nanopositioning controllers for piezo systems, digital ...€¦ · for more information on pi...

Nanopositioning Controllers Digital and Analog Models, Single & Multi-Channel

FAST

COMPACT

COST EFFICENT

W W W . P I . W S

http://www.piezo.ws

Nanopositioning Controllers with Digital Servo

Nanopositioning Controllers with Analog Servo

E-709 Compact Digital Piezo Controller: High performance at low cost

E-753 Ultra-High Performance 1-Channel Digital Piezo Controller

E-761 Digital Piezo Controller Board, 3 Channels

E-725 High-Performance Digital Piezo Controller, 3 Channels

E-710 Digital Piezo Controller. 3, 4 and 6 Axis Models

E-712 Ultra-High Performance Modular Controller. 3 to 6 Axes. For Piezo flexure and linear motor drives.

E-500 Modular High-Power Controller E-545 Economical controller for PInano™

microscope stages, 3-Channels E-616 piezo controller for 2 and 3 axis steering mirrors, low cost..

E-621 OEM Module. USB, RS-232 and Analog Interfaces. Network feature

E-625. Bench top Controller . USB, RS232 & Analog Interfaces. Network feature

E-664 Low-Cost Controller for NanoCube® XYZ positioning stage

More Info:Click Images

Software ToolsFor LabView, C++, VB, Matlab, Image Acquisitiong Packages, NI DAC Cards, .....

The high quality of positioning devices are identical in syntax significantly accelerated. The dynamic link libraries (DLL) andsystems is made apparent in and function. Through the use GCS commands are available Linux libraries. This facilitatesdaily operation by PI software. of the GCS command set with at the controller terminal, in the development of customStarting with simple commis- its convenient functions, the macros and in the form of a macros, as well as integrationsioning, through convenient orientation phase and applica- universal driver set for with programming languagesoperation with a graphical tion development process is LabVIEW (VIs), Windows like LabVIEW, C++ or MATLAB.interface, to quick and simpleintegration in customized pro-grams with high performance,PI software covers all aspectsimportant to an application.

Universal Command Set Software and manuals can be downloaded,

Simplifies Commissioning from the PI Support server

and ProgrammingSoftware Updates Online

For uniform operation of nanoPI supports users with free

and micropositioning systems,updates, detailed online help

the universal PI Generaland well structured manuals

Command Set (GCS) is used.which ease initiation of the

GCS operation is independentinexperienced but still answer

of the controller or drive princi-the detailed questions of the

ple used, so that several posi-professional.

tioning systems can be con-trolled together, or new sys- Easy integration in LabView. Quick access to the full functionality

Contact PI for our extensive library of software examples!tems can be introduced with a Supported Operating Systems

minimum of programming Microsoft Windows Vistaeffort. With GCS the develop-

PI piezo stages & controllers are compatible with all major image acquisition Microsoft Windows XPment of custom application

software packages such as, Metamorph™, µManager™, Slidebook™, programs is simplified and less Microsoft Windows 2000

Simple PCI™, NIS Elements™, ImagePro™.prone to errors, because the Linuxcommands for all supported For more information on PI software support, go online or request the PI software brochure

PI provides high-level, robust, easy-to-use software tools for fast, seamless integration of motion systems into application control software

PC/MAC/Linux

Controllers PositionersPiezo • Nano • Positioning

Controllers for Piezo Motors Piezo Nanopositioners

USB, TCP/IP, Analog,

RS232, GPIB,Piezo Motor-DrivenControllers for Piezo Trigger I/O

Nanopositioning Stages Actuators & Stages

GCS Software MotorizedControllers for VoiceCoil,

MicropositionersServo & Stepper Motors Platform Independent

Hexapod 6-Axis StagesControllers for Complex Multiaxis Systems

s

sCommunication between PI components is based upon a universal command set (GCS – General Command Set). It decouples hardware and software, and is used for all drive systems

The E-709 opens up the possibi-lities of digital control forpiezo-driven nanopositioningsystems for the same priceas analog controllers. It is avail-able for capacitive sensors andnanopositioning stages whichare equipped with cost effectivemeasuring systems such asstrain gauges or piezoresistivesensors. The advantage: higherprecision, more control optionsand very simple operation. Inaddition, PI provides the fullfunctionality of its comprehen-sive software packages free ofcharge! The E-709 can also beused for applications providinganalog control signals. In addi-tion to a variety of digital inter-faces an analog input andoutput are also included. A soft-ware command allows the ana-log input to be interpreted asposition control signal or as a

sensor value. The analog outputcan be configured for the con-trol of external amplifiers or forthe output of position values.

Digital Linearization Now also forStrain Sensors: 10X More Precise!For the first time, the E-709 na-nopositioning controller opensup the advantages of digitalcontrol to compact systemswith strain sensors. These sen-sors are based on the strain ofmetal foils or semiconductorfilms (piezoresistive sensors)and are used when space limi-tations prevent the use ofthe more advanced capacitivesensors, or where the require-ments in terms of resolution ortemperature stability are not ascritical.The limited linearity of thesestrain sensors can be improvedby digital controllers, which use

additional linearization algo-rithms to minimize the devia-tion between target and actualposition. This improves theaccuracy by up to one order ofmagnitude and achieves linea-rity values of up to 0.02 %.

Flexibility: Software Configu-rable Servo Parameters

All servo controllers require tu-ning and adjustment of servoparameters for optimum per-formance (e.g. as a result ofchanges to the load or the mo-tion profile). With a digital con-troller, all adjustments arecarried out by simple softwarecommands and the resultingmotion or transient characteris-tics can be viewed, analyzedand further optimized immedi-ately with the provided soft-ware. It is also possible toswitch between previouslyfound sets of parameters whenthe controller is in operation.Since jumpers and potentiome-ters no longer have to be setmanually, system integrationbecomes much more straightforward.

OEM Versions at anEven Lower Price

E-709 controllers are also of-fered without case. A lower costversion sold as the E-609 isavailable for purely analog con-trol signals, maintaining theadvantages of digital signal pro-cessing and parameter setting.

Increased Performance now Also availbable for Piezo Systems with Strain Sensors

E-709 Compact, Low-Cost Digital Controllers for Cap & SGS

©P

hys

ikIn

stru

men

te(P

I)G

mb

H&

Co

.KG

2009

.Su

bje

ctto

chan

ge

wit

ho

ut

no

tice

.All

dat

aar

esu

per

sed

edb

yan

yn

ewre

leas

e.T

he

new

est

rele

ase

for

dat

ash

eets

isav

aila

ble

for

do

wn

load

atw

ww

.pi.w

s.R

210

/10/

26.0

Compact, low-cost E-709digital controller (preliminarycase design) with P-712 piezo-scanner

OEM Version Board

The target position is controlledvia an analog signal, allowingsystem components with ana-log output (e.g. autofocus) to beintegrated easily.

Ordering Information

Choice: Cap Sensors: Higher Performance; PRS: Lower Cost

Fast Digital Controller, Software Configurable ServoParametersLinearity of SGS and Piezoresistive Sensors Improved by upto 0.02 %USB and RS-232 InterfacesFast 25 Mbit/s Serial InterfaceComprehensive I/O FunctionsAdditional High-Bandwidth Analog Control Input /Sensor InputAnalog Output, e. g. for External AmplifiersLow-Cost OEM Versions AvailableComprehensive Software Package

E-709 low-cost digital controller for capacitive sensros

E-709.CRDigital Piezo Controller, 1 Channel,OEM Module, -30 to 130 V,Capacitive Sensor

E-709.CRGDigital Piezo Controller, 1 Channel,-30 to 130 V, Capacitive Sensor,Bench-Top

Accessories:

E-709.01Adapter HD-Sub-D 26-pin to Sub-D9-pin with I/O Lines, 0.5 m

E-709.02Adapter Cable HD-Sub-D 26-pinto Open Leads, 1 m

E-609.C0Piezo Driver with Digital Servo,Analog Control Input, 1 Channel,OEM Module, -30 to 130 V,Capacitive Sensor

E-609.P0Piezo Driver with Digital Servo,Analog Control Input, 1 Channel,OEM Module, -30 to 130 V,Piezoresistive Sensor

E-609.S0Piezo Driver with Digital Servo,Analog Control Input, 1 Channel,OEM Module, -30 to 130 V,SGS-Sensor

Cap/ Digital & Analog Input

E-709.PRGDigital Piezo Controller, 1 Channel,-30 to 130 V, Piezoresistive Sensors,Bench-Top

E-709.SRGDigital Piezo Controller, 1 Channel,-30 to 130 V, SGS-Sensor, Bench-Top

E-709.PRDigital Piezo Controller, 1 Channel,OEM Module, -30 to 130 V, Piezore-sistive Sensors

E-709.SRDigital Piezo Controller, 1 Channel,OEM Module, -30 to 130 V, SGS-Sensor

Strain/ Digital & Analog Input

OEM Analog Input Only

E-709: operating limits with variouPZT loads (open-loop), capacitance is measured in µ

Comparison of the linearity of a strain gauge sensor wianalog controller (top) and the E-709 digital controller (bottom

which improves the linearity by up to one order of magnitud

E-709.CR / E-709.CRG

Digital controller for single-axispiezo nanopositioning systems(.CR: OEM board)

1

DSP 32-bit floating point, 150 MHz

P-I, 2 notch filter, sensor linearization

10 kHz

10 kHz

Capacitive sensors

5th order polynomials

5 kHz

16 bit

No

-30 V to +130 V

10 W (< 5 ms)

5 W (> 5 ms)

100 mA (< 5 ms)

50 mA (> 5 ms)

Short-circuit-proof

17 bit

USB, RS-232, SPI

Sub-D-Special connector

HD-Sub-D 26-pin,1 analog input 0 to 10 V,1 sensor monitor 0 to 10 V,1 digital input(LVTTL, programmable),1 analog output, 5 digital outputs(LVTTL, 3 predefined,2 programmable)

PI General Command Set (GCS)

PIMikroMove, NanoCapture

LabVIEW drivers, DLLs

Wave generator, data recorder,auto zero, trigger I/O

Status LED, overflow LED

12 to 50 °C(over 40 °C, max. av. power derated)

160 x 96 x 33 mm

260 g / 470 g

24 VDC

24 WTarget ground connector - / yes

Technical Data

Modell E-709.SRE-709.SRGE-709.PRE-709.PRG

Function Digital controller for single-axispiezo nanopositioning systems(.SR, .PR: OEM board)

Channels 1

Processor DSP 32-bit floating point, 150 MHz

Servo characteristics P-I, two notch filters,sensor linearization

Sampling rate, servo control 10 kHz

Sampling rate, sensor 10 kHz

Sensor

Sensor type Metal foil strain gauge sensors(.SR, .SRG), Piezoresistive sensors

s (.PR, .PRG)F Linearization 5th order polynomials

Sensor bandwidth 5 kHz

Sensor resolution 16 bit

Ext. synchronization No

Amplifier

Output voltage -30 V to +130 V

Peak output power 10 W (<5 ms)

Average output power 5 W (>5 ms)

Peak current 100 mA (<5 ms)

Average current 50 mA (>5 ms)

Current limitation Short-circuit-proof

Resolution DAC 17 bit

Interfaces and operation

Communication interfaces USB, RS-232, SPI

Piezo / sensor connector Sub-D 9-pin

I/O connector HD-Sub-D 26-pin,1 analog control input 0 to 10 V,1 sensor monitor 0 to 10 V,1 digital input (LVTTL,programmable),1 analog output,5 digital outputs(LVTTL, 3 predefined,2 programmable)

Command set PI General Command Set (GCS)

User software PIMikroMove, NanoCapture

Software drivers LabVIEW drivers, DLLs

Supported functionality Wave generator, data recorder,auto zero, trigger I/O

Display Status LED, overflow LED

Miscellaneous

Operating temperature range 8 to 50 °C (over 40 °C, max. powerav. power derated)

Dimensions 160 x 96 x 33 mm

Mass 260 g (.SR / .PR), 470 g (.SRG / .PRG)

Operating voltage 24 VDC

Power consumption 24 W max.

Comparison of the linearity of a strain gauge sensor withanalog controller (top) and the E-709 digital controller (bottom),

which improves the linearity by up to one order of magnitude

© P

hys

ik In

stru

men

te (

PI)

Gm

bH

& C

o. K

G 2

008.

Su

bje

ct t

o c

han

ge

wit

ho

ut

no

tice

. All

dat

a ar

e su

per

sed

ed b

y an

y n

ew r

elea

se.

Th

e n

ewes

t re

leas

e fo

r d

ata

shee

ts is

ava

ilab

le f

or

do

wn

load

at

ww

w.p

i.ws.

Cat

120E

Insp

irat

ion

s200

9 08

/10.

18

E-753 Ultra-High Performance Digital Piezo Controller, 1 AxisHigh-Speed, Single-Axis Controller

The E-753 next-generation digi-tal piezo controller is the resultof PI's 30+ years of experiencewith piezo motion control sys-tems. It is ideal when it comesto meeting the most demandingaccuracy and dynamic-perfor -mance requirements of nanopo-sitioning systems of the highestprecision class. The E-753replaces the E-750 controller.

Digital Linearization andControl Algorithms for HighestAccuracyLinearization algorithms basedon higher -order polynomialsimprove the positioning accura-cy to 0.001 % of the travel range. During fast periodic motion, astypical for scanning appli -cations, the tracking accuracycan be further improved with

Dynamic Digital Linearization(DDL, E-710.SCN). This optional-ly available control algorithmreduces the tracking error by afactor of up to 1000 and enablesthe spatial and temporal track-ing during a dynamic scan.

Higher Velocity and Bandwidthfor Dynamic Applications

The controller is perfectly suitedfor high-dynamics operationthanks to its high-resolution DA-converter and high-perform-ance voltage amplifier . Thehigh-speed processor with asensor sampling rate of 100 kHzassures settling times in the mil-lisecond range and below.

Flexibility for a Variety ofApplications

PI nanopositioning systemswhich are equipped with an ID-chip and calibrated with a di -gital controller have the mecha -nics-related calibration andservo-control parameters storedin the chip. The controller auto-matically adapts to the connect-ed mechanics by the appropri-ate use of this data, so thatrecalibration is not necessarywhen system components arereplaced.

The integrated wave generatorcan save and output periodic

motion profiles. In addition tosine and triangle waves, arbi-trary, user -defined profiles canbe created.

Simple System Integration

All parameters can be checkedand reset via software. Systemsetup and configuration is donewith the included Nano Cap -ture™ and PIMikroMove™ user -interface software. Interfacing tocustom software is facilitatedwith included LabVIEW driversand DLLs. System programmingis the same with all PI con-trollers, so controlling a systemwith a variety of different con-trollers is possible without diffi-culty.

E-753 Single-channel digital controller together with the PIHera® P-629.1CD nanopositioning stage with 1500 µm travel

Next Generation Digital Controller Provides Higher Flexibility ,Accuracy and Speed

100 kHz Sensor Sampling; 32-bit Floating Point DSP; 24-bitLow-Noise D/A Converters

Ethernet (TCP/IP) Interface for Remote Control Capability , RS-232

Auto-Loading of Calibration Data from Stage ID-Chip forInterchangeability of Controller and Mechanics

Additional High-Bandwidth Analog Control Input / Sensor Input

Digital I/O Lines for Task Triggering Extensive Software Support For Nanopositioning Systems with Capacitive Sensors

P-725 PIFOC® objective Z-positioner and E-753 controller constitute an optimal system for high-speed, high-resolution

positioning and scanning.


