preventative maintenance procedures but also apply when troubleshooting component problems. Read and follow the Safety Precautions (page 8-3) section before attempting any preventative maintenance or troubleshooting procedures.

Safety Precautions........................................................................................8-3General System Maintenance .......................................................................8-4

Removing and Isolating Components .....................................................8-4Removing and Isolating Electrical Components ......................................8-5Compact Flash Card ...............................................................................8-7Flowmeters .............................................................................................8-7Pressure Reducing Gas Regulators........................................................8-8Pressure Switches ..................................................................................8-8

Gas Digital Pressure Switches..........................................................8-8Preventive Maintenance .............................................................................8-11

Maintenance Schedule .........................................................................8-11Preparation.....................................................................................8-11Equipment ......................................................................................8-11

Weekly Preventive Maintenance Procedures ..............................................8-12Visual System Inspection......................................................................8-12Verifying the Device Settings ................................................................8-13Adjusting the Humidifier Settings ..........................................................8-14

Monthly Preventive Maintenance Procedures .............................................8-16Checking Pump Operation ....................................................................8-16Checking Leak Detectors......................................................................8-17Tank Scale Verification .........................................................................8-19Liquid and Level Sensor Maintenance ..................................................8-20

Adjusting Sensitivity of Line Liquid Sensors....................................8-21Calibrating the Blend Tank Level Proximity Sensors.......................8-22

Quarterly Preventive Maintenance Procedures ...........................................8-25Testing Alarms......................................................................................8-25Valves and Pressure Gauges ...............................................................8-26

Electrical Solenoid Valves (EV) ......................................................8-26Automatic Valves (AV)....................................................................8-27Check Valves (CV) .........................................................................8-27Manual Valve (MV) .........................................................................8-28

8-2 March 2014

Maintenance Mega SB100 Model 100

Pressure Relief Valve .....................................................................8-28Gas Line Maintenance....................................................................8-29

Semi-Annual Preventive Maintenance Procedures .....................................8-32Fittings..................................................................................................8-32

Checking the Fittings ......................................................................8-32Replacing Fittings ...........................................................................8-33

Rebuilding Pumps.................................................................................8-34Isolating and Removing Pumps ......................................................8-34

Annual Preventive Maintenance Procedures...............................................8-36Lithium Battery......................................................................................8-36

Replacing the Lithium Battery .........................................................8-36Disposing the Lithium Battery .........................................................8-37

EMO Testing.........................................................................................8-38Completing Preventive Maintenance Procedures........................................8-39

Cabinet Cleaning ..................................................................................8-39Maintenance Forms ....................................................................................8-40

Work Order Form..................................................................................8-41Preventive Maintenance Form ..............................................................8-42Device Settings Record Sheet ..............................................................8-44

Mega SB100 Model 100 Maintenance

March 2014 8-3

Safety Precautions

Review all of the following safety messages before performing any maintenance procedures. Compliance to safety warnings prevent unnecessary risks to operators and equipment.


The exhaust effluent may contain chemical (vapor or liquid). It should be handled and treated accordingly for compliance to

safety and pollution control regulations. Supplemental exhaust may be required for maintenance tasks.

ELECTRICAL HAZARD — TYPE 3!Risk of exposure to hazardous electrical current. Use extreme

caution while performing preventive maintenance procedures in order to avoid accidental contact with energized parts.

NOTICEUSE PROPER LIGHTING!

Use portable lighting (lighting level of minimum 30 foot-candles) when completing service.


Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or

coveralls as recommended in the MSDS during preventive maintenance procedures. Refer to the site MSDS for chemical-

specific information.

CAUTIONLOUD NOISE HAZARD!

Use hearing protection when pumps are on and any pump access panel is open.

8-4 March 2014


General System Maintenance

All routine maintenance is performed from the front of the system. The rear system panels are not intended to be removed for maintenance.

Removing and Isolating Components

Use this procedure as a guideline for removing a component from the system for maintenance or replacement.

• Read all safety notices before beginning any procedures.

• Always wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS.

• Use lockout/tagout devices, as required.

• Isolate and relieve potential energy before opening lines or attempting electrical maintenance.

• Follow site specific requirements and procedures.

1. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Refer to the MSDS and site regulations.

Equipment Required • MSDS for all system chemistry.• Acid-resistant gloves, chemical safety goggles and full-face

shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS.

• Chemical absorbent pads and wipes, and other safety equipment as recommended on the MSDS.

• Appropriate chemical waste container as recommended on MSDS.

• Auxiliary lighting.• Appropriate tool set.• Replacement components.

NOTICESSHUT DOWN POWER FOR ELECTRICAL MAINTENANCE!Always shut off power before performing electrical procedures.


March 2014 8-5

2. Place the system into manual operating mode.

3. Preferably, shut down power to the system. It may be necessary to shut down electrical power after relieving pressure in the lines if automatic valves must be toggled.

4. Lockout/tagout the A/C disconnect switch.

5. Close the component isolation valves.

6. Toggle or open valves to release pressure in the line.

7. Lock out the isolation valves.

8. Remove the component.

9. Repair or replace the component.

10. Use a hand sprayer to clean or remove any chemical in the cabinet interior.

11. Remove lockout/tagout devices and open isolation valves.

12. Restore system power.

13. Perform necessary tests in Manual mode to ensure procedure was executed correctly.

14. Return system to Auto mode.

Removing and Isolating Electrical Components

Use this procedure as a guideline for removing and isolating electrical components.

• Read all safety notices before beginning any procedures.

• Always wear protective gear as recommended on the MSDS.

• Use lockout/tagout devices, as required.

• Isolate and relieve potential energy before opening lines or attempting electrical maintenance.

• Follow site specific requirements and procedures.

CAUTIONPRESSURE HAZARD!

Relieve pressure in lines before loosening fittings.

8-6 March 2014


1. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS.

2. Lockout/tagout the A/C disconnect switch.

3. Complete the replacement.

4. Remove lockout/tagout device.

5. Start up the system.





• Auxiliary lighting.• Appropriate tool set.• Replacement components.


Disconnect power and lockout/tagout to remove electrical hazard before performing any electrical procedures.

NOTICEOBTAIN APPROPRIATE APPROVAL!

Electrical procedures require the system to be shut down. Obtain appropriate approval and notify affected personnel before proceeding.


March 2014 8-7

Compact Flash Card

The PLC is supplied with an Allen-Bradley Industrial Compact Flash card. The Compact Flash contains a copy of the current program. In the event of corrupt memory, the system program automatically loads from the Compact Flash and resumes operation.

Program changes are not automatically sent and uploaded to the Compact Flash card. A Controls Engineer must download any changes to the Compact Flash. The downloading must occur when then PLC is in the program mode.

Flowmeters

The mini-Pathfinder Series variable area flowmeters consist of a solid float inside a vertical tube. Fluid enters at the base of the tube causing the float to rise. As the float inside the tube rises, the area between the float and the tube wall increases. The upward or downward movement of the float corresponds to the rate of fluid flow in the tube. Gradations from 1 through 10, marked on the outside of the tube, allow the observer to reference the flow rate by the position of the float in the tube.

Note: Program mode shuts down the entire system.

8-8 March 2014


Pressure Reducing Gas Regulators

Reducing regulators control the incoming pressure to an exact pressure no matter what happens to the incoming pressure. The regulator design is based on a diaphragm and needle through a hole principle. As the regulator knob is adjusted, the tapered needle going through the hole gets larger. The diaphragm moves to compensate for any changes in incoming CDA/N2 pressure. The attached gauge has an accuracy of +/-5%. The flow is manually adjusted.

Figure 8-1. Regulator Example

Indications of a premature regulator failure are an inability to maintain a stable pressure value, fluctuating pressure value, the regulator creeps (up or down), or the gauge needle sticks, and then jumps up or down. When a regulator fails it remains in the open position, or may stop regulating and then open. If an external leak is developed, the downstream pressure is bled off to the atmosphere.

Pressure Switches

Gas Digital Pressure Switches

Use the Electrical schematic and/or the Device Reference List (page 3-13) for reference when adjusting a digital pressure switch to determine if it is designated as a high or low switch; and to obtain the correct pressure setting for the switch.


March 2014 8-9

Figure 8-2. Adsens Switch Display

• If one setting is used for a switch (e.g., only high or only low), then Output #1 is correct.

• If both outputs are used (e.g., a high and a low), then Output #1 is low and Output #2 is high.

Setting the Low Pressure Only Switch

1. Press and hold the SET button for 3 seconds to open the setting options.

a. Change the Units to PSI. Press Set.

b. Change the Output #1 to N/O. Press Set.

c. Output #2 can be either N/C or N/O. Press Set.

d. Response Time is 2.5 mS. Press Set.

e. Auto/Manual is Manual. Press Set. Returns to the Display mode.

2. From the Display mode, press Set once.

a. P1 option to On point. Set to 2 PSI above the pressure switch setpoint. Press Set.

b. P2 option to Off point. Set the pressure switch setpoint. Press Set.

c. Press and hold Set without changing other options until the menu returns to the Display mode.

Setting the High Pressure Only Switch

1. Press and hold the Set button for 3 seconds to open the setting options.


8-10 March 2014





e. Auto/Manual is Manual. Press Set. Returns to the Display mode.


a. N1 option to On point setting. Set to 2 PSI below the pressure switch setpoint. Press Set.

b. N2 option to Off point setting. Set the pressure switch setpoint. Press Set.

c. Press and hold Set without changing other options until the menu returns to the Display mode.

Setting the High and Low Pressure Switch

Use the following instructions for setting the high and low settings for one switch.

1. Press and hold the SET button for 3 seconds to open the setting options.





e. Set the Auto/Manual option to Manual (if required). Pressing Set returns to the Display mode.


a. P1 option (low set points) to On point. Set the pressure switch setpoint. Press Set.

b. P2 option to Off point. Set the pressure switch setpoint. Press Set.

c. N1 option (high set points) to Off point. Set the pressure switch setpoint. Press Set.

d. N2 option to On point. Set the pressure switch setpoint. Press Set.

e. Press and hold Set without changing other options until the menu returns to the Display mode.


March 2014 8-11

Preventive Maintenance

Effective Preventive Maintenance (PM) maintains the system in optimal working order and ensures that the warranty extends to the equipment. This section provides a recommended PM schedule and includes weekly, monthly, quarterly, semiannual, and annual PM procedures. Retain copies of the completed preventive maintenance schedule to provide a history of the maintenance performed.

Maintenance Schedule

Prior scheduling of Preventive maintenance activities helps prevent unexpected downtime and disrupting the distribution system. Follow site specific procedures for notifying affected personnel before performing preventive maintenance. Typical site requirements include:

• obtaining a work order

• notifying the appropriate personnel, and

• applicable safety monitoring stations.

Preparation

Prior to starting preventive maintenance, review all appropriate procedures. Ensure all equipment is available, work permits are approved, and all affected personnel have been notified. Before replacing any components, ensure the components are on hand. Review all site requirements and procedures, including spill procedures, buddy systems, and PPE. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Review site MSDS for each chemical used in the system.

Equipment

Gather all required equipment before performing maintenance procedures. The recommended equipment is listed each preventive maintenance section in this chapter.

8-12 March 2014


Weekly Preventive Maintenance Procedures

Perform the following preventive maintenance procedures as part of the weekly maintenance schedule (Table 8-2, on page 42).

Visual System Inspection

A thorough visual inspection verifies the system is operating correctly and alerts the operator to potential maintenance required. Maintenance issues identified during the visual inspection should be reported and either corrected, or scheduled, at the earliest possible maintenance. Complete an informal inspection daily.

A complete visual inspection requires opening the s; follow all chemical and electrical hazard precautions. Follow all site-specific policies during the procedure.

Use the following list as a guideline for a visual inspection, however, this list may not be all-inclusive.


2. General system area.

a. Check area for leaks or spills. Correct according to site procedures.

b. Check area for hazardous conditions. Correct according to site procedures.

3. System exterior.

a. Ensure doors and electrical cabinet are closed.

b. Ensure system is on.

c. Check double containment lines for evidence of leaks. Repair leaks, as necessary.





• Auxiliary lighting.


March 2014 8-13

d. Ensure system exhaust is operating within the exhaust set points. Exhaust set points are field set and are located on the exhaust pressure switch in the corner of the gas compartment.

4. System operation.

a. Ensure system is in normal operating mode (automatic or manual).

b. Check alarm status. Acknowledge all alarms.

c. Review alarm and maintenance log.

5. Chemical section of system.

a. Check cabinet floor and system piping for leaks and spills. Correct according to site procedures.

b. Check chemical inlets and outlets on cabinet and drums for leaks or loose fittings. Correct according to site procedures.

c. Check system components for corrosion or chemical residue. Correct according to site procedures.

6. Electrical section of system.

a. Check system power.

b. Ensure data highway connections are solidly connected.

c. Check wiring compartment for corrosion, burns, or irregular odor. Correct according to site procedures.

d. Check for loose wire connections. Correct according to site procedures.

Verifying the Device Settings

Obtain the latest device settings list for the system (Device Reference List (page 3-13)). Investigate deviations in the device settings before resetting values.

Inspecting the device settings requires opening the system and taking the proper precautions to avoid chemical and electrical hazards.



