mems based optical microphone
DESCRIPTION
MEMS based Optical microphoneTRANSCRIPT
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WELCOME…WELCOME… A SEMINAR ON
OPTICAL MICROPHONE
PRESENTED BY:
JITHIN PRASAD S6, ELX
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OUT LINE…OUT LINE…
Introduction Optical microphone Microphone structure Fabrication Future work Implementation Advantages Conclusion
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INTRODUCTIONINTRODUCTION
Optical microphones posses innate resistance to electro magnetic interference & harsh environments.
MEMS technology provides a promising implementation for optical microphones.
Here, we discuss the design & characteristics of an intensity modulated optical level microphone.
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OPTICAL MICROPHONE OPTICAL MICROPHONE TRANSDUSER SCHEMESTRANSDUSER SCHEMES
Introduced by Nykolai Bilaniuk in 1996
3 properties of light could be modulated. They are
Intensity
Polarization
Phase
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Optical Microphone ClassificationBased on Transduction Mechanism
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INTENSITY MODULATIONINTENSITY MODULATION
Intensity modulating optical microphone can be sub- divided into
a) Radiated wave intensity modulating microphone
b) Evanescent wave intensity modulating microphone
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Radiated Wave Intensity-modulating Microphone Types.
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Evanescent Wave Intensity-modulating Evanescent Wave Intensity-modulating Microphone Types.Microphone Types.
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POLARIZATION MODULATIONPOLARIZATION MODULATION
Polarization modulation type devices alter the polarization of the light when in the presence of an acoustic field.
TWO SUBCATEGORIES.
a layer of liquid crystals is subjected to acoustic field induced shear stresses, which modulate the polarization of the light passing through.
“a moveable dielectric plate interacts with the evanescent field of a waveguide excited with both TE and TM modes,
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Polarization Modulating Microphone Types.Polarization Modulating Microphone Types.
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PHASE MODULATIONPHASE MODULATION
A mechanism that changes either the physical length or the refractive index of an optical test path and recombining the result with the signal from a reference path.
The two defined subgroups Grating type devices Interferometric devices.
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Grating-Type Phase Modulating Microphone Grating-Type Phase Modulating Microphone Types.Types.
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Interferometric Phase Modulating Microphone Types
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MICROPHONE STRUCTUREMICROPHONE STRUCTURE
The intensity-modulated optical microphone can be divided into four major physical parts.
MEMS chipOptical fibersLight sourceDetection electronics
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Block Diagram of the Optical Microphone
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MEMS ChipMEMS Chip 2.5mm X 2.5 mm silicon chip with a micro
machined 1 mm diameter silicon nitride diaphragm
Cross Section of the MEMS Chip.
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Fiber Bundle in the MEMS Chip - Cross Section Fiber Bundle in the MEMS Chip - Cross Section
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Optical FibersOptical Fibers
The optical fibers selected for the optical microphone are the Thorlabs
AFS105/125Y multimode optical fibers.
Used for both transmit (Tx) and receive (Rx) fibers
The cores of each fiber are color-coded, and surrounded by a white ring representing the cladding.
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End View of the Optical Fiber BundleEnd View of the Optical Fiber Bundle
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Optical Fibers in Steel TubingOptical Fibers in Steel Tubing
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Optical Fiber Bundle Drawing.Optical Fiber Bundle Drawing.
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Light sourceLight source The light source used by this optical
microphone is the HP8168B Tunable Laser Source.
The maximum output power of the laser at 1550 nm is 0.515 mW.
An alternate laser source or an LED source could be used in place of the HP8168B.
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Detection ElectronicsDetection Electronics
There are three schemes for use as detection electronics.
unreferenced output technique.the referenced output technique.Heterodyne modulation
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FABRICATION OF THE OPTICAL FABRICATION OF THE OPTICAL MICROPHONEMICROPHONE
The fabrication of the optical microphone consists of two parts:
The MEMS optical diaphragm chip
Fabricated by MEMS Exchange
The fiber bundle.
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MEMS Exchange ProcessMEMS Exchange Process
Wafers Used for Optical Microphone Fabrication
Both mask and wafers were purchased through the MEMS Exchange
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Packaging ProcessPackaging Process
Abeysinghe et al. Packaging Technique.
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Beggans et al. Packaging Technique.
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Kadirval Packaging Technique.Kadirval Packaging Technique.
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Proposed PackageProposed Package for the Optical Microphone. for the Optical Microphone.
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Proposed Optical Microphone Array Package.
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FUTURE WORKFUTURE WORK Future generation version of the optical microphone
could be implemented with a single, large-core, high-NA fiber (instead of a fiber bundle) using an LED as a light source to improve stability and frequency response.
A laser can provide 1000 times more power than an LED source when used as a light source in an intensity-modulated lever microphone.
Since the performance of a MEMS device is application specific, multiple packages and an array packaging technique should be developed to take advantage of the small size of the MEMS device.
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IMPLIMENTATION
Microphone Components
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PHONE-OR Fibre Optical Microphone
IMPLIMENTATION
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ADVANTAGESADVANTAGES Pressure Gradient Accuracy EMI/RF Immunity Bandwidth (typically from 1Hz to 10kHz) Dynamic Range (at least 85dB.) Signal to Noise Ratio (SNR) in the order of 70dB. Total Harmonic Distortion (THD) is less than 1%
at 94dBre20μPa over the entire frequency bandwidth.
Sensitivity of the FOM is 100mV/Pa for the pressure microphones and 1.94 mV/(Pa/m) for the pressure gradient microphones.
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CONCLUSIONCONCLUSION
MEMS-based intensity-modulated optical microphone is an excellent choice for applications with harsh environmental or size constraints.
Optical MEMS microphones are currently marketed as a surveillance technology, as an EMI and RFI immune technology, and as a suitable technology for use in automobile voice recognition systems
It is also possible to design the optical microphone with a significantly higher sensitivity and lower MDS by sacrificing frequency response and reducing the upper limit of the microphone’s dynamic range.
more sensitive, fiber geometries are required to make an intensity modulated optical microphone suitable for aero-acoustic measurements.
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References References S. D. Senturia, Microsystems Design. New York: Kluwer
Academic, 2001. N. Bilaniuk, "Optical Microphone Transduction Techniques,"
Applied Acoustics, vol. 50, pp. 35-63, 1997. V. P. Klimashin, “Optical Microphone,” Pribory i Tekhnika
Eksperimenta, no. 3, pp. 135-137, May 1979.
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THANKS….THANKS….