new product small size flow controller fcm series · flow rate is freely adjusted with the...

SMALL SIZE FLOW CONTROLLER FCM SERIES

New Product

CC-793A 2

Reach high accuracy and multifunction with microcomputers

Rectifying ensures low-pressure loss and realizes repeatability

High-speed-response micro processing sensor chip

Stainless steel body

Small size flow controller

Resin body

Applicable fluids/Flow rates

Weight: 480 g

Applicable fluids/Flow rates

Weight: 200 g

Compact Flow Controller FCM SeriesCombining compact flow rate sensor FCM and compact solenoid valve technology.High performance and cost efficient sensing, proportional control, and valve functions, this will match customer’s needs.

The flow rate of combustion gas with low supply pres-sure is controlled, such as for controlling burner flame. • The flow rate is shown on a 3-digit display.

• Errors and the output state (switch output ON-OFF) are displayed.

A top/bottom-reversed display is selected based on the installa-tion direction (option)

Just 70_70_30mm (H_D_W), this controller is installed in small spaces or movable sections, enabling equipment to be downsized and lightened.

The platinum sensor chip with silicon micromachining is capable of 0.5 s high-speed control. This controller is used for different applications.

This controller uses a 24V DC power supply, and is op-erated with a general-purpose single power supply.

Error occurrence is indicated with displays and electric signals.

The input signal's zero span is adjusted based on the application.

When four random flow rate points are set, the flow rate is controlled by inputting a 2-bit signal from an external source (signals from PLC, etc.).

Even without input signals from an external source, control flow rate is freely adjusted with the product's operation keys.

A switch output using flow rate upper/lower limit settings is incorporated. Integrated overcurrent protection.

A flow rate integration display (6 digits maximum) and integrating pulse output are possible.

If an emergency, such as an error occurs, the valve is automatically shut off.

This controller is used with air, nitrogen, and gases such as argon, oxygen, methane, butane, and propane, ena-bling use with different applications.

All substances, such as lead and hexavalent chrome, that could adversely affect the global environment have been eliminated from materials used in this controller.

Low differential pressure model

Compact and lightweight

0.5 s high-speed control

Dedicated power not necessary

CKD's original rectifying mechanism improves repeat-ability affecting flow control.

Highly reliable flow control

Compatible with different fluids

RoHS Directive-compliant

Specifications Dimensions Explanation of functions

Operation method

Input signal

Repeatability

Accuracy

Ana

log

out

put

(%

FS)

Volume30% compared to conventional model

Weight20% compared to conventional model

Digital display for easy confirma-tion of control

Parallel input is standard

Realize multi-functions with mi-crocomputer

Output display 3-digit number LED display

Control is possible with parallel input PLC, etc., ON/OFF signal, 10-bit resolution 1024. Analog input/output devi-ces, such as D/A conver-ters, are not required.

Error display

Zero span adjustment

Preset input

Direct memory

Switch output

Flow rate integrator function

Automatic shutoff

Time (sec)

Examples of applications

Useful in different fields

Ap

plic

able

flu

ids

Dryair

0.1 1 10 100Flow rate ( /min)

N2

O2

Ar

This small size flow controller is used for different applications including machinery, automobile, and precision device fields, advanced fields such as semiconductors and biotechnology, medicine and food.

Comb

ustio

n gas

Liquid crystal Glass floating transfer

Semiconductor

Automobile, etc. Control of argon gas flow for welding

Glass processing Burner flame control

Liquid crystal Ionizer purge gas flow control

Wire bonding

Semiconductor Purge gas flow control

Food Adding and packaging

Ideal for adding inert gas for food packages, etc.

The low-pressure gas supply enables burner flame, etc., to be controlled.

This controller can handle a variety of flow ranges enabling the flow of argon gas for welding to be controlled.

Compatibility with different flow rate ranges.The flow of purge gas, etc., is controlled.

Compatibility with different flow rate ranges enables air flow rates to be controlled.

Appropriate for floating (non-contact) transfer of large FPD glass, etc.

Appropriate for wire bonding tension control requiring high accuracy.

N2 gas control for laser oscillator and semiconductor manufacturing equipment.

FCM Series

Applicable fluids and flow control ranges

Input/output specifications

FCM-9500 AIFCM-0001 AIFCM-0002 AIFCM-0005 AIFCM-0010 AIFCM-0020 AIFCM-0050 AIFCM-0100 AI (only resin type)

FCM-9500 ARFCM-0001 ARFCM-0002 ARFCM-0005 ARFCM-0010 ARFCM-0020 ARFCM-0050 ARFCM-9500 O2/LN/C1/C3FCM-0001 O2/LN/C1/C3FCM-0002 O2/LN/C1/C3FCM-0005 O2/LN/C1/C3FCM-0010 O2/LN/C1/C3

FCM-*-*0ANFCM-*-*0APFCM-*-*0SNFCM-*-*0SPFCM-*-*1ANFCM-*-*1APFCM-*-*1SNFCM-*-*1SPFCM-*-*2ANFCM-*-*2APFCM-*-*2SNFCM-*-*2SPFCM-*-*PANFCM-*-*PAPFCM-*-*PSNFCM-*-*PSP

0.015 to 0.5

0.03 to 1

0.06 to 2

0.15 to 5

0.3 to 10

0.6 to 20

1.5 to 50

3 to 100

0.015 to 0.5

0.03 to 1

0.06 to 2

0.15 to 5

0.3 to 10

0.6 to 20

1.5 to 50

0.015 to 0.5

0.03 to 1

0.06 to 2

0.15 to 5

0.3 to 10

Air

Nitrogen

ø6 push in

ø8 push in

Rc1/4

9/16-18 UNF

Rc1/4

9/16-18 UNF

Rc1/4

9/16-18 UNF

Air

typ

eG

as t

ype

Gas

typ

e

Argon

13AOxygen

City gas

Methane

Propane

O2

AIR

Resin Resin

SUS

0.10.01 1 10 100

N2

Ar

CH4

C3H8

Model No.

SUS

SUS

Input Output

Error outputSpecificationsOutput typeInput signal: Specifications

Analog: 0 to 10 V

Pre-set: 4 points (2bit) (Note)

Analog 1 to 5 V

NPN

PNP

NPN

PNP

NPN

PNP

NPN

PNP

NPN

PNP

NPN

PNP

NPN

PNP

NPN

PNP

NPN

PNP

1 to 5 V

NPN

PNP

1 to 5 V

NPN

PNP

1 to 5 V

NPN

PNP

Switchbit

Analog: 0 to 5 V

Pre-set: 4 points (2bit) (Note)bit

Analog: 4 to 20 mA

Pre-set: 4 points (2bit) (Note)bit

Parallel: 10bitbit

NPNPNP

Analog

SwitchNPNPNP

Analog

SwitchNPNPNP

Analog

SwitchNPNPNP

Model No. Applicable fluids

Flow rate control range ( /min)Body material Port size

SUS

Note: Preset 8-point (3-bit) input is used customized. The external integration reset signal input cannot be used. Contact your CKD Sales Office for details.

INTRO 1

Safety PrecautionsAlways read before starting use

1

2

3

4

5

1

23

4

The safety cautions are ranked as "DANGER", "WARNING" and "CAUTION" in this section.

DANGER :

WARNING:

CAUTION :

WARNING

When designing and manufacturing a device using CKD products, the manufacturer is obliga-ted to check that device safety mechanical mechanism, pneumatic control circuit, or water con-trol circuit and the system operated by electrical control that controls the devices is secured.It is important to select, use, handle, and maintain the product appropriately to ensure that the CKD product is used safely.Observe warnings and precautions to ensure device safety.Check that device safety is ensured, and manufacture a safe device.

This product is designed and manufactured as a general industrial machine part.It must be handled by an operator having sufficient knowledge and experience in handling.

Use this product in accordance of specifications.

Observe corporate standards and regulations, etc., related to the safety of de-vice design and control, etc.

Observe warnings and cautions on the pages below to prevent accidents.

Do not handle, pipe, or remove devices before confirming safety.

1

2

Contact CKD when using the product outside the unique specifications range, when using it outdoors, and when using it under the conditions and environment below. Do not attempt to modify or additionally machine the product.

Use for special applications requiring safety including nuclear energy, railroad, aviation, ship, vehicle, med-ical equipment, equipment, or applications coming into contact with beverage or food, amusement equip-ment, emergency shutoff circuits, press machine, brake circuits, or for safeguard.Use for applications where life or assets could be adversely affected, and special safety measures are re-quired.

Inspect and service the machine and devices after confirming safety of the entire system related to this product.Note that there may be hot or charged sections even after operation is stopped.When inspecting or servicing the device, turn off the energy source (air supply or water supply), and turn off power to the facility. Discharge any compressed air from the system, and pay enough attention to pos-sible water leakage and leakage of electricity.When starting or restarting a machine or device that incorporates pneumatic components, make sure that the system safety, such as pop-out prevention measures, is secured.

ISO 4414, JIS B 8370 (pneumatic system rules)JPAS 005 (policy for pneumatic cylinder use and selection)High Pressure Gas Maintenance Laws Occupational Safety and Sanitation Laws, and other safety rules, association standards and regulations.

When a dangerous situation may occur if handling is mistaken leading to fatal or serious injuries, or when there is a high degree of emergency to a warning.

When a dangerous situation may occur if handling is mistaken leading to fatal or serious injuries.