• Auxiliary lighting.• Device Settings Record Sheet• Flow Schematics or P&ID

8-14 March 2014



2. Locate each device on the Device Settings List, and compare the actual setting with the recorded setting. Use the P&ID to aid in locating each device. P&ID Schematic (page 9-5)

3. Record all deviations from the previously recorded settings on the Device Settings Record Sheet (page 8-44).

4. Consult with the Process Engineer to verify that deviations require correction.

5. Correct deviations, as required.

Adjusting the Humidifier Settings

An humidifier is essential to prevent slurry from drying on the sides of the tanks. An humidifier is functioning properly if drops of water are seen standing on the inside of the device and smaller water droplets are on the tubing going downstream from the device.

Malfunction can occur for several reasons:

• if the air pressure is too high or too low to create the mist

• the mist pad is clogged and the pad does not work correctly

• the drain is clogged

• if the water pressure is too high or low to create the proper mist, or if the water pressure is too high, the water sheets down the walls and no mist is created, subsequently, the mixture goes down the drain.

Inspecting the humidifier requires opening the system while observing the proper precautions to avoid chemical hazards. Record any adjustments to the humidifier on the Preventive Maintenance Form (page 8-42).


Note: A drain may require a P-trap so fumes do not backflow into the device from the house drain.





March 2014 8-15

2. Visually verify the humidifier is operating correctly. The water droplets should accumulate on the humidifier walls. There should be a minimal flow of water through the humidifier drain.

3. If the humidifier requires adjustments:

• record the original settings in the weekly section of the Preventive Maintenance Form (page 8-42), and

• adjust the humidifier CDA/N2 and DI water pressure. CDA/N2 pressure should always be greater than water pressure.

4. To measure the DI water flow rate, shut off the CDA/N2 supply and measure the volume of water draining from the humidifier drain line. The flow rate should be approximately 15 ml/min.

5. Record any adjustments to the humidifier on the Preventive Maintenance Form (page 8-42).

8-16 March 2014


Monthly Preventive Maintenance Procedures

Perform the following preventive maintenance procedures as part of the monthly maintenance schedule (Table 8-2, on page 42).

Checking Pump Operation

Figure 8-3. Pumps

Pumps can malfunction due to poor maintenance (i.e., missing preventive maintenance based on runtime). Lack of maintenance can cause internal parts to fail. Other reasons for failure include running dry for long periods of time, dead heading, ingesting foreign objects, dried slurry particles, poor rebuilding techniques, or bad CDA/N2.

Ensure each pump operates correctly by running each pump and recording the operating pressure and flow rate (if available). Record the pump runtime from the Timers Screen (page 6-28). Ensure each pump is correctly set online or offline.

Checking the pump operation requires opening the system and taking proper precautions to avoid chemical and electrical hazards.

Refer to Isolating and Removing Pumps (page 8-34) for pump maintenance procedures.


March 2014 8-17

Checking Leak Detectors

Leak detectors are a 24 VDC, Teflon-coated, paperless sensor. They are wired in a fail-safe configuration. The leak detector should be correctly placed in the mounting bracket. Malfunction can occur due to bad wiring or it can stick. On the puck-style leak detector, a leak is indicated if the red LED is displayed. The bit LED goes out if there is a leak because the voltage drops, therefore, a spark is not created if the system chemical is flammable.

Figure 8-4. Type of Leak Detector

Checking leak detectors requires taking the proper precautions to avoid chemical and electrical hazards.

Equipment Required • MSDSs for all system chemistry.• Acid-resistant gloves, chemical safety goggles and full-face




• Auxiliary lighting.• Electrical schematics.

Puck-style leak detector

Float-style leak detector

8-18 March 2014



2. The leak detector LED should be green, indicating no leak. The corresponding input LED on the PLC should also be lit.

3. Spray a small amount of water on the leak detector with the hand sprayer. The LED should change to red, indicating a leak. The corresponding input LED on the PLC should turn off.

• If the sensor does not change, test the wiring with another leak detector.

• If the replacement sensor functions, the first sensor was faulty.

• If the replacement sensor does not function, check leak detector wiring.

4. Replace the leak detector or repair the wiring, if required.


Leak detectors are placed at the most likely spot to sense leaks. Chemical may be present. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such

as a lab coat, apron, or coveralls as recommended in the MSDS. Refer to the site MSDS for chemical-specific

information.


The exhaust effluent may contain chemical (vapor or liquid). Handle and treat to comply with safety and pollution control

regulations. Supplemental exhaust may be required for maintenance tasks.


March 2014 8-19

Tank Scale Verification

Scales are used to determine the weight equivalences for recipe constituents.

Figure 8-5. Tank Scale

The tank scale is precisely calibrated at the factory. The scale should rarely, if ever, require calibration. If the tank scale requires calibration, refer to the HIPS Series Platform Scales Operation and Installation Manual.

Verifying the tank volume can be completed without exposure to chemical or electrical hazards.


2. Fill the tank with one of the following methods:

• Use the Overview screen(s) to fill the tank to a predetermined level (a known weight), or

• Edit a recipe to add a specific weight of liquid to the tank.

3. Verify the weight from the Process Data section on the Overview screen(s).

4. Drain the tank completely using the Abort function.

5. Verify the weight on the Overview screen(s).

Equipment Required • No equipment is required to verify the tank weight.

8-20 March 2014


Liquid and Level Sensor Maintenance

The proper operation of liquid and level sensors is essential to the operation of the system. These sensors trigger process transitions in the sequence of operation and indicate alarm conditions. Liquid (e.g., Turck) sensors and level sensors (e.g., Omron) use an infrared signal through tubing to determine if air is present. Omron sensors, generally used on tanks, convert physical and mechanical action to an electrical signal.

• Malfunction can occur due to being moved out of position, lack of adjustment (proper adjustment is important for repeatability and to prevent false signaling), liquid getting inside (the cap over the adjustment hole is missing and the sensor fails), and if the face of the device is dirty it can miss the signal.

• Faulty sensors can lead to improper system operation, interruption of distribution, and catastrophic system failure. The sensors can deteriorate over time due to exposure to liquids, chemicals, and chemical fumes.

Calibrating the sensor locations to align with the sensitivity of an alarm is more critical to optimizing its performance than the LED reading on the part.

Figure 8-6. Liquid and Level Sensors

Take proper precautions to avoid chemical and electrical hazards when verifying sensor operation (opening s).

Note: Liquid sensors are not level detectors and function differently. These are not the same parts. Do not switch.

Liquid Line SensorBlend Tank

Level Sensor



• Auxiliary lighting.• Electrical schematics.


March 2014 8-21

Adjusting Sensitivity of Line Liquid Sensors

This procedure describes how to calibrate the liquid sensors.

Adjusting the sensor requires opening the system and proper precautions be taken to avoid chemical and electrical hazards.


2. Activate the alarm override.


4. Attach the liquid sensor to the piping in its designated location and make the electrical connections.

Equipment Required • MSDS for all system chemistry.• Acid-resistant gloves, chemical safety goggles and full-

face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS.

• Nonconducting screwdriver or other device for adjusting liquid and level sensors.




coveralls as recommended in the MSDS. Refer to the site MSDS for chemical-specific information.




8-22 March 2014


5. Remove the protective cap on top of sensor to access the sensitivity screw.

6. Use one of the following methods to force the sensor to indicate air:

• Move the sensor to a pipe containing no liquid, or

• Use the Overview screen(s) to drain the pipe past the level of the liquid sensor.

7. Carefully rotate the sensitivity adjustment counterclockwise (low sensitivity) until the LED is green (air).

8. Rotate the sensitivity adjustment clockwise (high sensitivity) and stop immediately after the LED turns red (liquid).

9. Turn the sensor slightly counterclockwise until the LED is green (air).

10. Replace the protective cap on the sensor.

Calibrating the Blend Tank Level Proximity Sensors

This procedure describes how to calibrate the proximity sensors.

Calibrating the sensor requires taking proper precautions to avoid chemical and electrical hazards.

NOTICEDO NOT LOSE THE PROTECTIVE CAP!

The protective cap on the sensitivity adjustment protects the component from liquid, chemical, and vapor damage.

CAUTIONEQUIPMENT DAMAGE!

Replace the sensitivity screw cap immediately after calibration. The cap protects the sensor from liquid, chemical, and vapor

damage.



• Nonconducting screwdriver or other device for adjusting liquid and level sensors.



March 2014 8-23



3. Attach the liquid sensor to the mount 1⁄16” to 1⁄8” from the tank or pipe and make electrical connections. Use a device to correctly space the sensor from the target (e.g., a company ID badge width is typically sufficient).

4. Remove the protective cap on top of sensor to access the sensitivity screw.

5. Use a nonconducting screwdriver to adjust the sensitivity screw. Conductive screwdrivers, acting as a second dielectric, can cause faulty triggers.

6. Use one of the following methods to trigger the sensor to indicate no liquid:

• Mark the original location of the sensor to verify correct placement later. Move the sensor above the liquid level. Ensure the sensor is exactly the same distance from the tank as it will be in its final location, or



coveralls as recommended in the MSDS. Refer to the site MSDS for chemical-specific information.




NOTICEDO NOT LOSE THE PROTECTIVE CAP!

The protective cap on the sensitivity adjustment protects the component from liquid, chemical, and vapor damage.

8-24 March 2014


• Drain the tank until the liquid level is below the level of the sensor.

7. Turn the sensitivity screw clockwise until the sensor turns on (light illuminates).

8. Use one of the following methods to trigger the sensor to indicate liquid:

• Move the sensor below the liquid level. Ensure the sensor is exactly the same distance from the tank as it will be in its final location. Mark the original location of the sensor to ensure correct placement later, or

• Fill the tank until it is above the level of the sensor by blending and/or transferring a batch or using the Overview screen(s).

9. Turn the sensitivity screw counterclockwise until the sensor turns off (light turns off). Note the number of revolutions between the on and off locations.

• If the number of revolutions is more than 1 1⁄2, the sensor has stable output and no calibration is necessary. Skip to Step 13.

10. If the number of revolutions is less than 1 1⁄2, calibration is required:

a. Increase the distance between the target and sensing face to allow 1 1⁄2 revolutions between on and off.

b. Repeat the calibration procedure until the number of revolutions is greater than 1 1⁄2.

11. Turn the sensitivity screw clockwise half of the revolutions between the on and off positions.

12. Replace the protective cap and move the sensor to its original location.

13. Repeat the Calibrating the Blend Tank Level Proximity Sensors (page 8-22) procedure to ensure the sensor is accurate. If necessary, repeat the calibration procedure. If the sensor is not accurate after three (3) calibrations, test the sensor, and replace if necessary.

NOTICEOBTAIN APPROVAL BEFORE ALTERING THE TANK LEVEL!

Consult with a supervisor before manually adjusting the tank level.


March 2014 8-25

Quarterly Preventive Maintenance Procedures

Perform the following preventive maintenance procedures as part of the quarterly maintenance schedule (Table 8-2, on page 42).

Testing Alarms

Alarms in the system indicate critical errors, process problems and information. The proper functioning of all critical alarms helps ensure the safe operation of the system.

Testing the alarms requires opening the system and taking proper safety precautions to avoid chemical and electrical hazards. See the Alarms and Warnings (page 7-1) chapter for a listing of all alarms. Trigger alarms using the actions described in the Possible Reason column.

.

NOTICENOTIFY ALL APPROPRIATE PERSONNEL AND OBTAIN APPROVAL

BEFORE TESTING ALARMS!Triggering critical alarms may alert fab security and safety personnel, and

possibly cause an evacuation. Notify affected personnel and obtain all required approval before testing alarms.


The exhaust effluent may contain chemical (vapor or liquid). Handle and treat to meet compliance with safety and pollution control regulations. Supplemental exhaust may be required for

maintenance tasks.

8-26 March 2014


Valves and Pressure Gauges

Numerous types of valves are used to control the flow of chemical, DI water, slurry, CDA/N2 throughout the system. The valves include:

• automatic

• manual

• diverter

• check

• needle

• ball

• relief

• pressure relief valve

• flow indicator control valve, and

• electric solenoid.

Automatic valves control process flow. Solenoid valves control the flow of CDA/N2 to the automatic valves. Manual valves, ball valves, and needle valves are used for isolation and shutoff. Diverter valves are used for samples and slipstreams. Check valves protect supply lines from contamination. Relief valves protect gas lines from over-pressurization.

Electrical Solenoid Valves (EV)

The electrical solenoid valves are not activated when the computer bit LED is Off and the associated valve LED is Off. Both LEDs are illuminated with the computer commands the EV and AV to activate. EVs include a button for manual activation.

Figure 8-7. Electrical Solenoid Valves

Top label corresponds to top valve.

Bottom label corresponds to bottom valve.


March 2014 8-27

Malfunction occurs due to air leaking around the seals, chattering, weak local LED brightness, liquid from the exhaust, or the EV activates but does not fully shut off the associated AV. Refer to the Electrical Schematic (page 9-7) to match EV to AV devices.

Automatic Valves (AV)

Automatic valves operate by sending a 24 volt signal to the selected EV. The EV solenoid opens and the CDA/N2 flows to the selected AV. The AV valves are controlled by incoming CDA/N2 pressure, regulators, relieve valves, EVs, and air lines. Malfunction occurs if there are air line leaks, air line connector leaks, the air pressure is too low to hold the AV open, internal diaphragm leaks occur, or the return spring has lost its tension.

