nanoelectronics: besides and beyond mooreregpot/winterschool2009/app/...winter school on...
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Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Nanoelectronics:Besides and Beyond Moore
Wilfred G. van der Wiel
MESA+ Institute for Nanotechnology University of Twente, The Netherlands
Ankara, January 25th 2009
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Contents of this lecture
• A brief history of electronics• Single-electron transistors and quantum dots• Organic electronics• Spintronics
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Breakthroughs:
1920s: semiconductor components ([photo]diodes)1925: idea of the field effect transistor (FET)1947: first working transistor1959: the integrated circuit (IC)1960: the first metal-oxide-silicon (MOS) transistor1970: solid state memories; the microprocessor1980: the PC1990s: ubiquitous internet and cellular phones
A brief history of electronics
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Electronic “work horses”
vacuum tube (end 19th century)
• slow • bulky • fragile • consumes a lot of power
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
1947: first transistor
point contact transistor
• 2 metal wires on n-Ge• hard to make, not practical
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
bipolar junction transistor (BJT)
• invented at Bell Labs in 1947• bipolar: both holes and electrons carry the current• now largely replaced by CMOS technology, but still used for specific
applications (e.g. radio-frequency circuits)
Electronic “work horses”
cross section of an npn BJT
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Electronic “work horses”
field effect transistor (idea: 1925, realized: 1960)
CMOS – complementary metal-oxide-silicon• pairs of transistors for logic functions, only one of which is switched on
at any time • Simplicity and low power dissipation of CMOS circuits have allowed
for integration densities not possible with BJTs
MOSFET
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Transistor revolution
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Integrated circuits - ICs
all components of a circuit on a piece of semiconductor
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
1976: Apple I motherboard1981: The first PC: IBM’s 5150 PCIntel microprocessorDOS operating system
IBM stated in 1951: ‘the world needs only 5 computers’
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
INTEL:The microprocessor
Photo: Augarten 1983
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Moore’s Law
“number of transistors per square inch doubles every 18 months”
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
ITRS roadmap
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25thNanoElectronics 22 April 2005IBM
Moore’s law cannot continue forever...
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Single Electron Transistors (SETs) and Quantum Dots (QDs)Single Electron Transistors (SETs) and Quantum Dots (QDs)
single molecule
nanoparticle
self-assembledQD
nanotube
nanowire
1 nm 10 nm 1μm
vertical QD
lateral QD
100 nm
Vsd Vg
GATE
ISLANDDRAINSOURCE
I
e
Vsd Vg
GATE
ISLANDDRAINSOURCE
IVsd V
GATE
ISLANDDRAINSOURCE
Vsd V
GATE
ISLANDDRAINSOURCE
I
e• Small box in solid-state occupied by electrons (holes) • number of electrons 0 - ~1000• Coupled via tunnel barriers to source and drain
reservoirs• Coupled capacitively to gate electrode(s)• Discrete energy spectrum ⇒ artificial atoms
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
band diagram
2-dimensional electron gas2-dimensional electron gas
n-AlGaAsAlGaAs
GaAs
GaAs
2DEG10
0 nm
semiconductor heterostructure
III-V semiconductorsSi n-dopant
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
heterostructure processingheterostructure processing
heterostructure
resist
e-beam after development evaporation gate structure after lift-off
channel 2DEG
How to define nanostructures out of a 2DEG?
• applying (negative) voltages to gateelectrodes on top
• wet etching• dry etching (focused ion beam,electron cyclotron resonance, ...)
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
lateral quantum dotslateral quantum dots
• High-mobility 2DEG (~106 cm2/ Vs) • Density ~1015 m-2 ⇒ λF ~ 30 nm• Resolution gate structure ~20 nm• Dot size ~ 100 nm• Comparable to electron wavelength⇒ discrete energy spectrum
E
x,y
E
x,y
400 nm
S D
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
circular pillar made from double barrier structure by dry and wet etching
n-GaAs drain
AlGaAs barrier
InGaAs well
AlGaAs barrier
n-GaAs source
Other geometries possible
vertical quantum dotsvertical quantum dots
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
constant interaction modelconstant interaction model
N
Vg
gC
C
V V
CRL
L R
Assumptions:
• all Coulomb interactions among electrons are parameterized by asingle capacitance C (C = CL + Cg + CR)
• discrete energy spectrum is independent of the electron number N
[ ]∑=
++−
=N
nn
gg BEC
VCeNNU
1
2
)(2
)(
classical Q-mech.