When a dangerous situation may occur if handling is mistaken leading to mi-nor injuries or physical damage.

Note that some items described as "CAUTION" may lead to serious results depending on the sit-uation.In any case, important information that must be observed is explained.

INTRO 2

Design & Selection

Flow controller


Do not feed gas at the explosion limit. There is a riskof explosion.

Do not feed oxygen gas to wetted sections that arenot oil-prohibited. There is a risk of fire. Even if theproduct has oil prohibited, if gas other than oxygengas has passed even once, do not use the productfor oxygen gas.

DANGER

This product cannot be used as a business meter.This product does not comply with MeasurementLaws, and cannot be used for commercial business.

Do not use any fluids not specified because accu-racy and controllability, etc., cannot be satisfied.

Prevent entry of foreign matter into this product.If foreign matter gets into this product (dirt, water, or oilmist into pipes), accuracy and controllability could dropor the product could fail.If foreign matter could enter the product, install a filter,dryer, or oil mist filter upstream from the product.

The mesh provided in this product is used to rectify theflow in pipes. It is not a filter for removing foreign matter.Compressed air from the compressor contains drainage(water, oxidized oil, foreign matter, etc.), so install a filter,air dryer, and oil mist filter (microalescer) upstream fromthe product.

<Recommended circuit >

When using a valve on the primary side of this product,only use an oil-prohibit specification valve. This controllercould malfunction or fail if subject to splattering grease oroil, etc.

When using this controller for liquified gas such aspropane gas, evaporate the gas. This controller couldfail if liquified gas is fed.

When using this product to control burner air-fuelratio, take measures in the design stages to preventbackfire, and to prevent adverse effect to this prod-uct even if a backfire should occur. A rise in the pipe'sinternal pressure and flame caused by a burner'sbackfire could damage this product.

WARNING

Small size flow controller FCM series

1. Working fluid

FCM series

Filter

Air dryer Regulator

Oil mist filterPneumatics pressure source

CAUTION Check the leakage current to prevent malfunction caused by currentleaking from other controllers.When using a programmable controller, etc., the leakage current couldcause this product to malfunction.

Due to wiring, the current input power ground and signal common arethe same.When driving several of these products with one PLC and D/A unit,depending on the D/A unit's circuit, the correct signal may not be inputbecause of wiring problems. Consult with the PLC maker before using.

2. Working environment

WARNING Corrosive environmentDo not use this product in an environment containing corrosivegases such as sulfurous acid.

Ambient temperature, fluid temperatureKeep the ambient temperature and fluid temperature within 0 to50˚C.Even if the temperature is within the specified range, do not usethis product if the ambient temperature and fluid temperaturecould suddenly change and cause dew to condense.

Guaranteed withstanding pressure and operating pressure differencerange.Using this product at a level exceeding the guaranteed withstandingpressure and operating pressure difference could cause damage. Fol-low the specified range.

Drip-proof environmentThis product's protective structure is IP40 or equivalent. Do not install itwhere it could be subject to water, salt, dust, or cutting chips, or a com-pressed or decompressed environment This product cannot be usedwhere the temperature changes sharply or in a highly humid environ-ment as dew condensation in the product could cause damage.

This product's solenoid proportional valve does not have a completeclose-stop.If a complete close-stop is required, provide a separate external shutoffvalve.When the external shutoff valve is closed, wait with this product's valvefully closed (set flow rate: zero). If this product is left in normal controlwhile this external shutoff valve is closed, an instant overflow couldoccur when the external shutoff valve is opened.When using for applications that turn ON/OFF at a high frequency, thelife of the proportional valve may be shortened depending on use. Con-tact CKD when using for applications that turn ON/OFF at a high fre-quency.

Do not install this product at a place that moves or vibrates. Vibration orimpact could cause this controller to malfunction.

INTRO 3

Design & Selection

Flow controller


Current input is used with input signal 1-5 V, butunlike other voltage input, the input impedance issmall at 250 , so a signal generator that matchesthis impedance must be used.

Monitor the pipe's pressure lossWhen piping this product, check that the differen-tial pressure between the upstream side anddownstream side is within the operating pressuredifference range (refer to page 2). Controller maynot operate properly if used outside of the operat-ing pressure difference range.

Small flow controller FCM series

Installation & Adjustment

Use the power voltage and output within the specified voltage.If a voltage exceeding the specified voltage is applied, theproduct could malfunction, be damaged, or electric shock orfires could occur. Do not use loads that exceed the outputrating. The output could be damaged or fires could start.

DANGER

Check the connector pin and cable core wire color whenwiring. Incorrect connections could result in sensor damage,problems, and malfunctions, so check the wire color againstthe instruction manual before wiring.

Check wiring insulation.Check that wires do not contact other circuits, that there is noground fault, and that the insulator between terminals is notdefective. An overload could flow to the product, and result indamage.

Use a DC stabilized power supply, within the specified rating,insulated from the AC power supply. Failure to insulate thepower supply could result in electric shock. If power is notstabilized, the peak could be exceeded during the summer.This could damage this product or cause accuracy to drop.

Stop controller and devices, and turn power OFF beforewiring. Starting operation suddenly could result in unpredict-able operation and hazards. Conduct an energized test withcontrollers and devices stopped, and set target switch data.Discharge any static electricity accumulated by personnel ortools before and during work. Connect and wire bending

WARNING

resistant material, such as robot wire material, for movablesections.

Do not use this controller at levels exceeding the powervoltage range. If voltage exceeding the specified range isapplied, or if an AC power (100V AC) is applied, the control-ler could break or burn.

Separate this product and its wiring as far away from sourcesof noise such as power distribution wires. Provide separatemeasures for surge applied to the power cable.

Do not short-circuit the load. This product could break orburn.

Use stabilized DC power completely separated from the ACprimary side for stainless steel construction. Connect eitherthe plus or minus side of the power supply to the FG. Avaristor (limit voltage. 40 V) is connected between thestainless steel internal power circuit and stainless steeldevice to prevent dielectric breakdown of the sensor.Do not conduct a withstand voltage test or insulationresistance test between the internal power circuit andstainless steel device. Disconnect wiring if this testing isrequired. An excessive potential difference between thepower and stainless steel device will cause the internal partsto burn.After installing, connecting, and wiring the stainless steeldevice, electrical welding of the device or frame or short-circuit accidents, etc., could cause the welding current, theexcessive high voltage caused by welding, or a surgevoltage, etc., to run through wiring or ground wire connectedbetween the above devices. This could result in damage towires or devices. Conduct any work such as electricalwelding after removing this device and disconnecting allelectric wires connected to the FG.

2. Working environment

1. Wiring

CAUTION

This controller's flow rate is measured with massflow not affected by pressure. The unit is r/min,that is the mass flow converted to volumetric flowat 20˚C 1 barometric pressure (101 kPa).

3. Flow unit

CAUTION

INTRO 4

Installation & Adjustment

Check that sealing tape or adhesive does not getinside when piping.When winding fluorine resin sealing tape aroundthreads, wind the sealing tape one to two times, leav-ing two to three threads open at the end of the screw.Press down on the tape to stick it onto threads. Whenusing liquid sealing agent, leave one to two threadsopen from the end, and avoid applying too much.Check that the sealing agent does not get on thedevice's threads.

(Good)

Sealing tape Solid liquid sealant

(Not good) (Good) (Not good)

Solid liquid

sealant

Solid liquid

sealant

Connect a joint even when using the stainlesssteel device with the OUT side opened. The portfilter could come off.

When using resin body, do not bend the tube nearthe push-in joint. If strain could be applied to thetube near the push-in joint, attach an insert ringonto the tube and insert into the push-in joint.

When using resin body, accurately insert the tubeand confirm that it does not dislocate even whenpulled. Cut the tube at a right angle with a dedi-cated cutter before using.

After piping, confirm that no gas is leaking.

When using this product for oxygen gas, monitorthe following points.

Piping work must be completed by personnel withexpertise on handling oxygen gas.Use oil-treated pipes.Remove any dirt or burrs from piping before attaching tothis product.Attach a filter to the primary side of this product.

1. Wiring

CAUTION

Pipe based on the fluid direction and the directionindicated on the device.

Before piping, clean pipes with compressed air toremove any foreign matter of cutting chips, etc.The rectifying unit or platinum sensor could bedamaged if foreign matter or cutting chips get in.

When attaching piping to this product, use thefollowing torques as reference so that excessivescrewing torque or load torque is not applied to theconnection port.

CAUTION

Rc1/4

9/16-18UNF

6~8

6~8

Tightening torque N·mSet screw

When piping, put a wrench, etc., on the stainlesssteel device so that force is not applied to the resinsection.

2. Piping

The option shield cable connector is a shieldedwire. Insulate wires that are not being used so thatthey do not contact other wires, including shieldedwires. If inadvertently connected to the ground,etc., the controller could malfunction or break.

Securely insert the D-sub connector into the back.

Lock the D-sub connector so that it does notdislocate. Before loosening the lock, fix the fixingblock with a tool, etc.

INTRO 5

During use & Maintenance

Flow controller


Output accuracy is affected by the temperaturecharacteristics and heat self-generated when ener-gized. Provide a standby time (10 minutes or longerafter turning power ON) when using.

If a failure occurs during operation, turn power OFFimmediately and stop use. Contact your dealer.

This product does not flow control for two secondsafter power is turned ON so it completes self-diagno-sis. Provide a control circuit and program that ignoresignals for two seconds after power is turned ON.

