GUIDED BY: PRESENTED BY :

DR. P.C. BAPNA PRAVEEN VAISHNAV

COLLEGE OF TECHNOLOGY & ENGINEERING

UDAIPUR (RAJ.)

SEMINAR PRESENTATION

ON

MEMS AND NANOTECHNOLOGY

Department of Electronics & Communication

MEMS AND NANOTECHNOLOGY

PRESENTED BY PRAVEEN VAISHNAV

WHAT IS MEMS

Micro(small)

Electro(electric or electronic components)

Mechanical(mechanical components)

Systems(integrated, system)

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MEMS stands for Micro Electro Mechanical Systems.

It is a technique of combining Electrical or electronics and Mechanical components together on a chip, to produce a system of small dimensions ..

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Where do you find MEMS?

Printers

◦ High DPI inkjets

Projectors Micro-Mirrors from Texas Instruments

Cell Phones

◦ Microphones used in most new cell phones

Automobiles

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Why MEMS

Small Size ◦ Typically 0.1-100um feature size

Human Hair thickness ~ 50umRed Blood Cells ~ 10um

Why MEMS

Low cost

◦ Use existing IC fabrication technology

◦ Made primarily on Silicon Wafers

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Why MEMS

Favorable scaling for a lot of applications

◦ Flow-rate sensors

◦ Electrostatics

◦ Magnetism

◦ Many others

Minimize energy and materials used in manufacturing

Improved reproducibility

Improved accuracy and reliability

Increased selectivity and sensitivity

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MATERIAL USED

SILICON

POLYMERS

METALS

CERAMIC

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APPLICATIONS OF MEMS

Accelerometers

Magnetometers

Microphones

Micro-Fluidics

RF-MEMS

Biomedical

Bridge to Nanotechnology

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DISADVANTAGES OF MEMS

Farm establishment requires huge investments

Micro-components are Costly compare to macro-components

Design includes very much complex procedures

Prior knowledge is needed to integrate MEMS devices

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WHA IS NANOTECHNOLOGY

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PRESENTED BY PRAVEEN VAISHNAV

Nanotechnology is the technology of

arranging atoms and molecules in a

material.

This allows to alter the properties of a

material and build structures of desired

features.

Nanotechnology makes it possible to

manufacture devices 80,000 times smaller

than the thickness of human hair !!

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A simple analogy..

The atoms in an object can be compared to the blocks in a building game.

In a building game, the blocks can be arranged to create different looking structures.

Similarly, atoms can be arranged differently to produce a multitude of devices. This forms the basis of nanotechnology.

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To create and use materials, devices, and systems

with fundamentally new properties and functions

because of their small structure

GOAL OF NANOTECHNOLOGY

EFFECT

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MEMS AND NANOTECHNOLOGY

IN MEDICAL APPLICATIONS

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BENEFITS IN MEDICAL APPLICATIONS

Small volume of reagent samples (like blood), required for analysis.

Low power consumption.

Less invasive, hence less painful.

Integration permits a large number of systems to be built on a single chip.

Batch processing can lower costs significantly.

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CLASSIFICATION OF

BIOLOGICAL MEMS DEVICES

Biomedical MEMS – deals “in vivo”, within the host body.

→ precision surgery

→ Biotelemetry

→ Drug delivery

→ Biosensors and other physical sensors

Biotechnology MEMS – deals “in vitro”, with the biological samples obtained from the host body.

→ Diagnostics

→ gene sequencing

→ Drug discover

→ pathogen detection

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MEMS Sensors

MEMS sensors in the biomedical field

maybe used as:

Critical sensors used during operations.

Long term sensors for prosthetic devices.

Sensor arrays for rapid monitoring and

diagnosis at home.

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PRESENTED BY PRAVEEN VAISHNAV

MEMS and nanotechnology

in precision surgery

Micro-surgical tools

Present day surgeons operate within a

domain prohibited by the mobility and

control of the surgical tools at hand.

MEMS surgical tools provide the flexibility

and accuracy to perform precision

surgery.

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ULTRASONIC MEMS

CUTTING TOOL

These tools make use of piezoelectric materials attached to the cutter.

Consist of micro channels to flush out the fluid while

cutting.

Can be used to cut tough tissues, like the hardened lenses of

patients with cataract

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MEMS driven scalpels

Precise control of the scalpel is an important requirement in any surgery.

MEMS piezoelectric motor help to accurately position the scalpel.

MEMS pressure sensors incorporated on the scalpel, can help to measure the force exerted on the area operated upon. Accordingly, the scalpel can he handled.

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MEMS microneedles

This patch is applied to the skin

and drug is delivered to the body

using micropumps.

These micropumps can be

electronically controlled to allow

specific amounts of the drug and

also deliver them at specific

intervals.

Microneedles are too small to

reach and stimulate the nerve

endings, and hence cause no pain

to the body.

gtresearchnews.gatech.edu/ newsrelease/NEEDLES.htm

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MEMS and endoscopy

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What is endoscopy ?

A diagnostic procedure which involves the introduction of

flexible device into the lower or upper stomach tract for diagnostic

or therapeutic purposes.

Conventional endoscopes

Can be used to view only the first

third of the small intestine.

Require sedation of patient is

uncomfortable procedure

ADVANTAGES OF MEMS PILL

Requires no sedation

Can show a view of the entire small intestine

Can aid in early detection of cancer

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Smart Pill

A MEMS device that can be implanted in the human body.

Consists of

◦ biosensors

◦ Battery

◦ Control circuitry

◦ Drug tank

The biosensors sense the substance to be measured, say insulin.

Once this quantity falls below a certain amount required by the body, the pill releases the drug.

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Working of this magic pill !

The pill can be taken like any normal tablet.

Once within the body, the pill's sensors sample body fluids and pick up "meaningful patient data" such as temperature, dissolved oxygen levels and pH.

The pill is expected to retrieve all data over a 12-hour period and disposed off, once excreted.

This data is transmitted wirelessly to a card attached

to the wrist of the individual.

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SKIN RESURFACING

Skin resurfacing is a form of cosmetic surgery that is

often used to aesthetically enhance the appearance of

wrinkles, skin lesions, pigmentation irregularities, moles,

roughness, and scars.

Conventional resurfacing techniques involve the use of :

Dermabraders – devices or tools used in plastic surgery.

Chemical peels – chemicals such as glycolic acid.

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DRAWBACKS OF THE CONVENTIONAL

APPROACHES IN SKIN RESURFACING

May cause excessive bleeding

Often require time-consuming

procedures

Require multiple sessions.

Furthermore, chemical peels cannot be

used for removal of lesions with

significant depth.

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MEMS SKIN RESURFACING TOOLS

They can be used to remove raised skin lesions as well as lesions upto

certain depths.

These MEMS structures are packaged

onto rotary elements and used

over the affected areas.

The debris can then be sucked out

using a suction pump.

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CHALLENGES

Life of the device.

Retrieving data out of the device.

Resist drifting along with the body fluids.

Limited options

Packaging

Trained person is required

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CONCLUSION

MEMS technology is a tool for enabling the

scaling of devices useful in biomedical

engineering but now Nanotechnology will

beat MEMS.

Nanotechnology is an emerging technology

which will rapidly transform all the fields

in the near future.

PRESENTED BY PRAVEEN VAISHNAV

PRESENTED BY PRAVEEN VAISHNAV

PRESENTED BY PRAVEEN VAISHNAV