msr series miniature square rail linear positioner

mSR Series miniature Square Rail Linear Positioner

Do you have applications in any of these industries? SemiconductorElectronics ManufacturingLife Science (Microscopy)

Miniature Positioning Trends Small form factors Higher dynamic response Higher resolution Higher repeatability Higher accuracy Rapid instrument development and deployment

Would you also like Robust linear motion A modular solution that can easily be adapted to XYZ systems Tailored precision performance A dependable, proven supplier of linear motion products Short product leadtimes

Introducing the next generation of miniature precision positioning! The NEW mSR!

mSR Series Positioner 2 form factors mSR 80 mSR 100 2 different linear motors Ironcore Ironless 6 different encoder options 80 mm 100 mm 25 mm 35 mm mSR 80 mSR 100

mSR 80 Next generation solution for MX80-L applications Allows for higher precision performance (4 X better repeatability) Fits similar volumetric foot print Uses the same ironcore linear motor as its drive Designed with latest encoder technology on board

mSR 80 Design Features 1.Integrated high precision square rails Provide guidance, allows for superior straightness /flatness, and stiffness 2.Center driven direct drive motor Produces high thrust in small packaging, yielding excellent dynamic response 3.Integrated linear encoder, home and limits Five encoder options for flexible precision performance, with adjustable onboard limits and home sensing 4.Optional magnetic counterbalance Allows for Z-axis orientation without the need for air 5.Convenient mounting holes and dowel pinning The same mounting as MX80-L for ease of migration

mSR 80 Stroke Performance Stroke (mm)253550100150 Max. Load (kg)44888 Continuous Thrust (N)44888 Peak Thrust (N)1212242424 Maximum Speed (mm/sec)11001500200020002000 Maximum Acceleration (Gs)3 Bi-Directional Repeatability () 10.1 Straightness and Flatness () 1334510 1 Precision grade, with 0.01 micron optical encoder

mSR 80 Performance 2 miniature Ironcore motor options CS Option- 4 pole producing 4 N cont., 12 N peak CD Option - 8 pole producing 8 N cont., 24 N peak mSR 80 Ironcore motor

mSR 80 Encoder Options Magnetic incremental with 1 micron resolution Highly economical feedback option Optical incremental resolutions of 1.0, 0.1, and 0.01 micron Sine/Cosine output Resolution determined by drive interpolation Magnetic Read Head Optical Read Head

Magnetic Counter Balance The mSR 80 25 mm stroke only Standard options for magnetic counterbalance Must be sized per load Improved design over pneumatic as it requires no energy. Ideal for focusing applications

mSR 80 Versus MX80L Similar in total volume at a given stroke mSR 80 25 mm stroke Fully retracted MX80L 25 mm stroke Fully extended

mSR 80 Versus MX80L PositionerLength (mm) Travel* (mm)Motor PoleMX80L Length mSR080L-025CS128254114.5 mSR080L-035CS138354- mSR080L-050CD183508147 mSR080L-100CD2651008260 mSR080L-150CD3651508360 mSR 80 80 mm 25 mm 80 mm MX80L

Square Rail Versus Cross Roller? Cross rollers bearings have long been touted as superior precision bearing over that of recirculating but is this still the case? Square rail technology has improved significantly over time Eliminates the need to preload the stage, yielding a truer stage

Manufacturing: All linear guide bearing rails are machined via grinding process For 20 years use of linear square rails has increased (ease of use, breath of product) Driven the manufacturing of square rails to attain the same straightness/flatness as a cross roller element Square Rail Versus Cross Roller?

Difference in preloading Cross Roller: stage is loaded flexing the carriage. Square Rail: each truck is preload in a consistent fashion Square Rail Versus Cross Roller?

mSR 100 Second size to the mSR Series Allows for smooth precision performance Uses the mL18 miniature ironless linear motor as its drive Provides the best dynamic response of any Parker positioner Designed with latest encoder technology on board

mSR 100 Design Features 1.Integrated high precision square rails Provide guidance, allows for superior straightness /flatness, and stiffness 2.Center driven direct drive ironless linear motor With zero cogging this linear motor produces extremely smooth motion, with limited velocity ripple 3.Integrated linear encoder, home and limits Six encoder options for flexible precision performance, with adjustable onboard limits and home sensing 4.Convenient mounting holes and dowel pinning Allowing for multiple mounting options to either an other mSR100, mSR80, or MX80L

mSR 100 Stroke Performance Stroke (mm)25 (LS) 50 (LS/LD) 100 (LS/LD) 150 (LS/LD) 200 (LS/LD) Motor Load (kg)12 Continuous Thrust (N)1111/16.711/16.711/16.711/16.7 Peak Thrust (N)3333/5033/5033/5033/50 Maximum Speed (mm/sec)11001500300030003000 Maximum Acceleration (Gs)3 Bi-Directional Repeatability () 10.2 Straightness and Flatness () 133445 1 Precision grade, with 0.01 micron optical encoder

mSR 100 Stroke Performance Cont Stroke (mm)250 (LS/LD) 300 (LS/LD) 350 (LS/LD) 400 (LS/LD) 450 (LS/LD) 500 (LS/LD) Motor Load (kg)12 Continuous Thrust (N)11/16.7 Peak Thrust (N)33/50 Maximum Speed (mm/sec)3000 Maximum Acceleration (Gs)3 Bi-Directional Repeatability () 10.2 Straightness and Flatness () 155681012 1 Precision grade, with 0.01 micron optical encoder

mSR 100 Performance mL18 miniature Ironless motor options LS Option- 3 pole producing 11 N cont., 33 N peak LD Option - 5 pole producing 16 N cont., 50 N peak mSR 100 Ironless motor LS Motor OptionLD Motor Option

mSR 100 Encoder Options Magnetic incremental with 1 micron resolution Highly economical feedback option Optical incremental resolutions of 1.0, 0.1, and 0.01microns Sine/Cosine output Resolution determined by drive interpolation BiSS-C Absolute For applications requiring constant feedback or zero initialization (homing) Magnetic Read Head Optical Read Head

mSR 100 Versus mSR 80 If you need relatively basic motion (5 micron repeatability) with a stroke under 200 mm, but want a very compact stage Look at the mSR80 with magnetic encoder

