operation a high performance, low noise, 128- channel readout integrated circuit for instrumentation...
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![Page 1: Operation A High Performance, Low Noise, 128- Channel Readout Integrated Circuit for Instrumentation and X-Ray Applications E.Beuville, M.Belding, A.Costello,](https://reader038.vdocument.in/reader038/viewer/2022110402/56649e405503460f94b31d26/html5/thumbnails/1.jpg)
Operation
A High Performance, Low Noise, 128-Channel Readout Integrated Circuit for
Instrumentation and X-Ray Applications
E.Beuville, M.Belding, A.Costello, R.Hansen, S.Petronio
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INDIGO OPERATIONS
IEEE NSS N8-4– October 18, 2004
Indigo Systems Background(Merged with FLIR, January 2004)
Infra-Red Systems Manufacturer Imaging and Thermography Surveillance, Firefighting, Industrial, Military… • IR sensor fabrication facility (GaAs, InSb, Bolo) • Readout Integrated Circuit (ROIC) Core Capability
• Large 2D ROIC pixel arrays (1k x 1k at 15um pixel size)• Custom IC (mixed signal)
IR applications X-ray and mammography applications Implantable devices Space applications Instrumentation
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INDIGO OPERATIONS
IEEE NSS N8-4– October 18, 2004
ISC9717 ROIC Description
Design 128 Channels, Low-Noise ROIC for Flat Panel Array and Instrumentation• 80um channel pitch• Low noise charge amplifier (programmable gain)• Low Pass Filter (programmable time constant)• Correlated Double Sampling (programmable gain)• On-Chip ADC (programmable 9 to 14 bits gray-code
output)
Charge Integrator Track-and-Hold 9-14 Bit ADCLow Pass Filter
LPF CDSADC
9 to 14bit
9 to 14bit
2 4 4
Integrator
Gain Time Constant Gain Resolution
T/HLPF CDSADC
9 to 14bit
Gain Time Constant Gain Resolution
T/H
C.D.S. Amplifier
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INDIGO OPERATIONS
IEEE NSS N8-4– October 18, 2004
Applications and Detectors Compatibility
Wide Range of Applications Wide Range of Detectors
Digital X-ray Medical Imaging - Radiography - Fluoroscopy - Mammography - Angiography - Tomography
Flat Panel X-ray Sensors (TFT) - Cesium Iodide (CsI) or other scintillators - Selenium (Se) - Amorphous Silicon - Photodiode
Instrumentation - Airport screening - Non-Destructive Testing - CT scan, PET imaging - Astrophysics applications - Nuclear Science - Industrial Instrumentation
Solid-State Detectors - Silicon Detectors (Si) - Cadmium Zinc Telluride (CdZnTe) - Gallium Arsenide (GaAs) - Germanium (Ge) - Photodiode
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INDIGO OPERATIONS
IEEE NSS N8-4– October 18, 2004
Application to X-ray Flat Panel
ISC9717 reading out TFT flat panel array• Wire bonded or Tape Automated Bonding (TAB)• Programmable readout direction
ISC9717ISC9717
ISC9717ISC9717
14 bits
14 bits14 bits
14 bits
TFT Array (split in 2)
Detector Bias
Column Select Line DATA Line
+
Sensor Pixel
Gate Driver Gate Driver
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INDIGO OPERATIONS
IEEE NSS N8-4– October 18, 2004
ISC9717 Serial Command Register Gain Control (Integrator and CDS)
• Full dynamic range from 48fC (3x105 e-/hole) to 12pC (75x106 e-/hole) Integration While Read mode
• Higher readout rate Integration Then Read mode
• Lower noise Integration time control
• Integration time adjusted by controlling the clock (24us to few ms) Readout direction (left or right)
• Allows the readout IC to be connected on both sides of 2D sensors Averaging mode (two adjacent channels averaged)
• Improved signal-to-noise ratio• Higher readout rates
ADC resolution (9 to 14 bit)• Higher readout rate for lower ADC resolution• Current mode output (reduced clock feedthrough)
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INDIGO OPERATIONS
IEEE NSS N8-4– October 18, 2004
Charge TransImpedance Amplifier (CTIA)
Folded cascode architecture• Differential amplifier large PSRR• P channel input transistors low 1/f noise• Folded cascode high gain and dynamic range• Adjustment of reference hole or electron collection
VREF_ININPUT
VREF_IN = 1.5 to 3.5V
5V
GND
1 2
34
6 5
CF = 0.5pF, 1pF, 2pF, 4pF
1.0V
2.5V range (hole coll.)
