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MEMS Growing MainstreamMEMS Growing Mainstreammirasol Display Technology Inspired by Nature

Evgeni Gusev

October 18, 2011 www.mirasoldisplays.com

Sr. Director, Technology DevelopmentQualcomm MEMS Technologies, [email protected]

S f H b / I t t N tiSafe Harbor / Important Notices• Nothing in these materials is an offer to sell any of the non-display components or devices referenced herein. Certain non-display components for use in the U.S. are available onlyreferenced herein. Certain non display components for use in the U.S. are available only through licensed suppliers. Some non-display components are not available for use in the U.S.• Before we proceed with our presentation, we would like to point out that the following discussion will contain forward-looking statements from industry consultants, QUALCOMM,

d th di i d t t d ti i t d f t lt t ti l k t iand others regarding industry trends, anticipated future results, potential market size, market shares, and other factors which inherently involve risks and uncertainties, including the rate of development, deployment and commercial acceptance of CDMA-based networks and technology and fluctuations in the demand for CDMA-based products, services or applications.pp• These and other risks and uncertainties relating to QUALCOMM’s business are outlined in detail in our most recent 10-Q and 10-K forms filed with the Securities and Exchange Commission. • Please consult those documents for a more complete understanding of these risks and

t i tiuncertainties.• This presentation may includes a discussion of "non-GAAP financial measures" as that term is defined in Regulation G. The most directly comparable GAAP financial measures and information reconciling these non-GAAP financial measures to the company's financial results prepared in accordance with GAAP have been included at the end of this


results prepared in accordance with GAAP have been included at the end of this presentation.

Agenda• mirasol® display value & differentiation: Why

another display technology ?– Low power– Consistent viewing quality (incl outdoors)Consistent viewing quality (incl. outdoors)– Video capable (due to fast MEMS elements)

• Technology fundamentals– Surface micromachining (MEMS on glass)– Interferometric thin film opticsp

• Display technology development & f t i d k t f


manufacturing, and market focus– It is REAL !

(Selected) MEMS devices and products(Selected) MEMS devices and productsInjet Heads

DLP Projectors IMUs GyroscopesGyroscopes

Wide acceptance and deeper penetration

Microphones

MEMS Display

and deeper penetrationinto consumer markets

MEMS Display

October 18, 2011 www.mirasoldisplays.comMicrofluidic (Bio) AirBag Sensor Wii Motion Sensor Pressure Sensor

AgendaAgenda• mirasol® display value & differentiation: Why

another display technology ?– Low power– Consistent viewing quality (incl. outdoors)– Video capable (due to fast MEMS elements)p ( )

• Technology fundamentals– Surface micromachining (MEMS on glass)

I t f t i thi fil ti– Interferometric thin film optics• Display technology development &

manufacturing, and market focusg,– It is REAL !


fmirasol displays in the tree of electronic displays

Mobile Device Display Technologies

Emissive Non-EmissiveEmissive Non Emissive

OLEDO i Li ht

SRDS i R ti l

EPD LCD IMODmirasol Displa sOrganic Light

Emitting DiodeScanning Retinal

Displays

PLED, LEP Inc.Flexible version

SMOLED Inc.Flexible version

Electrophoretic Liquid Crystal mirasol DisplaysInterferometric Modulation

Active PassiveFlexible version(Polymer based

OLED)

Flexible version (Small Molecular

OLED)

Active Matrix

Passive Matrix

LCOS Poly-Si TFT/LTPS TFT A-Si TFT/LCD STN Dual Scan


LCOSLiquid Crystal on

Silicon

Poly Si TFT/LTPS TFT (Low Temperature Polysilicon

Thin Film Transistor)

Amorphous-Silicon Thin Film

Transistor

STN Dual Scan(Super Twisted

Nematic)

TN(Twisted Nematic)

ChLCDCholesteric LCD

21st Century Hi Tech: It’s all about POWER !21st Century Hi-Tech: It s all about POWER ! Example: Power Consumption for an LCD Display (Motorola Razr)


Courtesy:

C G i P GConvergence = Growing Power Gap


Source: Battery Technology & Power Management Conference, Vancouver, 18 August, 2005. Stuart Robinson, Strategy Analytics, Ltd.

mirasol Displays are the Low Powermirasol Displays are the Low Power OptionHandset model

mirasol Color Display AM‐OLED TFT ‐ LCDColor Display

Panel Power‐ Text/Static Imagery 1 mW 100‐700 mW 20 mW

SupplementalLight Power 55 mW N/A 220 mW

Typical ModulePo er1 1 mW 280 mW* 240 mW

October 18, 2011 www.mirasoldisplays.comSource: QUALCOMM Labs (2010)

Power1

All displays comparisons are for 2.2” QVGA *Content Dependent (40% of pixels on)

Display Power Consumption by Application

mirasol Displays Consume Far Less Power than Competing Display T h l i Lik LCD

Display Power Consumption by Application

Technologies Like LCD

Video PlaybackSMS Web Browsing GPS

Phone with mirasol display

Display & Frontlight

4%10% 6% 4%

Other

Phone with LCD 73% 48% 41%

625 mW

101 mW

276 mW365 mW

29%Phone with LCD

Display & Backlight

Other

% % %

330 mW

%

October 18, 2011 www.mirasoldisplays.comSource: Qualcomm Labs

839 mW

330 mW500 mW

590 mW

Scalability as Usage Evolves

Ereader Energy Consumption by Application Hours of Application Usage by Technology

Books

Textbo

ok

Magazines/

New

spaper

Web

brow

sing

Vide

o

Application

Ereader Energy Consumption by Application Hours of Application Usage by Technology

M N

mirasol 626 328 52.5 21 10

E Ink 222 95 7 2 0.3

ogy

Chol ‐LCD 20 8 0.5 0.1 0

Transf ‐LCD 2 2 2 2 2D

isplay Techn

olo

LCD

Pixel Qi 7.2 7.2 7.2 7.2 7.2


Source: Qualcomm Labs (2010)

Importance of Consistent Viewing QualityImportance of Consistent Viewing QualityImage quality of mirasol displays vs. Transflective TFT as a function of ambient illumination

l l i l Di l TFTmirasol Display mirasol DisplayTFT TFT

( l )

262k JNDs10:1 CR; 30% NTSC

262k JNDs10:1 CR; 23%

262k JNDs10:1 CR; 30% NTSC

2k JNDs2.2:1 CR; 2% NTSC

Dim Room (250 lux) Overcast Outdoor (6,000 lux)

262k JNDs 262k JNDs131k JNDs 32 JNDs


Indoor (500 lux) Sunny Day (40,000 lux)

10:1 CR; 30% NTSC 10:1 CR; 30% NTSC7:1 CR; 16% NTSC 1.9:1 CR, 1% NTSC

262k colors?

mirasol Displays Offer Consistent Viewing Quality in All Environments

mirasol Bichrome RGB mirasol

RGB mirasol™

Current Industry Benchmarking(Example; CR = 1000:1)


S f E di D iSpectrum of E-reading DevicesColor

Expansive Content p(books, magazines, etc.)

Web Experience

Multimedia

R di6700 mAh

Reading Devices$ $$

No color

Reading

Low Power

Visible Outdoors

Intuitive UI

Battery

Web ExperienceVideo/PhotosGaming / Music

$$ ‐ $$$$Power & Visibility $ ‐ $$

Low Power (for Reading)

Visible OutdoorsSmall and Thin

No webNo videoNo gamingNo photos

Intuitive UI

Small Battery

Lightweight & Thin

Gaming / MusicReading

ComputingIntuitive/Familiar UIExpansive Content

yIssues

2X the weight40% thicker


Demographic: Serious Book Readers

Demographic: Multimedia Gurus

Expectation of PrintAND

Multimedia Criteria

Market Size Comparison

Phone: $23B

October 18, 2011 www.mirasoldisplays.comSource: Display Search Quarterly World Wide Flat Panel Display Forecast Report, Q1 2011

AgendaAgenda• mirasol display value & differentiation: Why

another display technology ?another display technology ?– Low power– Consistent viewing quality (incl. outdoors)

Video capable (d e to fast MEMS elements)– Video capable (due to fast MEMS elements)• Technology fundamentals

– Interferometric thin film opticsp– Surface micromachining (MEMS on glass)

• Display technology development & manufacturing and market focusmanufacturing, and market focus– It is REAL !