Figure 8-8. Automatic Valves

To troubleshoot the electrical or pneumatic command, put the AV in computer Manual mode to confirm correct output card and EV operation, and then check the air line for leaks with the local pressure gauge online, or move the air line to a different valve to confirm the valve is operating correctly when other factors are running normally.

Check Valves (CV)

Liquid check valves operate with a disk or ball system and are used to ensure that fluid is flowing in the correct direction.

Figure 8-9. Check Valve

Check valves are placed where back streaming could cause cross contamination of chemicals, slurry, CDA/N2, or water. The directional arrow is stamped in ink on the label so carefully observe the direction to prevent installing a valve backwards.

8-28 March 2014


Manual Valve (MV)

Manual valves operate by hand.

Figure 8-10. Manual Valve

Pressure Relief Valve

Pressure relieve valves are located on the gas lines to protect devices on the line. The test is completed by increasing the inlet pressure with the regulator until the pressure is just above the bypass value. The seat retracts against the spring and gas escapes. Over time the seat material may stick and must be exercised to remain functional (refer to Adjusting the Relief Valves (page 8-30).

Figure 8-11. Pressure Relief Valve Examples

A failing pressure relief valve results in complete failure of downstream devices, injury may occur, and the devices must be replaced.

Locking screw maintains settings

Adjustable spring

Fully contained o-ring sealAdjusting screw sets cracking pressure

When system pressure overcomes spring force, poppet opens. As pressure continues to rise, variable orifice between poppet and body increases, allowing greater flow.

Seal prevents leakage. Sealing efficiency increase with increased pressure up to cracking pressure. Metal-to-metal poppet stop supports spring load, prevents sticking.


March 2014 8-29

Gas Line Maintenance

All components on each gas line should be checked for proper operation to prevent high gas pressure hazards and low pressure operation failures. Gas line maintenance includes checking the operation of the regulators, pressure switches, relief valves, and flow regulators.

Checking the gas line components requires opening the gas cabinet doors. All other doors must remain closed. Checking the gas line components may expose the operator to pressure hazards. Placing the system in Manual mode disrupts distribution.

Checking the Gas Line Components


2. Open the gas cabinet door. Ensure all other cabinet doors remain closed. Open doors may expose the operator to potential hazards.

3. If the line is equipped with a low-pressure switch, check the low-pressure switch before checking the high pressure switch or other components:

a. Decrease the regulator pressure until it is less than the low-pressure switch setting.

b. It may be necessary to vent the line to reach the low-pressure switch setting. Vent the line by operating a valve in Manual mode, running a pump, or opening a vent line valve to drain.

c. Ensure the low pressure alarm is activated at the correct line pressure. The alarm may be equipped with up to a 10 second delay. Provide adequate time for the alarm to activate.



• Auxiliary lighting.• Device Reference List (page 3-13)• 4 mm Allen wrench.


Open the door to the gas compartment only. Leave all other cabinet doors closed to protect from potential hazards.

8-30 March 2014


d. If the alarm is not activated at the correct pressure, adjust or replace the pressure switch.

4. If the line is equipped with a high-pressure switch:

a. Increase the regulator pressure until it is greater than the high-pressure switch setting.

b. Ensure the high-pressure alarm is activated at the correct line pressure. The alarm may be equipped with up to a ten second delay. Provide adequate time for the alarm to activate.

c. If the alarm is not activated at the correct pressure, adjust or replace the pressure switch.

Adjusting the Relief Valves

The relief valve is a device used in the CDA/N2 compartment to prevent high pressure buildup in the air lines. The relief valve will crack and relieve the air line when pressure exceeds the setpoint for the device. Also see Valves and Pressure Gauges (page 8-26).


2. Open the gas cabinet door. Ensure all other cabinet doors remain closed. Open doors may expose the operator to potential hazards.

3. Remove the allen lock nut with a 4 mm allen wrench.

4. Set the regulator pressure 1–2 psi below the relief valve setpoint.


Open the door to the gas compartment only. Leave all other cabinet doors closed to protect the operator from potential

hazards.Release line pressure before replacing components.

NOTICEDO NOT COMPLETELY REMOVE ADJUSTMENT NUT!

Avoid removing the adjustment nut from valve body as it is difficult to replace.


March 2014 8-31

5. Tighten the adjustment nut to increase pressure; loosen the adjustment nut to decrease pressure. Do not remove the adjustment nut from the valve body, it is difficult to replace. The nut is correctly adjusted when the relief valve begins leaking air 1–2 psi below the relief valve setpoint. Remove the allen wrench from the adjustment nut to verify the flow of gas.

6. Install the locking allen nut.

7. Set the pressure regulator to the desired relief pressure.

8. Test with the CDA/N2 pressure at the desired setting.

9. Repeat the procedure until the desired setting is achieved.

10. Increase the regulator pressure until it is 1–2 psi below the relief valve setting. The relief valve should begin to release gas.

11. Increase the regulator pressure until it is at the relief valve setting. The relief valve should be at full release. It the relief valve is activated at the correct pressure, adjust or replace the relief valve.

12. Return all components to their original device settings on the device list.

13. Repair or replace pressure switches, as required.

14. Repair or replace relief valves, as required (refer to Adjusting the Relief Valves (page 8-30).

8-32 March 2014


Semi-Annual Preventive Maintenance Procedures

Perform the following preventive maintenance procedures as part of the semi-annual maintenance schedule (Table 8-2, on page 42).

Fittings

Flare and threaded fittings can loosen due to system vibrations. Teflon fittings should be hand-tightened to prevent the development of leaks. Stainless steel fittings should be checked with a NO-GO gap gauge. Record the location of any fittings that require tightening.

Inspecting the fittings requires opening the s. Take the proper precautions to avoid chemical and electrical hazards. Place the system in Manual mode and open all drain fittings to relieve all pressure from the chemical lines before replacing fittings.

Checking the Fittings






• Auxiliary lighting.• Flow schematics.

WARNINGELECTRICAL HAZARD — TYPE 3!

Risk of exposure to hazardous electrical current. Use extreme caution when performing preventive maintenance procedures to

avoid accidental contact with energized parts.


March 2014 8-33

2. Ensure all fittings are tight. Loose plastic fittings should be hand tightened. Stainless steel fittings should be checked with a NO-GO gap gauge. Over-tightening the fittings may strip the threads. If the fitting leaks after it is tightened, replace it.

3. Place the system in Automatic operation and check for leaks.

Replacing Fittings



3. Flush and purge the pipes in the area of the repair.

4. Vent the line pressure by opening valves to the drain or exhaust.

5. Close the closest isolation valves in order to isolate the fitting.

6. Lockout/tagout the isolation valves.

7. Remove the leaking fitting and the necessary plumbing.

8. Replace the leaking fitting and install removed plumbing.

9. Remove the lockout/tagout devices.

10. Open the isolation valves.

11. In Manual mode, fill the repaired area with liquid (or gas) and check for leaks.

• If the fitting leaks, ensure the fitting is tight.

• If the fitting still leaks, return to Step 3.

12. Flush and purge the pipes in the area of the repair.

CAUTIONPRESSURE HAZARD!

Relieve pressure in lines before loosening and replacing fittings.

NOTICEAVOID OVER-TIGHTENING FITTINGS!

Over-tightening fittings may strip the fitting threads. Fittings should be hand tightened.

8-34 March 2014


Rebuilding Pumps

Refer to the specific pump manufacturer literature for rebuilding pumps. Follow procedure steps for isolation and removing pumps before rebuilding any pump.

Isolating and Removing Pumps

Use this procedure to safely isolate and remove pumps from the system.

Some pump adjustments do not require disabling the system. However, in most cases, repairs require removing the system from operation and preparing it for repair in a safe manner. If the system must be powered down for repair, follow the company electrical lockout/tagout procedures.


2. Remove the applicable pump from service.

3. Close and lockout/tagout the pump inlet and outlet isolation valves.

4. Open the pump drain valve, and then open the pump flush/purge access valve for a vent and allow pump to gravity drain.

5. Connect a hose between the pump flush/purge access valve and the CDA/N2 access port valve. Open valves to purge the isolated pump with CDA/N2 for one minute.

6. Close the pump flush/purge access valve and CDA/N2 access port valve. Disconnect hose between valves.

WARNINGOBTAIN PRIOR APPROVAL!

If pump removal affects distribution, obtain the appropriate approval before proceeding. Notify all affected personnel.


Removing pumps may expose the user to hazardous chemicals. Wear acid-resistant gloves, chemical safety goggles and full-

face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Use extreme caution when removing pumps. Refer to the site MSDS for chemical-

specific information.


March 2014 8-35

7. Connect a hose between the pump flush/purge access valve and the DI water flush access valve. Open valves to flush the isolated pump with DI water for one minute.

8. Close the pump flush/purge access valve and DI water flush access valve. Disconnect the hose between valves.

9. Connect a hose between the pump flush/purge access valve and the CDA/N2 access port valve. Open valves to purge the isolated pump with CDA/N2 for one minute.

10. Close the pump flush/purge access valve and the CDA/N2 access port valve. Disconnect the hose between the valves.

11. Remove the pump from the system for repair or replacement.

12. Decontaminate the pump according to site specific procedures.

13. Rebuild or repair the pump, as necessary.

14. Replace the pump. Close the pump drain valve.

15. Use the hand sprayer to clean or remove any chemical still visible in the cabinet interior.

16. Remove the lockout/tagout devices. Open the pump inlet and outlet isolation valves.

17. The pump is now available for service.

8-36 March 2014


Annual Preventive Maintenance Procedures

Perform the following preventive maintenance procedures as part of the annual maintenance schedule (Table 8-2, on page 42).

Lithium Battery

The PLC uses a replaceable lithium battery for backup RAM power. This battery provides backup for approximately two (2) years. The BATT LED on the front of the processor illuminates when the battery voltage has fallen below the threshold level, and the PLC Battery Low alarm is activated. The battery can be either replaced as part of the Annual Preventive Maintenance (Table 8-2, on page 42), or when the battery alarm is activated.

Figure 8-12. Lithium Battery

Replacing the battery requires the system to be completely powered down. A capacitor on the processor card maintains the program in RAM for approximately 20 minutes. If the procedure exceeds this limit, the program may be lost from RAM.

Replacing the Lithium Battery

1. Remove power from the PLC power supply.

Equipment Required • Acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS.

• Replacement battery• Battery disposal equipment.

WARNINGCHEMICAL AND FIRE HAZARD!

Read Guidelines for Handling Lithium Batteries for information regarding handling and disposing of lithium batteries.


March 2014 8-37

a. Obtain authorization to shut the system down.

b. Toggle the A/C disconnect switch to Off.

c. Lockout/tagout the A/C disconnect switch.

2. Remove and replace the battery.

3. Dispose of the battery (refer to Disposing the Lithium Battery (page 8-37)).

4. When all maintenance procedures are complete, restore power to the PLC power supply.

a. Remove the lockout/tagout devices.

b. Toggle the A/C disconnect switch to On.

c. Start up the system.

5. If the system does not start up correctly, repeat procedures to ensure connections are routed correctly.

Disposing the Lithium Battery

The PLC provided on the Mega SB100 Model 100 is supplied with a lithium battery that must be replaced it becomes depleted. Carefully inspect the depleted battery casing for damage and/or signs of electrolyte leakage.

NOTICEREMOVE POWER FROM THE SYSTEM!

Do not remove the processor from the PLC chassis until all power is removed from the PLC power supply.

WARNINGFIRE HAZARD!

Do not incinerate or dispose batteries in general trash collection. They may explode or rupture.

Check state and local regulations dealing with the disposal of lithium or nickel cadmium batteries. You are legally responsible

for the hazards created by improper battery disposal.

8-38 March 2014


EMO Testing

The EMO provides the operator with a means to shut down the system in emergency situations. Activating the EMO shuts the system down and disrupts distribution.

Figure 8-13. Emergency Machine Off (EMO) Button


2. Press the EMO button. Ensure the system completely powers down.

3. Restart the system.



- OR -


March 2014 8-39

Completing Preventive Maintenance Procedures

Perform the following preventive maintenance procedures as part of the Completing Preventive Maintenance schedule (Table 8-2, on page 42).

Cabinet Cleaning

Clean the cabinet after all other PM procedures are completed. Cabinet cleanliness is necessary for accurate visual inspections.

Cleaning the cabinet requires opening the system and taking proper precautions to avoid chemical and electrical hazards. Follow all site-specific procedures during the cabinet cleaning.


2. Rinse all chemical residue from the cabinet interior using the hand sprayers or wipes saturated in 10% IPA solution.

3. Thoroughly dry the cabinet interior.

4. Wipe the cabinet exterior clean.

5. Dispose of all wipes according to site requirements and MSDS recommendations.

NOTICECLEAN THE CABINET LAST!

Cleaning the front of the cabinet and the system should be completed after all other PM procedures are done to avoid repeating the procedure.





• Auxiliary lighting.• DI water or 10% IPA solution.

8-40 March 2014


Maintenance Forms

The following is a list of the forms included in this section:

• Work Order Form

• Preventive Maintenance Form

• Device Settings Record Sheet


March 2014 8-41

Work Order Form

The following example can be used for notifying and scheduling system service.

