micro-machining by ekkard brinksmeier, and werner preuss philosophical transactions a volume...

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Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society

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Page 1: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society

Micro-machining

by Ekkard Brinksmeier, and Werner Preuss

Philosophical Transactions AVolume 370(1973):3973-3992

August 28, 2012

©2012 by The Royal Society

Page 2: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society

Classification of micro-machining processes.

Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992

©2012 by The Royal Society

Page 3: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society

Schematic of the vertical axis large optics diamond turning machine (courtesy of LLNL).

Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992

©2012 by The Royal Society

Page 4: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society

Diamond turning of an electroless nickel-plated hyperbolic mirror for a LIDAR system.

Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992

©2012 by The Royal Society

Page 5: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society

Electroless nickel-plated mould for an F-theta lens.

Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992

©2012 by The Royal Society

Page 6: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society

(a) A white-light interferometric image and (b) a schematic of a hologram diamond turned into a copper–nickel–zinc substrate with a nanometre stroke ultra-fast tool servo system [17].

Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992

©2012 by The Royal Society

Page 7: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society

Scanning electron microscope images of retro-reflective prisms.

Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992

©2012 by The Royal Society

Page 8: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society

A scanning force microscope image of a diamond-turned electroless nickel surface.

Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992

©2012 by The Royal Society

Page 9: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society

A scanning force microscope image of a diamond-turned OFHC copper surface.

Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992

©2012 by The Royal Society

Page 10: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society

Scanning force microscope images of the cutting edge of a diamond tool after cutting (left) iron and (right) copper.

Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992

©2012 by The Royal Society

Page 11: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society

Precision grinding of a tungsten carbide mould with a fine-grained diamond wheel (courtesy of Moore Nanotechnology Systems).

Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992

©2012 by The Royal Society

Page 12: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society

The principle of electrolytic in-process dressing (courtesy of RIKEN).

Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992

©2012 by The Royal Society

Page 13: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society

Truing of coarse-grained diamond wheels within the abrasive layer.

Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992

©2012 by The Royal Society

Page 14: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society

Crack formation in silicon observed in plunge-cut experiments with a negative rake diamond tool with and without applying hydrostatic pressure [31].

Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992

©2012 by The Royal Society

Page 15: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society

Magneto-rheological finishing of an aspheric calcium fluoride lens (courtesy of QED Technologies).

Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992

©2012 by The Royal Society

Page 16: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society

Molecular dynamics simulation of orthogonal micro-cutting of monocrystalline copper.

Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992

©2012 by The Royal Society

Page 17: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society

Molecular dynamics simulation of diamond polishing with a pairing of two {110} faces sliding along the 〈 100 〉 direction with a speed of 30 ms−1 and a pressure of 10 GPa.

Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992

©2012 by The Royal Society