Keep this product's flow within the rated flow range.

Use this product within the operating differentialpressure range.

When the setting is changed, control devices couldoperate unintentionally. Stop devices before chang-ing settings.

Regularly inspect the product at least once a yearand confirm that it is operating correctly.

Do not disassemble or modify this product. Doing socould result in faults.

This case is made of resin. Do not use solvent,alcohol, or detergent to remove any dirt, etc., as theresin could be impregnated. Wipe off any dirt with arag soaked in a diluted neutral detergent solutionand wrung out well.

Monitor leading of the surge currentWhen controller power is shared with an inductiveload that generates a surge, such as a solenoidvalve or relay, if the circuit is cut off while the induc-tive load is functioning, the surge current could enterthe output circuit and cause damage depending onwhere the surge absorption element is installed.

CAUTION

Small flow controller FCM series

Surge absorption element(built-in)

Circuit cutoff with disconnection or emergency stop

Surge absorption element (retrofit)

Flow controller

Surge current PLC output

PLC

ONMai

n ci

rcui

t

Rel

ay Solenoid valve

Take the following types of measures to prevent damagefrom surge current led in.

Separate the power supply for output comprising theinductive load, such as the solenoid valve and relay,and input, such as the flow controller.

If separate power supplies cannot be used, directlyinstall a surge absorption element for all inductiveloads. Note that the surge absorption element con-nected to the PLC, etc., protects only that device.

Connect a surge absorption element to the followingon power wiring as shown below as a measureagainst disconnections in unspecific areas.

Inpu

t co

mpo

nent

Inpu

t co

mpo

nent

Inpu

t co

mpo

nent

When devices are connected to a connector, theoutput circuit could be damaged by the above if theconnector is disconnected while power is ON. Turnpower OFF before connecting or disconnecting theconnector.

INTRO 6

MEMO

1

Small size flow controller

FCM Series Flow rate: 0.5, 1, 2, 5, 10, 20, 50, 100 r/min

Valve drive type

Full scale flow rate Note 1

Applicable fluids Note 2

*1 Sta

ndar

d m

odel

Low

diffe

rent

ial p

ress

.(o

nly st

ainles

s ste

el)

*2

*3Port size, Body material

0 to 500 mr/min 0 to 1 r/min 0 to 2 r/min 0 to 5 r/min 0 to 10 r/min 0 to 20 r/min 0 to 50 r/min 0 to 100 r/min (only resin type) 0 to 500 mr/min 0 to 1 r/min 0 to 2 r/min 0 to 5 r/min 0 to 10 r/min Compressed air, nitrogen Argon Oxygen (oil-prohibit specifications) City gas (13A) Note 3 Methane (CH4 100%) Propane (C3H8 100%) ø6 push in, resin (excluding 50, 100r/min) ø8 push in, resin Rc1/4, stainless steel 9/16-18UNF, stainless steel

Control range

Responsiveness 9500 to 0020, L9500 to L0020

0050 to 0100, L0050 to L0100 Accuracy Repeatability Temperature characteristics Pressure characteristics Standard differential pressure Note 4 Operation differential pressure range Note 5

Withstanding pressure H6/H8 (resin body)

8A/UF (SUS body) 0 Input signal/ 1 Pre-set input 2 P

AN

AP Output signal

SN

SP Display method Display range and resolution Power supply voltage Current consumption H6/H8 (resin body) 8A/UF (SUS body) H6/H8 (resin body) 8A/UF (SUS body)

Control

Pressure Ambient temperature and humidity Input/output

Flow rate display Integrating function

Power supply Installation attitude

Wetted area material

Weight Protective structure Protective circuit Note 6 EMC Directive

9500 0001 0002 0005 0010 0020 0050 0100

L9500 L0001 L0002 L0005 L0010

AI AR O2 LN C1 C3 H6 H8 8A UF

Speci f icat ionsDescriptions FCM-[*1] [*2]-[*3] [*4] [*5]

Proportional solenoid valve When not energized: ClosedC3 (propane)C1 (methane)LN (city gas)O2 (oxygen)

3 to 100% F.S. Within 0.5 sec at setting ±5%F.S. (TYP)

Within 1 sec at setting ±5%F.S. (TYP)±3% F.S. or less±1% F.S. or less

±0.1% F.S./˚C or less (25˚C standard) ±1%F.S. or less per 98kPa (standard differential pressure reference)

Refer to separate table. Refer to separate table.

490 kPa 980 kPa

0 to 50 ˚C, 90% RH or less (with no dew condensation) 0 to 10 VDC (6.7kΩ)/4 points (2bit) 0 to 5 VDC (10kΩ)/4 points (2bit)

4 to 20 mA DC (250 Ω)/4 points (2bit) Parallel 10bit/none

Analog output: 1-5V (connected load impedance 500kΩ and over) Error output: NPN open collector output, 50mA or less, voltage drop 2.4V or less

Analog output: 1-5V (connected load impedance 500kΩ and over) Error output: PNP open collector output, 50mA or less, voltage drop 2.4V or less Switch output: NPN open collector output, 50mA or less voltage drop 2.4V or less Error output: NPN open collector output, 50mA or less, voltage drop 2.4V or less Switch output: PNP open collector output, 50mA or less, voltage drop 2.4V or less Error output: PNP open collector output, 50mA or less, voltage drop 2.4V or less

3-digit 7-segment LED, display accuracy: control accuracy ± 1 digit Refer to separate table. Refer to separate table.

24VDC±10% (stabilized power with ripple rate 2% or less) 250 mA or less

Free Polyamide resin, fluoro rubber, stainless steel, alumina, silicon, solder

Stainless steel, fluoro rubber, alumina, silicon, solder Approx. 200g Approx. 480g

IEC standards IP40 Power reverse connection protection, switch output reverse connection protection, switch output load short-circuit protection

EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8

AR (argon)AI (air, nitrogen)Flow range

*3

*1

*3

*3

*4

*5

2

Specifications

FCM Series

PressureStandard differential pressure and operation differential pressure Note 4, 5(Standard model)

AI

AR

O2

LN/C1

C3

50

20 to 150

50

20 to 150

50

20 to 150

50

20 to 150

50

20 to 150

100

50 to 200

100

50 to 200

100

50 to 200

50

20 to 150

50

20 to 150

100

50 to 250

100

50 to 250

100

50 to 250

50

20 to 150

50

20 to 150

100

50 to 250

100

50 to 250

100

50 to 250

50

20 to 150

50

20 to 150

100

50 to 250

100

50 to 250

100

50 to 250

50

30 to 150

50

30 to 150

150

100 to 300

150

100 to 300

200

150 to 300

200

150 to 300

300

250 to 350

Flow rate range *1

9500 0001 0002 0005 0010 0020 0050 0100

(Low differential pressure model)

AI/O2

LN/C1

C3

20

5 to 50

20

5 to 50

20

5 to 50

20

5 to 50

20

10 to 50

Flow rate range *1

L9500 L0001 L0002 L0005 L0010

Display and integrating function

Flow rate display Display range

Display resolution

Display range

Integrating function Display resolution

Flow rate range *1

9500

L9500

0001

L0001

0002

L0002

0005

L0005

0010

L00100020 0050 0100

0 to 500 mr/min

1 mr/min

999999 mr

1 mr

5 mr

0.00 to 1.00 r/min

0.01 r/min

9999.99 r

0.01r

0.01r

0.00 to 2.00 r/min

0.01 r/min

9999.99 r

0.01r

0.02r

0.00 to 5.00 r/min

0.01 r/min

9999.99 r

0.01r

0.05r

0.0 to 10.0 r/min

0.1 r/min

99999.9 r

0.1r

0.1r

0.0 to 20.0 r/min

0.1 r/min

99999.9 r

0.1r

0.2r

0.0 to 50.0 r/min

0.1 r/min

99999.9 r

0.1r

0.5r

0 to 100 r/min

1 r/min

999999 r

1r

1r

Pneumatics pressure source

FCM series

Filter

Air dryer Regulator

Oil mist filter (micro alescer)

Standard differential pressure (kPa) Operation differential pressure (kPa)Standard differential pressure (kPa) Operation differential pressure (kPa)Standard differential pressure (kPa) Operation differential pressure (kPa)Standard differential pressure (kPa) Operation differential pressure (kPa)Standard differential pressure (kPa) Operation differential pressure (kPa)

Standard differential pressure (kPa)

Operation differential pressure (kPa)

Pulse output rate

Note 1: Converted to volumetric flow at 20˚C 1 barometric pressure (101 kPa). Note 2: When using compressed air, use clean air complying with JIS B 8392-1:2003 Class 1.1.1 to 1.6.2. Compressed air from the compressor

contains drainage (water, oxidized oil, foreign matter, etc.). Install a filter (filtration: 5 µm), air dryer (minimum pressure dew point 10˚C or less) and oil mist filter (maximum oil concentration 0.1 mg/m3) on the primary side of this product to maintain product function.

<Recommended circuit >

<Recommended component > Air filter: F series Oil mist filter: M series When using for purposes other than compressed air, use dry gas that does not contain corrosive elements such as chlorine, sulfur or

acids, and clean gas that does not contain dust or oil mist. Note 3: City gas 13 A is for methane (CH4) 88% gas generated from LNG. Note 4: The standard differential pressure is the differential pressure when this product is calibrated. Note 5: The operating differential pressure is the differential pressure required for this product to operate normally. Contact CKD when using this

product at a level exceeding the operating differential pressure. Note 6: This product's protective circuit is effective only for specific incorrect connections and load short-circuits. It does not necessarily provide

protection for all incorrect connections.

