Optical 3D surface measurement technology for industry and research

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About NanoFocusTop quality Made in Germany f2Measurement and analysis in accordance with standards f3

Application areasDrive train engineering f4 | Surface finishing f5 Electronics & microsystems technology f6 | Medical technology f7Energy technology f8 | Security technology f9

Basic technologiesTechnical principles f10Patented NanoFocus technologies f11Product categories and applications f14

Systems & softwareµsurf explorer f16 | µsurf mobile f17 | µsurf cylinder f18µsurf sensor f19 | µsprint topographer f20 | µsprint sensor f21Customer-specific systems f22 | Software f24

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Technology leader in 3D surface measurement technology

Top quality Made in Germany

Since its foundation in 1994, NanoFocus AG has been developing, producing and selling high-precision optical 3D measurement systems and software for characterizing technical surfaces.

The technology of NanoFocus is used all over the world at industrial and research customers – wherever it is necessary to check and analyze ultrafine surface structures in the micrometer and nanometer range. In its products and innovations, NanoFocus AG is oriented closely on customers' processes, and pro-vides precisely the high-performance sensors that customers can use to safeguard and build on their own advanced technological positions.

NanoFocus relies on the highest product quality. The measurement systems and evaluation software are developed and produced completely in Germany. Customers receive all the products and services from a single source, and can rely on the key expertise of profound engineering experience when it comes to consulting and subsequent support at any time.

NanoFocus is certified to ISO 9001 and OHSAS 18001, and offers the highest quality standards in all areas.

All important and patented key components of the systems are NanoFocus developments, and are manufactured by the company itself. Furthermore, NanoFocus works with internationally renowned sup-pliers, and exclusively installs durable components with the best quality. Each component, like the overall system, is subjected to extensive tests and preliminary acceptance processes. The entire procedure compris-ing development, production, consulting through to startup and support undergoes precise monitoring on our part, and is conducted in accordance with our exacting quality requirements. In this way, we can guarantee the high standard of our products at any time.

Made in Germany

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Measurement and analysis in accordance with standards

Standards are a catalyst for innovation. Standards make new evaluations possible, describing surface structures and their functions in a uniform way internationally. As a trailblazer and technological pioneer in optical 3D surface measurement technology, NanoFocus is working on the further development and acceptance of binding measuring standards.

NanoFocus is intensively committed to international bodies and working groups with the objective of standardizing optical measurement procedures, and in this way makes an active contribution to the process of working out new standards.

With numerous contributions of its own, NanoFocus cooperates with manufacturers, institutes and standardization bodies to improve the acceptance and benefit of optical measurement systems and processes for customers.

Furthermore, NanoFocus is a founding member and holds a place on the board of the openGPS® industrial consortium for standardization of file formats for measurement data (X3P) and algorithms for surface characterization according to ISO 25178.

Both the National Institute of Standards and Technology (NIST) in the USA and the Physikalisch-Technische Bundesanstalt (PTB) in Germany use measurement instruments from NanoFocus.

It goes without saying that NanoFocus always imple-ments the latest standards in measurement systems and software.

Furthermore, NanoFocus offers customers regular workshops and seminars with information about the latest developments in the area of international standardization and practical training courses covering the targeted use of evaluation processes.

International standards

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Drive train engineering

CO2 efficiency, fuel consumption and durability are key topics in the automotive industry. All over the world, automotive manufacturers are working to improve these properties. Micro and nanostructured 3D func-tional surfaces reduce energy consumption, make vehicles more environmentally friendly and reduce wear. Key components of the fuel supply and drive train engineering must consequently be produced and monitored precisely.

Over many years of cooperation with the automotive industry, NanoFocus has developed specialized processing tools by means of which these structures can be measured and evaluated on the basis of clear characteristic values. This is why leading automotive manufacturers rely on NanoFocus technology. One example of this is the μsurf cylinder, a technology unparalleled anywhere in the world, which allows the inner walls of engine cylinders to be analyzed in three dimensions down to the nanometer range.

