Proceedings of the Second International Conference

New Diamond Science and Technology Washington, DC September 23-27, 1990

Editors: Russell Messier Pennsylvania State University University Park, PA

Jeffrey T. Glass North Carolina State University Raleigh, NC

James E. Butler Naval Research Laboratory Washington, DC

Rustum Roy Pennsylvania State University University Park, PA

MIR1SI Materials Research Society-

Pittsburgh, Pennsylvania

Contents

PREFACE

MATERIALS RESEARCH SOCIETY CONFERENCE PROCEEDINGS

PART I: VAPOR PHASE DIAMOND: GENERAL, THEORY, MODELING

**PHYSICO-CHEMICAL FUNDAMENTALS OF SYNTHESIS OF DIAMOND FROM THE GAS PHASE 3

B.V. Derjaguin and D.V. Fedoseev

*DIAMONDLIKE FILMS: COMPOSITION, STRUCTURE AND RELATIONSHIP TO CRYSTALLINE DIAMOND 11

John C. Angus, Yaxin Wang, and Richard W. Hoffman

»HYDROGEN DESORPTION AND SUBSEQUENT RECONSTRUCTION ON NATURAL DIAMOND SURFACES 21

Glenn D. Kubiak, A.V. Hamza, R.H. Stulen, E.C. Sowa, K.W. Kolasinski, and M.A. Van Hove

»THEORETICAL INVESTIGATIONS OF ADSORBATE INTERACTIONS AT THE DIAMOND-VAPOR INTERFACE 29

M.R. Pederson, K.A. Jackson, and W.E. Pickett

MOLECULAR-DYNAMICS SIMULATIONS OF THE REACTION OF ATOMIC HYDROGEN WITH DIAMOND SURFACES 39

D.W. Brenner, B.I. Dunlap, J.W. Mintmire, R.C. Mowrey, and C.T. White

AB INITIO QUANTUM CHEMICAL STUDY OF HYDROGEN ABSTRACTION FROM ISOBUTANE CONSTRAINED TO MODEL A DIAMOND SURFACE 45

Michael Page and Donald W. Brenner

A LOCAL DENSITY APPROXIMATION STUDY OF DANGLING BONDS ON THE DIAMOND (111) SURFACE 51

Koblar A. Jackson

FIRST-PRINCIPLES SIMULATIONS OF DIAMOND SURFACE FORMATION VIA RADICAL ADDITION 57

J.W. Mintmire, D.W. Brenner, B.I. Dunlap, R.C. Mowrey, and C.T. White

THEORY OF NITROGEN IN DIAMOND: THE SUBSTITUTIONAL ATOM, A-CENTRE AND PLATELET 63

P.R. Briddon, M.I. Heggie, and R. Jones

»Invited Paper »»Keynote Speaker

PART II: NATURAL AND SYNTHETIC HP/HT DIAMOND

»KINETICS OF DIAMOND CRYSTALS GROWTH AT HIGH STATIC PRESSURE 71

N.V. Novikov, S.A. Ivakhnenko, and M.Ya. Katsay

FORMATION OF DIAMONDS OUT OF HYDROCARBON GAS IN THE EARTH'S MANTLE 81

Jan Krason, Andrzej Szymanski, and Sviatoslav S. Savkevitch

MULTISEEDS HP/HT LPE OF DIAMOND 93 Andrzej Szymanski, Leszek Hozer, and Alicja Niedbalska

MORPHOLOGY OF SYNTHETIC DIAMONDS GROWN FROM CARBONATE SOLVENT-CATALYSTS 105

Hisao Kanda, Minoru Akaishi, and Shinobu Yamaoka

SYNTHESIS OF DIAMOND USING NON-METALLIC CATALYSTS 111 Minoru Akaishi, Hisao Kanda, and Shinobu Yamaoka

DIAMOND FORMED AT LOW PRESSURES FROM ASHED RESIN PRECURSORS 117

C. John Brannon and Stephen L. McCollum

*THE THERMOPHYSICAL PROPERTIES OF DIAMOND AT VERY HIGH PRESSURES AND TEMPERATURES 123

J.W. Shaner

TEMPERATURE AND LOADING RATE EFFECTS ON THE DIAMOND STRENGTH 129

N.V. Novikov, Ju.V. Sirota, and V.l. Mal'nev

THE FRACTURE TOUGHNESS OF MONOCRYSTALLINE DIAMONDS 135 N.V. Novikov, S.B. Dub, and V.l. Mal'nev