Table 8-1. Work Order Form Example

Work Order #: System ID:Location: Serial Number:Technician: Chemical:Start Date: End Date:Frequency (circle one): Weekly/Monthly/Quarterly/Semiannual/Annual

8-42 March 2014


Preventive Maintenance Form

The preventive maintenance form is a comprehensive list which includes all recommended preventive maintenance items. The list is divided into weekly, monthly, quarterly, semiannual, and annual sections. As each item in the list is completed, record any values or comments in the Comments column. Record any values or comments in the Comments column. Initial each item in the list as it is completed. When the preventive maintenance is complete, follow the instructions for returning the equipment to Automatic operation. Obtain the appropriate signatures, as required, by site-specific policies and procedures.

Table 8-2. Preventive Maintenance List

Preventive Maintenance Task Comments InitialsWeekly1. Complete the Visual System Inspection procedure.

Record all issues. 2. Check all system Device Settings. Refer to the Device

Settings List. Investigate and record any deviations from normal settings.

3. Verify proper Humidifier operation. Adjust as necessary. Record any adjustments made. a. Station A humidifier N2 psi.b. Station A humidifier DI water psi.

4. Go to Completing Preventive Maintenance in this form to complete weekly preventive maintenance steps.

Monthly5. Complete pump maintenance.

a. Pump B01-X operating pressure.b. Pump D01-X operating pressure.c. Pump C02A-X operating pressure.d. Pump C02B-X operating pressure.e. Pump C02C-X operating pressure.f. Pump C02D-X operating pressure.g. Pump B01-X run time.h. Pump D01-X run time.i. Pump C02A-X run time.j. Pump C02B-X run time.k. Pump C02C-X run time.l. Pump C02D-X run time.m. If required, repair, replace or schedule pump

maintenance.6. Check the leak detectors for proper operation. Adjust

sensors as needed.


March 2014 8-43

7. Verify tank weight. It the tank scale requires calibration, refer to the HIPS Series Platform Scales Operation and Installation Manual.

8. Verify liquid and level sensors operating properly. Adjust or replace as necessary.

9. Go to Completing Preventive Maintenance in this form to complete monthly preventive maintenance steps.

Quarterly10.Verify operation of all critical alarms.11.Check operation of regulators, pressure switches, relief

valves, and flow regulators.12.Go to Completing Preventive Maintenance in this form

to complete quarterly preventive maintenance steps.Semiannual13.Tighten all system fittings (refer to Fittings (page 8-32).

a. Record loose fittings.b. Repair or replace leaking fittings or schedule

maintenance. Record fittings repaired or replaced.14.Go to Completing Preventive Maintenance in this form

to complete semi-annual preventive maintenance steps.Annual15.Replace lithium battery. Refer to Lithium Battery

(page 8-36).16.Verify operation of EMO. Refer to EMO Testing (page 8-

38).17.Go to Completing Preventive Maintenance in this form

to complete annual preventive maintenance steps.Completing Preventive Maintenance18.Clean front of cabinet and s. Use DI water or 10% IPA

solution only. Refer to Cabinet Cleaning (page 8-39).19.Close the cabinet doors and electrical hood.20.Ensure the system is ready for Automatic operation.21.Return the system to Automatic operation.Preventive Maintenance Sign-offPersonnel Signature DateTechnician 1:Technician 2:Supervisor:

Table 8-2. Preventive Maintenance List (continued)

Preventive Maintenance Task Comments Initials

8-44 March 2014


Device Settings Record Sheet

Work Order #:System: Serial Number:Technician: Chemical:Start Date: End Date:

Table 8-3. Device Reference List

P&ID Location

Type Number State Description Initials

1/B7 AV B01-X NC Valve, Pneumatic, 2-way, Pump B01-X Inlet Isolation

1/D6 AV B02-X NC Valve, Pneumatic, 2-way, Local Recircu-lation Isolation

1/F5 AV B03-X NC Valve, Pneumatic, 2-way, Blend Dispense Isolation

1/E9 AV C01A-X NC Valve, Pneumatic, 2-way, Constituent A Dispense Isolation

1/E11 AV C01B-X NC Valve, Pneumatic, 2-way, Constituent B Dispense Isolation

1/E13 AV C01C-X NC Valve, Pneumatic, 2-way, Constituent C Dispense Isolation

1/E15 AV C01D-X NC Valve, Pneumatic, 2-way, Constituent D Dispense Isolation

1/E10 AV C02A-X NC Valve, Pneumatic, 2-way, Constituent A Circulation Isolation

1/E12 AV C02B-X NC Valve, Pneumatic, 2-way, Constituent B Circulation Isolation

1/E14 AV C02C-X NC Valve, Pneumatic, 2-way, Constituent C Circulation Isolation

1/E15 AV C02D-X NC Valve, Pneumatic, 2-way, Constituent D Circulation Isolation

1/E5 AV D01-X NC Valve, Pneumatic, 2-way, Blend Pumped Drain Isolation

1/E9 AV D02A-X NC/NO Valve, Pneumatic, 3-way, Constituent A Drain (Normally Closed to Drain)

1/F11 AV D02B-X NC/NO Valve, Pneumatic, 3-way, Constituent B Drain (Normally Closed to Drain)

1/F13 AV D02C-X NC/NO Valve, Pneumatic, 3-way, Constituent C Drain (Normally Closed to Drain)

1/F15 AV D02D-X NC/NO Valve, Pneumatic, 3-way, Constituent D Drain (Normally Closed to Drain)


March 2014 8-45

1/B6 AV E01-X NC Valve, Pneumatic, 2-way, Pump B01-X Upstream Flush / Purge

1/C6 AV E02-X NC Valve, Pneumatic, 2-way, Pump B01-X Downstream Flush / Purge

2/G13 AV G01-X NC/NO Valve, Pneumatic, 3-way, Pump B01-X Pneumatic Supply Isolation (Normally Closed to CDA Source)

2/E13 AV G02B-X NC/NO Valve, Pneumatic, 3-way, Pump C02B-X Pneumatic Supply Isolation (Normally Closed to CDA Source)

2/F13 AV G02D-X NC/NO Valve, Pneumatic, 3-way, Pump C02D-X Pneumatic Supply Isolation (Normally Closed to CDA Source)

2/E13 AV G03-X NC/NO Valve, Pneumatic, 3-way, Pump D01-X Pneumatic Supply Isolation (Normally Closed to CDA Source)

2/G12 AV G04-X NC/NO Valve, Pneumatic, 5-port, Pump B01-X Shuttle

2/G7 AV N01-X NC Valve, Pneumatic, 2-way, System Purge Supply Isolation

1/C5 AV Q01-X NC Valve, Pneumatic, 2-way, Blend Sample Isolation

1/F8 AV W01E-X NC Valve, Pneumatic, 2-way, DI Water Constituent Addition Isolation

1/F13 AV W02-X NC Valve, Pneumatic, 2-way, DI Water System Flush Isolation

1/E4 CV D01-X ----- Check Valve, Blend Dispense Drain Backflow Protection

1/B10 CV D02-X ----- Check Valve, Carboy Flush Drain Backflow Protection

2/G6 CV N02-X ----- Check Valve, System Purge Backflow Protection

1/F13 CV W01-X ----- Check Valve, System Flush Backflow Protection

1/C9 CV W03A-X ----- Check Valve, Carboy A DI Flush Supply1/C11 CV W03B-X ----- Check Valve, Carboy B DI Flush Supply1/C12 CV W03C-X ----- Check Valve, Carboy C DI Flush Supply1/C14 CV W03D-X ----- Check Valve, Carboy D DI Flush Supply1/F9 FICV W01E-X Field Set Flow Controller, Manual, Liquid, DI Water

Constituent Addition1/E8 LSHH B01-X NC Sensor, Level, Blend Tank High / High


P&ID Location


8-46 March 2014


1/G4 LSHH B02-X NC Sensor, Level, External Distribution Tank High / High

1/G5 MV B01-X Closed Valve, Manual, 2-way, Blend Dispense Isolation

1/C8 MV D01-X Closed Valve, Manual, 2-way, Blend Tank Drain Isolation

2/H16 MV G01-X Closed Valve, Ball, Manual, 2-way, CDA Supply Isolation

2/B15 MV G02-X Closed Valve, Manual, 2-way, Solenoid Bank Isolation

2/H10 MV N01-X Closed Valve, Ball, Manual, 2-way, N2 Supply Isolation

1/C4 MV Q01-X Closed Valve, Needle, 2-way, Blend Sample Attenuation / Isolation

1/F15 MV Q02-X Closed Valve, Needle, 2-way, DI Water Sample Attenuation / Isolation

1/G12 MV W01-X Closed Valve, Manual, 2-way, DI Water Supply Inlet Isolation

1/G11 MV W02-X ----- Hand sprayer, DI Water1/G10 MV W03-X Closed Valve, Needle, 2-way, DI Water Return

Attenuation / Isolation1/C9 MV W05A-X Closed Valve, Needle, Carboy A Flush Isolation1/C11 MV W05B-X Closed Valve, Needle, Carboy B Flush Isolation1/C12 MV W05C-X Closed Valve, Needle, Carboy C Flush Isolation1/C14 MV W05D-X Closed Valve, Needle, Carboy D Flush Isolation1/B10 MV W06-X Closed Valve, Manual, 2-way, General Carboy

Flush Isolation2/G15 PCV G01-X 60 PSIG Regulator, Gas, CDA Supply to Pump

B01-X2/F15 PCV G02-X 60 PSIG Regulator, Gas, CDA Supply to Pump

S02D-X2/E15 PCV G04-X 60 PSIG Regulator, Gas, CDA Supply to Pump

C02B-X2/E15 PCV G05-X 60 PSIG Regulator, Gas, CDA Supply to Pump

D01-X2/D15 PCV G06-X 80 PSIG Regulator, Gas, CDA Supply to Solenoids2/G9 PCV N01-X 2 PSIG Regulator, Gas, N2 Supply to Tank

Blanket2/G9 PCV N02-X 60 PSIG Regulator, Gas, N2 Supply to System

Purge


P&ID Location



March 2014 8-47

2/G14 PDIS E01-X 0.1" H2O Vacuum

Switch, Differential Pressure, Insufficient Exhaust

2/G15 PI G01-X 70 / 30 PSIG

Switch, Pressure, Gas, CDA Supply to Pump B01-X High / Low

2/G15 PI G02-X 70 / 30 PSIG

Switch, Pressure, Gas, CDA Supply to Pump C02D-X High / Low

2/E15 PI G04-X 70 / 30 PSIG

Switch, Pressure, Gas, CDA Supply to Pump C02B-X CDA High / Low

2/E15 PI G05-X 70 / 30 PSIG

Switch, Pressure, Gas, CDA Supply to Pump D01-X High / Low

2/C15 PI G06-X 65 PSIG Switch, Pressure, Gas, CDA Supply to Solenoid Low

2/G9 PI N01-X 3 / 1 PSIG Switch, Pressure, Gas, Nitrogen Supply to Tank Blanket High / Low

2/G9 PI N02-X 30 PSIG Switch, Pressure, Gas, Nitrogen Supply to System Purge Low

2/G14 PSV G01-X 75 PSIG Relief Valve, CDA Supply to Pump B01-X2/G14 PSV G02-X 75 PSIG Relief Valve, CDA Supply to Pump C02D-

X2/E14 PSV G04-X 75 PSIG Relief Valve, CDA Supply to Pump C02B-

X2/E14 PSV G05-X 75 PSIG Relief Valve, CDA Supply to Pump D01-X2/G8 PSV N01-X 5 PSIG Relief Valve, N2 Supply to Tank Blanket2/G8 PSV N02-X 75 PSIG Relief Valve, N2 Supply to System Purge1/C5 Pump B01-X ----- Pump, Diaphragm, Blend Dispense Circuit1/D10 Pump C02A-X ----- Pump, Peristaltic, Constituent A Supply

Circuit1/D11 Pump C02B-X ----- Pump, Diaphragm, Constituent B Supply

Circuit1/D13 Pump C02C-X ----- Pump, Peristaltic, Constituent C Supply

Circuit1/D15 Pump C02D-X ----- Pump, Diaphragm, Constituent D Supply

Circuit1/B12 Pump D01-X ----- Pump, Diaphragm, Drain1/D8 Tank 01-X ----- Tank, Blend, 100L1/C7 WE B01-X Field Set Scale, Blend Tank 1/C10 WE C01A-X Field Set Scale, Constituent A Carboy1/C14 WE C01C-X Field Set Scale, Constituent C Carboy1/C7 YS B01-X NO Sensor, Empty, Blend Tank1/D9 YS C01A-X NO Sensor, Empty, Constituent A Carboy


P&ID Location


8-48 March 2014


1/D11 YS C01B-X NO Sensor, Empty, Constituent B Carboy1/D13 YS C01C-X NO Sensor, Empty, Constituent C Carboy1/D15 YS C01D-X NO Sensor, Empty, Constituent D Carboy1/B14 YSS X01-X NC Detector, Leak, Cabinet1/G4 YSS X02-X NO HC Switch, Cabinet Door1/F5 YSS X03-X NO HC Switch, Carboy Compartment Door1/F5 YSS X04-X NO HC Switch, Sample Door1/E5 YSS X05-X NO HC Switch, Hose Compartment Door


P&ID Location


March 2014 9-1

Chapter 9: Schematics


Legend ...................................................................................................9-3P&ID Schematic......................................................................................9-5Electrical Schematic ...............................................................................9-7Facility Schematic.................................................................................9-19

9-2 March 2014

Schematics Mega SB100 Model 100

Mega SB100 Model 100 Schematics

March 2014 9-3

Legend

DESCRIPTION

CHG 003-UPDATE BORDER WITHNEW LOGO

NOTES: UNLESS OTHERWISE SPECIFIED

Navigation Key:

#

SHEET NUMBER

GRID NUMBER

NOTE NUMBER

DATE

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H

3 2 15 4678910111213141516

E

D

C

B

A

F

G

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REV ECO DRAWN BY DATE

003 CP32775 FCB 07/17/12

OF

REF

DWG NO

ENGINEER

SIZE

TITLE

REV

FILE SHEET

UNLESS OTHERWISE SPECIFIED:ALL DIMS IN MM [INCHES].DO NOT SCALE DRAWING.