The surface profilers principally used in the engineer-ing industry to date are no longer up to the task of characterizing complex three-dimensional surfaces. They are slow, sensitive to handling and can dam-age the surface. Conventional optical methods are either susceptible to vibration, inaccurate or fail when complex geometries with steep flanks are involved.

In contrast, NanoFocus measurement technology makes it possible to check the quality of surface structures on cylinder liners, camshafts, conrods or fine sheets with high precision in the laboratory and dur-ing production. NanoFocus systems work completely non-destructively when analyzing these fine structures, and deliver meaningful measurement data faster than any other process. Using NanoFocus measurement technology, it is possible not only to record extensive 3D structures but also to undertake evaluations in accordance with the DIN EN ISO requirements and determine structural values in three dimensions with new algorithms.

Application areas

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Surface finishing

The optical impression is decisive for the economic success of many products, because it contributes greatly to the impression of quality that a purchaser perceives in a product. The appearance of a surface is directly related to its microscopic structure. From the basic material through to processing tools and coatings, there are many production factors which influence the visual surface quality. In all stages of the production process, NanoFocus measurement technology delivers the correct characteristic values in order to improve this quality and optimize surface properties.

There is an extremely wide variety of applications. In the printing industry, for example, the appearance of a printed product depends on the condition of the print roller used. Uneven ink application, imperfec-tions or color cast are the unwanted results of quality defects. Precise knowledge of the surface topography and microgeometry of printing cylinders is thus of decisive importance both in terms of quality assurance and monitoring production processes, as well as for developing printing cylinders. This is the only way to achieve a perfect print image.

In the automotive industry, work is undertaken con-tinuously to optimize the properties of modern car paintwork. Appearance is the keyword; this refers to the overall look of the car paintwork. This appearance is influenced by various parameters and manufacturing processes starting from the surface structure of the steel sheet and all the coats of paint, building up to the clear topcoat. μsurf confocal technology is especially well suited to measurement tasks in this field. It permits non-destructive measurements along the entire process sequence from the skin-pass roller and raw material through to the individual coats of the paint structure, and all this without preliminary prepara-tion. The quality of the appearance is quantified using standardized waviness characteristics. The influence of the material and processing conditions can then be differentiated and objectively evaluated by means of the data. This reproducibility and comparability of waviness characteristics make it possible to set the production processes for optimum parameters.

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Application areas

Electronics & microsystems technology

More and more performance in ever smaller products: the trend towards miniaturization in electronics produc-tion and microsystems technology with the resulting density of functions and performance represents the central challenge for production and quality control. Complex systems with increased functions and toler-ances in the micrometer and even the nanometer range demand new solutions for process quality assurance.

Electronics and microsystems technology products are set up in complex spatial structures, as a result of which a two-dimensional optical inspection with vision systems is inadequate. The high aspect ratios are difficult to measure either using current optical pro-cesses or surface profilers. As a result, measurement systems from NanoFocus are used in development and production.

During the manufacture of miniaturized electro-mechanical and optical components, the production scrap rate depends on the dimensional accuracy of complex surface geometries. It is decisive for geometri-cal tolerances to be complied with on the individual components. It is important for surface parameters such as coplanarity, roughness, flatness, thickness of connecting vias or layers, warpage of housings and substrates, depth of laser etching or volume to be measured using measurement technology and checked during the manufacturing process.

The high-precision 3D measurement systems from NanoFocus cover the entire range of measurement tasks in modern microproduction. High-resolution measurement instruments make it quicker and easier to develop new products and production processes. µsurf, µscan and µsprint allow the geometries of microcomponents to be measured three-dimensionally, without contact and non-destructively during various stages of the production process, giving automated evaluations. In mechani-cal, optical or electrical components, NanoFocus measurement systems assist manufacturers in supply-ing fault-free, high-performance and reliable products.

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Medical technology

In medical technology, the demands on product and component quality are extremely high because they are used for assisting or analyzing the human body, or indeed even as implants. It is not just the requirements on material and design which are important for medical safety and reliable function, but also factors such as service life and biocompatibility.

