microfabrication shared facility 5-year renewal electrical ... · allow the facility to be used as...

Microfabrication Shared Facility 5-year Renewal

Electrical and Computer Engineering

Report prepared by Dr. Chito Kendrick

Minerals and Materials Engineering Building – 420 – 432

Shared facilities status: 2014

Established in: 1998 - 2006

Director: Paul Bergstrom

Managing Director: Chito Kendrick

Department Chair: Glen Archer

Administration: Michele Kamppinen/Maryann Wilcox

Prof. Paul

Bergstrom

Director

Dr. Chito

Kendrick

Managing

Director

Prof. Glen

Archer ECE Interim

Chair,

Maryann

Wilcox

ECE Admin.

Michele

Kamppinen ECE Admin.


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Contents Mission Statement ........................................................................................................................................ 3

MFF Staff ....................................................................................................................................................... 3

Northern Nano Lab Alliance .......................................................................................................................... 4

Use Fees ........................................................................................................................................................ 4

Use fee history .......................................................................................................................................... 5

Use fee revenue ........................................................................................................................................ 7

Summary of unique logins and average length of usage .......................................................................... 9

Supported Research .................................................................................................................................... 13

PI classification ........................................................................................................................................ 15

Departments ........................................................................................................................................... 15

Type of user ............................................................................................................................................ 15

Staff ............................................................................................................................................................. 17

Scholarly Activities ...................................................................................................................................... 18

Teaching .................................................................................................................................................. 18

Lab Tours: ................................................................................................................................................ 18

Seminars .................................................................................................................................................. 19

Summer Youth Program ......................................................................................................................... 19

Outcomes .................................................................................................................................................... 20

Equipment Maintenance ............................................................................................................................ 26

Facility Changes ....................................................................................................................................... 27

Shared Facility Funding Requests ............................................................................................................... 27

Safety Inspection ......................................................................................................................................... 29

Financial Reports ......................................................................................................................................... 31

Strategic Plan .............................................................................................................................................. 38

Guidance ................................................................................................................................................. 38

Visibility ................................................................................................................................................... 38

Systems acquisition and maintenance .................................................................................................... 39

User base ................................................................................................................................................ 40

Education and outreach: ......................................................................................................................... 42

Conclusion ................................................................................................................................................... 42

References .................................................................................................................................................. 42


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Mission Statement Michigan Technological University microfabrication shared facilities (MFF) primary purpose is

to provide the necessary systems and supplies to support the faculty with their research to

develop internationally-respected research contributions. This will ensure the continued growth

of their research programs and to a larger extent; continue the growth of Michigan Technological

University status as a leading research-intensive university in Michigan, the United States and

the world. To achieve this the following will be provided:

Educate students in the processes and systems used in micro/nanofabrication

Provide adequate training for each process and system and ensure process planning to

reduce wasted funds and time

Provide a safe and friendly working environment

The facility will operate as a non-profit resource, where use fees cover the cost of running

and maintaining the facility; additionally a core inventory of chemicals and deposition

materials will be maintained and covered by use fees

Provide a use fee structure that is competitive with other micro/nanofabrication facilities

for similar processes and systems

Maintain the core process systems to ensure minimal down time

The MFF is unable to 100% guarantee a process, but the MFF staff will try their best to

help develop processes that will have a high level of reproducible and acceptable yield

Continued expansion of the core systems to meet the requirements of current and future

users

Allow the facility to be used as leverage to hire faculty that are leaders in their field

MFF Staff Prof. Paul Bergstrom – Faculty Director – Overseeing Dr. Kendrick.

Dr. Chito Kendrick - Managing Director – Dr. Kendrick’s duties and responsibilities are:

1. Develop, implement and maintain an effective training program that is the basis of

granting operational access to the MFF and specific instruments

2. Develop, maintain, and enforce laboratory safety procedures

3. Direct the development of a MFF chemical hygiene plan and a supplies management plan

to insure that the laboratory meets federal and state guidelines for safety

4. Develop and recommend MFF equipment usage rates based on projected depreciation

rates and equipment valuation.

5. Develop budgets, analyze expenses and revenues, and compile financial reports.

6. Develop and oversee an expansion plan for existing and future laboratory capabilities,

including but not limited to: cleanroom facility expansion, wet chemical processing

equipment, high temperature diffusion and oxidation furnaces, enhanced plasma

chemistry and deposition, and nanoscaled materials and device characterization facilities.

7. Develops and carries out a preventative maintenance program for the MFF.

8. Maintains records/databases and prepares routine and ad hoc reports on facility

operations, maintenance and resource use.


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9. Supervises and works with contractors and vendor personnel to install, troubleshoot,

maintain and develop complex instruments and systems.

10. Manages resources, equipment and materials in accordance with approved budget.

Dr. Glen Archer - Interim department chair – Prof. Archer has final sign off as the MFF is

operated through the Department of Electrical and Computer Engineering.

Michele Kamppinen and Maryann Wilcox – Administration – Help with the reallocation of

monthly usage and aid in setting up purchase orders, confirming orders, and other financial

transactions.

Northern Nano Lab Alliance As of FY17, the MFF joined the Northern Nano Lab Alliance (NNLA).

The National Science Foundation’s National Nano Coordinated Infrastructure program

(http://www.nnci.net/) has set up a network of nodes to support nano-related research and

education. Headquartered at the University of Minnesota, the Midwest Infrastructure Corridor

(MINIC) is one of those nodes. MINIC has national reach, supporting work in Nano-bio, 2D

materials, and other emerging fields. However MINIC also has a responsibility to support and

enable other nano/microfabrication laboratories in the upper Midwest. To accomplish this latter

goal MINIC has created the NNLA (http://www.minic.umn.edu/nano-lab-alliance). Currently

made up of ten labs, this organization meets regularly to share best practices, and develop new

methods to improve lab operation.

The University of Minnesota

Michigan Technological University

Rose Hulman Institute of Technology

The University of Iowa

South Dakota State University

Iowa State University

University of Colorado Boulder

Minnesota State University, Mankato

University of Wisconsin–Madison

North Dakota State University

Use Fees The MFF has three use fee indexes and their current rates are:

Index Use fee

(/hr)

Equipment covered by the index

D98077 -

Chemical,

Characterization,

and Thermal*

$19.50 Filmetrics 3D optical profiler (M&M 431) (2017 – shared

facility funds)

JA Wollman V-VASE spectroscopic Ellipsometer (M&M

431)


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Laurel Technologies Photoresist and Polymer Spin Station

(M&M 429)

Nikon Optiphot 200 Wafer Inspection Microscope (M&M

429)

Vacuum Oven (M&M 429)

Wet benchers (M&M 429)

Spin rinse drier (M&M 429)

Dicing Saw (M&M 429)

AG Heatpulse 610 rapid thermal processor (M&M 428)

Mellen oxidation furnace (M&M 428)

Mellen diffusion furnace (M&M 428)

50 mm Furnace (M&M 428)

Wire bonder (M&M 424)

Photoplotter (M&M 420 darkroom)

D98081 - EVG

Lithography

$71.00 EV620 Mask Aligner (M&M 429)

D98095 - Thin

Film/Etching*

$43.00 Perkin Elmer 2400 – 8J Sputter (M&M 432)

Perkin Elmer 2400 – 6J Sputter (M&M 432)

Fredrick electron beam deposition (M&M 432)

Denton electron beam deposition (M&M 432)

PDS2020 LabCoater Parylene-C deposition system (M&M

432)

TRION Phantom II (M&M 431)

March Instruments Jupiter Plasma System (M&M 431)

Ion Beam Etcher (M&M 431)#

No index User covers

supplies and

support

FTIR (M&M 431)

FSM 900TC (M&M 431)

Nikon Optiphot 150 Wafer Inspection Microscope (M&M

432)

EasyTube Chemical Vapor deposition (M&M 428) (2019

– Dr. Parisa Abadi)

Atomic Layer Deposition (M&M 428) (2016 – Dr.

Kathryn Perrine and Dr. Joshua Pearce)

Probe station and Keithley 4200 Parametric

Semiconductor Characterization Testing System (M&M

424) (2019 –shared facility funds and ECE department -

rebuilt after the hardware has failed)

Reflow stage (M&M 420)

Reflow oven (M&M 420)

Pick and place system (M&M 420)

* - Covers a range of systems to reach the $5K minimum set by use fee committee.

# - Currently not functional

Use fee history The use fee rates for the last five fiscal years are show in Figure 1. The dramatic increase in

FY17 was due to a change in the billing process. Until FY17 the D98077 index was known as


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“baseline” and that was added to D98081 and D98095. The baseline index covered gloves,

cleanroom wipes and chemicals that users used for all systems. However, this meant twice as

much work for doing reallocations and principle investigators (PIs) got confused when they saw

multiple charges for one usage. Therefore, D98077 was renamed as “chemical, characterization

and thermal processing” (CCT), and D98081 and D98095 were adjusted to automatically include

the old baseline rate.

Figure 1 - Use fee rates for the MFF over the past five years. For FY15-FY17 the D98077

index was called the baseline and then renamed to CCT once the baseline was added to the

other two indexes.