Appli

cable

fluids

*2A

pplic

able

flui

ds *

2

3

FCM Series

A

How to order

B Applicable fluids

C Port/body material

D Input specifications

E Output specifications

Model No.

FCM 9500 R 1 B T0

FCM AC1

F Display direction

G Cable

H BracketI Traceability

<Example of model No.>

Discrete option model

FCM-0001AI-H81ANR1BKModel: Small size flow controller FCM series Flow rate range : 0 to 1 r/min Applicable fluids : Compressed air, nitrogen Port/body material : Push in (ø8), resin body Input specifications : Analog 0 to 5 VDC Output specifications : 1 to 5 V analog, error (NPN) Display direction : Reverse direction Cable : 1 m Bracket : With bracket Traceability : Inspection results included

A

B

C

D

E

F

G

H

I

AI H6 AN

Flow rate range

Note on model No. selectionNote 1: Refer to the dimensions on page 4 for the

9/16-18UNF screw shape.

Symbol

Sta

ndar

d m

odel

Low

diffe

rent

ial p

ress

.(O

nly

stai

nles

s st

eel)

Descriptions

9500000100020005001000200050

0100

L9500L0001L0002L0005L0010

0 to 0.5 r/min 0 to 1 r/min 0 to 2 r/min 0 to 5 r/min 0 to 10 r/min 0 to 20 r/min 0 to 50 r/min 0 to 100 r/min (only resin body) 0 to 0.5 r/min 0 to 1 r/min 0 to 2 r/min 0 to 5 r/min 0 to 10 r/min

C3C1LNO2ARAI

AIARO2LNC1C3

Compressed air, nitrogen gas Argon Oxygen (oil-prohibit specifications) City gas (13A) Methane (CH4) Propane (C3H8)

Flow rate rangeA

Applicable fluidsB

012P

Analog 0 to 10 VDC Analog 0 to 5 VDC Analog 4 to 20 mADC Parallel 10bit

Input specificationsD

ANAPSNSP

1 to 5 V analog error (NPN) 1 to 5 V analog error (PNP) Switch (NPN), error (NPN) Switch (PNP), error (PNP)

Output specificationsE

Blank13

None 1 m 3 m

CableG

BlankTK

None Traceability certificate, system diagram, inspection results included Inspection results included

TraceabilityI

AC1AC3PC1PC3LB1

9-conductor analog cable 1m 9-conductor analog cable 3m 15-conductor parallel cable 1m 15-conductor parallel cable 3m Bracket

Symbol Descriptions

BlankR

Positive direction Reverse direction

Display directionF

BlankB

None With bracket

BracketH

C3C1LNO2ARAI

H6

H88A

UF Note 1

Push in (ø6), resin body (Excluding flow ranges 0050 and 0100) Push in (ø8), resin body Rc1/4, stainless steel body 9/16-18 UNF, stainless steel body

Port/body materialC

Applicable fluids

Applicable fluids

4

Body material: Resin, port size: ø6, ø8

FCM-*-H8/H6*

Body material: Stainless steel, port size: Rc1/4, 9/16-18UNF

FCM-*-8A/UF

Dimensions

30

70

70

15

30

16

33.546

12

58.5

58.5

46

33.5

7030

15

30

70

12

16

2-# 4-40UNC

The display direction is reverse for the FCM-*-*R*.

2-M3 depth 5

Port sizeø6 push-in joint or ø8 push-in joint

D sub-connector 15 pin/plug

2-# 4-40UNC

2-M3 depth 5

Port sizeRc1/4 or 9/16-18UNF

D sub-connector 15 pin/plug

The display direction is reverse for the FCM-*-*R*.

2.5

ø15

.6

15.25

11.5

9/16-18UNF

Mesh filter

9/16-18UNF Effective length of threaded part 11.5

12˚

45˚ Seal surface

Dimensions

FCM Series

5

Cable option dimension drawing

9-conductor cable for analog input type Discrete option model: FCM-AC1, AC3

15-conductor cable for parallel input type Discrete option model: FCM-PC1, PC3

Dedicated bracket (Floor installation type)

Discrete model: FCM-LB1

1000 3000

30.7 31.5

100

9-AWG26

Shield cable

(ø

6)

1000 3000

(ø6.

5)

31.5

30.7

100

15-AWG26

Shield cable

*Connect the shield cable to the - power supply (0V).

*Connect the shield cable to the - power supply (0V).

12

Insulator color -

13

Green Blue

4 to 20

mADC

0 to 5

VDC

11

White

10

Gray

9876

-

5

Red

4

-

3

Yellow

2

Orange

1D sub socket pin No.

Brown

14

Black

15

Pre-set input function

Input signal zero/span adjustment function

Bit 1 Bit 2

Integration reset signal

Not used

+24 VDC

Power supply+

Not used

- -

Not used Not used Not used

-

Common0 to 10

VDCNot used

Not usedAnalog

input

1 to 5 VDC

Switch output

NPN or

PNP output

Error output

NPN or

PNP output

Power supply-

(0V)Type of input

Insulator color

13

Green Blue

Bit 10

11

White

10

Gray

98765

Red Light blue PinkWhite

(with black line)

4

Purple

3

Yellow

2

Orange

1D sub Socket Pin No.

Brown

12 14

Black

15

Bit 1

Bit 2

Bit 3

Bit 4

Bit 5

Bit 6

Bit 7

Bit 8

+24 VDC

Red (with black line)

Green (with black line)

CommonBit 9

1 to 5 VDC

Parallel input signal Parallel input signalParallel input signalPower supply+

Analog input function

Switch output function

Error automatic shutdown applicable

error (Note)

NPN or

PNP output

NPN or

PNP output

Power supply-

(0V)Type of input

Name

Name

154050

30

65

4-6 8-R1.75

4-3.

5

2-ø3.5

4-R35

1

30

Note: The No. 1 pin common is common for the preset input and integration reset signal (No 1 to 3 pins).

Note: The No. 10 pin common is common for the parallel input signals (No. 1 to 4, 6 to 9, 11, 12 pins).

FCM Series

6

Technical data

FCM Series

FCM-*-*0/1/2 AN* (Analog input, analog output + error output type NPN output)

FCM-*-*0/1/2 AP* (Analog input, analog output + error output type PNP output)

FCM-*-*0/1/2 SN* (Analog input, switch output + error output type NPN output)

FCM-*-*0/1/2 SP* (Analog input, switch output + error output type PNP output)

Wiring method

Connector pin layout (body side) [Analog input type]

The analog input type does not have the 4, 6, 7, 8, 9 or 12 pins.

5 pin (power supply+)

11 pin (analog input)

1 pin (pre-set bit 1)


3 pin (integrating reset)

10 pin (common)

13 pin (switch output)

14 pin (error output)

15 pin (power supply -)Max. 50 mA

Signal generator

Load Load

+-

Mai

n ci

rcui

t

Signal generator








10 pin (common)

15 pin (power supply -)

Max. 50 mA

Load Load

+-

Mai

n ci

rcui

t

Signal generator






10 pin (common)



15 pin (power supply -)Max. 50 mA

Max. 50 mALoad

Load

Outpu

t sho

rt-circ

uit pr

otecti

on

+-

Mai

n ci

rcui

t

Signal generator

5 pin (power supply +)







10 pin (common)


Load Load

+-

Max. 50 mA

Max. 50 mAOutpu

t sho

rt-circ

uit pr

otecti

on

Mai

n ci

rcui

t

Outpu

t sho

rt-circ

uit

protec

tion

Outpu

t sho

rt-circ

uit

protec

tion

Example of internal circuit and load connection, analog input type

7

FCM Series

FCM-*-*PAN* (Parallel input, analog output + error output type NPN output)

FCM-*-*PAP* (Parallel input, analog output + error output type PNP output)

FCM-*-*PSN* (Parallel input, switch output + error output type NPN output)

FCM-*-*PSP* (Parallel input, switch output + error output type PNP output)

Connector pin layout (body side) [Parallel input type]

Mai

n ci

rcui

t


10 pin (common)

12 pin (MSB bit 10) 11 pin (bit 9) 9 pin (bit 8) 8 pin (bit 7) 7 pin (bit 6) 6 pin (bit 5) 4 pin (bit 4) 3 pin (bit 3) 2 pin (bit 2) 1 pin (LSB bit 1)




+-

Max. 50 mA

Load Load

Out

put s

hort-

circu

it pr

otec

tion

Mai

n ci

rcui

t


10 pin (common)





+-

Max. 50 mA

Max. 50 mALoad

Load

Mai

n ci

rcui

t


10 pin (common)





+-

Load Load

Max. 50 mA

Out

put s

hort-

circu

it pr

otec

tion

Mai

n ci

rcui

t


10 pin (common)





+-

Load Load

Max. 50 mA

Max. 50 mA

Out

put s

hort-

circu

itpr

otec

tion

Outpu

t sho

rt-circ

uitpro

tectio

n

Example of internal circuit and load connection, parallel input type

8

Technical data

FCM Series

Small Flow Controller FCM Series Functions

Explanation of functions

DetailsCompatible models

Operation

P10, 11P21

P14P21

P15P21

P12P21

P16P17P20P22P23

P17P18P19P22

P22

P20

P20

P22

P23

P9P23

P23

Analog inputAnalog output function

Parallel inputAnalog output functionSwitch output function Switch output function

No integrated No integrated pulse switch pulse switch

No integrated No integrated pulse switch pulse switch

Function

Integrating function

The flow rate is integrated. The following functions are used in addition to the integrated flow display. • The solenoid valve is closed and stopped at the set integrated flow. • Integrated pulse function (only switch output) • Switch ON at set integrated flow (only switch output) Resetting the integrated value • Analog input: External input, button operations • Parallel input: Only button operations

Switch output function

Zero point adjustment

Input signal zero/span

adjustment function

The following switch functions are selected. • (1) Tolerance mode: The switch turns ON when the level is within the tolerance (randomly set) of control target. • (2) Range designation mode: The switch turns ON when the level is not within the designated flow rate range. • (3) Integrated pulse: The integrated pulse is output during integration. • (4) ON when higher than set integration: The switch turns ON at the set integrated flow.

