page 1 confidential piezo-ceramic servo motors. page 2 confidential linear, rotary or spherical...
TRANSCRIPT
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Piezo-Ceramic Servo Motors
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Linear, Rotary or Spherical Motion
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Agenda
Corporate Overview Theory of Operation Product Features Applications Question / Answer
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Corporate Introduction
Nanomotion Established in 1992 for the design, manufacture and marketing of
piezo-ceramic motors and electronics (for linear and rotary motion)
Subsidiary of Johnson Electric ($2.5B, 38,000 employees, 3 million motors/day)
– Saia Burges (step motors, switches, solenoids)– Nihon Mini Motor (step & dc motors for camera & dvd)– Parlex (flex circuits and contract mfg)
Nanomotion is 65 people with ~35% in the engineering and R&D. >75,000 motors in field >10,000 linear axes in the field >Shipping 700k motors in 2008, for cell phone auto focus
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Nanomotion
Theory of Operation
Traditional Piezo VS
Reversed Piezo VS
Standing Wave
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Piezo Direct and Reverse Effect
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Poling a Piezo Element
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Basic Structure of Nanomotion’s Piezoelectric Element
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Nanomotion Motor Basics Ultrasonic Standing Waves
Bending Mode Longitudinal Mode
PZT Element
Slide
+ =
Simultaneous excitation of both modesCreates motion at the tip of the motor finger
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Finite Element SimulationLongitudinal ModeBending Mode
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“Ultrasonic Standing Wave”
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Motor Ellipse
Amplitude of ellipse varies with voltage Slow speed – ellipse at the few nm level High speed- ellipse at the tens of microns The larger the ellipse, the more the mechanical
stress, the more the heat, the less the duty cycle
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Nanomotion Motor Basics
Linear Motion Rotary Motion
RotaryRotary TableTable
PZT
Linear StageLinear Stage
PZT
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Same Motor for Linear or Rotary Motion
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Motor Assembly
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Motor Features Standard motors for most operating environments Unlimited travel with small operating package (Drive
strips to 4m length) Superior move & settle & Slow speed CV Vacuum motors for high and UHV
– Up to 10-10 Torr Non-Magnetic motors / No EMI from motor No servo dither & no hysteresis Built in holding / braking without power consumption Wide range of dynamic performance
– (Resolution to 1nm, velocity from 1u/sec to 300mm/sec)
Cost effective direct drive solution
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Nanomotion Applications
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Edge Motor & ASIC forOptical Image Stabilization
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The “EDGE”
‘High volume’ industrial motor.– Low voltage– Supported by ASIC based driver– Low price in volume
Performance Characteristics– Max velocity: 150mm/sec– Max force: 30g (.3N)– Highest resolution: 1um– Requires straight slide (to 10um)
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Nanomotion Applications Bio-Medical/Pharmaceutical
– Instrumentation– Microscopy– Hand-held devices and tools (pumps, endoscopes)
Military/Security– Aperture/Shutter Control– Auto Focus– Pan & Tilt
Semiconductor– SEM & ION beam– Wafer Metrology– Storage media
Metrology and Assembly Automation Consumer Products (cell phone, digital camera)
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Nanomotion Solution
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ION Beam Etching of MEMs
4 Axis (X/Y/Z/T)Vacuum Rated
Low Magnetic Field
(VN motors, SS Bearings)
Spring Counterbalance in Z
Resolution of 100nm (available to 10nm)
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Multi Axis X Ray Inspection System
2Axis (X/Y)X-Ray Inspection
(radiation environment)
Demonstrated ability to use vibration cancellation with AB2/DC Mode.
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Multi Axis Stage
3 Axis (X/Z/T)
Laser assisted – Chemical Micromachining for Semicon & Biomedical applications.
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6 Axis Hexapod
Travel in XYZ + Pitch/Roll/Theta
Parallel Kinematics eliminating stacked axis errors
Equal stiffness in all directions
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Biomedical Application Base
Cell Imaging (Cytopathology, Gene/DNA analysis)– Microscopes– Hand held imaging tools
Surgical Robots & Manipulators (MRI compatible) Microfluidics (drug discovery & development)
– Pumps & Micro Pumps Proteomics & Dispensing End User Device Manufacturing (Angioplasty
balloons, implant devices)
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Virtual Microscopy: Scan on-the-fly
Digitized entire microscope slide with line scan operation
Motion system resolution to 50nm
X: Index Axis Y: Scan Axis Z: Auto Focus Axis Constant Velocity for scanning
and integrated Z axis for managing Cell Terrain
Table Top Machine
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Cell Imaging: Move & Settle
Rapid scan & locates 22 areas of interest (field of view) with step and repeat motion
Slide imaged in 4 min/ 360 slides per day.