DETECTION OF IMPURITIES IN DIAMOND GROWN IN THE METALLIC SOLVENT BY X-RAY FLUORESCENCE USING SYNCHROTRON RADIATION 143

Masao Wakatsuki, S. Hayakawa, S. Aoki, Y. Gohshi, and A. Iida

EFFECTS OF NITROGEN INCLUSIONS ON THE MAIN PHYSICAL PROPERTIES OF DIAMOND 149

Yu.A. Klyuev, A.M. Naletov, and V.l. Nepsha

SYNTHESIS OF FINE GRAINED POLYCRYSTALLINE DIAMOND COMPACTS 155

Shiming Hong, Minoru Akaishi, Toshikazu Osawa, and Shinobu Yamaoka

FORMATION OF BRIDGES BETWEEN DIAMOND PARTICLES DURING SINTERING IN MOLTEN COBALT MATRIX 161

Jong-Ku Park, M. Akaishi, S. Yamaoka, 0. Fukunaga, K.Y. Eun, and Duk N. Yoon

*Invited Paper

WEAR DURABILITY OF COMPACTS SINTERED FROM FLAME-DEPOSITED SYNTHETIC DIAMOND 165

A.W. Webb

APPLICATION OF CVD DIAMOND GRAINS FABRICATED BY ROLL MILLING TO GRINDING WHEELS 173

Naoto Ohtake, Yasuyuki Mashimo, and Masanori Yoshikawa

DISPERSION REINFORCED DICING BLADE WITH WHISKER 179 N. Oikawa and T. Takahashi

DIAMONDS AND THEIR MINERAL INCLUSIONS FROM THE PRAIRIE CREEK INTRUSIVES, ARKANSAS 193

Chien-Lu Chan

PART III: GAS PHASE AND SURFACE MEASUREMENTS

METHYL RADICAL MEASUREMENTS IN FILAMENT-ASSISTED DIAMOND CVD 201

F.G. Celii and J.E. Butler

IN-SITU DETECTION OF GAS PHASE ATOMIC HYDROGEN IN A DC PLASMA USING THIRD HARMONIC GENERATION 207

Helen R. Thorsheim, Francis G. Celii, James E. Butler, Linda S. Piano, and J. Michael Pinneo

IN-SITU FT-IR DETECTION OF STABLE COMPOUNDS IN THE MICROWAVE PLASMAS OF VARIOUS SOURCE GASES FOR VAPOR PHASE DIAMOND GROWTH 213

T. Mitomo, T. Ohta, E. Kondoh, K. Ohtsuka, and Y. Habu

TOMOGRAPHIC RECONSTRUCTION OF FT-IR MEASUREMENTS OF AN OXYGEN-ACETYLENE FLAME DURING DIAMOND FILM GROWTH 219

Philip W. Morrison, Jr., J.E. Cosgrove, J.R. Markham, and P.R. Solomon

ON THE DEVELOPMENT OF IN-SITU RAMAN ANALYSIS FOR PLASMA DEPOSITED DIAMOND 225

Mark A. Cappelli and H. Herchen

DC DISCHARGE FOR DIAMOND GROWTH 233 H.N. Chu, E.A. Den Hartog, A.R. Lefkow, J. Jacobs, L.W. Anderson, M.G. Lagally, and J.E. Lawler

DETECTION OF RADICAL AND STABLE GAS-PHASE SPECIES IN DIAMOND DEPOSITION SYSTEMS USING THE MOLECULAR BEAM MASS SPECTROMETRY TECHNIQUE 239

Wen L. Hsu and D.M. Tung

DEPOSITION OF DIAMOND FILMS AND MASS SPECTROMETRY OF EXHAUST GASES 245

Curtis E. Johnson, Wayne A. Weimer, and Frank M. Cerio

DIAGNOSTICS OF A DIAMOND-DEPOSITING DC-ARC-JET PLASMA 251

George A. Raiche, Gregory P. Smith, and Jay B. Jeffries

GAS PHASE CHEMISTRY IN DIAMOND-PRODUCING PLASMAS 257 Linda S. Piano, David A. Stevenson, and John R. Carruthers