E-753.1CDHigh-Speed Single-Channel DigitalPiezo Controller for CapacitiveSensors

E-710.SCNDDL (Dynamic Digital Linearization)Firmware Upgrade

E-753.IOCable for Digital I/O Lines, 1.5 m,Solderable End

Ask about custom designs

Technical Data

Model E-753.1CD

Function Digital controller for single-axis piezo nanopositioning systems with capacitive sensors

Axes 1

Processor DSP 32-bit floating point, 60 MHz

Sampling rate, servo-control 25 kHz

Sampling rate, sensor 100 kHz

Sensor

Servo characteristics P-I, two notch filters

Sensor type Capacitive

Sensor channels 1

Sensor bandwidth 5.6 kHz

Sensor resolution 17-bit

Ext. synchronization Yes

Amplifier

Output voltage -30 V to 135 V

Amplifier channels 1

Peak output power <5 ms 15 W

Average output power >5 ms 5 W

Peak current <5 ms 110 mA

Average current >5 ms 40 mA


Resolution DAC 24-bit


Communication interfaces Ethernet, RS-232

Piezo connector Sub-D special connector

Sensor connection Sub-D special connector

Analog input LEMO, ±10 V, 18 bit

Digital input 2 x LEMO, TTL

Digital output 2 x LEMO, TTL

Command set GCS

User software NanoCapture™, PIMikroMove™


Supported functionality Wave generator, trigger I/O,data recorder

Display Status LEDs

Linearization 4th order polynomials, DDL (optional)

Separate protective Yesground connector

Miscellaneous

Operating temperature range 5 to 50 °C

Overtemp protection Deactivation of the piezo voltage output at 85 °C

Mass 0.9 kg (controller)

Dimensions Controller: 264 x 125 x 48 mm (with rubber feet)Power supply: 174 x 95 x 58 mm (with rubber feet)

Power consumption 10 W max.

Operating Voltage 24 VDC from external power supply (included)

E-753 open-loop operating limits with various PZT loads. Graphs reflect the large signal-current limitation of

the amplifier circuit, not the actual bandwidth.

© P

hys

ik In

stru

men

te (

PI)

Gm

bH

& C

o. K

G 2

008.

Su

bje

ct t

o c

han

ge

wit

ho

ut

no

tice

. All

dat

a ar

e su

per

sed

ed b

y an

y n

ew r

elea

se.

Th

e n

ewes

t re

leas

e fo

r d

ata

shee

ts is

ava

ilab

le f

or

do

wn

load

at

ww

w.p

i.ws.

Cat

120E

Insp

ira

E-725 High-Performance 3-Channel Digital Piezo ControllerFor 3-Axis High-Speed Precision Positioning Systems

E-725 Digital 3-channel controllerwith P-528 Z/tip/tilt

nanopositioning system

For Nanopositioning Systems with Capacitive Sensors 3-Channel Version Powerful Digital Controller: DSP 32-bit Floating Point,

225 MHz; 20 kHz Sampling Rate; 24-bit DAC Communication via Ethernet, USB, RS-232 4th Order Polynomial Linearization for

Mechanics & Electronics Dynamic Digital Linearization (DDL) Option for Improved Path

Accuracy Auto-Loading of Calibration Data from Stage ID-Chip for

Interchangeability of Controller and Mechanics Additional High-Bandwidth Analog Control Input /

Sensor Input

tio

ns2

009

08/1

0.18 Optional High-Speed Parallel I/O Interface

Flexible Wave Generators Digital I/O Lines for Task Triggering Extensive Software Support

be further improved withDynamic Digital Linearization(DDL, E-710.SCN). This option -ally available control algorithmreduces the tracking error by afactor of up to 1000.

This control algorithm enablesthe spatial and temporal track -ing during a dynamic scan. Theintegrated wave generator canoutput periodic motion profi-les. In addition to sine and tri-angle waves, arbitrary , user -defined motion profiles can becreated and stored. The flexi-bly configurable data recorderenables simultaneous record -ing and read-out of the corres-ponding data.

Extensive Software SupportThe E-725 digital piezo control- Optional interfaces and analogler is a compact, high-perfor- in- and outputs make it possi- The controllers are deliveredmance drive electronics for ble to process external sensor with Windows operating soft-nanopositioning systems with or control values. ware. Comprehensive DLLsup to three axes. High-power and LabVIEW drivers are a -amplifiers permit dynamic Digital Linearization and vail a ble for automated control.scans even for piezo systems Control Algorithms forwith large range or direct drive. Highest Accuracy Automatic ConfigurationState-of-the-art processor tech- Linearization algorithms based PI digital piezo controllers andnology optimizes the operating on higher -order polynomials nanopositioning stages withparameters for improved linea- improve the positioning accu- ID-Chip can be operated in anyrity and tracking accuracy . racy to better than 0.01 % for combination, supported by theHigh-resolution D/A converters capacitive sensors, typically AutoCalibration function of theprovide for nanopositioning 10 times better than achievable controller. Individual stagethat deserves this name. with conventional controllers. data and optimized servo-con-

trol parameters are stored inMore than just a Controller –With the E-725.3CM, PI for the the ID-Chip and are read outTrajectory Control and Datafirst time offers a digital con- automatically by the digitalRecordingtroller for the P-363 PicoCube™ controllers.

(see p. 2-66), a fast precision During fast periodic motion, asscanner for atomic force micro - typical for scanning applica-scopy. tions, the tracking accuracy can


E-725.3CDDigital Multi-Channel PiezoController, 3-Channel, Sub-DConnector for Capacitive Sensors

E-725.3CMDigital Multi-Channel PiezoController, for PicoCube™ and Capacitive Sensors

Ask about custom designs

Technical Data

Model E-725.3CD E-725.3CM Tolerance

Function Digital Controller for Digital Controller for Multi-Axis Piezo Multi-Axis PiezoNanopositioning Systems Nanopositioning Systems with Capacitive Sensors with Capacitive Sensors

Axes 3 3

Processor DSP 32-bit floating point, DSP 32-bit floating point, 225 MHz 225 MHz

Sampling rate, servo-control 20 kHz 20 kHz

Sampling rate, sensor 20 kHz 20 kHz

Sensor

Servo characteristics P-I, two notch filters P-I, two notch filters

Sensor type Capacitive Capacitive

Sensor channels 3 3

Sensor bandwidth (-3 dB) 5.6 kHz 5.6 kHz max.

Sensor resolution 18 bit 18 bit

Ext. synchronization Yes Yes

Amplifier

Output voltage -30 to 135 V -250 to 250 V ±3 V

Amplifier channels 4 4

Peak output power per channel 25 W 47 W max.

Average output power per channel* 10 W 10 W max.

Peak output current per channel 190 mA 190 mA max.

Average output current per channel* 120 mA 60 mA max.

Current limitation Short-circuit proof Short-circuit proof

Resolution DAC 24 bit 24 bit


Communication interfaces Ethernet, USB, RS-232 Ethernet, USB, RS-232

Piezo / sensor connector Sub-D special connector Sub-D special connector

Analog input 1 x Lemo, ±10 V, 18 bit 1 x Lemo, ±10 V, 18 bit

Digital input / output MDR20; 2 x IN, 8 x OUT MDR20; 2 x IN, 8 x OUT

Command set PI General Command Set (GCS) PI General Command Set (GCS)

User software NanoCapture™, PIMikroMove™ NanoCapture™, PIMikroMove™

Software drivers LabVIEW driver, DLLs LabVIEW driver, DLLs

Supported functionality Wave-Gen, Trigger I/O Wave-Gen, Trigger I/O

Display LEDs for Power, On Target, LEDs for Power, On Target,Error, Cmd Error, Cmd

Linearization 4th order polynomial, 4th order polynomial,

DDL (Dynamic Digital DDL (Dynamic Digital

Linearization) Linearization)

Separate protective ground connector Yes Yes

Miscellaneous

Operating temperature range 5 to 50 °C 5 to 50 °C

Overheat protection Max. 71 °C, deactivation Max. 71 °C, deactivation

of the piezo voltage output of the piezo voltage output

Mass 3.5 kg 3.6 kg

Dimensions 263 x 89 x 302 mm 263 x 89 x 302 mm

(with handles) (with handles)

Power consumption 70 W 70 W max.

Operating voltage 24 VDC from external 24 VDC from external

power supply (included) power supply (included)

* The total output power of all 4 amplifier channels should not exceed 34.5 W to avoid overcurrent (E-725 is equipped with a 3. 15 AM fuse).

E-761 digital piezo controllersoffer advanced control tech-nology in a cost-effective PCI-board format. They weredesigned to run piezo stageswith up to three logical axes.The E-761 incorporates fourinstrumentation-class, 24-bitdigital-analog converters (DAC)behind ultra-low-noise poweramplifiers, and is based on aspecialized 32-bit digital signalprocessor (DSP) with propri-etary firmware.

Having PCI-board format, theE-761 digital controller can beeasily installed in any com-mercial or industrial PC, allow-ing for easy integration withother devices such as framegrabbers. The PCI interfacewith its high bandwidth makespossible a very fast communi-cation between software and

controller. This is a definiteplus in time-critical applica-tions or when controlling sev-eral axes.

Additionally, the E-761.3CTversion offers three digitaloutput lines for a variety oftriggering tasks.

Improved Trajectory AccuracyThrough Parallel Metrology

Digital controllers have anumber of advantages overconventional analog piezocontrollers. Sensor and actua-tor axes need not be parallelto each other, or to the ortho -gonal logical axes used tocommand the system. Theflexible coordinate transfor-mation algorithm permitsoperation of complex, multi-axis, parallel metrology stages(e. g. 3-axis Z-tip-tilt-stages).

With parallel motion metrolo-gy, the controller compen-sates the undesired off-axismotion of each actuator auto-matically using the others(active trajectory control).High-end nanopositioningsystems with active trajectorycontrol can attain motionaccuracies in the sub-nanome-ter range.

Digital Linearization andControl Algorithms forHighest Accuracy

Linearization algorithms basedon higher -order polynomialsimprove the positioning accu-racy to 0.001 % of the travelrange.

During fast periodic motion,as typical for scanning appli-cations, the tracking accuracycan be further improved withDynamic Digital Linearization(DDL, E-710.SCN). This option-ally available control algo-rithm reduces the trackingerror by a factor of up to 1000.

The integrated wave genera-tor can save and output peri-odic motion profiles. In addi-tion to sine and trianglewaves, arbitrary, user -definedprofiles can be created.

Automatic Configuration

PI digital piezo controllers andnanopositioning stages withID-chips can be operated inany combination, supportedby the controller's AutoCali -bration function. Individualstage data and optimizedservo-control parameters arestored in the ID-Chips and areread out automatically by thedigital controller.


All parameters can be set and checked by software.System setup and configura-tion is done with the included

NanoCapture™ and PZTCon -trol™ user -interface software.Interfacing to custom softwareis facilitated with includedLabVIEW drivers and DLLs. AllPI controllers use the samecommand set, a significantadvantage during applicationsoftware development, sys-tem upgrade or when operat-ing a variety of different con-trollers from one application.

E-761 Digital Piezo Nanopositioning Controller Card, 3 ChannelsCost-Efficient PCI Board for Piezo Stages with up to 3 Axes

E-761 Digital Piezo Controller in PCI-Board Format


E-761.3CDDigital Piezo NanopositioningController, 3 Axes, Sub-D-Special,PCI Board

E-761.00TTrigger Output Bracket for E-761.3CD

E-761.3CTDigital Piezo NanopositioningController, 3 Axes, Sub-D-Special,PCI Board, Trigger Output

Ask about custom designs!

For Piezo Stages with Capacitive Sensors High-Speed PCI Interface 3 Logical Axes, 4 Piezo Amplifiers Additional High-Bandwidth Analog Interface 32-Bit Digital Filters Notch Filter for Higher Bandwidth 24-Bit Ultra-Low-Noise DAC Converters Auto-Loading of Calibration Data from Stage ID-Chip for

Interchangeability of Controller and Mechanics Coordinate Transformation for Parallel-Kinematics / Parallel-

Metrology Systems Extensive Software Support

© P

hys

ik In

stru

men

te (

PI)

Gm

bH

& C

o. K

G 2

008.

Su

bje

ct t

o c

han

ge

wit

ho

ut

no

tice

. All

dat

a ar

e su

per

sed

ed b

y an

y n

ew r

elea

se.

Th

e n

ewes

t re

leas

e fo

r d

ata

shee

ts is

ava

ilab

le f

or

do

wn

load

at

ww

w.p

i.ws.

Cat

120E

Insp

irat

ion

s200

9 08

/10.

18

Technical Data

Model E-761.3CD E-761.3CT

Function Digital piezo controller and Digital piezo controller and power amplifier,power amplifier, PCI board PCI board, trigger output

Axes 3 3

Processor 32-bit, floating-point DSP 32-bit, floating-point DSP

Sampling rate, servo-control 40 µs / 25 kHz 40 µs / 25 kHz (sensor-oversampling factor 4) (sensor-oversampling factor 4)

Sensor

Servo characteristics P-I, two notch filters P-I, two notch filters

Sensor type Capacitive Capacitive

Sensor channels 3 3

Sensor resolution 16-bit 16-bit

Ext. synchronization Yes Yes

Amplifier

Output voltage -20 to 120 V -20 to 120 V


Peak output power per channel, 5.3 W 5.3 W

Average output power per channel 1.7 W 1.7 W

Peak current per channel, <20 ms 50 mA 50 mA

Average current per channel, >20 ms 10 mA 10 mA

Current limitation Short-circuit-proof Short-circuit-proof

Resolution DAC 24-bit 24-bit


Interface / communication PCI connector PCI connector

Piezo / sensor connector Sub-D special Sub-D special

Control Input sockets LEMO LEMO

Digital output - 3 x TTL

Command set GCS GCS

User software NanoCapture™, PZTControl™ NanoCapture™, PZTControl™

Software drivers LabVIEW drivers, Windows and LabVIEW drivers, Windows and

Linux Libraries (DLL) Linux Libraries (DLL)

Supported functionality Wave generator Wave generator, trigger output

Display Status LED for piezo voltage Status LED for piezo voltage

Linearization 4th order polynomial 4th order polynomial

Miscellaneous

Operating temperature range +5 to +50 °C +5 to +50 °C (derated 10 % over 40 °C) (derated 10 % over 40 °C)

Overtemp protection Deactivation at 60 °C Deactivation at 60 °C

Dimensions 287 x 108 x 25 mm (2 slots) 287 x 108 x 25 mm + 122 x 45x 26 mm (3 slots)

Mass 0.56 kg 0.56 (PCI-board only)

Operating voltage 5 V 5 V

Power consumption 20 W, 4 A max. 20 W, 4 A max.

E-761: operating limits with various PZT loads (open-loop), capacitance is measured in µF

© P

hys

ik In

stru

men

te (

PI)

Gm

bH

& C

o. K

G 2

008.

Su

bje

ct t

o c

han

ge

wit

ho

ut

no

tice

. All

dat

a ar

e su

per

sed

ed b

y an

y n

ew r

elea

se.

Th

e n

ewes

t re

leas

e fo

r d

ata

shee

ts is

ava

ilab

le f

or

do

wn

load

at

ww

w.p

i.ws.