Table 1 – Demonstrating the changes to the use fee rates before and after FY17

Before FY17 After FY17

Base line (D98077) $19.50 Chemical, Characterization, and

Thermal (D98077)

$19.50

EV620 (D98081 +

D98077)

$19.50+$51.50 = $71 EV620 (D98081) $71

Thin film and Etch

(D98095 + D98077)

$19.50+$22.50 = $43 Thin film and Etch (D98095) $43

Compared to other universities out use fee rates are not that much different. However, every

other university has a use fee rate per system instead of having a use fee rate that covers multiple

systems. The reason we cannot do this is because there is a $5K revenue limit required to have a

new use fee rate and the MFF cannot meet that limit for each system so we have to bundle

similar tools. This is responsible for deposition systems, but the CCT index has a range of

$-

$10.00

$20.00

$30.00

$40.00

$50.00

$60.00

$70.00

$80.00

FY15 FY16 FY17 FY18 FY19

D98077 - CCT D98081 - EV620 Litho D98095 - Thin film and etch


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systems that should have rates that are lower or higher depending on their supply usage

requirement.

Use fee revenue The amount of revenue from each index and total use fee revenue is shown in figure 2, this data

was generated from Aspire.

Additional information and take away points:

Figure 2

1) Logging of usage went from hand written paper logs (FY15) to electronic logs (FY16)

using a python code developed by Dr. Kendrick. The python program also interlocks to

all systems to prevent system usage if not logged in. The electronic logging improved

data collection and also sped up fund reallocation from a PI index to the MFF by

automatically filling out the online form (https://www.admin.mtu.edu/acct/forms/roe/)

and adding a summary spreadsheet of what is being reallocated for the PI to review. Final

submission is still prepared by Dr. Kendrick after data checks are completed.

2) 5 year use fee revenue average is $47.3K (figure 3) , which is slightly higher than the 10

year average of $44.5K (figure 3)

3) Revenue in FY15 and FY16 is skewed towards FY16. This was due to the use fee index

rates expiring for D98077 and D98095 during the period when the managing director

position was vacant and Prof. Bergstrom was the solo director. Once Dr. Kendrick was

hired new use fee rates were calculated and authorized by the use fee committee. Usage

that was from internal indexes were charged using the new rates and recovered. For usage

to external indexes that had exceeded 90 days was not recovered, else if it was within 90

$-

$20,000

$40,000

$60,000

$80,000

$100,000

$120,000

FY14 FY15 FY16 FY17 FY18 FY19

D98077 - CCT D98081 - EV620 D98095 - Thin film and etch Total Revenue


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days it was also recovered using the new rates. Revenue was also lost due to PIs having

over spent their personal indexes without knowing.

4) D98081 revenue (EV620 lithography system) has been reducing for the last four years.

This one system is a very specialized capability and is used to transfer patterns from a

photomask to a photoresist covered substrate. It is considered the heart of a fabrication

facility and therefore is a catalyst for use of most of the other systems.

5) D98077 revenue reduced and D98095 revenue increased (FY18-FY19), this is due to the

changing of the use fees to automatically incorporate what was the baseline.

Figure 2 – Use fee revenue for the MFF for the past six fiscal years. The peak in usage

(FY16) is over exaggerated due to the use fee rates expiring. A taking the average of FY15

and FY16 would give a better representation of the use fee revenue for FY15 and FY16.

$-

$20,000

$40,000

$60,000

$80,000

$100,000

$120,000


D98077 - CCT D98081 - EV620 D98095 - Thin film and etch Total Revenue


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Figure 3 – Use fee revenue for the MFF for the past ten fiscal years. 10 year average is

$44.5K and 5 year average is $47.3K.

Summary of unique logins and average length of usage For the summary of unique logins (figure 4) and the average length of usage (figure 5), FY15 is

missing as that data was not easily obtainable from the excel spreadsheets used for reallocation.

The data was recorded as a total time for each PIs index for the month instead of individual login

periods. This is where the electronic logging system has made data analysis and manipulation

with python, or excel, a lot faster and more reliable.

Take away from the number of logins (figure 4):

1. EV620 usage has decreased every year. This means systems that support EV620 usage

are not seeing improved usage, e.g. chemical processing and polymer spinner, and those

that are not essential everything else in the MFF. Without the use of the EV620 most

users would therefore be doing blanket thin film depositions or cleaning/etching without

a pattern and therefore not making devices. We did have one user install an older donated

mask aligner in his own research lab space and therefore removing the need for the

EV620 in his research – he does still use the MFF for metal depositions and etching. This

has impacted use of this capability.

2. The lack of use of the EV620 can also be explained by its fundamental limitation,

patterning of features down to 1 µm. We have had faculty in Electrical and Computer

Engineering, Physics, Material Science and Engineering (MSE), Biomedical Engineering,

and Mechanical Engineering and Engineering Mechanics that need sub-micron features,

but at present a system has not been acquired. Dr. Kendrick has tried through a Defense

University Research Instrumentation Program (DURIP) grant (submitted 2018) and The

$-

$20,000.00

$40,000.00

$60,000.00

$80,000.00

$100,000.00

$120,000.00

FY10 FY11 FY12 FY13 FY14 FY15 FY16 FY17 FY18 FY19

Total Revenue 10-year average 5-year Average


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S10 Instrumentation Programs (unable to reach the requirements for a grant submission)

grant, and there is ongoing attempts to obtain a sub-micro system through the Major

Research Instrumentation (MRI) Program 2020 – further information will be cover in the

strategic plan at the end of the report.

3. All the deposition systems, except the PDS coater, are seeing reduced usage. These

systems do not have the same limitations as the EV620, but their reduced usage could be

linked to the EV620 usage.

4. The purchase of the 3D Profiler has been a good investment and has seen consistent

usage above 100 logs, it is also now being used by senior design groups in MSE and this

should continue to grow as the knowledge of the system continues to grow.

Take away from the length of usage (figure 5):

1. The length of login for the deposition systems (Denton, Fredrick, 6” Sputter, and 8”

Sputter) is shorter, which could be linked:

a. More experienced users

b. Better training of the users so they understand how the system meant to work

c. Better maintenance plan and the systems will pump down from atmosphere to the

process pressure faster allowing the deposition to be conducted sooner

d. A push by the PI to keep cost down as budgets are tight

2. A similar shorter login trend is seen for the EV620 as well

Figure 4 – Number of unique logins to each system, oxidation and diffusion systems are

combined into one system as this was the case for paper logs.

0

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100

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250

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350

400

450

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FY17

FY18

FY19


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Figure 5 – Average length of login time, oxidation and diffusion systems are combined into

one system as this was the case for paper logs.

Figure 6 and figure 7 are plots of the number of unique indexes broken down into categories

(courses, faculty startup, senior design project, overhead accounts, internal sponsored grants, and

external use) and the amount of revenue from each category.

Take away points from the index break down (figure 6):

1. The unique number of indexes is not a good figure of merit as one NSF grant could bring

in more revenue than several seed grants.

2. There has been a growth in the number of new faculty using the MFF up until FY18. This

peak could be due to insufficient equipment and the lack of hiring of experimental faculty

and the hiring towards computational and theoretical tenure track faculty. Since Dr.

Kendrick joined the MFF he has attended all the new faculty orientations to attract

faculty that he had not talked to before they were hired. At least for 2019 and 2018

there was no new faculty hired at any level that would need the MFF unless they

change their research focus.

3. The number of senior design groups that have used the MFF has increased. This is a

small revenue stream, but by exposing undergraduates to the MFF they may find this area

interesting and stay on for graduate studies.

4. The use of overhead accounts has started flat, except FY17 and this aligns with the peak

in unique external research grants

5. External user research has been constant

0:00:00

1:00:00

2:00:00

3:00:00

4:00:00

5:00:00

6:00:00

7:00:00

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FY16

FY17

FY18

FY19


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Figure 6 – Unique number of indexes used to recharge the MFF indexes

0

5

10

15

20

25

30

35

40

Course Start Up Senior Design Overhead SponsoredActivities

External Total

Nu

mb

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f u

niq

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FY15

FY16

FY17

FY18

FY19


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Take away points from the revenue break down (figure 7):

1. The amount of revenue from the EE5471 – Microfabrication course has reduced. This is

directly in line with the number of enrolled students reducing – the course is offered in

fall and spring semesters to give students flexibility, but as it is a 2 credit course focused

towards graduate students this is expected with reduced enrollment. Dr. Kendrick is

looking at opening this course up to more undergraduate students, they are already

allowed with approval, and expanding its scope to 3 credits.

2. The amount of revenue from startup indexes has reduced from a high in FY16

3. Overhead use is at a high in FY19 as PIs are using those accounts to support the lack of

sponsored research and the need to spend down their accounts due to the 3%

administration fee.

4. The amount of revenue from sponsored grants (NSF, DOE, NIH) has dropped

significantly.

5. Most of the external group revenue in FY18 and FY19 was from a startup company from

Michigan Tech. so their revenue shifted categories (sponsored to external).