ELECTRICAL PROBING OF DIAMOND GROWTH IN FILAMENT-ASSISTED CVD 263

Y. Hirose, H. Takehana, M. Mitsuizumi, J. Moriguchi, and Y. Horie

GROWTH OF DIAMOND THIN FILMS BY STEP CVD AND PLASMA DIAGNOSIS 269

Yang Peichun, Qi Lichang, and Lu Erkai

PART IV: GAS PHASE AND SURFACE CHEMISTRY

•THERMOCHEMISTRY ON THE HYDROGENATED DIAMOND (111) SURFACE 277

Stephen J. Harris, David N. Belton, and Richard J. Blint

•THERMODYNAMIC ISSUES IN THE NUCLEATION AND VAPOR PHASE GROWTH OF DIAMOND 291

W.A. Yarbrough

MECHANISMS OF DIAMOND HOMOEPITAXY BY HOT-FILAMENT CVD: CARBON-13 STUDIES 307

C. Judith Chu, Mark P. D'Evelyn, Robert H. Hauge, and John L. Margrave

DIAMOND POWDER FORMATION FROM THE GAS PHASE 313 W. Howard, M. Frenklach, K.E. Spear, D. Huang, J. Yuan, R. Kematick, R. Koba, and A.W. Phelps

FLUORINATION OF DIAMOND (100) BY ATOMIC AND MOLECULAR BEAMS 321

Andrew Freedman and Charter D. Stinespring

A MODEL OF DIAMOND DEPOSITION FROM HYDROCARBON-HYDROGEN MIXTURES ACTIVATED BY THERMAL METHODS 327

W. Piekarczyk and W.A. Yarbrough

NUMERICAL MODELING OF FILAMENT-ASSISTED DIAMOND GROWTH 335 D.G. Goodwin and G.G. Gavillet

RELATIVE IMPORTANCE OF DIFFERENT SPECIES IN THE CVD OF DIAMOND 341

W.A. Yarbrough, K. Tankala, and T. DebRoy

DC GLOW DISCHARGE MODELING APPLIED TO DIAMOND FILM GROWTH PLASMA REACTORS 347

M. Surendra, David B. Graves, and Linda S. Piano

•Invited Paper

STUDY OF DEPOSITION MECHANISM OF DIAMOND BY JET-FEED METHOD 353

Tetsuji Yasuda, K. Miyamoto, M. Ihara, and H. Komiyama

SPECIES CONVECTION AND DIFFUSION IN THE HOT FILAMENT ASSISTED CHEMICAL VAPOR DEPOSITION OF DIAMOND IN THE PRESENCE AND ABSENCE OF APPLIED EMF 359

T. DebRoy, K. Tankala, W.A. Yarbrough, and Hou Li

NOVEL SYNTHESIS ROUTES FOR DIAMOND FILMS IN A HEATED FLOWTUBE 365

L.R. Martin and M.W. Hill

EPITAXIAL GROWTH OF DIAMOND FROM THE GAS PHASE 371 Yoichiro Sato, Isamu Yashima, Hideki Fujita, Toshihiro Ando, and Mutsukazu Kamo

PART V: NUCLEATION

CEELS AS A PROBE OF THE CARBIDE TO GRAPHITE TRANSFORMATION ON Ni 379

David E. Ramaker

SOME OBSERVATIONS ON NUCLEATION SITES IN DIAMOND GROWTH BY PLASMA CVD 385

S. Yugo, A. Izumi, T. Kanai, T. Muto, and T. Kimura

SURFACE AND INTERFACE EFFECTS IN THE NUCLEATION AND GROWTH OF DIAMOND 391

K.V. Ravi, A. Joshi, and H.S. Hu

HYDROCARBON OIL-BASED ACCELERATION OF CVD-DIAMOND NUCLEATION 397

Pehr E. Pehrsson and A.A. Morrish

INFLUENCE OF SUBSTRATE PREPARATION UPON THE NUCLEATION OF DIAMOND THIN FILMS 403

Paul A. Dennig and David A. Stevenson

STUDY OF INTERFACIAL STRUCTURE OF DIAMOND FILM 409 Xuan Zhenwu, Qi Lichang, Yang Peichun, Pu Xin, and Hou Li

\ NUCLEATION DENSITY AND SELECTIVE DEPOSITION OF DIAMOND ON SILICON WAFERS 415

Zengsun Jin, San Yu, Xianyi Lu, Fuping Huang, and Guangtian Zou

MICROFABRICATION OF DIAMOND FILMS: SELECTIVE DEPOSITION AND ETCHING 419

K. Kobashi, A. Nakaue, Jeffrey T. Glass, and Ian M. Buckley-Golder

SELECTED-AREA HOMOEPITAXIAL GROWTH AND OVERGROWTH ON Si PATTERNED DIAMOND SUBSTRATES 425

R.A. Rudder, J.B. Posthill, G.C. Hudson, D. Malta, R.E. Thomas, R.J. Markunas, T.P. Humphreys, and R.J. Nemanich

