optical and thermal imaging of nanostructures with a scanning fluorescent particle as a probe....
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![Page 1: Optical and thermal imaging of nanostructures with a scanning fluorescent particle as a probe. Near-field experiments : ESPCI, Paris, FranceLionel Aigouy,](https://reader036.vdocument.in/reader036/viewer/2022062314/56649cda5503460f949a3f86/html5/thumbnails/1.jpg)
Optical and thermal imaging of nanostructures with a scanning fluorescent particle as a probe.
Near-field experiments :
ESPCI, Paris, France Lionel Aigouy, Benjamin Samson
Samples :
IEF, Orsay, France Gwénaelle Julié, Véronique MathetTIMA, Grenoble, France Benoît CharlotLAAS, Toulouse, France Christian BergaudLPS, Orsay, France Rosella Latempa, Marco Aprili
Fluorescent particles :
ENSCP, Paris, France Michel Mortier
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OUTLINE
Introduction : fluorescent particle as a local sensor
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OUTLINE
Introduction : fluorescent particle as a local sensor
A local optical sensor (evanescent fields)
Local field around metallic nanoparticles
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OUTLINE
Introduction : fluorescent particle as a local sensor
Local field around metallic nanoparticles
Surface plasmons polaritons launched by apertures
A local optical sensor (evanescent fields)
![Page 5: Optical and thermal imaging of nanostructures with a scanning fluorescent particle as a probe. Near-field experiments : ESPCI, Paris, FranceLionel Aigouy,](https://reader036.vdocument.in/reader036/viewer/2022062314/56649cda5503460f949a3f86/html5/thumbnails/5.jpg)
OUTLINE
Introduction : fluorescent particle as a local sensor
A local thermal sensor
Hot zones in a polysilicon resistive stripe
Local field around metallic nanoparticles
Surface plasmons polaritons launched by apertures
A local optical sensor (evanescent fields)
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OUTLINE
Introduction : fluorescent particle as a local sensor
Hot zones in a polysilicon resistive stripe
Heating of an aluminum track
Local field around metallic nanoparticles
Surface plasmons polaritons launched by apertures
A local optical sensor (evanescent fields)
A local thermal sensor
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HOW DOES IT WORK ? PM
Sample
Electromagnetic field on the surface
Microscopeobjective
Filters
Laser
Map of the field distribution on the
surface
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HOW DOES IT WORK ? PM
Electromagnetic field on the surface
Microscopeobjective
Filters
Map of the total field distribution on the
surface
Simplicity
Many dipoles randomly oriented
Detection of the total electromagnetic field on the surface (Ex, Ey, Ez)
Sample
Laser
APL, 83, 147 (2003)
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HOW DOES IT WORK ?
Simplicity
PM
Electromagnetic field on the surface
Microscopeobjective
FiltersMany dipoles randomly oriented
Detection of the total electromagnetic field on the surface (Ex, Ey, Ez)
Er / Yb ionsRobust : inorganic → no photobleaching
Infrared excitation :emission and absorption lines well separated
(= 550nm)
Non linear excitation :fluo I2 → Contrast enhanced
Sample
Laser (=974nm)
APL, 83, 147 (2003)
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TIP FABRICATION
Optical images : 16.5 x 11.7 m2
Applied Optics, 43(19) 3829 (2004)
Attachment of the particle
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TIP FABRICATION
Optical images : 16.5 x 11.7 m2
Applied Optics, 43(19) 3829 (2004)
Attachment of the particle
200nm size particle exc = 975 nmLateral resolution : / 5
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LOCAL OPTICAL FIELDS : NANOPARTICLES
AFM
Particle diameter : 250 nm
Gold and latex particles on a surface
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LOCAL OPTICAL FIELDS : NANOPARTICLES
AFMGold and latex particles on a surface
Fluorescence
Particle diameter : 250 nm
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LOCAL OPTICAL FIELDS : NANOPARTICLES
AFM
Fluorescence is enhanced on gold particles
Gold
LatexLatex
JAP, 97 104322 (2005).
Gold and latex particles on a surfaceFluorescence
Particle diameter : 250 nm
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LOCAL OPTICAL FIELDS : NANOPARTICLES
AFM
Fluorescence is enhanced on gold particles
Gold
LatexLatex
JAP, 97 104322 (2005).
Dark ring around the particle : interference between the incident and the scattered wave.
