optical sensor - eng.surugaseiki.com · high speed, high resolution laser autocollimator : h900...
TRANSCRIPT
5017
Beam diameter(mm)φ1Wavelength
650
WD(mm)
150/230
Resolution
0.4/1.0/1.8 sec.
Measurement range
±0.17 ±0.9±0.5Sampling250/500kHz
Runout measurement of a precision motor. Dynamic surface and axis tilt of a polygon motor.
Measure an angle, wobble and deflection measurement of golvanometer mirror. Pitching and yawing measurement of actuator.
High speed・High resolution
Technicalguide
Selectionguide
Compact
Standard
High resolutionwide view
Screen
Ghostcancel
2 wavelength
Processingunit
Accessories
Laserautocollimatorset
Wavefrontsensor
6-axis sensor O-PIAS
Laserautocollimator
Accessories for alignment
Angle
measurem
ent
High Speed, High Resolution Laser Autocollimator : H900 Series HRAD
High-end autocollimator
■High speed sampling 500kHz(2 μsec)
Measure the angle of a displaced object at high speed
dynamically.1Measure 3,000 points/encircled if 10,000rpm
solid of revolution.
■High resolution 0.4 sec. (0.0001 degree)
Realize a measurement resolution 0.4sec.Catch the high
speed and fine angular displacement accurately.
*In case of measurement range ±0.17 degree.
■Analog output voltages
Equiped analog output volgate to the sampling speed and can be build corelation environment for the analytical method with connecting to the oscilloscope and FFT analyzer.
※Contact us if you would like to know how to measure.
■Features
■Application
Optical Sensor
5018
High speed・High resolution
Technicalguide
Selectionguide
Compact
Standard
High resolutionwide view
Screen
Ghostcancel
2 wavelength
Processingunit
Accessories
Laserautocollimatorset
Wavefrontsensor
6-axis sensor O-PIAS
Laserautocollimator
Accessories for alignment
Angle
measurem
ent
■Functions
■Trace ■Zoom
■Adjustment automatic incident beam■Display the result・Communications
Can be visualized what
kind of trace does the
object move.
Can be recorded up to 100
data.Transport to the host
device by RS-232C.
Trace data is displayed 2
or 4 times zoom-in by the
zoom function.It is possible
to display an enlarged image
without trace.
Automatic adjustment
of incident beam that is
expected the refl ection
of the object makes
measurement stable.
Incident the beam to the mirror while rotating the polygon scanner
in actual rotation speed.Adjust the timing by the refl ection
from each surface, and measure
the angular tilt to Y direction
of each surface during
a set time period.
Available statistical displays
and acceptance
of judgmentfor each surface.
The mode is ordinarlly used. Tilt measurement of the object
in real-time.Processing and displaying tilt of the object
vibrating at high speeds driven digitally, and then output to
the other tools by high speed analog output.
Displayed measurement terms can be selected arbitrary
such as minimum, maximize and width of the XY axis.
This is for measuring runout of a precision motor.Calculate
in digital for runout, tilt and the outermost point by the
dynamic tilt of the rotation.Can be displayed in a short time
and correctly compared to the cumulative method by the
former CCD type autocollimator.
Displayed measurement terms can be selected arbitrary
such as runout, tilt, and the outermost point in addition to
each axis of XYD.
■Measurement mode
Standard Mode
Motor Mode
Polygon Mode (Compatible models only)
Tilt angle(vertical axis) of 8-axis(horizontal axis)
5019
High speed・High resolution
Technicalguide
Selectionguide
Compact
Standard
High resolutionwide view
Screen
Ghostcancel
2 wavelength
Processingunit
Accessories
Laserautocollimatorset
Wavefrontsensor
6-axis sensor O-PIAS
Laserautocollimator
Accessories for alignment
Angle
measurem
ent
Optical Sensor
87
45.2
40
6363
18 236173-φ8 69DP(The hole for sensor head fixing)
I/F
φ6H7 5DP、2 standard holes
8-4 5DP50
50100
162
30
45.256
1008272
109.5
180269
Laser outgoing position Conector
40
27.4
87
VIDEO Output
4-4 5DP200
13253.3
50
5027
.433
.511
7
74.5
126.8
58.5 2-φ8.5 68.5DP
55
I/FConector
Shutter speedLaser outgoing position
The hole for sensor head fixing
φ6H7 5DP、2 standard holes
Touch-pannel
177
179
(114)137
20°
■Dimensional outline drawings
SPECModel H900-P017C H900-P050C H900-P090C
Sampling speed250 type 250kHz(4μ sec.)500 type 500kHz(2μ sec.)
Measurement range Display deg. ±0.17 deg. ±0.5 deg. ±0.9 deg.Display min.sec. ±10 min.12 sec. ±30 min.00 sec. ±54 min.00 sec.
