mems developments€¦ · merged with xio photonics & satrax in 2016 spin-out phix photonics...
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MEMS Developments
at
LioniX International BV
Henk LeeuwisVice-President, Strategy and Innovation
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Our Mission
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LioniX International is a leading global provider of customized microsystem solutions, in particular integrated photonics-based, in scalable production volumes
Why
Applying disruptive technologies
to solve major societal challenges
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Microsystems @ LioniX
12-06-2019
2001 2008 2016 20182002 2009
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Who
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Located in the Netherlands (Europe)
Established in 2001 (LioniX)
Merged with XiO Photonics & SatraX in 2016
Spin-out PHIX Photonics Assembly in 2018
>50 employees, >50% PhD
Development and production for applications ino Integrated photonics based light/signal/data processing:
5G and (RF) satellite systems, visible light engines, spectrometry
o Lab-on-a-Chip and (bio)chemical sensor systems
Customized MEMS/microsystem services
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LioniX & Nanolab
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MESA+ nanolab, University of Twente
1250 m2 labspace and 200+ pc of equipment
Facility sharing, pay per use
Close collaboration with industryo Nanolab depends on income from industrial partners
o LioniX participates as a main stakeholder
LioniX International is the largest external user
Processing by trained LioniX personnel
Dedicated equipment foro Ultra Clean Processing CMOS
o Metal Free Processing High-T (700 – 1150 C)
o In Line Processing Metals, glasses, polymers
Suitable for low and medium volumes
We use a network of suppliers for services we don’t have in houseo Stepper Lithography
o Backgrinding
o Implantation
o Thick SiO2
o And more
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Customized MEMS Solutions
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Systems based on Photonic Integrated Circuits
Technology: Proprietary Integrated Photonics platform TriPleXTM
Competences: Functional Design, PIC (module) manufacturing, Assembly & Packaging, System control
Applications: Telecom, Datacom, Life Sciences and Metrology markets
Customized MEMS
Competences: MEMS Process development and small to medium volume manufacturing
Applications: Sensors, Instrumentation and Life Sciences
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Business model Independent - contract development & production - no COTS products
Core Competences Small to medium volume production based on standard processesCustomization of production process to fully meet customer specifications
Services Sensors, micro/optofluidics, bioMEMS, inertial MEMS, MOEMS, micromachining
Customer Types SME’s, Start-ups, Multinationals - customer owns design IP - from all over the world
Applications Sensors, Instrumentation and Life sciences,
Technology World class facilities (Nanolab, Enschede, NL)100 mm Si, SOI, Fused Silica and Glass substratesPlatforms: DRIE, WLP, SOI, ISFETs, Triplex
Projects Sustained relationship achieved by bridging the gap and open communicationProcess development > Engineering run > Production run
Knowledge More than 30 years experience - 50 highly educated employees
Vertical Integration Assembly & Packaging, PIC system design & manufacturing, µFluidic systems, Volume production
MEMS Value Proposition
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MEMS (literally) = Micro Electromechanical Systems
MEMS is also short for anything one can make with Micro(system) technology:
Not all MEMS have an M or E
MEMS can also have O, F, C, …
Examples
Sensors
Microfluidics
BioMEMS
Optofluidics
Inertial MEMS
Nozzles
MOEMS
Micromachining
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MEMS at LioniX International
9Our chips drive your business
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Examples
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ESA: Life Marker Chip
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Application
The LMC (Life Marker Chip) is part of ESA’s Exomars Mission who’s aim is to find traces of past or present life in a Martian subsurface soil sample. The instrument is developed by a consortium led by the University of Leicester (UK) and capable of detecting a wide variety of different biomarkers based on the use of immunoassay techniques in a micro-arrays format.
Request
The LMC Consortium needs a microfluidic chip comprising various reaction chambers, fluid channels, in- and outlets, conductivity sensors and a configurable rotary valve, as well as an Photonic Integrated Circuit for fluorescence excitation.
Solution
For the glass chip we developed a solution based on a borosilicate glass wafer, powder blasting, HF etching, metal evaporation and integration of a hybrid rotary valve. For the PIC chip we developed a solution based on TripleX waveguide technology.
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OptofluidicsIntegrated rotary valve for liquid management
Integration of micro & macrofluidics
Enabling complex valving in very compact module
Extremely small dead volumes
Microfluidic glass chip with inputs, outputs and connecting channels
Polymer rotary slider with micromachined trenches
Stepper motor for control
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Bronkhorst: IQ+ flow sensor
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Application
Anemometric gas flow sensor for applications in Microfluidics, Microchemistry, Analytics (GC, FID), Life Sciences (IQ+ flow).