PART VI: DEPOSITION PROCESSES HALOGEN-ASSISTED CHEMICAL VAPOR DEPOSITION OF DIAMOND 433

Donald E. Patterson, Benjamin J. Bai, С. Judith Chu, Robert H. Hauge, and John L. Margrave

POSSIBLE CONNECTION OF LASER-IRRADIATION SOLID PHASE SYNTHESIS TO CVD DIAMOND PROCESSES 439

D.V. Fedoseev, B.V. Derjaguin, and R. Roy FILAMENT ACTIVITY AND GROWTH OF DIAMOND IN MIXTURES OF CH4/H2 AND 0 2 443

M. Sommer and F.W. Smith INFLUENCE OF FILAMENT GEOMETRY ON HOT FILAMENT CVD GROWTH OF DIAMOND FILMS 449

E.N. Farabaugh, A. Feldman, and L. Robins EXPERIMENTAL STUDIES OF BIAS ASSISTED CVD GROWTH OF DIAMOND 455

F.P. Doty and W.A. Jesser THE GROWTH OF DIAMOND FILMS USING A DC-BIASED HOT FILAMENT TECHNIQUE 461

Hou Li, M. Mecray, W. Yarbrough, and X.H. Wang

DEPOSITION OF DIAMOND CRYSTAL AT SUBSTRATE TEMPERATURE LOWER THAN 500°C 467

K. Bando, K. Kamo, T. Ando, and Y. Sato

EFFECTS OF CARBON DIOXIDE AND OXYGEN ON DIAMOND SYNTHESIS USING CO + H2 MIXED GAS

N. Hayashi, Y. Etoh, T. Kazahaya, S. Katsumata, and M. Aketagawa

473

MORPHOLOGY AND GROWTH PROCESS OF SINGLE CRYSTALLINE DIAMOND GROWTH BY MICROWAVE PLASMA CVD IN THE CO-H2 SYSTEM 479

Hideaki Itoh, Tadashi Nakamura, Hiroyasu Iwahara, and Hiromichi Sakamoto

CRYSTAL GROWTH BY DC PLASMA JET CVD 485 Ken-Ichi Sasaki, K. Kurihara, and M. Kawarada

PREPARATION OF DIAMOND FILM BY DC THERMAL PLASMA TORCH 491 Won Kyu Kim and Ki-Woong Whang

DIAMOND SYNTHESIS IN A 50 KW INDUCTIVELY COUPLED ATMOSPHERIC PRESSURE PLASMA TORCH 497

T.G. Owano, D.G. Goodwin, C.H. Kruger, and M.A. Cappelli

STUDIES OF DIAMOND DEPOSITION WITH 1-D AND 2-D COMBUSTION FLAMES 503

K.A. Snail, D.B. Oakes, J.E. Butler, and L.M. Hanssen

AN INVESTIGATION OF DIAMOND SYNTHESIS IN AN OXYGEN-ACETYLENE DIFFUSION FLAME 511

M.A. Cappelli DEPOSITION OF LARGE DIAMOND PARTICLES IN PREMIXED OXYACETYLENE FLAME 517

Yoshiaki Morinishi and Tomio Suzuki CHARACTERIZATION AND SCALING-UP OF DIAMOND FILMS DEPOSITED FROM OXY-ACETYLENE FLAMES 523

Y. Tzeng, R. Phillips, C. Cutshaw, and T. Srivinyunon

TECHNICAL BARRIERS TO DIAMOND FILM SCALE-UP 529 L.K. Bigelow, N.M. Henderson, and R.L. Woodin

PART VII: CHARACTERIZATION •GROWTH AND CHARACTERIZATION OF HIGH QUALITY CVD DIAMONDS 537

Y. Sato, C. Hata, T. Ando, and M. Kamo GROWTH SECTORS OF CVD DIAMONDS 549

Andrzej R. Badzian, Teresa Badzian, Xiao Hong Wang, and Thomas M. Hartnett

OPTICAL AND SYNCHROTRON X-RAY DIFFRACTOMETRIC STUDIES OF NITROGEN IMPURITY IN SYNTHETIC DIAMOND 557

A.R. Lang, A.P.W. Makepeace, M. Moore, and W. Wierzchowski

А ТЕМ STUDY OF LAYERS GROWN ON COPPER USING CARBON-ION-IMPLANTATION 561

Johan F. Prins and Horace L. Gaigher HIGH RESOLUTION ТЕМ OBSERVATIONS OF CVD DIAMOND FILMS 567

