p series purgemeters p series - 流量計・液面計 ... · full coverage for semi-conductor...

Full Coverage for Semi-Conductor Processes for Built-IN Use for Equipment for General Industrial Processes

P SERIES PURGEMETERSP SERIES PURGEMETERS

JUN. 2013K

Head Office : Shiba Toho Building, 1 – 7 – 24 Shibakoen, Minato-ku, Tokyo 105 – 8558

Tel : +81-3 – 3431 – 1625 (KEY) ; Fax : +81-3 – 3433 – 4922

e-mail : [email protected] ; URL : http://www.tokyokeiso.co.jp

* Specification is subject to change without notice.

CF030F111-11E

Individual catalogues or technical guidances are available for all the products introduced

in this general guidance.

Contact your agent or TOKYO KEISO.

ISO 9001 CertifiedJQA-2172

P-100Page

P.3

P-510Page

P.11 P-620Page

P.17

P-710Page

P.19 P-771Page

P.21 P-772Page

P.23

P-520Page

P.13 P-530Page

P.15

P-200Page

P.5 P-300Page

P.7 P-400Page

P.9

P SERIES PURGEMETERSPRODUCTSINFORMATION

P-773Page

P.25

P-774Page

P.27 P-810Page

P.29 P-820Page

P.31 P-830Page

P.33

P-850Page

P.35 P-880Page

P.37 P-900Page

P.39 P-010Page

P.40

P-060Page

P.42 YPPage

P.44 XPPage

P.46Page

P.47

Page

P.49PAU

Reed switch typealarm unit

Optional alarm unit

In this catalogue, possible measuring range for each model is shown in the followingconditions:

For liquid measurement, Water (density 1.0 g/cm3, viscosity 1.0 mPa·s)For gas measurement, Air at 0 oC, 0 MPa (1 atm)

If actual operating condition differs from above, a compensation calculation mentionedbelow is required for selection.Moreover, when the specification is modified after delivering the products, refer to thecompensation calculations.

FLOW RATEINDICATION

Inorganic compounds

Organic com

pounds

at 0oC0.00930.02120.01370.01790.01660.01380.01160.01310.01230.01710.01920.00930.01700.01460.00840.0166

–0.01170.0186

at 20oC0.01000.02220.01460.01880.01770.01470.01260.01430.01320.01810.0203

––

0.01530.00880.0175

–0.01240.0196

Viscosity mPa·sDensity kg/m3(nor)at 0oC,0MPa0.77131.7831.9881.3401.2501.9772.9271.6393.2141.2931.4292.3353.6457.1390.089941.2511.6961.5390.1785

FORMULA

NH3

ArN2ONOCO

CO2

SO2

CR2

(Air)O2

C2N2

HBrBr2

H2

N2

F2

H2SHe

G A S

AmmoniaArgonNitrous oxideNitrogen oxideCarbon monoxideCarbon dioxideSulfurous acid gasHydrogen chlorideChlorideAirOxygenCyanogenHydrogen BromideBromineHydrogenNitrogenFluorineHydrogen sulfideHelium

at 0oC0.00960.00660.00690.00700.00750.00860.00680.00940.00940.00980.00910.00930.00690.00750.00680.00780.00590.00680.00620.00870.01020.0085

–

at 20oC0.0102

–0.0074

––

0.0092–

0.0101–

0.01060.00990.01000.00740.0080

–0.0084

–0.0074

––

0.01080.00910.0130

Viscosity mPa·sDensity kg/m3(nor)at 0oC,0MPa1.1712.5932.5952.6832.0571.3563.3091.2602.8802.3083.7925.3292.7032.0202.6831.8793.8473.4883.2211.4300.71682.0570.8405

FORMULA

C2H2

C3H6OC4H10

C3H8OC2H6O

C2H6

C4H10OC2H4

CH2CR2

CHR3

C4H10

C3H8

C3H8OC3H6

C6H14

C6H6

C5H12

CH4OCH4

C2H6O13A

G A S

AcetyleneAcetoneIsobutaneIsopropyl alcoholEthanolEthaneEthyl etherEthyleneEthyl chlorideMethyl chlorideMethylene chlorideChloroformButanePropanePropyl alcoholPropyleneHexaneBenzenePentaneMethanolMethaneMethyl etherCity gas

HCRC2H5CRCH3CR

● Physical characteristic of gases

For gas measurement applications

Compensation is required by density, pressure and temperatureof measuring gas.Compensation is required as follows;

1) In case the indication unit is Normal

QAIR=Q0 X �o X 273+T0 X 0.1013

1.293 273 0.1013+P0

QAIR :Converted flow rate for airQ0 :Flow rate of actual gas on actual condition

(Flow rate at normal: 0 oC, 0 MPa)�0 :Density of actual gas {kg/m3(nor)}T0 :Operating temperature (oC)P0 :Operating pressure (MPa)

2) In case the indication unit is Operating condition

QAIR=Q0 X �o X 273 X 0.1013+P0

1.293 273+T0 0.1013QAIR :Converted flow rate for airQ0 :Flow rate of actual gas on actual condition

Flow rate at operating condition: T0 oC, P0 MPa

�0 :Density of actual gas {kg/m3(nor)}T0 :Operating temperature (oC)P0 :Operating pressure (MPa)

For liquid measurement

In case the density of the liquid to be measured is not 1.0 g/cm3.

Q=Q0 X �o(�1-1) (�1-�0)

Q :Water converted flow rateQ0 :Flow rate of actual liquid�0 :Density of actual liquid (g/cm3)�1 :Density of float (g/cm3)

Table for float density

Float material

Density (g/cm3)

Fluorocarbon resin

2.2

Stainless steel

7.9

Note:1) Additional weight is integrated for special versions including

reed switch alarm version to increase float density.2) Reed switch alarm contact has a built-in magnet, and density

is different from that of the above Table.

Normally, liquid having a viscosity of 2 mPa·s can be measuredby the P-series purgemeters.To measure the high viscosity fluid (oil, etc.), compensation cal-culation is available by computer. Consult factory for details.

1

P SERIES PURGEMETERSINDEX & QUICK REFERENCE

INDEX & QUICK REFERENCE

Ava

ilability fo

r unit p

roductio

n

Com

plying with C

E and UL standards

SW

,VC

R co

nnectio

n re

quire

d

Ala

rm co

nta

ct require

d

Quick d

elive

ry, from

stock

For h

ot p

ure

wate

r

Internal surface electro-polished

Short le

ngth

150m

m o

r less

Genera

l-purp

ose

resin

body

Flu

oro

carb

on re

sin b

ody

To m

easu

re la

rge flow

To m

easu

re sm

all flow

To measure chem

ical and pure water

To m

easu

re g

ase

s

To m

easu

re liq

uid

s

P-100P-200P-300P-400P-510P-520P-530P-620P-710P-771P-772P-773P-774P-810P-820P-830P-850P-880P-900P-010P-060YPXPReed Switch Type Alarm unitPAU Optical alarm unit

35791113151719212325272931333537394042444647495052535455

Classification by Application

Model

Best Available

Reference pages

ADVICE FOR YOUR PRODUCT SELECTIONMounting optionOther optionValve position selection, Float reading position etc.Calculate compensation

Advice for your product selection

2

P-100

■ ORDERING INFORMATION

Measuring object　　Liquids and gases

Measuringrange

Air

Water

Range abilityAccuracy

Max. Op. Press.

Max. Op. Temp.

Material

BodyTapered tube

Packing

SupportCover

Connection

Mounting

Std.Opt.Std.

Opt.

MASS(std. type)

. Air at 0 oC, 0 MPa (1atm) . When selecting flow range, refer to standard flow rate table. . In case Op. Press. of gas is not 0MPa, refer to page 1.

10:2 for some ranges

When packing PTFE is used, Max. Op. Press. is0.5 MPaStandard products have the packing materials made of NBR, so Max.Temp.is 80 oCOption(Specify by model code)SUS316

FPM(max.120 oC), CR(max.80 oC),PTFE(max.120 oC),EPDM(max.80 oC)

Refer to Basic model code for details.

Refer to ordering information for details.

Min. 4~20 mL/min(nor).Max. 5~50 L/min(nor).

Min. 5~50 mL/min.Max. 0.4~2 L/min.

10:1±5 %F.S.

0.8 MPa

120 oC

Std.

SUS304Heat-resistant glass

NBR(max.80 oC)

AluminiumPoly-carbonateRc1/4Rc1/8,NPT1/4,NPT1/8Lock-nut mount onto panel frontBezel installation,Panel-rear installation,Stand provided etc.0.5 kg

Type Availability

Reed switch type alarm unitGeneral

CE, UL VersionPAU Optical alarm unit

*: It is general data, and the maximum temperature may change by terms of use and environment.

4~20 mL/min(nor) 6~30 mL/min(nor) 10~50 mL/min(nor) 10~100 mL/min(nor) 20~200 mL/min(nor) 30~300 mL/min(nor) 50~500 mL/min(nor) 0.1~1 L/min(nor) 0.2~2 L/min(nor) 0.3~3 L/min(nor) 0.5~5 L/min(nor) 1~10 L/min(nor) 2~20 L/min(nor) 3~30 L/min(nor)

5~50 L/min(nor)

Air(0 MPa,0 oC) Water Air(0 MPa,0 oC) Alarm setting range Water Alarm setting rangeIn case alarm output code is 0 or E In case alarm output code is A to D

5~50 mL/min 10~100 mL/min 20~200 mL/min 30~300 mL/min 50~500 mL/min

0.1~1 L/min

0.3~1.5 L/min

0.4~2 L/min

1~10 L/min(nor)

3~15 L/min(nor)

6~30 L/min(nor)

8~40 L/min(nor)

2~8 L/min(nor)

3~12 L/min(nor)

6~24 L/min(nor)

8~32 L/min(nor)

50~500 mL/min

0.1~1 L/min

100~400 mL/min

0.2~0.8 L/min

* May be different depending on the scale length. Available for flow rate less than shown on flow rate table. Contact us for further details.*1 In case packing material is PTFE, purge meter with valve can not be made for flow rate less

than max 1L/min (nor).*2 In case of the specification other than the standard flow table, there may be the change in the

flow range for certain reasons of production.†1 10:2 if range is less than 100 mL/min (nor).†2 10:2 if range is more than 1 L/min (nor).†3 10:2 if range is more than 10 L/min (nor).†4 The viscosity of a liquid is 1.0 mPa·s.

†1

†2†3

†4

FLO

W D

IRE

CT

ION

VA

LVE

ALA

RM

OU

TP

UT

WE

TTED

PA

RTS

MA

TER

IAL

PA

CK

ING

MA

TE

RIA

L

CO

NN

EC

TIO

N T

YP

E

CO

NN

EC

TIO

N S

IZE

EXAMPLE

DESCRIPTION

P-10 -L -40 0 N -R 212Z

R

N

ZNCFE

T

Z46Z

0ABCDEZ

L

U

Z

0

019

1/81/4(Standard)Special

Rc thread(Standard)

NPT thread

SpecialNBR(Standard)CRFPMEPDM

PTFE

SpecialSUS304(Standard)SUS316Special

Not providedReed switch alarm (LO)Reed switch alarm (LC)Reed switch alarm (HO)Reed switch alarm (HC)PAU ALARM UNIT provided

SpecialNot providedBottom (gas for atmospheric pressure scale)Top (gas for pressure scale or for negative pressure on the secondary side)Special

Bottom rear Top rear (Standard) Select this code normally.Valve should be installed externally.

Refer to valve location selectionguide.

Select this code normally.Special

Construction (gas) part material is only available for SUS316

Select it for ammonia gas.

Lock-nut mounting onto panel front.If you want to use any other mounting, select from Mounting opt .

See the page describing functions.

■ GENERAL

Standard type purgemeter. Widely accepted in the market. Suit-able for both liquids and gases.Applicable from built-in use for equipment up to purging moni-toring of industrial processes. Available for PTFE sealing.

■ MAJOR APPLICATIONSGeneral purpose, built-in use for equipment (Small flow rate)

■ STANDARD SPECIFICATION

Fluid name － Measuring range － Press. － Temp. － Mounting option － Other option

Basic model code

(Use Model Code Table for selection)

Designation items for detailed specifications

(For details, refer to Advice for Your Product Selection.)

P-10

3

■ ALARM OUTPUT

■ STANDARD FLOW RATE TABLE (In case Op. Press of gas is not 0 MPa, refer to page 1.)

■ OTHER AVAILABLE OPTIONSYou can specify the following options:Reed switch lead wire length, double graduations, (Dependingon technical specifications, it may be unable to manufacture. Con-tact for details.) special graduations, built-in check valve type, built-in valve lock mechanism type, built-in rubber joint type, built-injoint type, etc.(For details, refer to Other Option and One-Point Advice )

■ BASIC MODEL CODE

■ DIMENSIONS

● STANDARD TYPE Dimensions for P-100-U0-4N-��■ Panel front lock-nut fixing■ Valve provided at Outlet

● Panel cut dimension

D d M14 M14 M18 M18

H 16 16 20 20

Rc 1/8 NPT 1/8 Rc 1/4 NPT 1/4

Connection Size Hole diameter (mm)

Parts with“○”touch the measuring fluid. ＊：Proper material is to be selected, depending on specifications. SUS316 instead of SUS304 may be used, due to certain production reasons. Material like ASTM, or AIS equivalent to JIS material may be used due to certain production reasons.

Parts name Standard material Available material Support Aluminium 　　　　　－ Body　 SUS304 SUS316 Tapered tube　 Heat-resistant glass －

Float　 SUS316, Glass,

—

PTFE, Ruby Packing　 NBR FPM, CR, EPDM, PTFE Fitting　 SUS304 SUS316 Valve　 SUS304 SUS316 Cover Poly-carbonate 　　　　　－

＊

○ ○

○

○ ○ ○

In case alarm output code is A to D

In case alarm output code is E

A Reed switch alarm (LO)B Reed switch alarm (LC)C Reed switch alarm (HO)D Reed switch alarm (HC)

E PAU ALARM UNIT provided



● Standard Material

Caution)Use non-magnetize material for panelwhen ALARM OUTPUT code is A to D.

4

● PANEL-REAR INSTALLATION TYPE Dimensions for P-100-U0-4N-��■ Panel-rear installation (Mounting Option code C )■ Valve provided at Outlet

T

OPEN SHUT

KOYOKO

SIE

2-D(30)

(MAX.36) 35 19

4.5

(140)

115

4.5

2-d

115

2-φH

Panel MAX.t.10

IN

OUT

PANEL CUT

T

OPEN SHUT

KOYOKO

SIE

2-D(30)

(MAX.36) 35 19

4.5

(140)

115

2-d

82

φ25

IN

OUT

62

20

13(7)

16.5

4-φ5

PANEL

30

4-M4Depth 5

PANEL CUT

T

OPEN SHUT

KOYOKO

SIE

2-D

(30)

(MAX.36) 35 19

4.5

(140)

115

2-d

IN

OUT

145

160

35

34

175

160

35

50

4-φ4.5 For 4-M4

4-M4Depth 5

PANEL

PANEL CUT

● BEZEL INSTALLATION TYPE Dimensions for P-100-L0-4N-��■ Bezel fixing (Installation option code D )

■ Valve provided at Inlet

P-200■ GENERAL

Standard type purgemeter. 200mm installation dimension character-ized by an easy-to-see scale and high-precision measurement. It isused over an extensive field including test equipment. The installationdimension is the same as that of the large flow rate model P-510.

■ MAJOR APPLICATIONSGeneral purpose, built-in use for equipment (Small flow rate)


Basic model code

(Use model code table for selection)



P-20 Fluid name Measuring range Press. Temp. Mounting Option Other Option


Measuring object Liquids and gases

Measuringrange

Air

Water


Max. Op. Press.

Max. Op. Temp.

Material

BodyTapered tube

Packing

SupportCover

Connection

Mounting

Std.Opt.Std.

Opt.

MASS (std. type)



10:1±3 %F.S.0.8 MPa

120 oC

Std.


NBR(max.80 oC)

AluminiumPoly-carbonateRc1/4Rc1/8,NPT 1/4,NPT 1/8Lock-nut mount onto panel frontBezel installation, Panel-rearinstallation,Stand provided etc.0.6 kg

. Air at 0 oC, 0MPa (1atm) . When selecting flow range, refer to standard flow rate table. . In case Op. Press. of gas body is not 0 MPa, refer to page 1.10:2 for some ranges

Standard products have the packing materials made of NBR, so Max.Temp.is 80 oC.

Option (Specify by model code)

SUS316

FPM (max.120 oC), CR(max.80 oC), EPDM(max.80 oC)



Type Availability




5~50 mL/min(nor) 10~100 mL/min(nor) 20~200 mL/min(nor) 30~300 mL/min(nor) 50~500 mL/min(nor)0.1~1 L/min(nor)0.2~2 L/min(nor)0.5~5 L/min(nor) 1~10 L/min(nor) 2~20 L/min(nor) 3~30 L/min(nor) 5~50 L/min(nor) 6~60 L/min(nor)

Air(0 MPa,0 oC) Water Air(0 MPa,0 oC) Alarm setting range Water Alarm setting rangeIn case alarm output code is 0,E and F In case alarm output code is A to D †2

5~ 50 mL/min 10~100 mL/min 20~200 mL/min 50~500 mL/min

0.1~1 L/min

0.15~1.5 L/min 0.2~2 L/min

1~10 L/min(nor) 2~20 L/min(nor) 3~30 L/min(nor) 4~40 L/min(nor) 10~50 L/min(nor)

2~8 L/min(nor) 4~16 L/min(nor) 6~24 L/min(nor) 8~32 L/min(nor) 10~40 L/min(nor)

50~500mL/min

0.1~1 L/min

100~400 mL/min

0.2~0.8 L/min

†1

May be different depending on the scale length.Available for flow rate less than shown on flow rate table. Contact us for further details.†1 10:2 if range is more than 40 L/min (nor).†2 The viscosity of a liquid is 1.0 mPa·s.


