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MEMS and NEMS
By: Daniel Self, Daniel Thorne and Vanessa Perez
MEMS and NEMS
By: Daniel Self, Daniel Thorne and Vanessa Perez
Group # 4
MEMS
❖ Microelectromechanical systems (MEMS) is the integration of microelectronic circuits on single chip which allows the microsystems to sense and control certain parameters [1].
❖ The components of MEMS are microsensors, microactuator, microelectronics and microstructures [2].➢ Microsensors and microactuators are the most remarkable components of MEMS and
are consider transducers.
❖ MEMS is a technology expected to keep improving and also increase the use of nanotechnology as well as nanotechnology will increase the performance of MEMS [3].
MEMS
Microelectromechanical systems (MEMS) is the integration of microelectronic circuits on single chip which allows the microsystems to sense and control certain parameters [1].The components of MEMS are microsensors, microactuator, microelectronics and microstructures [2].
Microsensors and microactuators are the most remarkable components of MEMS and
MEMS is a technology expected to keep improving and also increase the use of nanotechnology as well as nanotechnology will increase the performance
NEMS
❖ Nanoelectromechanical system (NEMS) integrate nanoscale mechanical and electrical components into a single chip[4].
❖ In the nano scale, is possible to obtain high frequencies while conserving the mechanical responsivity [5].➢ NEMS can enhance the capability of certain devices that required sensitive
measurements [4].
➢ Researchers have developed NEMS sensors using nanocantilevers, and NEMS resonator.
NEMS
Nanoelectromechanical system (NEMS) integrate nanoscale mechanical and electrical components into a single chip[4].
In the nano scale, is possible to obtain high frequencies while conserving
NEMS can enhance the capability of certain devices that required sensitive
Researchers have developed NEMS sensors using nanocantilevers, and NEMS
Application-Specific Integrated Circuit (ASIC)
❖ Temperatures that the following based semiconductors can withstand [6]:➢ Silicon up to 125 °C.
■ device that operates in oil wells can withstand 200°C
➢ GaAs up to 350 °C➢ SiC up to 650 °C.➢ Diamond up to 1000 °C.
Specific Integrated Circuit (ASIC)
device that operates in oil C.
Application-Specific Integrated Circuit (ASIC)❖ Low Noise Design
➢ determines the accuracy weak signal been process without distortion [6].
➢ Research■ development of low noise
amplifiers for CMOS technologies.
Specific Integrated Circuit (ASIC)
determines the accuracy weak
development of low noise
❖ Low Power Design➢ Its goal is to decrease power
dissipation [6]➢ The CMOS processes pushes
the analog circuits to operate less than 3.3 V.
➢ Research■ towards developing new
methodologies and analog building blocks to operate at low voltage.
Research on MEMS and NEMS❖ Micro-mirrors [7]
➢ Scanning micro-mirror
➢ 3-D micro-mirror for biomedical applications
❖ Sensors
➢ Accelerometer and interface ASIC
➢ Microphone
➢ CMOS integrated pressure sensor
❖ Switches
➢ Magnetic switches
➢ RF switches (capacitive/ metal-contact)
Research on MEMS and NEMS
Research on MEMS and NEMS❖ Resonators and filters
➢ Vacuum packaged resonator➢ Piezoelectric resonator and
filter
❖ Energy Harvester➢ Thermoelectric energy harvester
❖ CMUT Transducers
❖ Micro-Fluidics➢ Inkjet print-head➢ Micro PCR, DNA/RNA
extractors
Research on MEMS and NEMS
Thermoelectric energy harvester
Getting an Idea of Size and Scale
• The components used to compose MEMS are usually between 1 and 100 micrometer.
• The total size of the MEMS is often between 20 micrometers up to about 1 mm.
Getting an Idea of Size and Scale
The components used to compose MEMS are usually between 1 and 100
The total size of the MEMS is often between 20 micrometers up to about 1
Construction of MEMS
➢Silicon is the most common material used in integrated circuits.
➢Although, other materials can be used such as polymers, ceramics, or metals.
➢The fundamental steps of the creation process include: Deposition, patterning, and etching.