Figure 7 – Amount of use fee revenue received from each sub group. This was based of Dr.

Kendrick’s python code and usage not Aspire, this would explain the difference in use fee

revenue here compared to figure 2.

$0.00

$10,000.00

$20,000.00

$30,000.00

$40,000.00

$50,000.00

$60,000.00

$70,000.00

$80,000.00

Courses Start Up SeniorDesign

Overhead SponsoredActivities

ExternalGroup

Total

Rev

enu

e

FY15

FY16

FY17

FY18

FY19


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Supported Research In figure 8 is all the users, PIs, students, external groups, that used the MFF in FY19; excluded

from the figure is the senior design groups.

Departments that have used the MFF in the last five years (area of research focus):

Electrical and Computer Engineering (Photonics, BioMEMs, Photovoltaic,

Metamaterials, 2D Materials)

Chemical Engineering (Lab-on-a-chip, biological detection, particle detection)

Physics (Magneto optics, Super luminescence, 2D Materials)

Material Science and Engineering (Photovoltaic, Surface morphology)

Mechanical Engineering – Engineering Mechanics (BioMEMs, Thermal energy devices)

Chemistry (Surface science)

Biomedical Engineering (Smart Adhesives, Tissue scaffolds, Material coatings)

Civil Engineering (Surface morphology)

Senior Design groups that have used the MFF:

MEEM (Material Coatings)

MSE/EET (Surface morphology)

BME (Material Coating)

ECE (System upgrade)

External groups that have used the MFF in the last five years:

University of Calgary (Fuel Cells)

IRTelemetrics, Hancock, MI (In-situ monitoring, coatings)

University of Minnesota (Optics)

MicroDevice Engineering Inc., Houghton, MI (Lab-on-a-chip)

Upland Nanotech LLC. Ann Arbor, MI (Lab-on-a-chip)

Hemex Health (Bio compatible coatings)


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Figure 8 - Users of the MFF from FY2019


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PI classification To analysis the MFF user base the numbers have been broken down into the classification of the

PI (figure 9), department that the PI is associated with, and type of user that is physically in the

MFF (figure 10).

For the classification (figure 9) there is an even spread of classes in FY19, and the last three

years has seen a growth in the research faculty (either doing work for a faculty member, mentor

to a senior design group, or their own research). It would be more ideal to see more faculty in the

assistant or associate class as these faculty are more research active, while full professor should

be going after larger collaborative grants. The decrease in the assistant professor numbers from

FY18 and FY19 is concerning as the PIs that use the MFF are heading towards a less research

active period. At least the number of PIs that are using the MFF are stead.

Departments MFF has a diverse portfolio of departments with a total of seven departments (figure 10), also

users doing senior design projects and external users. Most other micro/nanofabrication facilities

are also seeing a shift away from traditional silicon processes and therefore the diversity of

departments using these facilities are growing [1]. In our case we are starting to see more PIs

from Biomedical Engineering. This can lead to additional challenges as Biomedical Engineering

usually uses a smaller tool set as their structures are not as complex. There is also the possibility

of biological hazardous that will require biohazard certification.

The unique external user base is 12% of the total number of unique user groups. Compared to the

NNCI facilities which have a mean of 26.6%, min of 13%, and max of 47% [2]. For a university

with very little technical industry in close vicinity this is a reasonable amount. The issue is if this

is sustainable and then if we can grow this number to therefore subsidize the use of the faculty.

Type of user For the breakdown of the type of physical users (figure 11), this is top heavy towards students.

However, the number of students in the MFF has reduced and a concern there is new students

will require significant amount of help with getting started in the MFF and more chances of

system issues occurring with novice users. The number of active postdocs has declined to zero

(FY19) and indicates the level of research support is lacking.


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Figure 9 – Break down of the principle investigators into their classified roles

Figure 10 – Break down of the groups by their home departments.

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Electrical and Computer Engineering Chemical Engineering

Material Science and Engineering Physics

Biomedical Mechanical Engineering-Engineering Mechanics

Chemistry Enviromental

External Senior design


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Figure 11 – Break down of the users (people that actually do the work in the MFF).

Staff Dr. Kendrick is the only permanently funded staff. 33% of his salary comes from the MFF

indexes, the rest of his salary is covered by the ECE. The cost of staffing is always the highest

cost to any facility (>50%).

Graduate and undergraduate students have been employed in the past five years to support the

MFF when funds have been available in overhead indexes.

Year Period Who Amount Index Reason

FY14 7/20/13 - 8/17/13 Sterling Prince $1,861 D99095 Acting lab

manager

FY15 7/19/14 – 8/30/14 Sterling Prince $1,250.93 D98095 Acting lab

manager

FY15 6/6/15 – 7/4/15 Benjamin Veltman $1,404 D98077

Summer

working on

FSM 900TC

wafer

curvature

system

FY16 7/4/15 – 8/15/15 Benjamin Veltman $1,476 D98077

Summer

working on

FSM 900TC

wafer

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45


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sers

Student Postdocs Research Facilty External (work done by Dr. Kendrick) Faculty


19 | P a g e

curvature

system

FY15 Nupur Bihari $1,270.50 D99081 EE5471 TA

FY16 7/18/15 – 8/29/15

Paniz

Khanmohammadi

Hazaveh

$3,300 D98077 EE5471 TA

FY16 1/2/16 - 1/26/16

Paniz

Khanmohammadi

Hazaveh

$550 D98077 EE5471 TA

FY16 5/21/16 – 7/2/16 Mehdi Malekrah $1,749 D99095

Help

development

of ALD

system

FY17 7/2/16 – 7/30/16 Mehdi Malekrah $1,028 D99095

Help

development

of ALD

system

FY18 3/24/18 - 3/24/18 Eric Bauer $92.50 D98095

School of

Technology

Machinist

FY18 11/18/17 -

11/18/17 Scott Meneguzzo $154.79 D98095

School of

Technology

Machinist

Scholarly Activities Teaching Dr. Kendrick (ECE) - EE5471: Microfabrication laboratory class - This course is intended to

introduce students to commonly used process tools and procedures for the fabrication of

optoelectronic devices, biosensors, photonics, etc. The students are taught the theory behind each

tool/process that will be used in the MFF and then they will have time in the MFF to gain

experience with that tool/process. Using their understanding of the tool/process the students

fabricate and test silicon photovoltaic cells.

Dr. Middlebrook (ECE) - EE4800: Printed Circuit Board Fabrication – Dr. Middlebrook ran this

course for the first time on spring 2019. The course uses the photoplotter in the darkroom (420

M&M Building) for their pattern generation (resources used are covered by Dr. Middlebrook).

Additionally, Dr. Middlebrook’s copper plating bench and press were installed in the

microfabrication facility due to facility requirements, but also due to the chemical hazards

associated with the processing.

Lab Tours: Dr. Rao (BME) - BE 4670 - Micro & Nano Technologies (annual)

Dr. Choi (MEEM) – MEEM 5130 Nanotechnology (annual)


20 | P a g e

Dr. Cai (SOT) - SAT 3900 - New Technology Seminar (annual)

Dr. Bergstrom (ECE) – EE 4240 – Introduction to MEMs, EE 4271 – VLSI Design

FY18 - Electrical and Computer Engineering Alumni tour

Material Science and Engineering marketing tour for Dr. Steve Kempe

Photonics group – Tour for visiting companies (Dr. Middlebrook)

Dr. Joan Redwing, Pennsylvania State University – Visiting Women & Minority

Lecturer/Scholar Series invited by Dr. Kendrick

Tour for the School of Forest Resources and Environmental Science Faculty

Seminars MEEM microfluidics group - Seminar on the Microfabrication Facility

Material Science Engineering - Seminar on the Microfabrication Facility

Dr. Kendrick also attends the New Faculty Tech Talks, MSE seminars, ECE Seminars, Physics

Seminars, and Chem Sci Seminars on a regular basis to determine the focus areas of the

Michigan Technological Faculty and to direct faculty towards the facility where we might be

able to help their research and teaching.

Summer Youth Program Materials Science and Engineering – Summer Youth Program, two groups of K-12 students

would do a metal deposition, photolithography and wet etching to produce a silicon wafer with

the Michigan Tech. logo. Individual samples are cut by the students as a keepsake.

(https://abc10up.com/2017/07/25/students-experience-day-microfiber/)

https://abc10up.com/2017/07/25/students-experience-day-microfiber/


21 | P a g e

Figure 12 – Top left) SYP 2016 high school students gowning up to go into the cleanroom,

top right) SYP 2017 middle school students gowned up in the cleanroom after processing

their silicon wafers, bottom left) Silicon chips fabricated by the SYP students that they

were able to keep to remember their experience, and bottom right) SYP 2017 middle school

students from another group.

Outcomes This list of publications is likely incomplete due to the lack of acknowledgement of the MFF in

the faculty’s publication as well as lack of communication with the facility when publications

have been accepted. This list was generated by asking the faculty users for a list of publications

that have involved research that used the MFF, as well as Dr. Kendrick sorted through all the

faculty’s google scholar lists to determine if the facility was used. If they did not mention a MFF

system in their methods this was not included in the list – this is therefore depend on the author

including a complete methods which might not be the case.