FLO

W D

IRE

CT

ION

VA

LVE

ALA

RM

OU

TP

UT

WE

TT

ED

PA

RT

S M

AT

ER

IAL

PA

CK

ING

MA

TE

RIA

L

CO

NN

EC

TIO

N T

YP

E

CO

NN

EC

TIO

N S

IZE

EXAMPLE

DESCRIPTION

P-20 -L -40 0 N -R 212Z

R

N

ZNCFEZ

46Z

0ABCDEZ

L

U

Z

0

019

1/81/4(Standard)Special

Rc thread(Standard)

NPT thread

SpecialNBR(Standard)CRFPMEPDMSpecial

SUS304(Standard)SUS316Special

Not providedReed switch alarm(LO)Reed switch alarm(LC)Reed switch alarm(HO)Reed switch alarm(HC)PAU ALARM UNIT providedSpecial

Not providedBottom(gas for atmospheric pressure scale)Top(body for pressure scale or for ne-gative pressure on the secondary side)Special

Bottom rear Top rear(Standard) Select this code normally.Valve should be installed externally.

Refer to valve locationselection guide.

Bottom TopSpecial


Lock-nut mounting onto panel front.If you want to use any other mounting, select from Mounting Option .



5

■ ALARM OUTPUT

■ OTHER AVAILABLE OPTIONSYou can specify the following options:Two point alarm, reed switch lead wire length, double graduations, specialgraduations, built-in check valve type, built-in valve lock mechanism type,built-in rubber joint type, built-in joint type, etc. (For details, refer to OtherOption ).

● Panel cut dimension

D d M14 M14 M18 M18

H 16 16 20 20

Connection Size Hole diameter(mm)

Rc 1/8 NPT 1/8 Rc 1/4 NPT 1/4



A Reed switch alarm(LO)B Reed switch alarm(LC)C Reed switch alarm(HO)D Reed switch alarm(HC)



See the page describing functions.Parts with“○”touch the measuring fluid. ＊：Proper material is to be selected, depending on specifications. SUS316 instead of SUS304 may be used, due to certain production reasons. Material like ASTM, or AIS equivalent to JIS material may be used due to certain production reasons.

Parts name Standard material Available material Support Aluminium 　　　　　－ Body　 SUS304 SUS316 Tapered tube　 Heat-resistant glass －


—

PTFE, Ruby Packing　 NBR FPM, CR, EPDM Fitting　 SUS304 SUS316 Valve　 SUS304 SUS316 Cover Poly-carbonate 　　　　　－

＊

○ ○

○ ○ ○

Standard Material

Caution)Use non-magnetize material for panelwhen ALARM OUTPUT code is A to D.

6

T

OPEN SHUT

KOYOKO

SIE

2-D(30)

(MAX.36) 35 19

4.5

(225)

200

4.5

2-d

200

2-φH

PANEL MAX.t.10

IN

OUT

PANEL CUT

T

OPEN SHUT

KOYOKO

SIE

2-D(30)

(MAX.36) 35 19

4.5

(225)

200

2-d

167

φ25

IN

OUT

147

20

13(7)

16.5

4-φ5

PANEL

30

4-M4Depth 5

PANEL CUT

T

OPEN SHUT

KOYOKO

SIE

2-D

(30)

(MAX.36) 35 19

4.5

(225)

200

2-d

IN

OUT

227

238

35

34

255

238

35

50

4-φ4.5 For 4-M4

4-M4Depth 5

PANEL

PANEL CUT

■ DIMENSIONS

● STANDARD TYPE Dimensions for P-200-U0-4N-��■ Panel front lock-nut fixing■ Valve provided at Outlet

● BEZEL INSTALLATION TYPE Dimensions for P-200-L0-4N-��■ Bezel fixing (Installation option code D )

■ Valve provided at Inlet

● PANEL-REAR INSTALLATION TYPE Dimensions for P-200-U0-4N-��■ Panel-rear installation (Mounting Option code C )■ Valve provided at Outlet

P-300■ GENERAL

Compact, straight-through type. Simple structure and easy moni-toring.

■ MAJOR APPLICATIONS

General purpose, direct mounting onto process piping




■ ALARM OUTPUT

■ STANDARD FLOW RATE TABLE (In case Op. Press of gas is not 0MPa, refer to page 1.)

■ OTHER AVAILABLE OPTIONSYou can specify the following options:Double graduations, special graduations, built-in rubber joint type,built-in joint type, etc. (For details, refer to Other Option ).


Measuringrange

Air

Water


Max. Op. Press.

Max. Op. Temp.

Material

BodyTapered tube

Packing

Protection tube

Connection

Mounting

Std.

Opt.

Std.

Opt.

MASS(std. type)

Min. 80~800 mL/min(nor).Max. 6 ~ 60 L/min(nor).


10:1±3 %F.S.0.8 MPa

120 oC

Std.


NBR(max.80 oC)

C2700T

. Air at 0 oC, 0MPa (1atm) . When selecting flow range, refer to standard flow rate table. . In case Op. Press. of gas is not 0 MPa, refer to page 1.

Type Availability



Rc1/4Rc1/8,3/8, 1/2,NPT1/8,1/4,3/8,1/2,JIS10KFF etc.Piping mountingPanel mounting by attached metal fittingFlange mounting etc.0.4 kg

Standard products have the packing materialsmade of NBR, so Max. Temp. is 80 oC.

Option(Specify by model code)

SUS316

FPM(max.120 oC), CR(max.80 oC),EPDM(max.80 oC)

Refer to Basic model codefor details.

Refer to orderinginformation for details.


Air(0 MPa,0 oC)80 ~ 800 mL/min(nor)

0.1 ~ 1 L/min(nor)0.2 ~ 2 L/min(nor)0.3 ~ 3 L/min(nor)0.5 ~ 5 L/min(nor) 1 ~ 10 L/min(nor) 2 ~ 20 L/min(nor) 3 ~ 30 L/min(nor) 5 ~ 50 L/min(nor) 6 ~ 60 L/min(nor)

Water

5 ~ 50 mL/min

10 ~ 100 mL/min20 ~ 200 mL/min30 ~ 300 mL/min50 ~ 500 mL/min0.1 ~ 1 L/min

0.15 ~ 1.5 L/min

0.2 ~ 2 L/min

WE

TT

ED

PA

RT

S M

AT

ER

IAL

PA

CK

ING

MA

TE

RIA

L

CO

NN

EC

TIO

N T

YP

E

CO

NN

EC

TIO

N S

IZE

EXAMPLE

DESCRIPTION

P-300- 4 -RN 21234Z

ZNCFEZ

46Z

1/81/4(Standard)3/81/2Special

NPT threadRc thread(Standard)

NR

Special Select Z for flangeNBR(Standard)CRFPMEPDMSpecial



In the case of flange connection, connection size is 3/8 and 1/2 or more.

Basic model code




P-300- Fluid name Measuring range Press. Temp. Mounting Option Other Option

7

■ DIMENSIONS

● STANDARD TYPE

Parts name Standard material Available material Body　 SUS304 SUS316 Tapered tube　 Heat-resistant glass ―


― PTFE, Ruby Packing　 NBR FPM, CR, EPDM Protection tube C2700T SUS304 Lock-nut C3604 SUS304

●Standard Material

○ ○

○ ○

Parts with“○”touch the measuring fluid. ＊：Proper material is to be selected, depending on specifications.

＊

● PANEL INSTALLATION TYPE(WITH PANEL FITTING ATTACHMENT)Dimensions for P-300-4N-R2(Mounting Option code F )

8

Caution) Adapter shall be attached for Rc3/8. (R1/4 x Rc3/8)

PANEL CUT

Dimensions for P-300-4N-R2

P-400■ GENERAL

Corrosion resistant with all stainless steel construction.Panel installation with flange or screw connections.


Corrosive services


Basic model code







■ OTHER AVAILABLE OPTIONSYou can specify the following options:Double graduations, special graduations, built-in rubber jointtype, built-in joint type, etc.(For details, refer to Other Option ).


Measuringrange

Air

Water


Max. Op. Press.

Max. Op. Temp.

Material

BodyTapered tube

Packing

SupportCover

Connection

Mounting

Std.Opt.Std.Opt.

MASS(std. type)



10:1

±3 %F.S.1.0 MPa

120 oC (PVC...60 oC)

Std.


NBR(max.80 °C)

SCS14AcrylRc1/41/4NPT,JIS10KFF etc.Lock-nut mount onto panel frontFlange pipe mount, Stand provided etc.0.9 kg

Standard products have the packing materials made of NBR, so Max.Temp.is 80 oC.Option(Specify by model code)SUS316, PVC

FPM(max.120 °C), CR(max.80 °C), PTFE(max.120 oC PVCbody is not applicable)

PVC

Refer to Basic model code for details.Refer to ordering information for details.


PVC...0.5 MPa

Type Availability




■ ALARM OUTPUT

Air(0 MPa, 0 oC)80 ~ 800 mL/min(nor)

0.1 ~ 1 L/min(nor)0.2 ~ 2 L/min(nor)0.3 ~ 3 L/min(nor)0.5 ~ 5 L/min(nor)

1 ~ 10 L/min(nor)2 ~ 20 L/min(nor)3 ~ 30 L/min(nor)5 ~ 50 L/min(nor)6 ~ 60 L/min(nor)

5 ~ 50 mL/min

10 ~ 100 mL/min20 ~ 200 mL/min30 ~ 300 mL/min50 ~ 500 mL/min0.1 ~ 1 L/min

0.15 ~ 1.5 L/min

0.2 ~ 2 L/min

Water


Meter range with PVC wet part construction is 0.12~1.2 L/min (water).

9

FLO

W D

IRE

CT

ION

VA

LVE

ALA

RM

OU

TP

UT

WE

TTED

PA

RTS

MA

TER

IALS

PA

CK

ING

MA

TE

RIA

L

CO

NN

EC

TIO

N T

YP

E

CO

NN

EC

TIO

N S

IZE

EXAMPLE

DESCRIPTION

P-40 -L -40 0 N -R 2123412343456Z

R

N

Z

ZNCFTZ

46PZ

0

L

U

Z

0

0

1

9

Rc1/8(with adaptor R1/4×Rc1/8) Rc1/4(Standard) Rc3/8(with adaptor R1/4×Rc3/8) Rc1/2(with adaptor R1/4×Rc1/2) NPT1/8(with adaptor R1/4×NPT1/8) NPT1/4 NPT3/8(with adaptor R1/4×NPT3/8) NPT1/2(with adaptor R1/4×NPT1/2) Flange (10A) Flange (15A) Flange (20A) Flange (25A) Special

NBR(Standard)CRFPMPTFESpecial

SUS304(Standard)SUS316PVCSpecial

Not provided

Special

Not providedBottom(gas for atmospheric pressure scale)Top(gas for pressure scale or for negative pressure on the secondary side)

Bottom rear Top rear(Standard) Select this code normally.Specify only this code for PVC material. Valve is installed externally except PVC.

Refer to valve location selection guide.

Bottom Top

Special


Specify thestandardseparately.

Lock-nut mountingonto panel front.If you want to useany other mounting,select fromMounting Option.

● FLANGE ENDED TYPE(P-400-00-4N-Z4, Valve not provided, flange connection)

● FLOW DIRECTION STRAIGHT-THROUGH TYPEP-401-00-4N-R2, Thread connection of bottom to top direction.

■ DIMENSIONS

● STANDARD TYPE(P-400-U0-4N-R2, Valve provided at outlet , Panel front lock-nut fixing)

Parts name Standard material Available material Body　 SCS14 PVC Tapered tube　 Heat-resistant glass ―


―

PTFE, Ruby Packing　 NBR FPM, CR, PTFE Joint　 SUS304 SUS316 Valve　 SUS304 Cover Acryl SPCC, SUS304 Mounting boad SPCC


SUS304

SUS316

○ ○

○

○ ○ ○


＊

(Mounting Option code E )

10

Caution) Adapter shall be attached for Rc1/2 or more.

PANEL CUT

P-510■ GENERAL

Purgemeter for medium and large flow rate. It is the same sizeas P-200 model of small flow rate type.


General purpose(Large flow rate)


Basic model code




P-51

Fluid name Measuring range Press. Temp. Mounting Option Other Option



■ OTHER AVAILABLE OPTIONSYou can specify the following options:Two point alarm, Alarm setting on the front face, reed switch lead wirelength, double graduations, special graduations, built-in check valvetype, built-in rubber joint type, built-in joint type, etc.(For details, refer to Other Option ).


Measuringrange

Air

Water


Max. Op. Press.

Max. Op. Temp.

Material

Body

Tapered tube

Packing

SupportCover

Connection

Mounting

Std.

Opt.

Std.

Opt.

MASS(std. type) 2.0 kg

Min. 2.5~25 L/min(nor).Max. 60~600 L/min(nor).

Min. 0.1~1 L/min.Max. 3~30 L/min.

10:1±5 %F.S.0.8 MPa

120 oC

Std.

SUS304

Heat-resistant glass

NBR(max.80 oC)

SPCC or C2801PAcrylRc3/8Rc1/2,NPT3/8,NPT1/2,3/8SW,3/8VCR,JIS10KFF etc. Thread(M3)mount onto panel frontLock-nut mount onto panel frontBezel installation,Panel-rear installation, Stand provided Flange pipe tube installation


Standard products have the packing materials made of NBR, so Max.Temp.is 80 oC.Option(Specify by model code)SUS316

FPM(max.120 oC),CR(max.80 oC), EPDM(max.80 oC)

Type Availability






■ ALARM OUTPUT

2.5~25 L/min(nor) 3~30 L/min(nor) 5~50 L/min(nor) 10~100 L/min(nor) 20~200 L/min(nor) 30~300 L/min(nor) 40~400 L/min(nor) 50~500 L/min(nor) 60~600 L/min(nor)

Air(0 MPa,0 oC) Water Air

(0 MPa,0 oC)Alarm

setting range Water

In case alarm output code is 0,E In case alarm output code is A to D

0.1~1 L/min

0.2~2 L/min0.3~3 L/min0.5~5 L/min 1~10 L/min1.5~15 L/min 2~20 L/min 3~30 L/min

5~50 L/min(nor)10~100 L/min(nor)20~200 L/min(nor)30~300 L/min(nor)40~400 L/min(nor)50~500 L/min(nor)60~600 L/min(nor)

10~40 L/min(nor) 20~80 L/min(nor) 40~160 L/min(nor) 60~240 L/min(nor) 80~320 L/min(nor)100~400 L/min(nor)120~480 L/min(nor)


0.4~1.6 L/min0.6~2.4 L/min 1~4 L/min 2~8 L/min 3~12 L/min 4~16 L/min 6~24 L/min*2 *2

*1*1

Alarmsetting range

■ STANDARD FLOW RATE TABLE(In case Op. Press of gas is not 0MPa, refer to page 1.)

*1 Float material should be PVC*2 Available for Viscosity 1.0 mPa·s only.* In case of the specification other than the standard flow table, there may be the change in the flow range for certain reasons of production.

11

FLO

W D

IRE

CT

ION

VA

LVE

ALA

RM

OU

TP

UT

WETTED PARTS M

ATERIAL

PA

CK

ING

MA

TER

IAL

CO

NN

EC

TIO

N T

YP

E

CO

NN

EC

TIO

N S

IZE

EXAMPLE

DESCRIPTIONP-51 -L -40 0 N -R 3

3456345345634533453456Z

R

L

N

M

S

V

Z

ZNCFEZ

46Z

0ABCDEZ

L

U

Z

0

019

Rc3/8(Standard) Rc1/2 Rc3/4 Rc1 Rc3/8 Rc1/2 Rc3/4 NPT3/8 NPT1/2 NPT3/4 NPT1 NPT3/8 NPT1/2 NPT3/4 3/8 SW 3/8 VCR 1/2 VCR 3/4 VCR Flange (10A) Flange (15A) Flange (20A) Flange (25A) Special

NBR(Standard)CRFPMEPDMSpecial


Not providedReed switch alarm (LO)Reed switch alarm (LC)Reed switch alarm (HO)Reed switch alarm (HC)PAU ALARM UNIT providedSpecial

Not providedBottom(gas for atmospheric pressure scale)Top(gas for pressure scale or for negative pressure on the secondary side)

SpecialBottom rear Top rear(Standard) Select this code normally.

Valve should be installed externally.


Bottom TopSpecial

Select P-520 model for PVC andPTFE. Select P-7�� series forfluorine resin made tapered tube.


Front thread (M3) of panel, mounting or pipe


"Flow direction code 1(bottom→top)only can be selected."

"Flow direction code 1(bottom→top)only can be selected."


Lock-nut mounting onto panel front.

Lock-nut mounting onto panel front.

Specify the standard separately.