Construction of MEMS
Silicon is the most common material used in integrated circuits.
Although, other materials can be used such as polymers, ceramics, or metals.
The fundamental steps of the creation process include: Deposition,
NEMS Comparing with MEMS
• Developing a MEMS device has previously been seen as two separate systems. Where one system controls the computations and the other responds accordingly.
• It is apparent that as technology increases, the size of electronics usually decreases.
• NEMS introduce a way of integrating the two systems of MEMS into a single silicon chip.
NEMS Comparing with MEMS
Developing a MEMS device has previously been seen as two separate systems. Where one system controls the computations and the other responds
It is apparent that as technology increases, the size of electronics usually
NEMS introduce a way of integrating the two systems of MEMS into a single
NEMS
A major focus of nanotechnology involves passing electrons through nano semiconductors in order to emit light.
With Baolab’s fabrication of NEMS, we will see multiple sensors incorporated within a single chip.
NEMS
A major focus of nanotechnology involves passing electrons through nano semiconductors in order to emit light.
With Baolab’s fabrication of NEMS, we will see multiple sensors incorporated
Figure 1: Traditional CMOS procedures [1]. Figure 2: Baolab’s concept using traditional CMOS process [1].Figure 2: Baolab’s concept using traditional CMOS process [1].
Advantages and Disadvantages
▪ They are small so they can fit just about anywhere in a relative perspective.
▪ Electrostatic effects can easily damage as compared to a component with a larger surface area.
▪ Less material to produce a product usually means a lower cost, however this depends on the material and the means of production.
▪ Less consumed energy.
Overall it seems that there are more advantages of MEMS and NEMS than disadvantages so an increase in practical application can be observed.
Advantages and Disadvantages
They are small so they can fit just about anywhere in a relative perspective.
Electrostatic effects can easily damage as compared to a component with a larger
Less material to produce a product usually means a lower cost, however this depends on the material and the means of production.
Overall it seems that there are more advantages of MEMS and NEMS than disadvantages so an increase in practical application can be observed.
Applications of MEMS and NEMS
MEMs andNEMs devices are everywhere.
There are 15 to 20 MEMs devices for every person in North America
inkjet-printer cartridges accelerometersminiature robotsmicroengineslocksinertial sensorsmicrotransmissionsmicromirrorsmicro actuatorsgyroscopes
Applications of MEMS and NEMS
MEMs andNEMs devices are everywhere.
There are 15 to 20 MEMs devices for every person in North Americaoptical scannersfluid pumpstransducerschemical sensorspressure sensorsflow sensorsdisk drivesserverscomponentsmicrophones
Applications of MEMS and NEMS
●
●
Applications of MEMS and NEMS
MEMs and NEMs have enabled the advent of many new devices Many of these can be found in the medical field.
● Scalpels with embedded IC’s can measure pressure and cutting depth
● Device have been manufactured to be implanted into patients to release the exact dosages of medicine at the correct time
Applications of MEMS and NEMS
Applications of MEMS and NEMS
MEMS are enabling systems to restore sight for the blind. This article focuses on the increasing use of MEMS for treating diseases and injuries of the central nervous system (brain and spine), including paralysis, Parkinson’s disease, and drug-resistant depression.
Applications of MEMS and NEMS
Applications of MEMS and NEMS
Endoscope probe that uses a MEMS scanning mirror to scan a laser beam and capture an image. Combined with Santec’s OCT technology this device is being applied to gastrointestinal and urological imaging as an alternative to biopsies in the detection of cancer and other diseases
Applications of MEMS and NEMS
While MEMS and NEMS technology can be found in new devices, most applications of these technologies existed before their advent. These technologies make the products superior to their antiquated counterparts. They become more reliable, faster, and come at a lower cost.
Like BASF they don’t make the products you buy, they make the products you buy better.
Applications of MEMS and NEMS
While MEMS and NEMS technology can be found in new devices, most applications of these technologies existed before their advent. These technologies make the products superior to their antiquated counterparts. They become more reliable, faster, and come at a lower cost.
Like BASF they don’t make the products you buy, they make the products you buy better.