Cat

120E

Insp

irat

ion

s200

9 08

/10.

18

E-710 Digital Piezo Nanopositioning Controller, Many Options3 to 6 axes, extremely versatile

E-710 digital piezo controllersoffer sophisticated functionalityin a variety of configurations.Based on powerful 32-bit DSPs(digital signal processor) theyinclude integrated, low-noisepower amplifiers for piezo actu-ators and excitation/read-outelectronics for extremely high-resolution capacitive positionsensors. E-710s provide up to 8piezo driver channels, 7 sensorchannels and the processingpower for coordinated controlof up to 6 logical axes, e. g. forparallel kinematics systems.


Linearization algorithms basedon higher -order polynomialsimprove the positioning accura-cy to 0.001% of the travel range.The high-speed processor witha sensor sampling rate of 25 kHz, assures settling times inthe millisecond range andbelow. The controller is perfect-ly suited for high-dynamics ope-ration, thanks to its high-resolu-tion DA-converters and high-performance voltage amplifiers.

More than just a Controller—Trajectory Control and DataRecording

During fast periodic motion, astypical for scanning applica-tions, the tracking accuracy canbe further improved with Dy -namic Digital Linearization(DDL, E-710.SCN). This optional-ly available control algorithmreduces the tracking error by afactor of up to 1000. This control algorithm enablesthe spatial and temporal tra-cking during a dynamic scan.The integrated wave generatorcan save and output periodicmotion profiles. In addition tosine and triangle waves, arbitra-ry, user-defined profiles can becreated. The flexibly configura-ble data recorder enables simul-taneous recording and read-outof the corresponding data.

Sensor-Signal Transmissionup to 15 m

A remote sensor interface box isavailable for applications wherethe distance between the me -chanics and electronics is grea-ter than 10 m. This DST option(digital sensor -signal transmis-sion), includes a compatible E-710 controller . It is designedto reduce the interference thatbegins to degrade performancewhen the analog sensor excita-tion and readout signal pathsexceed 10 m. The connectionbetween the sensor box and thecontroller can be up to 15 m(longer distances on request),as the digital signals it carriesare far more robust.


All parameters can be checkedand reset via software. Systemsetup and configuration is donewith the included NanoCap -ture™ and PIMikroMove™ user-interface software. Interfacingto custom software is facilitatedwith included LabVIEW driversand DLLs. System program-

ming is the same with all PI con-trollers, so controlling a systemwith a variety of different con-trollers is possible without diffi-culty.

For Nanopositioning Systems with Capacitive Feedback All Control Parameters Software-Settable 3-, 4- & 6-Channel Versions Firmware Linearization: Dynamic Digital Linearization (DDL)

Option Improves Scanning Linearity Coordinate Transformation for Parallel-Kinematics / Parallel-

Metrology Systems Auto-Loading of Calibration Data from Stage ID-Chip for

Interchangeability of Controller and Mechanics Interface Options: High-Speed Parallel I/O Interface and

Analog Inputs Notchfilter for Higher Bandwidth Extensive Software Support Option: Digital Sensor-Signal Transmission

over 15 m and More


See Ordering Numbers / InterfaceOptions on next page

Options and Accessories


E-710.3X3Extension Cable for E-710.3CD, 3 Sub-D Connectors, 3 m

E-710.3X5Extension Cable for E-710.3CD, 3 Sub-D Connectors, 5 m

E-710.1X3Extension Cable for E-710, 1 Sub-D Connectors, 3 m

E-710.DST4DST Cable (Digital SignalTransmission) for E-710.6SD, 8 m

E-710.6CD 6-axis Digital Piezo Controller top model of the E-710 family , shown with custom Super-Invar 6-DOF piezo flexure nanopositioning stage

Technical Data

Model E-710.3CD / E-710.P3D / E-710.A3D E-710.4CD / E-710.4CL / E-710.C4D E-710.6CD / E-710.6SDE-710.APD / E-710.APS E-710.4PD / E-710.P4D / E-710.P4L

Function Digital piezo controller for Digital piezo controller for Digital piezo controller for multi-axis nanopositioning multi-axis nanopositioning multi-axis nanopositioningsystems with capacitive sensors systems with capacitive sensors systems with capacitive sensors

Axes 3 4 6

Processor 32-bit, floating-point DSP 32-bit, floating-point DSP 2 x 32-bit, floating-point DSP

Sampling rate, servo-control 200 µs / 5 kHz 200 µs / 5 kHz 200 µs / 5 kHz

Sampling rate, sensor 50 µs / 20 kHz 50 µs / 20 kHz 40 µs / 25 kHz

Sensor

Servo characteristics P-I, two notch filters P-I, two notch filters P-I, two notch filters

Sensor type Capacitive Capacitive Capacitive

Sensor channels 3 4 6

Sensor resolution 16 bit 16 bit 16 bit

Ext. synchronization Yes Yes Yes

Amplifier

Output voltage -20 to 110 V -20 to 110 V -20 to 110 V

Amplifier channels 4 4 8

Peak output power per channel, 25 W 25 W 25 W

Average output power per channel 6 W 6 W 6 W

Peak current per channel, <20 ms 200 mA 200 mA 200 mA

Average current per channel, >20 ms 60 mA 60 mA 60 mA

Current limitation Short-circuit-proof Short-circuit-proof Short-circuit-proof

Resolution DAC 20 bit 20 bit 20 bit

Interfaces and operation see separate table

Communication interfaces RS-232; IEEE 488 RS-232; IEEE 488; RS-232; IEEE 488

Parallel I/O (E-710.Pxx / .xPx only) Parallel I/O (E-710.Pxx / .xPx only)

Command set GCS GCS GCS

User software PIMikroMove™, PZTControl™, PIMikroMove™, PZTControl™, PIMikroMove™, PZTControl™,

NanoCapture™ NanoCapture™ NanoCapture™

Software drivers LabVIEW drivers, DLLs LabVIEW drivers, DLLs LabVIEW drivers, DLLs

Supported functionality Wave generator, data recorder Wave generator, data recorder Wave generator, data recorder

Display Power LED Power LED Power LED

Linearization 4th order polynomials, DDL (optional) 4th order polynomials, DDL (optional) 4th order polynomials, DDL

Miscellaneous

Operating temperature range 5 to 50 °C 5 to 50 °C 5 to 50 °C

Dimensions 450 x 88 x 343 mm + handles 450 x 88 x 343 mm + handles 450 x 88 x 343 mm + handles

Mass 7 kg 7 kg 7 kg

Operating voltage 90–120 or 220–264 VAC, 50–60 Hz 90–120 or 220–264 VAC, 50–60 Hz 90–120 or 220–264 VAC, 50–60 Hz

Max. power consumption 60 W 60 W 120 W

Ordering Information / Interface Options

Channels Connector Base Model Parallel I/O Analog Input* Analog Input* + DST** + Analog Input*(piezomechanics) Interface Parallel I/O

Interface

3 1 x Special Sub-D, 3 ch. E-710.3CD E-710.P3D E-710.A3D E-710.APD incl. Parallel I/O InterfaceE-710.APS

4 4 x LEMO E-710.4CL E-710.P4L – – –

4 x Special Sub-D, 1 ch. E-710.4CD E-710.P4D – – –

1 x Special Sub-D, 3 ch. E-710.C4D E-710.4PD – – –

+ 1 x Special Sub-D, 1 ch.

6 2 x Special Sub-D, 3 ch. E-710.6CD – Standard – Analog input on DST boxE-710.6SD

*LEMO connector**Digital Signal Transmission

The digital sensor-signal transmission (DST) allows a distance up to 15 m between positioning unit and controller

BR

O12

ED

igit

alC

on

tro

l09/

06.2

Su

bje

ctto

chan

ge

wit

ho

ut

no

tice

.©

Ph

ysik

Inst

rum

ente

(PI)

Gm

bH

&C

o.K

G20

09

The E-712 digital piezo con-troller is ideal when it comes tomeeting the most demandingaccuracy and dynamic-perfor-mance requirements of multi-axis nanopositioning systems.The high-performance, real-time operating system makespossible coordinated servo-control of multiple axes (also inparallel-kinematics systems)and thus ensures excellent tra-jectory control even duringcomplex motion. The modulardesign allows flexible confec-tion of systems supporting thenumber of axes and channelsrequired for the application.Flexibility in meeting cus-tomers' needs is also behindthe interface design: The op-tional analog inputs and out-puts support processingexternal sensor or control sig-nals as well as driving externalamplifiers.


Linearization algorithms basedon higher-order polynomialsimprove the positioning accu-racy to better than 0.01 % forcapacitive sensors, typically

10 times better than achievablewith conventional controllers.

More than just a Controller—Trajectory Control and DataRecording

During fast periodic motion, astypical for scanning applica-tions, the tracking accuracy canbe further improved with Dy-namic Digital Linearization(DDL, E-710.SCN). This option-ally available control algorithmreduces the tracking error by afactor of up to 1000 and enablesthe spatial and temporal track-ing during a dynamic scan. Theintegrated wave generator canoutput periodic motion profiles.In addition to sine and trianglewaves, arbitrary, user-definedmotion profiles can be createdand stored. The flexibly config-urable data recorder enablessimultaneous recording andread-out of the correspondingdata.

Flexible Analog Inputs andReal-time PIO

Each of the four optionallyavailable analog inputs can beconfigured in two ways. Whenused as a control input, the ap-plied voltage is linked to one of

the axes, for target value set-tings, for example. When con-figured as an external sensorinput, additional sensor signalse.g. for auto-focusing, can beread in. Alternatively, the sys-tem can be equipped with a fast32-bit PIO (Parallel I/O) for plac-ing commands. The PIO sup-ports a restricted command setrequired for the motion with100,000 read and write com-mands per second.


All parameters can be checkedand reset via software. Systemsetup and configuration is donewith the included NanoCap-ture™ and PIMikroMove™ user-interface software. Interfacing tocustom software is facilitatedwith included LabVIEW driversand DLLs. System programmingis the same with all PI con-trollers, so controlling a systemwith a variety of different con-trollers is possible without diffi-culty.

Example for the modular use of an E-712 for the vertical andtilt system with three mixed, hybrid drives. They consist of

NEXLINE® linear actuators with additional PICMA® actuatorsfor an increased fine adjustment range.

Examples of the modular use of one E-712 for a mixed operation oflow voltage and medium voltage actuators (120 V or ±250 V). Thepositioning system has two separate axis systems for the adjustingand actual measurement process in an inspection system.

E-712.3CDAModular Digital Multi-ChannelPiezo Controller, 3 Channels,Capacitive Sensors,Analog INs and OUTs

E-712.6CDModular Digital Multi-ChannelPiezo Controller, 6 Channels,Capacitive Sensors

E-712.6CDAModular Digital Multi-ChannelPiezo Controller, 6 Channels,Capacitive Sensors,Analog INs and OUTs

These models have RS-232,USB and TCP/IP Interfaces.

Further Interfaces are available:

E-711.IA4Analog Interface Module, 4 I/O forE-712 modular, digital, ControllerSystem

E-711.IPPIO Interface Module for E-712modular, digital, Controller System


Options and Accessories:


E-711.i1BAnalog Cable for Analog I/O,BNC Connector, 1.5 m

E-711.i10Analog Cable for Analog I/O,Solderable End, 1.5 m


E-712.3CDModular Digital Multi-ChannelPiezo Controller, 3 Channels,Capacitive Sensors

E-712 Ultra-High Performance Digital Nanopositioning ControllerModular Platform for Precision Piezo Systems and NEXLINE® Drives

E-712 Digital Nanopositioning Controller: OptionsModular Platform for Precision Piezo Systems and NEXLINE® Drives

E-712 digital controller fornanopositioning systems with up to 6 axes

Digital Controller of the Newest Generation: 600 MHz TactRate; up to 50 kHz Servo Update Rate; Highly Stable 20-bitD/A Converter

Real-Time Operating System for Excellent Trajectory Control Modular Design for Greatest Flexibility in Meeting Custom

Requirements Auto-Loading of Calibration Data from Stage ID-Chip for

Interchangeability of Controller and Mechanics Versatile Interfaces: Ethernet, USB, RS-232 Optional High-Bandwidth Analog Inputs and Outputs Extensive Software Support

Preconfigured Digital Case unit Interface modul Sensor modul Amplifier Sensor modul Amplifiersystem controller unit modul modul

Nanopositioning systems with voltage E-712.3CD E-712.M1* E-712.R1* – E-711.SC3H* E-711.AL4P* – -

requirement of up to +120 V with 3 axes

and capacitive sensors

Nanopositioning systems with voltage E-712.6CD E-712.M1* E-712.R1* – E-711.SC3H* E-711.AL4P* E-711.SC3H* E-711.AL4P*requirement of up to +120 V with up to6 axes and capacitive sensors

Nanopositioning systems with voltage E-712.3CD E-712.M1* E-712.R1* E-711.IA4 E-711.SC3H* E-711.AL4P* (E-711.SC3H)* (E-711.AL4P)*

requirement of up to +120 V with three (six) (E-712.6CD)

axes and capacitive sensors; 4 analog inputs

and outputs for direct issuing of commands

and sensor/position evaluation

Nanopositioning systems with voltage E-712.3CD E-712.M1* E-712.R1* E-711.IP E-711.SC3H* E-711.AL4P* (E-711.SC3H)* (E-711.AL4P)*requirement of up to +120 V with 3 (six) (E-712.6CD)axes and capacitive sensors; ParallelI/O interface for fast, digital commands PIO

Nanopositioning systems with voltage E-712.M1 E-712.R1 E-711.IA4 E-711.0CT E-711.AL4P (E-711.0CT) (E-711.AL4P)

requirement of up to +120 V with 3 (six) or E-711.IP

axes and capacitive sensors and long distance optional

between positioner and controller.

Nanopositioning systems with voltage E-712.3CM E-712.M1* E-712.R4* E-711.IA4 E-711.SC3H* E-711.AM4* – –requiremen ±250 V (PICOCUBE®) with or E-711.IPup to 3 axes and capacitive sensors optional

Nanopositioning systems with voltage E-712.M1 E-712.R1 E-711.IA4 E-711.SA3 E-711.AL4P – (E-711.AL4P)

requirement of up to +120 V with three (six) or E-711.IP (E-711.SA6)

and incremental sensors optional

NEXLINE® positioning system with single-axis, E-712.N1** E-712.R4 E-711.IA4 E-711.SA3 E-711.AM4 – –incremental sensors and analog interfaces or E-711.IPor PIO (optional) optional

NEXLINE® positioning system with 3 axes E-712.N1** E-712.R4 E-711.IA4 E-711.SA3 E-711.AM4 – –

(combined stepping drive), inkremental sensors or E-711.IP

and analog interfaces or PIO (optional) optional

NEXLINE® positioning system with 3 axes E-712.N1** E-712.R4 E-711.IA4 E-711.SC3 E-711.AM4 – –(combined stepping drive), capacitive sensors or E-711.IPand analog interfaces or PIO (optional) optional

* The modul is already included.** The single- or 3-channel NEXLINE® operation is adjustable via software commands.