The surface structure is of great significance in dental inlays, orthopedic prostheses and implants. Dental implants, for example, require a specific roughness in order to grow into the jaw quickly and durably. Another example is the area of microfluidics. Micro-fluidic systems, used for example as lab-on-a-chip, separate or mix fluids and gases in the smallest of spaces. Investigating the product surface is of decisive importance for quality assurance in their production, because it is their characteristics that influence the flow properties of fluids.

Stents are used for expanding narrowed blood ves-sels. Sharp edges or similar defects can damage the vessels, leading to embolisms, hemorrhages or other life-threatening situations. As a result, detecting surface defects such as cracks, fractures or defor-mations is a necessity down to the nanometer range.

Properties of the product surface such as the roughness of implants, topography, microgeometry or the thickness of a coating are thus decisive for the therapeutic success of a product, and in turn its economic success. Optical NanoFocus measurement systems supply key figures for surface quantification with high resolution and repeat accuracy. The patented technology permits non-destructive measurement of polished or transparent surfaces, coatings and steep flanks, as well as roughness measurement according to DIN EN ISO. In contrast to the scanning electron microscope (SEM), quality monitoring can take place directly during the manufacturing process, and also be automated. Furthermore, it is possible to describe three-dimensional properties of the surfaces which cannot be definitively quantified using two-dimensional characteristic values alone.

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Energy technology

Climate change and the increasing scarcity of fossil fuels are making the search for environmentally friendly energy sources into a central topic of the present day – always with the objective of combining a higher energy yield with cost effectiveness and environmental friendliness. In the area of alternative power engineering, NanoFocus supports the develop-ment and manufacture of fuel cells and solar cells as well as battery technologies. Here, NanoFocus offers measurement solutions to cover all stages of the process sequence.

Fuel cell technology stands for a new generation of clean energy. Fuel cells offer the possibility of con-verting fuel and oxygen directly into electrical energy. Fuel cells are currently being developed above all for applications in the automotive industry, although their possibilities extend far beyond this sector. To increase the overall efficiency of fuel cells, and thus also to increase the possibilities for their commercial use, it is necessary to optimize the microgeometries of the internal surfaces and the channels through which the hydrogen and air flow. Measurement results in the micrometer range form the basis for further developments and safeguarding production quality.

In the photovoltaic industry, surface properties are decisive in terms of the efficiency of a solar cell. Using optical measurement systems from NanoFocus, it is possible to ascertain precise 3D surface characteristics that are of decisive importance for the performance of a solar cell. Different types of solar cell can be represented by virtue of the range of equipment of the measuring instruments. The components industry for the solar sector is also reliant on such high-precision quality control, for example wafer producers and manufacturers of wafer cutting and laser systems.

Another area of application in power engineering involves the analysis of components in energy genera-tion. For example, turbine blades in gas-fired power stations are subjected to enormous forces, potentially leading to the formation of cracks and other defects. Gears and other drive components in wind turbines are also subject to significant loadings, and thus wear. Using NanoFocus measurement technology, the materials can be optimized, defects detected and the appearances of wear minimized.

Application areas

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Security technology

The microscopic structure of a surface is as unique as a fingerprint. High-resolution NanoFocus measure-ment technology uses this fact clearly to distinguish genuine articles from counterfeits with traceable measurement results.

Instrumentalities, counterfeits or duplicates leave traces that can often only be clearly allocated in the micrometer or nanometer range. These traces offer valuable insights in criminal investigations, and can be used as evidence in court. Using modern analytical methods makes a significant contribution to rapidly identifying perpetrators and reconstructing sequences of events. Whether banknotes, valuable works of art, pirated products or even forensic evidence are involved – NanoFocus measurement systems deliver reliable proof both in 3D and comprehensively. They work without contact and there is no need for sample preparation, meaning that the technology can also be used on highly sensitive surfaces.

Security features, the exact relief of the ink application and precise matching with official printing plates can be measured with precision down to the nanometer. Deviations in the results thus provide reliable evidence of counterfeiting.

Paintings, sculptures and other works of art are at risk of deterioration and theft. NanoFocus systems deliver surface information which uniquely identifies each work of art. In this way, objets d'art that are believed to have disappeared can be identified, works of art can be tracked during transport and plagiarisms identified. However, 3D surface measurement technology also provides important insights when it comes to testing out conservation techniques, restorations and for research into works of art.