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Figure 13 – The total use fee revenue with the outcomes (publications and PhD and masters

Dissertations) overlaid.

Publications: Sorted by the department of the main principle investigator.

Biomedical Engineering:

1. Forooshani, Pegah Kord, Elizabeth Polega, Kevin Thomson, Mohamed Saleh Akream,

Rattapol Pinnaratip, Mikhail Trought, Chito Kendrick et al. "Antibacterial Properties of

Mussel-Inspired Polydopamine Coatings Prepared by Simple Two-Step Shaking-Assisted

Method." Frontiers in Chemistry 7 (2019): 631. – 3D profiler, Ellipsometry

2. Z Zhang, R Pinnaratip, KG Ong, BP Lee. “Correlating the mass and mechanical property

changes during the degradation of PEG-based adhesive” Journal of Applied Polymer

Science (accepted) (2019) - Parylene Coater

3. Hanumantharao, Samerender Nagam, Carolynn Que, and Smitha Rao. "Self-assembly of

3D nanostructures in electrospun polycaprolactone-polyaniline fibers and their

application as scaffolds for tissue engineering." Materialia 6 (2019): 100296. – I-V

measurements

4. Ameya R. Narkar, Chito Kendrick, Kishan Bellur, Timothy Leftwich, and Bruce P. Lee, "

Rapidly Responsive Smart Adhesive-Coated Micropillars Utilizing Catechol-Boronate

Complexation Chemistry," Soft Matter 15 (2019), 5474-5482 – 3D Profiler, TRION,

EV620, Polymer Spinner, Wet Benches, Microscope

5. Qian, Zichen, David Ross, Wenkai Jia, Qi Xing, and Feng Zhao. "Bioactive

polydimethylsiloxane surface for optimal human mesenchymal stem cell sheet culture."

Bioactive materials 3, no. 2 (2018): 167-173 - MARCH

$-

$20,000

$40,000

$60,000

$80,000

$100,000

$120,000


Total Revenue

2015Publications: 4Dissertations: 4






23 | P a g e

6. M-H Lin, J Anderson, S Konst, R Pinnaratip, H Meng, AJ DeRouin, R Rajachar, KG

Ong, BP Lee. “Monitoring the long-term degradation behavior of biomimetic bioadhesive

using wireless magnetoelastic sensor” IEEE Transactions on Biomedical Engineering, 62,

1832-42, (2015). - Parylene Coater

7. J Anderson, M.-H Lin, C Privette, M Flowers, M Murley, BP Lee, KG Ong. “Wireless

magnetoelastic sensors for tracking degradation profiles of nitrodopamine-modified

poly(ethylene glycol)” ScienceJet, 4, 80, (2015). - Parylene Coater

Chemical Engineering:

8. J.L.Collins, H.Moncada Hernandez, S.Habibi, C.E.Kendrick, Z.Wang, N.Bihari,

P.L.Bergstrom, A.R.Minerick, "Electrical and chemical characterizations of hafnium (IV)

oxide films for biological lab-on-a-chip devices," Thin Solid Films 662 (2018), 60-69 –

8” sputter, Ellipsometry

9. Z. Wang, C. Ivory, and A.R. Minerick, "Surface-Enabled Isoelectric Focusing (sIEF)

with Carrier Ampholyte Type pH Gradient," Electrophoresis, 2017: 38 (20), pgs 2565-

2575. DOI:10.1002/elps.201600565 – EV620, Polymer Spinner, Wet bench, 6” Sputter

10. Moncada‐Hernandez, Hector, Eliot Nagler, and Adrienne R. Minerick. "Theoretical and

experimental examination of particle–particle interaction effects on induced dipole

moments and dielectrophoretic responses of multiple particle chains." Electrophoresis 35,

no. 12-13 (2014): 1803-1813. – EV620, Polymer Spinner, Wet Benches, Microscope, 6”

Sputter

11. An, Ran, David O. Wipf, and Adrienne R. Minerick. "Spatially variant red blood cell

crenation in alternating current non-uniform fields." Biomicrofluidics 8, no. 2 (2014):

021803. – EV620, Polymer Spinner, Wet Benches, Microscope, 6” Sputter

12. Adams, T. N. G., P. A. Turner, A. V. Janorkar, F. Zhao, and A. R. Minerick.

"Characterizing the dielectric properties of human mesenchymal stem cells and the

effects of charged elastin-like polypeptide copolymer treatment." Biomicrofluidics 8, no.

5 (2014): 054109. – EV620, Polymer Spinner, Wet Benches, Microscope, 6” Sputter

13. An, Ran, Katherine Massa, David O. Wipf, and Adrienne R. Minerick. "Solution pH

change in non-uniform alternating current electric fields at frequencies above the

electrode charging frequency." Biomicrofluidics 8, no. 6 (2014): 064126. – EV620,

Polymer Spinner, Wet Benches, Microscope, 6” Sputter

Physics:

14. Levy, Miguel, Olga V. Borovkova, Colin Sheidler, Brandon Blasiola, Dolendra Karki,

François Jomard, Mikhail A. Kozhaev, Elena Popova, Niels Keller, and Vladimir I.

Belotelov. "Faraday rotation in iron garnet films beyond elemental substitutions." Optica

6, no. 5 (2019): 642-646. – Ellipsometry, Wet bench, Dicing Saw

15. Karki, Dolendra, Ramy El-Ganainy, and Miguel Levy. "Toward high-performing

topological edge-state optical isolators." Physical Review Applied 11, no. 3 (2019):

034045. - Wet bench, Dicing Saw


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16. Muqri, Aeshah, Young Joong Choi, Sungho Choi, Woon Ik Park, and Jae Yong Suh.

"Fast and slow propagations of surface plasmon polaritons on metallic mesh gratings."

Journal of Optics 20, no. 10 (2018): 105001 – 8” sputter

17. Karki, Dolendra, Vincent Stenger, Andrea Pollick, and Miguel Levy. "Thin-film

magnetless Faraday rotators for compact heterogeneous integrated optical isolators."

Journal of Applied Physics 121, no. 23 (2017): 233101. – Dicing saw, microscope

18. Levy, Miguel, A. Chakravarty, H-C. Huang, and R. M. Osgood Jr. "Large magneto-optic

enhancement in ultra-thin liquid-phase-epitaxy iron garnet films." Applied Physics

Letters 107, no. 1 (2015): 011104. – Wet bench

External:

19. Shrivastava, Udit N., Helmut Fritzsche, and Kunal Karan. "Interfacial and Bulk Water in

Ultrathin Films of Nafion, 3M PFSA, and 3M PFIA Ionomers on a Polycrystalline

Platinum Surface." Macromolecules 51, no. 23 (2018): 9839-9849. – Denton e-beam

evaporator, dicing saw, polymer spinner

Electrical and Computer Engineering:

20. Sadatgol, Mehdi, Nupur Bihari, Joshua M. Pearce, and Durdu O. Guney. "Scalable

honeycomb top contact to increase the light absorption and reduce the series resistance of

thin film solar cells." Optical Materials Express 9, no. 1 (2019): 256-268. – 6” sputter,

Ellipsometry, MARCH, Fredrick, wet bench

Material Science Engineering:

21. Zhang, Chenlong, Jephias Gwamuri, Sandra Cvetanovic, Mehdi Sadatgol, Durdu O.

Guney, and Joshua M. Pearce. "Enhancement of hydrogenated amorphous silicon solar

cells with front-surface hexagonal plasmonic arrays from nanoscale lithography." Journal

of Optics 19, no. 7 (2017): 075901. – Fredrick

22. J. Gwamuri, R. Venkatesan, M. Sadatgol, J. Mayandi, D. O. Guney, and J. M. Pearce,

Ambiance-dependent agglomeration and surface-enhanced Raman spectroscopy response

of self-assembled silver nanoparticles for plasmonic photovoltaic devices, J. of Photonics

for Energy 7, 037002 (2017). - Fredrick

23. Chandra, Handy; Allen, Spencer; Oberloier, Shane; Bihari, Nupur; Gwamuri, Jephias;

Pearce, Joshua, “Open-source automated mapping four-point probe,” Materials, 10, 2,

110, 2017, Multidisciplinary Digital Publishing Institute – four point conductivity

24. Zhang, C., Durdo O. Guney, and Joshua M. Pearce. "Plasmonic enhancement of

amorphous silicon solar photovoltaic cells with hexagonal silver arrays made with

nanosphere lithography." Materials Research Express 3, no. 10 (2016): 105034. –

Modelling of results that used samples fabrication for other publications

25. Gwamuri, Jephias, Ankit Vora, Jeyanthinath Mayandi, Durdu Ö. Güney, Paul L.

Bergstrom, and Joshua M. Pearce. "A new method of preparing highly conductive ultra-

thin indium tin oxide for plasmonic-enhanced thin film solar photovoltaic devices." Solar

Energy Materials and Solar Cells 149 (2016): 250-257. – 6” sputter, Ellipsometry, wet

bench


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26. Gwamuri, Jephias, Ankit Vora, Rajendra R. Khanal, Adam B. Phillips, Michael J. Heben,

Durdu O. Guney, Paul Bergstrom, Anand Kulkarni, and Joshua M. Pearce. "Limitations

of ultra-thin transparent conducting oxides for integration into plasmonic-enhanced thin-

film solar photovoltaic devices." Materials for Renewable and Sustainable Energy 4, no.