VL ≈ VR ≈ 0:
Vsd Vg
GATE
ISLANDDRAINSOURCE
I
e
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
electrochemical potentialelectrochemical potential
minimum energy for adding the Nth electron to the dot
CeE
EVCe
EEN
NUNUN
C
NggC
C
dot
2
21 )(
)1()()(
=
+−−
=−−≡μ
Nch
ggC
CN
EN
VCe
EENe
=
−−=−
)(
)( 21
μ
ϕ electrostatic potential
chemical potential
charging energy:EC = e2/C
C ∝ R, R (radius) 100 nm⇒ EC ~ few meV
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Coulomb blockadeCoulomb blockade
+ΔE
RL
RdotL
Ve μμμμμ−=−
>>
EENUNUNUNN
C
dotdotdot
Δ+=−+−+=−+=Δ )1()(2)1()()1( μμμ
addition energy
NO CURRENT CURRENT
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
single-electron tunnelingsingle-electron tunneling
N N+1
N+2
N-1
Linear response
ΓL ΓR
μSμ(N)
Vg
μDμS
μ(N)
Vg
μDμS μ(N)
Vg’
μDμS μ(N)
Vg’
μD
ΓL ΓR
μSμ(N) μD
ΔEμSμ(N) μD
μSμ(N) μD
ΔE
μS
μ(N) μD
μ(N+1)Eadd
μS
μ(N) μD
μ(N+1)Eadd
Non-linear transport
Vsd
Vg
NN-1 N+1
dI/dVsd
ΔE Eadd
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
(0,1)
(0,2)
(0,0)
(1,0)
(2,2)
(2,0)
2D harmonic potential: Fock-Darwin states2D harmonic potential: Fock-Darwin states
( )*4/1~
2/1~1222
02 meB
llnE
cc
cnl
=+≡
−++≡
ωωωω
ωω hh
meV 3 0 =ωh
(cyclotron frequency)
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Shell fillingShell filling
e /CE2+Δ
-1. 5 - 0.8
0
20
2 126N=0
GATE VOL TAGE (V)
1 32 4 5 6 7
e /C2 e/C2 e/C2 e/C2 e/C E2+ Δ
}
-1.5 -0.80
20
2 126N=0
gate voltage (V)
} } } } }
1 32 4 5 6 7
curr
ent (
pA)
{ { { { { {
e2/C e2/C+ΔE e2/C e2/C e2/C e2/C+ΔE
addi
tion
ener
gy (m
eV)
0
6 2 6
124
9 16
electron number
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
"The elements, if arranged according to their atomic weights, show a distinct periodicity of their properties..."
1869Mendeleev arranges63 known elements ina periodic table
Dmitri Mendeleev(1834-1907)
AtomsAtoms
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Element number 16: Sulphur
AtomsAtoms
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
2
6
8
20
9 10 11 12
1918171613
7
43
1
5Oo
Ha
Ja
Ta
Da1514
To Ho
KoEt
2D Periodic Table of Artificial Atoms
CrMiSa
Au
Wi Fr El
artificial atomsartificial atoms
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Dot 1
Dot 2
vertical,laterally coupledquantum dots
300 nm
lateral, coupled quantum dots
Coupled quantum dotsCoupled quantum dots
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Vgate1 Vgate2
dot 1 dot 2
μS μD
NN-1
MM+1
charge cycle I:(N,M) → (N+1,M) → (N,M+1) → (N,M) → …
Vgate1
Vga
te2
(0,1)
(1,0) (2,0)
(1,1) (2,1) (3,1)
(1,2) (2,2) (3,2)
(3,3)(2,3)(1,3)
(0,2)
(0,0)
dots in series: transport at triple points only !!
charge cycle II:(N+1,M+1) → (N+1,M) → (N,M+1) → (N+1,M+1) → …
Coupled quantum dotsCoupled quantum dots
W.G. van der Wiel et al., Rev. Mod. Phys. 75, 1 (2003)
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
“Temperature filter”“Temperature filter”
2D EG
AlG aA sX 1-X
GaA s
O hms conta ctn aar 2DE G
ga tes
=> resonant current is determined byalignment of discrete states andindependent of temperature
W.G. van der Wiel et al., Rev. Mod. Phys. 75, 1 (2003)
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
2D EG
AlG aA sX 1-X
GaA s
O hms conta ctn aar 2DE G
ga tes
elastic tunnelingΓ tL RΓ
width ≈ hlifetime
≈ h
Γ 0 10
1
2
3
Cur
rent
(pA
)
Source-Drain Voltage (mV)
inelastic current
GS -GSelastic current
FWHM = 4 eVμ
3.5 x 100 mK = 35 μeV
=> FWHM is an order of magnitudesmaller than thermal energy
“Temperature filter”“Temperature filter”
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th © WGvdW
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
organic materials
- light and flexible- easy to process cheap- additional functionalities- interface with biological systems
molecular electronics
- essentially all electronic processes in nature occur inmolecular structures (e.g. photosynthesis, signal transduction)
- size 1-100 nm cost, efficiency, power dissipation- self-assembly and recognition (switches & sensors)- molecular synthesis allows great flexibility
Why organic electronics???