In forensic science, NanoFocus measurement systems assist in criminal investigations. The signature of a shot bullet is defined by a large number of ultrafine indentations which are only a few micrometers or nanometers deep. These are imprinted into the projectile after firing, as it travels through the barrel of the gun. Comparing this against a projectile fired in the laboratory using the recovered weapon can definitively prove whether a shot was fired from a particular gun.

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Confocal measurement – the "optical scanning probe"Confocal-optical measurement instruments are based on a physical principle that is as straightforward as it is robust. A special beam path in which the focus positions of the illumination and image are aligned with one another, i.e. confocal, results in the optical filtering of light beams that are reflected off the surface of a measurement object. Unfocused areas on the sample surface appear dark, focused ones light. If the imaging lens is moved perpendicular to the sample or the surface of the sample is focused through, it is possible to determine the focus position, and thus the absolute height, of every single image point on the basis of its maximum brightness. In this case, the height resolution depends on numerous technical factors, and can be increased to a level below that of the nanometer range.

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The ideal alternative to the SEM and AFMConfocal-optical technology offers many advantages in the characterization of techni-cal surfaces in the micrometer and nanometer range.

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In contrast to scanning electron microscopy (SEM), for example, confocal surface measure-ment produces data as real height coordinates (x, y, z). Only with this quantitative information is it possible to achieve exact evaluation of 3D parameters which make it possible to obtain much more meaningful results. In addition, there is no need for the samples to be prepared.

An optical system also offers advantages compared to AFM, such as large measurement areas, high speed and non-contact operation. The higher lateral location resolution of SEM and AFM compared to optical systems is frequently not required in practice.

Fast, non-contact and highly accurate on all surfacesFast focusing devices and high-performance computer algorithms allow surfaces to be measured in three-dimensions and without con-tact within a few seconds. The measurement principle operates reliably both on transparent and metallic surfaces, as well as on rough and polished ones – the breadth of possible applications is almost unbounded. Coating thicknesses of semi-transparent surfaces can also be evaluated by special algorithms.

Technical principles

Measurement procedure: The height of the lens is moved using a piezoelectric adjuster.

Measurement result: The surface topography is reconstructed from the stack of confocal images.

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Multi-pinhole disc for highest signal qualityThe core of each confocal sensor is the integrated confocal-optical filter unit that is combined with a high-precision and high-speed focusing module.

The multi-pinhole disc developed and patented by NanoFocus AG is used in the microscopes of the µsurf series as a confocal filter in the beam path. It is characterized by outputting a robust signal with extremely low levels of scattered light. The confocal images are output to the computer in real time and converted into height images by means of rapid data processing. Movement of the lens with accuracy down to the nanometer is performed under computer control, synchronously with the image recording. The particular robustness of the optomechanical design makes it possible to operate portable hand-held systems and non-fixed application in challenging production environments (e.g. on robots).

Speed record in confocal measurementThe µsprint system designed for high-speed inline applications uses an oscillating tuning fork integrated in the beam path for confocal focus modulation. In this case, up to 128 laser beams are modulated simultaneously, and detected by an optoelectronic line sensor.

The subsequent data processing takes place completely within the sensor, meaning that pure height data is transferred to the control computer on a continuous basis. With a continuous data rate of 1 million measurements per second, this process is regarded as the fastest confocal measuring instrument in the world.

Patented NanoFocus technologies

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Compliance with standards and correlation with tactile dataAccurately reproducing the profile of ultrafine roughness structures represents a central quality criterion of the confocal measurement technology developed by NanoFocus. In industrial applications, comparability with roughness values measured by tactile methods in accordance with the standard is of particularly high importance. Numerous scientific and industrial studies impressively demonstrate that NanoFocus systems meet the highest requirements here, and can be used alongside tactile systems without fear of contradiction. NanoFocus instruments are calibrated using certified gages, as are typically used in tactile roughness measurement technology as well. The profile and surface data is also evaluated in accordance with international standards such as the new international ISO 25178 standard.