3 (2015): 12. – 6” sputter, Ellipsometry

27. Vora, Ankit, Jephias Gwamuri, Joshua M. Pearce, Paul L. Bergstrom, and Durdu Ö.

Güney. "Multi-resonant silver nano-disk patterned thin film hydrogenated amorphous

silicon solar cells for Staebler-Wronski effect compensation." Journal of Applied Physics

116, no. 9 (2014): 093103. – Ellipsometry

Dissertations: This is a list of students that have graduated and used the MFF – not all

dissertations were check to confirm MFF usage was reported. This list was collected from digital

commons, several dissertations were missing so they are not included.

1. Bihari, Nupur, "BLOOD TYPING DEVICE WITHOUT REAGENTS: SENSING

ELECTRODES TO REPLACE OPTICS", Master's Thesis, Michigan Technological

University, 2015.

2. Chakravarty, Ashim, "GEOMETRY INDUCED MAGNETO-OPTIC EFFECTS IN LPE

GROWN MAGNETIC GARNET FILMS", Dissertation, Michigan Technological

University, 2015

3. He, Weilue, "SYSTEMATIC STUDY OF THE BIOLOGICAL EFFECTS OF NITRIC

OXIDE (NO) USING INNOVATIVE NO MEASUREMENT AND DELIVERY

SYSTEMS", Open Access Dissertation, Michigan Technological University, 2015.

4. Shrivastava, Udit N., "SEGMENTATION OF PROTON EXCHANGE MEMBRANE

FUEL CELL IN THE LAND-CHANNEL DIRECTION", Dissertation, Michigan

Technological University, 2015.

5. Zhang, Chenlong, "NANOSPHERE LITHOGRAPHY AND ITS APPLICATION IN

RAPID AND ECONOMIC FABRICATION OF PLASMONIC HYDROGENATED

AMORPHOUS SILICON PHOTOVOLTAIC DEVICES", Open Access Dissertation,

Michigan Technological University, 2016.

6. Sadatgol, Mehdi, "EXOTIC OPTICAL PROPERTIES OF METAL-DIELECTRIC

NANO-STRUCTURES", Campus Access Dissertation, Michigan Technological

University, 2016.

7. Gwamuri, Jephias, "INCREASING SOLAR ENERGY CONVERSION EFFICIENCY

IN HYDROGENATED AMORPHOUS SILICON PHOTOVOLTAIC DEVICES WITH

PLASMONIC PERFECT META – ABSORBERS", Open Access Dissertation, Michigan


8. Wang, Zhichao, "SURFACE ENABLED LAB-ON-A-CHIP (LOC) DEVICE FOR

PROTEIN DETECTION AND SEPARATION", Open Access Dissertation, Michigan


9. Tiwari, Bishnu, "CVD SYNTHESIS, PROCESSING, QUANTIFICATION, AND

APPLICATIONS OF BORON NITRIDE NANOTUBES", Campus Access Dissertation,



26 | P a g e

10. Briseno, Michael, "ELECTRO-OPTIC CONTACT POLING OF POLYMER

WAVEGUIDE DEVICES AND THIN FILMS", Open Access Master's Thesis, Michigan


11. Nagam Hanumantharao, Samerender, "A 3D Biomimetic Scaffold using Electrospinning

for Tissue Engineering Applications", Open Access Master's Thesis, Michigan


12. Liu, Yuan, "DESIGN OF ROBUST HYDROGEL BASED ON MUSSEL-INSPIRED

CHEMISTRY", Open Access Dissertation, Michigan Technological University, 2017.

13. Qian, Zichen, "FABRICATION OF PREVASCULARIZED CELL-DERIVED

EXTRACELLULAR MATRIX BASED BIOMIMETIC TISSUE CONSTRUCTS FOR

MULTIPLE TISSUE ENGINEERING", Campus Access Dissertation, Michigan


14. Hosseinzadeh, Arash, "LINEAR RING RESONATOR MODULATOR FOR

MICROWAVE PHOTONIC LINKS", Open Access Dissertation, Michigan


15. Blasiola, Brandon, "Novel Faraday Rotation Effects Observed In Ultra-Thin Iron Garnet

Films", Open Access Master's Thesis, Michigan Technological University, 2018.

16. Karki, Dolendra, "MAGNETLESS AND TOPOLOGICAL EDGE MODE-BASED ON-

CHIP ISOLATORS AND SPIN-ORBIT COUPLING IN MAGNETO-OPTIC MEDIA",

Open Access Dissertation, Michigan Technological University, 2018.

17. Bhandari, Shiva, "Synthesis and Applications of One and Two-Dimensional Boron

Nitride Based Nanomaterials", Campus Access Dissertation, Michigan Technological

University, 2018.

18. Ye, Mingxiao, "SYNTHESIS, CHARACTERIZATION, AND APPLICATION OF 2D

TRANSITION METAL DICHALCOGENIDES", Campus Access Dissertation,


19. Narkar, Ameya R., "REVERSIBLY SWITCHING ADHESION OF SMART

ADHESIVES INSPIRED BY MUSSEL ADHESIVE CHEMISTRY", Open Access

Dissertation, Michigan Technological University, 2018.

20. Wang, Shuo, "REGENERATION OF PERICELLULAR MATRIX OF HUMAN

CHONDROCYTES CULTURED IN OXIDIZED METHACRYLATED ALGINATE

MICROGELS", Campus Access Dissertation, Michigan Technological University, 2018.

21. Sharma, Dhavan D., "EFFECTS OF TOPOGRAPHICAL FEATURES ON

MICROVASCULAR NETWORK FORMATION", Campus Access Master's Thesis,


22. Mittal, Nikhil, "AN INJECTABLE THERMOSENSITIVE BIODEGRADABLE

HYDROGEL EMBEDDED WITH SNAP CONTAINING PLLA MICROPARTICLES

FOR SUSTAINED NITRIC OXIDE (NO) DELIVERY FOR WOUND HEALING",

Open Access Master's Thesis, Michigan Technological University, 2018.

23. Zhang, Zhongtian, "Studying mass and mechanical property changes during the

degradation of a bioadhesive with mass tracking, rheology and magnetoelastic (ME)

sensors", Open Access Master's Thesis, Michigan Technological University, 2018.


27 | P a g e

24. Gawron, Evan, "ELECTRO-OPTIC ANTENNA ELEMENTS FOR PASSIVE PHASED

ARRAY RADAR", Open Access Master's Thesis, Michigan Technological University,

2019.

25. Habibi, Sanaz, "EXPLORING THE ROLE AND IMPACT OF MICROSCALE

PHENOMENA ON ELECTRODE, MICRODEVICE, AND CELLULAR FUNCTION",

Open Access Dissertation, Michigan Technological University, 2019.

26. Karipott, Salil Sidharthan, "MAGNETOSTRICTIVE BONE FIXATION DEVICE FOR

CONTROLLING LOCAL MECHANICAL STIMULI TO BONE FRACTURE SITES",

Campus Access Dissertation, Michigan Technological University, 2019.

27. Bertschinger, Kevin, "Energy Transfer Between Eu2+ and Mn2+ for Na(Sr,Ba)PO4 and

Ba2Mg(BO3)2", Open Access Master's Thesis, Michigan Technological University,

2019.

28. Videtich, Nick, "Laser Induced Phase Transformations and Fluorescence Measurements

from Nanodiamond Particles", Open Access Master's Thesis, Michigan Technological

University, 2019.

Equipment Maintenance General laboratory maintenance is done by Dr. Kendrick and the costs are covered by the use fee

indexes and overhead indexes:

Pump oil replacements

Rebuilding vacuum pumps

Cleaning vacuum chambers

Maintaining the 150 gallon deionized water system

Maintaining the cooling recirculation loop

Calibration of depositions and etch systems

Stocking the MFF

Removal of waste and surplus equipment

Installation and moving of new equipment

Occasional equipment repairs have been be aided by Michael Chase and Mark Sloat from the

Electrical and Computer Engineering Department.