The input signal's zero point and span point is changed.

The flow rate output's zero point is adjusted.

Automatic power off

The flow rate display turns OFF if there are no operations for one minute. (Control does not stop when the auto power OFF function activates.) Power is saved since the display is turned OFF when not needed.

Error automatic shutoff If an error occurs, control is stopped, the valve is fully opened, and error output is turned ON.

Key lock Setting changes are disabled to prevent incorrect operations.

Setting reset Settings are returned to defaults.

Preset input function

When four random flow rate points are set, the flow rate is controlled by inputting a 2-bit signal from an external source (signals from PLC, etc.).

Direct memory function

The target is input with keys. Even if input signals from an external source are not used, control flow rate is freely adjusted with controller operation keys.

Analog input function

Parallel input function

The flow rate is controlled with a parallel 10-bit (signal from PLC, etc.) Expensive input/output devices, such as a D/A converter, are not required.

H (+ tolerance) Input signal setting L (- tolerance)

<Mode 1: Tolerance mode>

OutputON

OFF

H (upper limit side) L (lower limit side)

<Mode 2: Range designation mode>

OutputON

OFF

<Mode 3: Integrated pulse>

ON

Approx. 50 ms

See page 2 for details on the pulse output rate.

OFF

<Mode 4: ON when higher than set integration>

<When invalid>

Input signal

100%

0% 100%

Con

trol

flow

<When valid>

Input signal

100%

0% 100%

Zero point (L) setting range 0 to 50%

Span point (H) setting range 10 to 100%

ON

Set integration

OFF

Error display function

The error state is displayed. The following functions are used for the error display. • Error output is turned ON if an error occurs • Control stops automatically an error occurs

The flow rate is controlled with analog input signals.

9

FCM Series

Output display (red)

key

3-digit number LED display (green)

Press to set the setting mode. Press to set the setting item. Press to change to the integrated display.

UP key (MODE key)

<Instantaneous flow rate display> <Setting details display> <Error output>

Shift key (OFF key)

Press to count up the value, etc. Press to change the setting mode. Press to change the setting item.

Press to select the digit for a number, etc. When forced OFF (control stop) is executed, this key is

pressed to restore operation from the forced OFF state.

"F" is displayed while confirming function settings. "-" is displayed when switch output is ON. (Only switch output) * The display blinks when overcurrent is detected. * The display does not blink with integrated pulse output. "E" is displayed when error output is ON. * The display blinks when overcurrent is detected.

The instantaneous flow rate display and function setting details are displayed in the RUN mode (in-stantaneous flow rate display).

* The setting mode No. and setting details are displayed when displaying details of function settings. Values, etc., are displayed when setting each data. The error code No. is displayed when the error is displayed.

<Invalid display>

key (ENT key)+

Press to set the value. Press to unlock the key lock. Press to execute integration reset.

key (DOWN key)+

Press to count down the value, etc. Press to lock keys.

key+

Press to initialize values.

Names and functions of display and operation section

Setting details Code No.Setting mode No.

Setting detailsSetting mode No.

* If an upper/lower limit applies when setting the function, or when displaying both the high-order digit and low-order digit of the integrated flow display, H or L is displayed.

The supplied power voltage is not within the rating.

The input signal exceeds the rating range.

An error occurred during EEPROM reading or writing.

An error occurred during memory reading or writing.

The flow rate did not reach the setting for five and over consecutive seconds.

An output error is occurring in the sensor.

Switch output overcurrent protection circuit is activated.

Check controller power specifications, set power voltage within the rating range, and turn power ON again.

Check the controller input signal type, set the input signal within the rating range, and turn power ON again.

Contact your nearest CKD Sales Office or dealer.


Check the primary pressure, supply pressure within the rated operating differential pressure range, and turn power ON again.

Check that there are no leaks from piping, joints, or other devi-ces, correct connect pipes, and turn power ON again.


Stop the supply of fluids to the controller, set the flow rate to zero, and turn the controller power ON again.

If this error occurs again, contact your nearest CKD Sales Office or dealer.

Check whether load current exceeds the rating, correctly connect the controller, and turn power ON again.

Error display Cause Measures Errors subject to error automatic shutoff (Note)

Error code table

Errors are basically automatically reset. However, if the error is not reset, turn power OFF, check the cause and correct the error. Then, turn power ON again. Note: The default is error automatic shutoff set to OFF (valve fully closed if an error occurs). See page 23 for details.

10

How to operate

FCM Series

Controlling the flow rate

(1) Controlling the flow rate with direct memory

<Direct memory (1) operation><Direct memory (1) operation>

(1) Turn power ON. The instantaneous flow rate is displayed.

Forced OFF (flow rate zero)Forced OFF (flow rate zero)

<Flow rate setting range>

Flow rate: zero Valve fully opened

Full-scale flow rate

Set flow rate

<Input signal type >Direct memory input : drAnalog input 0 to 10V : A0Analog input 0 to 5V : A1Analog input 4 to 20 mA : A2Parallel input : PAPre-set input : P1

<Target setting>

key : Moves the digit

key : Counts up the value

key : Count down the value

Hold down for 2 s.

The instantaneous flow rate display is redisplayed after 3 s.

Hold down for 2 s.

Hold down for 2 s.

<F1: Input signal confirmation> <Input display>

<Instantaneous flow rate display >


<Instantaneous flow rate display> <Forced OFF display>Flow control state Flow control stopped state

Hold down for 2 s.


Alternate display

Alternate display

The controller is forcibly stopped (flow rate zero) by

holding down the key for 2 seconds in the flow

control state (instantaneous flow rate display).

The flow control state is entered again by holding down

the key for 2 seconds in the flow control stopped

state (forced OFF).

(7) The instantaneous flow rate display is redisplayed after 3 seconds.

The solenoid valve forced OFF state is displayed. Control is forcibly stopped even the input signal is input.

(6)Hold down the and keys together for 2

seconds, and set the value. The <F1: input signal

confirmation> screen is displayed.

(5) The flow rate changes when the value is change. The flow rate is adjusted by changing the value even if the value is not set.

(4)Hold down the key for 2 seconds and open the

<Direct Memory 1 Setting screen>.

(3)"F1.dr" blinks when the key is held down for 2

seconds.

(2)When the key is pressed, the <F1: Input signal confirmation>

screen is displayed. The current input signal setting state is displayed.

The current input signal type and input are alternately displayed.

(The instantaneous flow rate display is displayed if 3 seconds pass without

a button being pressed.)

The target is input with keys. Even if input signals from an external source are not used, control flow rate is freely adjusted with controller operation keys. Direct memory has two operation modes. • Direct memory (1): Settings are applied when the value is changed.(Even if the value is not set, the flow rate is adjusted by

changing the value. This is handy for finely adjusting the flow rate. Set the setting once the flow rate is determined.) • Direct memory (2): Changes are applied when the value is set. (The flow rate does not change unless the value is set.)

11

FCM Series


<Direct memory (2) operation><Direct memory (2) operation>



<Target setting>




(2)

(3)

(4)

(5) Change the value.

(The flow rate does not change unless the value is set.)

(6)

(7)

Forced OFF (flow rate zero)Forced OFF (flow rate zero)

Note:


Alternate display

Hold down for 2 s.

<Instantaneous flow rate display > <Forced OFF display>Flow control state Flow control stopped state

Hold down for 2 s.


Alternate display

Hold down for 2 s.

Hold down for 2 s.



The instantaneous flow rate display is redisplayed after 3 s.When the key is pressed, the <F1: Input signal confirmation>



(The instantaneous flow rate display is displayed if 3 seconds pass

without a button being pressed.)

Hold down the and keys for 2 seconds, and

open the <direct memory (2) setting screen>.

Hold down the and keys together for 2



The controller is forcibly stopped (flow rate zero) by

holding down the key for 2 seconds in the flow

control state (instantaneous flow rate display).

The flow control state is entered again by holding down

the key for 2 seconds in the flow control stopped

state (forced OFF).

• Control does not stop while setting direct memory. Take safety into consideration, and stop control (forced stop) if necessary.

• The flow control/forced OFF state (setting) is held even if power is turned OFF.

The instantaneous flow rate display is redisplayed after 3 seconds.

"F1.dr" blinks when the key is held down for 2

seconds.

The solenoid valve forced OFF state is displayed. Control is forcibly stopped even the input signal is input.

