normal data tests with jump - frontier homepage...

Normal Data Tests with JUMP Steve Brainerd

1

Normal Data Tests• Question: How do I tell if my data is normally

distributed?• 1. Graphical Methods• Histogram• Normal probability plot• 2. Numeric Methods• Kurtosis and Skewness• 2a. Statistical tests for Goodness of Fit?• Jump uses Shapiro Wilks W • There are many others.


2

Normal Data Tests:2. Numeric Methods Kurtosis and Skewness


3

Normal Data Tests:2a. Numeric Methods Statistical tests for Goodness of Fit Jump uses Shapiro Wilks W

There are many others.


4

Normal Data Terminology: Q-Q Plots and P-P PlotsWe typically call a Q-Q Plot our NORM PROB Plots


5

Normal Data Tests with JUMPExample: Defect data analysis


6

Normal Data Tests with Jump


7


• Under Analyze look at Distribution


8


• Under Analyze look at Distribution


9

Normal Data Tests with Jump• Under Analyze look at Distribution


10

Normal Data Tests with Jump• Under Analyze look at Distribution Menu


11

Normal Data Tests with Jump• Under Analyze look at Distribution Menu Fit

Distribution: Normal


12

Normal Data Tests with Jump• Under Analyze look at Distribution Menu Fit

Distribution: Normal• Click on red triangle• Fitted Normal


13


• Click on red triangle Fitted Normal Quantile Plot


14


• JUMP Distribution: Click on red triangle Fitted Normal Quantile Plot and then Goodness of Fit


15


• Click on red triangle Quantile Plot and Fitted Normal Goodness of Fit

• SiN Bay19 1x4SiN wFlwr 1300A: Adders >0.2um

• Shapiro-Wilk W Test:• If Prob<W value greater than

0.05 data is reasonably normal


16



• SiN 5AT ES1150:Adders >0.2


17



• SiN 14A 420C 1300A: Adders >0.2um


18

Normal Data Tests with JumpExample 2: New data SEMs


19

Normal Data Tests with JumpShapiro-Wilk W test for Normal data

Example 2: New data SEMs : Data is reasonably normal


20


Example 3 SiN Thickness DataNormal or Not so Normal?

Normal Probability Plot - Thin Nitride Measurements

-3

-2.5

-2

-1.5

-1

-0.5

0

0.5

1

1.5

2

2.5

3

410.00 420.00 430.00 440.00 450.00 460.00 470.00 480.00

Thickness A

NO

RM

SIN

V

UV 1050 SiN

OPTIPROBE 2600

99.9%

99.4%

97.7%

93.2%

84.1%

69.2%

50%

30.9%

15.9%

6.7%

2.3%

0.6%

0.1%


21


Example 3 SiN Thickness Data :Outliers!


22


Example 3 SiN Thickness Data :Outlier box Plot


23


Example 3 SiN Thickness Data :Outlier box Plot


24


Example 3 SiN Thickness Data : Eliminated Outliers!

OPTIPROBE 2600

UV1050


25


Example 3 SiN Thickness Data :No Outliers!

OPTIPROBE 2600

UV1050


26

Normal Data Tests with JumpExample 3 SiN Thickness Data Capability: Optiprobe

Sorted data


27


Example 4 SiN RI Data

Normal Probability Plot - Thin Nitride

-3

-2.5

-2-1.5

-1

-0.5

0

0.5

11.5

2

2.5

3

1.92 1.94 1.96 1.98 2.00 2.02 2.04 2.06 2.08

Refractive Index

NO

RM

SIN

V

RI UV1050

RI OPTIPROBE 2600

99.9%

99.4%

97.7%

93.2%

84.1%

69.2%

50%

30.9%

15.9%6.7%

2.3%

0.6%

0.1%


28


Example 4 SiN RI Data Optiprobe 2600: only 3 values bined causes an issue!


29


Example 4 SiN RI Data UV1050


30

Shapiro-Wilk Normal testreference: http://www.itl.nist.gov/div898/handbook/prc/section2/prc213.htm


31

Shapiro-Wilk Normal test

normal data tests with jump - frontier homepage...

Documents