Organic electronicsOrganic electronics
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Organic electronics
Single-molecule electronicsmolecular rectifier proposed byAviram and Ratner 1974
Organic thin-film electronics
• polymers (Nobel prize chemistry 2000)• small molecules• single-crystals
Organic electronicsOrganic electronics
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
OLED
flexible circuitry
electronic papersolar cells
Organic electronicsOrganic electronics
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
μ is the constant of proportionality between the drift velocity v of the charge carriers and the electric field E that induces this drift velocity:
material mobility [cm2/(Vs)]
Si (crystalline) 1350 (e)InAs (bulk) 30,000 (e)GaAs (quantum well) up to ~10,000,000 (e) at low T (~ 1K)CNT 100,000 (e)Cu 42 (e)pentacene (crystalline) 30 (h)pentacene (thin film) ~1 (h)
Ev μ=
Carrier mobilityCarrier mobility
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
When band transport occurs?When band transport occurs?
In general, an energy ΔE is required to move an electron from one molecule to thenext.
Even at zero temperature, this energy can be provided by quantum fluctuations:
h>Δ⋅Δ tE Heisenberg uncertainty relation
If the tunnel rate between molecules is much larger than then the electroncan delocalize over many molecules.
If the tunnel rate is much less than then the electron is localized on onemolecule and conduction takes place via (thermally activated) hopping.
h/EΔ
h/EΔ
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Conduction mechanismsConduction mechanisms
non-band-like conduction
band-like conduction only occurs when the charge carriers are in sufficiently delocalized states
hopping(thermally activated)
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
organic semiconductors: OTFT inorganic semiconductors: MOSFET
• doping is difficult due to low purity• conducting channel by accumulation• predominantly hole transport (p-type)
• doping introduces carriers• conducting channel by inversion• both n-type and p-type channel(allows for CMOS architecture)
VDS
Vg
back gate
For a review of inorganic (silicon) FETs, see, e.g.:S.M. Sze, Physics of Semiconductor DevicesA.S. Sedra and K.C. Smith, Microelectronic Circuits, ISBN 0-03-053237-X
Organic Thin-Film Transistors (OTFTs)Organic Thin-Film Transistors (OTFTs)
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Organic Thin-Film Transistors (OTFTs)Organic Thin-Film Transistors (OTFTs)
organic semiconductorsexamples typical mobility
(cm2V-1s-1)polymers polyacetylene
poly(3-alkylthiophene) (P3AT) 0.1
small molecules pentaceneoligothiophenes 1
single-crystals pentacenerubrene 10
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Conductive polymersConductive polymers
Conductive plastics are used in, or being developed industrially for, e.g. anti-static substances for photographic film, shields for computer screen against electromagnetic radiation and for "smart" windows (that can exclude sunlight).
In addition, semi-conductive polymers have recently been developed in light-emitting diodes, solar cells and as displays in mobile telephones and mini-format television screens.