12

How to operate

FCM Series


(2) Controlling the flow rate with preset input (only analog input)

When four random flow rate points are set, the flow rate is controlled by inputting a 2-bit signal from an external source.

<Controlling with the preset input signal><Controlling with the preset input signal>



D-sub socket pin No. 2

Cable option insulator color

1

BrownOrange

Bit 1Bit 2

Pre-set memory No.

ON ON P4

ON OFF P3

OFF ON P2

OFF OFF P1

Type of input

Input signal

(2)

(3)

(4)

(5)

(6)

(7)

(8)<Instantaneous flow rate display >


Alternate display

<Confirming P1 setting> <Input display>

Alternate display

<Confirming P2 setting> <Input display>

Alternate display

Hold down for 2 s.

Hold down for 2 s.

Hold down for 2 s.

Hold down for 2 s.


Repeat to P4

<Target setting>





Example: To control 0, 1, 2, and 5r/min with preset input, select Preset Input for the input setting mode, and set each of the following:P1: 0r/min P2: 1r/min P3: 2r/min P4: 5r/min

When signals are input from a PLC, etc., as indi-cated in the table at right, the flow rate is control-led to each preset flow rate.

When the key is pressed, the <F1: Input signal confirmation> screen

is displayed. The current input signal setting state is displayed.


(The instantaneous flow rate display is displayed if 3 seconds pass without a

button being pressed.)


seconds.

When the key is pressed twice, "F1.P1" will blink.

Hold down the key for 2 seconds, and open the P1

setting confirmation screen.

Hold down the key for 2 seconds, and open the

target input screen.

Input the target.

When the and key are held down for 2

seconds, the target is set in memory, and the P2 setting

confirmation screen is displayed.

Set all of the targets up to P4 with this.

The instantaneous flow rate display is redisplayed after 3 seconds.The flow is controlled with preset input.

13

FCM Series


<Changing the setting with a shortcut><Changing the setting with a shortcut>


<Target setting>




(2)

(3)

(4)

(5)

Note: Do not change the preset external input while changing the setting with the shortcut key. The setting could be set into an incorrect preset No. Data is not saved in memory if power is turned OFF before setting the value. Set the value before turning power OFF.

Note: The input signal setting change screen opens the instant that the shortcut key is pressed. (Example: The P2 setting change screen opens when controlling the flow with the preset input P2.) This cannot be used when controlling the flow with analog input or parallel input.

Hold down for 3 s.

Control when flowing with preset memory P2


Alternate display

Hold down for 2 s.



(3) Changing settings with shortcut keys (only when using direct memory and preset input)

When controlling the flow using direct memory or preset input, the setting change screen is opened with a single key operation.

When the key is held down for 3 seconds, and the

key is pressed, the input signal setting change

screen is displayed.

(This is used only when controlling with direct memory or

preset input.)

The flow rate changes when the value is change. The

flow rate is adjusted by changing the value even if the

value is not set.

Hold down the and keys together for 2




<F1: input signal confirmation> and <input display> are alternately displayed during this time.

14

How to operate

FCM Series


(4) Controlling the flow rate with analog input (Only analog input)

The flow rate is controlled with analog input signals.

<Controlling with analog input signals><Controlling with analog input signals>



(2)

(3)

(4)

(5)

(6)

Note: Fully open (FUL) cannot be set with analog input.



Alternate display


Alternate display

Hold down for 2 s.

Hold down for 2 s.


When the key is pressed, the <F1: Input signal confirmation>



(The instantaneous flow rate display is displayed if 3 seconds pass



seconds.

When the key is pressed once, "F1.A 0 " will blink.

(The number shown in differs based on the model.)

Hold down the key for 2 seconds and set the value.

The <F1: input signal confirmation> screen is displayed.

The instantaneous flow rate display is redisplayed after 3 seconds.The flow rate is controlled with analog input.


15

FCM Series


(5) Controlling the flow rate with parallel input (Only parallel input)

The flow rate is controlled with a parallel 10-bit (signal from PLC, etc.) Expensive input/output devices, such as a D/A converter, are not required. The parallel input signal is a 10-point signal so when converted to a decimal, it becomes 0-1023. A 0.1% resolution is attained.

<Controlling with parallel input signals>



D-sub socket pin No.

Input signal = Set flow/full-scale flow x 1023 Example: To set 300 mr/min with a full-scale flow 500 mr/min 300 (mr/min)/500 (mr/min) x 1023 = 613.8 — > 614

When 614 (decimal) is converted to binary, it becomes 1001100110. 1 sets the input signal ON, and 0 sets the input signal OFF. (Refer to following table.)

12

Cable option insulator color Green (Black line)

Red (Black line)

White (Black line)

Bit 10 MSB

1

ON

11

White

Bit 9

0

OFF

9

Bit 8

0

OFF

8

Bit 7

1

ON

7

Pink

Bit 6

1

ON

6

Light blue

Bit 5

0

OFF

4

Purple

Bit 4

0

OFF

3

Yellow

Bit 3

1

ON

2

Orange

Bit 2

1

ON

1

Brown

Bit 1 LSB

0

OFF

Decimal [For 614 (decimal)]

Type of input

Input signal

(2)

(3)

(4)

(5)

(6)

The flow rate is controlled with parallel input.

Note: Fully open (FUL) cannot be set with parallel input.

<Reference>

If a high resolution is not required, the number of input points is reduced.


Alternate display


Hold down for 2 s.

Hold down for 2 s.


Alternate display


"F1.dr" blinks when the key is held down for 2 s.

When the key is pressed once, "F1.PA" will blink.

When the key is pressed, the <F1: Input signal

confirmation> screen is displayed. The current input signal

setting state is displayed.


(The instantaneous flow rate display is displayed if 3 s pass


Hold down the key for 2 s and set the value.

The <F1: input signal confirmation> screen is displayed.


Example: If 2% resolution is acceptable, operate with a 6-point input (0-63 when converted to decimal). Bits 5 to 1 in the above table are shorted in a bundle. When turned ON and OFF as one bit (LSB), control is executed with 6 points.


16

How to operate

FCM Series

Integrating the flow rate

(1) Displaying the integrated flow

The flow rate is integrated and displayed. The display range is shown below.

(2) Closing and stopping the solenoid valve with set integrated flow

The solenoid valve is closed and stopped when the set integrated flow is attained. This is suitable for processes in which a set amount is supplied, etc.

<Integrated display>

(1) Instantaneous flow rate display

<Operation>


Model No. FCM-9500 L9500

999999 mr

5 mr

1 mr

Display range

Display resolution

0 to 500 mr/min

Display range

Pulse output rate

0001 L0001

9999.99 r

0.01r

0.01r

0.00 to 1.00 r/min

0002 L0002

9999.99 r

0.02r

0.01r

0.00 to 2.00 r/min

0005 L0005

9999.99 r

0.05r

0.01r

0.00 to 5.00 r/min

0010 L0010

99999.9 r

0.1r

0.1r

0.0 to 10.0 r/min

0020

99999.9 r

0.2r

0.1r

0.0 to 20.0 r/min

0050

99999.9 r

0.5r

0.1r

0.0 to 50.0 r/min

0100

999999 r

1r

1r

0 to 100 r/min

The integration starts when power is turned ON.(The integrated value is reset when power is turned OFF.)

<Integrated flow display>High-order 3-digit display Low-order 3-digit display


Hold down for 2 s. Hold down for 2 s.

Hold down for 2 s.

Integration reset

(2)

(3)

(2)

(3)

(4)


Press five times

<High-order digit setting>

<When not using instantaneous automatic shutoff>

<When using instantaneous automatic shutoff>

<F5: Integrated automatic shutoff setting screen>

Hold down for 2 s.

Hold down for 2 s.

Hold down for 2 s.<Low-order digit setting>

Hold down for 2 s.

<Target setting>




Integrating function

Flow rate display

The integrated display screen opens when the key

is held down for 2 seconds. Press the key for 2

seconds to return to the instantaneous flow rate display.

The display digit changes when the key is pressed.

Integration is reset when the and keys are

held down for 2 seconds. With analog, integration is reset

with the external input (No. 3 pin). Integration is also reset

when power is turned OFF.

Press the key five times and open the <F5: integration

automatic shutoff setting screen>. If integration automatic shutoff

is valid, "F5.on" and the current setting are alternately displayed.

(The instantaneous flow rate display is displayed if 3 seconds

pass without a button being pressed.)

When the key is held down for 2 seconds, "F5.--" blinks.

When not using integration automatic shutoff, hold down the

key for 2 seconds. The <F5 screen> is redisplayed, and

after 3 seconds, the instantaneous flow rate screen is displayed.

To use integration automatic shutoff, press the key so that "F5.on" blinks. Then, hold

down the key for 2 s.

After setting the high-order digit, hold down the key and key for 2 seconds.

After setting the low-order digit, hold down the key and key for 2 seconds.

The <F5 screen> is displayed, and after 3 seconds, the instantaneous flow rate screen is displayed.

* Only in this mode, the integrated value is reset when the input signal reaches zero. (Valid only after automatic shutoff.) * The solenoid valve is automatically shut off and the switch functions when the set integrated flow is reached. * If the display for automatic shutoff is "OFF", the switch output lamp does not turn ON. The flow rate display is redisplayed when the

integrated value is reset (button operation or external input). * Even if automatic shutoff is invalidated during automatic shutoff, it does not function until the integrated value is reset. * The integrated value is reset when automatic shutoff is set to "on" and the value is set.

