© 2013

75 Cours Emile Zola,

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MEMS Market Overview:

Steady Growth for MEMS

in 2013 and Beyond Pascal Viaud, CSO

Taipei, September 2013

© 2013• 2

Outline

• Introduction – Yole Développement

• Update on the Global MEMS Market

• MEMS for Mobile

• Examples of New Successful Applications

• Diversity of Technologies

• Conclusion

© 2013• 3

INTRODUCTION

© 2013• 4

Fields of Research Activity

Founded in 1998, Yole Développement is a global market, technology and strategy consulting company involved in :

Equipment & Materials

MEMS &

Image Sensors

Photovoltaic

Advanced

Packaging

Microfluidic

& MedTech Power Electronics

& Compound Semi

LED, OLED & LD

© 2013• 5

MEMS Market Historical Data 2004-2012 in US$M

2004 2005 2006 2007 2008 2009 2010 2011 2012

$M $5 240 $5 630 $6 350 $7 200 $6 800 $7 538 $8 880 $9 934 $10 930

$0

$2 000

$4 000

$6 000

$8 000

$10 000

$12 000

2004 - 2012 MEMS Markets ($M) Source Yole Développement

© 2013• 6

UPDATE ON THE GLOBAL MEMS MARKET

© 2013• 7

MEMS markets by application

(in US$M)

$2 .6B $3 .6B

$5 .0B

$9.8B $1 .8B

$6 .3B

$ 0M

$5 000M

$10 000M

$15 000M

$20 000M

$25 000M

2012 2013 2014 2015 2016 2017 2018

MEMS $M forecast per application & CAGR 2012-2018 March 2013

Telecom

Medical

Industrial

Defense

Consumer

Automotive

Aeronautics

Telecom 11.7%

Medical 22.8%

Industrial 11.5%

Defense 11.9%

Consumer 11.6%

Automotive 5.5%

Aeronautics 6.4%

© 2013• 8

Continued Strong Growth 2012-2018 Forecast (in US$M)

Yole Developpement © March 2013

© 2013• 9

2012-2018 Forecast (in Munits)

Yole Developpement © March 2013

© 2013• 10

2012 MEMS Players Ranking Top 30

Yole Developpement © March 2013

© 2013• 11

MEMS FOR MOBILE

© 2013• 12

MEMS devices in volume in 2013:

• IMU combo

• Magnetometer

• MEMS microphones

• Pressure sensor

• Humidity + Temperature sensor

• BAW filters and duplexers

• Antenna tuner

Simplified View of TODAY (2013’s)

Smart-Phone Board MEMS in red

© 2013• 13

New MEMS devices in volume in 2018?

• 9-axis combo

• Pressure + Humidity + T° combo

• More microphones!

• Silicon timing for XO / TCXO / 32kHz clock

• Antenna switching

• Gas / biochemical sensors

• Auto-focus

• MEMS mirrors

• Microspeaker

• Touchscreen?

• IR sensor?

Simplified View of TOMORROW (2018’s)

Smart-Phone Board MEMS in red

Joystick?

UV sensor?

LIDAR?

Ultrasonic sensor?

Radiation sensor?

…

Energy harvesting?

© 2013• 14

Sampling

/ R&D

High

volume

Small

production

MEMS Value Proposition in Mobile Devices

DelfMEMS switch

Freescale pressure sensor Polight MEMS

autofocus

Sensirion Humidity

Sensor

AudioPixel microspeaker

Sand 9 MEMS

Oscillator

NextInput SoftTouch

interface

TI temperature sensor versus

a competing thermopile

sensor

Wispry antenna tuner on cell

phone board

Thermal imager MuOptics

Mirasol display

STM 9-axis

Knowles microphones

Scanning mirror from

Lemoptix

Improved

visual

experience

Navigation &

environment

sensing

Sound

quality

Better communication

performances

New tactile

interface

Infra red sensing

Increased battery lifetime

Nectar fuel cell

© 2013• 15

2012 2018 MEMS Market in Mobile ($M)

DelfMEMS switch

Freescale

pressure sensor

Sensirion

Humidity

Sensor

AudioPixel microspeaker

Sand 9 MEMS

Oscillator

NextInput SoftTouch

interface

TI temperature sensor versus

a competing thermopile

sensor

Wispry antenna tuner on cell

phone board

Thermal imager MuOptics

STM 9-axis

Knowles microphones

Navigation &

environment

sensing

Sound

quality

Better communication

performances

New tactile

interface

Infra red sensing

$388M (2012) $1166M (2018) $438M (2012)

$868M (2018)

$492M (2012)

$1691M (2018)

$0M (2012) $52M (2018)

$0M (2012)

NA (2018)

Polight MEMS

autofocus

Mirasol display

Scanning mirror from

Lemoptix

Improved

visual

experience

Increased battery lifetime

Nectar fuel cell

$11M (2012)

$1140M

(2018)

$0 (2012) NA (2018)

© 2013• 16

Key MEMS Players in Mobile

DelfMEMS switch

Freescale

pressure sensor

Sensirion

Humidity

Sensor

AudioPixel microspeaker

Sand 9 MEMS

Oscillator

NextInput SoftTouch

interface

TI temperature sensor versus

a competing thermopile

sensor

Wispry antenna tuner on cell

phone board

Thermal imager MuOptics

STM 9-axis

Knowles microphones

Navigation &

environment

sensing

Sound

quality

Better communication

performances

New tactile

interface

Infra red sensing

Polight MEMS

autofocus

Mirasol display

Scanning mirror from

Lemoptix

Improved

visual

experience

Increased battery lifetime

Nectar fuel cell

© 2013• 17

Successful Companies Are Still Large Leaders

in Distinct MEMS Categories

© 2013• 18

Drivers for Mobile Care Applications

Mobile

Care

Point of Care

Hospital Care

Everywhere Care

Smartphone &

Tablet revolution

Time Level of integration

Feature

Phones

Health Phone

© 2013• 19

EXAMPLES OF NEW SUCCESSFUL

APPLICATIONS

© 2013• 20

Pressure and Humidity Sensors 2 new killer apps!