4.5V
3.0V range (e- coll.)
VREF_IN=1.5V
VREF_IN=3.5V
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INDIGO OPERATIONS
IEEE NSS N8-4– October 18, 2004
Low Pass Filter (LPF)
Simple first order low pass filter Limit the bandwidth (f-3dB from 32 to 200kHz)
• Noise attenuation RC filter implementation
• RC=1us with Resistor (1Meg) and Capacitor (1pF)• Resistor can be too large to implement (HiRes poly=1k/SQ)
Using transistor’s transconductance gm
• Time constant = CLPF/gm
Programmable time constant• 0.8us, 1.3us, 2.8us, 3.3us• 1us, 2us, 4us, 5us with external voltage adjustment
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INDIGO OPERATIONS
IEEE NSS N8-4– October 18, 2004
Low Pass Filter (Slew / Rise Time Constraint)
Slew rate and settling • Measurement time for 14bit settling increases
for large signal amplitude due to slew rate
VP
t
SR settling
TMt2 t3t1
LPF
SRP
C
I
t
VSR
LPF
SRP
C
I
t
VSR
)()( 11
ttP eV
)(
)( 11tt
P eV
Slew rate:
Settling:
1)2ln(. NI
CVT
SR
LPFPSET
Approximation:
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INDIGO OPERATIONS
IEEE NSS N8-4– October 18, 2004
4.0E-06
6.0E-06
8.0E-06
1.0E-05
0.01 0.1 1 10
Low Pass Filter Implementation
= CLPF/gmCf
out
CLPF
gm
VGS
• At t=0, VGS is large large current large SR large gm small When VLPF reaches VIN
small current (settles with )
VIN
VLPF
non-linear settling linear (no bulk effect) adjustable time constant
RC+SR
LPF
Tsettle
4us
6us
8us
10us
0.01 0.1 1 10Log(VIN)
SPICE sim.
10bit settling
RST
RC+SR
LPF
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INDIGO OPERATIONS
IEEE NSS N8-4– October 18, 2004
Correlated Double Sampling Amplifier (CDS)
Remove offset and CTIA kTC noise• After integrator reset released store and subtract
kTCINTEG Reduces 1/f noise (increases thermal noise) Programmable gain
• X1, x2, x4, x8, x32
+
CLAMP2
TRACKCLAMP1 VREF_CDS
C1
C2
Gain =C1/C2
VREF_CDS
CDS_BIT[0-3]
1.E-04
1.E-03
1.E-02
1.E-01
1.E+00
1.E+01
1.E+02 1.E+03 1.E+04 1.E+05 1.E+06
)()( SCDS TfSinC
CfH
2
212 42
f(Hz)
V2/Hz
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INDIGO OPERATIONS
IEEE NSS N8-4– October 18, 2004
Analog-to-Digital Converter One ADC per channel Single slope ADC
• On-chip voltage ramp generator (programmable)• Grey code counter 1 bit changing at a time
RST_ADC
RAMP_IN
VREF_ADC
RST
Signal (held)
t
ramp
RST
Inp
ut
Lat
ch
Latches
14
Cc
VREF_ADC
9-14bitGray Code
CounterGray Code
Counter
INPUT14
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INDIGO OPERATIONS
IEEE NSS N8-4– October 18, 2004
ADC Ramp Generator
Clock = 40ns (twice Master clock)
VLSB = VADJ_RAMP C1
C2+CL
40ns VLSB
C2
VPOS
C1
RAMP_OUT
Non-overlappingclock
C1
GND
CL
RST_ADC
• Slope controlled by VADJ_RAMP
and the C1/(C2+CL) ratio Adjustment of the LSB level from 9bit to 14bit
• Charge pump architecture• Programmable ramp for 9 to 14 bit conversion
VADJ_RAMP
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INDIGO OPERATIONS
IEEE NSS N8-4– October 18, 2004
Current Mode Output
.