Technical Data

Model E 712.3CD E 712.6CD E-712.3CM

Function Modular digital controller for Modular digital controller for Modular digital controller formulti-axis piezo nanopositioning multi-axis piezo nanopositioning PicoCube® nanopositioning systemssystems with capacitive sensors systems with capacitive sensors with capacitive sensors

Axes 3 6 3

Processor PC-based, 600 MHz, PC-based, 600 MHz, PC-based, 600 MHz,real-time operating system real-time operating system real-time operating system

Sampling rate, servo-control 50 kHz 20 kHz 50 kHz

Sampling rate, sensor 50 kHz 20 kHz 50 kHz

Sensor

Servo characteristics P-I, two notch filters P-I, two notch filters P-I, two notch filters

Sensor type Capacitive Capacitive Capacitive

Sensor channels 3 6 3

Sensor bandwidth (-3 dB) 10 kHz 10 kHz 10 kHz

Sensor resolution 18 Bit 18 Bit 18 Bit

Ext. synchronization Yes Yes Yes

Amplifier

Output voltage -30 V to +135 V -30 V to +135 V -250 V to +250 V

Amplifier channels 4 8 4

Peak output power per channel 25 W 25 W 45 W

Average output power per channel 8 W 8 W 15 W

Peak current 250 mA 250 mA 180 mA

Average current per channel 100 mA 100 mA 60 mA

Current limitation Short-circuit-proof Short-circuit-proof Short-circuit-proof

Resolution DAC 20-bit 20-bit 20-bit


Communication interfaces Ethernet, USB, RS-232 Ethernet, USB, RS-232 Ethernet, USB, RS-232

Piezo / sensor connector Sub-D special connector Sub-D special connector Sub-D special connector

Analog in/out optional je 4 x LEMO, optional je 4 x LEMO, optional je 4 x LEMO,

±10 V (E-711.IA4) ±10 V (E-711.IA4) ±10 V (E-711.IA4)

Digital in/out MDR20; 2 x IN, 8 x OUT; TTL MDR20; 2 x IN, 8 x OUT; TTL MDR20; 2 x IN, 8 x OUT; TTL

Command set PI General Command Set (GCS) PI General Command Set (GCS) PI General Command Set (GCS)

User software NanoCapture™, PIMikroMove® NanoCapture™, PIMikroMove® NanoCapture™, PIMikroMove®

Software drivers LabVIEW Drivers, DLLs LabVIEW Drivers, DLLs LabVIEW Drivers, DLLs

Supported functionality Wave gen, trigger I/O Wave gen, trigger I/O Wave gen, trigger I/O

Display LEDs for OnTarget, Err, Power LEDs for OnTarget, Err, Power LEDs for OnTarget, Err, Power

Linearization 4th order polynomials, DDL-Option 4th order polynomials, DDL-Option 4th order polynomials, DDL-Option

(Dynamic Digital Linearization) (Dynamic Digital Linearization) (Dynamic Digital Linearization)

Miscellaneous

Operating temperature range 5 to 50 °C 5 to 50 °C 5 to 50 °C

Overtemp protection Max. 75°C, Max. 75°C, deactivation Max. 75°C, deactivation

of the piezo voltage output of the piezo voltage output of the piezo voltage output

Mass 5.35 kg 5.78 kg 5.43 kg

Dimensions 9,5" chassis, 236 x 132 x 296 mm 9,5" chassis, 236 x 132 x 296 mm 9,5" chassis, 236 x 132 x 296 mm

+ handles (47 mm length) + handles (47 mm length) + handles (47 mm length)

Power consumption 100 W max. 100 W max. 100 W max.

Operating voltage 90 to 240 VAC, 50–60 Hz 90 to 240 VAC, 50–60 Hz 90 to 240 VAC, 50–60 Hz

E-712 Ultra-High Performance Modular Digital Piezo ControllerModular System for up to 6 Axes with Highest Precision

BR

O12

ED

igit

alC

on

tro

l09/

06.2

Su

bje

ctto

chan

ge

wit

ho

ut

no

tice

.©

Ph

ysik

Inst

rum

ente

(PI)

Gm

bH

&C

o.K

G20

09

The modular E-712 digital con-troller is the platform for themost demanding nanoposition-ing applications. The basicelements of the modular con-cept are the casing (E-712.R1 orE-712.R4) and the CPU(E-712.M1 or E-712.N1). Furthercomponents are available suchas different amplifiers, signalconditioners and additionalinterfaces from the E-711 range.

How many axes wouldyou like?

For special applications, up to13 channels can be operated ina 19" chassis (482 mm). Con-ventional applications with upto 6 axes can be fitted into com-pact 9.5" (241 mm) casings.The casings are equipped withpower supplies to suit the typeof drive: The E-712.R1 is de-signed for conventional nano-positioning with low-voltageactuators with up to 6 axes. TheE-712.R4 is designed for up to3 NEXLINE® drives or Pico-Cube® AFM scanners.

Adjusting the stepping motionof a drive allows operating

modes from fast stepping or aconstant speed mode to thepurely analog shear operation.As an alternative to operatingone individual drive, the sameE-712 controller can also oper-ate nanopositioning systemswith three NEXLINE® drives incoordination.

The Hard Core

The E-712 is PC based. Its com-puting power is designed forprocessing times by having aservo update rate of up to 50kHz, for example. In addition,algorithms for linearization,control, to transform coordi-nates or store trajectory infor-mation are carried out in real

time. Even for dynamic applica-tions, the position can thus beachieved with an accuracy of afew nanometers, for example.The varying requirementsplaced on the motions mean

Powerful Processor, Fast Digital Interfaces and Cases


For conventional nanopositioningsystems with PICMA® low voltagepiezo actuating or for PicoCube™

E-712.M1Digital Computer and InterfaceModule E-712 with EthernetInterface, USB, RS-232

E-712.R1Digital Modular Piezo ControllerSystem, 3 to 6 Channels,9,5" Chassis with P/S


E-712.U1Advanced Piezo Control Option

E-712.U2Firmware Upgrade PicoPlane™:Option for Nanometer Precision(convenient hardware required)

E-712.U3Real-Time System Upgradefor Host PC

For NEXLINE® linear drives:

E-712.N1Digital NEXLINE® Processor andInterface Module E-712 withEthernet Interface, USB, RS-232

E-712.R4Digital Modular Piezo ControllerSystem, 3 to 6 Channels, 9.5"Chassis with Power Supply for±250 V Piezo Voltage


Digital Controller of the Newest Generation:600 MHz Processor; up to 50 kHz Servo Update Rate

Versions for Conventional Nanopositioning andNEXLINE® Piezo Linear Drives

Real-Time Operating System for Excellent Trajectory Control Flexible Interfaces: Ethernet, USB, RS-232

E-712 module with fast standardinterfaces USB, Ethernet and RS-232

Custom design of an E-712 systemin a 19" chassis for multi-combined

piezo actuators and drives

The basic configuration of an E-712 system always includes achassis (picture) and a rack- or rather an interface module

E-712 Basic Modules

there is a different computermodule for nanopositioning ap-plications with conventional ce-ramic actuators and NEXLINE®

Walk Drives.

Modern Interfaces

The computer module offersUSB, RS-232 and a fast Ether-net interface as standard. Thesystem can further be supple-mented with an analog inter-face module or a very fast32-bit PIO.

Technical Data

Model E-712.M1 E-712.N1

Function Digital NanoAutomation processor- Digital NEXLINE® processor-and interface module with Ethernet and interface module with EthernetInterface, USB Interface, RS-232 Interface, USB Interface, RS-232

Processor PC based, 600 MHz, PC based, 600 MHz,

real-time operating system real-time operating system

Sample rate control (max.) 50 kHz 50 kHz

Sample rate sensor (max.) 50 kHz 50 kHz

Sensor characteristics P-I, two notch filters or advanced P-I, two notch filterspiezo control, optional

Temperature sensor Yes Yes


Communication interfaces RS-232, USB, Ethernet RS-232, USB, Ethernet

(FTP, UDP, HTTP, TCP/IP) (FTP, UDP, HTTP, TCP/IP)

Digital Input MDR 20, 2 x IN, TTL MDR 20, 2 x IN, TTL

Digital Output MDR 20, 8 x OUT, TTL MDR 20,8 x OUT, TTL

Command set PI General Command Set (GCS) PI General Command Set (GCS)

User software PI MikroMove™ , NanoCapture™ PI MikroMove™ , NanoCapture™

Software drivers LabVIEW Driver, DLLs LabVIEW Driver, DLLs

Supported functionality Wave generator, data recorder, data recorder, trigger I/O

trigger I/O

Display LEDs for OnTarget, Error, Power LEDs for OnTarget, Error, Power

Linearization 4th order polynomials, DDL Option 4th order polynomials; linearization

(Dynamic Digital Linearization) stepping drive

Miscellaneous

Operating temperature range 5 to 50 °C 5 to 50 °C

Overtemp protection max. 75 °C, deactivation of the max. 75 °C, deactivation of thepiezo voltage output piezo voltage output

Dimensions 12 TE 3 HE 12 TE 3HE

Mass 0.52 kg 0.52 kg

Operating voltage 90 to 240 VAC; 50–60 Hz 90 to 240 VAC; 50–60 Hz

E-711.SC3H sensor module for capacitivedual-plate sensors with nanometer resolution

E-712 Sensor ModulesHigh-Resolution and Solid for Capacitive and Incremental Sensors

Flexible Choice of Sensor Analysis,depend on Positioning Mechanic

For capacitive 2 or 1 Plate Sensorsor incremental Sensors

Resolution to the Sub-Nano Region Up to 6 Channels


E-711.SC3HModule for Capacitive Sensors,3 Channels, for E-712 modular,digital, Controller System

E-711.0CTDigital Sensor Signal Transmission,3 Channels, Capacitive Sensors, forE-712 Digital Controller

E-711.SE3Module for PISeca™ CapacitiveSingle-Electrode Sensors,3 Channels, for E-712 modular,digital, Controller System

E-711.SA3Module for incremental Sensors,3 Channels, for E-712 modular,digital, Controller System

E-711.SA6Module for incremental Sensors,6 Channels, for E-712 modular,digital, Controller System


Technical Data

Model E-711.SC3H E-711.0CT E-711.SE3 E-711.SA3

Function Modul for capacitive Module for capacitive Module for capacitive Module for incrementalsensors sensors with sensor PISeca™ single- sensors

analysis (DST) electrode sensors

Channels 3 3 3 3

Sensor type capacitive capacitive Single-electrode, incrementalcapacitive

Sensor bandwidth 10 kHz 10 kHz

Sensor resolution 18-bit 18-bit 18-bit 16-bit

Sensor communication Sub-D Special Sub-D Special Sub-D Special Sub-D Special

(multi-axis, capacitiv) (multi-axis, capacitiv), (multi-axis, capacitiv)

10 m cable length

between sensor

analysis and controller

Dimensions 4 TE 3 HE 4 TE 3 HE; Sensor analysis 4 TE 3 HE 4 TE 3 HE

198.5 x 102.9 x 38.3 mm

Mass 0.18 kg Sensor analysis: 0.65 kg 0.18 kg 0.15 kg

Interfacekarte: 0.15 kg

BR

O12

ED

igit

alC

on

tro

l09/

06.2

Su

bje

ctto

chan

ge

wit

ho

ut

no

tice

.©

Ph

ysik

Inst

rum

ente

(PI)

Gm

bH

&C

o.K

G20

09


E-711.IA4Analog Interface Module, 4 I/O

Accessories:

E-711.i1BAnalog Cable for Analog I/O,BNC Connector, 1.5 m

E-711.i10Analog Cable for Analog I/O,Solderable End, 1.5 m


E-711.IA4 analog interface module

4 Analog Inputs 4 Analog Outputs 20-bit DA-Converter 18-bit AD-Converter Powerful FPGA Smallest Possible Latency Integrated Self-Testing

E-712 Parallel-I/O Interface ModulesFast, Digital Command in Real-Time

E-711.IP 32-bit PIO interface

32-bit Resolution Configured for up to 6 Axis 500 ns Read and 1200 ns Write Optional Real-Time System


E-711.IPPIO Interface Module for E-712modular, digital, Controller System

E-712.U3Real-Time System Upgrade forDigital Piezo Controller


Technical Data

Model E-711.IP

Function PIO Interface module

Resolution 32-bit

Communication interfaces HD-Sub-D 62 connector

Speed of command 500 ns read / 1200 ns write

Supported functionality / Optional Linux-basedsoftware drivers real-time system (E-712.U3)

Dimensions 4 TE 3 HE

Mass 0.15 kg

Technical Data

Model E-711.IA4

Function Analog Interface Module

Channels 4 In-, 4 Outputs

Resolution Input 18-bit

Resolution Output 16-bit, 20-bit effective

Analog Input 4 LEMO, ±10V

Analog Output 4 LEMO, ±10V


Mass 0.16 kg

E-712 Amplifier ModulesHigh-Power and Low-Noise for Dynamic and Precision

Flexible Opions for Nanopositioning,PicoCube™ and NEXLINE® Drives

4 Channels High-Voltage, 8 W per Channel Highest Stability, Low Noise 20-bit Effective Powerful FPGA


E-711.AL4PHigh-Power Amplifier Module,3 Channels, 8 W, for E-712 modular,digital, Controller System

E-711.AM4Amplifier module forPicoCube™,3 Channels, for E-712 modular,digital, Controller System,-250 V bis +250 V


E-711.AM4 amplifier module with ±250 Voutput voltage forPicoCube™ and NEXLINE®

Technical Data

Model E-711.AL4P Units

Function High-Power amplifiermodule, 8 W, -30 bis +135 V

Channels

Output Voltage min. -30 V

Input Voltage max. 135 V

Peak output power per channel 25 W

Average output power per channel 8 W

Peak current per Channel 250 mA

Average current per channel 100 mA


Resolution DAC 20 bit


Mass 0.48 kg

E-712 Analog Interface Module

Analog Piezo Nanopositioning Controllers

Single Axis Controllers

Multi Axis Controllers

E-610 OEM module. One axis, open & closed-loop models

E-621 OEM Module. USB & RS-232 interfaces, 24 bit D/A converters. Additional analog interface. Network feature for up to 12 channels

E-625. Bench –Top Module. USB & RS-232 interfaces, 24 bit D/A converters. Additional analog interface. Network feature for up to 12 channels

E-545 Economical controller for PInano™ piezo scanning microscope stages, 3-channels

E-500 Modular High-Power Piezo Controller System, 1 to 6 channels up to 200 W

E-664 Low-Cost Controller for NanoCube® XYZ piezo systems

E-536 Controller for PicoCube ultra-precision AFM scanner for picometer resolution

E-616 low-cost steering mirror controller module, 2 & 3 axis, bench top also available

30-channel controller consisting of E-621 piezo control modules and E-500.621 chasses


©P

hys

ikIn

stru

men

te(P

I)G

mb

H&

Co

.KG

2008

.Su

bje

ctto

chan

ge

wit

ho

ut

no

tice

.All

dat

aar

esu

per

sed

edb

yan

yn

ewre

leas

e.T

he

new

est

rele

ase

for

dat

ash

eets

isav

aila

ble

for

do

wn

load

atw

ww

.pi.w

s.R

210

/05/

26.0

The E-610 is an OEM amplifier& position servo-control boardfor low-voltage piezo actuatorsand positioning systems. It in-tegrates a low-noise piezo am-plifier which can output andsink peak currents of 180 mA ina voltage range of -20 to+120 V. Three versions areavailable: E-610.00 (only ampli-fier) and closed-loop versionsE-610.S0 and E-610.C0 with ad-ditional components for posi-tion measurement and servocontrol.

