modeling of laser-plasma interaction for euv … of laser-plasma interaction for euv sources toward...
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![Page 1: Modeling of laser-plasma interaction for EUV … of laser-plasma interaction for EUV sources toward high power and efficiency Akira Sasaki Japan Atomic Energy AgencyIntroduction •](https://reader031.vdocument.in/reader031/viewer/2022021817/5aa2bf477f8b9a436d8d5688/html5/thumbnails/1.jpg)
Modeling of laser-plasma interaction
for EUV sources toward high power
and efficiency
Akira Sasaki
Japan Atomic Energy Agency
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Introduction
• Present status of development of EUV source
• Subjects of the basic research
• Summary
Modeling atomic process
Modeling hydrodynamics of the plasma
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Present status of development of EUV source
• Study of short wavelength
source for future lithography.
• Improvement of efficiency of 13.5nm source
- 4d-4f transition can be
scalable to 6.5nm.
- Higher temperature is
required.
- Power > 1kW will be required.
Accurate modeling of atomic process and radiation
hydrodynamics is required for optimization.
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Atomic structure of Ni-like W
• Validation of atomic model of W is carried out in the
study of fusion plasmas, for the plasma facing material
of ITER and future reactors.
Ni-like W
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Modeling atomic processes
• Mean charge and radiative power loss are useful for
estimating pumping power to obtain EUV emission.
• Convergence with respect to size of the model and
satellite contribution is investigated.
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Significant difference of calculated ion abundance of W
between existing codes.
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NLTE codes
JATOM
Pütterich
AIM
Pütterich (exp.)
Validation of cooling rate
• Calculations reproduces cooling rate at 2.5keV.
However, experimental data for validation is limited.
• Calculations presented at code comparison workshop
agree each other. Pütterich, et al. Nucl Fusion, 50, 025012 (2010)
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Benchmarking of the collisional radiative model
calc.
exp.
• Ratio of W44+ and W45+ are measured from the intensity
ratio of line emissions near 6nm.
• Calculation agrees well with experiment.
T. Nakano, J. Nucl.
Mater. 415, S327
(2011)
ne=1014/cm3
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Present status of modeling atomic processes
• Calculation of mean charge and radiative loss has been
improved through theoretical and experimental
validation.
• Development of coupled atomic processes and
radiation hydrodynamics simulation remains to be a
critical issue in the modeling; multidimensional
simulation requires reduction of atomic structure, and
spectral resolution.
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with main pulse without main pulse
Endo EUV source
workshop 2012
(Gigaphoton data)
Modeling hydrodynamics of the plasma
• High efficiency (>3%) is obtained by optimizing double
pulse irradiation; pumping Sn mist produced by
irradiating small droplet by ps prepulse.
• Formation of Sn mist and interaction of laser with mist
cannot be calculated using conventional model.
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Scenario of excitation of LPP
Fragmentation by shockwave
Condensation after evaporation
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Simulation methods for initial plasma formation
• Hydrodynamics simulation is required to perform
calculation from initial plasma formation by prepulse,
heating by main pulse, to EUV emission.
• Initial plasma formation is
unstable; new hydrodynamics
model which takes solid/liquid to
gas/plasma phase transition
including effect of instabilities into
account should be developed.
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Simulation methods for initial plasma formation
Masnavi, 2009 EUVL workshop
Endo, EUVL workshop 2012
Yamashita, Q .J. Jpn. Weld Soc. 2011
• Molecular dynamics simulation qualitatively shows the
expansion of droplet, but cannot be applied to real-
scale calculation.
MD
Particle method
Surface tracking
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Alternative hydro simulation methods
• Particle methods are useful but limited to
incompressible fluid (MPS) because it is difficult to
conserve mass and energy.
• Surface tracking method is useful for cutting and
welding simulations but difficult to calculate boiling and
cluster formation problems.
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Van-der-Waars equation of state
Modeling hydrodynamics
• 2-d hydrodynamics code based on Lagrange mesh.
• Phase transition is taken
into account; to maintain
thermodynamic
consistency and avoid
numerical instability.
• Includes stochastic
structure formation.
( equation of motion, energy, and EOS)
• Re-meshing to calculate large motion of the fluid.
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liquid gas
decomposition of mesh
Modeling phase transition
• When a density of a cell becomes those of 2 phase
region, the cell is split to solid (Vs) and gas (Vg) cell.
• 2 triangular cells are divided into 4 triangular cells.
• Liquid and gas regions are
determined using probability.
Van-der-Waars equation of state
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Test problem (isothermal expansion)
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Test problem (isothermal expansion)
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Test problem (isothermal expansion)
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Test problem (isothermal expansion)
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Test problem (isothermal expansion)
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Test problem (isothermal expansion)
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Test problem (isothermal expansion)
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Test problem (isothermal expansion)
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Test problem (isothermal expansion)
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Test problem (isothermal expansion)
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Test problem (isothermal expansion)
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Summary
• For the development of short wavelength source and
efficient 13.5nm source, models of atomic processes
and hydrodynamics are investigated.
• New hydrodynamics model, which takes instabilities in
the initial plasma formation into account and capable of
reproducing mist formation, are being tested.
• Development of reduced atomic processes and
radiation hydrodynamics model is being considered as
a new research project.