P AND ID,LEGEND,MEGA SBD

T.GRAVES 02/12/08

343-00003-0001 2003

101819

B

7/17/2012 6:51:35 AM

BASIC VALVE

ACTUATORS

MANUAL

PNEUMATIC

EXAMPLE

VALVE, 3 WAY, DIAPHRAM,PNEUMATICALLY OPERATED

2 WAY

3 WAY

4 WAY

CONFIGURATION

GATE

DIAPHRAGM

BALL

GLOBE

TYPE

SPECIALTY VALVES

CHECK

BALL CHECK

NEEDLE

RELIEF

FLOW CONTROL

TANKS/VESSELS

PUMPS

CENTRIFUGAL

DIAPHRAGM

TANK COMPONENTS

VB

DRUM

TANK

FILTER

VESSEL

SPARGER

SPRAY HEAD

VORTEX BUG

REGULATOR

ACTUATORS

MANUAL

EXAMPLE

REGULATOR, REDUCING,SELF CONTAINED, HANDADJUSTED, PRESSUREINDICATOR

REDUCING,SELFCONTAINED

CONFIGURATION

PI

BACK PRESSURE,SELF CONTAINED

REDUCING,LINE SENSING

BACK PRESSURE,LINE SENSING

PRESSURE

INDICATORS

PI

DI GUN

COMPONENTS

DE-GASSINGTEE

SAMPLE DRAIN

SUMP

DISCRETEINSTRUMENT

DIAPHRAGM

1" TF

-

-

-

PAGE SYMBOLS

LINE FUNCTIONDIAMOND

OFF PAGECONNECTOR

SPECIAL NOTE

-

REV

P = PURGE F = FLUSH

LINE SYMBOLS

FUNCTIONDIAMOND

JUNCTION

FLOW ARROW

-

P = PURGE F = FLUSH

MISCELLANEOUSSYMBOLS

CAP

REDUCER

DOUBLECONTAINMENT

QUICKCONNECT

HALFCOUPLING

SKIN TOP

BULKHEAD

PROCESSDIRECTION ARROW

SIZE BUBBLE

DAMPNER

PNEUMATIC COMPONENT

SOLENOIDVALVE

STATICMIXER

STRAINER

MECHANICALMIXER

VENTURI

STROKE LIMITERS

LIMIT OPEN

LIMIT CLOSED

PERISTALTIC


9-4 March 2014


Navigation Key:

#

SHEET NUMBER

GRID NUMBER

NOTE NUMBER

DWG NOSIZE

TITLE

REV

SHEET

3 2 15 4678910111213141516

E

D

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A

F

G

H

3 2 15 4678910111213141516

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OF


003 CP32775 FCB 07/17/12

P AND ID,LEGEND,MEGA SBD

343-00003-0002 2003B

INTERNAL SYSTEM LINK (SOFTWARE OR DATA LINK)

ELECTRIC BINARY SIGNAL

PNEUMATIC BINARY SIGNAL

ELECTROMAGNETIC OR SONIC SIGNAL (NOT GUIDED)

ELECTROMAGNETIC OR SONIC SIGNAL (GUIDED)

OPTIONAL BINARY SYMBOLS

MECHANICAL LINK

CAPILLARY TUBE

HYDRAULIC SIGNAL

ELECTRIC SIGNAL

PNEUMATIC SIGNAL

UNDEFINED SIGNAL

INSTRUMENT SUPPLY OR CONNECTION TO PROCESS

LINE TYPE DESCRIPTION

(ON-OFF)

A ALAYTICALB BLENDC CHEMICALD DRAINE USER CHOICE

G CDAH HUMIDIFIED N2K TEMPERATURE CONTROLM METROLOGYN N2P IPWQ SAMPLE

T TITRATORW DI WATER

S SLURRY

F

PROCESS DESIGNATOR

FILTRATION

INSTRUMENT SYSMBOLS

FUNCTION

DISCRETEINSTRUMENT

CONFIGURATION

SHARED DISPLAYSHARED CONTROL

COMPUTERFUNCTION

PROGRAMMABLELOGIC CONTROLLER

FIELD MOUNTED

PRIMARY LOCATION,NORMALLY ACCESSABLE TOOPERATOR

PRIMARY LOCATION,NORMALLY INACCESSABLETO OPERATOR

AUXILLARY LOCATION,NORMALLY INACCESSABLETO OPERATOR

AUXILLARY LOCATION,NORMALLY ACCESSABLE TOOPERATOR

EXAMPLE

INSTRUMENT, SHARED DISPLAY,PRIMARY LOCATION, ACCESSIBLE TOTHE OPERATOR

TYPICAL AV CONTROL SCHEME

AV PNEUMATIC VALVE

MV MANUAL VALVE

CV CHECK VALVE

FR FLOW REGULATOR

LS* LEVEL, SENSOR

YS PRESENCE, SENSOR

FE FLOW ELEMENT

PR PRESSURE REGULATORPRV PRESSURE RELIEF, VALVEPT PRESSURE TRANSMITTER

FT FLOW TRANSMITTER

COMPONENT DESIGNATOR

WT WEIGHT TRANSMITTER

FI FLOW INDICATOR

PI PRESSURE INDICATORPE PRESSURE ELEMENT

HV HAND VALVE

SV SOLENOID VALVE

PC PRESSURE CONTROLLER

DESIGNATION EXPANSION

XXXXXX

XXXXXXXXXXX

XXXX

XXXX

FC FLOW CONTROLLER

QI QUANTITY, INDICATOR

TA* TEMPERATURE ALARM

SI SPEED INDICATORSC SPEED CONTROLLER

AI ANALYSIS INDICATOR

ADDED IF MORE THAN ONE COMPONENTDESIGNATION APPLY

PCV PRESSURE CONTROL VALVE

*H(HIGH),HH(HIGH/HIGH) L(LOW),LL(LOW/LOW)

AIRSUPPLY


March 2014 9-5

P&ID Schematic


9-6 March 2014


March 2014 9-7

Electrical Schematic

A1001,BLK14AWG

A1004,BLKA1003,BLK

A0004,WHT

1Ø 3 WIRE120 VAC

15 AMP SERVICE

A0001,WHT14AWG

G001,GRN/YEL14AWG

A1007,BLK A1008,BLK

G

N

L1

5L3

AC DISCONNECT PANEL

6T3

3L2 4T2

1L1 2T1

G006,GRN/YELGB1

GB1

101

101

201

A BFU-2

2A

201

1A 1BFU-4

2A

A0005,WHT

A1009,BLK A1010,BLK

G007,GRN/YELGB1

101

201

1A 1BFU-5

2A

A0002,WHT

V+

V+

V-G

N

V-

L

PS2

24VDC 2.5A

A BFU-1

5A

A1002,BLK14AWG

G002,GRN/YEL

TO SHT 2, FU-6D4001,VIO

TO SHT 2, -5D0001,BRN

A1006,BLKA1005,BLK

GB1

101

201

A BFU-3

2AA0003,WHT

G004,GRN/YEL

G003,GRN/YEL

GB1

TO SHT 3, PLCD4101,VIO(A)(F) CR-2A

D4102,VIO

D0101,BRN TO SHT 3, PLC

G005,GRN/YEL

V+

V-

G

N

OK

L

PS1

24VDC 5A

GB2G008,GRN/YEL

14AWG

TO SHT 5, PUMP C02A-X

TO SHT 5, PUMP S02C-X

PP_C2A

PP_S2C

120-38207-1003 CONN120-38215-1616 PINS

120-38210-1003 CONN120-38216-1616 PINS

215-31041-000

120-38207-1003 CONN120-38215-1616 PINS

120-38210-1003 CONN120-38216-1616 PINS

215-31041-000

123

BLK123 GRN

WHTBLK

GRNWHT

123

BLK123 GRN

WHTBLK

GRNWHT

G020,GRN/YELTO N2

STAINLESSCHASSIS

G021,GRN/YELTO CDA

STAINLESSCHASSIS


KEYED NOTES:

DESCRIPTION

-UPDATED WIRE CONNECTIONS TOEV POWER

OF

REF

DWG NO

ENGINEER

SIZE

TITLE

REV

FILE SHEET

DATE

3 2 15 4678910111213141516

E

D

C

B

A

F

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3 2 15 4678910111213141516

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C

B

A

F

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H


005 CP37996 DAB 1/21/2014

UNLESS OTHERWISE SPECIFIED:ALL DIMS IN MM [INCHES].DO NOT SCALE DRAWING.

SCHEMATIC, ELECTRICALSB100, MODEL 100

SLURRY TOOL

D. BECK 12/20/13

217-00545-0001 13005

--

B

1/21/2014 6:57:27 AM


9-8 March 2014

E001,VIO

(H) (G)CR1

(E)(B) CR-1B

FU-6 BA

5ATO SHT 1

PS1D4001,VIO

-1

EMOE002,VIO

TO SHT 1PS1

D0001,BRN

START

3 4

1 2E004,VIO E005,VIOE003,VIOD4002,VIO

-4

-3E008,VIO

(A)(F) CR-1AE006,VIO E007,VIO

-3

D0002,BRN-5

(H) (G)CR2E009,VIO D0003,BRN

-5

GRNX1 X2

E010,VIO D0004,BRN-5

-5FU-7 BA

4AD4003,VIO D0005,BRNTO SHEET 3 FP+D4004,VIO

-4

-5

FU-8 BA

1.5AD4005,VIO

D0006,BLK

TO SHEET 3 HMID4006,RED

+24VDCCONTINUED SHEET 3

0VDCCONTINUED SHEET 3

G009,GRN

GB2

HMI_PWR

120-25482-000


KEYED NOTES:

OF

DWG NOSIZE

TITLE

REV

SHEET

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H


005 CP37996 DAB 1/21/2014


SLURRY TOOL

217-00545-0002 13005B

DESCRIPTION


March 2014 9-9

ENET PORTLOCATE ONDOOR FRONT

1 2

3 4

5 6

7 8

ENET HUB

1 2 3

VDC+

VDC-

FP+

FP-

1769 I/O

PLC

HMI

24VDC

0VDC

D4102,VIO

D0101,BRNTO SHT 1, PS2

-5

-4

+24V 0VFROM SHEET 2

D4004,VIO

D0005,BRNTO SHT 2, FU-7

D4006,REDD0006,BLKG009,GRN

TO SHEET 2 FU-8

D4007,RED

D0007,BLK

,SHLDGB2

1734-IE2C

2PT, ANALOG INPUT

1734-IV8

8PT, DIGITAL INPUT

1734-IV8

8PT, DIGITAL INPUT

1734-OE2C

2PT, ANALOG OUTPUT

EV BLOCK

11234

234

RED

GRN

GB2

-5

-4

G010,GRN/YEL

D0008,BLK

D4028,WHT

215-33028-000

+24V 0VTO SHEET 4

EV_PWR

HMI_PWR

ENET1

ENET3

ENET5

ENET7

ENET2

ENET4

ENET6

TO SHEET 4, WE B01-X

TO SHEET 4, WE C01A-X

TO SHEET 4, WE S01C-X

S 01 S 02 S 03 S 04

120-25483-000

120-34151-000

120-32925-000

120-32925-000

ENET_PWR

GB2G015,GRN/YEL

14AWG

120-25482-000

127-00534-000

D4008,RED

D0028,GRN

WHT

BLK


KEYED NOTES:

OF

DWG NOSIZE

TITLE

REV

SHEET

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H

3 2 15 4678910111213141516

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D

C

B

A

F

G

H


005 CP37996 DAB 1/21/2014


SLURRY TOOL

217-00545-0003 13005B

DESCRIPTION

005

005


9-10 March 2014

SCALEWE B01-X

SHLD-C2+C2

-EXC-SEN-SIG+SIG+SEN+EXC

VIOGRYBLKBRNWHTGRNBLURED

WS_B01

SCALE MODULE

24VDC

0VDC

-5

-4

+24V 0VFROM SHEET 3

D4009,REDD0009,BLK ,SHLD

D4009,RED

D0009,BLK

WE01_PWR

WE B01-X

SCALEWE C01A-X

SHLD-C2+C2



WS_C1A

SCALE MODULE

24VDC

0VDC

-5

-4D4010,REDD0010,BLK ,SHLD

D4010,RED

D0010,BLK

WE1A_PWR

WE C01A-X

SCALEWE S01C-X

SHLD-C2+C2



WS_S1C

SCALE MODULE

24VDC

0VDC

-5

-4D4011,REDD0011,BLK ,SHLD

D4011,RED

D0011,BLK

WE1C_PWR

WE S01C-X

ENET3

TO SHEET 3, ENET HUB

ENET5


ENET7


+24V 0VTO SHEET 6

120-25483-000

120-34151-000

120-25483-000

120-34151-000

120-25483-000

120-34151-000


KEYED NOTES:

SCALE SHIELD WIRE MAY BECLEAR, OR YELLOW

REMOVE JUMPERS FROMSCALE CONNECTION

OF

DWG NOSIZE

TITLE

REV

SHEET

3 2 15 4678910111213141516

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D

C

B

A

F

G

H

3 2 15 4678910111213141516

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D

C

B

A

F

G

H


005 CP37996 DAB 1/21/2014


SLURRY TOOL

217-00545-0004 13005B

DESCRIPTION

1

1

1

1

2

2

2

2


March 2014 9-11

PUMP C02A-X

TO SHT 11, AO CARD, PORT 0

TO SHT 10, 1734-IE2C

PP_C2A

TO SHT 1, FU-4

PAI_C2A

PAO_C2A

PDO_C2A

PUMP S02C-XTO SHT 10, 1734-IE2C

PP_S2C

TO SHT 1, FU-5

PAI_S2C

PAO_S2C

PDO_S2C

394-11489-000

394-11488-000

394-11487-000

REDBLK

PA_STP,WHTPA_PLS,GRN

TO SHT 11, AO CARD, PORT 4

TO SHT 8, CR105TO SHT 8, CR106

REDBLK

PC_STP,WHTPC_PLS,GRN

TO SHT 8, CR107TO SHT 8, CR108

SHLD TO SHT 11, AO CARD, PORT 2

TO SHT 11, AO CARD, PORT 1TO SHT 11, AO CARD, PORT 5

SHLD TO SHT 11, AO CARD, PORT 3

TO SHT 7, CR101PA_RL1,BRNPA_RL1,BLKPA_RL2,WHTPA_RL2,BLU

TO SHT 7, -5TO SHT 7, CR102TO SHT 7, -5

TO SHT 7, CR103PC_RL1,BRNPC_RL1,BLKPC_RL2,WHTPC_RL2,BLU

TO SHT 7, -5TO SHT 7, CR104TO SHT 7, -5

394-11489-000

394-11488-000

394-11487-000


KEYED NOTES:

OF

DWG NOSIZE

TITLE

REV

SHEET

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H

3 2 15 4678910111213141516

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D

C

B

A

F

G

H


005 CP37996 DAB 1/21/2014


SLURRY TOOL

217-00545-0005 13005B

DESCRIPTION


9-12 March 2014

-5

-4

+24V 0VFROM SHEET 4

+24V 0VTO SHEET 7

ADSENS

PRESSURE TRANSDUCERN.O.

AP25P-04-F2-QD120-38595-000 (PNP)

PS_G01-X

PSHL G01-X

PUMP B01-X CDA HIGH/LOW

ADSENS


AP25P-04-F2-QD120-38595-000 (PNP)

PS_G02-X

PSHL G02-X

PUMP S02D-X CDA HIGH/LOW

ADSENS


AP25P-04-F2-QD120-38595-000 (PNP)

PS_G05-X

PSHL G05-X

PUMP D01-X CDA HIGH/LOW

ADSENS


AP25P-04-F2-QD120-38595-000 (PNP)

PS_G04-X

PSHL G04-X

PUMP C02B-X CDA HIGH/LOW

PSL G01-XPUMP B01-XLOW CDA PRESS

DI0

PSH G01-XPUMP B01-XHIGH CDA PRESS

DI1

PSL G02-XPUMP S02D-XLOW CDA PRESS

DI2

DI3

DI4

DI5

DI6

DI7

FIELD BUS24VDC

FP+

FIELD BUS24VDC

FP+

DI 8chPLC 1769 I/O

SINKING INPUTS 0-7

RED

BLK

WHT

GRN

-5

-4

-5

-4

-5

-4

PSH G02-XPUMP S02D-XHIGH CDA PRESS

PSL G04-XPUMP C02D-XLOW CDA PRESS

PSH G04-XPUMP C02D-XHIGH CDA PRESS

PSL G05-XPUMP D01-XLOW CDA PRESS

PSH G05-XPUMP D01-XHIGH CDA PRESS

112

3 34 4

2BRN

BLUWHTBLK

REDWHTGRNBLK

RED

BLK

WHT

GRN

112

3 34 4

2BRN

BLUWHTBLK

REDWHTGRNBLK

RED

BLK

WHT

GRN

112

3 34 4

2BRN

BLUWHTBLK

REDWHTGRNBLK

RED

BLK

WHT

GRN

112

3 34 4

2BRN

BLUWHTBLK

REDWHTGRNBLK


KEYED NOTES:

OF

DWG NOSIZE

TITLE

REV

SHEET

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H


005 CP37996 DAB 1/21/2014


SLURRY TOOL

217-00545-0006 13005B

DESCRIPTION


March 2014 9-13

-5

-4

+24V 0VFROM SHEET 6

+24V 0VTO SHEET 12

ADSENS


AP25P-04-F2-QD120-38595-000 (PNP)

PS_G06-X

PSL G06-X

EV MANIFOLD LOW CDA

ADSENS


AP25P-04-F2-QD120-38595-000 (PNP)

PS_N01-X

PSHL N01-X

HUMIDIFIER HIGH/LOW N2

ADSENS


AP25P-04-F2-QD120-38595-000 (PNP)

PS_N02-X

PSL N02-X

SYSTEM PURGE LOW N2

PSL G06-XEV MANIFOLDLOW CDA PRESS

DI8

DI9

PSL N01-XHUMIDIFIERLOW N2 PRESS

DI10

PSH N01-XHUMIDIFIERHIGH N2 PRESS

DI11

PSL N02-XSYSTEM PURGELOW N2 PRESS

DI12

PUMP C02A-XRELAY 2 OUTPUT

DI13

DI14

DI15

FIELD BUS24VDC

FP+

FIELD BUS24VDC

FP+

DI 8chPLC 1769 I/O

SINKING INPUTS 8-15

RED

BLK

WHT

-5

-4RED

BLK

WHT

GRN

-5

-4

WHT

RED

BLK

PUMP C02A-XRELAY 1 OUTPUT

A1

CR101

A2

A2

CR102

A1

A1

CR103

A2

A2

CR104

A1

CR101

11

14

CR102

11

14

CR103

11

14

CR104

11

14


TO SHT 5, PUMP CO2A-X

PA_RL1,BRN

PA_RL2,WHT


TO SHT 5, PUMP SO2C-X

PC_RL1,BRN

PC_RL2,WHT

PA_RL1,BLK

PA_RL2,BLU

-5

-5PC_RL1,BLK

PC_RL2,BLU





CR102,BLU

CR101,BLU

CR103,BLU

CR104,BLU

D4012,VIO

D4013,VIO

PUMP S02C-XRELAY 2 OUTPUT

PUMP S02C-XRELAY 1 OUTPUT

112

3 34 4

2BRN

BLUWHTBLK

REDWHTGRNBLK

112

3 34 4

2BRN

BLUWHTBLK

REDWHTGRNBLK

112

3 34 4

2BRN

BLUWHTBLK

REDWHTGRNBLK


KEYED NOTES:

OF

DWG NOSIZE

TITLE

REV

SHEET

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H


005 CP37996 DAB 1/21/2014


SLURRY TOOL

217-00545-0007 13005B

DESCRIPTION


9-14 March 2014

A2

CR105

A1PA STP

PUMP C02A-XEXTERNAL STOP

DO0

PA PLSPUMP C02A-X

PULSE

DO1

DO2

DO3

SPARE

DO4

DO5

DO6

DO7

FIELD BUS0VDC

FP-

FIELD BUS0VDC

FP-

DO 8chPLC 1769 I/O

SOURCING OUTPUTS 0-7

A2

CR106

A1

A2

CR107

A1

A2

CR108

A1

D0012,BRN

CR101A,BLUCR105

11

14

CR106

11

14

CR107

11

14

CR108

11

14

CR102A,BLU

CR103A,BLU

CR104A,BLU

PA_STP,WHT

PA_PLS,GRN



PC_STP,WHT

PC_PLS,GRN

TO SHT 5, PUMP SO2C-X


D0013,BRN

SPARE

SPARE

SPARE

PA STPPUMP S02C-X

EXTERNAL STOP

PA PLSPUMP S02C-X

PULSE


KEYED NOTES:

OF

DWG NOSIZE

TITLE

REV

SHEET

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H


005 CP37996 DAB 1/21/2014


SLURRY TOOL

217-00545-0008 13005B


March 2014 9-15

DO8

DO9

DO10

DO11

DO12

DO13

DO14

DO15

FIELD BUS0VDC

FP-

FIELD BUS0VDC

FP-

DO 8chPLC 1769 I/O

SOURCING OUTPUTS 8-15

SONALERT

SPARE

SPARE

SPARE

SPARE

SPARE

SPARE

SPARE

1

SONALERT

2

SONA1,BLU

D0014,BRN


KEYED NOTES:

OF

DWG NOSIZE

TITLE

REV

SHEET

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H


005 CP37996 DAB 1/21/2014


SLURRY TOOL

217-00545-0009 13005B


9-16 March 2014

6

4

2

0

7

5

3

1

S 01, AI 2ch1734-IE2C MODULE

ANALOG INPUTS 4-20mA


PAO_C2A

RED

BLK

SHLD


PAO_S2C

RED

BLK

SHLD

0PUMP

C02A-XSPEEDSIGNAL

1PUMP

S02C-XSPEEDSIGNAL

2GROUND

3GROUND

40VDC

50VDC

624VDC

724VDC


KEYED NOTES:

OF

DWG NOSIZE

TITLE

REV

SHEET

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H


005 CP37996 DAB 1/21/2014


SLURRY TOOL

217-00545-00010 13

005B


March 2014 9-17

6

4

2

0

7

5

3

1

S 02, AO 2ch1734-OE2C MODULE

ANALOG OUTPUTS 4-20mA


RED

BLK

SHLD

RED

BLK

SHLD TO SHT 5, PUMP S02C-X

0PUMP

C02A-XSPEEDCNTRL

1PUMP

S02C-XSPEEDCNTRL

2GROUND

3GROUND

40VDC

50VDC

624VDC

724VDC


KEYED NOTES:

OF

DWG NOSIZE

TITLE

REV

SHEET

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H


005 CP37996 DAB 1/21/2014


SLURRY TOOL

217-00545-00011 13

005B


9-18 March 2014

6

4

2

0

7

5

3

1

S 03, DI 8ch1734-IV8 MODULEDIGITAL INPUTS

PRESCENCE SENSOR

TURCK BC10-QF385-22006-000

N.O.

YS_C01A-X

YS C01A-X

CONST. A CARBOY EMPTY

-5

-4

+24V 0VFROM SHEET 7

+24V 0VTO SHEET 13

PRESENCE SENSORN.C.

OMRON E2K-C25ME2120-25378-000

LS_B01-X

LSHH B01-X

TANK 01-X LEVEL HIGH/HIGH

FLOAT SWITCH

RYAN 6905-450121-30567-000

N.O. 10'

YSS_X01-X

YSS X01-X

PROCESS CABINET LEAK

PRESCENCE SENSOR

TURCK BC10-QF385-22006-000

N.O.

YS_C01B-X

YS C01B-X

CONST. B CARBOY EMPTY

PRESCENCE SENSOR

TURCK BC10-QF385-22006-000

N.O.

YS_S01C-X

YS S01C-X

CONST. C CARBOY EMPTY

PRESCENCE SENSOR

TURCK BC10-QF385-22006-000

N.O.

YS_S01D-X

YS S01D-X

CONST. D CARBOY EMPTY

PRESCENCE SENSOR

TURCK BC10-QF385-22006-000

N.O.

YS_B01-X

YS B01-X

TANK 01-X EMPTY

RED

BLK

WHT

-5

-4

-5

-4

-5

-4

-5

-4

-5

-4

-5

0CARBOY

AEMPTY

1TANKEMPTY

2CARBOY

BEMPTY

3TANKHIGH/HIGH

4CARBOY

CEMPTY

5CABNETLEAK

6CARBOY

DEMPTY

7SPARE

112

3 32

BRN

BLUBLK

REDWHTBLK

RED

BLK

WHT

112

3 32

BRN

BLUBLK

REDWHTBLK

RED

BLK

WHT

112

3 32

BRN

BLUBLK

REDWHTBLK

RED

BLK

WHT

112

3 32

BRN

BLUBLK

REDWHTBLK

RED

BLK

WHT

112

3 32

BRN

BLUBLK

REDWHTBLK

RED

BLK

WHT

112

3 32

BRN

BLUBLK

REDWHTBLK

BLK

RED

1122

YELYEL

REDBLK


KEYED NOTES:

OF

DWG NOSIZE

TITLE

REV

SHEET

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H


005 CP37996 DAB 1/21/2014


SLURRY TOOL

217-00545-00012 13

005B

DESCRIPTION


March 2014 9-19

6

4

2

0

7

5

3

1

S 04, DI 8ch1734-IV8 MODULEDIGITAL INPUTS

+24V 0VFROM SHEET 12

PRESENCE SENSORN.C.