Reflected spot abservation camera Sold separately(C mount) Built-inCentroid detection Luminance centroid within measurement range (1 point)Resolution 0.4 sec. 1.0 sec. 1.8 sec.Measurement wavelength Semiconductor laser 658nm±10nmLaser output 5.0mW or less(Typ2.5mW) Class 3ROutgoing beam diameter φ1mm and less(outgoing 1/e2)The measurement object distance 230±30mm* 150±30mm*
Signal processor
Display(operation) 5.7 TFT color LCD(touch-pannel type)
FunctionsAngle measurement, Relative origin, Switching units (deg./min.sec.)
3 of measurement mode (Standard/Motor/Polygon),Judgment of acceptanceControl the motorized and manual outgoing beam volume,Trace,Zoom,Data output
OutputAnalog output
Choose from 2CH X:(±10V)、Y:(±10V)、D:(0-10VOutput impedance 300Ω Offset within ±20mV
Digital output 2CH open corrector output (1CH is output for acceptance)
InputTrigger input 1CH external sampling signal input(TTL level<50kHz)Digital input 5CH photo coupler isolated input
Communication port RS-232C Measurement data output, controller inputEnvironment Recommended/strage environment 20±3℃/10-40℃(non-condensing)Power supply voltage AC100-240V±10% 50/60Hz(15W)External dimension(Sensor head) W162×H269×D87mm W117×H200×D87mmWeight(Sensor head) 4.1kg 1.8kgExternal dimension(Signal processor) W177×H179×D137mmWeight(Signal processor) 2.1kgAccesarry Power code, connecting code and instruction manual(0.4kg)Compatible tilt stage HB12
●Sensor head H900-P050C、H900-P090C●Sensor head H900-P017C
●Signal processor HSP-100S (H)
*The measurement length to maximize its potential
5020
High speed・High resolution
Technicalguide
Selectionguide
Compact
Standard
High resolutionwide view
Screen
Ghostcancel
2 wavelength
Processingunit
Accessories
Laserautocollimatorset
Wavefrontsensor
6-axis sensor O-PIAS
Laserautocollimator
Accessories for alignment
Angle
measurem
ent
■Set of measurement confi guration
■Model
Measurement range ・Resolution Sampling speed Product name Model Confi guration items Standard accessory Remark
Measurement range :±0.17 deg.Resolution :0.4 sec.
250kHzHigh Response Angle Displacement HRAD(Set of measurement/250kHz) H900-P017C-F250
H900-P017C-250SPower codeConnecting cable※2
Instruction manua
With C mount(Camera sold
separately)
HA12 High rigidity stand(Long)HB12 High rigidity tilt
500kHzHigh Response Angle Displacement HRAD(Set of measurement/500kHz) H900-P017C-F500
H900-P017C-500SPower codeConnecting cable※2
Instruction manua
HA12 High rigidity stand(Long)HB12 High rigidity tilt
Measurement range :±0.5 deg.Resolution :1.0 sec.
250kHzHigh Response Angle Displacement HRAD(Set of measurement/250kHz) H900-P050C-F250
H900-P050C-250SPower codeConnecting cable※2
Instruction manua
Built-in camera※1
HA12S High rigidity standHB12 High rigidity tilt
500kHzHigh Response Angle Displacement HRAD(Set of measurement/500kHz) H900-P050C-F500
H900-P050C-500SPower codeConnecting cable※2
Instruction manuaHA12S High rigidity standHB12 High rigidity tilt
Measurement range :±0.9 deg.Resolution :1.8 sec.
250kHzHigh Response Angle Displacement HRAD(Set of measurement/250kHz) H900-P090C-F250
H900-P090C-250SPower codeConnecting cable※2
Instruction manua
Built-in camera※1
HA12S High rigidity standHB12 High rigidity tilt
500kHzHigh Response Angle Displacement HRAD(Set of measurement/500kHz) H900-P090C-F500
H900-P090C-500SPower codeConnecting cable※2
Instruction manua
HA12S High rigidity standHB12 High rigidity tilt
■Set of measurement (Mainbody(Optical head specifi cation+Signal processor)+Tilt+Stand)
Measurement range ・Resolution Sampling speed Product name Model Confi guration items Standard accessory Remark
Measurement range :±0.17 deg.Resolution :0.4 sec.
250kHzHigh Response Angle Displacement HRAD250kHz/Stand-alone
H900-P017C-250S(H900-P017C)
Power codeConnecting cable※2
Instruction manua
With C mount(Camera sold
separately)
(HSP-100S)
500kHzHigh Response Angle Displacement HRAD500kHz/Stand-alone
H900-P017C-500S(H900-P017C)(HSP-100SH)
Measurement range :±0.5 deg.Resolution :1.0 sec.