Circular symmetry of the field distribution
Gold and latex particles on a surfaceFluorescence
Map of the field distribution on the structure
Particle diameter : 250 nm
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LOCAL OPTICAL FIELDS : NANOSLIT APERTURES
TM-polarized excitation
10,44µmSEM
scan
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LOCAL OPTICAL FIELDS : NANOSLIT APERTURES
TM-polarized excitation
scand=10,44µm
10,44µmSEM
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LOCAL OPTICAL FIELDS : NANOSLIT APERTURES
TM-polarized excitation
scand=10,44µm
Period = 480.5 nm ± 2 nm
spp / 2 = 481.6 nm
Good agreement with the SPP wavelength
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OTHER APPLICATION : TEMPERATURE MEASUREMENTS
Fluorescent particle
Emission varies with temperature
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OTHER APPLICATION : TEMPERATURE MEASUREMENTS
Fluorescent particle
Emission varies with temperature
Tip
Fluorescent particleStripe
Microelectronic device
Laser beam
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OTHER APPLICATION : TEMPERATURE MEASUREMENTS
Fluorescent particle
Emission varies with temperature
Tip
Microelectronic device
T °
I
Fluorescent particleStripe
If we know the temperature dependence
of the fluorescence,then we can determine
the temperature
Laser beam
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OTHER APPLICATION : TEMPERATURE MEASUREMENTS
Highly localized sensor
Improvement of the lateral resolution
Pollock & Hammiche,J. Phys. D 34, R23 (2001)
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OTHER APPLICATION : TEMPERATURE MEASUREMENTS
Improvement of the lateral resolution
Pollock & Hammiche,J. Phys. D 34, R23 (2001)
Low parasitic heating by convection through the air
Highly localized sensor
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HOW CAN WE DEDUCE THE TEMPERATURE ?
Er / Yb ionsPL spectrum of Er / Yb doped particles
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HOW CAN WE DEDUCE THE TEMPERATURE ?
4F7/22H11/24S3/2
4I15/2
(550 nm)(527 nm)
(980 nm)
(980 nm)
Er / Yb ionsPL spectrum of Er / Yb doped particles
).
exp(Tk
E
I
I
yellow
green
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EXPERIMENTAL SET-UP
Microelectronic circuit
Oscillating tip
Topography
Scanning stage
Tapping mode (f=6kHz, amplitude=10nm)
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EXPERIMENTAL SET-UP
Microelectronic circuit
Oscillating tip
Topography
Scanning stage
Tapping mode (f=6kHz, amplitude=10nm)
F=620Hz
Laser beam
(980nm)
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EXPERIMENTAL SET-UP
Microelectronic circuit
Oscillating tip
Topography
Scanning stage
Tapping mode (f=6kHz, amplitude=10nm)
Laser beam
(980nm)
F=620Hz
Beam
spli
tter
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EXPERIMENTAL SET-UP
Microelectronic circuit
Oscillating tip
Topography
Scanning stage
Tapping mode (f=6kHz, amplitude=10nm)
Laser beam
(980nm)
F=620Hz
520nm
Filter
PMT Lock-in
Optical image 1
Beam
spli
tter
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EXPERIMENTAL SET-UP
Microelectronic circuit
Oscillating tip
Topography
Scanning stage
Laser beam
(980nm)
F=620Hz
550nm
520nm
Filter
Filter
PMT
Lock-in
Lock-in
Optical image 2
Tapping mode (f=6kHz, amplitude=10nm)
Optical image 1
Beam
spli
tter
PMT
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DOES THAT WORK ? Collaboration : B. Charlot (TIMA, Grenoble), G. Tessier (ESPCI, Paris)
Polysilicon resistor stripe
(covered with SiO2 and Si3N4 layers)
Topography
Yellow optical image (550nm)
Green optical image (520nm)
Microelectronic device :
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DOES THAT WORK ?
First experiment : no current circulating in the resistor
Yellow fluorescence image (550nm)Green fluorescence image (520nm)
Topography
Scan size : 45µm x 60µm
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DOES THAT WORK ?
First experiment : no current circulating in the resistor
Yellow fluorescence image (550nm)Green fluorescence image (520nm)
Topography
Scan size : 45µm x 60µm
Optical contrast visible between different zones
Reference image
Uniform temperature (room temperature)
I = 0 mA
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DOES THAT WORK ?
Second experiment : a current circulates in the resistor
Uniform temperature (room temperature)
Optical contrast visible between different zones
Reference image
I = 50 mA
I = 0 mA
APL, 87, 184105 (2005).
Hot spots
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CONCLUSIONScanning near-field fluorescent probes have really interesting imaging capabilities !
Future :
- Reduce the size of the fluorescent particle : to get a better resolution
- Many studies : plasmonics and thermics
• Nano-optics : evanescent fields (localized, surface plasmons polaritons)
• Nano-thermics : heating in stripes, failure analysis, …
UNIVERSAL DETECTOR !
Acknowledgments : Philippe Lalanne (Institute of Optics, Orsay, and US Dax supporter)