After setting, the <F5 screen> is redisplayed, and after 3 s, the instantaneous flow rate screen is displayed.



17

FCM Series

Integrating the flow rate

(3) Outputting the integrated pulse (Only switch output)

The integrated pulse is output. Refer to the table on page 16 for the pulse rate. Refer to the connection (page 5), examples of internal circuit and load connection (pages 6 and 7) for details on connecting switch output.

<Operation >

(1)

(4) Turning the set integrated flow ON with a switch (Only switch output)

Switch output is turned ON at the set integrated flow. See the connection (page 5), examples of internal circuit and load connection (pages 6 and 7) for details on connecting switch output.

<Operation >

(1)

<Target setting>




(2)

(3)

(4)


Press four times

<F4: switch output setting screen>

Press three times

Hold down for 2 s.

Hold down for 2 s.

<Integrated pulse setting screen >


Press four times

<F4: switch output setting screen>

Press four times

Hold down for 2 s.

Hold down for 2 s.

Hold down for 2 s.

Hold down for 2 s.

<High-order digit setting>

<Low-order digit setting>

(2)

(3)

(4)

Press the key four times and open the <F4: switch

output setting screen>. If switch output setting is valid,

"F4. " and the current setting are alternately displayed.

(The instantaneous flow rate display is displayed if 3 s


Hold down the key for 2 seconds, and enter

switch output setting mode.

When the key is pressed three times, "F4.3" blinks.

When the key is held down for 2 s, the integrated

pulse output is set. The <F4 screen> is redisplayed, and

after 3 s, the instantaneous flow rate screen is

displayed.






Hold down the key for 2 s, and enter switch output

setting mode.

When the key is pressed four times, "F4.4" blinks.

Hold down the key for 2 seconds, and open the

target setting screen.

After setting the high-order 3 digits of the target, hold

down the and keys for 2 s.

After setting the low-order 3 digits of the target, hold

down the and keys for 2 s. The integrated

value is reset after the target is set.

The <F5 screen> is displayed, and after 3 s, the

instantaneous flow rate screen is displayed.

Instantaneous flow rate display


(5)





18

How to operate

FCM Series

Using switch output (Only switch output)

(1) Using the tolerance mode

<Operation >

(1)

<Target setting>




L (- tolerance)

Input signal setting

H (+ tolerance)

ONOutput


Press four times

<F4: switch output setting screen >

Press once

Hold down for 2 s.

Hold down for 2 s.

Hold down for 2 s.

Hold down for 2 s.

<+ tolerance setting (%)>

<- tolerance setting (%)>

(2)

(3)

(4)

(5)

(6)

(7)

Switch output turns ON when the level is within the tolerance of the input signal setting. The tolerance is set for both the plus side and minus side as a %FS (full-scale) See the connection (page 5), examples of internal circuit and load connection (pages 6 and 7) for details on connecting switch output.








setting mode.

When the key is pressed once, "F4.1" blinks. Hold

down the key for 2 s, and open the target setting

screen.

After setting the tolerance (minus side), hold down the

and keys for 2 s.

Minus side setting range: -50 to 0% FS

After setting the tolerance (plus side), hold down the

and keys for 2 s.

Plus side setting range: 0 to 50% FS

The <F4 screen> is redisplayed, and after 3 s, the


After setting, the <F4 screen> is redisplayed, and after 3 seconds, the instantaneous flow rate screen is displayed.


OFF

19

FCM Series

Using switch output (Only switch output)

(2) Using the range designation mode

<Operation >


<Target setting>




L (lower limit side)

H (upper limit side)

ON

OFFOutput


Press four times

<F4: switch output setting screen >

Press twice

Hold down for 2 s.

Hold down for 2 s.

Hold down for 2 s.

Hold down for 2 s.

<Upper limit setting (%)>

<Lower limit setting (%)>

(2)

(3)

(4)

(5)

(6)

(7)

The switch turns ON when the level is not within the designated flow rate range. The upper and lower limit values are set regardless of the input signal setting (control target). Both the upper limit and lower limitre set as % FS (full-scale). Refer to the connection (page 5), examples of internal circuit and load connection (pages 6 and 7) for details on connecting switch output.







setting mode.

When the key is pressed twice, "F4.2" blinks. Hold

down the key for 2 s, and open the target setting

screen.

After setting the lower limit value, hold down the

and keys for 2 s.

Lower limit value setting range: 0 to 90% FS

After setting the upper limit value, hold down the

and keys for 2 s.

Upper limit value setting range: 10 to 100% FS

Note that the gap between the upper and lower limits

must be 10% FS and over.

The <F4 screen> is redisplayed, and after 3 s, the




20

How to operate

FCM Series

Operation (List)

<Key lock>

<Initialization>

<Key unlock>

<Integrated flow display>

Low-order 3-digit displayHigh-order 3-digit display

Integration reset

<Instantaneous flow rate display >Flow control state

<Normal display>

<Forced OFF display>Flow control stopped state

<Automatic shutoff display>Flow control stopped state

<F1: input signal selection >

Hold down for 2 s.

Hold down together for 5 s.


Hold down for 2 s.



Note: • Keys are unlocked when the controller is shipped. Lock keys if necessary. The key lock/unlock state is held even if power is turned OFF. • Control does not stop during the F1: input signal selection or F2: input signal zero/span setting. Take safety into con-

sideration and stop control (forced stop) if necessary. • The flow control/forced OFF state is held even if power is turned OFF.

The current instantaneous flow rate is displayed.

The solenoid valve forced OFF state is displayed. Control is forcibly stopped even when the input signal is input.

The integration automatic shutoff state is displayed.

The current integrated flow is displayed. Integration starts when power is turned ON. Integration is reset when the and keys are held down. With analog, integration is reset with the external input. Integration is also reset when power is turned OFF.

Note: The flow control/forced OFF state is held even if power is turned OFF.

The instantaneous flow rate display is displayed after 2 s.



21

FCM Series

Operation (List)

<F1: input signal selection >

Alternate display

Input display

Input signal type

Alternate display

Alternate display

Set P3 target in same manner

Target setting

Target setting

<Preset input setting> (Not used for parallel input)

<Direct memory input setting>

Select which input style to use for control.

<Analog input (parallel input) setting>

<F1 screen >

After 3 seconds

Direct memory (1): The setting is applied when the value is changed.

Alternate display

P1 target display

P2 target display

P4 target display

Target setting

<F2: input signal zero span adjustment >

<Flow rate setting range>

Flow rate: zero Valve fully open

Full scale flow rate

Set flow rate

Direct memory (2): The setting is applied after it is set.

Hold down for 2 s. Hold down for 2 s. Hold down together for 2 s.

Hold down together for 2 s. Hold down together for 2 s.

Hold down for 2 s.




Hold down for 2 s.

Hold down for 2 s.



<Target setting>




<Instantaneous flow rate display>

After setting, the setting mode is exited, and the <F1 screen> is displayed.


After setting to the analog input (parallel input) mode, the <F1 screen> is displayed.


Setting mode is exit-ed, and the <F1 screen> is displayed.

Note: Integration automatic shutdown (F5.on) does not function while the input signal is set. However, once the setting is set, the integrated automatic shutdown is applied. If the integrated flow is higher than the set value at this time, automatic shutdown will occur.

22

How to operate

FCM Series

Operation (List)

After 3 s

<Target setting>




<Target setting>




<F2: input signal zero span adjustment >

<Zero point adjustment (%)> <Span point adjustment (%)>

When using with full-scale

When using with zero and panel adjusted

<F3: Automatic power off setting >When not using auto power OFF function

When using auto power OFF function

<F4: switch output setting >

<- tolerance setting (%)> <+ tolerance setting (%)>

When not using switch output

When using mode 1 (tolerance mode)

<Lower limit setting (%)> <Upper limit setting (%)>

<Low-order digit setting><High-order digit setting>

When using mode 2 (range designation mode)

When using mode 3 (integrated pulse)

When using mode 4 (ON when above integration)

Note: Switch output setting mode cannot be entered with the analog output.

<F2 screen >

<F4 screen >

<F3 screen >

- tolerance setting range: -50 to 0% FS + tolerance setting range: 0 to 50% FS

Lower limit setting range: 0 to 90% FS Upper limit setting range: 10 to 100% FS Note that the gap between the upper and lower limits must be 10% FS and over.

<F5: Integrated automatic shutoff setting screen>

Hold down for 2 s.

Hold down together for 2 s.Hold down together for 2 s.

Hold down for 2 s.

Hold down for 2 s.


Hold down for 2 s.


Hold down together for 2 s.Hold down together for 2 s.


Hold down for 2 s.Hold down for 2 s.

Hold down for 2 s.

Hold down for 2 s.

Hold down for 2 s.

Hold down for 2 s.


After 3 s<Instantaneous flow rate display>











Note: If the preset memory input or direct memory input is selected with F1 (input signal selection function), this function cannot be used. Full-scale applies. If the zero point is changed, the integration automatic shutoff cannot be reset (reset by zero input signal).

* Refer to 1.1 Specifications for details on the integrated pulse rate.

* If reset is executed with external input, the integration is reset, so pulses are not output.

* The OUT light does not turn ON while integrated pulses are output.

* If any key is pressed during auto power OFF, the display turns ON.

* The auto power OFF setting time is one minute. This time cannot be changed.

* Control does not stop during auto power OFF.

* The integrated value is cleared immediately after mode 4 is set.