Noribumi Kikuchi, Y. Ohsawa, Y. Tamou, H. Eto, and H. Yamashita

TEXTURE DEVELOPMENT IN DIAMOND FILMS GROWN BY HOT FILAMENT CVD PROCESSES 575

R.E. Clausing, L. Heatherly, E.D. Specht, and K.L. More

SURFACE MORPHOLOGIES AND PHOTOLUMINESCENCE OF DIAMOND FILMS DEPOSITED IN A HOT FILAMENT REACTOR 581

T. Srivinyunon, R. Phillips, C. Cutshaw, A.J. Joseph, and Y. Tzeng

MICROSTRUCTURAL STUDIES BY ТЕМ OF DIAMOND FILMS GROWN BY COMBUSTION FLAME 587

G.-H.M. Ma, Y. Hirose, S. Amanuma, M. McClure, J.T. Prater, and J.T. Glass

•Invited Paper

THE MORPHOLOGY OF DIAMOND DEPOSITED BY ACETYLENE-OXYGEN TORCH 593

Wook-Seong Lee, Young-Joon Baik, and Kwang Yong Eun

CHARACTERIZATION OF SUBSTRATE-FILM INTERFACES FOR CVD DIAMOND DEPOSITED ON FUSED QUARTZ AND SILICON SUBSTRATES 599

Alon Hoffman, Steven Prawer, Sue-Anne Stuart, and Rafael Manory

OBSERVATION OF LATERAL GROWTH BETWEEN DIAMOND DOMAINS BY SCANNING TUNNELING MICROSCOPY 607

K.F. Turner, B.R. Stoner, L. Bergman, J.T. Glass, and R.J. Nemanich

SCANNING TUNNELING MICROSCOPY OF BORON-DOPED DIAMOND FILMS AND NUCLEI 613

M.P. Everson, M.A. Tamor, and C.H. Wu

SURFACE ROUGHNESS EVALUATION OF DIAMOND FILMS GROWN ON SUBSTRATES WITH A HIGH DENSITY OF NUCLEATION SITES 619

Lawrence H. Robins, Eric P. Whitenton, Edward N. Farabaugh, and Albert Feldman

GROWTH AND ANALYSIS OF PLASMA DEPOSITED DIAMOND FILMS 625 P. Southworth, A.V. Hetherington, A.H. Lettington, C. Smith, and C.J.H. Wort

SOLID-STATE HYDROGEN PROFILES IN CVD DIAMOND FILMS 631 F.G. Celii, A.J. Purdes, B.E. Gnade, and D.L. Weathers

SIMS ANALYSIS OF EPITAXIALLY GROWN CVD DIAMOND 637 Mutsukazu Kamo, Hisayoshi Yurimoto, Toshihiro Ando, and Yoichiro Sato

PART VIII: PROPERTIES: OPTICAL, VIBRATIONAL, RAMAN

•OPTICAL PROPERTIES OF DIAMOND AT PRESSURES COMPARABLE TO THE EARTH'S CENTER 645

Arthur L. Ruoff, Yogesh K. Vohra, and Serge Desgreniers

»OPTICAL CENTRES IN SYNTHETIC DIAMOND - A REVIEW 659 Alan T. Collins

OPTICAL PROPERTIES OF DIAMONDS WITH AN UNUSUALLY HIGH HYDROGEN CONTENT 671

Emmanuel Fritsch, Ken Scarratt, and Alan Collins

OPTICAL PROPERTIES OF SOME NATURAL-COLOR AND LABORATORY-IRRADIATED GREEN TO BLUE DIAMONDS 677

Emmanuel Fritsch and James E. Shigley

*CATHODOLUMINESCENCE AND X-RAY TOPOGRAPHY OF HPHT DIAMONDS 683 A.R. Lang and M. Moore

•Invited Paper

CATHODOLUMINESCENCE, RAMAN SPECTROSCOPY AND INFRARED ABSORPTION STUDIES OF DIAMOND FILMS 695

B.G. Yacobi, A.R. Badzian, and T. Badzian A COMPARISON OF THE ANNEALING OF SPECTRAL FEATURES IN PLASMA-DEPOSITED POLYCRYSTALLINE DIAMOND FILMS AND NATURAL DIAMOND 703

J. Ruan, W.J. Choyke, and W.D. Partlow A SPECTROSCOPIC STUDY OF THE H2 CENTRE IN SYNTHETIC DIAMOND 709

Simon C. Lawson, Alan T. Collins, Shuichi Satoh, and Hisao Kanda

DOSE DEPENDENT EFFECTS IN TIME DEPENDENT PERTURBED ANGULAR DISTRIBUTION MEASUREMENTS IN DIAMOND 715

S.H. Connell, E. Sideras-Haddad, V.V. Naicker, K. Bharuth-Ram, J.P.F. Sellschop, M.C. Stemmet, С.С.P. Madiba, and H. Appel