CL<30pF
Low Impedance V < 50mV
VPD
Current Mode Receiver
10k
700
1V
0.5mA
ROIC
PN3640
Suggested current mode receiver
• Current mode output (0.5mA) high speed output low voltage output low power reduced clock feedthrough
CLOCK
SYNC
Data OutBIT9 BIT8 BIT7
Data rate = 12.5MHz
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INDIGO OPERATIONS
IEEE NSS N8-4– October 18, 2004
ISC9717 Noise Analysis and Measurements
All noise sources taken into account
+Quantization Noise
BWAmp
VkTC
CLAMP
VkTCcds
T/H
CT/H
T/H
+
SELECT
CF
RST
vAmp
+
v1/f
VkTC
CINT
INT
LPFCC1
CC2
Vout
vLine
VkTCf
Detector Noise
2
222
)(
)()(
S
S
F
SINTEG
Tf
TfSin
C
TfH
)(42
)( 22
12SCDS TfSin
C
CfH
22
21
1
)()(
mLPFLPF
gCffH
+
For detector current integration
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INDIGO OPERATIONS
IEEE NSS N8-4– October 18, 2004
Noise Acquisition
60Hz
No input cap
10pF 100pF 50pF
time
• External input capacitor added on few channels• 60Hz noise pick up from the inputs / test board Removed by subtracting 2 channels (increases the noise by √2)
128 channel
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INDIGO OPERATIONS
IEEE NSS N8-4– October 18, 2004
Noise Measurement
High resolution setting:Cf = 1pF LPF=1usGainCDS = 32ADC = 14bit
• Equivalent Noise Charge (ENC) referred to the input
0
500
1000
1500
2000
2500
3000
3500
4000
0 2E-11 4E-11 6E-11 8E-11 1E-10 1.2E-10
Measurement
0
500
1000
1500
2000
2500
3000
3500
CDET0 20pF 40pF 60pF 80pF 100pF
ENC (e-RMS)
Analysis
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INDIGO OPERATIONS
IEEE NSS N8-4– October 18, 2004
Noise as a Function of LPF
CDET= 50pFCf = 0.5pF GainCDS = 8ADC = 14bit
ENC 1600e-RMS
Optimum noise for 5us LPF time constant
• Dominant thermal noise (V2RMS) 1/LPF
1000
1200
1400
1600
1800
2000
2200
0.00E+00 1.00E-06 2.00E-06 3.00E-06 4.00E-06 5.00E-06 6.00E-06LPF0 1us 2us 3us 4us 5us1000
1200
1400
1600
1800
2000
ENC (e-RMS)
Analysis
Measurement■▲
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INDIGO OPERATIONS
IEEE NSS N8-4– October 18, 2004
ISC9717 Averaging Mode Averaging mode
• SNR improvement• Increase readout rate by a factor 2
T/H
CHOLD
T/H
CHOLD
To ADC
AVG
V1
V2
Odd channel
Even channel
VAVG = (V1 + V2) / 2
SNR = (V1 + V2)
2√ (V2n1 + V2
n2)
√2 SNR improvement
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INDIGO OPERATIONS
IEEE NSS N8-4– October 18, 2004
ISC9717 Performance SummarySpecifications Nominal CommentsNumber of channel 128 channel/chip 80um Input bonding pad pitch
Clock frequency 12.5MHz Low voltage differential clock
Integrator gain control CF=0.5pF, 1pF, 2pF, 4pF 2BIT gain control
Charge collection Electrons (≤ 75x106 e-)
Hole (≤ 62x106 hole)
VREF_INTEG = 1.5V for e- collection
VREF_INTEG = 3.0V for hole collection
Low-Pass-Filter time constant 0.8us, 1.3us, 2.8us, 3.3us
(1us, 2us, 4us, 5us)
2BIT (2 capacitors selectable) 10% tolerance
With external voltage adjustment
Correlated Double Sampling Gain = x1, x2, x4, x8, x32 Removes the ROIC kTC and 1/f noise