• Pressure sensor now used in high

volume

– For GNSS improvement today, and for

LBS services soon

• Humidity + temperature sensors are

also adopted in 2013

Sensirion SHTC1 (2 x 2 x 0.8 mm)

- Digital humidity sensor integrated

in Samsung Galaxy S4

© 2013• 21

Drivers for RF Tuners … and MEMS value proposition

Increasing

number of

bands and

antennas

LTE Carrier

aggregation

Smaller

antennas for

smaller phones

Operators demand for

more users per BST

+ more data per user

• Very high Q

• Excellent linearity over wide frequency range

• Low loss

• High capacitor range

• Digital control, that can be integrated

• Low power consumption (electrostatic actuation)

MEMS value

proposition

Drivers for RF

tuners

© 2013• 22

Wispry reverse engineering

Extract from the reverse costing report “Wispry RF MEMS Antenna Tuner”

(published in Jan. 2012)

© 2013• 23

Proliferation of RF tuners First Epcos close loop tuner on the market!

© 2013• 24

DIVERSITY OF TECHNOLOGIES

© 2013• 25

Combos are Driving the Inertial Sensor Market

• Discrete sensors decline but will still be used

in some platforms

• 6-axis IMUs are the hottest market since 2012

• Because of strong price pressure and high

adoption rate, the total market will stabilize

from 2015

0

200

400

600

800

1000

1200

1400

1600

1800

2000

2010 2011 2012 2013 2014 2015 2016 2017 2018

Mar

ket

($M

)

Inertial sensors for mobile phones and tablets - 2010-2018 market ($M)

MEMS accelerometers MEMS gyroscopes

Magnetometers 6DOF IMUs

6DOF E-compass 9DOF Combos

Yole développement © May 2013

© 2013• 26

L3G4IS Dual Core Gyro Teardown of Nokia Lumia 920

• This gyro is integrated in the cameramodule and is

able to provide both the image stabilization function

and the user interface function (replace the gyroscope

on the main board)

© 2013• 27

InvenSense MPU-6050

© 2013• 28

InvenSense MPU-9150

© 2013• 29

Evolution of the MEMS Gyro Patent

Publication Timeline

Patent Filing Trends for MEMS Gyro Technologies (includes relevant and

related)

0

20

40

60

80

100

120

140

160

180

200

220

No

. of

Pat

ent

Fam

ilies

Priority years

Note: Most patents

filed in 2011 – 2012

not published yet

© 2013• 30

Is IP Used in Commercial Products? Some examples

IP Product on the market IP Product on the market

IP Product on the market

+ hundreds of variations

IP Product on the market

© 2013• 31

Regional Comparison Percentage of filed patents vs. revenues by headquarters

location

• “In domain” patents are filed mainly by firms and universities located in Japan and the USA

• However, a significant portion of the actual business is done by German (Bosch) and Italian

(STMicro) companies. The lesson: generating patents doesn’t mean generating business!

Geographical patent distribution by

publication country (includes relevant and related)

0%

10%

20%

30%

40%

50%

60%

Japan USA China Germany Other

Regional Comparison of % Filed Patents vs. Revenue by Competitor HQ Location

Total 2012 revenue bycompetitor location in%

% of filed patents

Yole développement © Feb. 2013

© 2013• 32

TOP 10 Leading Patent Applicants

Top 10 Patent Assignees for MEMS Gyro Patents (includes relevant and related)

447

472

125

89

42

51

31

57

32

26

41

27

30

27

15

37

9

14

20

47

9

29

1

17

18

2

11

6

5

13

0 100 200 300 400 500 600

PANASONIC (JP)

MURATA (JP)

SONY (JP)

BOSCH (DE)

HONEYWELL (US)

SEIKO EPSON (JP)

ADI (US)

WACOH (JP)

ST MICRO (FR/IT)

CEA (FR)

UNIV SHANGHAI (CN)

QUALCOMM (US)

DRAPER LABORATORY (US)

INVENSENSE (US)

MOVEA (FR)

No. of Patent Families

Assignee

Relevant

Related

Notes:

- Graph doesn’t include licensing agreements (i.e. from CEA to

Movea for some patents, while post-2008 co-developed patents are

included in both CEA and Movea’s portfolios)

- VTI Technologies’ patents are included within Murata’s

© 2013• 33

CONCLUSION

© 2013• 34

Summary

• MEMS industry is big and growing: $ 22.5B market in 2018

• Strong market pull observed for sensors and actuators in Mobile

• Not limited to few devices. A new wave of MEMS is coming!

• IP position is now critical in this highly competitive market

Copyrights © Yole Développement SA. All rights reserved. © 2013 35

Contact Taiwan / Greater China:

Ms. Mei-Ling TSAI

蔡美玲

T +886 9 3757 6016

E meiling.tsai@yole.com.tw

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