MICRO-PHOTOLUMINESCENCE STUDIES OF DIAMOND FILMS 723 J.A. Freitas, Jr., U. Strom, J.E. Butler, and K.A. Snail

INTRINSIC PHOTOCONDUCTIVITY IN POLYCRYSTALLINE CVD DIAMOND FILMS AND IN NATURAL AND SYNTHETIC BULK DIAMONDS 729

L.S. Pan, D.R. Kania, P. Pianetta, O.L. Landen, and M. Landstrass

SPECTROSCOPIC ELLIPSOMETRY STUDY OF THE OPTICAL PROPERTIES OF THIN FILM DIAMOND AND DIAMOND SURFACES IN REAL TIME DURING ION BEAM ETCHING 735

Yue Cong, R.W. Collins, R. Messier, K. Vedam, G.F. Epps, and H. Windischmann

•RAMAN CHARACTERIZATION OF DIAMOND FILM GROWTH 741 R.J. Nemanich, L. Bergman, Y.M. LeGrice, and R.E. Shroder

SURFACE ENHANCED RAMAN SPECTROSCOPY OF DIAMOND AND RELATED CARBON MATERIALS 753

Diane S. Knight, Lawrence Pilione, and William B. White

GROWTH OF DIAMOND FROM VAPOR PHASE AND CHARACTERIZATION BY RAMAN, SCANNING ELECTRON MICROSCOPY, AND X-RAY PHOTOELECTRON SPECTROSCOPY 759

M. Green, R.C. Hyer, S.C. Sharma, K.K. Mishra, T.D. Black, A.R. Chourasia, and D.R. Chopra

PART IX: PROPERTIES: MECHANICAL, CHEMICAL, THERMAL TENSILE STRENGTH AND BIAXIAL YOUNG'S MODULUS OF DIAMOND FILMS 767

Henry Windischmann, Glenn F. Epps, and Gerald P. Ceasar

•Invited Paper

FRACTURE CHARACTERIZATION OF CHEMICAL VAPOR AND COMBUSTION DEPOSITED DIAMOND 773

H.A. Hoff, A.A. Morrish, K.A. Snail, J.E. Butler, and B.B. Rath

MECHANICAL PROPERTIES EVALUATION OF THIN COATINGS 779 N.V. Novikov, M.A. Voronkin, and S.B. Dub

THE TRIBOLOGICAL BEHAVIOUR OF DIAMOND COATINGS 785 Ian P. Hayward and Irwin L. Singer

PROPERTIES OF DIAMOND MEMBRANES FOR X-RAY LITHOGRAPHY MASKS 791

Henry Windischmann, Glenn F. Epps, Gerald P. Ceasar, and Nadim I. Maluf

FLEXIBLE DIAMOND COMPOSITE FILMS FOR SHEET METAL COATING APPLICATIONS 797

T.P. Ong and R.P.H. Chang •LOW-PRESSURE DIAMOND COATINGS FOR TOOLS AND WEAR PARTS 805

Benno Lux and Roland Haubner INFLUENCE OF MICROSTRUCTURE AND RESIDUAL STRESS ON THE CUTTING PERFORMANCE OF DIAMOND COATED TOOLS 809