OMRON E2K-C25ME2120-25378-000

LS_B02-X

LSHH B02-X

EXTERNAL TANK HIGH/HIGH

-5

-4RED

BLK

WHT

BLK

BRN

WHTGRY

PT E01-X

PSE300109-30230-000

+24VOUTAOUT2OUT1COM

DC+N/CDC-

1-5VINPSE550-AC2107-30613-000

BRN

BLKBLU

BLU

DIFF PRESS SENSOR PHOTOHELIC TRANSMITTER

PDIS E01-X PT E01-X

PI E01-X

-5

-4

RED

BLK

WHT

YSS_X03BYSS_X03A

YSS X05-X

YSS X04-X

202 203

YSS_X03C

204

YSS_X03D

YSS_X02BYSS_X02A

102 103

YSS_X02C

104

YSS_X02D

-5

-5

-5

-5

101

201-5,BRN

-5,BRN

105

205

YSS_02,BLU

YSS_03,BLU

0EXTRNLTANKFULL

1EXAUSTLOW

2PRCESSCABDOOR

3HOSEDOOR

4CARBOYCABDOOR

5SAMPLEDOOR

6SPARE

7SPARE

112

3 32

BRN

BLUBLK

REDWHTBLK

112

3 32

BRN

BLUBLK

REDWHTBLK

1

1

2

2RED

BLK

REDRED

1

1

2

2

REDRED

RED

BLK


KEYED NOTES:

OF

DWG NOSIZE

TITLE

REV

SHEET

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H


005 CP37996 DAB 1/21/2014


SLURRY TOOL

217-00545-00013 13

005B

DESCRIPTION


9-20 March 2014

Facility Schematic


March 2014 9-21

March 2014 10-1

Chapter 10: Parts List

Table 10-1. Mega SB100 Model 100 Spare Parts

Part Number Part Description Qty120-38568-000 1734 POINT IO, 24 VDC, ANALOG, 2 INPUT MODULE, CURRENT 1120-38600-000 1734 POINT IO, 24 VDC, ANALOG, 2 OUTPUT MODULE, 4-20mA 1120-38566-000 1734 POINT IO, 24 VDC, DIGITAL, 8 INPUT MODULE, SOURCE 2120-38561-000 1734 POINT IO, ONE-PIECE 8 POINT TERMINAL BASE W/SPRING

TERMINAL4

370-00073-000 3-WAY PNEU. VALVE, 1/4" PARFLARE 1120-22220-000 ACTUATOR,PROX SNSR,FLG MNT 10109-30230-000 CNTRLR,PSE30, 1-5V IN,4-20mA OUT,NPN 1120-38595-000 DISPLAY,PRESS SWITCH,POS,0-1MPA,2PNP,1/8"NPT 7103-30183-000 FLTR, PAD, 20 X 30, 1 IN THK, POLYESTER .25120-34646-000 FUSE, 1.5 AMP, 250 VAC, FAST ACTING, 5MM x 20MM 1120-34650-000 FUSE, 4 AMP, 250 VAC, FAST ACTING, 5MM x 20MM 1120-34651-000 FUSE, 5 AMP, 250 VAC, FAST ACTING, 5MM x 20MM 1120-22434-000 FUSE, FNQ-R, 600V, 2 AMP 4120-22425-000 FUSE,REJECTION,5 AMP 1120-38603-000 HMI, PANELVIEW PLUS 6 COMPACT, MONOCHROME, TOUCH 132-3059-001 INDICATOR,TANK LVL,30 GAL 1

136-34029-000 MANIFOLD, 16 STATION, TWO 3-WAY SOLENOIDS PER STATION, W/ EX260 VALVES, ETHERNET, 1/8" ONE-TOUCH, 24VDC

1

360-25376-000 NOZ, 90DEG CONE, 1/8MNPT, PVC 1120-32013-000 POWER SUPPLY, 24VDC, 2.5A, DIN RAIL MOUNT, CE, RoHS 1120-37751-050 POWER SUPPLY, 24VDC, 5A, DIN RAIL MOUNT 1120-38605-000 PROCESSOR, WEIGHT, HARDY SCALE, 12-27VDC, ETHERNET/IP

CONFIGURATION, NO DISPLAY3

120-38593-000 PROCESSOR,COMPACTLOGIX,5370 L1,DUAL ENET,500KB 1380-25012-000 PUMP, AIR-OP, DOUBLE , 1/4 NPP 1380-00546-000 PUMP, DOSING, GRUNDFOS DDA SERIES, FLOW CONTROL,

58PSIG, 0.5-500ML/MIN, 6.56FT DRY SUCT LIFT, 100-240VAC, 4-20MA INPUT, 3/8" X 1/2" COMPRESSION PORTS, PVDF DOSE HEAD, CERAMIC BALL, PTFE GASKET, NEMA 4X

2

380-00539-000 PUMP, DUAL DIAPHRAGM, E08 SERIES, PTFE HOUSING, PTFE/EPDM DIAPHRAGM, PTFE CYLINDER SHUTTLE, 0-3.8 GPM, 3.3FT DRY SUCTION HEAD, 1/4"FNPT PORTS, W/ PULSE DAMPENER

2

10-2 March 2014

Parts List Mega SB100 Model 100

380-00540-000 PUMP, DUAL DIAPHRAGM, E10 SERIES, PTFE HOUSING, PTFE/EPDM DIAPHRAGM, PTFE CYLINDER SHUTTLE, 0-5.5 GPM, 6.6FT DRY SUCTION HEAD, 3/8"FNPT

1

102-30492-000 REGULATOR MANIFOLD, 2 STATION, 3/8NPT INLET, 1/4NPT OUTLETS, 1/8NPT GUAGE PORTS

1

102-30473-000 REGULATOR MANIFOLD, 5 STATION, 3/8NPT INLET, 1/4NPT OUTLETS, 1/8NPT GUAGE PORTS

1

381-00556-000 REGULATOR, FLOW, 1000-4000ML/MIN, PFA, 1/2"FLR PORTS, PANEL MOUNT

1

120-31892-000 RELAY, 24VAC/DC, RB 122 AV, GREY 2120-31737-000 RELAY, 6MM, PLC-RSC-24VDC/21 8115-37966-000 SCALE, BENCH, 4 LOAD CELLS, ANYWEIGH SERIES, 12" X 12", 66LB

MAX CAP, UNIVERSAL COMMS2

115-37967-000 SCALE, BENCH, 4 LOAD CELLS, ANYWEIGH SERIES, 24" X 24", 660LB MAX CAP, UNIVERSAL COMMS

1

385-22006-000 SENSOR,LEVEL, CAP, N/O, NPN, 10VDC, PP, TURCK 5120-25378-000 SNSR, CAPACITIVE, NPN, NC, 2M CABLE 1107-30613-000 SNSR,PRESS,DIFF,2KPA,W/BRKT,SMC 1121-22009-000 SNSR,REED,FLG MNT,6' LEAD,NO 10120-35053-000 SWITCH, 22MM, PUSH BUTTON, MOMENTARY, N.O., GREEN LED,

24VDC1

120-38601-000 SWITCH, CONTROL/LOAD, FRONT/DOOR MOUNT, 16 AMP, 2 POSITION, 2 POLE

1

120-38604-000 SWITCH, ETHERNET, 8 PORT, DIN-RAIL, 10/100 1121-30567-000 SWITCH, FLOAT, HORIZ MT REED, 10'CABLE, PVDF 1370-22019-000 VALVE, AOV, DIAPH, PV-10, 3/8"FLR, 3-WAY, NC X NO X COM, PFA W/

PVDF NUTS, Cv: 0.621

370-01918-000 VALVE, DIAPHRAGM, MANUAL, PFA, 2-WAY, C67 SERIES, 1"FLR, PVDF NUTS

1

370-01913-000 VALVE, DIAPHRAGM, MANUAL, PFA, 2-WAY, C67 SERIES, 1/2"FLR, PVDF NUTS

2

370-01919-000 VALVE, DIAPHRAGM, MANUAL, PFA, 2-WAY, C67 SERIES, 3/8"FLR, PVDF NUTS

1

370-01914-000 VALVE, DIAPHRAGM, PNEUMATIC, PFA, 2-WAY, NC, C60 SERIES, 1/2"FLR, PVDF NUTS

5


2


11

101-32910-000 VALVE, PRESS RELIEF, 1/4"MNPT POP-OFF, SST, 30PSIG 1101-35714-000 VALVE, PRESSURE RELIEF, 1/4"MNPT, POP-OFF, 80PSIG 5

Table 10-1. Mega SB100 Model 100 Spare Parts (continued)

Part Number Part Description Qty

Mega SB100 Model 100 Parts List

March 2014 10-3

101-32547-000 VALVE, RESIDUAL PRESSURE RELEASE, 3 PORT, 3/8" IN/OUT X 1/4" EXH

2

370-25153-000 VLV, CHECK, 1/2FLR X 1/2FLR, PTFE 2370-25118-000 VLV, MAN, NEEDLE, 3/8FLR, PFA 3136-32790-000 VLV,2-WAY/3PORT,1-TCH,5/16"T 1370-25144-000 VLV,CHECK,3/8FLR,PTFE 3370-25262-000 VLV,MAN,NEEDLE,ANGLE,3/8FLR,PFA 2

Table 10-1. Mega SB100 Model 100 Spare Parts (continued)

Part Number Part Description Qty

10-4 March 2014

Parts List Mega SB100 Model 100

March 2014 Glossary - 1

Glossary

A-B — Allen-Bradley Company, Inc.

ABPR — Automatic Back Pressure Regulator. The ABPR system regulates the slurry pressure in the global loop. An alternate method of controller back pressure is to hold the BPR valve at a constant setting while modulating a set of variable speed supply pumps.

Acid — Acid Compound that reacts with metal to evolve hydrogen, reacts with a base to form salt, dissociates in water to yield H2 ions, and has a pH of less than 7.

Al203 — Aluminum Oxide (Alumina). Also known as corundum and emery and used as an abrasive.

Alkali — Chemical substance that is soluble in water, neutralizes acids, and forms salts with them. An alkali has a pH of more than 7.

Amorphous — Lacking a crystalline structure; literally without shape. Having a random atomic arrangement without a three dimensional structure.

Analog — System or device that represents data variation by a measurable physical quality.

Active — Describes a device that is online and currently dispensing.

Aspirated Drain — System where suction facilitates thorough and rapid draining.

Atomize — To reduce to fine particles or spray.

ATRS — Auto-Titration/Replenishment System.

Automode — A station that can operate automatically.

AV — Automatic Valve.

Base — Compound that reacts with acids to form salts and has a pH of more than 7.

BCDS — Bulk Chemical Distribution System.

Blend Tank — Tank or station where different slurry or chemical components are combined and mixed in specific ratios.

BPR — Back Pressure Regulator.

Glossary - 2 March 2014

Glossary Mega SB100 Model 100

BV — Ball Valve.

BPV — Back Pressure Valve.

CDA — Clean Dry Air.

CDU — Chemical Dispense Unit. Refers to the Mega Tote/Drum assembly that supplies slurry to the polishers.

Centipoise — Unit of measurement for viscosity (also see Poise).

CompactLogix — A PLC that controls equipment operation.

ControlNet — Communication protocol for sending and receiving data from the corresponding Megaflow systems (from PLC to PLC).

CPU — Central Processing Unit.

CSS — Chemical Safety Shutdown. A function that remotely shuts down all system operations in an emergency.

CV — Check Valve.

Data Highway Plus — Allen-Bradley communication protocol.

Day Tank — Tank to which blended chemicals are transferred prior to dispensation to the global loop.

Deionized — Substance from which all atoms or groups of atoms that have acquired an electrical charge have been removed.

Density — Measure of a quantity such as mass or electric charge per unit volume.

DeviceNet — Communication Protocol for collecting inputs from the field and sending outputs to the field (PLC to I/O).

DH+ — Data Highway Plus (Data Highway Plus for definition).

D.I. (or DI) — Deionized.

Digital — Processing, operating on, storing, transmitting, representing, or displaying data in the form of numerical digits, as in a digital computer.

Distribution Tank — Tank from which chemical is dispensed directly to a point of use system or to multiple systems via a global loop.

Mega SB100 Model 100 Glossary


EMO — Emergency Machine Off. A function when activated, immediately shuts all control power to output devices. Does not disconnect main power.

Ethernet — System for exchanging messages between computers on a local area network using coaxial, fiber optic, or twisted-pair cables.

EV — Solenoid Electrical Valve part identification code.

Fab — Wafer fabrication facility.

Force — Software function that allows the programmer to energize or de-energize an input or output independent of the program logic.

FRPP — Fire Resistant Polypropylene.

Global Loop — Distribution loop used to supply chemical or slurry to point of use systems.

GPM — Gallons per Minute.

GUI — Graphical User Interface.

HC — High Capacity.

Heterogeneous — Composed of parts of different kinds.

Homogeneous — Composed of parts of the same kind. This term is properly applied to a chemical element and compounds but not to mixtures or solutions.

Hydrometer — Instrument for measuring the specific gravity of liquids.

Hygrometer — Instruments for measuring relative humidity.

I/O — Hardware or software that controls the passage of information into and out of a computer or computer component.

IPA — Isopropanol Alcohol.

IPW — Industrial Process Water.

KTx Card — Allen-Bradley communication interface card.

Ladder Logic — A PLC program written in a format resembling an electrical ladder diagram.

LAN — Local Area Network. Network of personal computers and peripheral devices linked by cable and able to share resources.



LPM — Liters Per Minute.

l/m — Liters per Minute.

Loop — Piping system that returns to the point of dispensation.

MOS — Metallic Oxide Semiconductor.

MSDS — Material Safety Data Sheet.

MTBF — Mean Time Between Failure.

MV — Manual Valve.