■ DIMENSIONS

● STANDARD TYPE(P-510-U0-4N-R3 Valve provided at Outlet, panel frontthread (M3) mounting type)

● BEZEL INSTALLATION TYPE(P-510-L0-4N-R3, Valve provided at Outlet, Bezel installation.)(Mounting Option code D )

● PANEL-FRONT INSTALLATION TYPE(P-510-U0-4N-L3 , Valve provided at Outlet, panel front lock-nut fixing)

D

Hole diameter

H

28

28

32

32

38

22

32

32

Rear length L

L

26

26

26

26

28

（34）

（38）

（38）

d

M26

M26

M30

M30

M36

M20

M28

M28

Connection size

Rc 3/8

NPT 3/8

Rc 1/2

NPT 1/2

Rc 3/4

3/8 SW

3/8 VCR

1/2 VCR



A Reed switch alarm(LO)B Reed switch alarm(LC)C Reed switch alarm(HO)D Reed switch alarm(HC)




● PANEL CUT SIZEFor PANEL-FRONT INSTALLATION TYPE,Panel cut dimension may differ depending onconnection size and rating. Refer to followingtable.

○ ○ ○ ○ ○ ○

Parts name Standard materl Available material Body SCS14 ― Tapered tube Heat-resistant glass ― Float＊1 SUS304, PTFE SUS316 Packing NBR FPM, CR, EPDM Spindle SUS304 SUS316 Valve SUS304 SUS316 Mounting board＊2 SPCC SUS304 Cover Acryl ―


Parts with“○”touch the measuring fluid. ＊1: Proper material is to be selected, depending on the specifications. ＊2: In case of alarm output code from “A” to “D,” the standard material to be used is C2801P. SUS316 instead of SUS304 may be used, due to certain production reasons. Material like ASTM, or AIS equivalent to JIS material may be used due to certain production reasons.

Caution)Use non-magnetize material for panelwhen ALARM ANALOG OUTPUT code isA to D.

12

OPEN SHUT

(54)

200

45(MAX.42)

2-Rc3/8

IN

OUT

(229)

240

60

Window (124×40)

43

29

128

155

13.5

13.5

22.5

2-φ54-φ6

(Counter-sinking φ11)

φ27

Panel

PANEL CUT BEZEL(Boad thickness 3mm)

OPEN SHUT

(229)

(54)200

45(MAX.42) 2-Rc3/8

IN

OUT

200

(22.5)

155

(22.5)

29

2-φ28

4-φ4

PANEL CUT

OPEN SHUT

(229)

(54)

200

45(MAX.42)

2-d

2-D

IN

OUT

L

200

2-φH

PANEL CUT

PanelMAX.t.10

P-520■ GENERAL

Resin construction eliminates the possibility of introduction ofmetallic ions into process liquids. Suitable for Pure and Ultra purewater lines in Semi-conductor production facilities.Alarm contacts can be added.

■ MAJOR APPLICATIONSPure water lines




■ OTHER AVAILABLE OPTIONSYou can specify the following options:Two point alarm, reed switch lead wire length, double graduations,special graduations, built-in joint type, etc.(For details, refer to Other Option ).

■ STANDARD FLOW RATE TABLE

WaterWater Alarm setting rangeIn case alarm output code is 0,E In case alarm output code is A to D

1~10 L/min 1.2~12 L/min 2.4~10 L/min1.5~15 L/min 1.5~15 L/min 3~12 L/min 2~20 L/min 2~20 L/min 4~16 L/min 3~30 L/min 3~30 L/min 6~24 L/min 4~40 L/min 4~40 L/min 8~32 L/min4.5~45 L/min 4.5~45 L/min 9~36 L/min 5~50 L/min 5~50 L/min 10~40 L/min 12~60 L/min 12~60 L/min 18~48 L/min

Basic model code

(Use model code table for selection )




Measuring object　 Liquids

Measuringrange Water


Max. Op. Press.

Max. Op. Temp.

Material

Body

Tapered tubePackingSupportCover

Connection

Mounting

Rc1/2Rc3/4,NPT1/2,NPT3/4 etc.Thread (M3) mount onto panel frontPanel-rear installation,1.2 kg

Std.Opt.

Std.

Opt.MASS (std. type)

Min. 1~ 10 L/minMax. 12~60 L/min

10:1±5 %F.S.0.5 MPa

60 oC

Std.

PVC(max.60 oC)

Heat-resistant glassFPMSUS304Transparent PVC

When selecting flow range, refer to standard flow rate table.


Body material Heat-proof PVC - max. 80 oC (PTEE - max. 80 oC).Option (Specify by model code)

EPDM



Type Availability Reed switch type alarm unit

General CE, UL Version

PAU Optical alarm unit

Heat-proof PVC(max.80 oC)， PTFE(max.80 oC)


FLO

W D

IRE

CT

ION

VA

LVE

ALA

RM

OU

TP

UT

WE

TTED

PA

RTS

MA

TER

IALS

PA

CK

ING

MA

TE

RIA

L

CO

NN

EC

TIO

N T

YP

E

CO

NN

EC

TIO

N S

IZE

EXAMPLE

DESCRIPTION

P-52 -L -P0 0 F -R 44 1/2(Standard)5 3/4

6 1Connection length for flow direction "Bottom rear" to "Top rear" (without valve) is 160mm.

Z Special

R Rc thread(Standard)

N NPT thread

Z SpecialF FPM(Standard)E EPDMZ Special

P PVC(Standard)T PTFE4 SUS304Z Special

0 Not providedA Reed switch alarm (LO)B Reed switch alarm (LC)C Reed switch alarm (HO)D Reed switch alarm (HC)E PAU ALARM UNIT providedZ Special

0 Not providedL Bottom Z Special

0 Bottom rear Top rear (Standard) Select this code normally.1 Bottom Top Valve is not provided.9 Special

Thread mounting onto panel front. If you want to use any other mounting, select from Mounting Option .


May be different depending on the scale length.

(Consult in case 1~10 L/min or less.)

13

■ ALARM OUTPUT

Note: Depending upon the required specifications, Model P-520-L with valve falls under goods “Valves or components thereof” listed in (ii)-7of row 3 of Appended Table 1 of Export Trade Control Order. Contact us for details.

■ DIMENSIONS

● STANDARD TYPE

(P-520-L0-4N-PF-R4 Valve provided at Inlet, Panel front screw fixing)

● FLOW DIRECTION STRAIGHT-THROUGH TYPE

(P-521-00-PF-R5, Valve not provided, Bottom to top direction, Panel front screw fixing)







Parts name Standard material Available material Body　 PVC PTFE, SUS304 Tapered tube Heat-resistant glass ― Float　 PVC, SUS304, PTFE ― Packing　 FPM EPDM Float rod　 FEP covering SUS316 ― Float stopper　 PVC PTFE Valve　 PVC PTFE Column SUS304 ― Cover Transparent PVC ―


○ ○ ○ ○ ○ ○ ○


＊

PANEL CUT

14

(MAX.60) 64

150

(Installation Use)4-M6 Depth:7

64

50

150

190

64

4-φ750

150

PANEL CUT

OUT

IN Caution) Use non-magnetize material for panelwhen ALARM OUTPUT code is A to D.

P-530■ GENERAL

Compacter than P-510 series. Purgemeter for large flow rate.Swagelok and VCR connection are also available.


General purpose (Large flow rate)




■ OTHER AVAILABLE OPTIONSYou can specify the following options:Reed switch lead wire length, double graduations, special gradua-tions, etc. (For details, refer to Other Option ).

■ ALARM OUTPUT

■ STANDARD FLOW RATE TABLE See page 1 for the gas service of 0MPa pressure.

10~50 L/min(nor)20~100 L/min(nor)40~200 L/min(nor)50~250 L/min(nor)

Air(0 MPa,0 oC) Water

In case alarm output code is 0 In case alarm output code is A to D

0.2~2 L/min0.3~3 L/min0.5~5 L/min 1~10 L/min

20~100 L/min(nor)40~200 L/min(nor)50~250 L/min(nor)

20~80 L/min(nor)40~160 L/min(nor)50~200 L/min(nor)

0.3~3 L/min

0.5~5 L/min 1~10 L/min

0.6~2.4 L/min

1~4 L/min 2~8 L/min

Air(0 MPa,0 oC)

Alarm setting range Water

Alarm setting range

Basic model code






Air

Measuringrange

Water


Max. Op. Press.

Max. Op. Temp.

MaterialBody

Tapered tube

Packing

SupportCover

Connection

Mounting

Rc3/8Rc1/2,NPT3/8,NPT1/2,3/8SW,3/8VCR etc.Thread (M3) mount onto panel front

Bezel installation, Panel-rear installation,0.6 kg

Std.

Opt.

Std.

Opt.

MASS (std. type)

Min. 10~50 L/min(nor).Max. 50~250 L/min(nor).

Min. 0.2~2 L/min.Max. 1~10 L/min.

10:1 (10:2)±5 %F.S.

0.8 MPa

120 oC

Std.SUS304


NBR(max.80 oC)

AluminumAcryl


10:2 for gas measuring

Select P-510 if diff. pressure is less than or equal to 0.05 MPa.Standard products have the packing materials made of NBR, so Max.Temp. is 80 oC.Option (Specify by model code)SUS316

FPM (max.120 oC), CR(max.80 oC), EPDM(max.80 oC)




General CE, UL Version



FLO

W D

IRE

CT

ION

VA

LVE

ALA

RM

OU

TP

UT

WE

TTED

PA

RTS

MA

TER

IALS

PA

CK

ING

MA

TE

RIA

L

CO

NN

EC

TIO

N T

YP

E

CO

NN

EC

TIO

N S

IZE

EXAMPLE


RRc thread(Standard)

3 3/8 (Standard)4 1/2Z Special

N NBR (Standard)C CR Select it for ammonia gas.F FPME EPDMZ Special

4 SUS304 (Standard)

6 SUS316

Z Special

0 Not providedA Reed switch alarm (LO)B Reed switch alarm (LC)C Reed switch alarm (HO)D Reed switch alarm (HC)Z Special

0 Not providedL Bottom (gas for atmospheric pressure scale)

UTop (gas for pressure scale or for negative pressure on the secondary side)

Z Special0 Bottom rear Top rear (Standard) Select this code normally.9 Special

Select P-520 model for PVC, PTFE. Select P-7�� series for fluorineresin made tapered tube.

N NPT threadS SWV VCRZ Special

Front threadmount ontopanel,

Bezel installation can beselected. Refer to MountingOption for details.

Refer to valve position selectionguide.


15

■ DIMENSIONS

● P-530-L0-4N-R3

● P-530-UA-4N-R3

In case alarm output code is A to DA Reed switch alarm (LO)B Reed switch alarm (LC)C Reed switch alarm (HO)D Reed switch alarm (HC)


Parts name Standard material Available material Body SUS304 SUS316 Tapered tube Heat-resistant glass ― Float SUS304 SUS316 Packing NBR FPM, EPDM Float rod SUS316 ― Float stopper POM ― Valve SUS304 SUS316 Fitting SUS304 SUS316 Mounting boad Aluminum ― Cover Acryl ―


○ ○ ○ ○ ○ ○ ○ ○

Parts with“○”touch the measuring fluid. SUS316 instead of SUS304 may be used, due to certain production reasons. Material like ASTM, or AIS equivalent to JIS material may be used due to certain production reasons.

Caution) Use non-magnetize material forpanel when ALARM ANALOGOUTPUT code is A to D.

16

PANEL CUT

PANEL CUT

17

Thread mount onto panel front

Measuring object Liquids



Max. Op. Press.Max. Op. Temp.

MaterialBody

Tapered tubePackingFittng

Connection

Mounting

Std.Opt.

Std.

MASS (std. type)

Min. 0.1~1 L/min.Max. 1~10 L/min.10:1±10 %F.S.1.0 MPa60 oCStd.AcrylAcrylNBRC3604Rc3/83/8SW NPT3/8 etc.

0.3 kg

Type Availability



Option

FPM, CRSUS304,SUS316Refer to Basic model codefor details.


P-620

Basic model code






ORDERING INFORMATION


■ GENERAL

Acryl moulded compact version for liquids measurement. Max.10L/min range even for compact body. Widely used as flow switch.Easy In-line maintenance without removing from instrumentpanel.

■ MAJOR APPLICATIONSCooling water lines at semiconductor production equipment


■ OTHER AVAILABLE OPTIONSYou can specify the following options:Alarm setting on the front face, reed switch lead wire length,double graduations, special graduation, built-in rubber joint type,built-in joint type, etc.For details, refer to Other Option ).

In case alarm output code is 0

0.1~1 L/min*1

0.2~2 L/min0.3~3 L/min0.5~5 L/min0.6~6 L/min0.8~8 L/min 1~10 L/min


0.1~1 L/min0.4~1.2 L/min0.2~2 L/min0.3~3 L/min0.5~5 L/min0.6~6 L/min0.8~8 L/min 1~10 L/min

Alarm setting range0.2~0.8 L/min0.5~1 L/min0.4~1.6 L/min 1~1.8 L/min 2~4 L/min 2~4.8 L/min 2~6.4 L/min 2~8 L/min

Water Water*1

*2

VA

LVE

ALA

RM

OU

TP

UT

WE

TTED

PA

RTS

MA

TER

IALS

PA

CK

ING

MA

TE

RIA

L

CO

NN

EC

TIO

N T

YP

E

CO

NN

EC

TIO

N S

IZE

EXAMPLE

DESCRIPTION

P-620 -U -B0 N -R 33 3/8 (Standard)Z Special

R Rc thread (Standard)N NPT thread S SWZ Special

N NBR(Standard)C CRF FPMZ Special

B C3604 (Standard)4 SUS3046 SUS316Z Special

0 Not providedA Reed switch alarm (LO)B Reed switch alarm (LC)C Reed switch alarm (HO)D Reed switch alarm (HC)Z Special

0 Not providedU TopZ Special


*1 Available only for P620-U�-4N-R3.Dimensions are different. Consult factory for details.

*2 Available from 0.75 L/min for connection standard “SW”.

■ ALARM OUTPUT

18

■ DIMENSIONS

● STANDARD TYPE (P-620-U0-BN-R3 Valve provided at Outlet, Panel front screw fixing)

In case alarm output code is A to DA Reed switch alarm (LO)

B Reed switch alarm (LC)

C Reed switch alarm (HO)

D Reed switch alarm (HC)


● P-620-U�-��-R3 Dimensions are different in case of the flow range of 0.1~1 L/min. Consult factory for details.

●Standard Material　　Parts name Body,Tapered tube Packing Float＊ Cap Valve body Valve needle Fitting Graduation boad

Standard material Acryl NBR SUS304,SUS316,PVC C3604 C3604 SUS304 C3604 Acryl

Available material 　　　 ― FPM, CR 　　　 ― SUS304, SUS316 SUS304, SUS316 SUS316 SUS304, SUS316 　　　 ―

○ ○ ○ ○ ○ ○ ○


Caution) Use non-magnetize material for mounting panel.

8

124

7 5

4

7636 36 76

20

3

2

9

1

6

2-D

28 （MAX.36） 36 L

ＯＵＴ

ＩＮ

Panel

2-Ｍ4（Depth 6）

2-φH

2-φ5

4

18

OPEN SHUT

TO

KYO KEISO

o s

28124

3620

762-φH

2-φ5

（MAX.36） 36 L

2-DOUT

→ OUT

2-M4 Depth 6

IN ←

3620

76

D

Hole H 27 27 22

Rear L 20 20 （30）

Rc 3/8 NPT3/8 SW 3/8

Connection size

PANEL CUT

PANEL CUT

19


Measuringrange

Water

Air



Material

BodyTapered tube

PackingSupportCover

Connection

Mounting

Std.

Opt.

Std.

MASS (std. type)




10:1±5 %F.S.0.5 MPa70 oC

Select P-772for large flow type

. Air at 0 oC, 0 MPa (1atm) . When selecting flow range, refer to standard flow rate table. . In case Op. Press. of gas is not 0 MPa, refer to page 1.

Std.

ETFEHeat-resistant glassPTFEPoly-ascethalPoly-carbonateRc1/8

Type Availability



Option (Specify by model code)PFA(Connection type T)PCTFE PPS is available as option


Refer to ordering informationfor details.

Tube end fittingOD=6.35 mm, 6 mm, 8 mm(Specify the tube length)

Thread mount onto panel front or panel-rear installation,0.1 kg

P-710

Basic model code







■ STANDARD FLOW RATE TABLE(In case Op. Press at gas is not 0MPa, refer to page 1.)

■ GENERAL

Purgemeter made of all fluorocarbon resin. Suitable for variouscorrosive solutions. Lightweight and extra-compact.


General purpose (Small flow rate)


■ OTHER AVAILABLE OPTIONSYou can specify the following options:Double graduations, special graduations, built-in joint type, etc.(For details, refer to Other Option ).

＊The ranges more than or equal to 0.12-1.2 L/min of water are applicable only for themodels having valve codes 0 and U .