Closed-Loop and Open-LoopPiezo Positioning

The units are designed to pro-vide high-resolution operationof piezo actuators and position-ing systems in voltage-con-trolled mode (open-loop) and inposition-controlled mode(closed-loop).

In closed-loop position controlmode, displacement of thepiezo is highly linear and pro-portional to the analog signal.The servo modifies the ampli-

fier output voltage based on theposition sensor signal. Thus,positioning accuracy and re-peatability down to the sub-na-nometer range is possible,depending on the piezo me-chanics and on the sensor type.

PI employs proprietary positionsensors for fast response andoptimum positioning resolutionand stability in the nanometerrange and below. For high-endapplications, capacitance sen-sors provide direct and non-contact position feedback(direct metrology). Strain gaugesensors (SGS) are available forcost-effective applications. Theintegrated notch filters (ad-justable for each axis) improvethe stability and allow high-bandwidth operation closer tothe resonant frequency of themechanics.

In open-loop (voltage-con-trolled) operation the outputvoltage is determined by an ex-ternal analog signal. Open-loopoperation is ideal for applica-

tions where fast response andvery high resolution with maxi-mum bandwidth are essential.Here, commanding and readingthe target position in absolutevalues is either not important orcarried out by external positionsensors (see p. 2-104).

Remote Control via ComputerInterface

For digital-interface computercontrol, consider the E-621 (seep. 2-160) and E-625 (seep. 2-114) instead.

Alternatively control via PCusing a D/A board is possible. PIoffers a LabVIEW driver setwhich can be used with certainD/A boards from National In-struments.

Operation / Contents ofDelivery

A single stabilized voltage inthe range of 12 to 30 V is suffi-cient to operate the E-610. Anintegrated DC/DC convertergenerates the piezo operatingvoltage and all other voltagesused internally. All inputs and

outputs (except capacitive sen-sor lines) are available on themale 32-pin rear connector. Amatching female 32-pin con-nector is included in the con-tents of delivery to interfacewith your circuitry.

E-610 Piezo Amplifier / Nanopositioning Controller Card

Cost-Effective 1-Channel OEM Solution Closed-Loop and Open-Loop Versions Notch Filter for Higher Bandwidth Position Control with Strain Gauge or Capacitive Sensor 18 W Peak Power

E-610 Single-channel OEM module with optional position servo control


E-610.00Piezo Amplifier, 1 Channel, OEMModule, -30 to 130 V

E-610.C0Piezo Amplifier / Servo-Controller,1 Channel, OEM Module,-20 to 120 V, Capacitive Sensor

E-610.S0Piezo Amplifier / Servo-Controller,1 Channel, OEM Module,-30 to 130 V, SGS-Sensor

E-500.ACDLabVIEW Driver Set for AnalogControllers

E-500.HCDHyperBit™ Functionality forEnhanced System Resolution(Supports Certain D/A Boards)

1-Channel OEM Piezo Driver Module with Optional Position Servo-Control

An OEM version with a digital controller is available – the E-609

E-610.00 and E-610.S0: Operating limits with various PZT loads (open-loop),capacitance is measured in µF

Technical Data

Model E-610.00 E-610.C0 E-610.S0

Function Piezo Amplifier, 1 Channel, Piezo Amplifier / Servo-Controller, Piezo Amplifier / Servo-Controller,OEM Module OEM Module OEM Module

Sensor

Servo characteristics – P-I (analog) + notch filter P-I (analog) + notch filter

Sensor type – Capazitiv SGS

Amplifier

Control input voltage range -2 to +12 V -2 to +12 V -2 to +12 V

Output voltage -30 to 130 V -20 to 120 V -30 to 130 V

Peak output power 18 W (< 15 ms) 18 W (< 50 ms) 18 W (<15 ms)

Average output power 10 W 10 W 10 W

Peak current 180 mA (< 15 ms) 180 mA (< 50 ms) 180 mA (<15 ms)

Average current 100 mA 100 mA 100 mA

Current limitation Short-circuit proof Short-circuit proof Short-circuit proof

Noise, 0 to 100 kHz 1.6 mVrms 0.5 mVrms 1.6 mVrms

Voltage gain 10 ±0.1 10 ±0.1 10 ±0.1

Input independence 100 kΩ 100 kΩ 100 kΩInterfaces and operation

Input / Output 32-pin (male) on rear panel 32-pin (male) on rear panel 32-pin (male) on rear panel(DIN 41612 / D) (DIN 41612 / D) (DIN 41612 / D)

Piezo connector LEMO LEMO LEMO

Sensor connection – LEMO LEMO

DC Offset External potentiometer External potentiometer External potentiometer(not included), adds 0 to 10 V (not included), adds 0 to 10 V (not included), adds 0 to 10 Vto Control In to Control In to Control In

Miscellaneous

Operating temperature range +5° to +50° C +5° to +50° C +5° to +50° C

Dimensions 7HP/3U 7HP/3U 7HP/3U

Mass 0.3 kg 0.35 kg 0.35 kg

Operating Voltage 12 to 30 V DC, stabilized 12 to 30 V DC, stabilized 12 to 30 V DC, stabilized

Current consumption, max. 2 A 2 A 2 A

©P

hys

ikIn

stru

men

te(P

I)G

mb

H&

Co

.KG

2008

.Su

bje

ctto

chan

ge

wit

ho

ut

no

tice

.All

dat

aar

esu

per

sed

edb

yan

yn

ewre

leas

e.T

he

new

est

rele

ase

for

dat

ash

eets

isav

aila

ble

for

do

wn

load

atw

ww

.pi.w

s.R

210

/08/

18.0

Digital and Analog Interfaces: USB, Fast 24-Bit D/A Converters, Analog ServoModular & Bench-Top Piezo Nanopositioing Controller

The E-621.CR module features USB, RS-232 and Analog Interfaces

The E-621 is equipped with anRS-232 and USB interface andprecision 24-bit converters forexceptional positional stabilityand resolution. It integratesa low-noise piezo amplifierwhich can output and sink peakcurrents of 120 mA for low-volt-age piezoelectric actuators.Servo-controller versions forposition sensing with capaci-tive or SGS sensors are avail-able.


The E-621 controller moduleprovides precision control ofpiezo actuators and positioningsystems both in closed-loopand open-loop operation. Thepiezo controllers compriseadditional circuitry for positionsensing and servo-control.Displacement of the piezo iscontrolled by an analog signal.Positioning accuracy and

repeatability down to thesub-nanometer range is possi-ble, depending on the piezomechanics and sensor type.High-resolution position sen-sors provide optimum position-al stability and fast response inthe nanometer range.Capacitive sensors measureposition directly and withoutphysical contact (direct metrol-ogy). Alternatively compactcost-effective strain gaugesensors (SGS) are available.The integrated notch filters(adjustable for each axis) im-prove stability and allow high-bandwidth operation closer tothe resonant frequency of themechanics.In open-loop operation theoutput voltage is determinedby an external analog signal.Open-loop operation is idealfor applications where fastresponse and very high resolu-tion with maximum bandwidth

are essential. Here, command-ing and reading the target posi-tion in absolute values is eithernot important or carried outby external position sensors.

High-Resolution DigitalInterface

The digital interface includeshigh-precision 24-bit A/D con-verters for optimum positionstability and resolution andsupports fast communicationwith the host-computer.

Multi-Axis Network for up to12 Channels

Up to twelve E-621s for capaci-tive or SGS sensors can be net-worked and controlled over asingle PC interface. The differ-ent modules are connected inparallel (not daisy-chained)over the link. Only an addition-al 10 ms internal bus communi-cations time is required toreach any of the units behindthe one actually connected tothe host PC.

Waveform Memory

The built-in wave table canstore user-defined data pointsinternally. These values canthen be output automatically(or under the control ofan external signal) and pro-grammed for point-by-pointor full-scan triggering. Thus,

trajectory profiles can be repea-ted reliably and commandedeasily.

Software / GCS Command Set

The E-621 controller comeswith Windows installation soft-ware, DLLs and LabVIEW driv-ers. The extensive commandset is based on the hard-ware-independent GeneralCommand Set (GCS), which iscommon to all current PI con-trollers for both nano- andmicropositioning systems. GCSreduces the programmingeffort in the face of complexmulti-axis positioning tasks orwhen upgrading a system witha different PI controller.

E-625 (top), E-665 and 12 x E-621in an E-500 chassis (bottom)


E-621.CRPiezo Amplifier / Servo-ControllerModule, 1 Channel, -30 to 130 V,Capacitive Sensor, USB, RS-232

E-621.SRPiezo Amplifier / Servo-ControllerModule, 1 Channel, -20 to 120 V,SGS-Sensor, USB, RS-232

E-500.62119“-Chassis for up to twelve E-621Modules, Power Supply

E-501.6219,5“-Chassis for up to four E-621Modules, Power Supply

Integrated 24-Bit USB Interface Network Capability with up to 12 Channels Up to 12 W Peak Power Position Control with Strain Gauge or Capacitive Sensor Notch Filter for Higher Bandwidth Additional Analog Interface Table for User-Defined Curves

Technical Data: Modular Card

Model E-621.SR / E-621.CR

Function Power amplifier & piezo controller

Sensor

Servo characteristics P-I (analog), notch filter

Sensor type SGS (.SR) / capacitive (.CR)

Amplifier

Control input voltage range -2 to 12 V

Output voltage -20 to 120 V / -30 to 130 V

Peak output power, <5 ms 12 W

Average output power 6 W

Peak current, <5 ms 120 mA

Average current 60 mA


Noise, 0 to 100 kHz 0.8 mVrms

Voltage gain 10 ±0.1

Input impedance 100 kΩInterfaces and operation

Interface / communication USB, RS-232 (9-pin Sub-D connector,9.6–115.2 kBaud), 24-bit A/D, 20-bit D/A

Piezo connector LEMO ERA.00.250.CTL (.SR) /Sub-D special (.CR)

Sensor connection LEMO EPL.0S.304.HLN (.SR) / Sub-D special (.CR)

Analog input SMB

Sensor monitor output SMB

Controller network up to 12 channels, parallel


User software PIMikroMove™


Supported functionality Wave table, 256 data points, external trigger,16 macros

DC Offset External potentiometer (not included),adds 0 to + 10 V to Control In

Miscellaneous

Operating temperature range +5 °C to +50 °C (10 % derated over 40 °C)

Overheat protection Deactivation at 75 °C

Dimensions 7HP/3U

Mass 0.6 kg

Operating Voltage 12 to 30 V DC, stabilized

Current consumption, max. 2 A

E-621.CR: operating limits withvarious PZT loads (open-loop),capacitance is measured in µF

E-625.CR Bench -Top Version

Bench Top Version

E-625.CRPiezo Amplifier / Servo-Controller,1 Channel, -30 to 130 V, CapacitiveSensor, USB, RS-232

E-625.SRPiezo Amplifier / Servo-Controller,1 Channel, -20 to 120 V, SGS-Sensor, USB, RS-232

E-625.CNNetwork Cable for Networking ofTwo E-625

E-625.C0PIFOC® Piezo Amplifier / Servo-Controller, 1 Channel, -20 to 120 V,Capacitive Sensor

E-625.S0PIFOC® Piezo Amplifier / Servo-Controller, 1 Channel, -20 to 120 V,SGS-Sensor

Technical Data: Bench Top Version

Model E-625.SR / E-625.CR

Function Piezo Amplifier / Servo-Controller

Axes 1

Sensor


Sensor type SGS (.SR) / capacitive (.CR)

Amplifier

Control input voltage range -2 to 12 V

Min. output voltage -20 to 120 V / -30 to 130 V

Peak output power, < 5 ms 12 W


Peak current, < 5 ms 120 mA



Noise, 0 to 100 kHz 0.8 mVrms


Input impedance 100 kΩ


Interface / communication USB, RS-232 (9-pin Sub-D connector,9.6–115.2 kBaud), 24-bit A/D and 20-bit D/AE-625.S0 and E-625.C0 without interface

Piezo connector LEMO ERA.00.250.CTL (.SR) / Sub-D Special (.CR)

Sensor connection LEMO EPL.0S.304.HLN (.SR) / Sub-D Special (.CR)

Control input sockets SMB

Sensor monitor socket SMB




Software drivers LabVIEW drivers, DLL's

Supported functionality Wave table, 256 data points, external trigger,16 macros

Miscellaneous

Operating temperature range +5 to +50 °C

Overheat protection Deactivation at 75°C

Dimensions 205 x 105 x 60 mm

Mass 1.05 kg

Operating voltage 12 to 30 V DC, stabilized (power supply included)

Current consumption 2 A

©P

hys

ikIn

stru

men

te(P

I)G

mb

H&

Co

.KG

2008

.Su

bje

ctto

chan

ge

wit

ho

ut

no

tice

.All

dat

aar

esu

per

sed

edb

yan

yn

ewre

leas

e.T

he

new

est

rele

ase

for

dat

ash

eets

isav

aila

ble

for

do

wn

load

atw

ww

.pi.w

s.R

109

/05.

0

E-665 Piezo Nanopositioning Controller with Display36 W Power, Display, USB, RS-232 & Analog Interfaces, Analog Servo

The E-665 is a bench-top piezolinear amplifier and positionservo-controller with integrat-ed high-speed 24-bit computerinterface and a high-bandwidthanalog interface. It integrates alow-noise piezo amplifierwhich can output and sink peakcurrents of 360 mA for low-voltage piezoelectric actuators(-20 to 120 V). Servo-controllerversions for position sensingwith capacitive or SGS sensorsare available.

Closed-Loop Piezo Positioning

PI employs proprietary positionsensors for fast response andoptimum positioning reso-lution and stability in thenanometer range and below.For high-end applications,capacitance sensors providedirect and non-contact positionfeedback (direct metrology).Strain gauge sensors (SGS) areavailable for cost-effectiveapplications.

The piezo controllers compriseadditional circuitry for positionsensing and servo-control. Inclosed-loop position controlmode, displacement of thepiezo is highly linear and pro-portional to the analog signal.The servo modifies the amplifi-er output voltage based on theposition sensor signal. Thus,positioning accuracy and re-peatability down to the sub-nanometer range is possible,depending on the piezo me-chanics and on the sensor type.

High-Resolution DigitalInterface

The digital interface includeshigh-precision 24-bit A/D con-verters for optimum positionstability and resolution andsupports fast communicationwith the host-computer.

Waveform Memory

The built-in wave table canstore user-defined datapoints

internally. These values canthen be output automatically(or under the control of anexternal signal). Thus, trajecto-ry profiles can be repeated reli-ably and commanded easily.

Multi-Axis Network for up to12 Channels

Up to twelve E-665s for capaci-tive or SGS sensors can be net-worked and controlled over asingle PC interface. The differ-ent modules are connected inparallel (not daisy-chained)over the link providing higherdata rates than possible withserial links.

Extensive Software Support

The controllers are deliveredwith Windows operating soft-ware.

The extensive command set isbased on the hardware-inde-pendent General CommandSet (GCS), which is common toall current PI controllers forboth nano- and microposition-ing systems. GCS reduces theprogramming effort in the faceof complex multi-axis position-ing tasks or when upgradinga system with a different PIcontroller.

The GCS commands are avail-able at the controller terminal,in macros and in the form of auniversal driver set forLabVIEW (VIs) or Windowsdynamic link libraries (DLL).


