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Page 1: mems.seas.upenn.edumems.seas.upenn.edu/publications/1996/A Fully Integrated... · A Fully Integrated Magnetically Actuated Micromachined Relay William P. Taylor and Mark G. Allen

Page 2: mems.seas.upenn.edumems.seas.upenn.edu/publications/1996/A Fully Integrated... · A Fully Integrated Magnetically Actuated Micromachined Relay William P. Taylor and Mark G. Allen

Page 3: mems.seas.upenn.edumems.seas.upenn.edu/publications/1996/A Fully Integrated... · A Fully Integrated Magnetically Actuated Micromachined Relay William P. Taylor and Mark G. Allen

Page 4: mems.seas.upenn.edumems.seas.upenn.edu/publications/1996/A Fully Integrated... · A Fully Integrated Magnetically Actuated Micromachined Relay William P. Taylor and Mark G. Allen

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