menlo mm5110 - 100 watt spst mems switch...

© 2015 Menlo Microsystems, Inc. – All Rights Reserved – www.menlomicrosystems.com

Doc.Rev 5110.A 2016-02-25

<DRAFT>

MM5110 Digital-Micro-Switch 100W SPST

Product Specification

Features: DC to > 6 GHz Frequency Range

100 Watt (50 dBm) Maximum Power

Low On-State Insertion Loss < 0.2 dB @ 3 GHz

-15 dB Off-State Isolation @ 3 GHz

Ultra Low On-State Resistance < 0.3 Ω

Maximum voltage (AC or DC): +200V on RF input

< 10 µsec On/Off Switching Time

Stable Switch Resistance up to +85ºC

Hermetic 7mm x 7mm x 1.8mm CLCC Package

Applications: Functional Diagram: Scientific and Medical

Automated Test Systems

Wireless Infrastructure

Industrial Automation

Defense and Aerospace

Description: The MM-5110 is a high power 100W SPST micro-mechanical switch offered by Menlo Microsystems that has developed a new MetalMEMS™ fabrication process and applied it to DC and wideband RF/microwave switch applications. This innovative process technology has enabled robust and highly reliable switches capable of withstanding 200 volts at more than 1A using only picoamps of switch current during operation. The switch contacts provide very low on-state resistance and high off-state isolation from DC to 6 GHz with > 1B cold switching cycles at operating temperatures up to 85ºC. An external supply +80 VDC bias source for the switch driver is required.


Doc.Rev 5110.A 2016-02-25

<DRAFT>MM-5110 MetalMEMS™ 100W SPST Switch

Operating Characteristics

Absolute Maximum Ratings Exceeding the maximum ratings as listed in Table 1 may reduce the reliability of the device or cause permanent damage. Operation of the MEMS switch should be restricted to the limits indicated in Table 2 recommended operating conditions listed below.

Electrostatic Discharge (ESD) Safeguards When handling this MEMS switch, observe the same precautions as with any other ESD sensitive devices. Even though this MEMS switch device is protected from ESD damage. Precautions must be taken to avoid exceeding the ratings specified in Table 1.0 below.

Susceptibility to Latch-Up This MEMS switch device is generally not susceptible to switch latch-up conditions which can occur in some semiconductor switch devices used in RF/microwave applications.

Table 1 Maximum Ratings

Parameter Minimum Maximum Unit

High Voltage Bias Supply, VBB 80 100 Volt

RF/Microwave Input Power (1) 100 / 50 W / dBm

Operating Frequency Range (2) DC 6 GHz

Switch Rating Voltage 200 V (DC)

Switch Rating Current 1A A (DC)

Operating Temperature Range -40 +85 ˚C

ESD Voltage All Pins (3) 250 Volt

Storage Temperature Range -70 +150 ºC

Notes: 1) All parameters must be within recommended operating conditions. Maximum DC and RF power

can only be applied during the on-state condition. No hot switching.

2) For RF/microwave applications high frequency performance can be improved by external matching.

3) Machine model JEDEC Standard JESD22 A115.


Doc.Rev 5110.A 2016-02-25

<DRAFT>

MM-5110 MetalMEMS™ 100W SPST Switch

Detailed Electrical Characteristics

Table 2 Recommended Operating Conditions

Parameter Minimum Typical Maximum Unit

Frequency Range DC 6 GHz

Power per Channel Continuous 100 / 50 W / dBm

Insertion Loss @ 3 GHz 0.16 dB

Return Loss @ 3 GHz 37 dB

On-Off Isolation @ 3 GHz 21 dB

Switch Rated Voltage 200 VDC

Third-Order Intercept (IP3) >85 dBm

Second-Order Intercept (IP2) >85 dBm

Switching Time 10 µsec

Full Cycle Frequency 20 KHz

Switch Operations 109 Cycles

Steady State Current 1500 mA

Hot Switching Current 10 mA

Peak pulse current (< 1 msec) 3000 mA

Leakage current @ 200 Volts < 25 pA

On-State Resistance 0.3 0.5 mΩ

High Voltage Gate Bias (VBB) 75 80 100 VDC

Operating Temperature Range -40 +85 ºC


Doc.Rev 5110.A 2016-02-25

<DRAFT>

MM-5110 MetalMEMS™ 100W SPST Switch

Metal MEMS 6-Channel SPST Switch

Typical Performance Characteristics

Figure 1 Insertion Loss to 6GHz Figure 2 isolation to 6GHz

Figure 3 Transient Carry Current vs Time (T=25ºC) Figure 4 Leakage Current vs Voltage (Off-State)


Doc.Rev 5110.A 2016-02-25

<DRAFT>MM-5110 MetalMEMS™ 100W SPST Switch

Metal MEMS 100W SPST Switch

44-Lead Ceramic LCC

Figure 15 Pinout Configuration (Top View)

Table 3 Detailed Pin Description

Pin # Function Description Pin # Function Description

1-9 GND Package Ground 36 N/C N/C

10 N/C Do Not Connect 37 N/C N/C

11-15 GND Package Ground 38 GND Package Ground

16 RF IN RF Input (Beam) 39 N/C N/C

17 GND Package Ground 40 GND Package Ground

18 N/C N/C 41 RF OUT RF Output (Contact)

19 N/C N/C 42-44 GND Package Ground

20 GND Package Ground

21 Gate Ext Gate Supply

22-35 GND Package Ground

menlo mm5110 - 100 watt spst mems switch...

Documents