E-665.CRPiezo Amplifier / Servo-Controller,1 Channel, -20 to 120 V, CapacitiveSensor, USB, RS-232

E-665.SRPiezo Amplifier / Servo-Controller,1 Channel, -20 to 120 V, SGS-Sensor, USB, RS-232

E-665.C0PIFOC® Piezo Amplifier / Servo-Controller, 1 Channel, CapacitiveSensor

E-665.S0PIFOC® Piezo Amplifier / Servo-Controller, 1 Channel, SGS Sensor

E-625.CNNetwork Cable for Networkingof Two E-625

Control of the E-665.SR piezo servo-controller is realized either via thedigital high-speed interface or directly via the analog input

Integrated 24-Bit USB Interface Network Capability with up to 12 Channels 36 W Peak Power Notch Filter for Higher Bandwidth Position Control with Strain Gauge or Capacitive Sensor Table for User-Defined Curves Additional Analog Interface

E-665: operating limits with various PZT loads(open-loop), capacitance is measured in µF

Technical Data

Model E-665.SR, E-665.CR

Function Piezo amplifier & position servo-controller with digital interface

Axes 1

Sensor


Sensor type SGS (.SR) / capacitive (CR)

Amplifier

Control input voltage range -2 to +12 V

Min. output voltage -20 to 120 V






Noise, 0 to 100 kHz 0.5 (.SR) / 4.0 (.CR) mVrms


Input impedance 100 kΩ


Interface / communication USB and RS-232 (9-pin Sub-D connector, 9.6–115.2 kBaud),

24-bit A/D, 20-bit D/A

Piezo connector LEMO ERA.00.250.CTL (.SR) / Sub-D special (.CR)

Sensor connection LEMO EPL.0S.304.HLN (.SR) / Sub-D special (.CR)

Analog input BNC

Sensor monitor socket BNC





Supported functionality Wave table, 256 data points, external trigger, 16 macros

Display 2 x 4½-digits, LED

DC Offset 10-turn pot., adds 0 to 10 V to Control In

Miscellaneous

Operating temperature range 5 to 50 °C (10 % derated over 40 °C)

Overheat protection Deactivation at 85 °C

Dimensions 236 x 88 x 273 mm + handles

Mass 2.5 kg

Operating voltage 100–120 / 220–240 VAC, 50–60 Hz (linear power supply)

Max. power consumption 50 W

The E-664 is a bench-top ampli-fier & position servo-controllerthat is especially designed forthe P-611.3S NanoCube ® XYZnanopositioning system (see p.2-52). Three integrated low-noise amplifiers and controlcircuitry for strain gauge posi-tion sensors allow closed-loopposition resolution down to 2 nm and dynamic operation.

The combination of the E-664servo-controller and P-611.3SNanoCube® piezo stage makesfor a very cost-effective preci-sion 3D nanopositioning system.


The E-664 servo controller canbe operated both in closed-loop (position-control) and inopen-loop (voltage-control)mode. In closed-loop mode,piezo displacement is propor-

tional to the analog signalapplied to the BNC control-input socket. The integratednotch filters (adjustable foreach axis) improve the stabilityand allow high-bandwidthoper ation closer to the piezo -mechanics resonant frequency. In open-loop operation the out-put voltage is determined bythe analog control signal at theBNC Control Input socket,optionally combined with theDC-offset potentiometer . V ol -tage controlled operation (incontrast to position-controlledoperation) is used in applica-tions where the fastest possi-ble response and very high res-olution with maximum band-width are essential, and/orwhen commanding and read-ing the target position inabsolute values is either notimportant or accomplishedwith an external feedback loop(see p. 2-104). The precision

10-turn potentiometers canalso be used alone to set theoutput voltages manually.

Versatile I/O SupportsAutomation

On-target and overflow statusinformation is displayed sepa-rately for every channel. Thisinformation is also present ona 14-pin I/O connector on therear panel that also carries theanalog control input and sen-sor monitor lines.


Optionally, digital control viaan external D/A converter is

possible. For several D/Aboards from National Instru -ments, PI offers a correspon-ding LabVIEW driver set whichis compatible with the PIGeneral Command Set (GCS),the command set used by all PIcontrollers. A further optionincludes the patented Hyper -Bit™ technology providingenhanced system resolution.

For XYZ-Piezo System P-611.3S E-664 Low-Cost NanoCube® XYZ Nanopositioning Controller


E-664.S3NanoCube® Piezo Controller, 3 Channels, SGS-Sensors, -20 to 120 V

E-664 Controller for NanoCube®

XYZ nanopositioning systems

Technical Data

Model E-664.S3

Function Power amplifier & position servo controller for P-611.3S NanoCube® nanopositioning system

Axes 3

Sensor


Sensor type SGS

Amplifier

Input voltage -2 to +12 V

Output voltage -20 to 120 V

Peak output power per channel <5 ms 14 W

Average output power per channel >5 ms 6 W

Peak current per channel <5 ms 140 mA

Average current per channel >5 ms 60 mA



Ripple, noise, 0 to 100 kHz <1 mVrms


Piezo connector 25-pin sub-D connector

Sensor connector 25-pin sub-D connector

Control Input sockets 3 x BNC (rear), I/O connector

I/O ports 14-pin connector for on-target and overflow status, Control In and sensor monitor outputs

Display 3 x 3½-digits, LED

Miscellaneous

Operating temperature range 5 to 50°C

Overtemp protection Deactivation at 75°C

Dimensions 236 x 88 x 273 mm + handles

Mass 3 kg

Operating voltage 90–120 / 220–240 VAC, 50–60 Hz (linear power supply)

Max. power consumption 60 W

Integrated Amplifier with 3 x 14 W Peak Power Position Servo-Control with Notch Filter for Higher

Bandwidth and Stability 3 Displays for Voltage / Position Cost-Effective Controller for P-611.3S NanoCube ®

Nanopositioning Systems Manual and External Control

© P

hys

ik In

stru

men

te (

PI)

Gm

bH

& C

o. K

G 2

008.

Su

bje

ct t

o c

han

ge

wit

ho

ut

no

tice

. All

dat

a ar

e su

per

sed

ed b

y an

y n

ew r

elea

se.

Th

e n

ewes

t re

leas

e fo

r d

ata

shee

ts is

ava

ilab

le f

or

do

wn

load

at

ww

w.p

i.ws.

Cat

120E

Insp

irat

ion

s200

9 08

/10.

18

NanoCube® XYZ-nanopositioning system,100 x 100 x 100 µm closed-loop travel range, resolution 1 nm

© P

hys

ik In

stru

men

te (

PI)

Gm

bH

& C

o. K

G 2

008.

Su

bje

ct t

o c

han

ge

wit

ho

ut

no

tice

. All

dat

a ar

e su

per

sed

ed b

y an

y n

ew r

elea

se.

Th

e n

ewes

t re

leas

e fo

r d

ata

shee

ts is

ava

ilab

le f

or

do

wn

load

at

ww

w.p

i.ws.

Cat

120E

Insp

irat

ion

s200

9 08

/10.

18

E-616 Low Cost Nanopositioning Controller for Piezo Tip/Tilt Mirrors Flexible Multi Channel OEM Electronics with Coordinate Transformation

The E-616 OEM controller and the S-334 fast steeringmirror system providing atip/tilt range of up to 60 mrad


E-616.SS0Multi Channel Servo-Controller /Driver for Piezo Tip/Tilt MirrorPlatforms with SGS and DifferentialDrive

E-616.S0Multi Channel Servo-Controller /Driver for Piezo Tip/Tilt MirrorPlatforms with SGS and TripodDrive

E-616 Bench top controller

Three Integrated Amplifiers Provide up to 10 W Peak Power Closed-Loop and Open-Loop Versions Internal Coordinate Transformation Simplifies Control of

Parallel Kinematics Designs (Tripod & Differential Drive) Compact and Cost-Effective Design for OEMs

The E-616 is a special controller push / pull-mode. The differen -for piezo based tip/tilt mirrors tial evaluation of two sensorsand tip/tilt platforms. It contains per axis provides an improvedtwo servo controllers, sensor linearity and resolution. channels and power amplifiersin a compact unit. The controller Internal Coordinate Transfor -works with high-resolution SGS mation Simplifies Controlposition sensors used in PI Parallel-kinematics require thepiezo mechanics and provides transformation of the command -optimum position stability and ed tilt angles into the corres -fast response in the nanometer ponding linear motion of theand µrad-range respectively . A individual actuators. In the high output power of 10 W per E-616.S0, this is taken care of bychannel allows dynamic opera- an integrated circuit, elimina-tion of the tip/tilt mirrors for ting the need of additionalapplications such as (laser) external hardware or software.beam steering and stabilization. Additionally with the E-616.S0

all actuators can be comman-Tripod or Differential Piezo ded by an offset-voltage simul-Drive? One for All! taneously. As a result a verticalPI offers two basic piezo tip/tilt movement, for example formirror designs. Both are paral- optical path tuning, is obtained.lel-kinematics designs wherethe individual piezo actuators Simple Setup and Operation

affect the same moving plat- To facilitate integration, setupform. With the tripod design and operation the E-616 fea-(e. g. S-325, see p. 2-92 ) the tures both front and rear panelplatform is driven by three piezo connections: The 25 pin sub-Dactuators placed with 120° piezo & sensor connector isspacing. The differential drive located on the front, along withdesign (S-330, see p. 2-88 or offset trim pots and LEDs forS-334, see p. 2-90 ) with two Power and Overflow . A 32 pinortho gonal axes and a fixed rear connector allows comman-pivot point is based on two ding and reading the sensor andpairs of actuators operating in amplifier monitor outputs.

Technical Data

Model E-616.S0 E-616.SS0

Function Controller for parallel-kinematics piezo Controller for parallel-kinematics piezotip/tilt mirror systems with strain tip/tilt mirror systems with straingauge sensors, tripod design gauge sensors, differential design

Tilt axes 2 2

Sensor

Servo characteristics P-I (analog), notch filter P-I (analog), notch filter

Sensor type SGS SGS

Sensor channels 3 2

External synchronization 200 kHz TTL 200 kHz TTL

Amplifier

Control input voltage range -2 V to +12 V -2 V to +12 V

Output voltage -20 V to +120 V -20 V to +120 V


Peak output power per channel 10 W 10 W

Average output power per channel 5 W 5 W

Peak current 100 mA 100 mA

Average current per channel 50 mA 50 mA


Voltage gain 10 10

Amplifier bandwidth, small signal 3 kHz 3 kHz

Amplifier bandwidth, large signal See frequency diagram See frequency diagram

Ripple, noise, 0 to 100 kHz <20 mVpp <20 mVpp

Amplifier resolution <1 mV <1 mV


Piezo / sensor connector 25-pin sub-D connector 25-pin sub-D connector

Analog input 32-pin connector 32-pin connector

Sensor monitor output 0 to +10 V for nominal displacement 0 to +10 V for nominal displacement

Sensor monitor socket 32-pin connector 32-pin connector

Display Power-LED and sensor OFL display Power-LED and sensor OFL display

Miscellaneous

Operating temperature range 5 °C to 50 °C 5 °C to 50 °C

Overheat protection Max. 75 °C, Max. 75 °C, deactivation of the piezo voltage output deactivation of the piezo voltage output

Dimensions 160 mm x 100 mm x 10 TE 160 mm x 100 mm x 10 TE

Mass 700 g 700 g

Operating voltage 12 to 30 V DC 12 to 30 V DC

Power consumption 30 W 30 W

E-616: operating limits with variousPZT loads (open-loop), capacitance ismeasured in µF

TCP/IP, USB, RS-232 & High Bandwidth Analog Interfaces. Analog Servo

E-545 Nanopositioning Controller for PInano™XYZ Piezo Stages

The E-545 controller is ideallysuited for the PI nano™ stageseries P-545 for super-resolutionmicroscopy. The controller meetsall demands for this applicationsand provides useful additionalfunctionality.

USB Interface

The microprocessor controlledinterface is equipped with low-noise, 24-bit D/A converters andcan be controlled through threedigital interfaces: TCP/IP, USBoder RS-232.

Alternatively, stand-alone opera-tion is possible by uploadingmacro command sequences tothe internal non-volatile mem-ory.

Wave Generator

The integrated wave generatorcan output periodic motion pro-

files. In addition to sine and tri-angle waves, arbitrary, user-defined motion profiles can becreated and stored.

Extensive Software Support

The controllers are deliveredwith Windows operating soft-ware. Comprehensive DLLs,LINUX and LabVIEW drivers areavailable for automated control.

Low-noise 24-bit D/A Converter Sample Rate 25 kHz Linearization for Piezoresistive Sensors Notch Filter for Higher Bandwidth TCP/IP, USB und RS-232 Interfaces 3 x 14 W Peak Power Wave Generator with ProgrammableTrigger-I/O


E-545.3RDPI nano™ Multi-Channel PiezoController with High-SpeedDigital Interface, 3 Channels,Piezoresistive Sensors, Sub-DConnectors

Technical Data

Model E-545.3RD

Function Piezo Servo-Controller for PI nano™ stages

Axes 3

Sensor


Sensor type Piezoresistive sensors

Amplifier

Min. output voltage min. -20 to 120 V


Average current 6 W






Interface / communication Ethernet (TCP/IP), USB, RS-232

Piezo system connector Sub-D 25



Supported functionality Wave generator, data recorder, macro programming

Miscellaneous

Operating temperature range +5 to +50 °C

Overheat protection Deactivation at 85°C

Operating Voltage 12 to 30 VDC, stabilized

Current consumption 2 A

E-545 PI nano™ series nanopositioning stage controller

© P

hys

ik In

stru

men

te (

PI)

Gm

bH

& C

o. K

G 2

009.

Su

bje

ct t

o c

han

ge

wit

ho

ut

no

tice

. All

dat

a ar

e su

per

sed

ed b

y an

y n

ew r

elea

se.

Th

e n

ewes

t re

leas

e fo

r d

ata

shee

ts is

ava

ilab

le f

or

do

wn

load

at

ww

w.p

i.ws.

09/

07/3

0.0

Modular Piezo Nanopositioning Controller for High Power AmpsAnalog Servo, Digital & Analog Interfaces

The E-500 modular piezo con-troller system offers a broadchoice of control modules fornanopositoning systems andactuators. This includes piezo

amplifier and position servocontroller modules for up tothree channels with differentfeatures as well as display andinterface modules. Flexible

configuration makes the sys-tem adaptable to a wide rangeof applications.

E-500 systems are assembledto order, tested, and, if a servo-controller is present, calibratedwith the associated piezomechanics.


Installing the E-517, computerinterface/display module (seep. 2-156) with 24-bit resolutionmakes possible control from ahost PC.

Optionally, digital control viaan external D/A converter ispossible. For several D/Aboards from National Instru -ments, PI offers a correspon-ding LabVIEW driver set whichis compatible with the PIGeneral Command Set (GCS),the command set used by all PI controllers. A further op -tion includes the patented

HyperBit™ technology provid-ing enhanced system resolu-tion.

Two chassis are available:

The E-500.00 19'' rackmountchassis provides operatingvoltages for all compatiblemodules including amplifiers,servo-controllers, display andinterface modules (see systemconfiguration see p. 2-144).