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
polyacetylene: insulatordiscovery: halogen (Cl, Br, I) doping makes polyacetylene 109 times more conductive:σ = 105 Sm-1
(teflon: 10-16 Sm-1; copper: 108 Sm-1)
Conductive polymersConductive polymers
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Organic single-crystalsOrganic single-crystals
Polymers: no periodic structure (“spaghetti”)Thin films of small molecules: defects (grain boundaries)Single-crystals: low defect density (mobility independent of gate voltage)
rubreneπ-conjugated molecule (aromatic rings)
• High mobility due to strong orbital overlap (6 cm2/Vs, up to 20 at RT)
• Stable in air• Growth parameters known
review:R.W.I. de Boer, phys. stat. sol. (a) 201, 1302 (2004)
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Si
SiO2
B
A
Al2O3Co
Single Crystal
Organic single-crystalsOrganic single-crystals
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Artemperature gradient
copper wire
In collaboration with Anna Molinari, Alberto Morpurgo (TU Delft)
Organic single-crystalsOrganic single-crystals
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Organic single-crystalsOrganic single-crystals
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Organic single-crystalsOrganic single-crystals
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Wouter Naber et al., unpublished
-40 -20 0 20 40
-40
-20
0
20
40
I(nA
)
V (V)
Vg = -30Vg = -20Vg = -10Vg = 0Vg = 10Vg = 20Vg = 30
Co/Al2O3/rubreneRT, L = 300 μmμ = 1 cm2/(Vs)
Organic single-crystalsOrganic single-crystals
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
rotaxane – switching molecule
singleatom
transistor
STM tip with nanoparticle
Molecular electronicsMolecular electronics
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Measuring electronic properties of moleculesMeasuring electronic properties of molecules
A. Hg drop junctionB. Mechanical break junctionC. NanoporeD. Nanogap in nanowireE. Nanoparticle bridgeF. Crossed (nano)wiresG. STMH. CP-AFMI. Nanoparticle + CP-AFM
B.A. Mantooth and P.S. Weiss, Proc. IEEE 91, 11 (2003)
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
conducting AFMconducting AFM
X.D. Cui et al., Science 294, 571 (2001)
single 1,8-octanedithiol molecules inserted in octanethiol monolayer
gold nanoparticles on top of the monolayer are contacted by gold-plated conducting AFM probe
octanedithiol: 900 ± 50 MOhm(based on 1000 single molecules)
1, 2, 3, 4 or 5 molecules measured in parallel
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Single-molecule transistorsSingle-molecule transistors
J. Park et al., Nature 417, 722 (2002) W. Liang et al., Nature 417, 725 (2002)
single Co-atom transistor divanadium molecule as spin impurity
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
-1.0 -0.5 0.0 0.5 1.0
1E-8
1E-7
1E-6
PAD1 PAD2 PAD3
C8 dithiol, 10 micron circular pads, probe station room temperatureI (
A)
V (V)
Tunneling through alkanedithiol SAMs
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Tunneling through alkanedithiol SAMs
-1.0 -0.5 0.0 0.5 1.0
1E-8
1E-7
1E-6
1E-5
C8 dithiol, probe station room temperature
I(80 μm2) I(400 μm2)
I (A)
V (V)-1.0 -0.5 0.0 0.5 1.0
1E-8
1E-7
1E-6
1E-5
C8 dithiol, probe station room temperature
5 x I(80 μm2) I(400 μm2)
I (A)
V (V)
10 μm circles(80 μm2)
20 μm x 20 μm (400 μm2)
scaled curves
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Organic electronics vs CMOSOrganic electronics vs CMOS
Once it is possible to make transistors by chemical synthesis, more transistors will be made in one day that it will ever be possible by photolithography.
However, CMOS is still going strong! Dimensions of transistors have shrunk a factor 10,000 since the 1960s. The price of 1 gigabit of memory has decreased by a 1.5 million times.
Experts predict that CMOS will remain the mainstream technology for many years and that improvements will continue until at least 2016.
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
SpintronicsSpintronics
• non-volatality (no constant voltage required to ‘remember’ state)• decreased electric power consumption• increased data processing speed
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
magnetic contacts
tunnel barriers
normal metal spacer
traditional electronics: chargespin electronics: spin and charge
semiconductor spacers offer new possibilities
GaAs: X. Lou et al., Nature Physics 3, 197 (2007)
SpintronicsSpintronics
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
no spin relaxation with spin relaxation
SpintronicsSpintronics
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
tunnel magnetoresistance (TMR)FM-insulator-FM
giant magnetoresistance (GMR)
FM-metal-FM
SpintronicsSpintronics
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Magnetic Random Access Memory (MRAM)Motorola
GMR head hard driveFujitsu
SpintronicsSpintronics
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
GMR hard disk read headsGMR hard disk read heads
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
GMR hard disk read headsGMR hard disk read heads
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Giant magnetoresistanceGiant magnetoresistance
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
Nanoelectronics...Nanoelectronics......is where physics, materials science, chemistry and electric engineering inevitably meet
Getting grip on the fundamental properties of nanoelectronic devices is of crucial importance, and a very exciting scientific challenge
www.mesaplus.utwente.nl/nanoelectronics
Winter School on Nanoelectronics and NanophotonicsBilkent University – Ankara, Turkey Jan. 20th-25th
I would like to thank the following people for kindly supplying material:
Jeroen Elzerman (TU Delft)Peter Hadley (TU Delft)Ronnie Jansen (University of Twente)Alberto Morpurgo (TU Delft)Jurriaan Schmitz (University of Twente)Seigo Tarucha (University of Tokyo)
AcknowledgmentsAcknowledgments