50 ～ 500 mL/min（nor） 0.1 ～ 1 L/min（nor） 0.2 ～ 2 L/min（nor） 0.3 ～ 3 L/min（nor） 0.5 ～ 5 L/min（nor） 1 ～ 10 L/min（nor） 2 ～ 20 L/min（nor）

3 ～ 30 mL/min（Water） 5 ～ 50 mL/min 10 ～ 100 mL/min 20 ～ 200 mL/min 30 ～ 300 mL/min 50 ～ 500 mL/min 0.1 ～ 1 L/min 0.12 ～ 1.2 L/min 0.4 ～ 2 L/min

＊WaterAir（0 MPa, 0 ℃）

50 ～ 500 mL/min 0.1 ～ 1 L/min 0.12 ～1.2 L/min 0.4 ～ 2 L/min

Water

In case tapered tube material code is TIn case tapered tube material code is G

VA

LVE

ALA

RM

OU

TP

UT

TA

PE

RE

D T

UB

E M

AT

ER

IAL

PA

CK

ING

MA

TE

RIA

L

CO

NN

EC

TIO

N T

YP

E

CO

NN

EC

TIO

N S

IZE

EXAMPLE

DESCRIPTION

P-710 -U -G0 T -R 1

L

U

Z

0 Not providedBottom (gas for atmospheric pressure scale)Top (gas for pressure scale or for negative pressure on the secondary side)

Special


1 Rc 1/8 (Standard)Only when connection type code is R

A

6.35 1tOnly when connection type code is T

B 6 1tOnly when connection type code is T

C 8 1tOnly when connection type code is T

R Rc thread (Standard)T Tube end fittingZ Special

Pillar fitting

T PTFE(Standard) Rubber cushion provided

G Heat-resistant glass(Standard)

T PCTFE

0 Not providedE PAU ALARM UNIT providedZ Special

Valve (L) and Alarm Output (E, Z)cannot be selected.

■ ALARM OUTPUT

■ DIMENSIONS

● STANDARD TYPE (P-710-U0-GT-R1 Valve provided at Outlet, Panel screw fixing)

Parts name Standard material Available material Support Poly-ascethal PPS resin Body ETFE PFA（Connection type T） Tapered tube Heat-resistant glass PCTFE Packing PTFE ― Float PTFE,Glass,Ruby ― Valve body PCTFE ― Valve needle PCTFE ― Cover ― Parts with“○”touch the measuring fluid. ＊：Proper material is to be selected, depending on specifications.


✽

○ ○ ○ ○ ○ ○

Poly-carbonate

In case alarm output code is EE PAU ALARM UNIT provided

Alarm output connot be selected when the tapered tube material is PCTFE.


2-φ19

2-Rc1/81023（MAX.35） 29

20 4-φ3.84-φ3.8 20

18

100

79 6010

OUT

4-φ3.820

7910

79±1

14.5

φ17.3

109

100

100

IN

M3 Countersink

Panel front installationPanel rear installation

O C

20

21

P-771■ GENERALAll fluorocarbon resin, ultra-clean purgemeter.Non-use of metallic parts including constructive parts preventsrust generation on the wetted parts, even in the surrounding at-mosphere.All PFA mold, tube ended connection.Best choice for Pure/Ultra pure water process and Chemical in-jection process in Semi-conductor production facilities.

■ MAJOR APPLICATIONSPure/Ultra pure water lines, chemical injection lines in semi-con-ductor production process.


Basic model code







■ OTHER AVAILABLE OPTIONSYou can specify the following options:Double graduations, special graduation, etc.(For details, refer to Other Option ).





Material

BodyTapered tube

PackingSupportCover

Connection

Mounting

Std.

Opt.

Std.

MASS (std. type)


10:1±5 %F.S.0.5 MPa60 oC

Std.

PFA Integral mold

PFAPTFE Valve providedPVC Valve providedPVCTube end fitting OD:6.35 mm,ID:4.35 mm

Tube end fitting OD:6 mm,8 mmThread connection:Rc1/8


0.2 kg

Type Availability





Select P-772 for largeflow type


Refer to ordering informa-tion for details


■ ALARM OUTPUT

Water 3~15 mL/min 2~20 mL/min 3~30 mL/min 5~50 mL/min 10~100 mL/min 20~200 mL/min 30~300 mL/min 50~500 mL/min0.1~1 L/min0.2~2 L/min

＊＊＊


VA

LVE

ALA

RM

OU

TP

UT

WE

TT

ED

PA

RT

S M

AT

ER

IAL

PA

CK

ING

MA

TE

RIA

L

CO

NN

EC

TIO

N T

YP

E

CO

NN

EC

TIO

N S

IZE

EXAMPLE

DESCRIPTIONP-771 -U -T0 W -T A

A 6.35 1t (Standard)B 6 1tC 8 1t 1 Rc1/8Z Special

T Tube end fitting (Standard)R Rc thread Z Special

W Not provided/Welding construction(Standard)

Z SpecialT PFA(Standard) Tapered tube material is also PFA.

0 Not providedE PAU ALARM UNIT providedZ Special

0 Not provided

U Top

Z Special

Refer to valve position selection guide.

＊ In case of the density and viscosity other than 1.0 g/cm3 / 1.0 mPa·s,the flow indication accuracy shall be more than ±8 % (F.S.).

22

■ DIMENSIONS

● P771-U0-TW-TA(Tube end fitting)

In case alarm output code is EE PAU ALARM UNIT provided See the page describing functions.

● P-771-U0-TW-R1(Rc1/8 fitting)

Parts with“○”touch the measuring fluid.

●Standard Material Parts name Body, Tapered tube Float Float stopper Valve body Valve needle Fitting Cover Graduation board

Standard material PFA integral mold PTFE PFA PCTFE PCTFE PFA PVC Transparent PVC

Available material ― ― ― ― ― ― ― ―

○ ○ ○ ○ ○ ○

80

4-φ4.5

2-φ18

102

23

PANEL CUT

O C

110

34 28

80

28

80

4

2-φ6.35×t1.0

(MAX.35)

4-M4Depth 5

5050

110

110

O C

34 28

80

434 28

80

4

2-Rc1/8

(MAX.35)

80

4-φ4.5

2-φ18

102

23

4-M4Depth 5

PANEL CUT

23

P-772■ GENERAL

Ultra-clean purgemeter made of all fluorocarbon resin. A extra-clean structure is ensured by a fitting directly coupled with tube,similarly to P-771. It is designed in an integral main unit/taperedtube structure, with valve and cap configured in a welded struc-ture. This product provides excellent sealing properties. Com-patible with pure water, extra-pure water and chemical solutionsto a maximum flow rate of 45L/min.

■ MAJOR APPLICATIONSPure/Ultra pure water lines, chemical injection lines in semi-con-ductor production process.


Basic model code







■ OTHER AVAILABLE OPTIONSYou can specify the following options:Two point alarm, reed switch lead wire length, double graduations,special graduation, etc.(For details, refer to Other Option ).




Max. Op. Press.

Max. Op. Temp.

MaterialBody


Connection

Mounting

Std.

Opt.Std.Opt.

MASS (std. type)

Min. 0.06~0.6 L/min.Max. 4.5~45 L/min.

10:1±5 %F.S.0.5 MPa

60 oC

Std.PFAPFA

Integrated mold

PTFE Valve providedPVCPVCTube end connection/OD:

19 mm,ID:15.8 mmRc1/2,3/4,NPT1/2,3/4 etc.Thread mount onto panel frontPanel-rear installation0.8 kg

Type Availability





Refer to ordering informa-tion for details

High.Temp. version up to 90 oC available as option. Consult factory.


■ ALARM OUTPUT

In case alarm output code is 0, E Water

0.06~0.6 L/min 0.1~1 L/min 0.2~2 L/min 0.3~3 L/min 0.5~5 L/min 0.6~6 L/min 1~10 L/min 1.5~15 L/min 2~20 L/min 3~30 L/min 4~40 L/min 4.5~45 L/min

In case alarm output code is A to D Water


4~40 L/min

Alarm setting range

0.6~2.4 L/min 1~4 L/min1.2~4.8 L/min 2~8 L/min 3~12 L/min 4~16 L/min 6~24 L/min

8~32 L/min



Note: Depending upon the required specifications, Model P772-U with valve falls under goods “Valves or components thereof” listed in (ii)-7of row 3 of Appended Table 1 of Export Trade Control Order. Contact us for details.

VA

LVE

ALA

RM

OU

TP

UT

WE

TT

ED

PA

RT

S M

AT

ER

IALS

CO

NN

EC

TIO

N T

YP

E

CO

NN

EC

TIO

N S

IZE

EXAMPLE

DESCRIPTIONP-772 -U -T0 -T D

D 19 1.6t(Standard)4 1/25 3/4

ZSpecial 10/8,12/10,12.7/9.5,19/16,25/22,

25.4/22.2T Tube end fitting (Standard)R Rc thread N NPT threadZ Special

T PFA(Standard) Tapered tube material is also PFA.Z Special


0 Not provided

U Top

Z Special



24








●Standard Material Parts name Body, Tapered tube Float Float stopper Valve body Valve needle Graduation board Support board Cover

Standard material PFA integrated mold PTFE PFA PCTFE PCTFE Transparent PVC PVC PVC


○ ○ ○ ○ ○

■ DIMENSIONS

● P-772-00-T- ��,Valve not provided, Panel front screw fixing

● P-772-UA-T-��

Caution) Use non-magnetize material for panel when ALARM OUTPUT code is A to D.

200

60 54

(70)

150

2-φ19×1.6t

3 85

(15)

98

42

20110

20

42

2-φ40

4-φ6

50 110

4-φ6

PANEL FRONTINSTALLATION

PANEL-REARINSTALLATION

200

60 (MAX.43) 54 (15)

150

2-Rc1/2

98

42 4-φ6

20110

20

42

2-φ40

4-φ6

50 110

PANEL FRONTINSTALLATION

PANEL-REARINSTALLATION

φ40

206

20

φ16

25

P-773■ GENERAL

P-773 is integrated PFA molded body purgemeter.All sealing parts are fusing construction without mechanical seal-ing such as O rings for perfect sealing capability. Float rod isalso eliminated to meet higher clean technology requirements.Compact design with 115mm C/C dimension for easy assem-bling onto various types of devices.


Pure/Ultra pure water lines, chemical injection lines in semi-con-ductor production process.




■ OTHER AVAILABLE OPTIONSYou can specify the following options:Reed switch lead wire length, double graduations, special gradua-tion, etc.(For details, refer to Other Option ).

■ ALARM OUTPUT


VA

LVE

ALA

RM

OU

TP

UT

FLO

W R

AN

GE

CO

NN

EC

TIO

N T

YP

E

EXAMPLE

DESCRIPTION

P-773 -U A0 51 Rc1/4 2 Rc3/83 NPT1/44 NPT3/85 Tube end fitting(3/8" t1.59)6 Tube end fitting(1/2" t1.59)7 Tube end fitting( 8 t1.0)8 Tube end fitting( 10 t1.0)9 Tube end fitting( 12 t1.0)Z Special

A 0.1~1 L/min In case alarm output is 0, selection is possible. B 0.2~2 L/min In case alarm output is 0, selection is possible. 1 0.3~3 L/min2 0.5~5 L/min3 1~10 L/minZ Other special


0 Not provided

U Top

Z Special




WaterMin. 0.1~1 L/min.Max. 1~10 L/min.

Range ability 10:1Accuracy ±5 % F.S.

Max. Op. Press. 0.5 MPaMax. Op. Temp. 60 oC

Material Std.

Body PFA Integrated mold

Tapered tube PFA Packing PTFE Valve provided Support PVC Cover PVC

Std. Tube end connection/OD:3/8"~ Connection (Refer to model code for details)

Other Rc1/4, 3/8, NPT1/4, 3/8 etc. Mounting Std. Thread mount onto panel front

MASS (std. type) 0.6 kg

Type Availability


CE, UL Version PAU Optical alarm unit

Measuringrange



Refer to ordering informationfor details


In case alarm output code is 0, E In case alarm output code is A to DWater Water Alarm setting range

0.1 ~ 1 L/min0.2 ~ 2 L/min 0.2 ~ 2 L/min 0.4 ~ 1.6 L/min0.3 ~ 3 L/min 0.3 ~ 3 L/min 1 ~ 2.4 L/min0.5 ~ 5 L/min 0.5 ~ 5 L/min 1 ~ 4 L/min 1 ~ 10 L/min 1 ~ 10 L/min 2 ~ 8 L/min

Basic model code






26

■ DIMENSIONS

● P-773-0-��2, Valve not provided ● P-773-U-��7, Valve provided

● P-773-UA-�7, EN version alarm contact provided




●Standard Material Parts name Body, Tapered tube Float Float stopper Valve body Valve needle Graduation board Support board Cover



○ ○ ○ ○ ○

Caution) Use non-magnetize material for panelwhen ALARM OUTPUT code is A to D.


42

144

W1 W2

115

φ24

2-Rc3/8

2-M4Depth 5

115

74W3

2-φ25

2-φ5

PANEL CUT

W1 W2 W3

A 39 13 22

B,1 43 10 22

2,3 53 264

Measuring range code

W1W2

115

φ24

2-φ8×t1.0

2-M4Depth 5

42

144

(60)(MAX.50)

115

74

W3

2-φ25

2-φ5

PANEL CUT

W1 W2 W3

A 39 13 22

B,1 43 10 22

2,3 53 264

Measuring range code

W1W2

115

φ24

2-φ8×t1.0

2-M4Depth 5

W4

144

(60)(MAX.50)

115

74

W3

2-φ25

2-φ5

PANEL CUT

13

78

Measuring range code W1 W2 W3 W4

B,1 43 10 22 42

2,3 53 26 484

27

P-774■ GENERAL

P-774 model is a new asset to fully fluorocarbon resin purgemeterseries of Tokyo Keiso Co.,Ltd., having 100mm installation di-mension. Cleanliness is ensured by a PFA molded body inte-grally built with the fitting and the sealing section of welded struc-ture.


Pure/Ultra pure water lines, chemical injection lines in semi-con-ductor production process.




■ OTHER AVAILABLE OPTIONSYou can specify the following options:Alarm setting on the front face, reed switch lead wire length, doublegraduations, special graduation, etc.(For details, refer to Other Option ).

■ ALARM OUTPUT






MaterialBody

Tapered tubeSealingSupportCover

Connection

Mounting

MASS (Std. type)

Std.

Std.

Min. 0.1~1 L/min.Max. 0.7~7 L/min.10:1±5 %F.S.0.5 MPa60 oCStd.PFAPFAPTFEPVCPVC 10 Pillar fitting (Super fitting)


0.5 kg

Select P-772 and P-773 for large flow type.

Integrated mold

Valve provided

Refer to Basic model code for details.Refer to ordering information for details

Type Availability



*: It is general data, and the maximum temperature may change by terms of use and environment. VA

LVE

ALA

RM

OU

TP

UT

WE

TTED

PA

RTS

MA

TER

IALS

PA

CK

ING

MA

TE

RIA

L

CO

NN

EC

TIO

N T

YP

E

EXAMPLE

DESCRIPTIONP-774 -U -T0 W -P

PZ

W

Z

T

Z0ABCDE

Z Special0

U

Z

Tube φ10 pillar fittingSpecial

Not provided/Welded const-ruction (Standard)Special

PFA(Standard)

SpecialNot providedReed switch alarm (LO)Reed switch alarm (LC)Reed switch alarm (HO)Reed switch alarm (HC)PAU ALARM UNIT provided

Not provided

Top

Special

Refer to valve positionselection guide.

Tapered tube material is also PFA.

Super fitting


In case alarm output code is 0 and E,F Water

0.1~1 L/min0.2~2 L/min0.3~3 L/min0.5~5 L/min0.6~6 L/min0.7~7 L/min

Water

0.3~3 L/min0.5~5 L/min0.6~6 L/min0.7~7 L/min

Alarm setting range 0.6~2.4 L/min 1.0~4.0 L/min 1.2~4.8 L/min 1.4~5.6 L/min


Basic model code






28

■ DIMENSIONS

● P-774-00-TW-P, No valve and output provided version

PANEL CUT








●Standard Material Parts nameBody, Tapered tube Float Float stopper Valve body Valve needle Graduation board Support boardCover



○ ○ ○ ○ ○

Caution) Use non-magnetize material for panelwhen ALARM OUTPUT code is A to D.

● P-774-U0-TW-P, valve provided

100

34 40 (28)

124

2×M4Depth 5

PANEL CUT

(MAX.41)

10020

76

29

P-810■ GENERALProvide optimum measurement of flow rate of various gases insemi-conductor production process. High reliability is ensured cir-cumferential seals. Rich experiences in operation and use invarious devices. Also available are the products with low-leak-age and high-quality structure provided with electrolytic polish-ing.

■ MAJOR APPLICATIONSGas flow measurement in semi-conductor production equipmentprocess


Basic model code







■ OTHER AVAILABLE OPTIONSYou can specify the following options:Reed switch lead wire length, double graduations, special gradua-tions, built-in rubber joint type, built-in joint type, etc.For details, refer to Other Option ).

Measuring object Water and gases

Measuringrange

Air

Water

Range ability

Accuracy


Material

Body


Connection

Mounting

Std.

Opt.

Std.Opt.

MASS (std. type)



10:1P-813: ±3 %F.S.P-812: ±5 %F.S.0.8 MPa120 oC

Std.

SCS14

Heat-resistant glassFPM(max.120 oC)SUS304Transparent PVCRc1/4Rc1/8, NPT1/4, 1/4,3/8SW, 1/4, 3/8VCR etc.Lock-nut mount onto panelfront Bezel installation,0.6 kg(P-813)

. Air at 0 oC, 0 MPa (1atm) . When selecting flow range, refer to standard flow rate table. . In case Op. Press of gas is not 0MPa, refer to page 1.

In case FPM sealOption (Specify by model code)SUS316 (SUS316L is also available. Consult factory)

CR(max.80 oC)



Type Availability

Reed switch typealarm unit

GeneralCE, UL Version


P-812 P-813


■ ALARM OUTPUT

■ P-812 / STANDARD FLOW RATE TABLE(In case Op. Press of gas is not 0 MPa, refer to page 1.)