E-500.0019"-Chassis for Modular PiezoController System, 1 to 3 Channels

E-501.009½"-Chassis for Modular PiezoController System, 1 to 3 Channels




Technical Data

Model E-500.00 E-501.00

Function 19"-Chassis for Piezo Controller System: Amplifier Modules, 9.5"-Chassis for Piezo Controller System: Amplifier Modules,Sensor- / Servo-Control Modules, Interface / Display Modules Sensor- / Servo-Control Modules, Interface / Display Modules

Channels 1, 2, 3 (up to 3 amplifier modules) 1, 3 (1 amplifier module)

Dimensions 450 x 132 x 296 mm + handles 236 x 132 x 296 mm + handles

Operating voltage 90–264 VAC, 50–60 Hz 90–120 / 220–264 VAC, 50–60 Hz

Max. power consumption 180 W 80 W

Configuration example: E-500 Chassis with optional modules: E-505, 200 W High-Power piezo amplifier (3 x), E-509.S servo-controller,

E-517.i3 24-bit interface / display module

Configuration example: E-501 chassis with optional modules: E-503 piezo amplifier, E-509.C2A servo-controller for capacitive position sensors,


30-channel controller consistingof 3 E-500.621 chassis, each of

which can accomodate up to 12 E-621 modules

Up to 3 Axes, Custom Systems up to 12 Axes and More Choice of Amplifier Modules for Low-Voltage and

High-Voltage, 14 to 400 W Peak Power Choice of Position Servo Control Modules for SGS &

Capacitive Sensors, 1 to 3 Channels Choice of PC Interface / Display Modules 19- & 9½-Inch Chassis

© P

hys

ik In

stru

men

te (

PI)

Gm

bH

& C

o. K

G 2

008.

Su

bje

ct t

o c

han

ge

wit

ho

ut

no

tice

. All

dat

a ar

e su

per

sed

ed b

y an

y n

ew r

elea

se.

Th

e n

ewes

t re

leas

e fo

r d

ata

shee

ts is

ava

ilab

le f

or

do

wn

load

at

ww

w.p

i.ws.

Cat

120E

Insp

irat

ion

s200

9 08

/10.

18

E-500 and E-501 Racks

Available Modules for E-500 and E-501 Racks

E-509.E3PISeca™ Sensor / Piezo Servo-Control Module for Single-Electrode Capacitive Sensor Probes, 3 Channels

E-509.E03PISeca™ Modular SignalConditioner Electronics for SingleElectrode Capacitive Sensors, 3 Channels

The E-509.E3 module offers sensor signal read-out and servo control for three channels

E-509.E03: 3-Channel Signal Conditioner Module E-509.E3: 3-Channel Sensor Module with Additional

Servo Controllers for Piezo Positioning Systems Integrated Linearization System (ILS) for Maximum

Linearity

Low-Noise 24-bit D/A Converter Sample Rate 25 kHz TCP/IP, USB, IEEE 488 and RS-232 Interfaces 6-Digit Display for Voltage and Position 1- & 3-Channel Versions Wave Generator with Programmable Trigger-I/O

The E-517 piezo display and D/A converter module, provides USB and

TCP/IP connectivity

E-517.i1Interface / Display Module, 24 Bit D/A, TCP/IP, USB, RS-232,Single Channel

E-517.i3Interface / Display Module, 24 Bit D/A, TCP/IP, USB, RS-232, 3 Channels

E-509 3-channel servo-controller module fornanopositioning systems with strain gauge sensors

High-Speed Analog Servo for Piezo with Capacitiv & SGS 1-, 2- and 3-Channel Versions Improves Linearity, Increases Piezo Stiffness

Eliminates Drift and Hysteresis Notch Filter for Higher Bandwidth ILS Circuitry Maximizes Capacitive Sensor Linearity

E-509.C1ASensor / Piezo Servo-ControlCapacitive Sensor, 1 Channel

E-509.C2ASensor / Piezo Servo-ControlCapacitive Sensors, 2 Channels

E-509.C3ASensor / Piezo Servo-Control

Capacitive Sensors, 3 Channels

E-509.S1Sensor / Piezo Servo-ControlSGS Sensor, 1 Channel

E-509.S3Sensor / Piezo Servo-Control SGS-Sensors, 3 Channels

E-503.00 Piezoamplifier module

E-505.00 is a high-performance amplifier

module for the piezo servo-controller system E-500

E-506.10

High Linearity Piezo AmplifierModule, 30 W Average OutputPower, -30 to 130 V, 1 Channel

E-506.10 charge-controlled Piezo driver module

Highly Linear Amplifier Module

280 W Peak Power

Output Voltage Range -30 to 130 V

E-504.00F

High-Power-Piezo Amplifier Modul1 Channel, 280 W Peak Power,100 W Average Power, -30 to 130 V

Peak Power 280 W High Average Output Power 100 W Very Energy Efficient Through Energy Recovery Output Voltage Range -30 to 130 V

E-504.00F High-power amplifier modulewith energy recovery

Available Power Amp Modules for E-500 and E-501 Racks

3 x 140 mA Peak Current


Up to 10 A Peak Current


E-503.00

Piezo Amplifier Module,-30 to 130 V, 3 Channels

E-503.00S

Piezo Amplifier Module,-30 to 130 V, 2 Channels,Modified E-503.00 for S-330, S-334,S-340 Tip/Tilt Systems, withOne Fixed Voltage of +100 V,Two Variable Voltages

E-505.00

Piezo Amplifier Module, 2 A,-30 to 130 V, 1 Channel

E-505.10

Piezo Amplifier Module forSwitching Applications, 10 A,-30 to 130 V, 1 Channel

E-505.00S

Offset Voltage Supply for Tip/TiltSystems, One Fixed Voltage of+100 V

© P

hys

ik In

stru

men

te (

PI)

Gm

bH

& C

o. K

G 2

008.

Su

bje

ct t

o c

han

ge

wit

ho

ut

no

tice

. All

dat

a ar

e su

per

sed

ed b

y an

y n

ew r

elea

se.

Th

e n

ewes

t re

leas

e fo

r d

ata

shee

ts is

ava

ilab

le f

or

do

wn

load

at

ww

w.p

i.ws.

Cat

120E

Insp

irat

ion

s200

9 08

/10.

18

The E-536 is a controller for theP-363 PicoCube ® pico-position-ing system providing threeultra-low-noise amplifier chan-nels for piezo shear actuators.The controller design meets thespecial requirements of thehigh-speed, ultra-high-perform -ance PicoCube ® XY(Z) piezostages (see p. 2-66) of ±250 Vfor both static and dynamicapplications.

The high-performance E-536.3xcan output and sink peak cur-rents up to 200 mA featuring a small-signal bandwidth of 10 kHz. The E-536.3xH ultra-high-resolution models providea position resolution below0.03 nm at a peak power of 50 W . Both models are avail-able with or without a servomodule for closed-loop oropen-loop operation.

Superior Resolution and High Dynamics

Open-loop operation is idealfor applications where fastresponse and very high resolu-tion with maximum bandwithare essential. Here, command-ing and reading the traget posi-tion in absolute values is eithernot important or carried out byexternal position sensors.Together with the P-363PicoCube® a resolution of 0.05 nm or better is achieved.

Excellent Position Accuracywith Capacitive Sensors

The E-536.3C versions haveintegrated sensor electronicsand servo-controllers forclosed-loop position control.Position feedback is providedby capacitive sensors, like

those in the PicoCube ®, withresolutions down to 0.1 nm.

Computer Control

Control via PC is possible byinstalling the E-517, 24-bitinterface/display module.

Optionally digital control via aD/A converter is possible. Forseveral D/A boards fromNational Instruments PI offersa corresponding LabVIEW™driver set which is compatiblewith the PI General CommandSet (GCS), the command setused by all PI controllers. A fur-ther option includes the patent-ed Hyperbit™ technology pro-viding enhanced system reso-lution.

E-536 PicoCube® Nanopositioning Piezo ControllerHigh Dynamics, High Resolution, for up to 3 Axes

E-536.3C 3-channel PicoCube® Controller

For P-363 PicoCube® Systems Peak Power 3 x 100 W Ultra-Low Noise Output Voltage ±250 V


E-536.3CPicoCube® Piezo Controller, 3 Channels, Capacitive Sensors

E-536.30PicoCube® Piezo Controller, 3 Channels, Open-Loop

E-536.3CHPicoCube® Piezo Controller, 3 Channels, High-Resolution,Capacitive Sensors

E-536.30HPicoCube® Piezo Controller, 3 Channels, High-Resolution, Open-Loop

E-517.i3Interface- / Display Module, 24 BitD/A, TCP/IP, USB, RS-232, 3 Channels

E-500.HCDHyperbit™ Functionality forEnhanced System Resolution

(Supports certain D/A boards.)

Positional noise measurement of E-536 amplifier driving a P-363 pico-positioningsystem in open loop shows 1-sigma resolution of 25 picometers (0.025 nm).Measured with ultra-high-resolution capacitive sensor

P-363.2CD and .3CD (background)PicoCube™, high-performancepiezo positioning- and scanningsystems or AFM/STM andnanomanipulation.

E-536.3x: operating limits with various PZT loads, capacitance is measured in µFE-536.3xH: operating limits with various PZT loads, capacitance is measured in µF

Technical Data

Model E-536.3C / E-536.30 E-536.3CH / E-536.30H

Function Power amplifier & servo-controller Power amplifier & servo-controllerfor P-363 PicoCube® for P-363 PicoCube®

Amplifier

Output voltage -250 to +250 V -250 to +250 V


Average output power per channel 10 W, limited by temperature sensor 6 W, limited by temperature sensor

Peak output power per channel, <3 ms 100 W 50 W

Average current 30 mA 15 mA

Peak current per channel, <3 ms 200 mA 100 mA

Amplifier bandwidth, small signal 10 kHz 2 kHz

Amplifier bandwidth, large signal, @ 100 nF 0.2 kHz 0.125 kHz

Ripple, noise, 0 to 100 kHz 0.8 mVRMS, <5 mVP-P (100 nF) 0.5 mVRMS, <3 mVP-P (100 nF)

Current limitation Short-circuit proof Short-circuit proof

Voltage gain +50 +50

Input impedance 100 kΩ 100 kΩ

Sensor*

Servo characteristics Analog proportional-integral (P-I) Analog proportional-integral (P-I) algorithm with notch filter algorithm with notch filter

Sensor type capacitive sensors capacitive sensors

Sensor channels 3 / - 3 / -

Sensor bandwidth 1.5 kHz 1.5 kHz

Sensor Monitor output 0 to +10 V 0 to +10 V


PZT output sockets LEMO EGG.0B.701.CJL.1173 LEMO EGG.0B.701.CJL.1173

Sensor target and probe sockets LEMO EPL.00.250.NTD LEMO EPL.00.250.NTD

Control Input sockets SMB SMB

Sensor Monitor socket LEMO FGG.0B.306.CLAD56 LEMO FGG.0B.306.CLAD56

Control Input voltage Servo off: -5 to +5 V, Servo on: 0 to +10 V Servo off: -5 to +5 V, Servo on: 0 to +10 V

DC Offset 10-turn pot., adds 0 to +10 V to 10-turn pot., adds 0 to +10 V toControl IN Control IN

Miscellaneous

Operating voltage 115 VAC / 50-60 Hz or 115 VAC / 50-60 Hz or230 VAC / 50-60 Hz 230 VAC / 50-60 Hz

Mass 8.1 kg / 7.8 kg (with E-516 module) 8.1 kg / 7.8 kg (with E-516 module)


*only E-536.3Cx with capacitive sensorsInterfaces / communication: RS-232, TCP/IP, USB (with optional E-517 computer interface and display module only) Operating temperature range: +5 °C to +50 °C (over 40 °C, max. av . power derated 10 %), high-voltage output is automatically deactivated if temperature istoo high by internal temperature sensor (75 °C max.)

High-Power Piezo Nanopositioning Controllers


©P

hys

ikIn

stru

men

te(P

I)G

mb

H&

Co

.KG

2008

.Su

bje

ctto

chan

ge

wit

ho

ut

no

tice

.All

dat

aar

esu

per

sed

edb

yan

yn

ewre

leas

e.T

he

new

est

rele

ase

for

dat

ash

eets

isav

aila

ble

for

do

wn

load

atw

ww

.pi.w

s.R

210

/03/

10.0

Peak Power 3200 W Peak Current of up to 20 A Micro Second Rise Time 15 kHz Bandwidth for High Dynamics Applications Piezo Ceramics Protection with Temperature Sensor Analog an Optional Digital Interfaces


E-618.10High-Power-Piezo AmplifierModule, 1 Channel, -30 to 130 V,20 A

E-618.10GHigh-Power-Piezo Amplifier,1 Channel, -30 to 130 V, 20 A,Bench-Top

E-618.1GHigh-Power-Piezo Controller,1 Channel, -30 to 130 V, 20 A,Controller & Interface / DisplayUpgrade possible, 19"

E-618.20GHigh-Power-Piezo Amplifier,2 Channels, -30 to 130 V, 20 A, 19"

Accessories

E-618.X11Piezo Cable, 1 m, Solderable End

E-618.X01Extension Cable, 1 m

E-618.X03Extension Cable, 3 m


High Currents up to 20 A, High DynamicsE-618 High-Power Piezo Amplifier

The E-618 piezo amplifier offers high currents for dynamic operationwhich make it ideally suited for fast switching applications

(here: the E-618.10G 9.5'' chassis version)

The E-618 high-power ampli-fier / controller is specificallydesigned for ultra-high-dynam-ics operation of piezo actuators(translators). It can output andsink a peak current of 20 A andan average current of 800 mA ina voltage range of -30 to 130 V.

Besides the amplifier module,three standard configurationsare available:

E-618.10G is a bench-topamplifier in a 9.5'' chassis,for open-loop operation(1 channel)

E-618.1G is the amplifiermodule in a 19'' rackmountchassis that can hold addi-tional interface / displaymodules

E-618.20G is a 2-channelversion in a 19'' rackmountchassis

Fast Switching

The amplifier features a highbandwidth of more than 15 kHzcombined with extremely shortrise times in the microsecondrange and a high output power.This makes it ideal for fastswitching applications for val-ves, pumps, for microstructureand material testing. Further-more, it is perfectly suited forsystems for active vibrationcontrol.

Piezo OvertemperatureProtection

To protect the mechanics espe-cially in high-dynamics applica-tions, the E-618 features a tem-perature sensor input and con-troller circuit that shuts downthe amplifier if the PZT exceedsthe maximum temperaturethreshold.

Analog and Digital Control

All E-618 amplifiers come witha high bandwidth analog inter-face. An optional 24-bit com-puter interface is available asE-517.Note: Spezial ConnectorRequired

The high electrical currentsrequire adequate connectorsand cabling. Therefore, stand-ard piezo systems and actua-tors have to be adapted.