If you need very precise motion in a tight package Look at the mSR 80 with optical encoder, and select the optical encoder based upon your precision needs mSR 100 Versus mSR 80

What happens if I need to change my resolution? Parker has designed in the latest encoder technology to the mSR Should you select any of the optical options you can easily switch resolution by changing our the interpolator Optical Read Head Optical Tape Scale Optical Interpolator

mSR 100 Versus mSR 80 If you need very precise motion and high speed Look at either the mSR 80 or mSR 100 with sine/cosine encoder.

mSR 100 Versus mSR 80 If your concerned about producing very smooth motion with tight control over velocity ripple Look at the mSR 100 with the 10 nanometer optical encoder

Standard Grade and Precision Grade Standard GradePrecision Grade Encoder OptionsMagnetic OnlyOptical (1, 0.1, and 0.01), Sin/Cos, and BiSS-C* Bi-Directional Repeatability () 5.00.1 1 Accuracy () 2 204 Straightness & Flatness () 2 83 Metrology Test ReportNoYes Slope CorrectionNoYes *BiSS-C Absolute option available on mSR100 only. 1 10 nanometer encoder 2 25 mm stroke

Compliance CE and RoHS Both mSR 80 and 100 are fully CE and RoHS compliant as standard.

Servo Drive Compatibility mSR Series (Motor Option) mSR 80 (CS Option) mSR 80 (CD Option) mSR 100 (LS Option) mSR 100 (LD Option) Continuous Current (Arms) 0.81.61.22.18 Peak Current (Arms) 2.44.83.56.5 P-Series 1 PD-04 ViX 2 ViX250*H IPA 1,2 IPA04-HC 1 DC Version Required 2 Incremental Feedback Only

Multi-Axis Systems Given the modular design of the mSR it can easily be adapted to create multi-axis systems mSR 80 to 80 (same bolt patter as the MX80L) mSR 80 XY System

Multi-Axis Systems mSR 100 to 100, in two methods Standard XY Carriage to carriage mounting (eliminates cable carrier) mSR 100 Carriage to Carriage XY mSR 100 Standard XY

Multi-Axis Systems The mSR 80 can also be directly mounted to the mSR 100 Consult the catalog for standard z-axis brackets for the mSR 80 and 100 mSR 80 Z mounted to a mSR 100 X

mSR Part Numbering MSR100L050PLDE3H1L1CM03X0 Product Series

mSR Part Numbering MSR100L050PLDE3H1L1CM03X0 mSR Size: -80 -100

mSR Part Numbering MSR100L050PLDE3H1L1CM03X0 Linear Motor Drive

mSR Part Numbering MSR100L050PLDE3H1L1CM03X0 Stroke Length Option 025 25 mm stroke 035 35 mm stroke* 050 50 mm stroke 100 100 mm stroke 150150 mm stroke 200 200 mm stroke** 250 250 mm stroke** 300 300 mm stroke** 350350 mm stroke** 400 400 mm stroke** 450 450 mm stroke** 500 500 mm stroke** *mSR80 only **mSR 100 only

mSR Part Numbering MSR100L050PLDE3H1L1CM03X0 Grade Option Precision Standard

mSR Part Numbering MSR100L050PLCDE3H1L1CM03X0 Motor Option CS ironcore, single* CD ironcore, double* *mSR 80 only LS ironless, single** LD ironless, double** **mSR 100 only

mSR Part Numbering MSR100L050PLDE3H1L1CM03X0 Encoder Option E1 1 micron optical incremental E2 0.1 micron optical incremental E3 0.01 micron optical incremental SC Sine/Cosine M11 micron magnetic incremental R1- 0.05 micron BiSS-C Absolute* *mSR 100 only

mSR Part Numbering MSR100L050PLDE3H1L1CM03X0 Home Sensor Option H0 No Home Sensor H1 Home Sensor

mSR Part Numbering MSR100L050PLDE3H1L1CM03X0 Limit Sensor Option L0 No Limit Sensor L1 End of travel limit sensors

mSR Part Numbering MSR100L050PLDE3H1L1CM03X0 Cable Options CM01 No Cable management, 1 meter* CM03 No Cable management, 3 meter CM13 Single Cable Carrier, 3 meter** CM23 Double Cable Carrier, 3 meter** *mSR 80 only **mSR 100 only

mSR Part Numbering MSR100L050PLDE3H1L1CM03X0 Other Options X0 No options X1 Magnetic Counterbalance (0.5 N) X2 - Magnetic Counterbalance (2.0 N) X3 Magnetic Counterbalance (3.0 N) X4 - Magnetic Counterbalance (3.5 N) X5 Magnetic Counterbalance (4.3 N) X6 - Magnetic Counterbalance (6.3 N) *mSR 80 - 25 mm stroke only

Questions or Inquiries [email protected] 1-800-358-9070

msr series miniature square rail linear positioner

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