Ingrid Reineck, Staffan Söderberg, Kenneth Westergren, and Hamid Shahani

A PERFORMANCE TEST OF DIAMOND COATED INSERTS USED FOR TURNING A HIGH Si-Al ALLOY 815

M. Murakawa, S. Takeuchi, Y. Hirose, K. Komaki, and M. Yanagisawa

AN INVESTIGATION OF THE OXIDATION BEHAVIOR OF CVD DIAMOND FILMS 821

Wei Zhu, Xiao Hong Wang, Andrzej R. Badzian, and Russell Messier

ETCHING OF HFCVD DIAMOND FILMS IN AIR, NITROUS OXIDE AND ARGON 827

K. Tankala and T. DebRoy ECR PLASMA ETCHING OF NATURAL TYPE H a AND SYNTHETIC DIAMONDS 833

Charles P. Beetz, Jr., Brian A. Lincoln, Bo Yang Lin, and Soo Нее Tan

•ISOTOPE DEPENDENCE OF THE THERMAL CONDUCTIVITY OF DIAMOND 839

J.W. Bray and T.R. Anthony THE CURIOUS CASE OF CARBON-12 851

Russell seitz PROPERTIES OF DIAMONDS WITH VARYING ISOTOPIC COMPOSITION 857

William Banholzer, Thomas Anthony, and Robert Gilmore

•Invited Paper

THERMAL WAVE MEASUREMENT OF ISOTOPIC EFFECTS IN POLYCRYSTALLINE AND BULK DIAMOND MATERIALS 863

R.W. Pryor, Lanhua Wei, P.K. Kuo, R.L. Thomas, T.R. Anthony, and W.F. Banholzer

THERMAL PROPERTIES OF DIAMOND SINGLE CRYSTALS WITH VARYING ISOTOPIC COMPOSITION 869

Donald T. Morelli, G.W. Smith, J. Heremans, W.F. Banholzer, and T.R. Anthony

TEMPERATURE DEPENDENCE OF THE THERMAL CONDUCTIVITY OF TYPE IIA DIAMOND CRYSTALS 875

Lanhua Wei, P.K. Kuo, and R.L. Thomas

THERMAL WAVE PROPAGATION IN DIAMOND FILMS 881 A. Feldman, H.P.R. Frederikse, and S.J. Norton

THERMAL CONDUCTIVITY OF POLYCRYSTALLINE DIAMONDS 887 V.l. Nepsha, V.R. Grinberg, Yu.A. Klyuev, N.A. Kolchemanov, and A.M. Naletov

THE PREPARATION OF VAPOR GROWN DIAMOND HEAT SINKS FOR LASER DIODE ARRAYS 893

Guangtian Zou, San Yu, Fanghai Zhao, Zengsun Jin, and Xianyi Lu

PART X: PROPERTIES: ELECTRICAL

•ELECTRICAL APPLICATIONS OF CVD DIAMOND FILMS 901 Naoji Fujimori

SOME PECULIARITIES OF DOPING BY BORON AND ELECTRICAL CONDUCTIVITY OF DIAMOND SYNTHESIZED UNDER LOW AND ULTRA-HIGH PRESSURES 909

B.V. Spitsyn, A.E. Alexenko, G.A. Sokolina, and V.A. Laptev

SYNTHESIS OF N-TYPE SEMICONDUCTIVE DIAMOND FILM AND FABRICATION OF A PN JUNCTION DIODE 917

Ken Okano, Hideo Kiyota, Tatsuya Iwasaki, Tateki Kurosu, Masamori Iida, and Terutaro Nakamura

N-TYPE DOPING AND DONOR INCORPORATION IN DIAMOND 923 J. Bernholc, S.A. Kajihara, and A. Antonelli

ANNEALING OF IMPLANTATION DAMAGE IN SINGLE CRYSTAL DIAMOND 929

John D. Hunn, M.L. Swanson, E.A. Hill, N.R. Parikh, and G. Hudson

BORON DOPING OF DIAMOND VIA SOLID STATE DIFFUSION 937 W. Tsai, M. Delfino, L-Y. Ching, G. Reynolds, D. Hodul, and C.B. Cooper III

•Invited Paper

SELECTIVE GROWTH OF BORON-DOPED POLYCRYSTALLINE DIAMOND THIN FILMS 943

R. Ramesham, T. Roppel, B.F. Hajek, C. Ellis, and B.H. Loo

SEMICONDUCTOR DEVICE DEVELOPMENT USING SELECTIVELY GROWN THIN-FILM DIAMOND 949

S.A. Grot, C.W. Hatfield, G.Sh. Gildenblat, A.R. Badzian, and T. Badzian

DIAMOND/METAL INTERFACES: SCHOTTKY BARRIERS AND CHEMICAL BONDING 957

Steven C. Erwin and Warren E. Pickett

LIGHT INDUCED CURRENT SWITCHING IN Al/DIAMOND/SILICON DIODES 963

David G.K. Jeng, H.S. Tuan, Robert F. Salat, and Glenn J. Fricano

BORON DOPED AND UNDOPED DIAMOND/SILICON HETEROSTRUCTURE APPLICATIONS 969

M.I. Landstrass, D. Moyer, S. Yokota, and M.A. Piano

CHARACTERIZATION OF BORON-DOPED DIAMOND EPITAXIAL FILMS AND APPLICATIONS FOR HIGH-VOLTAGE SCHOTTKY DIODES AND MESFET'S 975