99% correlation (CCF) Best system in the NIST comparative study

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Compact and capable of integration: OEM modules for machine integrationThese sensors were developed more than 15 years ago by NanoFocus AG, and with each new generation the integration density of optomechani-cal and electronic components is increased, while the space required for their installation is reduced further. In conjunction with industry-capable con-nection technology and flexible control software, this provides the user with compact built-in sensors for machine integration. It goes without saying that each customer receives the necessary individual support in integration and implementation of the measurement technology requirements from the expert team of NanoFocus engineers.

Patented NanoFocus technologies

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Multi-sensor systems with a wide selection of sensors and componentsWhether in combination or individually – pat-ented open and closed-loop control technology from NanoFocus AG makes it possible to control various sensors with different measurement principles, including CLA profile sensors, DIC, coating thickness sensors and cameras.

Users benefit not only from the optimum cost of integration into a compact multi-sensor system, but also from the uniform operability using central control and evaluation software. Tailor-made measurement systems with large travel units form the basis of our custom series.

Extensive interfaces and high level of automationBoth in industry and in research, measurement data generally undergoes further processing. For example, it can be output in conforming data packages (e.g. Qs-STAT) for statistical quality control in industry. Scientific data pro-cessing is based on an extensive selection of transfer formats (ASCII, CSV, XLS, etc.) or the direct implementation of MATLAB modules. Together with an international working group of measurement instrument manufacturers, the uniform X3P data format has additionally been developed to allow measurement data from different measurement instruments to be used.

For automatic measurement and analysis of samples through to programmed series measur-ing of thousands of individual measurements, NanoFocus offers high-performance database-based software which permits not only industry typical rights management but also flexible programming of individual measurement and evaluation strategies.

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µsurf – Maximum precision for 3D roughness measurementThe µsurf optical 3D measurement system is the basis of a series for high-precision measurement and analysis of surfaces. The flexible and user-friendly measurement solution is used successfully in numerous companies and sectors. Thanks to its robust structure and intuitive menu system, the flexible confocal microscope is suitable both for economical use in the test and inspection laboratory as well as in the production environment. With its high optical resolution, the µsurf also reliably scans rough surfaces and structures with steep flanks.

µscan – Scanning profilometry for large measurement distancesThe µscan 3D profilometer has proven itself many times over in measuring topography, height profile or coating thickness as part of the production process. Its modular design allows it to be adapted to many different measurement tasks. Using NanoFocus µscan technology, you can also measure up to 100 times faster than with conventional probe systems. The available optical sensors cover height measurement ranges between 300 µm and 18 mm. The height resolution is as detailed as 10 nm.

µsprint – Ultra-fast 3D profilometry for large measurement surfacesWith a previously unparalleled scanning rate, the µsprint compact 3D inspection system generates topographical data from an extremely wide range of surfaces with high precision. Surfaces can be measured down to the micrometer range thanks to the confocal sensor, which is the fastest of its kind in the world. This makes µsprint the ideal tool for quality and process control in which high throughput rates and precise measurements are required.

Product categories

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Applications

X Roughness (3D)

X Form (3D)

X Topography (3D)

X Waviness

X Flatness

X Wear

X Form (2D)

X Roughness (2D)

X Waviness

X Flatness

X Form (3D)

X Topography (3D)

X Defect detection (3D)

X Flatness

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surf explorer

3D measurement system for industrial research and quality assurance

The μsurf explorer is a compact, flexible and user-friendly 3D measurement system for precise surface analysis which is suitable both for use in the laboratory and for automated quality assurance in production. The measurement system delivers reliable 3D measurement values quickly and straightforwardly, in only a few function steps.

Topographical and geometrical measurements can be conducted using the µsurf explorer on a wide range of different materials without contact, and with repeat accuracy. The measurement system provides quantifiable, real 3D measurement data without sample preparation. The typical measurement time is only a few seconds. With its high optical resolution, the µsurf explorer also scans rough surfaces and structures with steep flanks.