Rebuilding the microwave source for the CAIBE

Rebuilding the RF power supply for the MARCH

Equipment and facility maintenance that has required external support has included:

Replacement of the MA1100 dicing saw – cost covered by the FY15 shared facility funding

Installation of cooling coils in 430 and 424 to control the temperature in 429, 428, and 424 – cost

covered by the FY16 shared facility funding EV620 – PM – Shared Facility

Purchase of flammable fridges - cost covered by D98077 and D99077

Purchase Filmetrics 3D Profiler – cost covered by FY17 shared facility funding


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Preventive maintenance of the EV620 by ClassOne - Cost covered by FY18 shared facility

funding

Rebuilding the Cryo Compressor for the Denton electron beam deposition system – Cost covered

by D99095 index

Rebuilding the CAIBE sample stage – Cost covered by D99095 index

Installation of the atomic layer deposition system and building a gas room – Cost covered by

VPR, Chemical Department, and MFF overheads

Installation of Carbon nanotube chemical vapor deposition system – Cost covered by VPR,

MuSTI, Parisa Abadi startup, and MFF overheads

Rebuilding of the 4200 semiconductor characterization system – Cost covered by FY19 Shared

facility funding and ECE lab department funds

Facility Changes In 2018, the MFF received a donation of $50K to support upgrading the facility from Leroy

Keranen. Initially we were looking at increasing the HEPA filter space to increase the

cleanroom, but at this stage it would involve a significant modification to the MFF and more

than the amount received. What has been planned involves:

Installing two new fire doors at the end of the corridor – this is to reduce snow and dirty

being brought into the MFF and centralize the gowning for the MFF to one area

Installing an air curtain, storage for bags and outerwear to reduce foreign objects from

entering the MFF

Installing windows in all the doors to improve visibility into the individual labs for safety

reasons

Extending the water cooling loop to 428, to help reduce the noise generated from the

chillers currently in 428

This work was meant to be completed in summer 2019, it has not started due to facilities being

overbooked with projects and issues with the planned changes to the corridor and reducing

access to only MFF users.

Shared Facility Funding Requests Listed below are the funding requests from the shared facility funds. The total amount of funds

has totaled to $259,908, $65,000 was used for deficit, $180,938 was used to maintain and

develop the MFF, and $3,970 has been requested for Dr. Kendrick to visit other facilities and to

attend the University/Government/Industry Micro/Nanotechnology (UGIM) Symposium

(UGIM).


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FY19 Required Funds

Rebuild 2021 C2 Vacuum pump for TRION $1,705

Harrick Plasma expanded plasma cleaner, vacuum gauge assembly,

and quartz sample tray – Replacement for MARCH

$6,610

2 × OLYMPUS Objective Lens UMPlanFl 20x / 0.46 BD – EV620 $4,000

Move spin rinse drier into cleanroom/swap out the three bath

ultrasonic bath with a spare one we have that is more functional/install

a house vacuum system with vacuum controller

$2,000

Keithley Semiconductor Characterization System 4200 $30,005

Travel to Penn State University to evaluate nanoscribe system $1,500

Deficit reduction $10,000

Total requested funds $55,820

FY18 Required Funds

Evoqua – Deionized water tank change and on-site PM and Training $7,751

EVGroup – PM of the EV620 Mask Aligner $14,507

Stitching software for 3D profiler $1,710

Facility modifications $3,000

Support to attend the UGIM 2018 conference $2,470


Total funds requested $49,438

FY17 Required Funds

3D Profiler $53,500


FY16 Required Funds

Temperature Control for M&M Building 429/428/424 $31,050




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FY15 Required Funds

Micro Automation MA 1100 dicing saw replacement $17,500

Card reader door access $7,600



Safety Inspection Safety is critical in the microfabrication facility. Users are dealing with vacuum systems, high pressurized gas bottles, chemicals that are strong acids, bases, and oxidizers. This concoction makes for a very dangerous environment if the user is not trained properly or the facility does not maintain a standard required by the university. An inspection has been completed for Microfabrication facility within Shared Facility: Microfabrication Facility. To view the inspection report please go to: https://labcliq.com/summary/report.cfm?insp_id=422&site_id=87 As a result of this inspection one or more corrective actions have been identified that you are responsible for addressing. To view the corrective actions, certify that they have been completed, request an extension, or reassign them to someone else please go to: https://www.labcliq.com/summary/corrective_actions.cfm?insp_id=422&site_id=87 Peroxide forming chemicals should be checked regularly for the presence of peroxides. Severity: High Completed by: Chito Kendrick (Mar 26, 2019) All PPE that touches exposed skin must be disinfected prior to another person using it. This includes safety glasses, lab coats, gloves, etc. Disinfection can include washing via washer/dryer (lab coats) or disinfecting wipes (safety glasses), etc. Severity: Low Inspector Notes: Working on procedure Action Notes: Completed by: Chito Kendrick (Mar 13, 2019) Completion Notes: Safety glass towelettes were purchased and are available in 431, 432, and 428 - should also reduce fogging from humidity. All other PPE is one time use or does not come in direct contact with skin. New safety glasses, face shields, and chemical aprons were also purchased to replace old and worn PPE. Address any concerns listed. Severity: Low Inspector Notes: Put equipment panels back on Action Notes:


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Completed by: Chito Kendrick (Mar 13, 2019) Completion Notes: Panels are back on when the CAIBE was not under maintenance. Also requested the power cable on the back of the 432 be brought back to the junction box. An MTU emergency response poster is required at the entrance to all laboratories. Inspector Notes: Need to update Action Notes: Completed by: Chito Kendrick (Mar 13, 2019) Completion Notes: Updated all MTU emergency posters Gas cylinders, of any size, must be listed on the emergency response poster on the laboratory door. Inspector Notes: Need to update Action Notes: Completed by: Chito Kendrick (Mar 13, 2019) Completion Notes: Updated all MTU emergency posters

Financial Reports D96399


Capital Cost $ - $ (14,000.00) $ (15,893.99) $ (20,189.43) $ (53,869.09) $ -

Professional Consultants $ - $ - $ - $ - $ - $ (8,304.88)

Services $ (743.50) $ (7,600.00) $ (5,597.93) $ (6,045.28) $ (3,515.54) $ (22,798.72)

Supplies Equipment $ - $ (13,328.51) $ (12,934.30) $ (10,430.01) $ (4,823.20) $ (2,586.60)

Transfer-out $ - $ (10,000.00) $ - $ (17,613.66) $ (9,000.00) $ (61,672.00)

Travel $ - $ (18.02) $ - $ (250.80) $ - $ -

Ex Total $ (743.50) $ (30,946.53) $ (18,532.23) $ (34,339.75) $ (17,338.74) $ (95,362.20)

Gift $ - $ - $ - $ - $ - $ 49,969.00

Transfer $ 16,905.19 $ 35,100.00 $ 31,000.00 $ 71,050.00 $ 75,758.00 $ 31,332.43

In Total $ 16,905.19 $ 35,100.00 $ 31,000.00 $ 71,050.00 $ 75,758.00 $ 81,301.43

Carry Forward $ - $ 16,161.69 $ 6,315.16 $ 2,888.94 $ 19,409.76 $ 23,959.93

Year End $ 16,161.69 $ 20,315.16 $ 18,782.93 $ 39,599.19 $ 77,829.02 $ 9,899.16


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Use Fee Indexes (D98077, D98081, D98095) and Overheads (D99077, D99081, D99095)


Professional Consultants $ - $ (1,527.08) $ - $ - $ - $ -

Grad Student $ (1,861.60) $ (1,250.93) $ (5,599.00) $ (1,028.50) $ - $ -

Fringe $ (5,608.66) $ - $ (10,186.75) $ (10,391.55) $ (10,604.02) $ (10,516.71)

Undergrad Student $ - $ (1,404.00) $ (1,476.00) $ - $ (92.50) $ -

AFSCME S&W $ - $ - $ - $ - $ (154.79) $ -

Scholarship and fellowship $ - $ (1,270.50) $ - $ - $ - $ -

S&W Fringes $ (14,070.90) $ - $ (27,164.97) $ (27,710.45) $ (27,034.73) $ (28,124.60)

Services $ (6,197.15) $ (1,209.17) $ (4,553.30) $ (7,046.78) $ (4,853.43) $ (8,992.42)

Supplies Equipment $ (28,668.66) $ (25,545.06) $ (22,361.88) $ (6,884.76) $ (12,425.19) $ (5,040.54)

Transfer-out $ - $ - $ - $ (17,991.31) $ (1,006.00) $ -

Travel $ - $ - $ (950.20) $ - $ - $ -

Ex Total $ (56,406.97) $ (32,206.74) $ (72,292.10) $ (71,053.35) $ (56,170.66) $ (52,674.27)

Transfer $ 4,710.54 $ 15,883.44 $ 16,302.41 $ 26,777.16 $ 15,382.71 $ 19,692.86

Use Fees $ 18,616.35 $ 23,842.53 $ 102,202.95 $ 45,754.34 $ 31,358.51 $ 33,409.25

In Total $ 23,326.89 $ 39,725.97 $ 118,505.36 $ 72,531.50 $ 46,741.22 $ 53,102.11

Carry Forward $ (28,298.34) $ (61,378.42) $ (53,859.19) $ (5,566.93) $ (4,088.78) $ (13,518.22)

Year End $ (61,378.42) $ (53,859.19) $ (7,645.93) $ (4,088.78) $ (13,518.22) $ (13,090.38)


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D98077


Fringe $ (1,646.30) $ (3,055.96) $ (3,117.52) $ (2,917.80) $ (3,903.42)