Improve Sensitivity & Specificity (false positive)
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Multi Layer Tissue Imaging
Cross sectional imaging for women’s health
Lower cost diagnosis than pap smear and can be made widely available to under developed countries.
Miniature motion system to move lenses inside the body
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Cell Imaging Benefit Ability to achieve high move & settle rate due to
inherent motor braking capability Higher resolution, faster moves for increased
throughput and image accuracy. Ability to track autofocus, on-the-fly. Highest performance in smallest motor/stage
package Simple drive assembly (2 piece construction) Cost effective technology compared to other devices
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Auto Focus Axis
Resolution from 10nm to 100nm
DuraMotor option for continuous step operation
Spring counter-balance for optics
Anti-migration crossed rollers for vertical operation
Available with a variety of motor sizes
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neuroArm
neuroArm robotic system is a 2 robotic arms, each with 6
degrees of freedom for extra & intra-cranial functions
(ultimately for spinal surgery)
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Biomedical Device Applications
MRI Process (with non-magnetic motors
Robotic arm for micro surgery of the brain
MRI breast biopsy
Other diagnostic tools
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MRI Probes (Brain & Prostate)
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Prostate Boundary SpatialHeatingPattern
TargetBoundary
Direction of
rotationHeating
Applicator
A B
C
MR Tumor Ablation
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Biomedical / Bioprocessing Automation
Automation for Drug Discovery/Development
Motion modules for precise dispensing of syringes, capable of reaching 9mm pitch
Laboratory Robots for DNA Analysis
Chromatography
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Biomedical /Pharmaceutical
Flow Cytometry Cell Analysis Medical Robot (end of arm
tooling / grippers) Micro-Fluidics Dispensing Pumps
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Precise Dosagefrom the smallest availablenon-magnetic servo motors
Miniature Motors for Drug Delivery Pumps
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Non-Consumer Vision Applications Industrial Vision Applications for:
Security identification
Medical imaging
Part inspection
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Nanomotion’s expertise in combining miniature motors with small optics and electronics lends itself exceptionally well to medical devices used on the surface or internal to the body.
Miniature motor embedded in an optics module provides focus capability for gastrointestinal camera
Miniature motor/optics module for focus of endscopy
Gastro- Pill & Endoscope Auto Focus
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Military/Security Application Base
Aperture/Shutter Control Auto Focus Pan & Tilt
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Aperture & Shutter Control
Aperture/Shutter Control– Light weight– Fast response– Low power
consumption– Built in
holding/braking without power
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Auto Focus
Focus & Zoom capability– Ability for rapid
moves– Capability to hold
position with high shock load
– Small package for auto focus
Zoom Module
Linear guide
Moving lens B
Fixed lens
Moving lens A
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Pan & Tilt Assemblies
Platform used for:
Satellite tracking XRay beam focus Optics positioning
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Competitive Large Volume Application
Small motors deliver performance in a restricted package. It pans a full 360º (non-continuous) and tilts 90º, giving you more coverage than multiple fixed cameras.
No Noise Position Stability Long Distance focal
capability
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Semicon Application Base
Ebeam /Ion Beam wafer processing Mask correction machines Surface analysis equipment Wafer inspection, processing, and packaging Hard disk drive certification Other storage media
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)13 (ST Motors on Nanotechnology tool
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)24 (ST Motors+ Closed loop XYZ assembly
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Semiconductor / Electronics
E-Beam writing & inspection
Wafer Metrology Thin Film Measurement Head Testing Storage Media testing/
writing
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Disk Media Testing
Hard Disk Certification 2000 Tracks per hour Moves 1 to 15 um in
5msec & settle to 100nm.
Inspection rates increase to 3000 and 4000 tracks per hour next year
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Scan and Step
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7 Axis SEM Motion Platform
X Axis Tilt Axis Y Axis Rotary Axis (& 3 point leveling) Uses round bodied motor Bottom axis moves 65kg All motors vacuum/non-
magnetic
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Aerospace Application Base
Space Vehicles Spectrometers Sensors
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Custom Motion Platform
Vacuum and UHV motion systems
Providing high resolution positioning and stability
Complete multi-axis system with drive and control
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Metrology
3-Axis system for Optical Surface Scanning,
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Assembly / Automation
Long Travel Actuation (Travel to 4 meters)
Inspection Device Pick & Place
assemblies
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Summary
Ceramic Servo Motors deliver the most force per motor volume over conventional motor technology, making it well suited to a diverse application base of motion requirements.
Ceramic Servo Motors are robust, with the ability to work in wide range of challenging environments.
Nanomotion’s motors & amps can be used with any servo control, providing flexibility in applications.