X Flexible all-round measurement solution

X Compact design

X User-friendly concept

X Robust and reliable

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Universally applicable

The portable μsurf mobile is excellently suited to industrial applications throughout the entire process chain. It has been developed especially for measurements on large objects and samples that are difficult to move, such as rollers and body in white. The µsurf mobile is ready for use on the spot in a matter of minutes and can easily be placed on the test specimen by hand – because it only weighs 5 kg.

The μsurf mobile can be used for carrying out roughness measurements in accordance with DIN EN ISO, as well as analyses of 3D structures and determining geometries. Structuring and volume parameters are evaluated automatically. A rolling workstation, optional lens revolver and application-specific software solutions make it possible to assemble the ideal overall package for each requirement to permit mobile surface measurement.

surf mobile

X Portable use

X Only 5 kg

X Motorized xyz axes

X Real 3D measurement values

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surf cylinder

Special solution for engine cylinders

The NanoFocus μsurf cylinder is a confocal 3D surface measurement system for a high-resolution, non-destructive measurement of the surface of cylinder liners. Numerous automotive companies and components suppliers use the measurement system in development and for quality control.

With periscope optics, the measurement head is inserted into the cylinder bore, and can reach any required measurement position within the cylinder bore in short time. Automated measurement sequences are stored in the database for repeat measurements and series inspections. A supplementary line walking system also permits automation of the measurement processes. The measurement head moves independently on a system of rails attached to the engine block, reaching the individual cylinder bores and measuring them automatically. This means there is no need for changeovers or manual intervention in the measurement process.

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X Established industry solution

X Non-destructive due to plunge mechanism

X Movable to any measurement position (radial, axial)

X Automatable

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X Simple integration

X Customer-specific versions possible

X Universally applicable

X Real 3D data

surf sensor

OEM solution for simple integration

The μsurf surface sensor is the core of the confocal μsurf 3D technology. It can be integrated individually into production machines and analytical systems. Software development kits permit complete integration into a higher-level software solution. This simple integration and great flexibility in practical use means that the µsurf sensor is suitable for a wide range of applications.

The µsurf sensor scans exact three-dimensional surface structures and complex geometries. With resolution accurate to the nanometer, meaningful measurement results can be obtained in a matter of seconds, even with the smallest height structures. Reproducible measurement is guaranteed even on surfaces with steep flanks and discontinuous areas. Due to its wide dynamic range, the sensor operates without problems on numerous surfaces – from mirror smooth to rough.

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With an extremely high measurement frequency, the µsprint topographer compact 3D inspection system generates topographical data from various surfaces with the highest precision. It combines the robustness of the confocal measurement principle with a unique measuring speed. This means the µsprint topographer represents the ideal instrument in quality control wherever high throughput rates and precise measurements over large surfaces are required.

μsprint technology is suitable for a wide range of applications in the automotive industry, medical technology, microelectronics or in the semiconductor area. The sensor principle operates on highly reflective surfaces with the same level of reliability as on light-absorbent and rough surfaces.

X Fastest confocal sensor

X Compact 3D measurement solution

X Independent of surface properties

X High numerical aperture

High-speed 3D surface inspection

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X Fastest confocal sensor

X Inline-capable with simple integration

X High precision

X Independent of surface properties

Confocal 3D inline sensor

sprint sensor

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μsprint is the inline-capable high-speed measurement solution for quality assurance, process control and development. Whether as a stand-alone solution for the laboratory, with a housing for industrial production environments or as a component in existing systems – the μsprint sensors can be integrated flexibly and easily.

With more than one million measurements per second, μsprint sets new standards in terms of speed. In combination with its high precision and wide measurement range, μsprint is thus the inline-capable all-in-one solution for a wide bandwidth of measurement tasks. The sensor is particularly suitable for 3D form inspection, inspection of wafer bumps and high-precision electronic components as well as for analyzing linear and spot welds.

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X Various additional sensors

X Large travel units

X Full automation

X Customer-specific evaluations

X Combinable with µsurf technology

X Various point sensors

X Modular structure

X Automated measurement and analysis

X High-speed measurements

X Full automation

X Industrial data interfaces

X Sample handling

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Tailor-made measurement instruments

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NanoFocus assembles the measurement systems in the custom product group individually according to customers' specific requirements. The hardware and software can be upgraded and retrofitted with numerous optional features. Whether with µsprint, µscan or µsurf technology – tailor-made customizing allows each measurement task to be accomplished optimally.