Applications of MEMS and NEMS
Air Bag Control
● Airbags used to be controlled with relay logic
● Modern airbags are deployed with MEMs and NEMs accelerometers connected to a microprocessor.
Applications of MEMS and NEMS
Air Bag Control
Airbags used to be controlled with relay logic
Modern airbags are deployed with MEMs and NEMs accelerometers connected to a microprocessor.
Applications of MEMS and NEMS
ProjectorsModern digital projectors micromirrors to project images. Each mirror
reflects one pixel on the screen. This technology is now being used to project high-definition movies at movie theaters (DLP).
Applications of MEMS and NEMS
ProjectorsModern digital projectors micromirrors to project images. Each mirror
reflects one pixel on the screen. This technology is now being used to definition movies at movie theaters (DLP).
Video
Applications of MEMS
http://www.youtube.com/watch?v=ZuE4oVrtEQY
Video
http://www.youtube.com/watch?v=ZuE4oVrtEQY
References
[1]http://www.smalltechconsulting.com/What_is_MEMS.shtml
[2]http://www.memsnet.org/mems/what_is.html
[3]http://www.mems.metu.edu.tr/index.php?option=com_content&view=article&id=154%3Awhatmems&catid=55%3Aabout-memsmemsfacility&lang=en
[4]http://www.dummies.com/how-to/content/nanotechnology
[5]http://arxiv.org/pdf/cond-mat/0008187.pdf
[6]http://www.sintef.no/Informasjons--og-kommunikasjonsteknologiIKT/Kommunikasjonssystemer/Forskningsomrader/ASIC
[7]http://www.ime.a-star.edu.sg/research_page/micro_electro_mechanical_systems__mems_research
References
http://www.smalltechconsulting.com/What_is_MEMS.shtml
http://www.memsnet.org/mems/what_is.html
http://www.mems.metu.edu.tr/index.php?option=com_content&view=article&id=154%3Awhatmemsmemsmemsfacility&lang=en
to/content/nanotechnology-integrates-mechanical-and-electrica.html
kommunikasjonsteknologi-IKT/Kommunikasjonssystemer/Forskningsomrader/ASIC-Kretsdesign/Low-Noise-Design/
star.edu.sg/research_page/micro_electro_mechanical_systems__mems_research
References[8]. Silvestre, Josep M., and Dave Doyle, CEO. "MEMS Now inside the CMOS Wafer."
Microsystems. BAOLAB MICROSYSTEMS, S.L., Mar. 2010. Web. 04 Nov. 2013. http://www.baolab.com/technology.htm.
[9]Micromachine Devices, European Study Sees MEMS Market at More Than $34 billion by 02, May 1997.
[10]James H. Smith and Steven T. Walsh, Selecting a process paradigm for an emergent disruptive technology: Evidence from the emerging microsystems technology base, 1997.
[11]http://www.sandia.gov/mems/micromachine/overview.html. Sandia National Laboratories, Albuquerque, New Mexico 87185.
[12] http://en.wikipedia.org/wiki/Microelectromechanical_systems
[13] http://nanogloss.com/mems/mems-devices/#axzz2jhYsYKWQ
[14 http://www.csa.com/discoveryguides/mems/gloss.php#acc
[15]http://www.ti.com/lsds/ti/analog/dlp/how-dlp-works.page
References8]. Silvestre, Josep M., and Dave Doyle, CEO. "MEMS Now inside the CMOS Wafer."Baolab
. BAOLAB MICROSYSTEMS, S.L., Mar. 2010. Web. 04 Nov. 2013.
[9]Micromachine Devices, European Study Sees MEMS Market at More Than $34 billion by 02, May
[10]James H. Smith and Steven T. Walsh, Selecting a process paradigm for an emergent disruptive technology: Evidence from the emerging microsystems technology base, 1997.
[11]http://www.sandia.gov/mems/micromachine/overview.html. Sandia National Laboratories,
http://en.wikipedia.org/wiki/Microelectromechanical_systems
devices/#axzz2jhYsYKWQ
http://www.csa.com/discoveryguides/mems/gloss.php#acc
works.page