Bi i i S i I it ti N tBiomimicry: Science Imitating NatureThose who are inspired by a model other than Nature, a mistress above all

masters, are laboring in vain. ‐ Leonardo Da Vinci

• The mirasol display works by reflecting light so light interferes to create color

Th h th t k• The phenomenon that makes a butterfly’s wings shimmer is the same principle mimicked in mirasol displays

Other examples of biomimicry: Low friction ship hulls from shark skin


Velcro® from seeds clingy spurs

Morphing aircraft wings from bird’s wings

Neuromorphic chips from neural networks

The Adj stable Etalon A Core mirasol Displa Concept

Incident light Reflected light

The Adjustable Etalon: A Core mirasol Display Concept

Partial reflector

Vi ibl

Full reflector

Visible

tanc

e • Reflectance peak within visible range.

• Display appears bright

• Reflectance peak outside visible range.

• Display appears dark.

Ref

lect


Wavelength

mirasol® Displays - A MEMS based Reflective p yDisplay

As a mechanical device, the mirror actuates due to an applied voltage, with a response time of 10 - 15 usec(microseconds) – easily supporting video

li tiapplications

Simple Pixel Design using MEMS‐ Light Modulation from applied voltage‐ Color Selection from constructive interference‐ Memory from electro‐mechanical behavior

<1 uM

October 18, 2011 www.mirasoldisplays.com• No color filters • No polarizer • No transistors • No organic material • No backlight

RGB O ti l P fRGB Optical Performance

• Bright State ~ 90%, Dark State ~ 1%

Red IMODGreen IMODl OBlue IMOD

Black State


mirasol Displays Have Inherent Memorymirasol Displays Have Inherent Memory

Hysteresis loop gives IMOD element its memory• Allows an array to be addressed in a line‐at‐a‐time fashion• Image is maintained once the array is addressed • Response time suitable for video

“light” state clear

eflectan

ce

“light” state hold

Re

V


0 8Applied voltage

VHOLD

“dark” state hold “dark” state write

MEMS Electromechanical Bistability: CVMEMS Electromechanical Bistability: CV Measurements

1x10-7 Entire P1 Panel

8x10-8

6x10-8

tanc

e (F

)

8

4x10-8

Cap

acit

10 8 6 4 2 0 2 4 6 8 100

2x10-8


-10 -8 -6 -4 -2 0 2 4 6 8 10Applied Bias (V)

Simple electromechanical modelCompetition between electrostatic force and elastic restoring

fforceThe mechanical spring restoring force

must be balanced by the electrostatic forcek (H y) E Q k Q2k (H – y) = E Q = ke Q2

The capacitance varies as the element movesC = kc / y = Q / V

With the result that:

F = k (H – y)+Q

With the result that:Q = V kc / y

Substitution yieldsk H – k y = k V2 k 2 / y2

HV Ey

k H k y ke V kc / yk H y2 – k y3 = k4 V2

(2 k H y – 3 k y2) dy = 2 k4 V dVdy / dV = 2 k4 V / (2 k H y – 3 k y2)

‐Q


dy / dV 2 k4 V / (2 k H y 3 k y )There’s a singularity at y = (2/3) H

Hysterisis: linear elastic force vs. non-linear l t t tielectrostatic

electrostatic

elastic


Capacitive MEMS StructureBack‐End related effects Top Electrode

Surface Effects

Bulk and interface effects


Substrate: Si or Me

MEMS: Bulk and Surface MicromachiningMEMS: Bulk and Surface Micromachining

• silicon is a dominant substrate/mech structure

• can be fabricated on any planar substratestructure

• based mainly on (deep) dry or wet etching

• “sculptor’s” approach structure is

• based mainly on thin film depositions

• fabrication approach similar to solid state

devices (except for sac layer removal)