23

FCM Series

Operation (List)

After 3 s<F5: Integrated automatic shutoff setting screen>

<Low-order digit setting><High-order digit setting>

When not using integrated flow automatic shutoff

When using integrated flow automatic shutoff

<F5 screen >

<F6: Error automatic shutoff setting>When not using error automatic shutoff

When using error automatic shutoff(Valve fully closed at error)

<F6 screen >

When using error automatic shutoff(Valve fully opened at error)

<F7: Zero adjust (flow rate output)>When not using integrated flow automatic shutoff<F7 screen >

Alternate display

Current adjust value

New adjust value


Note: Execute forced OFF (stop control) before adjusting the zero point. • To prevent malfunctions, the zero point cannot be adjusted unless forced OFF is executed. • is displayed when forced OFF is not executed. • Purge to working gas before adjusting the zero point.

Hold down for 2 s.

Hold down together for 2 s.Hold down together for 2 s.Hold down for 2 s.

Hold down for 2 s.


Hold down for 2 s.

Hold down for 2 s.

Hold down for 2 s.









* Only in this mode, the integrated value is reset when the input signal reaches zero. (Valid only after automatic shutoff.) * The solenoid valve is automatically shut off and the switch functions when the set integrated flow is reached. * If the display for automatic shutoff is "OFF", the switch output light does not turn ON. The flow rate display is redisplayed when

the integrated value is reset (button operation or external input). * Even if automatic shutoff is invalidated during automatic shutoff, it does not function until the integrated value is reset. * The integrated value is reset when automatic shutoff is set to "on" and the value is set.

* Errors causing error automatic shutoff • Sensor error: State when sensor

signal error or input signal error has occurred, or when power voltage is not within range.

• Control error: State when flow cannot be controlled to set value.

2 s. after new adjust value is displayed, <F7 screen> is displayed.

24

Small size flow sensor FSM series

Related Products

Catalog No. CC-687A

Inline Clean Filter FCS500/FCS1000 Series

Ideal as the final filter in different clean applications (For air and inert gas)

Three compact flow sensor series compatible with different applications

8-point preset input

Custom-order Parts

This type is compatible with eight preset points. (Note that the external integration reset signal input cannot be used with this type.)

Oil-prohibition specifications (Only stainless steel body)

This option is available for stainless steel body (excluding oxygen models).

Custom-order parts with the following functions are used. Contact the CKD Sales Office for details.

FSM series

FSM-V series

FSM-H series Compact, high-speed, extremely small flow Detect extremely small flows of 1mr/min or less at a high speed Positive/negative pressure types both used

Compact, high-speed response Compatible with argon (Ar) and carbon oxide (CO2)

Ultra-compact, super high-speed response Capable of 5 ms high-speed response

0.01 µm high filtration, 99.99% removal efficiency A 0.01 µm filtration accuracy and 99.99% removal efficiency are attained with the hollow fiber membrane element. Long life The greatly improved life is 5 times longer than the flat membrane type. Compact, lightweight, large flow A filtration area 3 to 10 times larger than the flat membrane type with same capacity is adopted, enabling large flows to be processed with a low pressure loss. With the same capacity, the unit is downsized and lightened. Oil-prohibition specifications All parts have been degreased and washed. All production from assembly to packaging is done in a clean room. Easy maintenance The resin type has a transparent cover so element contamination is visually confirmed. Ample variations The available variations include the 500 and 1000 flow rates, resin or stainless steel, and a push-in joint, male thread pipe or female thread pipe installation.

Specifications are subject to change without notice.このカタログに掲載の仕様および外観を、改善のため予告なく変更することがあります。

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LAMPHUN OFFICE133 Moo 4, Banklang Muang, Lamphun, 51000, Thailand PHONE +66-(0)53-582-116 FAX +66-(0)53-582-079

KORAT OFFICE982/3-4 Mittraphab Rd.,Naimuang,Muang,Nakhonratchasima 30000, Thailand PHONE +66-(0)4424-8860 FAX +66-(0)4424-8862

SingaporeCKD SINGAPORE PTE LTD.705 Sims Drive #03-01/02, Shun Li Industrial Complex, 387384 Singapore PHONE +65-6744-2623 FAX +65-6744-2486

Taiwan日商喜開理股　有限公司台湾分公司CKD CORPORATION TAIWAN BRANCH中華民国台湾省台北市中山北路二段96號嘉新大楼第14楼1405室Rm.1405,14F,No.96,Sec.2,Chung Shan N.Rd.,Taipei, Taiwan,R.O.CPHONE +886-（0）2-2523-0374 FAX +886-（0）2-2523-5081

China喜開理（上海）機器有限公司CKD(SHANGHAI)CORPORATION営業部/上海事務所（SALES HEADQUARTERS / SHANGHAI OFFICE）中国上海市浦東新区張楊路１８８号　湯臣商務中心3楼３０４室Room 304, 3'rd Floor, Tomson Business Center, No.188, ZhangYang Road, PuDong, ShangHai, 200120, ChinaPHONE +86-(0)21-58798266 Fax +86-(0)21-58797507

北京事務所（BEIJING OFFICE）中国北京市復興路戊12号恩菲科技大廈1015室En-Fei-Ke-Ji Bdg. Room #1015, Fu-xing-Lu-Wu 12,Beijing,100038, ChinaPHONE +86-(0)10-63951008 FAX +86-(0)10-63957378

天津事務所（TIANJIN OFFICE）中国天津市南開区白堤路148号Bai-Di-Lu, 148, Nankai-Qu, Tianjin, 300193, China PHONE +86-(0)22-27492788 FAX +86-(0)22-27483916

無錫事務所（WUXI OFFICE）中国江蘇省無錫市中山路389号吟春大廈1708室Room 1708, Yin-chun Bdg., Zhongshan Road No.389,Wuxi, Jiangsu Province, 214001, ChinaPHONE +86-(0)510-2753506 FAX +86-(0)510-2750156

南京事務所（NANJING OFFICE）中国南京市山西路57号杰源山西路商務中心502室Room 502, Jieyuan Shanxi Road Business Center No.57,Shanxi Road, Nanjing, 210009, ChinaPHONE +86-(0)25-86633426 FAX +86-(0)25-83733596

重慶事務所（CHONGQING OFFICE）中国重慶市石橋舗楡洲路8号秦興科技広場1634号Taixing Keji Square Room 1634, Yuzhou Road No. 8Shiqiaopu, ChongQing, 400039, ChinaPHONE +86-(0)23-68610533 FAX +86-(0)23-68631161

成都事務所（CHENGDU OFFICE）中国四川省成都市西玉龍街210号成都外貿大廈22楼2207号Chengdu Waimao Bdg. 22F, Room #2207, Xi-Yu-Long-Jie210, Chengdu city, Sichuan Prov., 610015, ChinaPHONE +86-(0)28-86624906 FAX +86-(0)28-86620216

西安事務所（XIAN OFFICE）中国陜西省西安市労働南路296号西北民航大廈610号Xi-bei-min-hang Bldg. Room #610, Lao-dong-nan-lu 296,Xian city, Shangxi Prov., 710082, ChinaPHONE +86-(0)29-88793422 FAX +86-(0)29-88709982

深　事務所（SHENZHEN OFFICE）中国広東省深　市華富路1006号航都大廈7B単元HangDu Building 7B, No.1006 HuaFu Road,Shenzhen, 518031, ChinaPHONE +86-(0)755-83646644 FAX +86-(0)755-83646699

広州事務所（GUANGZHOU OFFICE）中国広東省広州市環市東路339号広東国際大酒店A楼24CGuangdong Guoji Dajiudian A-24C,No.339,Huanshidong-Lu,Guangzhou City,Guangdong,510098 ChinaPHONE +86-(0)20-83313461 FAX +86-(0)20-83313462

大連事務所（DALIAN OFFICE）中国遼寧省大連市西崗区新開路99号大連珠江国際大廈808室DaLian ZhuJiang GuoJi-Bld. Room #808, XinKai-Lu 99, DaLian city, LiaoNing Province, 116011, ChinaPHONE +86-(0)411-83779312 FAX +86-(0)411-83779313

長春事務所（CHANG CHUN OFFICE）中国吉林省長春市長春一汽越野路16号単元4楼中門16-1 16-1 Dan Yuan 4-Lou Zhong Men, 16, Chang Chun Yi Qi Yue Ye Lu, Chang Chun City, JiLin Province, 130011, ChinaPHONE +86-(0)431-2909875 FAX +86-(0)431-2909875

杭州事務所（HANGZHOU OFFICE）中国浙江省杭州市分暉路108号浙江省出版印刷大廈410室Zhejiangsheng Chuban Yinshua Daxia Room 410,No.108,Fenhui-Lu, Hangzhou City,Zhejiang,310004 China PHONE +86-（0）571-85800055 FAX +86-（0）571-85800054

KoreaCKD KOREA CORPORATIONRoom No.1105, 11th FL, The Korea Teachers Pention B/L. 27-2, Yoido-Dong, Youngdeungpo-Gu, Seoul, 150-742, KoreaPHONE +82-(0)2-783-5201～5203 FAX +82-(0)2-783-5204

2-250 Ouji Komaki, Aichi 485-8551, Japan PHONE+81-(0)568-74-1338　FAX+81-(0)568-77-3461

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2006.4.DCC

new product small size flow controller fcm series · flow rate is freely adjusted with the...

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