In case alarm output code is 0 and E AIR(0MPa, 0oC) 5~50 mL/min(nor) 10~100 mL/min(nor) 20~200 mL/min(nor) 30~300 mL/min(nor) 50~500 mL/min(nor) 0.1~1 L/min(nor) 0.2~2 L/min(nor) 0.3~3 L/min(nor) 0.5~5 L/min(nor) 1~10 L/min(nor) 2~20 L/min(nor) 3~30 L/min(nor) 5~50 L/min(nor) 6~60 L/min(nor)


0.1~1 L/min 0.15~1.5 L/min 0.2~2 L/min

Water

■ P-813 / STANDARD FLOW RATE TABLE(In case Op. Press at gas is not 0MPa, refer to page 1.)

Air(0 MPa, 0 °C) 10~50 mL/min(nor) 20~100 mL/min(nor) 40~200 mL/min(nor) 60~300 mL/min(nor) 50~500 mL/min(nor) 0.1~1 L/min(nor) 0.2~2 L/min(nor) 0.3~3 L/min(nor) 0.5~5 L/min(nor) 1~10 L/min(nor) 2~20 L/min(nor) 3~30 L/min(nor) 10~50 L/min(nor) 12~60 L/min(nor)

Water


0.1~1 L/min 0.3~1.5 L/min 0.4~2 L/min

†2†3

†1

†1 10:2 if range is less than 500 mL/min (nor).†2 10:2 if range is more than 30 L/min (nor).†3 10:2 if range is more than 1 L/min (nor).

VA

LVE

L DIM

EN

SIO

N

ALA

RM

OU

TP

UT

WE

TT

ED

PA

RT

S M

AT

ER

IAL

PA

CK

ING

MA

TE

RIA

L

CO

NN

EC

TIO

N T

YP

E

CO

NN

EC

TIO

N S

IZE

EXAMPLE

DESCRIPTIONP-81 -32 -60 F -R 2

1 1/8 Only connection type code R and N can be selected.

2 1/4 (Standard)

3 3/8 Only connection type code S and V can be selected.

Z SpecialR Rc thread (Standard)N NPT threadS SWV VCRZ Special.

F FPM(Standard) C CR Select it for ammonia gas. Z Special

6 SCS14 (Standard) E SUS316/EP polished High quality type Z Special

0 Not provided E PAU ALARM UNIT provided Z Special

0 Not provided

1Bellows valve provided at outlet (High grade valve)

2Bellows valve provided at inlet (High grade valve)

3 Needle valve provided at outlet 4 Needle valve provided at inlet Z Special


Beware, as standard flow rate isdifferent depending on this code.

2 145mm3 224mm9 Special

Bezel installation is also possible. Refer to Mounting Option for details.

30

■ DIMENSIONS

● STANDARD TYPE (Rc 1/4 conn. Bellows valve provided)(P-81�-10-6F-R2 Valve provided at Outlet, Panel front lock-nut fixing)

● STANDARD TYPE (SW 1/4 conn. Needle valve provided)(P-81�-40-6F-S2 Valve provided at Inlet,Panel front lock-nut fixing)

● BEZEL INSTALLATION TYPE(P81�-00-6F-S2, Valve not provided, Bezel fixing.)(Mounting Option code D )

Model

P-812

P-813

L1

170

249

L2

145

224

L3

175

254

L4

190

265

L5

205

280

Dimension (mm) Connection size

Rc 1/8,NPT1/8

Rc 1/4,NPT1/4

1/4 SW

3/8 SW

1/4 VCR

3/8 VCR

Hole dia(d)(mm)

16

22

16

22

22

32

Rear length L (mm)

(20.5)

(20.5)

(28)

(30)

(30)

(34.5)

■ DIMENSION TABLE ■ PANEL CUT SIZE


Parts name Standard material Available material Body　　SCS14 SUS316, SUS316L Tapered tube　　Heat-resistant glass ―

Float 　SUS316, Glass

―

　Ruby Packing　　FPM CR Packing press　　SUS316 ― Fitting　　SUS316 ― Valve　　SUS316 ― Mounting boad 　SUS304 ― Cover 　Transparent PVC ― Parts with“○”touch the measuring fluid. ＊：Proper material is to be selected, depending on specifications. SUS316 instead of SUS304 may be used, due to certain production reasons. Material like ASTM, or AIS equivalent to JIS material may be used due to certain production reasons.


✽

○ ○

○ ○ ○ ○ ○

PANEL CUTPANEL CUT

PANEL CUT

31

P-820■ GENERALWidely accepted for semi-conductor production process as wellas P-810 model. Alarm contact by reed switch is additionallyavailable.

■ MAJOR APPLICATIONSGas flow measurement in semi-conductor production equipment


Basic model code







■ OTHER AVAILABLE OPTIONSYou can specify the following options:Two point alarm, reed switch lead wire length, double graduations,special graduations, built-in rubber joint type, built-in joint type, etc.(For details, refer to Other Option ).

Measuring object Water and gases

Measuringrange

Air

Water

Range ability

Accuracy

Max. Op. Press.

Max. Op. Temp.

Material

Body


Connection

Mounting

Std.

Opt.

Std.Opt.

MASS (std. type)



10:1P-823: ±3 %F.S.P-821: ±5 %F.S.0.8 MPa

120 oC

Std.

SCS14

Heat-resistant glassFPM(max.120 oC)SPCCAcrylRc1/4Rc1/8,NPT1/8,1/4,3/8SW,1/4,3/8VCR etc.Lock-nut mount onto panel frontBezel installation,0.6 kg(P-821)

. Air at 0 oC, 0 MPa (1atm) . When selecting flow range, refer to standard flow rate table. . In case Op. Press of gas body is not 1atm, refer to page 1.


Option (Specify by model code)SUS316 (SUS316L is also available. Consult factory)

CR(max.80 oC)



Type Availability



P-821 P-823


■ ALARM OUTPUT

Air(0 MPa,0 °C) Water

In case alarm output code is 0, E In case alarm output code is A to D †6

4~20 mL/min(nor) 6~30 mL/min(nor) 10~50 mL/min(nor) 10~100 mL/min(nor)†1

20~200 mL/min(nor) 30~300 mL/min(nor) 50~500 mL/min(nor)0.1~1 L/min(nor)0.2~2 L/min(nor)0.3~3 L/min(nor)0.5~5 L/min(nor) 1~10 L/min(nor) 2~20 L/min(nor) 3~30 L/min(nor)†2

10~50 L/min(nor) 12~60 L/min(nor)


0.1~1 L/min

0.3~1.5 L/min †3

0.4~2 L/min

1~10 L/min(nor)†4

3~15 L/min(nor)


2~8 L/min(nor) 3~12 L/min(nor) 6~24 L/min(nor)

10~40 L/min(nor)

50~500 mL/min 100~400 mL/min

May be different depending on the scale length.Available for flow rate less than shown on flow rate table. Contact us for further details.

0.1~1 L/min

0.3~1.5 L/min

0.2~0.8 L/min

0.3~1.2 L/min

†5

Air(0 MPa,0 °C)

Alarmsetting range Water

Alarmsetting range

†4 10:2 if range is more than 10 L/min (nor).†5 10:2 if range is more than 1 L/min (nor).†6 The viscosity of a liquid is 1.0 mPa·s.

†1 10:2 if range is less than 100 mL/min (nor).†2 10:2 if range is more than 30 L/min (nor).†3 10:2 if range is more than 1.5 L/min (nor).

■ P-821 / STANDARD FLOW RATE TABLE (In case Op. Press of gas is not 0 MPa, refer to page 1.)

VA

LVE

L DIM

EN

SIO

N

ALA

RM

OU

TP

UT

WE

TTED

PA

RTS

MA

TER

IAL

PA

CK

ING

MA

TE

RIA

L

CO

NN

EC

TIO

N T

YP

E

CO

NN

EC

TIO

N S

IZE

EXAMPLE

DESCRIPTIONP-82 -31 -60 F -R 2

1 1/8 Only connection type code R and N can be selected.

2 1/4 (Standard)

3 3/8 Only connection type code S and V can be selected.

Z SpecialR Rc thread (Standard)N NPT threadS SWV VCRZ Special

F FPM(Standard) C CR Select it for ammonia gas. Z

6 SCS14 (Standard) E SUS316/EP polished High quality type Z Special

0 Not provided A Reed switch alarm (LO) B Reed switch alarm (LC) C Reed switch alarm (HO) D Reed switch alarm (HC) E PAU ALARM UNIT provided Z Special

0 Not provided

1Bellows valve provided at outlet (High grade valve)

2Bellows valve provided at inlet (High grade valve)

3 Needle valve provided at outlet 4 Needle valve provided at inlet Z Special


Beware, as standard flow rate isdifferent depending on this code.

Bezel installation is alsopossible. Refer to MountingOption for details.

1 115mm 3 224mm 9 Special


5~50 mL/min(nor) 10~100 mL/min(nor) 20~200 mL/min(nor) 30~300 mL/min(nor) 50~500 mL/min(nor)0.1~1 L/min(nor)0.2~2 L/min(nor)0.3~3 L/min(nor)0.5~5 L/min(nor) 1~10 L/min(nor) 2~20 L/min(nor)

3~30 L/min(nor)



Alarmsetting range

In case alarm output code is 0 and E In case alarm output code is A to D †7


0.1~1 L/min

0.15~1.5 L/min 0.2~2 L/min


5~50 L/min(nor)


10~40 L/min(nor)

50~500mL/min

0.1~1 L/min

0.15~1.5 L/min

100~400 mL/min

0.2~0.8 L/min

0.3~1.2 L/min


Alarmsetting range

May be different depending on the scale length.Available for flow rate less than shown on flow rate table. Contact us for further details.†7 The viscosity of a liquid is 1.0 mPa·s.

■ P-823 / STANDARD FLOW RATE TABLE (In case Op. Press at gas is not 0 MPa, refer to page 1.)

32

■ DIMENSIONS

● STANDARD TYPE (Rc 1/4 conn. Needle valve provided)(P-82�-40-6F-R2, Valve provided at Inlet, Panel front lock-nut fixing)

STANDARD TYPE (SW 1/4 conn. Needle valve provided)(P-82�-30-6F-S2, Valve provided at Outlet,Panel front lock-nut fixing)

BEZEL INSTALLATION TYPE(P82�-30-��-��, Valve provided at Outlet, Bezel fixing.)(Mounting Option code D )

Model

P-821

P-823

L1

143

252

L2

115

224

L3

145

254

L4

160

265

L5

175

280

Dimension(mm) Connection size

Rc 1/8,NPT1/8

Rc 1/4,NPT1/4

1/4 SW

3/8 SW

1/4 VCR

3/8 VCR

Hole dia (d) (mm)

16

22

16

22

22

32

Rear length L (mm)

(22)

(22)

(29.5)

(31.5)

(30)

(35.5)

■ DIMENSION TABLE ■ PANEL CUT SIZE

PANEL CUT







●Standard Material Parts name Standard material Available material Body　 SCS14 ― Tapered tube　 Heat-resistant glass ― Float　 SUS316,Glass,Ruby CR Packing　 FPM ― Spindle　 SUS316 ― Fitting　 SUS316 ― Valve　 SUS316 ― Mounting boad SPCC ― Cover Acryl ― Parts with“○”touch the measuring fluid. ＊：Proper material is to be selected, depending on specifications. SUS316 instead of SUS304 may be used, due to certain production reasons. Material like ASTM, or AIS equivalent to JIS material may be used due to certain production reasons.

✽

○ ○ ○ ○ ○ ○ ○

PANEL CUT

Caution) Use non-magnetize material for panel when ALARMOUTPUT code is A to D.

PANEL CUT

33

P-830■ GENERAL

CE marking and compatibility with EN Standards.Improved by re-examination of conventional purgemeter structureand material, our product ensures a heat resistance of 130 oC.


Cooling water lines at semiconductor production equipment




■ OTHER AVAILABLE OPTIONSYou can specify the following options:Reed switch lead wire length, double graduations, special gradua-tion, built-in rubber joint type, built-in joint type, etc.(For details, refer to Other Option ).

■ ALARM OUTPUT


Basic model code






WaterMin. 0.1~1.0 L/min.Max. 1.5~7 L/min.

Range ability 10:1 10:2 for some rangesAccuracy ±10 % F.S.


Material Std.Body SCS14/SUS304

Tapered tube Heat-resistant glassPacking FPMSupport AluminumCover Acryl

Connection

Std. 3/8SW Opt. Rc3/8,NPT3/8 etc. Mounting Std.

MASS (std. type) 0.5 kg


GeneralCE, UL Version


Measuringrange

Refer to Basic model code fordetails.

Thread mount ontopanel front

Refer to orderinginformation for details.


In case alarm output code is 0 In case alarm output code is A to DWater Water Alarm setting range

0.1~1.0 L/min 0.1~1.0 L/min 0.1~0.8 L/min 0.4~1.5 L/min 0.4~1.5 L/min 0.4~1.2 L/min

0.2~2 L/min 0.2~2 L/min 0.6~1.6 L/min0.3~3 L/min 0.3~3 L/min 0.6~2.4 L/min0.4~4 L/min 0.4~4 L/min 0.8~3.2 L/min0.5~5 L/min 0.5~5 L/min 1~4 L/min1.5~7 L/min 2 ~7 L/min 3 ~5.6 L/min

VA

LVE

ALA

RM

OU

TP

UT

WE

TTED

PA

RTS

MA

TER

IALS

PA

CK

ING

MA

TE

RIA

L

CO

NN

EC

TIO

N T

YP

E

CO

NN

EC

TIO

N S

IZE

EXAMPLE

DESCRIPTION

P-831 -U -6A F -S 33 3/8 (Standard)Z Special

R Rc thread N NPT thread S SW (Standard)Z Special

F FPM (Standard)Z Special

6 SCS14/SUS3040 Not providedA Reed switch alarm (LO)B Reed switch alarm (LC)C Reed switch alarm (HO)D Reed switch alarm (HC)Z Special

0 Not providedU TopZ Special


34

■ DIMENSIONS

● P-831-U�-6F-R3 (Valve provided)



Parts name Standard material Available material Body　 SCS14 ― Tapered tube　 Heat-resistant glass ― Float　 SUS316 ― Float rod　 SUS316 ― O-ring　 FPM ― Valve　 SUS304 SUS316 Fitting　 SUS304 SUS316 Mounting boad Aluminum ― Cover Transparent Acryl ―


○ ○ ○ ○ ○ ○ ○

Parts with“○”touch the measuring fluid. SUS316 instead of SUS304 may be used, due to certain production reasons. Material like ASTM, or AIS equivalent to JIS material may be used due to certain production reasons.

Caution) Screw off the threads before mounting on a panel with Rc 3/8 orNPT 3/8 fittings.

Panel: Max.t2.5mm

Panel Max. thickness 2.5mm

PANEL CUT

PANEL CUT

● P-831-U�-6F-S3(Valve and alarm contact provided)

Caution) Screw off the threads before mounting on a panel with Rc 3/8 orNPT 3/8 fittings.Use nonferrous material panel.

35

P-850

General purpose

Parts name Standard material Available materialBody ○ SCS14 - Tapered tube ○ -

Float*1 ○ -

Packing ○ FPMCR

Valve ○ Mounting board Cover Poly-carbonate -

The P-850 purgemeter is designed compactly as small as 100 mm in total and 80 mm in face-to-face length. Measuring both liquids and gases, it is suitable for built-in services for the pre-fabricated equipment and devices thanks to its size.

■ GENERAL　　　　　　　　　　　　　　　　　　　　

■ MAJOR APPLICATIONS　　　　　　　　　　　　　　

■ STANDARD SPECIFICATIONS　　　　　　　　　　　

■ STANDARD MATERIALS　　　　　　　　　　　　　

Parts with ○ are in contact with fluids to be measured.*1 Proper material to be selected according to the specifications.• The SUS316 may be used instead of SUS304 due to circumstances.• The ASTM or AISI materials equivalent to JIS may be used instead due to circumstances.

SUS316GlassRuby

NBR


SUS304SPCC

SUS316SUS304

■ STANDARD FLOW RATE 　　　　　　　 The standard flow rate is expressed by the codes. See each model code and its corresponding range in the BASIC MODEL CODE below.