• sculptor s approach – structure is trimmed from a bulk (silicon) piece

Color ArchitectureColor Architecture

Flex

Bichrome Architecture

Flex Layer

MirrorColor Architecture Sacrificial Layers

Etched Away


(Simplified) Schematic of IMOD Process Flow(Simplified) Schematic of IMOD Process Flow

SacrificialMaterial

AbsorberConductor

Insulator

Deposit thin film stackAb b

Pattern Stack Form Posts

Substrate

Mechanical Film

• Absorber • Insulator • Sacrificial Material

Support Post

Airgap

Remove sacrificial material Deposit Mechanical LayerPattern Mechanical Layer


Schematic cross section of IMOD elementSchematic cross-section of IMOD element

Change in spectral response between up/down statesChange in spectral response between up/down states appears to viewer as bright or dark states

Thin films:Thin-films:optical stack and metal interconnect

The IMOD structure is an optical switch, but the operating principle is similar for all capacitive MEMS


principle is similar for all capacitive MEMS

materials and interfaces dominate behavior

Backend Encapsulation Scheme• Encapsulation

Leveraging existing encapsulation technology

Backend Encapsulation Scheme

– Leveraging existing encapsulation technology– optimized assembly techniques on large area glass substrates

IMOD array

• Key Differences with LCD • No LC process steps


No LC process steps • No color filter process steps • No cell gap requirements

Support Post

Bichrome Products


AgendaAgenda• Introduction to MEMS

– Micro-Electro-Mechanical Systems (aka Micro Systems T h l i )Technologies)

• mirasol display value & differentiation: Why another display technology ?p y gy– Low power– Consistent viewing quality (incl. outdoors)

Video capable (due to fast MEMS elements)– Video capable (due to fast MEMS elements)• Technology fundamentals

– Surface micromachining (MEMS on glass)– Interferometric thin film optics

• Display technology development & manufacturing and market focus


manufacturing, and market focus– It is REAL !

Qualcomm MEMS Technologies IncQualcomm MEMS Technologies, Inc. Locations

QMT North San Jose, CA, USA

MEMS Research & Innovation Center‐ Process Development

QMT Taiwan Operations‐Hsinchu, ROC

QMT Taiwan FAB B‐Taoyoun, ROC

Process Development

QMT SouthQMT SouthSan Diego, CA USA

Division Headquarters ‐ Business Functions ‐ Product Engineering


5.7” XGA mirasol Color Display


To view the demo online, visit www.mirasoldisplays.com/mwc

Qualcomm Dedicated mirasol Display Fabrication Facility

Displays Manufactured at Generation 4 5 FabDisplays Manufactured at Generation 4.5 Fab

Opening Ceremony – June 2009

Longtan Science Park, T T i


Taoyuan, Taiwan

Economics of Large Area GlassEconomics of Large Area Glass

300mm Source: Corning


Early QMT Market Focus & y QCommercialization

• Mobile DevicesMobile Devices– Best match with mirasol® advantages of ultra-

low power, and greatest viewability under all lighting conditionsFl ibilit i t il i “l k & f l” f h– Flexibility in tailoring “look & feel” for each product (Bi-chrome color, metallic to diffuse)

• Applications– Cell phone displays– Portable Bluetooth accessories– Handheld/wrist-worn GPS devices

E d /T bl t– E-readers/Tablets– Industrial applications

• Initial application in low to mid-volume


• Initial application in low to mid-volume designs

Summary• Display challenge is to provide an enhanced user experience for p y g p p

multimedia at low power and under various ambient illumination. mirasol reflective MEMS display offers all of it.

• Convergence is happening toe‐readers – just like mobile phones

• Qualcomm has developed R&D and manufacturing infrastructure to drive technology development anddrive technology development and display module production based on MEMS surface micromachining on large area glass


large‐area glass

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