The µsurf custom represents the flexible all-round measurement solution in the µsurf product range. Depend-ing on the requirements, the μsurf custom can be adapted to automation, measurement convenience and accuracy. A wide selection of components allows use as a universal laboratory instrument through to a fully automated "pushbutton solution". Polymers, metals or composite materials – almost all surfaces, and even samples with a large area, can be converted into precise measurement values. This means the μsurf custom is the ideal solution for automated quality assurance, a wide variety of uses in the research laboratory and for the production environment.

The µscan custom is a modular 3D profilometry system that has proven its effectiveness many times over in measurements of topography, height profile or coating thickness in the production process. To adapt to the particular measurement task, the μscan custom can be equipped with different sensor modules.

The confocal point sensor meets an extremely wide range of requirements due to its high measurement dynamics and the robustness of the optical principle. With the chromatic white light sensor CLA, the large working distance and particularly small structure allows measurements to be performed even in measurement positions that are difficult to access. The autofocus sensor is preferred for use in electronics production. With its large measuring range, the holographic sensor is ideal for shape and geometry measurement.

The μsprint custom 3D inspection system combines the advantages of the inline-capable μsprint sensor with a modular structure that can be adapted to the measurement task. The system not only works with a very fast scanning speed which is ideal for high throughput rates, but also supplies reliable 3D measurement data irrespective of the material and surface properties. The μsprint custom is used worldwide for quality assurance with high throughput rates.

Using powerful NanoFocus software solutions, the measurement results are transferred in evaluation protocols that have been individually developed for the measurement task. These transmit information to the user automatically regarding whether a component meets the previously exactly defined criteria, or is "not OK". This means the entire measurement sequence with µsprint custom can be automated right through to evaluation of the measurement results.

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With NanoFocus software, you control the measurement systems and evaluate your measurement data efficiently, in line with international standards. From simple measurement sequences through to integration of the measurement instruments in your quality assurance system – the programs offer the optimum solution for each application.

Software

The μsoft metrology measurement and control software delivers meaningful 3D representations of the measurement results with intensity overlay, and meets the most exacting requirements in terms of traceability and conformity with standards. Automated measuring sequences are possible thanks to snapshot technology – µsoft metrology controls all settings such as the focus area and brightness.

soft metrology

μsoft analysis is an evaluation software package for 2D/3D surface analysis with extensive functions. The software always contains the latest standard parameters and filter functions.

Numerous display options such as profile view, 3D reconstruction and reflected image generate meaningful measurement reports. The software is available in the following versions: Standard, Extended and Premium.

soft analysis

soft automation

μsoft automation enables individual measurements and evaluations to be automated easily. All defined measurement parameters are stored in a measure-ment template. The operator runs these at the push of a button. The measurement data is stored in a database. The database forms the interface to the test system and an μsoft automation analysis module tailored to your requirements.

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Contact/legal noticeNanoFocus AG | Lindnerstr. 98 | 46149Oberhausen | Phone +49 208 62 000 0 | Fax +49 208 62 000 99 | info@nanofocus.de | www.nanofocus.deRegistered offices: Oberhausen | Court of registry: Duisburg HRB 13864Chairman of the Supervisory Board: Dr. Hans Hermann Schreier | Board of Management: Jürgen Valentin (spokesperson), Marcus Grigat, Joachim SorgConcept/text: NanoFocus AG | Concept/design: Oliver Nicolay, nicolaygrafik.dePhotography: Mike Henning, henning-photographie.de | Text/editing: Michael Schneiberg, schneiberg.dePicture credits: NanoFocus AG, Mike Henning, Oliver Nicolay, Fotolia

NanoFocus AGLindnerstraße 98 | 46149 Oberhausen | Phone +49 208-62 000-0 | Fax +49 208-62 000-99 | info@nanofocus.de | www.nanofocus.com

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Are you interested in other applications or products, and would you like consulting advice? Then please call us or send an e-mail to: sales@nanofocus.de