Measuring range as per optional requirements When the operating condition of a gaseous fluid is other than air at 0°C and 0 MPa, convert its flow rate by using the equation on the page 1.Air（at 0 MPa、0 ℃）20 - 2 0 0 mL/min(nor)50 - 5 0 0 mL/min(nor)0.1 - 1 L/min(nor)0.5 - 5 L/min(nor)1 - 1 0 L/min(nor)2 - 2 0 L/min(nor)

Water（1.0 g/cm3、1.0 mPa・s） 5 - 5 0 mL/min 10 - 10 0 mL/min 20 - 20 0 mL/min 30 - 30 0 mL/min 50 - 50 0 mL/min 0.1 - 1 L/min

Measuring object

Air

Liquids

Gases

Liquids

Range ability

AccuracyMax. Op. Press.Max. Op. Temp.Cleaning and treatment as standard

Connection Standard

Mass

Gases (Air, Nitrogen)Liquids (Water or equivalent, Density:1.0 g/cm3, Viscosity: 1.0 mPa・s)Min.: 20-200 mL/min(nor)Max.:2-20 L/min(nor) Min.:5-50 mL/minMax.: 0.1-1 L/minMin.: 20-200 mL/min(nor)Max.: 2-20 L/min(nor) Min.: 5-50 mL/minMax.: 0.1-1 L/min 10 ： 1 ±5 %F.S. 0.5 MPa60 ℃

Rc1/8200 g

Measuring rangeas per standard codes

Measuring rangeas per optional requirements

Air at 20°C, 0 MPa (1 atm)

Water or equivalent of 1.0 g/cm3 and 1.0 mPa•s

Flow rate converted at the operating condition of air at 0 °C, 0 MPa

Use no oil with ultra-sonic cleaning

L 1 - 0 - 4 N - R 11

RN

NFCZ

46

0LU

EXAMPLE

DESCRIPTION

P-850-1/8

Rc (Standard)NPT

NBR (Standard)FPMCRSpecial

Body: SCS14/Valve: SUS304(Standard)Body: SCS14 / Valve: SUS316

Not providedBottomTop

Fluid specificationsFluid: Water or equivalentDensity: 1.0 g/cm3Viscosity: 1.0 mPa•s

Fluid specificationsFluid: AirPressure: 0 MPa (1atm)Temperature: 20°C

5 - 50 mL/min10 - 100 mL/min30 - 300 mL/min50 - 500 mL/min60 - 600 mL/min 0.1 - 1 L/min20 - 200 mL/min（nor） 0.1 - 1 L/min（nor） 0.3 - 3 L/min（nor） 0.6 - 6 L/min（nor） 1 - 10 L/min（nor） 1.5 - 15 L/min（nor） 2 - 20 L/min（nor）Measuring range as per optional requirements

L 0L 1L 2L 3L 4L 5G 0G 1G 2G 3G 4G 5G 60 0

Specify the inlet and outlet pressure across the valve when ordering the flowmeter with a valve.Customers may be consulted when the valve is not available under the specified pressure.If the pressure is not specified, the valve is designed at the differen-tial pressure 0.05 MPa.Model codes with L□ or G□ mean the valve is designed at the differential pressure 0.05 MPa.

FLOW RANGE

VALVE

WETTED PARTS MATERIALS

PACKING MATERIAL

CONNECTION TYPE

CONNECTION SIZE

Type Availability General use × UL version ×

×

■ ALARM OUTPUT

Reed switch type alarm unit PAU Optical alarm unit

36

■ OPTIONAL MOUNTING METHODS　　　　　　　 Following mounting methods can be selected as an option.

Code

A

B

C

Mounting method

Panel front lock-nut mounting

Panel front screw mounting

Panel rear mounting

Add this code to the end of BASIC MODEL CODE.For example: P-850-L1-0-4N-R1-C for panel rear mounting

■ DIMENSIONS　　　　　　　　　　　　　　　　・P-850-□□-0-□□-□□ (Supported by piping)

(100)

(23)

80

(22) (10.5)

dOUT

dIN

・P-850-□□-U-□□-□□-A (Panel front lock-nut mounting)

(100)

(23) (22) (10.5)

80

(MAX.23)

80

∅16

∅16

Maximum panel thickness 5 mm Panel cut

dOUT

dIN

■ OTHER OPTIONS　　　　　　　　　　　　　 Other type of connectors are available as optional accessories.Contact us for details.

・P-850-□□-L-□□-□□-B (Panel front screw mounting)

(23)

(100)

(10.5)

4×M3

(MAX.23) (22)

80 4617

80

∅16

∅16

dOUT

dIN

Panel cut

4×∅3.5

14

Note : Too long mounting screws may break the tapered tube. The length of screws should not be longer than “thickness of panel +3 mm.”

・P-850-□□-U-□□-□□-C (Panel rear mounting)

16

5619.5

95

7.5

15

∅15

(100)

(23) (22) (10.5)

80

(MAX.23)

Panel cut

4×∅3.5

4×M3d6

dOUT

dIN

37

Face-to-face dim

ension

Valve position

Valve color

Alarm output

Wetted parts m

aterial

Packing m

aterial

Connection typeConnection size

Example

Description

P-88 1 - U B 0 - 6 F - R 2Rc1/8Rc1/4 (Standard)NPT1/8NPT1/4Equivalent to 1/4" SWEquivalent to 3/8" SWEquivalent to 1/4" VCREquivalent to 3/8" VCR

1 2 1 2 2 3 2 3

F C E Z

R

N

S

V

FPM (Standard)CREPDMSpecial

SCS14/SUS3166Not provided0

Blue (Standard)GreenSilverYellowOrangeBlank not provided

B G S Y O

0LU

Not providedBottomTop

1 2 3 Z

115mm130mm145mmSpecial

P-880


■ STANDARD SPECIFICATIONS

■ STANDARD FLOW RATE

*Other specifications are available. Contact us for details.

AIR (at 0 MPa, 0 ℃) 0.15 to 1.5 mL/min(nor) 0.5 to 5 mL/min(nor) 0.6 to 6 mL/min(nor) 0.8 to 8 mL/min(nor) 1 to 10 mL/min(nor) 2 to 20 mL/min(nor) 4 to 40 mL/min(nor) 6 to 60 mL/min(nor) 8 to 80 mL/min(nor) 10 to 100 mL/min(nor)20 to 200 mL/min(nor)

40 to 400 mL/min(nor)60 to 600 mL/min(nor)80 to 800 mL/min(nor) 0.1 to 1 L/min(nor) 0.4 to 4 L/min(nor) 0.6 to 6 L/min(nor) 0.8 to 8 L/min(nor) 1 to 10 L/min(nor) 2 to 20 L/min(nor) 4 to 40 L/min(nor) 6 to 60 L/min(nor)

Measuring object

Air

Material

Con-nec-tion

Body wetted parts

Tapered tube

Packing

Fixtures

Cover

Standard

Option

Standard

Standard cleaning

Gases

10:1

±5 %F.S.

1 MPa

120 ℃

1×10-7 Pa・m3/s(He) or less

Standard

SCS14/SUS316


FPM (max.120 ℃)

A5052(White alumite)

Transparent PVC

Rc1/4

Depends on packing materials

CR (max.80 ℃)EPDM (max.80 ℃)

See BASIC MODEL CODEfor details.

MASS

Measur-ing range

Range ability

Accuracy

Max. operating pressure

Max. operating temperature

Leak rate

Min. 0.15 to1.5 mL/min (nor)

Max. 6 to60 L/min (nor)

Approx. 280 g(115 mm type)

・ Air at 0 ℃, 0 MPa (1 atm)・ See STANDARD FLOW RATE when selecting flow ranges.

Rc 1/8NPT 1/8, 1/4Equivalent to 1/4", 3/8" SWEquivalent to 1/4", 3/8" VCR

Mount-ing

Degrease treatment(Ultrasonic cleaning), Non-water treatmentMounting onto the panel front with lock nuts

Note 1: A typical value obtained in in-house tests, not a guaranteed value.Note 2: It is general data, and the maximum temperature may change by terms of use and environment.

Note 1

Note 2

■ GENERAL

The P-880 is an area purge meter for gas measurement and canmeasure micro flow rates.The valve of the conventional P-100, P-200, P-810, and P-820meters has been improved to accurately control the flow rate.This purge meter is ideal for measuring and controlling micro flowrates.

■ FEATURES

❏ Micro flow rate measurementMeasurement from 0.15 to 1.5 mL/min (nor) to 6 to 60 L/min (nor)

❏ Easy flow rate controlAccurate control of the flow rate. An optimum valve will beprovided if you indicate the input and output pressures of theflow meter.

❏ Wide range of face-to-face dimensionsThree face-to-face dimensions (115, 130, 145 mm) are avail-able for various applications.

❏ Compact, lightweight design3 mm narrower and 50% lighter than the conventional P-810


1. Built-in use for equipment2. Biotechnology industry3. Semiconductor-related gas equipment

Type Availability General use × UL version ×

×

■ ALARM OUTPUT　　　　　　　　　　　　　　

Reed switch type alarm unit PAU Optical alarm unit

38

■ DIMENSIONS

●P-881-U□ 0-6□ -R2

●P-882-L□ 0-6□ -S2

●P-883-00-6□ -V2

IN

OUT

115

138

1427

(35)

26

2×Rc1/4

2×M18

2×φ20

PANEL CUT

IN

OUT

130

153

2627(35)26

Equivalent to 2×1/4"SW

PANEL CUT

2×M20

2×φ22

168

2726

IN

OUT

145

31.3

Equivalent to 2×1/4"VCR

PANEL CUT

2×M20

2×φ22

P-900■ GENERAL

Smart designed purgemeter with all stainless steel body. Uni-fied material achieves effective price and quick delivery.


Corrosion resistant equipment




■ OTHER AVAILABLE OPTIONSYou can specify the following options:Double graduations, special graduations, built-in rubber joint type,built-in joint type, etc.(For details, refer to Other Option ).

■ ALARM OUTPUT

■ STANDARD FLOW RATE TABLE(In case Op. Press of gas is not 1atm, refer to page 1.)

■ DIMENSIONS

● STANDARD TYPE(P-90�-U0-4F-R2)

L DIM

EN

SIO

N

VA

LVE

ALA

RM

OU

TP

UT

WE

TT

ED

PA

RT

S M

AT

ER

IAL

PA

CK

ING

MA

TE

RIA

L

CO

NN

EC

TIO

N T

YP

E

CO

NN

EC

TIO

N S

IZE

EXAMPLE

DESCRIPTIONP-90 -L -41 0 F -R 2

2Z

R Rc thread(Standard) N NPT thread Z Special

F FPM (Standard)Z Special

4 SUS304 (Standard)

6 SUS316

Z Special

Only connection type code R can be selected

Only connection type code N can be selected

1/4Special

0 Not providedZ Special

0 Not provided

L Bottom (gas for atmospheric pressure scale)

UTop (gas for pressure scale or for

negative pressure on the secondary side)Z Special

1 114 mm2 224 mm9 Special


Dimension (mm)

L1

146

256

Model

P-901

P-902

L2

114

224

Parts name Standard material Available material Body　 SUS304 SUS316 Tapered tube　 Heat-resistant glass ― Float　 SUS316,Glass,Ruby — Packing　 FPM — Valve　 SUS316 — Mounting board SUS304 ― Cover Poly-carbonate ― Parts with“○”touch the measuring fluid. ＊：Proper material is to be selected, depending on specifications. SUS316 instead of SUS304 may be used, due to certain production reasons. Material like ASTM, or AIS equivalent to JIS material may be used due to certain production reasons.


✽

○ ○ ○ ○ ○

Air (0 MPa,0 °C) Water 80~800 mL/min (nor)

5~50 mL/min 0.1~1 L/min (nor)

0.2~2 L/min (nor) 10~100 mL/min0.3~3 L/min (nor) 20~200 mL/min0.5~5 L/min (nor) 30~300 mL/min 1~10 L/min (nor) 50~500 mL/min 2~20 L/min (nor) 3~30 L/min (nor)

0.1~1 L/min

5~50 L/min (nor) 0.15~1.5 L/min

6~60 L/min (nor) 0.2~2 L/min0.25~2.5 L/min

★: In case model code P-901,10:2 if range is more than 30 L/min (nor)

★

Basic model code






Air

Water

Range ability 10:1

AccuracyP-902: ±3 %F.S.P-901: ±5 %F.S.


Material Std.Body SUS304

Tapered tube Heat-resistant glassPacking FPMSupport SUS304Cover Poly-carbonate

ConnectionStd. Rc1/4Opt. 1/4NPT

Mounting Std.

MASS (std. type) 0.5 kg(P-901)


SUS316 is also available

. Air at 0 oC, 0 MPa (1atm) . When selecting flow range, refer to standard flow rate table. . In case Op. Press of gas is not 0 MPa, refer to page 1.

Measuringrange

Min. 80~800 mL /min(nor). Max. 6~60 L/min(nor).

Min. 5~50 mL/min. Max. 0.25~2.5 L/min.





10:2 occasionally

Type


CE, UL Version

Availability


PANEL CUT

39

40

P-010■ GENERAL

P-010 series of flowmeter is the updated version of P-100 serieswhich has been appreciated by many customers. By limiting themeasuring fluids to water, air and nitrogen, this lot productionflowmeter is suitable for your ordering of more than 10 units withsame specifications. The inscription of graduation by the laseron the convex surface makes reading easier.


General purpose (for small flow rate, Water lines and Air / Nitro-gen lines)




■ ALARM OUTPUT

■ STANDARD FLOW RATE TABLE(In case Op. Press. at gas is not 0MPa, consult factory fordetails)

Measuring object

Scale range

. Gas at 20 oC, 0 MPa . When selecting flow rate, refer to model code.

Water

Gas(Air/Nitrogen)



BodyTapered tube

PackingSupport

Front panelScale plate

Min. range: 5~50 mL/minMax. range: 0.4~2 L/minMin. range: 0.1~1 L/min (nor)Max. range: 5~50 L/min (nor)10:1 10:2 occasionally±5 %0.8 MPa120 oC

StandardSCS14Heat-resistant glassNBR (max.80 oC) FPM (max.120 oC) A6063-T5ABSPoly-carbonateRc1/4NPT1/4Lock-nut mount onto panel front0.5 kg

Material

Liquid (Water <Density 1.0 g/cm3 and Viscosity 1.0 mPa•s>)Gas (Air / Nitrogen : 0 oC, 0 MPa)

Max.Op. Temp. is 80 oCfor standard goodsbecause packingmaterial is NBR.


MountingMass (Std. type)

ConnectionStd.Opt.


Type


CE, UL Version

Availability

0.1～1 L/min（nor）

0.3～3 L/min（nor） 0.5～5 L/min（nor） 1～10 L/min（nor） 2～20 L/min（nor） 3～30 L/min（nor） 4～40 L/min（nor） 5～50 L/min（nor）

Air（0 MPa,0 ℃）

Water

5～50 mL/min 10～100 mL/min

20～200 mL/min 30～300 mL/min 50～500 mL/min 0.1～1 L/min 0.3～1.5 L/min 0.4～2 L/min

FL

OW

DIR

EC

TIO

N

VA

LV

E

AL

AR

M O

UT

PU

T

WE

TT

ED

PA

RT

S M

AT

ER

IAL

PA

CK

ING

MA

TE

RIA

L

CO

NN

EC

TIO

N T

YP

E

CO

NN

EC

TIO

N S

IZE

EXAMPLE


2Z

R

ZNBR (Standard)FPMSpecial

SCS14 (Standard)Special

NFZ

4Z

0Z

0

L

U

Z

09

1/4 (Standard)Special

Rc thread (Standard)

Special

Not providedSpecial

Not providedBottom(gas for atmospheric pressurescale)Top(gas for press. scale or for negative press. on secondary side)Special

Bottom rear Top rear (Standard)Special

Lock-nut mounting onto panel front


(Use model code table for selection) (For details, refer to Advice for Your Product Selection.)

Basic model code

P-01■-■■-■■-■■


Fluid name Measuring range Press. Temp. Mounting option Other option

1 2 3 4 5 6

41

■ DIMENSIONS

● STANDARD TYPEP-010-U0-4N-R� (Valve provided at Outlet)

● Panel cut size

115

2-φH

Panel cut

115

(MAX.27) (31) 17(30)(1

40)

2–D

2–d

OUT

IN

D d M18 M18

H 20 20

Connection size Hole dia (mm)

Rc 1/4 NPT1/4

Parts name Standard material Available material Body　 SCS14 ― Tapered tube　 Heat-resistant glass ― Float ＊　 SUS304/Glass PTFE/Ruby Packing　 NBR FPM Support　 A6063-T5 ― Front panel　 ABS ― Scale plate Poly-carbonate ―


○ ○ ○ ○


42

P-060■ GENERALP-060 series is an acryl molded Purgemeter with compact de-sign.It is available in 2 kinds ; one is 105mm in full length and 22mmin width, and other 114mm long and 30mm wide. Smart, lowprice and optimum for the mass-production. Available with alarmcontact.


Water lines and Air / Nitrogen lines


(In case Op.Press. is not 0MPa, consult factory for details)


■ ALARM OUTPUT

■ STANDARD FLOW RATE TABLE(In case Op. Press at gas is not 1 atm, consult factory for de-tails.)

Purgemeter

Small flow rate type Large flow rate typeMeasuring object

Liquid (Water <Density 1.0 g/cm3 and Viscosity 1.0 mPa•s>)Gas (Air or Nitrogen)

Scalerange

· Gas at 20 °C, 0MPa (1atm)

· Water (Density 1.0 g/cm3 and Vis-cosity 1.0mPa·s)

· When selecting scale range, refer to model code.

Water

Gas(Air/

Nitrogen)

RangeabilityAccuracy


BodyFloat

PackingCapJoint

Scale plate

Lock-nut

Connection

Mounting

Mass (Std.type)

10:1 10:2 occasionally±5 % F.S.0.5 MPa50 °C

Min. range: 10 ~ 100 mL/minMax. range: 0.3 ~ 3 L/minMin. range: 0.3 ~ 3 L/minMax. range: 1 ~ 10 L/min

Small flow rate type(Body code A)

Large flow rate type(Body code B)

Min. range: 0.2 ~ 2 L/min (nor)Max. range: 5 ~ 50 L/min (nor)Min. range: 5 ~ 50 L/min (nor)Max. range: 30 ~ 300 L/min(nor)

Small flow rate type(Body code A)

Large flow rate type(Body code B)

Material

Std.

Std.

Opt.

Not attached to smallflow rate type

(Small flow rate type) Rc1/8(Large flow rate type) Rc3/8

Rc1/4(Small flow rate type)Thread mount onto panel front(Large flow rate type)Lock-nut mounting onto panel front(Small flow rate type) 95 g(Large flow rate type) 120 g

PMMASUS304/PTFE/Glass/RubyNBRPOMSUS304Polycarbonate

POM

Std.