Crosstalk 0.25% (internal to ROIC)
Total power dissipation 220mW 200mW nominal
ADC resolution 9 to 14 bits (gray code output) Programmable ADC resolution
(ADC frequency=25MHz)
Current mode output 9 to14 output used Parallel output (single ended 0.5mA 20%)
ENC (GINTEG =2mV/fC,
GCDS=32, ADC=9bit)
1200 e-RMS referred to input Measured noise with 50pF input capacitor
Noise depends on systems noise performance
ENC (GINTEG =2mV/fC,
GCDS=8, ADC=14bit)
1400 e-RMS referred to input Measured noise with 50pF input capacitor
Noise depends on systems noise performance
ENC (GINTEG =2mV/fC,
GCDS=1, ADC=14bit)
2300 e-RMS referred to input Measured noise with 50pF input capacitor
Noise depends on systems noise performance
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INDIGO OPERATIONS
IEEE NSS N8-4– October 18, 2004
Standard ASIC Product Package
ISC9717 ROICUSER MANUAL
DOC # 400-9717-10 VERSION 2.3October 14, 2003
Copyright Indigo Systems Corporation 2003
Information furnished by Indigo Systems Corporation is believed to be accurate. However, no responsibility is assumed by Indigo Systems Corporation for its use, nor for any infringements of
patents or other rights of third parties that may result from its use. No license is granted by implication or otherwise under any patent
or patent rights of Indigo Systems Corporation.
Standard ASICs • By the die in fully tested wafer
form• 487 die / wafer
AMI 0.5um process Typical yield is above 90%
Each wafer:
complete test data on CD-ROM
CD-ROM contains PRISM test data explorer software
Physical database in GDSII format provided on CD-ROM
Complete set of documentation• Design and Users Guide• Technical Application Notes• Physical Interface Drawings
Applications engineering support
successful integration of sensor with ROIC
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INDIGO OPERATIONS
IEEE NSS N8-4– October 18, 2004
Integration While Read Simultaneous integration, A/D conversion and readout Higher frame rate 28.6kHz conversion rate at 9 bit resolution (Clock = 12.5MHz) 1.49kHz conversion rate at 14 bit resolution
Stop CLK for longer integration time
tINTEG=11.68us + 2(N-1)/fCLK
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INDIGO OPERATIONS
IEEE NSS N8-4– October 18, 2004
Integration Then Read Integration, ADC and readout performed sequentially Lower Noise 15.1kHz conversion rate at 9 bit ADC resolution (Clock = 12.5MHz) 1.42kHz conversion rate at 14 bit ADC resolution
Stop CLK for longer integration time
tINTEG=34.4us
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INDIGO OPERATIONS
IEEE NSS N8-4– October 18, 2004
Noise Measurement (1 of 2)
High gain setting:Cf = 0.5pF LPF=1usGainCDS = 32ADC = 9bit
CBOARD 4.0pF
• Equivalent Noise Charge (ENC) referred to the input
CDET
0
500
1000
1500
2000
2500
3000
3500
4000
0 2E-11 4E-11 6E-11 8E-11 1E-10 1.2E-100
500
1000
1500
2000
2500
3000
3500
0 20pF 40pF 60pF 80pF 100pF
ENC (e-RMS)
Analysis
Measurement■
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