Technical DataModel E-618.10

Function Power amplifier module for PICMA®

multilayer piezo actuators

Amplifier

Input voltage -2 to +12 V

Output voltage* -30 to 130 V

Peak output power 3200 W (<0.3 ms)

Average output power 100 W (>0.3 ms)

Peak current 20 A (<0.3 ms)

Average current 0.8 A (>0.3 ms)



Ripple, noise, 0 to 100 kHz 200 mVpp / 24 mVrms (no load),2 mVrms (1 µF)

Input impedance 100 kΩInterfaces and operation

Piezo connector LEMO EGG.1B.302.CLL, with security cover

Control input BNC

Temperature sensor PT 1000; LEMO socket; deactivation of the piezo

(piezo actuator) voltage output at 150 °C

Display Power, PZT temp overflow LEDs

DC Offset 10-turn pot., adds +10 to 0 V to Control In

Miscellaneous

Operating temperature range +5 °C to +50 °C (10 % derated over 40 °C)

Dimensions 215 x 123 x 185 mm42HP / 3U 19" rackmount chassis

Mass 2.65 kg

Operating voltage 100 –120 or 220 –240 VAC, selectable

Max. power consumption 15 VA (no load)

160 VA (max. load)

*Max. 85°C, deactivation of the piezo voltage output (internal overtemp protection)

E-618: operating limits with various PZT loads (open-loop), capacitance is measured in µF

©P

hys

ikIn

stru

men

te(P

I)G

mb

H&

Co

.KG

2008

.Su

bje

ctto

chan

ge

wit

ho

ut

no

tice

.All

dat

aar

esu

per

sed

edb

yan

yn

ewre

leas

e.T

he

new

est

rele

ase

for

dat

ash

eets

isav

aila

ble

for

do

wn

load

atw

ww

.pi.w

s.R

110

/03/

10.0

The E-617 is an exceptionallyefficient, high-power, piezoamplifier for low-voltage piezoactuators. Providing peakpower of up to 280 W and aver-age power of 100 W, it can out-put and sink a peak current of2000 mA. This allows drivinghigh-capacitance piezo actua-tors at frequencies in the kilo-hertz range.

Energy Recovery OperatingPrinciple

The working principle of theE-617 series is ideally suited forhigh-dynamics scanning andswitching applications.

The innovative, efficient cir-cuitry reduces power consump-tion and heat dissipation,especially in dynamic applica-tions. Charge is transferred tothe piezo actuator using low-loss PWM techniques. Whenthe actuator is discharged, the

energy not consumed is fedthrough the energy recoverycircuitry for reuse in the nextcharging cycle.

Two models are available: TheE-617.001 version is equippedfor top-hat rail mounting whichmakes it ideal for automationand industry applications. TheE-617.00F version is a compactmodule for chassis mounting.

High Performance with HighCapacitive Loads

The E-617 amplifiers provideprecision control of piezo actu-ators and positioning systemsin open-loop operation with ananalog control voltage ampli-fied by the factor 10. Such ana-log operation is ideal forapplications where fast re-sponse and very high resolu-tion with maximum bandwidthare essential, but where com-manding and reading the target

position absolutely is either notimportant or carried out byexternal position sensors.

Power Supply / Contents ofDelivery

Only one unipolar stabilizedvoltage in the range of 23 to26 V is required to operate theE-617.

All connections of theE-617.001 top-hat rail moduleare conveniently provided onthe front of the device. All in-puts and outputs of theE-617.00F OEM module are viaa 32-pin rear connector. Matingconnectors are included.


Optionally, digital control viaan external D/A converter ispossible. For several D/Aboards from National Instru-ments, PI offers a correspon-ding LabVIEW driver set whichis compatible with the PI Gen-eral Command Set (GCS), thecommand set used byall PI controllers. A further op-tion includes the patented Hy-perbitTM technology providingenhanced system resolution.

The same functionality andspecifications are available inthe E-504 amplifier module. seep. 2-148.

Peak Power to 280 W High Currents to 2000 mA Energy Recovery for Low Power Consumption OEM Module and Top-Hat-Rail Versions


E-617.001High-Power-Piezo Amplifier withEnergy Recovery, 1 Channel,-30 to 130 V, 100 W, Top-Hat Rail

E-617.00FHigh-Power-Piezo Amplifier withEnergy Recovery, OEM-Module,1 Channel, -30 to 130 V, 100 W

E-617 High-Power OEM Piezo AmplifierTop-Hat & OEM Modules with Energy Recovery for High-Dynamics 24/7 Operation

The E-617.001 high-power piezo amplifier is intended fortop-hat-rail mounting in switching cabinets

E-617: operating limits with various PZT loads (open-loop),capacitance is measured in µF

E-617.00F high-power piezo amplifier OEM module

Technical Data

Model E-617.001 E-617.00F

Function High-Power-Piezo Amplifier with Energy Recovery, High-Power-Piezo Amplifier with1 Channel, -30 to 130 V, for Top-Hat Energy Recovery, OEM-Module,Rail mounting 1 Channel, -30 to 130 V

Amplifier

Input voltage -2 to +12 V -2 to +12 V

Output voltage -30 to +130 V -30 to +130 V

Peak output power <5 ms 280 VA 280 VA

Average output power >5 ms Equivalent to 100 W reactive power Equivalent to 100 W reactive power

Peak current, <5 ms 2000 mA 2000 mA

Average current, >5 ms 1000 mA 1000 mA


Voltage gain 10 ±0.1 10 ±0.1

Amplifier bandwidth, small signal 3.5 kHz 3.5 kHz

Ripple, noise, 0 to 100 kHz <30 mVrms <30 mVrms

<100 mVpp <100 mVpp

Capacitive base load (internal) 2.5 µF 2.5 µF

Suggested capacitive load >3 µF >3 µF

Output impedance 0.5 Ω 0.5 Ω

Amplifier resolution 1 mV 1 mV

Amplifier classification class D (switching amp), 100 kHz class D (switching amp), 100 kHz

Input impedance 100 kΩ 100 kΩ


Piezo connector Phoenix-plug connector MINI-COMBICON LEMO ERA.00.250.CTL (front);3-pin MC1.5/3-ST-3.81 DIN 41612 32-pin (rear)

Analog input Phoenix-plug connector MINI-COMBICON 6-pin SMBIMC1.5/6-ST-3.81

DC-Offset External potentiometer (not included), External potentiometer (not included),adds 0 to + 10 V to Control In adds 0 to + 10 V to Control In

Miscellaneous

Operating temperature range +5 to +50 °C (10% derated over 40 °C) +5 to +50 °C (10% derated over 40 °C)

Dimensions 205 x 105 x 60 mm 7HP/3U

Mass 1 kg 0.35 kg

Operating voltage 23 to 26 VDC, stabilized, on Phoenix plug 23 to 26 VDC, stabilized,MINI-COMBICON 3-pin IMC1.5/3-ST-3.81 on 32-pin rear connector

Max. power consumption <30 W <30 W

Modular Piezo Nanopositioning Controller for High Power AmpsAnalog Servo, Digital & Analog Interfaces

The E-500 modular piezo con-troller system offers a broadchoice of control modules fornanopositoning systems andactuators. This includes piezo

amplifier and position servocontroller modules for up tothree channels with differentfeatures as well as display andinterface modules. Flexible

configuration makes the sys-tem adaptable to a wide rangeof applications.

E-500 systems are assembledto order, tested, and, if a servo-controller is present, calibratedwith the associated piezomechanics.


Installing the E-517, computerinterface/display module (seep. 2-156) with 24-bit resolutionmakes possible control from ahost PC.

Optionally, digital control viaan external D/A converter ispossible. For several D/Aboards from National Instru -ments, PI offers a correspon-ding LabVIEW driver set whichis compatible with the PIGeneral Command Set (GCS),the command set used by all PI controllers. A further op -tion includes the patented

HyperBit™ technology provid-ing enhanced system resolu-tion.

Two chassis are available:

The E-500.00 19'' rackmountchassis provides operatingvoltages for all compatiblemodules including amplifiers,servo-controllers, display andinterface modules (see systemconfiguration see p. 2-144).


E-500.0019"-Chassis for Modular PiezoController System, 1 to 3 Channels

E-501.009½"-Chassis for Modular PiezoController System, 1 to 3 Channels




Technical Data

Model E-500.00 E-501.00

Function 19"-Chassis for Piezo Controller System: Amplifier Modules, 9.5"-Chassis for Piezo Controller System: Amplifier Modules,Sensor- / Servo-Control Modules, Interface / Display Modules Sensor- / Servo-Control Modules, Interface / Display Modules

Channels 1, 2, 3 (up to 3 amplifier modules) 1, 3 (1 amplifier module)


Operating voltage 90–264 VAC, 50–60 Hz 90–120 / 220–264 VAC, 50–60 Hz

Max. power consumption 180 W 80 W

Configuration example: E-500 Chassis with optional modules: E-505, 200 W High-Power piezo amplifier (3 x), E-509.S servo-controller,


Configuration example: E-501 chassis with optional modules: E-503 piezo amplifier, E-509.C2A servo-controller for capacitive position sensors,


Up to 3 Axes, Custom Systems up to 12 Axes and More Choice of Amplifier Modules for Low-Voltage and

High-Voltage, 14 to 400 W Peak Power Choice of Position Servo Control Modules for SGS &

Capacitive Sensors, 1 to 3 Channels Choice of PC Interface / Display Modules 19- & 9½-Inch Chassis

© P

hys

ik In

stru

men

te (

PI)

Gm

bH

& C

o. K

G 2

008.

Su

bje

ct t

o c

han

ge

wit

ho

ut

no

tice

. All

dat

a ar

e su

per

sed

ed b

y an

y n

ew r

elea

se.

Th

e n

ewes

t re

leas

e fo

r d

ata

shee

ts is

ava

ilab

le f

or

do

wn

load

at

ww

w.p

i.ws.

Cat

120E

Insp

irat

ion

s200

9 08

/10.

18

E-500 and E-501 Racks

E-505.00 is a high-performance amplifier

module for the piezo servo-controller system E-500

200 W Peak Power Output Voltage Range -20 to 120 V

E-505.00Piezo Amplifier Module, 200 W, -20 to 120 V, 1 Channel

E-505.10Piezo Amplifier Module forSwitching Applications, 1000 W, -20 to 120 V, 1 Channel

E-505.00SOffset Voltage Supply for Tip/TiltSystems, One Fixed Voltage of +100 V

E-506.10High Linearity Piezo AmplifierModule, 30 W Average OutputPower, -30 to 130 V, 1 Channel

E-506.10 charge-controlled Piezo driver module

Highly Linear Amplifier Module 280 W Peak Power Output Voltage Range -30 to 130 V

E-504.00FHigh-Power-Piezo Amplifier Modul1 Channel, 280 W Peak Power,100 W Average Power, -30 to 130 V

Peak Power 280 W High Average Output Power 100 W Very Energy Efficient Through Energy Recovery Output Voltage Range -30 to 130 V

E-504.00F High-power amplifier modulewith energy recovery

Available High Power Amp Modules for E-500 and E-501 Racks

Available Servo & Interface Modules for E-500 and E-501 Racks

E-509.E3PISeca™ Sensor / Piezo Servo-Control Module for Single-Electrode Capacitive Sensor Probes, 3 Channels

E-509.E03PISeca™ Modular SignalConditioner Electronics for SingleElectrode Capacitive Sensors, 3 Channels

The E-509.E3 module offers sensor signal read-out and servo control for three channels

E-509.E03: 3-Channel Signal Conditioner Module E-509.E3: 3-Channel Sensor Module with Additional

Servo Controllers for Piezo Positioning Systems Integrated Linearization System (ILS) for Maximum

Linearity

Low-Noise 24-bit D/A Converter Sample Rate 25 kHz TCP/IP, USB, IEEE 488 and RS-232 Interfaces 6-Digit Display for Voltage and Position 1- & 3-Channel Versions Wave Generator with Programmable Trigger-I/O

The E-517 piezo display and D/A converter module, provides USB and

TCP/IP connectivity

E-517.i1Interface / Display Module, 24 Bit D/A, TCP/IP, USB, RS-232,Single Channel

E-517.i3Interface / Display Module, 24 Bit D/A, TCP/IP, USB, RS-232, 3 Channels

E-509 3-channel servo-controller module fornanopositioning systems with strain gauge sensors

High-Speed Analog Servo for Piezo with Capacitiv & SGS 1-, 2- and 3-Channel Versions Improves Linearity, Increases Piezo Stiffness

Eliminates Drift and Hysteresis Notch Filter for Higher Bandwidth ILS Circuitry Maximizes Capacitive Sensor Linearity

E-509.C1ASensor / Piezo Servo-ControlCapacitive Sensor, 1 Channel

E-509.C2ASensor / Piezo Servo-ControlCapacitive Sensors, 2 Channels

E-509.C3ASensor / Piezo Servo-Control

Capacitive Sensors, 3 Channels

E-509.S1Sensor / Piezo Servo-ControlSGS Sensor, 1 Channel

E-509.S3Sensor / Piezo Servo-Control SGS-Sensors, 3 Channels

USA (East) & CANADA USA (West) & MEXICO

PI (Physik Instrumente) L.P. PI (Physik Instrumente) L.P.16 Albert St. 5420 Trabuco Rd., Suite 100 Auburn, MA 01501 Irvine, CA 92620Tel: +1 (508) 832 3456 Tel: +1 (949) 679 9191Fax: +1 (508) 832 0506 Fax: +1 (949) 679 [email protected] [email protected] www.pi-usa.us

JAPAN

PI Japan Co., Ltd. PI Japan Co., Ltd.Akebono-cho 2-38-5 Hanahara Dai-ni Building, #703Tachikawa-shi 4-11-27 Nishinakajima,J-Tokyo 190 Yodogawa-ku, Osaka-shiTel: +81 (42) 526 7300 J-Osaka 532Fax: +81 (42) 526 7301 Tel: +81 (6) 6304 [email protected] Fax: +81 (6) 6304 5606www.pi-japan.jp [email protected]

www.pi-japan.jp

CHINA UK & IRELAND

Physik Instrumente PI (Physik Instrumente) Ltd.(PI Shanghai) Co., Ltd. Trent HouseBuilding No. 7-301 University Way,Longdong Avenue 3000 Cranfield Technology Park,201203 Shanghai, China Cranfield,Tel: +86 (21) 687 900 08 Bedford MK43 0ANFax: +86 (21) 687 900 98 Tel: +44 (1234) 756 [email protected] Fax: +44 (1234) 756 369www.pi-china.cn [email protected]

www.physikinstrumente.co.uk

ITALY

Physik Instrumente (PI) S.r.l.Via G. Marconi, 28I-20091 Bresso (MI)Tel: +39 (02) 665 011 01Fax: +39 (02) 873 859 [email protected]

FRANCE

PI France S.A.S244 bis, avenue Max Dormoy92120 MontrougeTel: +33 (1) 55 22 60 00 Fax: +33 (1) 41 48 56 62

GERMANY

Physik Instrumente (PI)GmbH & Co. KGAuf der Römerstr. 1D-76228 Karlsruhe/PalmbachTel: +49 (721) 4846-0 Fax: +49 (721) [email protected] · www.pi.ws

Program Overview

Piezo Ceramic Actuators & Motors

Piezo Nanopositioning Systems and Scanners

Active Optics / Tip-Tilt Platforms

Capacitive Nanometrology Sensors

Piezo Electronics: Amplifiers and Controllers

Hexapod 6-Axis Positioners / Robots

Micropositioning Stages & Actuators

Photonics Alignment Systems, Solutions forTelecommunications

Motor Controllers

Ultrasonic Linear Motors

Request or download the completePI Nanopositioning & Piezo ActuatorCatalog

[email protected]

http://www.physikinstrumente.com/en/solutions/index_E_PDF_catalog.php

nanopositioning controllers for piezo systems, digital ...€¦ · for more information on pi...

Documents