N2 — Nitrogen.

NPP — Natural Polypropylene.

NPT — National Pipe Thread.

OFA — Oil Free Air.

ORP — Oxidation Reduction Potential.

Offline — Indicates the device is not running automatically and available for manual control (e.g., valves).

PanelView — Refers to Allen-Bradley PanelView operator terminals (PanelView 550, 600, 1000, etc.). PanelView operator terminals provide machine control and monitoring functions for most Mega Fluid Systems, Inc. equipment.

Pause — Describes the operational mode that temporarily stops the system blend and distribution process. Pause can be initiated automatically or manually through the touchscreen.

PFA — Perfluoroalkoxy.

pH — The acidity or alkalinity of a solution. Equal to the log of the reciprocal of the hydrogen ion concentration measured in gram moles/liter. In practical terms the pH scale extends from 0 -14.

PID — Proportional Integral Derivative. A PID controller corrects the error between a measured process variable and a desired setpoint by calculating and then outputting a corrective action that can adjust the process accordingly.

The PID controller calculation (algorithm) involves three separate parameters; the Proportional, the Integral and Derivative values. The Proportional value determines the reaction to the current

Mega SB100 Model 100 Glossary


error, the Integral determines the reaction based on the sum of recent errors and the Derivative determines the reaction to the rate at which the error has been changing. The weighted sum of these three actions is used to adjust the process via a control element such as the position of a control valve.

PLC — Programmable Logic Controller. Electronic device that controls machines and processes. It uses a programmable memory to store instructions and execute specific functions that include On/Off control, timing, counting, sequencing, arithmetic, and data handling.

PPE — Personal Protective Equipment.

Point of Use — Any wafer fabrication system that draws chemical from the global loop.

Poise — Unit of measurement for viscosity. Water = 0.01 poise.

POU — Point of Use.

Primary — Describes the main slurry/dispense station. The primary station contains a power disconnect, main controller and a PanelView Plus touchscreen.

PSI — Pounds per Square Inch.

PT — Pressure Transmitter.

PTFE — Polytetraflourethelene.

Pycnometer — Vessel used to measure the specific gravity of liquids or solids.

Recipe — User-defined series of steps which specifies the type (either slurry, chemical 1, chemical 2, or DI water/UPW) and amount (measured either by weight or volume) of chemical to be added to the blend/mix tank.

Repeatability — The ability of an instrument to give the same output or reading under repeated, identical conditions.

RIO — Remote I/O (also see I/O).

RV — Relief Valve.

scfm — Standard Cubic Feet per Minute.

Secondary — Describes the redundant slurry/dispense station.

Setpoint — An operational boundary or specific limit (can be either high or low) which the system is not to exceed.



SF — Stabilized Filtration.

SG — Specific Gravity.

SGU — Specific Gravity Units.

SLC — Small Logic Controller. Trademark of Allen-Bradley Company, Inc.

Slurry — Liquid mixture of water and an insoluble solid material.

SMS — Slurry Metrology System.

Specific Gravity — Ratio of the density of a substance to the density of water at specified conditions.

SQL — Structured Query Language. Computer language for specifying database inquiries.

SS — Stainless Steel.

Stabilized Filtration — Constant flow through the filtration loop to maximize filter effectiveness.

Standby — Describes a station or device that is started but not currently dispensing or blending.

TIP — Tool Interface Panel

Trending — Collection of system operations data for performance analysis and record-keeping purposes.

Tare — Deduction from the gross weight to allow for receptacle/packaging.

Tool — Any device, storage container, work station, or process machine used in a clean room.

UPW — Ultra-Pure Water.

Viscosity — Property of a fluid caused by molecular attraction that causes it to resist flow or movement in response to external force applied to it. Viscosity is affected by temperature.

VMB — Valve Manifold Box.

XMTR — Transmitter.

March 2014 Index - 1

IndexAABPR 11-1acid 11-1acknowledge alarm 5-14Active 11-1Al203 11-1alarm banner screen 6-2, 6-3, 6-4, 6-5, 6-6, 6-8, 6-10, 6-12, 6-14,

6-15, 6-17, 6-19, 6-20, 6-21, 6-22, 6-23, 6-24, 6-26, 6-28

alarm setup 5-9alarm summary screen 6-2, 6-3, 6-4, 6-5, 6-6, 6-8, 6-10, 6-12, 6-

14, 6-15, 6-17, 6-19, 6-20, 6-21, 6-22, 6-23, 6-24, 6-26, 6-28

alarmsresponding to 5-14setup 5-9testing 8-25

alkali 11-1amorphous 11-1analog 11-1aspirated drain 11-1atomize 11-1atomizer

adjusting 8-14definition 8-14malfunction 8-14setting adjustment 8-14

ATRS 11-1automatic valve 8-27Automode 11-1AV 11-1

Bbase 11-1battery

lithium 8-36disposal 8-37replacement procedure 8-36

BCDS 11-1blend tank 11-1BPR 11-1BPV 11-2BV 11-2

Ccabinet 1-5

cleaning procedure 8-39cabinet cleaning 8-39caution messages

explained 2-2CDA 11-2

CDU 11-2centipoise 11-2check valve 8-27chemical

exposure 2-4handling 2-4leaks 2-4spills 2-4

chemical hazard messages explained 2-3chemicals

spill mitigation 2-12cleaning

cabinet 8-39Compact 8-7compact flash card 8-7CompactLogix 11-2component

isolation and removal 8-4component troubleshooting 8-12components

electricalreplacement 8-5

ControlNet 11-2CPU 11-2CSS 11-2CV 11-2

DD.I. 11-2danger messages

explained 2-2data highway plus 11-2day tank 11-2deionized 11-2density 11-2device settings

record sheet 8-44DeviceNet 11-2DH+ 11-2DI 11-2differential pressure gauge 8-26digital 11-2distribution tank 11-2drain pump 1-6

Eelectrical

safetytype 1 hazard defined 2-5type 2 hazard defined 2-5type 3 hazard defined 2-5

Index Mega SB100, Model 100


type 4 hazard defined 2-5work guidelines 2-5

electrical componentisolation and removal 8-5

electrical componentsreplacement 8-5

electrical components, removing 8-5electrical equipment

safety when working with 2-4electrical hazard messages explained 2-3electrical solenoid valve 8-26emergency machine off

verification procedure 8-38emergency machine off (EMO) procedure 2-6EMO 11-3

circuitry description 2-7resetting an EMO button 2-7verification procedure 8-38

EMO procedure 2-6equipment

features 1-5equipment features 1-5

cabinet 1-5drain pump 1-6interface 1-5piping 1-5pumps 1-5tanks 1-5

ethernet 11-3EV 11-3

Ffab 11-3facility requirements 3-2fittings

inspection 8-32replacement 8-33

force 11-3FRPP 11-3

Ggas line

preventive maintenance procedure 8-32gas lines

component check 8-29global loop 11-3GPM 11-3GUI 11-3

HHC 11-3heavy object hazard messages explained 2-3heterogeneous 11-3

homogeneous 11-3how to

alarmdeactivate the 5-2

alarm setup, changing alarm setup 5-9alarms, test the 8-25atomizer, adjust the 8-14battery, replace the 8-36, 8-37cabinet, clean the 8-39chemical startup and test 3-9components, remove 8-4DI water & leak test the system 3-8electrical components, remove 8-5EMO, test the 8-38fittings, check the 8-32fittings, replace the 8-33gas line, check components of the 8-29install the system 3-3leak detector, check the 8-17line proximity sensor, calibrate the 8-22liquid sensor, adjust the 8-21login 5-4manual, set to 5-17place the system 3-4prestartup test the system 3-6pump, check the 8-16pump, isolate and remove a 8-34recipes, edit the 5-11relief valves, adjust the 8-30restart 5-15system

turn off the systemturn off the 5-3

system setpoints, changing system setpoints 5-7system, configure 3-7system, start 5-2turn off alarm 5-14

hydrometer 11-3hygrometer 11-3

II/O 11-3initial system startup 5-2installation 3-1

procedure 3-3chemical startup and testing 3-9DI water startup and leak testing 3-8pre-startup testing 3-6system commissioning 3-5system configuration 3-7system inspection 3-3system location and site inspection 3-3system placement 3-4



system testing 3-8interface 1-5interlocks

software 7-3critical 7-2process 7-2warnings 7-2

IPA 11-3IPW 11-3

Kkey failure points 2-10KTx card 11-3

Ll/m 11-4ladder logic 11-3LAN 11-3leak detector

check 8-17line proximity sensor

calibration 8-22liquid sensor

adjusting sensitivity 8-21lithium battery 8-36

disposal 8-37replacement procedure 8-36

lockout/tagout 2-8Login

how to 5-4loop 11-4LPM 11-4

Mmaintenance

preparation 8-11semiannual 8-36

manual mode 5-17manual mode warning 2-14manual valve 8-28material safety data sheets 2-9mechanical hazard messages explained 2-3MOS 11-4MSDS 2-9, 11-4MTBF 11-4MV 11-4

NN2 11-4notice messages

explained 2-2NP 11-4

NPT 11-4

OOFA 11-4Offline 11-4overview

equipment features 1-5facility requirements 3-2system 1-4

PP trap 8-14PanelView 11-4password 5-4Pause 11-4personal protective equipment 11-4, 11-5PFA 11-4pH 11-4piping 1-5PLC 11-5point of use 11-5poise 11-5POU 11-5pressure reducing regulator 8-8pressure relief valve 8-28pressure switch 8-8preventative maintenance 8-11Preventive 8-11preventive maintenance

list 8-42semiannual 8-36

Primary 11-5procedures

editing a recipe 5-11operating

manual operation 5-17responding to alarms 5-14restarting after EMO shutdown 5-15shutdown 5-3startup 5-2

protective clothing required messages explained 2-3proximity sensor

calibration 8-22calibration procedure 8-22

PSI 11-5, 11-6PTFE 11-5pump

isolation and removal procedure 8-34pump 1

operation check 8-16pumps 1-5pycnometer 11-5



Rrecipe 11-5

setup 5-11regulator 8-8

pressure reducing 8-8relief valve

adjustment 8-30removing all power 2-7repeatability 11-5replacement

electrical components 8-5resetting an EMO button 2-7RIO 11-5RV 11-5

Ssafety

caution messages explained 2-2chemical exposures 2-4chemical handling 2-4chemical hazard messages explained 2-3chemical spills 2-4danger messages explained 2-2danger, warning, caution & notice messages 2-2electrical

type 1 hazard defined 2-5type 2 hazard defined 2-5type 3 hazard defined 2-5type 4 hazard defined 2-5work guidelines 2-5

electrical hazard messages explained 2-3general 2-4heavy object hazard messages explained 2-3interlocks 2-13key failure points 2-10material safety data sheets 2-9mechanical hazard messages explained 2-3messages 2-2MSDS 2-9notice messages explained 2-2protective clothing required messages explained 2-3required safety precautions 2-4safety hazards explained 2-2spill mitigation 2-12warning messages 2-2warning messages explained 2-2working with electrical equipment 2-4

safety informationlockout/tagout 2-8safety components 2-15

safety interlocks 2-13sample screen 6-2, 6-3, 6-4, 6-5, 6-6, 6-8, 6-10, 6-12, 6-14, 6-15,

6-17, 6-19, 6-20, 6-21, 6-22, 6-23, 6-24, 6-26, 6-28

Scale 8-19scale

tankverification procedure 8-19

scfm 11-5Schematics 9-1screens

alarm banner 6-2, 6-3, 6-4, 6-5, 6-6, 6-8, 6-10, 6-12, 6-14, 6-15, 6-17, 6-19, 6-20, 6-21, 6-22, 6-23, 6-24, 6-26, 6-28

alarm summary 6-2, 6-3, 6-4, 6-5, 6-6, 6-8, 6-10, 6-12, 6-14, 6-15, 6-17, 6-19, 6-20, 6-21, 6-22, 6-23, 6-24, 6-26, 6-28

sample 6-2, 6-3, 6-4, 6-5, 6-6, 6-8, 6-10, 6-12, 6-14, 6-15, 6-17, 6-19, 6-20, 6-21, 6-22, 6-23, 6-24, 6-26, 6-28

Secondary 11-5semiannual preventive maintenance

procedures 8-36sensor

proximitycalibration 8-22calibration procedure 8-22

setpoint 11-5setting up a recipe 5-11SF 11-6SG 11-6SGU 11-6shut down system 5-3shutdown procedure 5-3SLC 11-6slurry 11-6SMS 11-6specific gravity 11-6spill mitigation 2-12SQL 11-6SS 11-6stabilized filtration 11-6Standby 11-6start manual mode 5-17starting the system 5-2startup procedure 5-2system

setpoints 5-7system overview 1-4

facility requirements 3-2system setpoints 5-7

Ttank scale

verification procedure 8-19tanks 1-5tare 11-6TIP 11-6tool 11-6trending 11-6



troubleshootinggas line 8-29

turn off alarm 5-14turn system off 5-3turn system on 5-2

UUPW 11-6

Vvalves 8-26

automatic 8-26ball 8-26check 8-26electrical solenoid 8-26flow indicator 8-26manual 8-26pressure relief 8-28relief

adjustment 8-30valves diverter 8-26viscosity 11-6VMB 11-6

Wwarning

manual mode 2-14warning messages

explained 2-2work order form 8-41

mega sb100 model 100 slurry blending system...

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