Request
The customer needs type-T thermopiles on a membrane with low heat conductivity to sense the temperature profile generated by an integrated heater in a gas flow.
Solution
We developed and are producing a solution based on sputtering and etching of Cu/CuNi, wet etching, anodic bonding and etchback of a Borosilicate glass wafer.
Testing
- Waferscale quality test!- Equipment at University of Twente – MESA Test Center
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Wafer scale electrical testing
MTC (Mesa Test Center)
Semi Automatic Probe Station
Parameter analyser
3 hours per wafer - 600 chips
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Onset: Conductivity Sensor
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.
Application
HOBO Conductivity Loggers are convenient, rugged, and cost-effective data loggers for a variety of freshwater and saltwater monitoring applications.
Request
Our customer needs a non-contact, chemically inert, robust conductivity sensor with a range of almost 3 decades.
Solution
We developed and are producing a solution based on platinum deposition and tantalumpentoxide capping on borosilicate glass substrates.
Testing
- visual
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Various Customers: ISFET pH sensor
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Application
The Ion Sensitive Field Effect Transistor (ISFET) is a solid state, potentiometric sensor capable of measuring pH in the range from pH 1 to pH 14 with a linear response.
Request
Various customers need customized ISFETs with high sensitivity, low drift and low light sensitivity.
Solution
We developed a solution based on ion implantation, gate oxidation, diffusion, and a tantalumoxide (Ta2O5) gate material.
Testing
- Visual
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ThermoFisher: TEM specimen holder
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Application
The FEI NanoEx-i/v is a specimen heating and biasing holder for in situ S/TEM imaging and elemental analysis at elevated temperatures.
Request
The customer needs micron sized, 20 nanometer thin membranes which can be heated uniformly to temperatures up to 1200 C.
Solution
We developed and are producing a solution based on LPCVD silicon nitride membranes and High Temperature Heaters capped also by LPCVD silicon nitride.
Testing
- Waferscale quality test!
- Equipment at University of Twente – MESA Test Center
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Smarttip: CIPT Probe
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Application
Current In Plane Tunneling (CIPT) is a very fast and cost effective method to characterize Magnetic Tunnel Junctions (MTJ’s).
Request
Our customer needs a probehead with multiple conducting probepins with submicron spaces between the probes and isolated from each other.
Solution
We developed and are producing a solution based on Thermal Oxidation, Stepper Lithography, RIE Etching, Au evaporation and advanced KOH Etching.
Testing
- Visual
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Photonic Integrated Circuits
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Systems based on Photonic Integrated Circuits
Technology: Proprietary Integrated Photonics platform TriPleXTM
Competences: Functional Design, PIC (module) manufacturing, Assembly & Packaging, System control
Applications: Telecom, Datacom, Life Sciences and Metrology markets
Customized MEMS
Competences: MEMS Process development and small to medium volume manufacturing
Applications: Sensors, Instrumentation and Life Sciences
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TriPleXTM: some geometries...
Extremely low optical attenuation (world record)
Small bend radii (small footprint!)
Adjustable polarization properties (sensors telecom)
Design by geometry
Silicon and glass compatible
Spot size converters
Basic testing on optical and electrical (tuning) parameters (one-by-one)
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MEMS fabrication technologies for electro-optic actuation enable low
power phase shifting
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PZT stress-optic modulator
Alternative for thermo-optical modulator (heater)
Stress induced refractive index change
Low power consumption at quasi DC operation
Charging the capacitor(µW at static voltage)
Collaboration with Solmates
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PZT (Lead Zirconate Titanate, Pb(Zr,Ti)O3)
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Realization of PZT layer structure
Devices show a good match between design and realization
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Si3N4 TriPleX waveguide
SiO2
Pt-bottom
Pt-top
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Stress simulation for PZT
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J.P. Epping, D. Marchenko, A. Leinse, R. Mateman, M. Hoekman, L. Wevers, E.J. Klein, C.G.H. Roeloffzen, M. Dekkers, R.G. Heideman: Ultra-low-power stress-based phase actuator for microwave photonics: CLEO Europe 2017 Munich
Use > 3 micron top cladding to stay < 0.01dB/cm excess loss
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Characterization
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Mach-Zehnder Interferometer
)]cos[1(2
inout
PP
V V
2 µm PZT, L=15 mm
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Conclusions
12-06-2019 Our chips drive your business
Allround microsystems development and productionprovider in MEMS
Prototypes, small and medium sized volumes
Internal test facilities for Photonic Integrated Circuits
Close collaboration with PHIX for (photonic) module supply
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Q&A
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