Availability○ ×

TypeReed switch type alarm unit CE, UL Version

PAU optical alarm unit

0.2 ~ 2 L/min (nor)0.5 ~ 5 L/min (nor) 1 ~ 10 L/min (nor) 2 ~ 20 L/min (nor) 3 ~ 30 L/min (nor) 5 ~ 50 L/min (nor) 5 ~ 50 L/min (nor) 10 ~ 100 L/min (nor) 20 ~ 200 L/min (nor) 30 ~ 300 L/min (nor)

WaterAlarm setting

range WaterAlarm setting

range

In case alarm output code is 0

Small flowrate type

Large flowrate type


10 ~ 100 mL/min 40 ~ 400 mL/min0.1 ~ 1 L/min0.2 ~ 2 L/min0.5 ~ 2.5 L/min0.3 ~ 3 L/min0.3 ~ 3 L/min0.5 ~ 5 L/min 1 ~ 10 L/min

5 ~ 50 L/min (nor)

10 ~ 100 L/min (nor)20 ~ 200 L/min (nor)30 ~ 300 L/min (nor)

0.1 ~ 1 L/min0.2 ~ 2 L/min0.5 ~ 2.5 L/min0.3 ~ 3 L/min0.3 ~ 3 L/min0.5 ~ 5 L/min 1 ~ 10 L/min

0.2 ~ 0.8 L/min0.4 ~ 1.6 L/min0.5 ~ 2 L/min0.6 ~ 2.4 L/min0.6 ~ 2.4 L/min 1 ~ 4 L/min 2 ~ 8 L/min

10 ~ 40 L/min (nor)

20 ~ 80 L/min (nor)40 ~ 160 L/min (nor)60 ~ 240 L/min (nor)

Air or N2

0 MPa (1atm), 20 °C

Air or N2

0 MPa (1atm), 20 °C

WaterAirNitrogen

Not providedReed switch alarm (LO)Reed switch alarm (LC)Reed switch alarm (HO)Reed switch alarm (HC)

Not providedLower side

Bottom rear → Top rearSpecial (Liquid/Gas)

0 0 0 10 0 0 40 0 1 00 0 2 00 0 2 50 0 3 00 0 2 00 0 5 00 1 0 00 2 0 00 3 0 00 5 0 0

LANZ

2

0ABCD

0L

FLO

W D

IRE

CT

ION

FLU

ID

VA

LVE

ALA

RM

SC

ALE

RA

NG

E

EXAMPLE

DESCRIPTIONP-06 2 0 0 0 1-L -L 0

CO

NN

EC

TIO

N

-R1 A

BO

DY

CO

DE

R1R2

Rc1/8 (Body code A ... Std.)Rc1/4

A Small flow rate type (Width 22 mm, Length 105 mm)

Water : 100 mL/min " 400 mL/min " 1 L/min " 2 L/min " 2.5 L/min " 3 L/minAir or N2 : 2 L/min (nor) " 5 L/min (nor) " 10 L/min (nor) " 20 L/min (nor) " 30 L/min (nor) " 50 L/min (nor)

■ MODEL CODE (BODY CODE: A)

WaterAirNitrogen

Not providedReed switch alarm (LO)Reed switch alarm (LC)Reed switch alarm (HO)Reed switch alarm (HC)

Not providedLower side

Bottom rear → Top rearSpecial (Liquid/Gas)

0 0 3 00 0 5 00 1 0 00 5 0 01 0 0 02 0 0 03 0 0 0

LANZ

2

0ABCD

0L

EXAMPLE

DESCRIPTIONP-06 2 0 0 3 0-L -L 0 -R3 B

R2R3

Rc1/4Rc3/8 (Body code B ... Std.)

B Large flow rate type (Width 30 mm, Length 114 mm)

Water : 3 L/min " 5 L/min " 10 L/minAir or N2 : 50 L/min (nor) " 100 L/min (nor) " 200 L/min (nor) " 300 L/min (nor)

■ MODEL CODE (BODY CODE: B)

FLO

W D

IRE

CT

ION

FLU

ID

VA

LVE

ALA

RM

SC

ALE

RA

NG

E

CO

NN

EC

TIO

N

BO

DY

CO

DE

P-062- - -

Basic model code


Designation itemsfor detailed specifi-cations

No designation

43

2- 152- 4

(MAX.28) 26 12

10.5

84

3

OUT

IN

63 84

10.5

22

105 14

KEISO

JAPAN

TOKYO

PANEL

2-Rc1/8

2-M3Depth 6

TOKYO

JAPAN

KEISO

(MAX.29)

114

30

8484

33 20

15

PANEL(t=3 to 10)

2-M23

2-Rc3/82- 25

IN

OUT

PANEL

2-Rc1/82- 15

2- 4

Depth 62-M3

2-M3

(MAX.28) 26 12

10.5

84

OUT

IN

63 84

10.5

2- 15

48

13.5

57

12 12

14

22

105

Depth 6

(1)

KEISO

JAPAN

TOKYO

114

30(1) (MAX.29) 33 2015

IN

OUT

84

PANEL (t=3 to 10)

2-M23

2-Rc3/8

32

2- 25

1515

54 8412

(31)

■ DIMENSIONS

● Body code A Standard type (Connection size Rc1/8)

<Note>A magnet is set in the float. In case of the short distance tomount reed switch, they interfere each other, and it may hap-pen that the rate of flow can not be indicated accurately. Con-tact the factory if the distance to mount is less than 50mm.

PANEL CUT


● Body code B Standard type (Connection size Rc3/8)

● Body code A (Connection size Rc1/8 with alarm) ● Body code B (Connection size Rc3/8 with alarm)

PANEL CUT

PANEL CUT PANEL CUT

PMMA SUS304/PTFE/Glass/Ruby SUS304 SUS304 POM NBR SUS304 Polycarbonate

Body Float ✽ Valve Needle Cap Packing Joint Scale plate

Parts name Standard material○ ○ ○ ○ ○ ○ ○


Available material

― ― ― ― ― ― ― ―

44

YP■ GENERAL

YP purgemeters have small size: 80 mm in total length and 60mm in connection length.The compact meters are fitted well for assembling into pack-aged units.Suitable for both gas and liquid measurement.


Simple flow monitoring




■ ALARM OUTPUT

YP-

Basic model code



No designation

Range ability 10 : 1 10:2 for same versionIndication accuracy �10 % F.S.

Max. Op. Press. 0.4 MPa Test press. 0.5 MPaMax. Op. Temp.

Material60 °C

Flow direction Bottom rear to Top rearMASS (std.type) 0.2 kg

SUS316Std.

Heat-resistant glassFPMSPCC (Steel) Munsell N1.2Poly-Carbonate

Measuring object

Scale range

Air (Air)

BodyTapered tube

Rc1/8Connection StandardPanel front mount by lock nutMounting Standard

GasketSupport plate

Cover

Nitrogen (N2)

Water

Min. range : 0.02~0.2 L/min (nor)Max. range : 3~15 L/min (nor)Min. range : 0.02~0.2 L/min (nor)Max. range : 3~15 L/min (nor)Min. range : 5~30 mL/minMax. range : 100~500 mL/min

Liquid water (Water [Density 1.0 g/cm3 and Viscosity 1.0 mPa·s ]),Gas (Air or Nitrogen)

· Gas at 20 °C, 0 MPa (1atm)· Water (Density 1.0 g/cm3

and Viscosity 1.0 mPa·s)· When selecting scale

range, refer to model code.



Type


CE, UL Version

Availability

SC

ALE

RA

NG

E

VA

LVE

Air

0.02 ~ 0.2 L/min (nor)0.05 ~ 0.5 L/min (nor) 0.1 ~ 1 L/min (nor) 0.2 ~ 2 L/min (nor) 0.5 ~ 5 L/min (nor) 1.5 ~ 8 L/min (nor) 3 ~ 15 L/min (nor)

L -A1YP-A1A2A3A4A5A6A7

Nitrogen

Water

0.02 ~ 0.2 L/min (nor)0.05 ~ 0.5 L/min (nor) 0.1 ~ 1 L/min (nor) 0.2 ~ 2 L/min (nor) 0.5 ~ 5 L/min (nor) 1.5 ~ 8 L/min (nor) 3 ~ 15 L/min (nor) 5 ~ 30 mL/min 15 ~ 80 mL/min 30 ~ 100 mL/min 40 ~ 200 mL/min 100 ~ 500 mL/min

Not providedLower side (Inlet)Upper side (Outlet)

N1N2N3N4N5

W1W2W3W4W5

0LU

N6N7

DESCRIPTION

EXAMPLE

45

■ DIMENSIONS

Upper valve version YP-U-��

Without valve version YP-0-��

(24)80

(MAX.18) (22) (12)

2-Rc1/8

OUT

IN

PanelMax.t5

6060

2- 16

(24)

80

(22) (12)

2-Rc1/8

OUT

IN

PanelMax.t5

6060

2- 16

○ ○ ○ ○ ○

― ― ― ― ― ― ― ―

Parts name Body SUS316 Tapered tube Heat-resistant glass Float SUS316,Glass,Ruby Packing FPM Valve SUS316 Protection cover Poly-carbonate Mounting boad SPCC Lock-nut C3604B


●Standard MaterialStandard material

✽

Available material● Do not loosen the lock nut when YP purgemeter is installed to process piping

directly.

● For panel mounting, remove lock nuts and fix the purgemeter onto panel by

two lock nuts. The nuts are to be properly tightened to avoid leakage.

● Take care not to give mechanical stress to YP purgemeter.

■ Cautions and Suggestions

PANEL CUT

PANEL CUT

46

XP■ GENERAL

Standard specification type purgemeter adopted engineeringplastic integrated mold body. Smart and compact design. Quickdelivery and low cost.


General purpose, quick delivery


Basic model code


Designation items for detailed specifications (Only when customer designation graduation)


XP- Fluid name Measuring range Press. Temp. Mounting Option Other Option




Gas

Water



Material

Body

Tapered tubePackingCover

ConnectionMounting

Std.Std.

MASS (std. type)

Min. 0.1~1 L/min (nor).Max. 2~20 L/min (nor).

Min. 0.02~0.1 L/min.Max. 0.2~1.0 L/min.10:1±5 %F.S.0.4 MPa50 °CStd.

POM(Poly-acetals)

Heat-resistant glassFPMPoly-carbonateRc1/4Thread mount onto panel front0.1 kg

Type Availability




Engineering plasticintegrated mold

Measuringrange

· Gas at 20 °C, 0 MPa (1atm)· Water (Density 1.0 g/cm3

and Viscosity 1.0 mPa·s)· When selecting scale

range, refer to model code.


■ ALARM OUTPUT

FLO

W R

AN

GE

VA

LVE

ALA

RM

OU

TP

UT

EXAMPLE

DESCRIPTIONXP- L1 0-L

0 Not provided E PAU ALARM UNIT provided Refer to page 52.

0 Not provided

L Bottom (gas for atmospheric pressure scale)

U Top (gas for pressure scale) L1 0.02~0.1 L/min L2 0.04~0.2 L/min L3 Water 0.06~0.3 L/min L4 0.1~0.5 L/min L5 0.2~1.0 L/min G1 0.1~1 L/min (nor) G2 0.3~3 L/min (nor) G3 Gas 0.6~6 L/min (nor) G4 (Air) 1.0~10 L/min (nor) G5 2.0~20 L/min (nor)

00Refer to Designation items for detailed specifi-

cations


Customer designation graduation

■ DIMENSIONS

XP-��-U0 XP-��-L0PANEL CUT

Parts name 　 Standard material Available material Body　 Poly-acetals ― Tapered tube　 Heat-resistant glass ― Float　 SUS316,Glass Ruby Packing　 FPM ― Valve　 Poly-acetals ― Cover Poly-carbonate ― Parts with“○”touch the measuring fluid. ＊：Proper material is to be selected, depending on specifications.

✽

○ ○ ○ ○ ○


IN

28 32 5

112

Rc1/4

2530

２×Ｍ４（Depth ５）

80

Rc1/4ＯＵＴ

(MAX.23)

IN

28 32 5

112

Rc1/4

2530

２×Ｍ４（Depth ５）

80

Rc1/4ＯＵＴ

(MAX.23)

2530 80

2×φ24

2×φ4.5

Reed switch contact for flow alarm can be mounted on P seriespurgemeters. You can get the lower or upper limit flow alarm contact inaddition to monitoring of the instantaneous flow rate by float position.This is effectively used for monitoring of flow interruption in variouspurging processes and for such control as inflow restrictions. (Notethat some restrictions are placed on the flow range as well as themodels that can be installed.)In addition to general reed type switches, reed switches compatiblewith UL standards are also available to meet world-wide requirements.

■ STANDARD SPECIFICATION● General type reed switch

Models where reed switch type alarm is available.P-100,P-200,P-510,P-520,P-530,P-620,P-772,P-773,P-774,P-820,P-830, P-060Number of point 1 point (High or Low)

2 point alarm also available as option. But sub-ject to limitation of scale range and settingpoint. Consult factory for details.

Alarm setting range Std. 20~80% of full scale (H: 50 to 80%, L: 20to 50%)*The alarm setting ranges on the front face type isdifferent from standard. consult factory for details.

Contact Reed switch (Self-holding type)Max. contact capacity AC10VA,DC10WMax. voltage AC125V,DC100VMax. current 0.5A

Connection Lead wire connection (50cm) (2m is alsoavailable)You can specify "no terminal required" whenusing the other option codes for both modelsP-510 and P-520.

Reset-Span

Construction Water proofAmb. Temp. -10 to 60oC<Note> Do not mount the meters too closely. Otherwise

nearby meters might give false indication with theinterference caused by the embedded magnets intothe floats. Consult Tokyo Keiso if you will install themin less than 100 mm for further information.

Contact Actuating

REED SWITCH TYPE ● Purgemeter with alarm

Alarm Output Unit

LOW ALARM HIGH ALARMP-□□□-□A LOW　OPEN

P-□□□-□B LOW　CLOSE

P-□□□-□C HIGH　OPEN

P-□□□-□D HIGH　CLOSE

：CONTACT CLOSE ：CONTACT OPEN

：Actuating Point ：Release Point

Code A B C D

*May be different depending on the scale length.

P-510 Purgemeter equipped with the reed switchCaution) Use non-magnetize material for mounting panel.

　　　 ModelP-100,P-200,P-821

P-510,P-520,P-530,P-620,P-772,P-773,P-774,P-823,P-830,P-060

Reset-Span(%.F.S)25

20

47

● UL-approved reed switchThe alarm contact with UL-approved reed switch is available.1.Final No. : E1795692.Category : NRNT2/NRNT83.UL standards : UL5084.SpecificationsSwitch model : RS-803SH-06 and TS2-SHMax operating voltage : DC24VMax contact capacity : DC10WRange of operating voltage

: DC10μ A to DC0.5 AConnection : Reed wire (2 m attached)Construction : Waterproof (Equiv. to IP67)Ambient temperature : 0 to 50℃

Possible to correspond to the UL standards in case ofthe model on which the reed switch can be mounted.

● CE MarkingIn order to export the product with reed switch to EU(European Union), the following measures are to be taken inorder not to be covered by CE marking.1. The rating of reed switch should be same as that for theUL-approved reed switch.

2. The customers load is to be compatible with EMC direc-tive, and also there is no source of an electromagneticwave noise around the installation site.

Reasons for object exclusion1. EMC directive (2004/108/EC)The product with reed switch is free from the substrateloaded with electronic parts; thus there is no source of theelectromagnetic wave noise. As regards the effect by theextrinsic noise, it can not be decided by the makers sidebecause it depends on the customers load and the in-stallation conditions.

2. Low Voltage Directive (2004/108/EC)By making the rating same as UL-approved reed switch, itwill be out of the range of Low Voltage Directive (AC50 to1000V, or DC75 to 1500V).

● REED SWITCH TYPESTANDARD DIMENSIONS OF PURGEMETERSWITH REED SWITCH ALARM

P-100-U�-4N-R2 modelP-200-U�-4N-R2 model

P-510-L�-4N-R3 model

P-620-U�-BN-R3 model

P-823-3�-6F-R2 model

PANEL CUT

L1 L2

140 115

225 200

P-100-U□-4N-R2

P-200-U□-4N-R2

L3

75

160

T

OPEN SHUT

KOYOKO

SIE

(10)

(30)

(L1)

2-Rc1/4

(MAX.36) 35 19

4.5

4.5

2-M18

PANEL MAX.t.10

L2 L2

2-φ20

IN

OUT

L320

20

PANEL CUT

OPEN SHUT

(53)or(59)

200

45(MAX.42)

2-Rc3/8

IN

OUT

(17) 22(229)

49(28)

200

(22.5)

155

(22.5)

29

2-φ28

2-φ4

PANEL CUT

33

IN

OUT

T

EKYK

O

O ISO

O S

32(MAX.31)

(252)

224

18 2-Rc1/4

224

20

2-φ22

φ10

HIGH CLOSE(ON)LOW OPEN(OFF)

HIGH OPEN(OFF)LOW CLOSE(ON)

For high alarm, the lead wire should be routed from the bottom.PANEL CUT

48

PAU ● OPTICAL ALARM UNIT

Alarm output unit

■ GENERALPAU is an optical sensing type alarm unit, and can be mountedon almost all the purgemeters. This highly reliable optical sys-tem ensures flow interruption alarm, and allows working flow tobe verified. With low cost, this unit changes your local indica-tion into the remote flow monitoring and control system by justadding the unit to direct reading purgemeters.