Grad Student $ (550.00) S&W Fringes $ (4,221.30) $ (8,149.45) $ (8,313.07) $ (7,481.40) $(10,442.28)

Services $ (1,054.29) $ (179.49) $ (2,593.25) $ (4,405.47) $ (2,261.36) $ (568.63)

Supplies Equipment $(20,074.22) $(10,897.45) $(16,184.18) $ (5,607.02) $ (7,178.45) $ (4,875.65)

Travel $ (950.20) Undergrad Student $ (1,404.00) $ (1,476.00) Ex Total $(26,996.11) $(12,480.94) $(32,959.04) $(21,443.08) $(19,839.01) $(19,789.98)

Transfer $ 5,000.00 $ 1,005.41 $ 113.00 Use Fees $ 11,168.35 $ 8,833.03 $ 59,270.79 $ 31,203.04 $ 12,984.14 $ 12,462.60

In Total $ 11,168.35 $ 13,833.03 $ 59,270.79 $ 32,208.45 $ 13,097.14 $ 12,462.60

Carry Forward $(17,346.25) $(33,174.01) $(31,821.92) $ (3,431.17) $ 7,334.20 $ 592.33

Year End $(33,174.01) $(31,821.92) $ (5,510.17) $ 7,334.20 $ 592.33 $ (6,735.05)


35 | P a g e

D98081


Fringe $ (1,371.91) $ (2,448.42) $ (2,597.93) $ (2,741.19) $ (1,931.04)

S&W Fringes $ (3,517.73) $ (6,529.03) $ (6,927.63) $ (7,028.70) $ (5,163.07)

Services $ (5.69) $ -

Supplies Equipment $ (6,541.22) $ (1,692.13) $ (2,921.96) $ (399.30) $ -

Ex Total $(11,430.86) $ (1,692.13) $(11,899.41) $ (9,924.86) $ (9,775.58) $ (7,094.11)

Transfer $ 1,600.00 $ 5,287.93 $ 1,311.00 $ 11,000.00

Use Fees $ 4,043.00 $ 9,324.50 $ 10,257.14 $ 4,982.98 $ 3,714.25 $ 2,631.14

In Total $ 4,043.00 $ 10,924.50 $ 10,257.14 $ 10,270.91 $ 5,025.25 $ 13,631.14

Carry Forward $ (5,093.58) $(12,481.44) $ (3,249.07) $ (4,891.34) $ (4,545.29) $ (9,295.62)

Year End $(12,481.44) $ (3,249.07) $ (4,891.34) $ (4,545.29) $ (9,295.62) $ (2,758.59)


36 | P a g e

D98095


AFSCME S&W $ (154.79) Fringe $ (2,469.45) $ (4,682.37) $ (4,676.10) $ (4,945.03) $ (4,682.25)

Grad Student $ (1,250.93) S&W Fringes $ (6,331.87) $(12,486.49) $(12,469.75) $(12,524.63) $(12,519.25)

Services $ (4,033.70) $ (19.60) $ (348.90) $ (2,636.44) $ (703.82) $ (1,223.89)

Supplies Equipment $ (1,745.29) $ (8,725.79) $ (3,057.82) $ (808.49) $ (611.97) $ (304.88)

Undergrad Student $ (92.50) Ex Total $(14,580.31) $ (9,996.32) $(20,575.58) $(20,590.78) $(19,032.74) $(18,730.27)

Transfer $ 3,400.00 $ 11,697.97 $ 8,582.00 $ 3,000.00

Use Fees $ 3,405.00 $ 5,685.00 $ 32,675.02 $ 9,568.32 $ 14,660.12 $ 18,315.51

In Total $ 3,405.00 $ 9,085.00 $ 32,675.02 $ 21,266.29 $ 23,242.12 $ 21,315.51

Carry Forward $(10,996.91) $(22,172.22) $(23,083.54) $(10,984.10) $(10,308.59) $ (6,099.21)

Year End $(22,172.22) $(23,083.54) $(10,984.10) $(10,308.59) $ (6,099.21) $ (3,513.97)


37 | P a g e

D99077


Grad Student $ (3,300.00) Professional Consultants $ (1,527.08) Services $ (584.38) $ (4.87) $ (906.00) $ (1,118.82)

Supplies Equipment $ (307.93) $ (2,614.59) $ (197.92) $ (69.95) $ (1,484.77) $ 139.99

Transfer-out $ (540.40) $ (113.00) Ex Total $ (892.31) $ (4,141.67) $ (3,497.92) $ (615.22) $ (2,503.77) $ (978.83)

Transfer $ 2,561.49 $ 2,748.32 $ 1,327.61 $ 1,781.48 $ 1,607.01 $ 873.51

In Total $ 2,561.49 $ 2,748.32 $ 1,327.61 $ 1,781.48 $ 1,607.01 $ 873.51

Carry Forward $ 1,906.09 $ 3,575.27 $ 2,181.92 $ 11.61 $ 1,177.87 $ 281.11

Year End $ 3,575.27 $ 2,181.92 $ 11.61 $ 1,177.87 $ 281.11 $ 175.79

D99081


Services $ (1,300.00) $ (4.72) $ (8.35)

Scholarship and fellowship $ (1,270.50) Transfer-out $ (2,237.71) $ (311.00) Ex Total $ - $ (1,270.50) $ (1,300.00) $ (2,237.71) $ (315.72) $ (8.35)

Transfer $ 900.91 $ 1,785.42 $ 1,382.84 $ 839.15 $ 95.65 $ 284.49

In Total $ 900.91 $ 1,785.42 $ 1,382.84 $ 839.15 $ 95.65 $ 284.49

Carry Forward $ 214.14 $ 1,115.05 $ 1,629.97 $ 1,712.81 $ 314.25 $ 94.18

Year End $ 1,115.05 $ 1,629.97 $ 1,712.81 $ 314.25 $ 94.18 $ 370.32


38 | P a g e

D99095


Fringe $ (121.00) Grad Student $ (1,861.60) $ (1,749.00) Grad Student $ (1,028.50) Services $ (524.78) $ (1,010.08) $ (311.15) $ (971.84) $ (6,072.73)

Supplies Equipment $ (1,615.10) $ (3,150.00) Transfer-out $(15,213.20) $ (582.00) Ex Total $ (2,507.38) $ (2,625.18) $ (2,060.15) $(16,241.70) $ (4,703.84) $ (6,072.73)

Transfer $ 1,248.14 $ 1,349.70 $ 13,591.96 $ 6,165.22 $ 3,674.05 $ 4,534.86

In Total $ 1,248.14 $ 1,349.70 $ 13,591.96 $ 6,165.22 $ 3,674.05 $ 4,534.86

Carry Forward $ 3,018.17 $ 1,758.93 $ 483.45 $ 12,015.26 $ 1,938.78 $ 908.99

Year End $ 1,758.93 $ 483.45 $ 12,015.26 $ 1,938.78 $ 908.99 $ (628.88)

Strategic Plan How do we grow the facility?

Guidance from our users

Being more visible to faculty and students

Updating systems

Making the process easier for external users

Education and outreach

Guidance The MFF does not currently have an advisory committee. There was one when the facility was

initially formed as a use-fee shared facility, but like many other facilities, meetings were not well

attended and resulted in a waste of time for those involved. Being a shared facility there should

be buy in by all departments to guide the facility with possible system acquisitions (shared

facility funds) and what systems should be attempted through NSF:MRI, DURIP, and S-10

proposals. What would make up a good advisory committee is debatable, but also is the question

if we need one. Dr. Kendrick plans on exploring revisiting having a committee, but only if there

are faculty have are interested and committed.

Visibility The microfabrication facility is situated outside of its main departments building (EERC) and on

the 4th floor of a seven-story building (M&M Building). Being visible to faculty and students has

been a challenge. Normally the fabrication (MFF) and characterization (ACMAL) facilities are

selling points and are highly visible. Dr. Kendrick has approached this issue by updating the

website (https://www.mtu.edu/microfabrication), meeting with individual faculty, presenting at

department seminars to faculty and students, giving lab tours to courses, student organizations,

alumni, and faculty candidates, and going to department seminars and coffee hours. By going to

department seminars and meeting faculty individual has resulted in faculty (often mature faculty)

learning about the facility, this also resulted in the submission of an MRI (internal competition)

and possible future collaborations with the PI.

Dr. Kendrick plans on growing the visibility of the MFF in the ECE department (EERC

Building) through a continuous running presentation that could be interactive (will also be placed

on the MFF website), similar to that was done at:

https://envizion3d.com/3d-tours/michigan-tech-unit-operations-lab/skinned/

http://apps.mri.psu.edu/MCL-Xray/

After the planned renovations and further upgrades to the website is to have an open house for

MFF to try and encourage faculty and students to see the facility. The involvement in the above

mentioned events will continue, but focus will shift to try and find more external users.

https://envizion3d.com/3d-tours/michigan-tech-unit-operations-lab/skinned/

http://apps.mri.psu.edu/MCL-Xray/


40 | P a g e

Systems acquisition and maintenance As a teaching facility the MFF has the core systems to educate students on microfabrication and

silicon processing. However, for research we are missing several key systems. This includes (in

preferred order):

1. Sub-micron patterning

2. Deep reactive ion etcher for silicon and glass

3. Maskless laser writer

We also need to replace the Ion beam etcher (CAIBE) as the PLC failed >5 years ago and the

water cooled stage suffered hard water corrosion and a vacuum leak a year ago.