250kHzHigh Response Angle Displacement HRAD250kHz/Stand-alone
H900-P050C-250S(H900-P050C)
Power codeConnecting cable※2
Instruction manuaBuilt-in camera※1(HSP-100S)
500kHzHigh Response Angle Displacement HRAD500kHz/Stand-alone
H900-P050C-500S(H900-P050C)(HSP-100SH)
Measurement range :±0.9 deg.Resolution :1.8 sec.
250kHzHigh Response Angle Displacement HRAD250kHz/Stand-alone
H900-P090C-250S(H900-P090C)
Power codeConnecting cable※2
Instruction manuaBuilt-in camera※1(HSP-100S)
500kHzHigh Response Angle Displacement HRAD500kHz/Stand-alone
H900-P090C-500S(H900-P090C)(HSP-100SH)
Measurement range ・Resolution Sampling speed Product name Model Confi guration items Standard accessory RemarkViewing:±0.17deg.Resolution:0.4 sec.Correspond to ~30,000rpm
500kHz
High Response Angle Displacement HRAD(PD built-in)500kHz/Stand-alone
H900-P017-500S(H900-P017C) Power code
Connecting cable※2
Instruction manua
(HSP-100SH)
Viewing:±0.5 deg.Resolution:1.0 sec.Correspond to ~90,000rpm
High Response Angle Displacement HRAD(PD built-in) 500kHz/Stand-alone
H900-P050-500S(H900-P050)
(HSP-100SH)
※1 Comfi rmable the measurement surface that could be caught a high quality refl ection with focusing spot on the CCD screen.※2 Cable connects to the sensor head and signal processor.※3 May be impossible camera corresponded due to Polygon model incorporate PD for timing.Available Standard/Motor mode in the Polygon model.
■Polygon compatible model※3
■High Response Angle Displacement HRAD Mainbody(Optical head specifi cation+Signal processor)
Tilt stage(HB12)
Sensor head
Stand(HA12S)
※Power code, connecting code and instruction manual are included.
Signal processor
5021
X=-0.3degY= 0.0degD= 0.3deg
Surface tilt
PSD
PD
Detector
Measurement objects
Focusing lensPosition
Angle
Measurement objects
Collimating lens
High speed・High resolution
Technicalguide
Selectionguide
Compact
Standard
High resolutionwide view
Screen
Ghostcancel
2 wavelength
Processingunit
Accessories
Laserautocollimatorset
Wavefrontsensor
6-axis sensor O-PIAS
Laserautocollimator
Accessories for alignment
Angle
measurem
ent
H900 Technical Guide
Detector Product
CCD H350 H400H450 H600
PSD H900
Different a detector
Dinamic measurement for polygon scanner motorMeasurable total surface tilt level with high speed rotation.
Head for polygon made"There is Polygon mode program as standard on the part of signal processing, but the head for polygon mode for measurement is required."
Divided positioning sensor(Vertical480pixel × horizontal640pixel)
Detect the CCD with dividing information of vertical and horizontal.Also multiple refl ection SPOT are identifi ed.(HIP-1200 multi-spot measurement)
CCD Charge Coupled Device PSD Position Sensitive Detector
Non-divided type positioning sensor utilizing surface resistance of photo diode.
It has the exellent positioning resolution and response by getting the continuous electric signal (X/Y coordinates)
Multiple refl ectio SPOT are not identifi ed. (Not available multi-spot measurement)
Strengths
Weaknesses
Monitor display
Mirror surface detection method and measurement timing"The head makes measurement trigger pulse by receiving high speed PD to split the laser refl ection in the headfrom the Polygon motor."
Optical Sensor
■Diff erent from laser autocollimator H350, H400, H450 and H600
■What is Polygon compatible model?
5022
Measurement objects
PSDAnalog
A/D Conversion
H900
Digital
Angle conversion D/A Conversion
drawing
Determ-ination
Application software
2ch
Analog
Managing laser output
Digital signal
Oscilloscope
Correction of non-linear
A
B
A
B
World's Fastest500,000Hz
High speed・High resolution
Technicalguide
Selectionguide
Compact
Standard
High resolutionwide view
Screen
Ghostcancel
2 wavelength
Processingunit
Accessories
Laserautocollimatorset
Wavefrontsensor
6-axis sensor O-PIAS
Laserautocollimator
Accessories for alignment
Angle
measurem
ent
Almost critical speed part consists of the hardwear.
【A/D Conversion】PSD A/D conversion
Instantly correction
【High speed degital correction of non-linear】
Can be secure S/N by a wideband by Suruga original circuit(an amplifi er and A/D converter that built-in the head).
PSD is superior in position resolving and responsiveness, but it may be became the reason of the measurement error due to non-linear characteristic by a light receiving condition.Can be showed a more right value by a correction of non-linear of the hardwear in the high-speed measurement environment of 500kHz.
Actual valueActual value
theoretical value theoretical value
Measurement error:small
■The world's fastest angle measuring technology