Hlromu Shiomi, Yoshiki Nishibayashi, and Naoji Fujimori

CHARACTERISTICS OF METAL POINT CONTACTS ON DIAMOND THIN FILMS 981

K. Miyata, Y. Matsui, K. Kumagai, S. Miyauchi, K. Kobashi, and A. Nakaue

CURRENT-VOLTAGE CHARACTERIZATION FOR METAL CONTACTS ON C/DIAMOND THIN FILMS 987

K.K. Chan and G.A.J. Amaratunga

DEPOSITION AND CHARACTERIZATION OF C:N FILMS ON Si FOR MICROELECTRONIC APPLICATION 993

Chyu J. Torng, Tse A. Yeh, John M. Sivertsen, Shey-Shi Lu, and Anand Gopinath

PART XI: DIAMOND-LIKE MATERIALS

INVESTIGATION OF DIAMOND-LIKE FILMS BY THE INFRARED SPECTROSCOPY METHOD 1001

Ya.I. Rabinovich, D.V. Fedoseev, and Yu.N. Tolmachov

NIR-VISIBLE OPTICAL PROPERTIES OF RF-PLASMA DEPOSITED a-C:H FILMS BY TRANSMISSION AND PHOTOTHERMAL DEFLECTION SPECTROSCOPY 1007

V. Barbarossa, F. Galluzzi, S. Mercuri, R. Tomaciello, and G. Grillo

CARBON FILM DEPOSITION BY MASS-SELECTED LOW-ENERGY IONS S.-Tong Lee, X. Feng, and W.M. Lau

1013

PROGRESS IN THE CHARACTERIZATION OF DIAMOND THIN FILMS PREPARED BY A LASER PLASMA DISCHARGE 1021

F. Davanloo, E.M. Juengerman, D.R. Jander, T.J. Lee, and C.B. Collins

PART XII: CUBIC BORON NITRIDE

*CUBIC BORON NITRIDE: SYNTHESIS AND APPLICATIONS 1029 Robert H. Wentorf, Jr.

TOPOTAXY OF DIRECT TRANSFORMATION FROM HEXAGONAL TO CUBIC BN 1039

Masaharu Suzuki and Hiroaki Tanji

FLUORONITRIDES: NEW FLUX-PRECURSORS FOR PREPARING CUBIC-BN 1045

Gerard Demazeau, Laurence Vel, and Gilles Biardeau

PHASE EQUILIBRIUM BETWEEN CUBIC AND HEXAGONAL BORON NITRIDE 1051

J. Maki, H. Ikawa, and O. Fukunaga

EPITAXIAL GROWTH OF CBN CRYSTAL ON DIAMOND 1057 Haruhiko Sei, Minoru Akaishi, Hisao Kanda, Toshikazu Osawa, and Shinobu Yamaoka

HIGH THERMAL CONDUCTIVE POLYCRYSTALLINE CBN 1063 Hitoshi Sumiya, Kazuwo Tsuji, and Shuji Yazu

MICROSTRUCTURE AND MECHANICAL PROPERTIES OF CUBIC BORON NITRIDE (CBN) TWINSERTS 1069

G. Rai

CUTTING PERFORMANCE OF SINTERED CUBIC BORON NITRIDE WITH Al203-TiCN BINDER 1081

Y. Utsumi, S. Yamaya, H. Hara, N. Kaneki, and K. Shimada

LASER DEPOSITION OF CUBIC BORON NITRIDE FILMS ON SILICON 1087

G.L. Doll, J.A. Sell, C.A. Taylor, and R. Clarke

CUBIC BORON NITRIDE FILMS DEPOSITED BY ELECTRON CYCLOTRON RESONANCE PLASMA 1093

S.Y. Shapoval, V.T. Petrashov, O.A. Popov, A.O. Westner, M.D. Yoder, Jr., and C.K.C. Lok

CHARACTERISTICS OF C-BN FILM MADE BY A REACTIVE ION PLATING METHOD 1099

M. Murakawa, S. Watanabe, and S. Miyake

•Invited Paper

PART XIII: ADDITIONAL ARTICLES ACCEPTED

SPECIFIC CONTACT RESISTANCE MEASUREMENTS OF OHMIC CONTACTS TO DIAMOND 1107

C.A. Hewett, J.R. Zeidler, M.J. Taylor, C.R. Zeisse, and K.L. Moazed

ELECTRICAL ACTIVATION OF BORON IMPLANTED INTO DIAMOND 1113

Paul R. de la Houssaye, Claude M. Penchina, Charles A. Hewett, Robert G. Wilson, and James R. Zeidler

AUTHOR INDEX 1119

SUBJECT INDEX 1125