Microelectronics Processing Course J. Salzman Fall 2006 1

Microelectronics Processing CourseIntroduction

Microelectronics Processing Course J. Salzman Fall 2006 2

Microelectronics Processing Course J. Salzman Fall 2006 3

Conductivity in solids

Resistivity [ cm]

Conductivity [ cm] -1

10-81018

10-18 10810310-8

108 10-3

Ag

Cu

Al

GlassPure

Diamond

Quartz

Si

Semiconductors ConductorsInsulators

GaAs

Microelectronics Processing Course J. Salzman Fall 2006 4

History

1904 Vaacum Tube1925 Concept of Field Effect Transistor1947 Bipolar Transistor1958 Bipolar IC1959 MOS Transistor1961 IC-MOS Technology1972 MOS Microprocessor

Microelectronics Processing Course J. Salzman Fall 2006 5

Microelectronics Processing Course J. Salzman Fall 2006 6

Microelectronics Processing Course J. Salzman Fall 2006 7

Moore Law(Gordon Moore 1965)

The number of transistors in a chip will be doubled every 18

months

Microelectronics Processing Course J. Salzman Fall 2006 8

Microelectronics Processing Course J. Salzman Fall 2006 9

Microelectronics Processing Course J. Salzman Fall 2006 10

Microelectronics Processing Course J. Salzman Fall 2006 11

MOS Transistor

Source Drain

Gate

Microelectronics Processing Course J. Salzman Fall 2006 12

MOS Transistor

Source Drain

Gate

Electrons in inversion layer

Microelectronics Processing Course J. Salzman Fall 2006 13

Drain

Gate

Source

W

L

tox

Substrate

Metal contact

Schottky contact

Si2O

Microelectronics Processing Course J. Salzman Fall 2006 14

Optical Measurements

• Photometric

• Interferometric

• Polarization

• Spectroscopic

Microelectronics Processing Course J. Salzman Fall 2006 15

Basic Optical Instruments

•Microscope

•Reflectometer (Nanospec)

• Ellipsometer

Microelectronics Processing Course J. Salzman Fall 2006 16

Microelectronics Processing Course J. Salzman Fall 2006 17

Microelectronics Processing Course J. Salzman Fall 2006 18

Microelectronics Processing Course J. Salzman Fall 2006 19

Microelectronics Processing Course J. Salzman Fall 2006 20

Microelectronics Processing Course J. Salzman Fall 2006 21

Microelectronics Processing Course J. Salzman Fall 2006 22

Microelectronics Processing Course J. Salzman Fall 2006 23