Sub-micron

Our patterning capability is a primary limitation observed by our faculty. We had three faculty

go to other universities or national laboratories to use their electron beam lithography systems to

write sub-micron features, as well as the additional processing required to complete their

samples. The EV620 mask aligner can transfer patterns down to 1 µm, limited by the technology.

There are several options to overcome the sub-micron issue. To achieve 500 nm features system

costs start at $170K, while for <200 nm features system costs >$600K, see Table 1. All of the

highlighted systems below can do 2D and 2.5D patterning (2.5D allows for height variations).

The Nanoscribe system allows for patterning of true 3D structures with feature sizes down to 200

nm. Of the systems identified either a RAITH 150 (could also be used as an SEM) or Nanoscribe

system would fulfill the requirements of the faculty. The Nanoscribe allows for some unique

capabilities that are not available within the NNLA network of universities or at the Lurie

Nanofabrication Facility at the University of Michigan (2nd closes nanofabrication facility, 1st

being Nanocenter at University of Minnesota).

Table 1 – Systems identified to achieve sub-micron features

Type of technology Min. feature

size

System cost Other Information

RAITH 150 -

Electron beam

lithography

10 nm – 2D >$1M + $100K

service contract

DURIP 2018 –

unsuccessful

Nanoscribe – Two-

Photon

Polymerization

200 nm – 2D,

2.5D, and 3D

$600K NSF MRI 2020

ML3 Pro laser writer 400 – 1000 nm –

2D, 2.5D

$100K - $175K

Nanofazor – Atomic

force microscope

10 nm – 2D,

2.5D

$350K - $570K

ESEM with pattern

writer

? $3K – picoammeter

? – beam blanker

System in ACMAL, but

there are several issues

and faculty do not want

to develop the process


41 | P a g e

Dr. Kendrick pursued acquisition of a RAITH 150 electron beam lithography system in 2018

through a Department of Defense (DoD) DURIP proposal (faculty involve were in ECE, BME,

and Physics). The proposal was unsuccessful, but started to get faculty to thinking about these

large equipment grants for the MFF. In 2019, Dr. Kendrick looked at applying for a NIH S10

grant to acquire a Nanoscribe, but the S10 required 3 faculty with NIH funding and only two PIs

could be identified. This was a similar issue for a DURIP in 2019, the number of faculty with

active DoD funding and required the MFF had reduced to one faculty member. Dr. Kendrick is

leading another team of faculty to acquire a Nanoscribe through the NSF major research

instrument (MRI) grant. This team has faculty from ECE, MSE, BME, MEEM, and Physics,

additional faculty have been identified as users and maybe added if the proposal gets selected by

the internal committee.

ACMAL does have a scanning electron microscope (SEM) with a pattern generator system for

using the system as an electron beam lithography system. However, this was on an older SEM

and when it was the faculty that tried to use it had a bad experience. Since Owen Mills moved

the system to the ESEM no one has used the capabilities, due to several reasons:

Overall bad experience the first time

No one is committed to developing the process to determine the system capabilities

A picoammeter needs to be purchased to measure the beam current

There is not a proper beam blanking system so when jumping between patterns you will

write additional features

Dr. Kendrick looked at purchasing the picoammeter and developing the process recipes during

summer of 2019, but the shared facilities were not received during summer so this has been put

on hold. An agreement would need to be made with MFF and ACMAL to allow for a reduced

rate, or no cost, to do the development of the process and demonstrate that this is a feasible

approach for doing submicron lithography to the faculty.

Another avenue for equipment is through a NSF EPSCoR Research Infrastructure Improvement

Program. This could be something that both the MFF and ACMAL are involved in, but it would

need to be supported by a much broader group of faculty and University support.

User base Dr. Kendrick did a cost analysis when he first started and determined the MFF needed to bring in

$50K-$60K per year to break even. In the past two years we have had revenue of $35K range

and $10K-$15K is added from the shared facility funds to maintain a zero balance. How we get

to the $50K revenue limit is going to depend on the usage. Increasing the usage is going to have

to be a combination of internal and external usage.

Internal usage reductions has been be due to:

1. PI runs out of funding and unable to bring in funding to obtain preliminary results

2. PI cannot complete their research as the MFF does not have the right system so they go

outside of the university to do their research

3. PI wants their own systems and does not want to pay use fees


42 | P a g e

4. Faculty leaving or taking up administration positions are not replaced with

experimentalists, or faculty that need the MFF

1) PI runs out of funding and unable to bring in funding to obtain preliminary results: We

have considered offering up seed funding for this type of case. Overhead (when available) or

funds from the shared facility fund could be offered up as seed funding that can only be used to

cover the use fees in the MFF. Supplies and staff time would have to be covered by the faculty

member. These seed projects would have to be specifically for faculty that have demonstrated

the ability to obtain external funding. These seed projects are very high risk and the funds have

to stay in the MFF else there is no reason to do it. PI would need to demonstrate a clean path

towards a fundable proposal. An issue with this is the faculty may not have a student that has

used the MFF so progress will depend on getting trained or having Dr. Kendrick do the

processing. An example of this is on Virginia Tech website for their Nanoscale Characterization

and Fabrication Laboratory - https://www.ncfl.ictas.vt.edu/ncflminigrant.html

2) PI cannot complete their research as the MFF does not have the right system so they go

outside of the university to do their research: If the PI has an actively funded project from

DOD, NIH, NSF the PI needs to talk to their program manager to get support for those agencies

equipment grants. Then the MFF can work with the PIs to apply for the system they need.

3) PI wants their own systems and does not want to pay use fees: This may require educating

the faculty about how the shared facilities can support their research and how they should get a

higher rate of return then going alone. There is often times when they should have a piece of

equipment in their own facility if it will cause cross contamination.

4) Faculty leaving or taking up administration positions are not replaced with

experimentalists or faculty that need the MFF: With several key faculty go into

administration positions and no new faculty doing experimental work the pool of internal users

has reduced. This came up at the NNLA meeting and no answers came up to help resolve this

issue. The hiring of faculty is up to departments so if they want to go a different direction what

can we do.

External usage is how most facilities reduce short falls in revenue from internal user. External

users should be paying 2-3 times the internal rate so that we are competitive with industry and

other universities. Therefore an external user could bring in 3 times as much revenue as an

internal user. The issue for Michigan Tech. is its location, with very little technology companies

in close proximity external users have to come from outside of the region. The external users that

have been using the MFF are either student alumni (University of Calgary), startup companies

from Michigan Tech (MicroDevice Engineering, and IRTelemetrics), faculty in the NNLA

network (faculty member from University of MN), and recently we have been asked by Plexus to

do some work with them (they are currently setting up a facility in the ECE department).

How do we grow the external usage?

1. Have good promotional documentation we can send to prospective users

https://www.ncfl.ictas.vt.edu/ncflminigrant.html


43 | P a g e

2. Improve the process for paying for usage and have set external rates that already have

F&A included

3. Educate marketing about the MFF capabilities

4. Contacting alumni in companies that may require the MFF capabilities

5. Expanding to companies that are not alumni

Education and outreach: One aspect that Dr. Kendrick would like to grow is the use of the MFF for education and

outreach – this would fit into a very long term plan to grow the user base.EE5471 – is already

available in both fall and spring semester. Currently it is limited to graduate students, but Dr.

Kendrick has allowed several undergraduate students to take the course. As the course is focused

on the processing and not on the devices physics there is no prerequisites.

Summer Youth Program – In the past Dr. Kendrick has been involved with SYP in MSE for only

half a day. Summer of 2020 Dr. Kendrick will be running a full week SYP event using the

process developed in the EE5471 laboratory class as the main focus and then smaller projects the

students can do while waiting for process steps to finish, as well as visiting other user

laboratories.

Conclusion The use of the MFF is showing signs of slowing down based on the reduced internal revenue for

the last two years. Several reason maybe the reason for this, but the two that stand out are

1) Key pieces of equipment need to be replaced to retain users; however the push to go after

equipment grants is not coming from the faculty, but from Dr. Kendrick. The main

system needed is a submicron capability and a Nanoscribe does that and more (MRI

internal proposal submitted)

2) The pool of faculty that currently needs the MFF seems to be getting smaller, due to lack

of funding or faculty hiring. Dr. Kendrick is working on trying to increase external users

to counter this while working internally to bring back faculty.

References [1] – National Nanotechnology Coordinated Infrastructure, Annual Report (Year 3), April 1,

2018 – March 31, 2019, NSF Award 1626153, https://www.nnci.net/nnci-annual-report, p91.

[2] – National Nanotechnology Coordinated Infrastructure, Annual Report (Year 3), April 1,

2018 – March 31, 2019, NSF Award 1626153, https://www.nnci.net/nnci-annual-report, p83.

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