meso machining norman salmon engineering program manager lawrence berkeley national lab...
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Meso Machining
Norman Salmon
Engineering Program Manager Lawrence Berkeley National Lab
• Meso-scale machining: 10 µm ~ 1mm
bridging the gap between silicon based MEMS and conventional miniature machining.
10-3 10-4 10-5 10-6 [m]
meso machining
miniature machining
silicon µ-machining
Critical dimensions
Micro Milling, Drilling and Turning
Micro Stepper Motor Laminates - Produced Using 100 Micron Diameter Rotary Cutting Tools - Tech Transfer Grant for Empire Magnetics FY2002
100 Micron Diameter Micro Electrodes Produced for Alexander Zholents 2002 AFRD LDRD
Holes as small as 40 Microns can be drilled in Stainless Steel - Shown is a 70 Micron Drill compared with a Human Hair
Micro Rotor
1mm
1mm
Micro Turbine
Micro Engine Components
1mm
Electroplated RF Electrode
125 micron
Meso-Machining Examples
10µm gears on silicon
25µm channel on diamond
FIB Milling
37µm cutting tool
39µm channel on graphite
• Micro Tooling– tooling design – tooling application – materials
» Diamond tools cut by FIB » New workpiece materials
– analysis of cutting performance » Force sensing (MEMS)» Acoustic emissions
25 micron End Mill
10 micron End Mill
Long Term Vision
Laser Cutting and Welding
Micro EDM
LIGA
Micro Turning
Micro Wire EDMFIB
Micro Milling
Micro Molding & Casting
AFM Nano- Machining
LBL - MESO
Machining Lab
Micro Manipulation Stage for Lift-Out Specimen Preparation with FIB
Nano-Manipulator for the Molecular Foundry
x
y
z120mm
Micro Assembly Station
• MEMS Grippers • Gripper Changer • Nanometer
resolution • Haptic Feedback?
Meso machine tool with in situ metrology
• High Speed 170K RPM Hydrostatic Spindle
• Sub-Micron Accuracy
• Integrated CMM Probing, Laser, and Capacitance Inspection
Objectives • Develop Leading Technology
Program in Meso Machining, Assembly, and Metrology
• Develop Partnerships and Collaborative efforts that support and compliment our Technology