■ STANDARD SPECIFICATIONModels of purgemeters compatible with this unitModels :P-100,P-200,P-510,P-520,

P- 710,P-771,P-772,P-773,P-774,P-810,P-820,P-820,XP series purgemeter

Output :Open collector (NPN) rated outputDC30V, 80mA

Operation :Dark ON (The open collector turnson when light is cut off)

Response time :0.5 ms or lessPower supply :DC24V +/- 10% (power ripple 10%

or less)Current consumption :37mA or less (light projection and

receiver)Photosensitive adjust knob :ProvidedOperation display :LED display lampElectric connection :By cord pull-put (connection of

lead wire)Cord length :Projector 0.1mm2 x 2C 2m

Receiver 0.1mm2 x 3C 2mStructure :Water-proof enclosed type

(equivalent to IP64)Material :Exterior: liquid crystal polyester

(filled with polypropylene)Ambient illumination :3000 lux or lessAmbient temperature :-25 to + 55oC (no dew condensa-

tion)Ambient humidity :85%RH or less

■ EXAMPLES OF USING PAU ALARM UNIT

■ INSTALLATION EXAMPLE ON PURGEMETER

Code E

P-710-UE-GT-R1 model

XP-��-LE model

P-771 purgemeter equipped with the optical unit

● Detection of no flow and alarm

Install the PAU on thebottom end of the ta-pered tube.

Lightreception

Lightprojection

Lightreception

Lightprojection

If the fluid flows cor-rectly, light passes byand alarm does not op-erate.

When the flow is suspendedor reduced, the float is low-ered to cut off light. This willcause the alarm to operate.The lamp and buzzer areprovided to notify flow inter-ruption.

● Detection of flow change and alarm

Install the PAU at the position correspond-ing to the normal flow of the tapered tube.

Lightreception

Lightprojection

Lightreception

Lightprojection

Normal flow rate keepslight to cut off.

Increase (or decrease) of theflow rate causes the float tomove, and allows the light totransmit. This will cause alarmto be turned off. The lamp andbuzzer are provided to notifychanges in flow rate.

● Detection of leakage and alarm

Air or inert gas such as nitrogen purge to the instrument panel or equipment

Install the PAUon the top end ofthe tapered tube.

Lightreception

Lightprojection

Lightreception

Lightprojection

Normal flow of fluid al-lows the light to trans-mit, and the alarm doesnot operate.

If there is any leakage, the float goesupward to cut off light. This will causethe alarm to operate. The lamp andbuzzer are provided to notify flow in-terruption.

49

Interruption of cooling water supply or air flow to incubator

Monitoring to keep constant flow rate

P-771-0E-TW-TB model

50

Basic model code: Use the model code table of each series for selection.

Contact us if you have selected a special one such as "Z" in the basic mode code.

. "Ordering information" given for each model contains the following description.

(Example) P-100 series

ADVICE FOR YOUR PRODUCT SELECTION

● Designation items for detailed specificationsSelection procedure to omit the items when filled with "Need not be specified".

Example of entries . Water . Pure water . Other fluids

. N2 . Air . O2 . H2 . Ar . He . CO2 . C3H8 . Other Gases

Specify the setup pressure.Specify the setup

standard temperature.

Specify themounting method. Specify the option.

Fluid

Gas

Gas

Fluid

Norm

al temperature (20˚C

)

When "M

ounting option" on page 52 is not required,

When "M

ounting option" on page 52 is required,

When "O

ther options" on page 53 is not required,

When "O

ther options" on page 53 is required,

Other than norm

al temperature (20˚C

)

Exam

ple of entries

Must be specified for XP, YP and P-850 when the scale has been specified by the customer.

Specify the fluid name.(Models YP, P-850 and XP: "need not be specified")

Specify the max. flow rate.(Refer to the　standard flow rate　table). (P-773, YP, P-850, P-060 and XP: "need not be specified")

Basic model code

357911131517192123252729313335373941424446

P-100P-200P-300P-400P-510P-520P-530P-620P-710P-771P-772P-773P-774P-810P-820P-830P-850P-880P-900P-010P-060YPXP


Modelname Fluid name Flow range Press. Temp. Mounting method

(optional)Other

options

Page

For basic model valve code L or atmospheric pressure scale

For basic model valve code U, pressure scale or negative pressure on the secondary side

Om

it

Om

it

Om

it

Om

it

Om

it

"Must be

specified"

"Need not be

specified"

"Must be

specified"

"Need not be

specified"

"Must be

specified"

"Need not be

specified"

"Must be

specified"

"Need not be

specified"

"Need notbe specified"

"Must bespecified"Specify the flowmeter pressureon the primaryside.

Shipped as 0MPa (1 atm)

Specify the code number

according to the selectiontable.

Specify the code number

according to the selectiontable.

oCetc.MPa etc.MPa

etc. mL/min (nor) etc.

L/min (nor) etc.

mL/min. etc.

L/min. etc.

If you have found out unclear points or questions, refer to the One-Point Advice on pages 51 to 55.

Less than 0.4 MP

a

0.4 MP

a or more

65431 2

Basic model code

(Use the model code table for selection.)


P-10 - - - Fluid name － Flow range － Press. － Temp. － Mounting option － Other options

54321 6

51

. Specify the name of the fluid you want to use.

<Example> Water, N2, Air, O2, H2, Ar, He, CO2, C3H8, etc.. Inform us of fluid density and viscosity.

For the name of the fluid as shown above, enter only the fluid name.

. Specify the maximum flow according to the standard flow rate table.

*2L/min in the case of 0.2 to 2L/min

*10L/min(nor) in the case of 1 to 10L/min(nor).

. You can also select the flow range other than the standard flow

rate.

. You can also select the unit of flow other than the standard flow

rate.

<Example of flow rate unit>

Liquid: . 1000mL/min

=1L/min. 1000mL/h=1L/h

Gas: . 1000mL/min(nor)

=1L/min(nor). 1000L/h(nor)=1m3/h(nor). 1000mL/min(std)

=1L/min(std). 1000L/h(std)=1m3/h(std) etc.

. When fluid is other than water (with a density of 1.0 g/cm3 and viscosity

of 1.0mPa·s) or air (with a temperature of 0oC and pressure of

1atm), use the conversion formula to make compensation and ap-

ply it to the relevant flow range.

<Conversion formula>

For liquid - Refer to the right on page 1.

For gas - Refer to the left on page 1.

. Specify the operating pressure and pressure unit.

<Example of entries>

0MPa(=1atm)

0.1MPa

. Specify the design standard temperature and temperature unit.

<Example of entries>

20oC

In selecting the glass tube type variable area flowmeter, the be-

low-mentioned items shall be considered and examined.

The following specification condition and environment of the fluid

are not suitable.

1. The fluid line where the dynamic pressure (shock pressure)

is expected.

2. A line where the secondary disaster is expected when the

glass tube is damaged.

· Fluid with the toxicity (including the stimulus and anes-

thesia etc.)

· Fluid with the flammability

· Fluid with the explosion

3. The injury or death is expected when glass tube is damaged

in the gaseous fluid and pieces of glass may scatter.

4. The glass damage may be caused at the installation place by

the foreign substance dispersed from the outside.

5. When a float is suddenly raised in the ON/OFF operation,

the glass tube may be damaged by that collision.

6. Line where the thermal shock (rapid cooling, urgent heat) in

operation is expected.

7. For those corrosive liquids to glass like hydrogen fluoride and

caustic soda.

1 One-point advice Fluid name

2 One-point adviceFlow range

3 One-point advicePressure

4 One-point adviceTemperature

52

Mounting method

Code number A B C D E F G

Lock nut mount onto panel front


Panel-rear installation

Bezel installation (trim strip)

Panel mounting by attached metal fitting

With stand

Model and page

P-100

P-200

P-300

P-400

P-510

P-520

P-530

P-620

P-710

P-771

P-772

P-773

P-774

P-810

P-820

P-830

P-850

P-880

P-900

P-010

P-060(Body code A)

P-060(Body code B)

YP

XP

3

5

7

9

11

13

15

17

19

21

23

25

27

29

31

33

35

37

39

41

42

42

44

46

Flange mounting (Must be specified except for JIS 10K)

Need not be specified
















○

○

×

×

○

×

○

×

×

×

×

×

×

○

○

×

×

×

×

×

×

×

×

×

×

×

×

×

×

×

×

×

×

×

○


×


×


○

×

×

×

×

×

×

×


○

×


×


×

×


○

○

×

×

△

○

△

×

△

△

△

×

×

×

×

○

×

×

×

×

×

×

×

×

×

○

○

○

×

×

×

×

×

×

×

×

×

×

×

×

×

×

×

×

×

×

×

×

×

○

×

×

×

×

×

×

×

×

×

×

×

×

×

×

×

×

×

×

×

×

×

○

○

×

○

○

×

×

×

×

×

×

×

×

○

○

×

×

×

×

×

×

×

×

×

Mounting option One-point advice

. You can specify other than standard mounting methods.

. Specify the following code number if you want to use special mounting method.

. Omit the entry for "need not be specified". (Assumed as having been selected in terms of the basic model code)

. When installation set screws are attached for , specify it separately.

Selection Table for mounting option

<How to Specify (Example)>When you want to specify Bezel installation for the standard P-100 series, N2, 1 to 10 L/min(nor). and valve bottom:

P-10 - - - - Fluid name - Flow rate range - Press. - Temp.- Mounting option - Other options

Thus, your ordering format should be as follows:

P 100 L0 4N R2 N2 10L/min(nor) D

Specify D according to the code number in the selection table.

Standard model with valve inlet Fluid name Flow range Specify "Bezel installation".

Note: Press. and temp. Need not be specified , so they are omitted.

1 2 3 4 5 6

5

53

Other options One-point advice . You can specify the following options.

. Specify the following code number if there is an option you want to choose.

. Specify the consecutive code numbers if there are two or more options you want to choose.

. For the details of option, contact us.

Other options (Selection Table)

<How to Specify (Example)>When you want to specify two-point alarm for the standard P-510 series, "Mounted on the panel front by screws" with waterof 0.3MPa at 20oC, 2 to 20L/min. with reed switch equipped with lower limit open alarm and with valve outlet:

P-51 - - - - Fluid name - Flow rate range - Press. - Temp. - Mounting method (optional) - Other options

Specify M according to the code number in the selection table.

Thus, your ordering format should be as follows:

P 510 UA 4N R3 Water 20L/min M

Valve outlet Alarm code A standard type Fluid name Flow range Specify "Two point alarm".

Note: Pressure and temperature Need not be specified , so they are omitted.

6

Option

Code No. L M N O P Q R S T

Two point alarm

Reed switches compatible with CE or UL

Specify terminal position or "No terminal".

Specify the length of the reed switch lead wire.

Dual scale / special scale

Built-in check

Valve lock mechanism(Consult factory for details)

With various fittings

Alarm setting on the front face

Alarm position can be set from the front.(Need not be specified for P-773, P-774 and P-830)

For standard one-point alarm, you can specify two-point alarm such as upper/lower limit alarm and lower/lower limit alarm.

Reed switches on page 48(Need not be

specified for P-773, P-774, P-830 and P-060 )

You can specify alarm terminal position (rear, top) or "No terminal" (if you do not want to have a terminal).

For the standard lead wire length of 50cm, you can specify 2m.

You can specify the dual graduation, one-point graduation or percent graduation.

You can specify the built-in check valve type for prevention of counterflow.

You can specify the valve with a mechanism to avoid deviation of flow setup values.

You can specify such attachments as SW, VCR, male/female sockets, hose connector.(Size and material must be specified).

Optional item

Modeland page

P-100

P-200

P-300

P-400

P-510

P-520

P-530

P-620

P-710

P-771

P-772

P-773

P-774

P-810

P-820

P-830

P-850

P-880

P-900

P-010

P-060(Body code A)

P-060(Body code B)

YP

XP

3

5

7

9

11

13

15

17

19

21

23

25

27

29

31

33

35

37

39

41

42

42

44

46

× × × × ○ × × ○ × × ×

Need not be specified Need not be specified

× ×

Need not be specified × × × × × × × ×

× △ × × ○ ○ × × × × ○ × × × △ × × × × × × × × ×

○ ○ × × ○ ○

Need not be specified ○ × × ○ ○ ○ × ○

Need not be specified × × × ×


× ×

× × × × ○ ○ × × × × × × × × × × × × × × × × × ×

○ ○ × × ○ ○ ○ ○ × × ○ ○ ○ ○ ○ ○ × × × ×


× ×

○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ × × ○ × × × × ×

○ ○ × × ○ × × × × × × × × × × × × × × × × × × ×

○ ○ × × × × × × × × × × × × × × × × × × × × × ×

○ ○ ○ ○ ○ ○ × ○ ○ × × × × ○ ○ ○ ○ ○ ○ × ×

× × ×

54

Use

For liquid

For gas

Conditions

Not in particular

Pressurized gas

Negative pressure on the secondary side

Valve position

Top recommended

Top (outlet side)

　　　 Application Top recommended to ensure float stability Shipped with the tapered tube at your specified pressure If a valve is provided on the inlet side, the tapered tube will be vacuum and hunting will occur to the float.

Valve position selection guide One-point advice

Density of gases One-point advice. A major gas property chart is given on the bottom line of page 1. Use it for your flow rate conversion.

Float reading position One-point advice. Read the graduation on the glass tube and float position to get the flow rate. The reading position differs depending on the float shape.

The following shows general reading positions according to float profile. For details, refer to the Instruction Manual of each product.

When you want to have the same product as you are now using: One-point advice. Specify our serial production number of the product you are now using.

We will produce and ship the same product in conformity to our production record.(Ex.F98-123456-7)

L/min(nor) AIR 0MPa 20℃

Valve position 1. For liquid, the valve may be locatedon the inlet or outlet side. 2. For gas, (1) Gas to be measured has a pressure of 1 atm.

Valve

(2) Gas to be measured is pressurized.

Valve

(3) Gas to be measured is vacuum.

Valve

1) Specify the inlet and outlet pressure in case of purgemeter with valve2) If there is no suggestion, valve is designed as different pressure 0.05MPa.3) Consult factory for details if different pressure is under 0.05MPa.4) In case of gas application, when a valve position is required to be at the lower part (inlet) and the pressure condition

is 0MPa of atmospheric pressure, this product is manufactured, making the pressure of flowmeter (outlet) to be0MPa. For further details, contact factory.

7

8

9

10

Center

Top TopMaximumdiameterportion Top

55

1)Liquid measuring specifications

C � = [ �d( �f - � )] / [ � ( �f - �d)]C� : Conversion coefficient� d : Design density (See the approval drawing).� : Design liquid density (density of the liquid to be measured this time)� f : Density at float section

. How to calculate compensation (example) Put alcohol into the flow meter designed based on water (with a density of 1.0 g/cm3), and the flow meter indicates 10 L/min. (float material: stainless steel)

Alcohol true flow rate=10 X [1.0X(7.9-0.8)] / [0.8X(7.9-1.0)]

=11.34 L/min

Errors may also occur when measuring the liquid having a viscosity considerably different from that in design conditions.

Compensation in this case is different according to design conditions of individual flow meter. So contact us for information.

2) Gas measurement specifications

● Density conversion

C � = �d / �

C� :Density conversion coefficient� d :Design density kg/m3(nor) (Reter to approval drawing).� :Density of gas to be measured kg/m3(nor)

● Pressure conversionWhen a graduation is either “(nor)” or “(std)” indication:

Cp = (P+0.1013) / (pd+0.1013)When a graduation is under operatinging indication:

Cp = (pd+0.1013) / (P+0.1013)Cp :Pressure conversion coefficientpd :Design pressure MPa (Reter to approval drawing).P :Operating pressure MPa

● Temperature conversionWhen a graduation is either “(nor)” or “(std)” indication:

Ct = (td+273) / (t+273)When a graduation is under operating indication:

Ct = (t+273) / (td+273)Ct :Temperature conversion coefficientt d :Design temperature oC (Reter to approval drawing).t :Operating temperature oC

● How to calculate compensation (example)The flow meter designed under the conditions of 1.293 kg/m3(nor) of air at 20 oC and 0.3 MPa indicates 10 L/min(nor).when 1.977 kg/m3(nor) of carbon dioxide gas is fed at 40 oC and 0.6 MPa.

True flow rate of carbon dioxide gas=10XC� XCpXCt

=10X 1.293/1.977

X (0.6+0.1013) / (0.3+0.1013)

X (20+273) / (40+273)

=10.34 L/min(nor)

How to make quick model selection One-point advice. You will find at-a-glance guide "INDEX & QUICK REFERENCE" on page 2.

How to compensation calculation One-point advice. An indication error will occur to the purgemeter for the measurement principle if the specifications of the fluid to be measured and

physical property values are different from those of the design conditions.

11

12

56

MEMO

P SERIES PURGEMETERS

OCT. 2013K

Head Office : Shiba Toho Building, 1 – 7 – 24 Shibakoen, Minato-ku, Tokyo 105 – 8558

Tel : +81-3 – 3431 – 1625 (KEY) ; Fax : +81-3 – 3433 – 4922

e-mail : [email protected] ; URL : http://www.tokyokeiso.co.jp

* Specification is subject to change without notice.

CF030F111-12E

Individual catalogues or technical guidances are available for all the products introduced

in this general guidance.

Contact your agent or TOKYO KEISO.

p series purgemeters p series - 流量計・液面計 ... · full coverage for semi-conductor...

Documents